TW201942077A - 膜片裝置的製造方法以及膜片裝置 - Google Patents

膜片裝置的製造方法以及膜片裝置 Download PDF

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Publication number
TW201942077A
TW201942077A TW107146893A TW107146893A TW201942077A TW 201942077 A TW201942077 A TW 201942077A TW 107146893 A TW107146893 A TW 107146893A TW 107146893 A TW107146893 A TW 107146893A TW 201942077 A TW201942077 A TW 201942077A
Authority
TW
Taiwan
Prior art keywords
diaphragm
sealing material
substrate
diaphragm device
manufacturing
Prior art date
Application number
TW107146893A
Other languages
English (en)
Chinese (zh)
Inventor
白神徹
Original Assignee
日商日本電氣硝子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日本電氣硝子股份有限公司 filed Critical 日商日本電氣硝子股份有限公司
Publication of TW201942077A publication Critical patent/TW201942077A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06—Joining glass to glass by processes other than fusing
    • C03C27/10—Joining glass to glass by processes other than fusing with the aid of adhesive specially adapted for that purpose
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/10—Characterised by the construction of the motor unit the motor being of diaphragm type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J3/00—Diaphragms; Bellows; Bellows pistons
    • F16J3/02—Diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Reciprocating Pumps (AREA)
TW107146893A 2018-03-28 2018-12-25 膜片裝置的製造方法以及膜片裝置 TW201942077A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018062378A JP7104879B2 (ja) 2018-03-28 2018-03-28 ダイヤフラム装置の製造方法及びダイヤフラム装置
JP2018-062378 2018-03-28

Publications (1)

Publication Number Publication Date
TW201942077A true TW201942077A (zh) 2019-11-01

Family

ID=68061116

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107146893A TW201942077A (zh) 2018-03-28 2018-12-25 膜片裝置的製造方法以及膜片裝置

Country Status (3)

Country Link
JP (1) JP7104879B2 (ja)
TW (1) TW201942077A (ja)
WO (1) WO2019187410A1 (ja)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0579460A (ja) * 1991-09-20 1993-03-30 Seiko Epson Corp マイクロポンプの製造方法
JPH11159640A (ja) * 1997-11-26 1999-06-15 Nippon Asuko Kk ダイアフラムの保持構造
JP2008180161A (ja) 2007-01-25 2008-08-07 Star Micronics Co Ltd ダイヤフラムポンプ
JP2009156253A (ja) 2007-12-05 2009-07-16 Star Micronics Co Ltd ポンプ
JP2012169068A (ja) 2011-02-10 2012-09-06 Canon Inc 気密容器及び画像表示装置の製造方法
JP5869946B2 (ja) 2012-04-09 2016-02-24 浜松ホトニクス株式会社 ガラス溶着方法
JP6172711B2 (ja) 2012-07-05 2017-08-02 国立研究開発法人理化学研究所 マイクロチップ用の流体制御デバイスおよびその利用

Also Published As

Publication number Publication date
JP7104879B2 (ja) 2022-07-22
WO2019187410A1 (ja) 2019-10-03
JP2019173645A (ja) 2019-10-10

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