TW228612B - - Google Patents

Info

Publication number
TW228612B
TW228612B TW081104693A TW81104693A TW228612B TW 228612 B TW228612 B TW 228612B TW 081104693 A TW081104693 A TW 081104693A TW 81104693 A TW81104693 A TW 81104693A TW 228612 B TW228612 B TW 228612B
Authority
TW
Taiwan
Application number
TW081104693A
Other languages
Chinese (zh)
Original Assignee
Empak Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Empak Inc filed Critical Empak Inc
Application granted granted Critical
Publication of TW228612B publication Critical patent/TW228612B/zh

Links

Classifications

    • H10P52/00—
    • H10P72/1912—
TW081104693A 1992-05-26 1992-06-16 TW228612B (oth)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/887,965 US5273159A (en) 1992-05-26 1992-05-26 Wafer suspension box

Publications (1)

Publication Number Publication Date
TW228612B true TW228612B (oth) 1994-08-21

Family

ID=25392239

Family Applications (1)

Application Number Title Priority Date Filing Date
TW081104693A TW228612B (oth) 1992-05-26 1992-06-16

Country Status (8)

Country Link
US (1) US5273159A (oth)
EP (1) EP0571678B1 (oth)
JP (1) JP2547369B2 (oth)
KR (1) KR0185702B1 (oth)
CA (1) CA2075654C (oth)
DE (2) DE69228377T2 (oth)
MY (2) MY109978A (oth)
TW (1) TW228612B (oth)

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CN1112725C (zh) * 1994-07-08 2003-06-25 信越半导体株式会社 半导体晶体包装容器
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USD368802S (en) 1994-10-13 1996-04-16 Gallagher Gary M 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment
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USD376688S (en) 1994-12-20 1996-12-24 Empak, Inc. Semiconductor wafer cassette transport box
TW296361B (oth) * 1995-06-26 1997-01-21 Kakizaki Seisakusho Kk
JPH09107026A (ja) * 1995-10-12 1997-04-22 Shin Etsu Polymer Co Ltd ウェーハ収納容器のウェーハカセット
CN1069086C (zh) * 1995-10-13 2001-08-01 伊帕克股份有限公司 装运容器
KR100428828B1 (ko) * 1995-10-13 2005-04-20 엠팍 인코포레이티드 300㎜적재컨테이너
US5803269A (en) * 1995-10-13 1998-09-08 Empak, Inc. 300mm shipping container
USD387903S (en) * 1995-10-13 1997-12-23 Empak, Inc. Shipping container
USD378873S (en) * 1995-10-13 1997-04-22 Empak, Inc. 300 mm microenvironment pod with door on side
USD383898S (en) * 1995-10-13 1997-09-23 Empak, Inc. Combination shipping and transport cassette
WO1997013710A1 (en) * 1995-10-13 1997-04-17 Empak, Inc. 300mm MICROENVIRONMENT POD WITH DOOR ON SIDE
JP2806853B2 (ja) * 1996-01-23 1998-09-30 九州日本電気株式会社 半導体ウェハキャリア
US6286688B1 (en) * 1996-04-03 2001-09-11 Scp Global Technologies, Inc. Compliant silicon wafer handling system
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US5699916A (en) * 1997-02-03 1997-12-23 Taiwan Semiconductor Manufacturing Company Ltd. Integrated circuit wafer container
JP3324731B2 (ja) * 1997-03-24 2002-09-17 株式会社ハイモールド 記憶ディスク収納ケース
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US5988393A (en) * 1998-06-15 1999-11-23 United Microelectronics Corp. Storage box for semiconductor wafers
US6267245B1 (en) * 1998-07-10 2001-07-31 Fluoroware, Inc. Cushioned wafer container
US6216874B1 (en) 1998-07-10 2001-04-17 Fluoroware, Inc. Wafer carrier having a low tolerance build-up
US5992638A (en) * 1998-11-11 1999-11-30 Empak, Inc. Advanced wafer shipper
KR20010053787A (ko) * 1999-12-01 2001-07-02 마이클 디. 오브라이언 웨이퍼 핸들링장치
US6401929B2 (en) * 2000-01-12 2002-06-11 Agere Systems Guardian Corp. Insert for use in transporting a wafer carrier
DE10116382C2 (de) * 2001-04-02 2003-08-28 Infineon Technologies Ag Transportbehälter für Wafer
JP3938293B2 (ja) * 2001-05-30 2007-06-27 信越ポリマー株式会社 精密基板収納容器及びその押さえ部材
US6951284B2 (en) * 2001-11-14 2005-10-04 Entegris, Inc. Wafer carrier with wafer retaining system
US7001130B2 (en) * 2001-12-18 2006-02-21 General Motors Corporation Robotic rack loading apparatus and method
US7175026B2 (en) 2002-05-03 2007-02-13 Maxtor Corporation Memory disk shipping container with improved contaminant control
US6976586B2 (en) * 2002-05-10 2005-12-20 Asm America, Inc. Delicate product packaging system
US6886692B2 (en) 2002-07-26 2005-05-03 Alfred E. Mann Institute For Biomedical Engineering At The University Of Southern California Windshield packaging system using corrugated box with horizontally-running flutes
DE10239319B4 (de) * 2002-08-27 2007-04-19 Schoeller Wavin Systems Services Gmbh Zweikomponenten Kunstoffbehälter
KR20040028156A (ko) * 2002-09-30 2004-04-03 삼성전자주식회사 웨이퍼 이송용 캐리어
JP2004210421A (ja) 2002-12-26 2004-07-29 Semiconductor Energy Lab Co Ltd 製造システム、並びに処理装置の操作方法
US20050136653A1 (en) * 2003-12-22 2005-06-23 Ramirez Jose G. Non-adhesive semiconductor wafer holder and assembly
JP2005294386A (ja) * 2004-03-31 2005-10-20 Miraial Kk 薄板支持容器用蓋体
US7578407B2 (en) * 2004-04-18 2009-08-25 Entegris, Inc. Wafer container with sealable door
JP4667769B2 (ja) * 2004-06-11 2011-04-13 信越ポリマー株式会社 基板収納容器
WO2006035894A1 (ja) * 2004-09-29 2006-04-06 Hoya Corporation 薄膜付基板の支持部材、薄膜付基板の収納容器、マスクブランク収納体、転写マスク収納体、及び薄膜付基板の輸送方法
WO2006097877A1 (en) * 2005-03-15 2006-09-21 Koninklijke Philips Electronics N.V. Cartridge for holding a plurality of disks
US8528738B2 (en) * 2006-06-13 2013-09-10 Entegris, Inc. Reusable resilient cushion for wafer container
KR101472145B1 (ko) * 2006-11-07 2014-12-12 신에츠 폴리머 가부시키가이샤 기판 수납 용기
TWI337162B (en) * 2008-07-31 2011-02-11 Gudeng Prec Industral Co Ltd A wafer container with constraints
US7971722B2 (en) * 2008-08-08 2011-07-05 Gudeng Precision Industral Co, Ltd Wafer container with restrainer
TWI400766B (zh) * 2008-08-27 2013-07-01 家登精密工業股份有限公司 具一體成形晶圓限制件模組之前開式晶圓盒
TWI343353B (en) * 2008-11-04 2011-06-11 Gudeng Prec Industral Co Ltd A wafer container having the snap-fitting constraint module
WO2010061431A1 (ja) * 2008-11-25 2010-06-03 ミライアル株式会社 ウエハ収納容器
CN102362340B (zh) * 2009-05-13 2013-12-25 未来儿株式会社 半导体晶片收纳容器
KR20130007540A (ko) * 2009-11-18 2013-01-18 인티그리스, 인코포레이티드 보편적인 디스크 운송 장치
US9472431B2 (en) 2010-03-11 2016-10-18 Entegris, Inc. Thin wafer shipper
TWI465375B (zh) 2010-06-02 2014-12-21 家登精密工業股份有限公司 一種配置有彈性件模組之晶圓盒
TWI541177B (zh) * 2010-10-19 2016-07-11 安堤格里斯公司 具晶圓緩衝件之前開式晶圓容器
US9478450B2 (en) 2012-04-09 2016-10-25 Entegris, Inc. Wafer shipper
EP2845223A4 (en) 2012-05-04 2015-12-09 Entegris Inc WAFER CONTAINER WITH DOOR INTERFACE SEAL
TWI568653B (zh) 2012-05-04 2017-02-01 恩特葛瑞斯股份有限公司 具有安裝在門上的運輸緩衝墊的晶圓容器
JP2017527997A (ja) * 2014-08-28 2017-09-21 インテグリス・インコーポレーテッド 基板容器
US11031046B2 (en) * 2019-01-05 2021-06-08 Western Digital Technologies, Inc. Disk-shaped article shipping container

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DE3413837A1 (de) * 1984-04-12 1985-10-17 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verpackung fuer halbleiterscheiben
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IT1181778B (it) * 1985-05-07 1987-09-30 Dynamit Nobel Silicon Spa Contenitore per l'immagazzinamento ed il trasporto di dischetti (fette) di silicio
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JPS6233436A (ja) * 1985-08-07 1987-02-13 Shin Etsu Handotai Co Ltd 輸送用ウエ−ハケ−ス
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JPH0729640Y2 (ja) * 1987-12-10 1995-07-05 信越ポリマー株式会社 ウェーハ容器の底部緩衝板
US4880116A (en) * 1988-03-04 1989-11-14 Fluoroware, Inc. Robotic accessible wafer shipper assembly
US5046615A (en) * 1989-04-03 1991-09-10 Fluoroware, Inc. Disk shipper
US4973488A (en) 1989-05-17 1990-11-27 Excelpro, Inc. Hydrolyzed proteinaceous milk solid and process of making
US5207324A (en) * 1991-03-08 1993-05-04 Fluoroware, Inc. Wafer cushion for shippers
US5253755A (en) * 1991-03-20 1993-10-19 Fluoroware, Inc. Cushioned cover for disk container

Also Published As

Publication number Publication date
DE571678T1 (de) 1994-04-28
MY118888A (en) 2005-02-28
EP0571678A1 (en) 1993-12-01
EP0571678B1 (en) 1999-02-03
JPH0672482A (ja) 1994-03-15
CA2075654C (en) 1997-10-28
CA2075654A1 (en) 1993-11-27
DE69228377T2 (de) 1999-06-24
DE69228377D1 (de) 1999-03-18
US5273159A (en) 1993-12-28
KR930024109A (ko) 1993-12-21
MY109978A (en) 1997-10-31
JP2547369B2 (ja) 1996-10-23
KR0185702B1 (ko) 1999-04-15

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