TW202002356A - Display panel and method of fabricating the same - Google Patents
Display panel and method of fabricating the same Download PDFInfo
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本發明是有關於一種顯示面板及其製造方法,且特別是有關於一種自發光的顯示面板及其製造方法。The present invention relates to a display panel and a manufacturing method thereof, and particularly to a self-luminous display panel and a manufacturing method thereof.
近年來,相較於目前主流的液晶顯示面板,有機發光二極體(Organic light-emitting diode,OLED)顯示面板因具有高色彩飽和度、應答速度快及高對比的性能表現,逐漸吸引各科技大廠的投資目光。然而,在其製造成本偏高及使用壽命無法與現行的主流顯示器相抗衡的情況下,即使OLED顯示面板具有上述優異的顯示品質,在消費端的市占率仍無法明顯提升。In recent years, organic light-emitting diode (Organic light-emitting diode, OLED) display panels have gradually attracted various technologies due to their high color saturation, fast response, and high contrast performance compared to current mainstream liquid crystal display panels. The investment vision of big factories. However, under the circumstances that its manufacturing cost is high and its service life cannot compete with current mainstream displays, even if the OLED display panel has the above-mentioned excellent display quality, the market share on the consumer side cannot be significantly improved.
為了尋求較低成本的製造方法,生產設備及相關材料的開發是許多製造商的努力方向之一,其中運用噴墨印刷(Inkjet printing,IJP)技術來製作發光材料層更是研究重點之一。由於發光材料需透過印刷噴頭(printing head)滴入或注入對應的凹槽中,因此發光材料需溶解於適合的溶劑才能進行噴吐。然而,在噴墨印刷的過程中,已噴塗在基板上的液滴,其溶劑會持續揮發,使得依序噴吐在不同區域的液滴具有不同的揮發程度,造成發光材料層在不同區域的成膜厚度也不同,進而影響顯示面板的發光均勻性。因此,如何克服上述技術瓶頸是目前科技廠所亟欲解決的課題。In order to seek a lower-cost manufacturing method, the development of production equipment and related materials is one of the efforts of many manufacturers. Among them, the use of inkjet printing (Ikjet printing, IJP) technology to make a luminescent material layer is one of the research priorities. Since the luminescent material needs to be dropped or injected into the corresponding groove through the printing head (printing head), the luminescent material needs to be dissolved in a suitable solvent in order to eject. However, in the process of inkjet printing, the droplets that have been sprayed on the substrate will continue to evaporate the solvent, so that the droplets sprayed in different regions in sequence have different degrees of volatilization, resulting in the formation of the luminescent material layer in different regions. The film thickness is also different, which further affects the uniformity of light emission of the display panel. Therefore, how to overcome the above-mentioned technical bottlenecks is an issue that the technology plant is desperately trying to solve.
本發明提供一種顯示面板,其發光均勻性佳。The invention provides a display panel with good luminous uniformity.
本發明提供一種顯示面板的製造方法,其生產良率高。The invention provides a method for manufacturing a display panel, which has a high production yield.
本發明的顯示面板,包括主動元件陣列基板、隔離結構層、第一發光材料層以及第二發光材料層。主動元件陣列基板具有顯示區及圍繞顯示區的周邊區。隔離結構層配置於主動元件陣列基板上。顯示面板具有至少由隔離結構層定義出來的第一凹槽及第二凹槽。第一凹槽與第二凹槽設置於周邊區,且顯示區位於第一凹槽與第二凹槽之間。第一發光材料層及第二發光材料層配置於主動元件陣列基板上,且分別填於第一凹槽及第二凹槽中。隔離結構層定義第一凹槽的邊緣與顯示區的邊緣之間的最短距離實質上等於隔離結構層定義第二凹槽的邊緣與顯示區的邊緣之間的最短距離。第一發光材料層的體積大於第二發光材料層的體積。The display panel of the present invention includes an active element array substrate, an isolation structure layer, a first luminescent material layer and a second luminescent material layer. The active device array substrate has a display area and a peripheral area surrounding the display area. The isolation structure layer is disposed on the active device array substrate. The display panel has a first groove and a second groove defined by at least the isolation structure layer. The first groove and the second groove are disposed in the peripheral area, and the display area is located between the first groove and the second groove. The first luminescent material layer and the second luminescent material layer are disposed on the active device array substrate and filled in the first groove and the second groove, respectively. The isolation structure layer defines the shortest distance between the edge of the first groove and the edge of the display area is substantially equal to the shortest distance between the edge of the second groove and the edge of the display area. The volume of the first luminescent material layer is greater than the volume of the second luminescent material layer.
本發明的顯示面板的製造方法,包括提供主動元件陣列基板、在主動元件陣列基板上形成隔離結構材料層、進行蝕刻步驟以及進行噴墨印刷製程。主動元件陣列基板具有顯示區及圍繞顯示區的周邊區。蝕刻步驟包括移除隔離結構材料層重疊於周邊區且位於顯示區相對兩側的兩部分,以形成定義第一凹槽及第二凹槽的隔離結構層。噴墨印刷製程包括依序在第一凹槽及第二凹槽內噴塗第一液滴及第二液滴。第一液滴的液滴量大於第二液滴的液滴量。The manufacturing method of the display panel of the present invention includes providing an active element array substrate, forming an isolation structure material layer on the active element array substrate, performing an etching step, and performing an inkjet printing process. The active device array substrate has a display area and a peripheral area surrounding the display area. The etching step includes removing two portions of the isolation structure material layer overlapping the peripheral area and located on opposite sides of the display area to form an isolation structure layer defining the first groove and the second groove. The inkjet printing process includes spraying the first droplet and the second droplet into the first groove and the second groove in sequence. The droplet volume of the first droplet is larger than the droplet volume of the second droplet.
在本發明的一實施例中,上述的顯示面板的第一凹槽具有第一深度,第二凹槽具有第二深度,且第一深度大於第二深度。In an embodiment of the invention, the first groove of the display panel has a first depth, the second groove has a second depth, and the first depth is greater than the second depth.
在本發明的一實施例中,上述的顯示面板更包括平坦層。平坦層設置於主動元件陣列基板與隔離結構層之間。第一凹槽延伸貫穿隔離結構層並伸入平坦層。第二凹槽至少延伸於隔離結構層中。平坦層在第一凹槽下方的部分所具有的厚度小於在第二凹槽下方的部分所具有的厚度。In an embodiment of the invention, the above-mentioned display panel further includes a flat layer. The flat layer is disposed between the active device array substrate and the isolation structure layer. The first groove extends through the isolation structure layer and into the flat layer. The second groove extends at least in the isolation structure layer. The portion of the flat layer below the first groove has a thickness smaller than the portion below the second groove.
在本發明的一實施例中,上述的顯示面板的隔離結構層定義出第一凹槽的部分具有第一厚度,而隔離結構層定義出第二凹槽的部分具有第二厚度,且第一厚度大於第二厚度。In an embodiment of the present invention, the portion of the isolation structure layer of the display panel defining the first groove has a first thickness, and the portion of the isolation structure layer defining the second groove has a second thickness, and the first The thickness is greater than the second thickness.
在本發明的一實施例中,上述的顯示面板更包括虛設圖案,設置於第二凹槽內,且位於第二發光材料層下方。In an embodiment of the invention, the above-mentioned display panel further includes a dummy pattern, disposed in the second groove, and located under the second luminescent material layer.
在本發明的一實施例中,上述的顯示面板更包括第一電極,設置於顯示區。第一電極位於主動元件陣列基板與隔離結構層之間。虛設圖案位於主動元件陣列基板與第二發光材料層之間,且虛設圖案及第一電極屬於同一膜層。In an embodiment of the invention, the above display panel further includes a first electrode, which is disposed in the display area. The first electrode is located between the active device array substrate and the isolation structure layer. The dummy pattern is located between the active device array substrate and the second luminescent material layer, and the dummy pattern and the first electrode belong to the same film layer.
在本發明的一實施例中,上述的顯示面板的第一凹槽於主動元件陣列基板上的垂直投影面積大於第二凹槽於主動元件陣列基板上的垂直投影面積。In an embodiment of the invention, the vertical projection area of the first groove on the active device array substrate of the display panel is larger than the vertical projection area of the second groove on the active device array substrate.
在本發明的一實施例中,上述的顯示面板的第一發光材料層的厚度大於第二發光材料層的厚度。In an embodiment of the invention, the thickness of the first luminescent material layer of the above display panel is greater than the thickness of the second luminescent material layer.
在本發明的一實施例中,上述的顯示面板更包括第三發光材料層,配置於主動元件陣列基板上,且位於顯示區中。第三發光材料層的體積大於第二發光材料層的體積,且小於第一發光材料層的體積。隔離結構層更在顯示區中定義出第三凹槽,且第三發光材料層填於第三凹槽中。In an embodiment of the invention, the above display panel further includes a third luminescent material layer, which is disposed on the active device array substrate and located in the display area. The volume of the third luminescent material layer is larger than the volume of the second luminescent material layer and smaller than the volume of the first luminescent material layer. The isolation structure layer further defines a third groove in the display area, and the third luminescent material layer is filled in the third groove.
在本發明的一實施例中,上述的顯示面板更包括第三發光材料層,配置於該主動元件陣列基板上。隔離結構層更在周邊區中定義出第三凹槽。第一凹槽、第二凹槽及第三凹槽環繞顯示區,且第三發光材料層填於第三凹槽中。第三發光材料層的體積大於第二發光材料層的體積,且小於第一發光材料層的體積。In an embodiment of the invention, the above display panel further includes a third luminescent material layer, which is disposed on the active device array substrate. The isolation structure layer further defines a third groove in the peripheral area. The first groove, the second groove and the third groove surround the display area, and the third luminescent material layer is filled in the third groove. The volume of the third luminescent material layer is larger than the volume of the second luminescent material layer and smaller than the volume of the first luminescent material layer.
在本發明的一實施例中,上述的顯示面板的第一發光材料層與第二發光材料層各自的厚度由中央向邊緣逐漸增加。In an embodiment of the invention, the thicknesses of the first luminescent material layer and the second luminescent material layer of the above-mentioned display panel gradually increase from the center to the edge.
在本發明的一實施例中,上述的顯示面板的第一發光材料層及第二發光材料層於主動元件陣列基板上的垂直投影在第一方向上分別具有第一寬度及第二寬度,且第一寬度大於第二寬度。In an embodiment of the invention, the vertical projections of the first luminescent material layer and the second luminescent material layer on the active device array substrate of the display panel have a first width and a second width in the first direction, and The first width is greater than the second width.
在本發明的一實施例中,上述的顯示面板的製造方法的蝕刻步驟更包括移除隔離結構材料層重疊於顯示區的部分,以形成第三凹槽。噴墨印刷製程更包括於噴塗第一液滴之後且噴塗第二液滴之前,在第三凹槽噴塗第三液滴。第三液滴的液滴量大於第二液滴的液滴量,且小於第一液滴的液滴量。In an embodiment of the invention, the etching step of the method for manufacturing a display panel described above further includes removing a portion of the isolation structure material layer overlapping the display area to form a third groove. The inkjet printing process further includes spraying the third droplet in the third groove after spraying the first droplet and before spraying the second droplet. The droplet volume of the third droplet is larger than the droplet volume of the second droplet and smaller than the droplet volume of the first droplet.
在本發明的一實施例中,上述的顯示面板的製造方法更包括進行乾燥烘烤步驟,使第一液滴及第二液滴各自固化而形成發光材料層。位於第一凹槽內的發光材料層的體積大於位於第二凹槽的發光材料層的體積。In an embodiment of the present invention, the above-mentioned method for manufacturing a display panel further includes a drying and baking step to solidify the first droplet and the second droplet to form a light-emitting material layer. The volume of the luminescent material layer located in the first groove is larger than the volume of the luminescent material layer located in the second groove.
在本發明的一實施例中,上述的顯示面板的製造方法,其中主動元件陣列基板還具有平坦層。蝕刻步驟更包括移除平坦層重疊於隔離結構材料層的兩部分的其中至少一者的部分。在進行蝕刻步驟後,平坦層在第一凹槽下方的部分所具有的厚度小於在第二凹槽下方的部分所具有的厚度。In an embodiment of the invention, in the method for manufacturing a display panel described above, the active device array substrate further has a flat layer. The etching step further includes removing a portion of the planar layer overlapping at least one of the two portions of the isolation structure material layer. After the etching step is performed, the portion of the flat layer below the first groove has a thickness smaller than the portion below the second groove.
在本發明的一實施例中,上述的顯示面板的製造方法更包括於主動元件陣列基板上形成虛設圖案。虛設圖案設置於第二凹槽內,且第二液滴覆蓋虛設圖案。In an embodiment of the invention, the method for manufacturing a display panel described above further includes forming a dummy pattern on the active device array substrate. The dummy pattern is disposed in the second groove, and the second droplet covers the dummy pattern.
在本發明的一實施例中,上述的顯示面板的製造方法中,在進行蝕刻步驟後,第一凹槽所占區域在第一方向上具有第一寬度。第二凹槽所占區域在第一方向上具有第二寬度,且第一寬度大於第二寬度。In an embodiment of the present invention, in the above method of manufacturing a display panel, after the etching step is performed, the area occupied by the first groove has a first width in the first direction. The area occupied by the second groove has a second width in the first direction, and the first width is greater than the second width.
基於上述,在本發明之實施例的顯示面板中,於周邊區上設置第一凹槽與第二凹槽,這兩凹槽分別設置在顯示區兩側,且填入位於顯示區一側之第一凹槽內的發光材料層的體積大於填入位於顯示區另一側之第二凹槽內的發光材料層的體積。如此,有助於提升設置在顯示區內的發光材料層的膜厚均勻性,進而達到較佳的發光均勻度。此外,本發明之實施例的顯示面板的製造方法中,在第一凹槽內噴塗發光材料液滴的步驟早於在第二凹槽內噴塗發光材料液滴,且噴入第一凹槽的液滴量大於噴入第二凹槽內的液滴量,這有助於改善噴塗在顯示區的發光材料液滴的揮發速率不均勻的情形,以提升位於顯示區之不同凹槽內的發光材料層的膜厚均勻性,進而提高生產良率。Based on the above, in the display panel according to the embodiment of the present invention, the first groove and the second groove are provided on the peripheral area, and these two grooves are respectively provided on both sides of the display area and filled in one side of the display area The volume of the luminescent material layer in the first groove is larger than the volume of the luminescent material layer filled in the second groove on the other side of the display area. In this way, it helps to improve the uniformity of the film thickness of the luminescent material layer disposed in the display area, thereby achieving better uniformity of luminescence. In addition, in the method of manufacturing a display panel according to an embodiment of the present invention, the step of spraying the luminescent material droplets in the first groove is earlier than the spraying of the luminescent material droplets in the second groove, and the spraying into the first groove The amount of droplets is greater than the amount of droplets sprayed into the second groove, which helps to improve the uneven evaporation rate of the luminescent material droplets sprayed on the display area, so as to enhance the light emission in different grooves of the display area The uniformity of the film thickness of the material layer further improves the production yield.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above-mentioned features and advantages of the present invention more obvious and understandable, the embodiments are specifically described below in conjunction with the accompanying drawings for detailed description as follows.
本文使用的「約」、「近似」、「本質上」、或「實質上」包括所述值和在本領域普通技術人員確定的特定值的可接受的偏差範圍內的平均值,考慮到所討論的測量和與測量相關的誤差的特定數量(即,測量系統的限制)。例如,「約」可以表示在所述值的一個或多個標準偏差內,或例如±30%、±20%、±15%、±10%、±5%內。再者,本文使用的「約」、「近似」、「本質上」、或「實質上」可依量測性質、切割性質或其它性質,來選擇較可接受的偏差範圍或標準偏差,而可不用一個標準偏差適用全部性質。As used herein, "about", "approximately", "essentially", or "substantially" includes the stated value and the average value within the acceptable deviation range of the specific value determined by those of ordinary skill in the art, considering The measurement in question and the specific number of errors associated with the measurement (ie, the limitations of the measurement system). For example, "about" can mean within one or more standard deviations of the stated value, or for example within ±30%, ±20%, ±15%, ±10%, ±5%. Furthermore, the terms "approximately", "approximately", "essentially", or "substantially" as used herein can select a more acceptable range of deviation or standard deviation according to measurement properties, cutting properties, or other properties. All properties are applied without a standard deviation.
在附圖中,為了清楚起見,放大了層、膜、面板、區域等的厚度。應當理解,當諸如層、膜、區域或基板的元件被稱為在另一元件「上」或「連接到」另一元件時,其可以直接在另一元件上或與另一元件連接,或者中間元件可以也存在。相反,當元件被稱為「直接在另一元件上」或「直接連接到」另一元件時,不存在中間元件。如本文所使用的,「連接」可以指物理及/或電性連接。再者,「電性連接」可為二元件間存在其它元件。In the drawings, the thickness of layers, films, panels, regions, etc., are exaggerated for clarity. It should be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "connected" to another element, it can be directly on or connected to the other element, or Intermediate elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. As used herein, "connected" may refer to physical and/or electrical connections. Furthermore, "electrical connection" may be that there are other components between the two components.
現將詳細地參考本發明的示範性實施方式,示範性實施方式的實例說明於所附圖式中。只要有可能,相同元件符號在圖式和描述中用來表示相同或相似部分。Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same element symbols are used in the drawings and description to denote the same or similar parts.
圖1為本發明之第一實施例的顯示面板10的上視示意圖。圖2A至圖2F為圖1的顯示面板10的製造流程的剖面示意圖。圖2A至圖2E對應圖1的剖線A-A’、剖線B-B’及剖線C-C’,圖2F對應圖1的剖線A-A’、剖線C-C’及剖線D-D’。圖3為圖1的顯示面板10的剖面示意圖。需說明的是,為清楚呈現起見,圖1僅繪示出顯示面板10的隔離結構層181及基板110,而顯示面板10所包括的其他可能構件將於圖2A至圖2F示出。由圖1可知,基板110具有顯示區AA及圍繞顯示區AA的周邊區PA。隔離結構層181在周邊區PA中定義出多個第一凹槽及多個第二凹槽,多個第一凹槽例如包括凹槽181a,多個第二凹槽例如包括凹槽181b,而在顯示區AA中定義出多個第三凹槽,多個第三凹槽例如包括凹槽181c,其中顯示面板10進行顯示時顯示區AA中的凹槽181c所在區域可以發出光線以呈現畫面。以下將針對圖1所示的顯示面板10的製造流程進行示範性地說明。FIG. 1 is a schematic top view of a
請參照圖2A,首先,提供一主動元件陣列基板100,其中主動元件陣列基板100包括基板110、主動元件T以及閘絕緣層130。主動元件T配置於基板110上,且具有閘極G、源極S、汲極D以及半導體圖案SC。閘絕緣層130配置在半導體圖案SC與閘極G之間。舉例而言,在本實施例中,主動元件T的閘極G可選擇性地配置在半導體圖案SC的上方,以形成頂部閘極型薄膜電晶體(top-gate TFT),但本發明並不以此為限。根據其他的實施例,主動元件T的閘極G也可配置在半導體圖案SC的下方,即閘極G位於半導體圖案SC與基板110之間,以形成底部閘極型薄膜電晶體(bottom-gate TFT)。在本實施例中,主動元件陣列基板100還可選擇性地包括緩衝層120,設置於基板110與主動元件T之間。另外,主動元件T所在區域例如為預定要顯示畫面的區域,因此,可理解,主動元件T都位在圖1的顯示區AA中,而周邊區PA可視為沒有主動元件T的區域。Please refer to FIG. 2A. First, an active
在本實施例中,半導體圖案SC可包括源極區SR、輕摻雜源極區LSR、通道區CH、輕摻雜汲極區LDR以及汲極區DR,輕摻雜源極區LSR位於源極區SR與通道區CH之間,輕摻雜汲極區LDR位於通道區CH與汲極區DR之間,且閘極G重疊於半導體圖案SC的通道區CH,但本發明並不以此為限。根據其他的實施例,半導體圖案SC可僅包括源極區SR、通道區CH及汲極區DR。In this embodiment, the semiconductor pattern SC may include a source region SR, a lightly doped source region LSR, a channel region CH, a lightly doped drain region LDR, and a drain region DR. The lightly doped source region LSR is located at the source Between the polar region SR and the channel region CH, the lightly doped drain region LDR is located between the channel region CH and the drain region DR, and the gate G overlaps the channel region CH of the semiconductor pattern SC, but the present invention does not use this Limited. According to other embodiments, the semiconductor pattern SC may include only the source region SR, the channel region CH, and the drain region DR.
承接上述,主動元件陣列基板100更包括層間絕緣層140,配置於閘絕緣層130上,且覆蓋主動元件T的閘極G。主動元件T的源極S與汲極D配置在層間絕緣層140上,且分別重疊於半導體圖案SC的不同兩區。詳細而言,主動元件T的源極S與汲極D都貫穿層間絕緣層140以及閘絕緣層130,以分別電性連接半導體圖案SC的源極區SR與汲極區DR。Following the above, the active
在本實施例中,半導體圖案SC的材質例如是低溫多晶矽(low temperature poly-silicon,LTPS)半導體,也就是說,主動元件T可以是低溫多晶矽薄膜電晶體(LTPS TFT)。然而,本發明不限於此,在其他實施例中,主動元件T也可以是非晶矽薄膜電晶體(Amorphous Silicon TFT,a-Si TFT)、微晶矽薄膜電晶體(micro-Si TFT)或金屬氧化物電晶體(Metal Oxide Transistor)。In this embodiment, the material of the semiconductor pattern SC is, for example, a low temperature poly-silicon (LTPS) semiconductor, that is, the active device T may be a low temperature poly-silicon thin film transistor (LTPS TFT). However, the invention is not limited to this. In other embodiments, the active element T may also be an amorphous silicon thin film transistor (a-Si TFT), a micro-Si thin film transistor (micro-Si TFT) or a metal Oxide transistor (Metal Oxide Transistor).
主動元件陣列基板100更包括絕緣層150及平坦層160。絕緣層150覆蓋主動元件T的源極S、汲極D以及層間絕緣層140的部分表面,並可選擇性地具有重疊於主動元件T之汲極D的開口150a。平坦層160覆蓋絕緣層150與汲極D的部分表面。The active
需說明的是,閘極G、源極S、汲極D、閘絕緣層130、層間絕緣層140、絕緣層150及平坦層160分別可由任何所屬技術領域中具有通常知識者所周知的用於顯示面板的任一閘極、任一源極、任一汲極、任一閘絕緣層、任一層間絕緣層、任一絕緣層及任一平坦層來實現,且閘極G、源極S、汲極D、閘絕緣層130、層間絕緣層140、絕緣層150及平坦層160分別可藉由任何所屬技術領域中具有通常知識者所周知的任一方法來形成,故於此不加以贅述。It should be noted that the gate electrode G, the source electrode S, the drain electrode D, the
接著,在主動元件陣列基板100上形成多個第一電極171,排列於顯示區AA。多個第一電極171設置在平坦層160上,且分別貫穿平坦層160與對應的主動元件T的汲極D電性連接。具體來說,圖2A雖為了圖面的清晰僅繪示一個主動元件T,但基板110上可形成有多個主動元件T,而各個第一電極171可以對應地連接其中一個主動元件T。在部分實施例中,第一電極171例如是光穿透式電極,光穿透式電極的材質包括金屬氧化物,例如:銦錫氧化物、銦鋅氧化物、鋁錫氧化物、鋁鋅氧化物、或其它合適的氧化物、或者是上述至少兩者之堆疊層,但本發明並不以此為限。在其他實施例中,第一電極171也可以是反射式電極,反射式電極的材質包括金屬、合金、金屬材料的氮化物、金屬材料的氧化物、金屬材料的氮氧化物、或其他合適的材料、或是金屬材料與其他導電材料的堆疊層。Next, a plurality of
另一方面,主動元件陣列基板100還可選擇性地包括多條訊號線,例如包括訊號線SL1及訊號線SL2,其中訊號線SL1例如是掃描線、資料線或電源線,訊號線SL2例如是周邊走線,但本發明並不以此為限。在本實施例中,基於導電性的考量,訊號線SL1及訊號線SL2的材料一般是使用金屬材料。然而,本發明不限於此,根據其他實施例,訊號線SL1及訊號線SL2也可使用其他導電材料,例如:合金、金屬材料的氮化物、金屬材料的氧化物、金屬材料的氮氧化物、或其他合適的材料、或是金屬材料與其他導電材料的堆疊層。On the other hand, the active
請參照圖2B,接著,在主動元件陣列基板100上形成隔離結構材料層180。隔離結構層180覆蓋第一電極171及平坦層160的部分表面。請參照圖2C,在形成隔離結構材料層180後,進行一蝕刻步驟,移除隔離結構材料層180的多個部分以形成顯示面板10的隔離結構層181及至少由隔離結構層181所定義的多個凹槽。在本實施例中,蝕刻步驟還可選擇性地包括移除平坦層160在重疊於隔離結構材料層180之所述多個部分的至少一部分,但本發明並不以此為限。Please refer to FIG. 2B. Next, an isolation
由圖1可知,多個凹槽可陣列排列於基板110上,而多個凹槽例如包括凹槽181a、凹槽181b及凹槽181c,其中凹槽181c設置於基板110的顯示區AA,且凹槽181a及凹槽181b分別設置於顯示區AA相對兩側的周邊區PA。每一凹槽所占區域於基板110上的垂直投影面積大致上可選擇性地相同,但本發明並不以此為限。另外,隔離結構層181定義凹槽181a的邊緣與顯示區AA所占區域的邊緣於基板110上的垂直投影之間的最短距離S1實質上等於隔離結構層181定義凹槽181b的邊緣與顯示區AA所占區域的邊緣於基板110上的垂直投影之間的最短距離S2。所有的凹槽181c都位在顯示區AA內且所有的凹槽181a與凹槽181b都不在顯示區AA內。As can be seen from FIG. 1, a plurality of grooves can be arrayed on the
請參照圖2C,在本實施例中,位於周邊區PA的凹槽181a與凹槽181b都可延伸貫穿隔離結構層181,而位於顯示區AA的凹槽181c也延伸貫穿隔離結構層181並暴露出第一電極171的部分表面。此外,凹槽181a還可選擇性地伸入平坦層160。舉例而言,平坦層160在凹槽181a下方的部分所具有的厚度t1小於平坦層160在凹槽181b下方的部分所具有的厚度t2,但本發明並不以此為限。換句話說,凹槽181a在垂直基板110的方向上所具有的深度d1大於凹槽181b在垂直基板110的方向上所具有的深度d2。2C, in this embodiment, both the
在一些實施例中,位在周邊區PA的多個凹槽也可不貫穿隔離結構層181,不過凹槽181a的深度d1仍大於凹槽181b的深度d2。也就是說,隔離結構層181在凹槽181a下方的部分所具有的厚度小於隔離結構層181在凹槽181b下方的部分所具有的厚度。如此,凹槽181a相較於凹槽181b而言具有較大的深度,因此能提供較大的容置空間。In some embodiments, the plurality of grooves in the peripheral area PA may not penetrate the
在蝕刻步驟完成後,進行噴墨印刷製程,依序在多個凹槽中噴塗欲形成為發光結構的液滴。舉例而言,請參照圖1,噴墨印刷製程可由顯示面板10的其中一個角落開始,先沿製程路徑P1橫越整個顯示面板10的寬度並在製程路徑P1上的各個凹槽內滴入液滴,接著沿製程路徑P2進行同樣的流程,直到沿製程路徑Pn橫越整個顯示面板10的寬度並在製程路徑Pn上的各個凹槽內滴入液滴後,即可在整個顯示面板10上的所有凹槽內都填入液滴。在本實施例中,相鄰兩個製程路徑(例如製程路徑P1與製程路徑P2)的方向為相同,但在其他實施例中,相鄰兩個製程路徑的方向可為相反。After the etching step is completed, an inkjet printing process is performed, and droplets to be formed into a light-emitting structure are sprayed in multiple grooves in sequence. For example, referring to FIG. 1, the inkjet printing process may start from one corner of the
換言之,請參照圖2D,本實施例的噴墨印刷製程例如是依序在凹槽181a、凹槽181c及凹槽181b中噴塗液滴LD1、液滴LD2及液滴LD3。由圖2D可知,液滴LD1的液滴量大於液滴LD3的液滴量。在本實施例中,液滴LD1的液滴量可選擇性地大於液滴LD2的液滴量,且液滴LD3的液滴量可選擇性地小於液滴LD2的液滴量,但本發明並不以此為限。在噴墨印刷的過程中,搭載液滴之液體的噴頭係先在凹槽181a內進行噴塗,才接著在凹槽181c內進行噴塗,再於凹槽181b內進行噴塗。也就是說,位於周邊區PA的凹槽181a與181b中,先被噴塗的會被滴入較多量的液滴,而後被噴塗的會被滴入相對較少量的液滴。另外,位於顯示區AA的凹槽181c可被滴入恆定量的液滴,並不因噴墨步驟的順序而變化。In other words, please refer to FIG. 2D, the inkjet printing process of this embodiment is, for example, spraying droplets LD1, LD2, and LD3 in the
在本實施例中,液滴LD1、液滴LD2及液滴LD3的材質可選擇性地包括發光結構材料及溶劑,其中發光結構材料例如包括電洞注入材料、電洞傳輸材料、發光材料、電子傳輸材料及電子注入材料,溶劑例如是可用以溶解發光結構材料且具有揮發性的液體。詳細而言,在噴墨印刷的過程中,由於先進行噴塗的凹槽181a被滴入較多液滴量的液滴LD1,容納於凹槽181a中的揮發性溶劑也較多。在凹槽181a內被滴入液滴LD1後,直到所有凹槽都被滴入液滴的期間,凹槽181a內的液滴LD1的揮發性溶劑可能會揮發。因為容納於凹槽181a中揮發性溶劑較多,可在凹槽181a附近產生較大的蒸氣壓。如此,顯示區AA內鄰近於凹槽181a的凹槽181c雖較顯示區AA內其他區域的凹槽181c更早被噴塗了液滴LD2,其液滴LD2不容易在這段期間因溶劑的揮發而過早乾燥。因此,顯示區AA內的多個凹槽181c雖在不同時間被滴入液滴LD2,但完成噴墨印刷製程後,所有凹槽181c內的液滴LD2所具有的溶劑含量差異不大。如此,有助於提升位於不同區域的發光結構材料在乾燥後的成膜均勻性。In this embodiment, the material of the droplet LD1, the droplet LD2, and the droplet LD3 may optionally include a light emitting structure material and a solvent, wherein the light emitting structure material includes, for example, a hole injection material, a hole transmission material, a light emitting material, an electron The transport material and the electron injection material and the solvent are, for example, volatile liquids that can be used to dissolve the light emitting structure material. In detail, in the process of inkjet printing, since the
請參照圖2E,接著,進行乾燥及烘烤步驟,使滴入或注入每一凹槽的液滴其溶劑能揮發去除,並使發光結構材料固化而形成對應的發光材料層190。在本實施例中,形成在凹槽181a中的發光材料層190的體積大於形成在凹槽181b中的發光材料層190的體積。另外,形成在凹槽181c中的發光材料層190的體積可選擇性地小於形成在凹槽181a中的發光材料層190的體積,且可選擇性地大於形成在凹槽181b中的發光材料層190的體積,但本發明並不以此為限。Please refer to FIG. 2E. Next, drying and baking steps are carried out, so that the solvent of the droplets dropped into or injected into each groove can be volatilized and removed, and the light emitting structure material is solidified to form the corresponding light emitting
從另一觀點而言,在本實施例中,位於凹槽181a中的發光材料層190所具有的最小厚度t3可選擇性地大於位於凹槽181b中的發光材料層190所具有的最小厚度t4,但本發明並不以此為限。值得一提的是,發光材料層190的厚度由中央向邊緣逐漸增加,也就是說,發光材料層190在靠近凹槽邊緣的部分所具有的厚度大於在遠離凹槽邊緣的部分所具有的厚度。From another point of view, in this embodiment, the minimum thickness t3 of the
請參照圖1及圖2F,隔離結構層181於周邊區PA中所定義的多個凹槽還包括凹槽181d,其中凹槽181a、凹槽181b及凹槽181d分別位於周邊區PA的不同部份且環繞顯示區AA。舉例而言,在圖2D所述的噴墨印刷的過程中,液滴噴塗的順序依序為凹槽181a、凹槽181d及凹槽181b,並且填於凹槽181d中的發光材料層190的體積大於填於凹槽181b中的發光材料層190的體積,且小於填於凹槽181a中的發光材料層190的體積。在部分實施例中,填於凹槽181d中的發光材料層190的體積可選擇性地小於填於凹槽181c中的發光材料層190。在另一部分實施例中,填於凹槽181d中的發光材料層190的體積也可大於填於凹槽181c中的發光材料層190。1 and 2F, the plurality of grooves defined in the peripheral area PA of the
由圖3可知,在本實施例中,顯示面板10具有形成於凹槽181a、181b與181c中的多個發光結構200。各發光結構200可包括依序堆疊於第一電極171上的電洞注入層191、電洞傳輸層192、發光層193及電子傳輸層194,其中電洞注入層191、電洞傳輸層192及發光層193各自可採用圖2D與2E中的發光材料層190的製作方式製作而成。舉例而言,在本實施例中,電洞注入層191、電洞傳輸層192、發光層193的形成方式各自包括先將對應的發光結構材料以噴墨的方式滴入或注入隔離結構層181所定義的多個凹槽,再將滴入或注入的材料進行乾燥固化而形成對應的膜層。需說明的是,本發明並不加以限定透過噴墨印刷製程所形成的發光材料層的種類及數量,任何所屬技術領域中具有通常知識者可依據發光材料的製程特性及需求,調整適於採用噴墨印刷方式進行成膜的發光材料層的數量。As can be seen from FIG. 3, in this embodiment, the
特別一提的是,在顯示面板10的製造流程中,電洞注入層191固化後才進行電洞傳輸層192的噴墨印刷步驟,且在電洞傳輸層192固化後才進行發光層193的噴墨印刷步驟。如此,電洞注入層191、電洞傳輸層192及發光層193各自的厚度可藉由噴墨印刷的步驟來控制,且電洞注入層191、電洞傳輸層192及發光層193的材料彼此不會在噴墨印刷的過程中發生混染。另外,電洞注入層191、電洞傳輸層192及發光層193的堆疊在此僅是舉例說明之用,在其他的實施例中,電洞注入層191、電洞傳輸層192及發光層193的任相鄰兩層之間可選擇性地包含有一或多層其他的膜層。In particular, in the manufacturing process of the
另一方面,在噴墨印刷製程及乾燥烘烤步驟後,還可利用例如熱蒸鍍(thermal evaporation)的方式於發光層193上形成電子傳輸層194,以完成多層堆疊的發光結構200。在一些實施例中,電子傳輸層194也可透過類似圖2D與圖2E的噴墨印刷的方式形成於發光層193上。接著,在隔離結構層181及發光結構200上形成第二電極172,第二電極172覆蓋隔離結構層181及發光結構200。詳細而言,在本實施例中,第二電極172可連續地由隔離結構層181上方,順應於隔離結構層181的側壁延伸至發光結構200上方並且覆蓋發光結構200。特別是,在一些實施例中,第二電極172可與發光結構200上的電子傳輸層194採用相同的製作方式形成,例如熱蒸鍍。第二電極172可具有大致均勻的膜層厚度。On the other hand, after the inkjet printing process and the drying and baking step, the
承接上述,在本實施例中,第二電極172例如是光穿透式電極,光穿透式電極的材質包括金屬氧化物,例如:銦錫氧化物、銦鋅氧化物、鋁錫氧化物、鋁鋅氧化物、或其它合適的氧化物、或者是上述至少兩者之堆疊層,但本發明並不以此為限。在其他實施例中,第二電極172也可以是反射式電極,反射式電極的材質包括金屬、合金、金屬材料的氮化物、金屬材料的氧化物、金屬材料的氮氧化物、或其他合適的材料、或是金屬材料與其他導電材料的堆疊層。於此,便完成本實施例的顯示面板10。Following the above, in this embodiment, the
由圖1及圖3可知,顯示面板10包括主動元件陣列基板100、隔離結構層181、第一電極171、發光結構200及第二電極172。隔離結構層181在顯示面板10中定義出多個凹槽,而發光結構200填於各個凹槽中。多個凹槽例如包括凹槽181a、凹槽181b及凹槽181c。填於凹槽181c的發光結構200都夾於第一電極171與第二電極172之間且可經由主動元件T的驅動而發光以作為顯示元件之用。因此,凹槽181c所在區域可以視為顯示區AA。填於凹槽181a與凹槽181b的發光結構200都不用作顯示元件。因此,凹槽181a及凹槽181b所在區域可以視為周邊區PA,且凹槽181a及凹槽181b分別位於顯示區AA相對兩側。由於發光結構200中的發光層193可採有機發光材料製作,顯示面板10實質上為有機發光顯示面板。As can be seen from FIGS. 1 and 3, the
在本實施例中,第一電極171與第二電極172例如其中一者是光穿透式電極層,而另一者可以是光穿透式電極層或反射式電極層。發光結構200包括依序堆疊於第一電極171上的電洞注入層191、電洞傳輸層192、發光層193及電子傳輸層194。本實施例的顯示面板10例如是頂發光(top emission)型態的顯示面板。然而,本發明不限於此,根據其他實施例,顯示面板10也可以是底發光(bottom emission)型態的顯示面板。In this embodiment, for example, one of the
在此,顯示區AA的邊緣例如由位於最外圍的凹槽181b的外邊緣所界定,也可能為位於最外圍的凹槽181b與鄰近的凹槽181a或181b之間的交界處。隔離結構層181定義凹槽181a的邊緣與顯示區AA的邊緣之間的最短距離S1實質上等於隔離結構層181定義凹槽181b的邊緣與顯示區AA的邊緣之間的最短距離S2。此外,位於凹槽181a中的發光材料層的體積大於位於凹槽181b中的發光材料層的體積。也就是說,如果凹槽181a、181b與181c可以採等間隔、等間距的方式設置。不過,凹槽181a、181b與181c內所填的發光結構200的體積可以不相同。Here, the edge of the display area AA is defined by, for example, the outer edge of the
圖4為本發明之第二實施例的顯示面板20的剖線示意圖。請參照圖4,本實施例的顯示面板20與圖2F的顯示面板10的差異在於:顯示面板20還可選擇性地包括虛設圖案175,設置於凹槽181b內,且位於發光結構200下。此外,顯示面板20的多個凹槽僅由隔離結構層181定義。也就是說,顯示面板20的製造方法還可選擇性地包括於主動元件陣列基板100上形成虛設圖案175。4 is a schematic cross-sectional view of a display panel 20 according to a second embodiment of the invention. Please refer to FIG. 4. The difference between the display panel 20 of this embodiment and the
在本實施例中,虛設圖案175的材質可包括金屬、合金、金屬材料的氮化物、金屬材料的氧化物、金屬材料的氮氧化物、或其他合適的材料、或是金屬材料與其他導電材料的堆疊層。另外,虛設圖案175及第一電極171可選擇性地屬於同一膜層,且彼此間隔開來,也就是說,虛設圖案175電性獨立於第一電極171。In this embodiment, the material of the
圖5為本發明之第三實施例的顯示面板30的剖線示意圖。請參照圖5,本實施例的顯示面板30與圖2F的顯示面板10的差異在於:顯示面板30的隔離結構層181-1定義凹槽181a的部分具有厚度t5,而隔離結構層181-1定義凹槽181b的部分具有厚度t6,且厚度t5大於厚度t6。5 is a schematic cross-sectional view of a
圖6為本發明之第四實施例的顯示面板40的上視示意圖。圖7為圖6的顯示面板40的剖面示意圖。請參照圖6及圖7,本實施例的顯示面板40與圖2F的顯示面板10的差異在於:顯示面板40的隔離結構層181-2所定義的凹槽181a所占區域於主動元件陣列基板100上的垂直投影面積大於凹槽181b所占區域於主動元件陣列基板100上的垂直投影面積。6 is a schematic top view of a
舉例而言,凹槽181a所占區域在基板110上的垂直投影在方向z上具有寬度W1,凹槽181b所占區域在基板110上的垂直投影在方向z上具有寬度W2,而寬度W1可選擇性地大於寬度W2。換句話說,填於凹槽181a的發光材料層190於基板110上的垂直投影在方向z上的寬度可選擇性地大於填於凹槽181b的發光材料層190於基板110上的垂直投影在方向z上的寬度。For example, the vertical projection of the area occupied by the
綜上所述,在本發明之實施例的顯示面板中,於周邊區上設置第一凹槽及第二凹槽,這兩凹槽分別設置在顯示區兩側,且填入位於顯示區一側之第一凹槽內的發光材料層的體積大於填入位於顯示區另一側之第二凹槽內的發光材料層的體積。如此,有助於提升設置在顯示區的發光材料層的膜厚均勻性,進而達到較佳的發光均勻度。此外,本發明之實施例的顯示面板的製造方法中,在第一凹槽內噴塗發光材料液滴的的步驟早於在第二凹槽內噴塗發光材料液滴,且噴入第一凹槽的液滴量大於噴入第二凹槽內的液滴量,這有助於改善噴塗在顯示區的發光材料液滴的揮發速率不均勻的情形,以提升位於顯示區之不同凹槽內的發光材料層的膜厚均勻性,進而提高生產良率。In summary, in the display panel according to the embodiment of the present invention, the first groove and the second groove are provided on the peripheral area. The two grooves are respectively provided on both sides of the display area and filled in The volume of the luminescent material layer in the first groove on the side is larger than the volume of the luminescent material layer filled in the second groove on the other side of the display area. In this way, it helps to improve the uniformity of the film thickness of the luminescent material layer provided in the display area, and thus achieve a better uniformity of luminescence. In addition, in the method for manufacturing a display panel according to an embodiment of the present invention, the step of spraying the luminescent material droplets in the first groove is earlier than the step of spraying the luminescent material droplets in the second groove, and sprayed into the first groove The amount of droplets is greater than the amount of droplets sprayed into the second groove, which helps to improve the uneven evaporation rate of the luminescent material droplets sprayed on the display area, so as to enhance the different grooves located in the display area The thickness uniformity of the luminescent material layer further improves the production yield.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed as above with examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be subject to the scope defined in the appended patent application.
10、20、30、40‧‧‧顯示面板100‧‧‧主動元件陣列基板110‧‧‧基板120‧‧‧緩衝層130‧‧‧閘絕緣層140‧‧‧層間絕緣層150‧‧‧絕緣層150a‧‧‧開口160‧‧‧平坦層171‧‧‧第一電極172‧‧‧第二電極175‧‧‧虛設圖案180‧‧‧隔離結構材料層181、181-1、181-2‧‧‧隔離結構層181a、181b、181c‧‧‧凹槽190‧‧‧發光材料層191‧‧‧電洞注入層192‧‧‧電洞傳輸層193‧‧‧發光層194‧‧‧電子傳輸層200‧‧‧發光結構AA‧‧‧顯示區CH‧‧‧通道區D‧‧‧汲極DR‧‧‧汲極區d1、d2‧‧‧深度G‧‧‧閘極LDR‧‧‧輕摻雜汲極區LD1~LD3‧‧‧液滴LSR‧‧‧輕摻雜源極區PA‧‧‧周邊區S‧‧‧源極SC‧‧‧半導體圖案SL1、SL2‧‧‧訊號線SR‧‧‧源極區S1、S2‧‧‧距離T‧‧‧主動元件t1、t2、t3、t4、t5、t6‧‧‧厚度W1、W2‧‧‧寬度z‧‧‧方向A-A’、B-B’、C-C’、D-D’、E-E’、F-F’、G-G’‧‧‧剖線P1、P2、Pn‧‧‧製程路徑10, 20, 30, 40‧‧‧ Display panel 100‧‧‧ Active element array substrate 110‧‧‧Substrate 120‧‧‧Buffer layer 130‧‧‧ Gate insulation layer 140‧‧‧Interlayer insulation layer 150‧‧‧ Insulation Layer 150a‧‧‧Open 160‧‧‧Flat layer 171‧‧‧First electrode 172‧‧‧Second electrode 175‧‧‧Dummy pattern 180‧‧‧Isolation structure material layer 181, 181-1, 181-2‧ ‧‧Isolation structure layer 181a, 181b, 181c ‧‧‧ groove 190‧‧‧ light emitting material layer 191‧‧‧ hole injection layer 192‧‧‧ hole transmission layer 193‧‧‧ light emitting layer 194‧‧‧ electron transmission Layer 200‧‧‧Lighting structure AA‧‧‧Display area CH‧‧‧Channel area D‧‧‧Drain DR‧‧‧Drain area d1, d2‧‧‧Depth G‧‧‧Gate LDR‧‧‧Light Doped drain region LD1~LD3 ‧‧‧ droplet LSR‧‧‧ lightly doped source region PA‧‧‧ peripheral region S‧‧‧ source SC‧‧‧semiconductor pattern SL1, SL2‧‧‧ signal line SR ‧‧‧ Source region S1, S2‧‧‧ Distance T‧‧‧ Active components t1, t2, t3, t4, t5, t6‧‧‧‧ Thickness W1, W2‧‧‧Width z‧‧‧ Direction A-A' , B-B', C-C', D-D', E-E', F-F', G-G' ‧‧‧ Pitch line P1, P2, Pn‧‧‧ Process path
圖1為本發明之第一實施例的顯示面板的上視示意圖。 圖2A至圖2F為圖1的顯示面板的製造流程的剖面示意圖。 圖3為圖1的顯示面板的剖面示意圖。 圖4為本發明之第二實施例的顯示面板的剖線示意圖。 圖5為本發明之第三實施例的顯示面板的剖線示意圖。 圖6為本發明之第四實施例的顯示面板的上視示意圖。 圖7為圖6的顯示面板的剖面示意圖。FIG. 1 is a schematic top view of a display panel according to a first embodiment of the invention. 2A to 2F are schematic cross-sectional views of the manufacturing process of the display panel of FIG. 1. 3 is a schematic cross-sectional view of the display panel of FIG. 1. 4 is a schematic cross-sectional view of a display panel according to a second embodiment of the invention. 5 is a schematic cross-sectional view of a display panel according to a third embodiment of the invention. 6 is a schematic top view of a display panel according to a fourth embodiment of the invention. 7 is a schematic cross-sectional view of the display panel of FIG. 6.
10‧‧‧顯示面板 10‧‧‧Display panel
100‧‧‧主動元件陣列基板 100‧‧‧Active element array substrate
110‧‧‧基板 110‧‧‧ substrate
120‧‧‧緩衝層 120‧‧‧buffer layer
130‧‧‧閘絕緣層 130‧‧‧Gate insulation
140‧‧‧層間絕緣層 140‧‧‧Interlayer insulation
150‧‧‧絕緣層 150‧‧‧Insulation
160‧‧‧平坦層 160‧‧‧flat layer
171‧‧‧第一電極 171‧‧‧First electrode
172‧‧‧第二電極 172‧‧‧Second electrode
181‧‧‧隔離結構層 181‧‧‧Isolated structural layer
181a、181b、181c‧‧‧凹槽 181a, 181b, 181c‧‧‧groove
191‧‧‧電洞注入層 191‧‧‧hole injection layer
192‧‧‧電洞傳輸層 192‧‧‧Electric tunnel transmission layer
193‧‧‧發光層 193‧‧‧luminous layer
194‧‧‧電子傳輸層 194‧‧‧Electronic transmission layer
200‧‧‧發光結構 200‧‧‧Lighting structure
AA‧‧‧顯示區 AA‧‧‧Display area
CH‧‧‧通道區 CH‧‧‧Channel area
D‧‧‧汲極 D‧‧‧ Jiji
DR‧‧‧汲極區 DR‧‧‧Drainage
G‧‧‧閘極 G‧‧‧Gate
LDR‧‧‧輕摻雜汲極區 LDR‧‧‧Lightly doped drain region
LSR‧‧‧輕摻雜源極區 LSR‧‧‧Lightly doped source region
PA‧‧‧周邊區 PA‧‧‧ surrounding area
S‧‧‧源極 S‧‧‧Source
SC‧‧‧半導體圖案 SC‧‧‧Semiconductor pattern
SL1、SL2‧‧‧訊號線 SL1, SL2‧‧‧Signal cable
SR‧‧‧源極區 SR‧‧‧Source
T‧‧‧主動元件 T‧‧‧Active components
A-A’、B-B’、C-C’‧‧‧剖線 A-A’, B-B’, C-C’ ‧‧‧ section line
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