TW222344B - - Google Patents

Info

Publication number
TW222344B
TW222344B TW079100389A TW79100389A TW222344B TW 222344 B TW222344 B TW 222344B TW 079100389 A TW079100389 A TW 079100389A TW 79100389 A TW79100389 A TW 79100389A TW 222344 B TW222344 B TW 222344B
Authority
TW
Taiwan
Application number
TW079100389A
Other languages
Chinese (zh)
Inventor
Kim Sang-Ik
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Application granted granted Critical
Publication of TW222344B publication Critical patent/TW222344B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31058—After-treatment of organic layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
    • H01L21/31055—Planarisation of the insulating layers involving a dielectric removal step the removal being a chemical etching step, e.g. dry etching

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Local Oxidation Of Silicon (AREA)
TW079100389A 1988-12-20 1990-01-19 TW222344B (OSRAM)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1019880017008A KR910008980B1 (ko) 1988-12-20 1988-12-20 자외선을 이용한 s.o.g 박막 경화 방법
JP1332527A JPH02260534A (ja) 1988-12-20 1989-12-20 紫外線を利用したスピン・オン・ガラス薄膜の硬化方法
US07/453,781 US4983546A (en) 1988-12-20 1989-12-20 Method for curing spin-on-glass film by utilizing ultraviolet irradiation

Publications (1)

Publication Number Publication Date
TW222344B true TW222344B (OSRAM) 1994-04-11

Family

ID=19280373

Family Applications (1)

Application Number Title Priority Date Filing Date
TW079100389A TW222344B (OSRAM) 1988-12-20 1990-01-19

Country Status (4)

Country Link
US (1) US4983546A (OSRAM)
JP (1) JPH02260534A (OSRAM)
KR (1) KR910008980B1 (OSRAM)
TW (1) TW222344B (OSRAM)

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US5270267A (en) * 1989-05-31 1993-12-14 Mitel Corporation Curing and passivation of spin on glasses by a plasma process wherein an external polarization field is applied to the substrate
JP2926864B2 (ja) * 1990-04-12 1999-07-28 ソニー株式会社 銅系金属膜のエッチング方法
US5215933A (en) * 1990-05-11 1993-06-01 Kabushiki Kaisha Toshiba Method of manufacturing nonvolatile semiconductor memory device
JP2640174B2 (ja) * 1990-10-30 1997-08-13 三菱電機株式会社 半導体装置およびその製造方法
DE4135810C2 (de) * 1990-10-30 2000-04-13 Mitsubishi Electric Corp Halbleitereinrichtung mit einem Zwischenschichtisolierfilm und Verfahren zu deren Herstellung
JPH04180226A (ja) * 1990-11-15 1992-06-26 Handotai Process Kenkyusho:Kk 半導体製造装置及び半導体装置の製造方法
US5290399A (en) * 1991-02-05 1994-03-01 Advanced Micro Devices, Inc. Surface planarizing methods for integrated circuit devices
US5137844A (en) * 1991-04-05 1992-08-11 Polaroid Corporation Process to adjust output of light emitters
US5426058A (en) * 1991-07-12 1995-06-20 Sharp Kabushiki Kaisha Method of manufacturing solid-state imaging device
US5192697A (en) * 1992-01-27 1993-03-09 Chartered Semiconductor Manufacturing Pte Ltd. SOG curing by ion implantation
US6133050A (en) * 1992-10-23 2000-10-17 Symetrix Corporation UV radiation process for making electronic devices having low-leakage-current and low-polarization fatigue
US5312512A (en) * 1992-10-23 1994-05-17 Ncr Corporation Global planarization using SOG and CMP
JPH06168970A (ja) * 1992-11-27 1994-06-14 Fuji Xerox Co Ltd 半導体素子の製造方法
KR950034495A (ko) * 1994-04-20 1995-12-28 윌리엄 이.힐러 반도체 장치 제조를 위한 고 수율 광 경화 공정
US5461010A (en) * 1994-06-13 1995-10-24 Industrial Technology Research Institute Two step etch back spin-on-glass process for semiconductor planarization
DE69535488T2 (de) * 1994-08-31 2008-01-03 Texas Instruments Inc., Dallas Verfahren zur Isolierung von Leitungen unter Verwendung von Materialien mit niedriger dielektrischer Konstante und damit hergestellte Strukturen
JP3015717B2 (ja) * 1994-09-14 2000-03-06 三洋電機株式会社 半導体装置の製造方法および半導体装置
US5710460A (en) * 1995-04-21 1998-01-20 International Business Machines Corporation Structure for reducing microelectronic short circuits using spin-on glass as part of the interlayer dielectric
MY113904A (en) * 1995-05-08 2002-06-29 Electron Vision Corp Method for curing spin-on-glass film utilizing electron beam radiation
US6607991B1 (en) 1995-05-08 2003-08-19 Electron Vision Corporation Method for curing spin-on dielectric films utilizing electron beam radiation
JPH0964037A (ja) * 1995-08-23 1997-03-07 Mitsubishi Electric Corp 半導体装置の製造方法
US6268657B1 (en) 1995-09-14 2001-07-31 Sanyo Electric Co., Ltd. Semiconductor devices and an insulating layer with an impurity
US5552343A (en) * 1995-10-19 1996-09-03 Taiwan Semiconductor Manufacturing Company Method for tapered contact formation
JP2825077B2 (ja) * 1996-01-26 1998-11-18 日本電気株式会社 半導体装置の製造方法および製造装置
US6825132B1 (en) 1996-02-29 2004-11-30 Sanyo Electric Co., Ltd. Manufacturing method of semiconductor device including an insulation film on a conductive layer
US5866481A (en) * 1996-06-07 1999-02-02 Taiwan Semiconductor Manufacturing Company Ltd. Selective partial curing of spin-on-glass by ultraviolet radiation to protect integrated circuit dice near the wafer edge
KR100383498B1 (ko) 1996-08-30 2003-08-19 산요 덴키 가부시키가이샤 반도체 장치 제조방법
US6288438B1 (en) 1996-09-06 2001-09-11 Sanyo Electric Co., Ltd. Semiconductor device including insulation film and fabrication method thereof
KR100238252B1 (ko) * 1996-09-13 2000-01-15 윤종용 Sog층 큐어링방법 및 이를 이용한 반도체장치의 절연막제조방법
JP3015767B2 (ja) * 1996-12-25 2000-03-06 三洋電機株式会社 半導体装置の製造方法及び半導体装置
JP3660799B2 (ja) * 1997-09-08 2005-06-15 株式会社ルネサステクノロジ 半導体集積回路装置の製造方法
JP2975934B2 (ja) 1997-09-26 1999-11-10 三洋電機株式会社 半導体装置の製造方法及び半導体装置
US6690084B1 (en) 1997-09-26 2004-02-10 Sanyo Electric Co., Ltd. Semiconductor device including insulation film and fabrication method thereof
EP0954017A3 (en) * 1998-04-16 2000-08-09 STMicroelectronics, Inc. A semiconductor structure having an improved pre-metal dielectric stack
US6794283B2 (en) 1998-05-29 2004-09-21 Sanyo Electric Co., Ltd. Semiconductor device and fabrication method thereof
US6121130A (en) * 1998-11-16 2000-09-19 Chartered Semiconductor Manufacturing Ltd. Laser curing of spin-on dielectric thin films
EP1139404A1 (en) * 2000-03-31 2001-10-04 Applied Materials, Inc. Low thermal budget solution for PMD application using SACVD layer
US6917110B2 (en) * 2001-12-07 2005-07-12 Sanyo Electric Co., Ltd. Semiconductor device comprising an interconnect structure with a modified low dielectric insulation layer
US7520936B2 (en) * 2003-02-12 2009-04-21 Tokyo Electron Limited Hardening processing apparatus, hardening processing method, and coating film forming apparatus
TWI240959B (en) * 2003-03-04 2005-10-01 Air Prod & Chem Mechanical enhancement of dense and porous organosilicate materials by UV exposure
WO2005108469A1 (ja) * 2004-05-11 2005-11-17 Jsr Corporation 有機シリカ系膜の形成方法、有機シリカ系膜、配線構造体、半導体装置、および膜形成用組成物
JP5110239B2 (ja) * 2004-05-11 2012-12-26 Ｊｓｒ株式会社 有機シリカ系膜の形成方法、膜形成用組成物
DE102006015096B4 (de) * 2006-03-31 2011-08-18 Globalfoundries Inc. Verfahren zur Verringerung der durch Polieren hervorgerufenen Schäden in einer Kontaktstruktur durch Bilden einer Deckschicht
KR100800495B1 (ko) 2007-02-27 2008-02-04 삼성전자주식회사 반도체 장치의 제조방법
US7999355B2 (en) * 2008-07-11 2011-08-16 Air Products And Chemicals, Inc. Aminosilanes for shallow trench isolation films
US20150206794A1 (en) * 2014-01-17 2015-07-23 Taiwan Semiconductor Manufacturing Company, Ltd. Method for Removing Micro Scratches In Chemical Mechanical Polishing Processes

Family Cites Families (6)

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Publication number Priority date Publication date Assignee Title
US4775550A (en) * 1986-06-03 1988-10-04 Intel Corporation Surface planarization method for VLSI technology
US4676867A (en) * 1986-06-06 1987-06-30 Rockwell International Corporation Planarization process for double metal MOS using spin-on glass as a sacrificial layer
JP2624254B2 (ja) * 1987-05-22 1997-06-25 東京応化工業株式会社 シリカ系被膜の膜質改善方法
US4894351A (en) * 1988-02-16 1990-01-16 Sprague Electric Company Method for making a silicon IC with planar double layer metal conductors system
US4913930A (en) * 1988-06-28 1990-04-03 Wacker Silicones Corporation Method for coating semiconductor components on a dielectric film
US4885262A (en) * 1989-03-08 1989-12-05 Intel Corporation Chemical modification of spin-on glass for improved performance in IC fabrication

Also Published As

Publication number Publication date
JPH02260534A (ja) 1990-10-23
KR910008980B1 (ko) 1991-10-26
US4983546A (en) 1991-01-08
KR900010933A (ko) 1990-07-11

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