TW201725672A - 薄膜覆晶封裝 - Google Patents

薄膜覆晶封裝 Download PDF

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TW201725672A
TW201725672A TW105138764A TW105138764A TW201725672A TW 201725672 A TW201725672 A TW 201725672A TW 105138764 A TW105138764 A TW 105138764A TW 105138764 A TW105138764 A TW 105138764A TW 201725672 A TW201725672 A TW 201725672A
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wafer
chip package
heat dissipation
film
layer
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TWI626718B (zh
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黃文靜
林泰宏
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聯詠科技股份有限公司
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Abstract

一種薄膜覆晶封裝包括一薄膜基板、一晶片及一散熱片材。薄膜基板包括一第一表面。晶片設置於第一表面上且沿晶片的一第一軸線具有一晶片長度。散熱片材包括一覆蓋部及一第一延伸部,第一延伸部連接至覆蓋部並貼附至第一表面。覆蓋部至少局部地覆蓋晶片並沿第一軸線具有一第一長度。第一延伸部沿第一軸線具有一第二長度,第二長度實質上長於覆蓋部的第一長度,且覆蓋部暴露出晶片的一側面,其中側面連接晶片的一頂面與一底面。

Description

薄膜覆晶封裝
本發明是有關於一種晶片封裝,且特別是有關於一種薄膜覆晶封裝。
在半導體生產中,積體電路(integrated circuit,IC)的製造可被劃分為三個不同的階段,即,晶片製作階段、積體電路製作階段及例如應用薄膜覆晶(chip-on-film,COF)封裝等的積體電路封裝階段。
為加快自薄膜覆晶封裝的晶片散熱,在將晶片透過凸塊(bump)電連接至薄膜基板之後,通常利用導熱膠(thermal conductive glue)將散熱片材貼附至薄膜基板的頂面以覆蓋整個晶片或貼附至薄膜基板的與晶片相對的底面。傳統上,在將散熱片材貼附於薄膜基板上以覆蓋晶片的過程中,難以使散熱片材與晶片緊密貼附在一起,因此,在晶片與散熱片材之間常常存在氣隙(air gap)。如此,在後續的熱製程中,被困在晶片與散熱片材之間的空氣會膨脹,因而可能導致散熱片材與晶片分離,並降低晶片封裝的可靠性。此外,由於空氣的導熱性相當低,因此,被困在晶片與散熱片材之間的空氣也會影響晶片產生的熱傳導至散熱片材的效率。
本發明提供一種薄膜覆晶封裝,其具有優異的散熱效率及結構可靠度。
本發明的薄膜覆晶封裝,薄膜覆晶封裝包括薄膜基板、晶片及散熱片材。薄膜基板包括第一表面。晶片設置於第一表面上且沿晶片的第一軸線具有晶片長度。散熱片材包括覆蓋部及第一延伸部,第一延伸部連接至覆蓋部並貼附至第一表面。覆蓋部至少局部地覆蓋晶片並沿第一軸線具有第一長度。第一延伸部沿第一軸線具有第二長度,第二長度實質上長於覆蓋部的第一長度,且覆蓋部暴露出晶片的側面,其中側面連接晶片的頂面與底面。
在本發明的一實施例中,上述的第一長度實質上等於或短於晶片長度,使得覆蓋部暴露出晶片的側面。
在本發明的一實施例中,上述的第一長度實質上長於晶片長度,且覆蓋部在晶片的頂面上方懸伸以暴露出晶片的側面。
在本發明的一實施例中,上述的晶片設置於薄膜基板的週邊區上。
在本發明的一實施例中,上述的晶片設置於薄膜基板的中心區處。
在本發明的一實施例中,上述的散熱片材更包括第二延伸部,且覆蓋部連接於第一延伸部與第二延伸部之間。
在本發明的一實施例中,上述的散熱片材包括散熱層及保護層,散熱層貼附至薄膜基板及晶片,且保護層完全覆蓋散熱層。
在本發明的一實施例中,上述的保護層包括絕緣膜。
在本發明的一實施例中,上述的散熱層包括金屬箔或石墨薄膜。
在本發明的一實施例中,上述的散熱片材更包括第一黏著層,且散熱層通過第一黏著層貼附至薄膜基板及晶片。
在本發明的一實施例中,上述的保護層的尺寸大於散熱層的尺寸,且在保護層的輪廓線與散熱層的輪廓線之間保持有保護距離。
在本發明的一實施例中,上述的散熱片材更包括第二黏著層,第二黏著層形成於保護層的黏著表面上且貼附至散熱層。
在本發明的一實施例中,上述的保護層包括一邊界區,邊界區環繞保護層的黏著表面的邊界,且第二黏著層暴露出保護層的邊界區。
在本發明的一實施例中,上述的薄膜覆晶封裝更包括一輔助散熱片材,輔助散熱片材設置於薄膜基板的第二表面上,其中第二表面與薄膜基板的第一表面相對。
基於上述,在本發明中,薄膜覆晶封裝利用散熱片材,散熱片材包括覆蓋部及至少一個延伸部,其中覆蓋部覆蓋晶片並暴露出晶片的側面,且延伸部連接覆蓋部並貼附至薄膜基板。如此配置,由於散熱片材的覆蓋部並非完全包圍晶片,而是暴露出晶片的側面,因而可使晶片與散熱片材之間的空氣輕易地由側面排出。如此,可防止散熱片材在後續熱處理期間變形或甚至與晶片分離的問題發生,從而提高薄膜覆晶封裝的可靠性。
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。
圖1A是依照本發明的實施例的一種薄膜覆晶封裝的俯視示意圖。圖1B是圖1A所示的薄膜覆晶封裝的透視示意圖。圖5是依照本發明的實施例的一種薄膜覆晶封裝的薄膜基板的俯視示意圖。圖6是依照本發明的實施例的一種薄膜覆晶封裝的剖視示意圖,也就是在圖1A中薄膜覆晶封裝100沿線B-B'的剖視圖。參照圖1A、圖1B、圖5及圖6,在本實施例中,薄膜覆晶封裝100包括薄膜基板110、晶片120及散熱片材130。薄膜基板110包括第一表面112及與第一表面112相對的第二表面114。晶片120設置於第一表面112上且沿晶片120的第一軸線A1具有晶片長度L1,其中第一軸線A1可為晶片120的縱向軸線,但本發明並非僅限於此。在本實施例中,薄膜基板110更可包括圖案化電路層118及阻焊層119。圖案化電路層118設置於薄膜基板110的第一表面112上。阻焊層119覆蓋圖案化電路層118並暴露出圖案化電路層118的一部分,使得晶片120可電連接至被阻焊層119所暴露的圖案化電路層118。
如圖1A中所示,散熱片材130包括覆蓋部132及第一延伸部134。覆蓋部132至少局部地覆蓋晶片120並貼附至薄膜基板110。例如樹脂等填充材料可填充於晶片120、薄膜基板110與散熱片材130之間以進一步固定晶片120的位置。覆蓋部132沿第一軸線A1具有第一長度L2(以下簡稱為長度L2)。第一延伸部134連接至覆蓋部132且貼附至薄膜基板110的第一表面112。第一延伸部134沿第一軸線A1具有第二長度L3(以下被稱為長度L3),且第一延伸部134的長度L3實質上長於覆蓋部132的長度L2,且覆蓋部132暴露出晶片120的如圖1B中所示的側面122。在本實施例中,如圖6中所示,所述晶片的側面122連接晶片120的頂面124與底面125。
如此配置,由於散熱片材130的覆蓋部132並非完全包圍晶片120,而是暴露出晶片120的側面122,因而可使晶片120與散熱片材130之間的空氣及/或水氣輕易地排出。如此,可防止散熱片材130在高溫及/或高濕度的情況下變形或甚至與晶片120分離的問題,從而提高薄膜覆晶封裝的可靠性。
更具體而言,覆蓋部132的長度L2約可等於或短於晶片長度L1。在本實施例中,如圖1A中所示,覆蓋部132的長度L2短於晶片長度L1,使得覆蓋部132暴露出晶片120的頂面124的一部分及側面122。在其他實施例中,覆蓋部132的長度L2可實質上等於晶片長度L1。也就是說,覆蓋部132的邊緣與晶片120的邊緣對齊,使得覆蓋部132暴露出晶片120的側面122。如圖5中所示,薄膜基板110包括中心區R1及環繞中心區R1的週邊區R2。在本實施例中,晶片120設置於薄膜基板110的週邊區R2。散熱片材130利用其覆蓋部132來覆蓋晶片120且利用其第一延伸部134來貼附至薄膜基板110。應注意的是,上述例如中心區R1及週邊區R2等定向術語為相對性用語,且中心區R1未必位於薄膜基板110的中心處。本發明的元件可定位於許多不同的定向上。由此,所述定向術語是用於說明目的且不具有任何限制性。
詳細來說,如圖6中所示,散熱片材130更可包括第一黏著層135、散熱層136、第二黏著層137、及保護層138,其中散熱層136通過第一黏著層135而貼附至薄膜基板110及晶片120,保護層138完全覆蓋散熱層136、且第二黏著層137形成於保護層138的黏著表面上且貼附至散熱層136。在本實施例中,保護層138可包括絕緣膜,且散熱層136可包括金屬箔或石墨薄膜,但本發明並非僅限於此。
在本實施例中,如圖6中所示,保護層138的尺寸大於散熱層136的尺寸,且在保護層138的輪廓線與散熱層136的輪廓線之間保持有保護距離。也就是說,散熱層136暴露出保護層138的邊界區。相似地,如圖6中所示,保護層138的尺寸大於第二黏著層137的尺寸,且在保護層138的輪廓線與第二黏著層137的輪廓線之間保持有保護距離。也就是,保護層138包括邊界區,所述邊界區環繞保護層138的黏著表面的邊界,且第二黏著層137暴露出保護層138的邊界區。由此,當散熱片材130被壓合以貼附於薄膜基板110時,可避免黏著劑溢出的問題。
此外,如圖6中所示,薄膜覆晶封裝100更可包括輔助散熱片材140,輔助散熱片材140設置於薄膜基板110的第二表面114上。輔助散熱片材140的結構可與散熱片材130的結構相同或相似。也就是說,如圖6中所示,輔助散熱片材140亦可包括第一黏著層142、散熱層144、第二黏著層146及保護層148,其中散熱層144通過第一黏著層142而貼附至薄膜基板110的第二表面114,保護層148完全覆蓋散熱層144,且第二黏著層146形成於保護層148的黏著表面上且貼附至散熱層144。
相似地,如圖6中所示,保護層148的尺寸大於散熱層144的尺寸,因此,在保護層148的輪廓線與散熱層144的輪廓線之間保持有保護距離。保護層148的尺寸大於第二黏著層146的尺寸,使得第二黏著層146暴露出保護層148的邊界區。如此,當輔助散熱片材140被壓合以貼附至薄膜基板110時可避免黏著劑溢出的問題。
圖2A是依照本發明的實施例的一種薄膜覆晶封裝的俯視圖。應注意的是,圖2A中所示的薄膜覆晶封裝200含有許多與先前圖1A所揭露的薄膜覆晶封裝100相同或相似的特徵。圖2B是圖2A所示的薄膜覆晶封裝的透視示意圖。薄膜覆晶封裝200的沿線B-B'的剖視圖與圖6相似。出於清晰及簡明的目的,可不再對相同或相似的特徵予以贅述,且相同的參考編號表示相同或相似的元件。以下將針對圖2A中所示的薄膜覆晶封裝200與圖1A中所示的薄膜覆晶封裝100之間的主要差異進行闡述。
在本實施例中,如圖2A中所示,覆蓋部132的長度L2實質上長於晶片長度L1。由此,覆蓋部132在晶片120的頂面124上方懸伸以暴露出晶片120的如圖2B中所示的側面122。如此,本發明並不限制覆蓋部132沿第一軸線A1的長度L2,只要覆蓋部132暴露出晶片120的側面122即可。
圖3是依照本發明的實施例的一種薄膜覆晶封裝的俯視示意圖。應注意的是,圖3中所示的薄膜覆晶封裝300含有許多與先前圖1A所揭露的薄膜覆晶封裝100相同或相似的特徵。薄膜覆晶封裝300的沿線B-B'的剖視圖與圖6相似。出於清晰及簡明的目的,可不再對相同或相似的特徵予以贅述,且相同的參考編號表示相同或相似的元件。以下將對圖3中所示的薄膜覆晶封裝300與圖1A中所示的薄膜覆晶封裝100之間的主要差異進行闡述。
在本實施例中,晶片120設置於薄膜基板110的中心區(例如,圖5中所示的中心區R1)上。如此配置,散熱片材130可包括第一延伸部134a及第二延伸部134b,且第一延伸部134a及第二延伸部134b二者均貼附至薄膜基板110。覆蓋部132連接於第一延伸部134a與第二延伸部134b之間。也就是說,第一延伸部134a及第二延伸部134b沿垂直於第一軸線A1的第二軸線A2分別連接覆蓋部132的相對兩側。
更具體來說,覆蓋部132的長度L2實質上等於或短於晶片120的晶片長度L1。在本實施例中,覆蓋部132的長度L2短於晶片120的晶片長度L1,使得覆蓋部132暴露出晶片120的頂面124與側面122的一部分。當然,在另一實施例中,覆蓋部132的長度L2可實質上約等於晶片120的晶片長度L1,使覆蓋部132暴露出晶片120的側面122。也就是說,覆蓋部132的邊緣與晶片120的邊緣對齊,因此,覆蓋部132暴露出晶片120的側面122。
圖4是依照本發明的實施例的一種薄膜覆晶封裝的俯視示意圖。應注意的是,圖4中所示的薄膜覆晶封裝400含有許多與先前圖3所揭露的薄膜覆晶封裝300相同或相似的特徵。薄膜覆晶封裝400的沿線B-B'的剖視圖與圖6相似。出於清晰及簡明的目的,可不再對相同或相似的特徵予以贅述,且相同的參考編號表示相同或相似的元件。以下將對圖4中所示的薄膜覆晶封裝400與圖3中所示的薄膜覆晶封裝300之間的主要差異進行闡述。
在本實施例中,如圖4中所示,覆蓋部132的長度L2實質上長於晶片120的晶片長度L1。由此,覆蓋部132在晶片120的頂面124上方懸伸以暴露出晶片120的側面122。根據所示,本發明並不限制覆蓋部132沿第一軸線A1的長度L2,只要覆蓋部132暴露出晶片120的側面122即可。
圖7是依照本發明的實施例的一種薄膜覆晶封裝(例如,薄膜覆晶封裝100、200、300或400)及用於貼附散熱片材的夾具(fixture)的正視示意圖。參照圖7,在本實施例中,散熱片材130可通過夾具700被壓合且貼附至薄膜基板110。夾具700可由柔性材料製成以避免損壞薄膜覆晶封裝。在本實施例中,夾具700包括與晶片120的位置對應的空腔,因此,所述空腔用以在夾具700將散熱片材130壓合至薄膜基板110上時容納晶片120。夾具700可沿縱向軸線自晶片120的一側移動(例如,滾動)至晶片120的另一側,以壓合散熱片材130以使其貼附於薄膜基板110上並覆蓋晶片120。在本實施例中,在夾具700的空腔與晶片120之間可存在間距,且所述間距可處於自0.5 mm至1 mm的範圍中,但本發明並非僅限於此。
綜上所述,本發明的薄膜覆晶封裝具有散熱片材,所述散熱片材包括覆蓋部及至少一個延伸部,其中所述覆蓋部覆蓋晶片並暴露出所述晶片的側面,且所述延伸部連接所述覆蓋部並貼附至所述薄膜基板。如此配置,由於所述散熱片材的覆蓋部並非完全包圍所述晶片,而是暴露出所述晶片的側面,因而使晶片與散熱片材之間的空氣及/或水氣可輕易地由側面排出。如此,可避免所述散熱片材在高溫及/或高濕度條件下變形或甚至與所述晶片分離的問題,從而提高薄膜覆晶封裝的可靠性。
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。
100、200、300、400‧‧‧薄膜覆晶封裝
110‧‧‧薄膜基板
112‧‧‧第一表面
114‧‧‧第二表面
118‧‧‧圖案化電路層
119‧‧‧阻焊層
120‧‧‧晶片
122‧‧‧側面
124‧‧‧頂面
125‧‧‧底面
130‧‧‧散熱片材
132‧‧‧覆蓋部
134、134a‧‧‧第一延伸部
134b‧‧‧第二延伸部
135、142‧‧‧第一黏著層
136、144‧‧‧散熱層
137、146‧‧‧第二黏著層
138、148‧‧‧保護層
140‧‧‧輔助散熱片材
700‧‧‧夾具
A1‧‧‧第一軸線
A2‧‧‧第二軸線
L1‧‧‧晶片長度
L2‧‧‧第一長度/長度
L3‧‧‧第二長度/長度
R1‧‧‧中心區
R2‧‧‧週邊區
圖1A是依照本發明的實施例的一種薄膜覆晶封裝的俯視示意圖。 圖1B是圖1A所示的薄膜覆晶封裝的透視示意圖。 圖2A是依照本發明的實施例的一種薄膜覆晶封裝的俯視圖。 圖2B是圖2A所示的薄膜覆晶封裝的透視示意圖。 圖3是依照本發明的實施例的一種薄膜覆晶封裝的俯視示意圖。 圖4是依照本發明的實施例的一種薄膜覆晶封裝的俯視示意圖。 圖5是依照本發明的實施例的一種薄膜覆晶封裝的薄膜基板的俯視示意圖。 圖6是依照本發明的實施例的一種薄膜覆晶封裝的剖視示意圖。 圖7是依照本發明的實施例的一種薄膜覆晶封裝及用於貼附散熱片材的夾具(fixture)的正視示意圖。
100‧‧‧薄膜覆晶封裝
110‧‧‧薄膜基板
120‧‧‧晶片
130‧‧‧散熱片材
132‧‧‧覆蓋部
134‧‧‧第一延伸部
136‧‧‧散熱層
A1‧‧‧第一軸線
A2‧‧‧第二軸線
L1‧‧‧晶片長度
L2‧‧‧第一長度/長度
L3‧‧‧第二長度/長度

Claims (14)

  1. 一種薄膜覆晶封裝,包括: 一薄膜基板,包括一第一表面; 一晶片,設置於該第一表面上且沿該晶片的一第一軸線具有一晶片長度;以及 一散熱片材,包括一覆蓋部及一第一延伸部,該第一延伸部連接至該覆蓋部並貼附至該第一表面,該覆蓋部至少局部地覆蓋該晶片並沿該第一軸線具有一第一長度,該第一延伸部沿該第一軸線具有一第二長度,該第二長度實質上長於該覆蓋部的該第一長度,且該覆蓋部暴露出該晶片的一側面,其中該側面連接該晶片的一頂面與一底面。
  2. 如申請專利範圍第1項所述的薄膜覆晶封裝,其中該第一長度實質上等於或短於該晶片長度,以使該覆蓋部暴露出該晶片的該側面。
  3. 如申請專利範圍第1項所述的薄膜覆晶封裝,其中該第一長度實質上長於該晶片長度,且該覆蓋部在該晶片的該頂面上方懸伸以暴露出該晶片的該側面。
  4. 如申請專利範圍第1項所述的薄膜覆晶封裝,其中該晶片設置於該薄膜基板的一週邊區。
  5. 如申請專利範圍第1項所述的薄膜覆晶封裝,其中該晶片設置於該薄膜基板的一中心區。
  6. 如申請專利範圍第1項所述的薄膜覆晶封裝,其中該散熱片材更包括一第二延伸部,且該覆蓋部連接於該第一延伸部與該第二延伸部之間。
  7. 如申請專利範圍第1項所述的薄膜覆晶封裝,其中該散熱片材包括一散熱層及一保護層,該散熱層貼附於該薄膜基板及該晶片上,且該保護層完全覆蓋該散熱層。
  8. 如申請專利範圍第7項所述的薄膜覆晶封裝,其中該保護層包括一絕緣膜。
  9. 如申請專利範圍第7項所述的薄膜覆晶封裝,其中該散熱層包括一金屬箔或一石墨薄膜。
  10. 如申請專利範圍第7項所述的薄膜覆晶封裝,其中該散熱片材更包括第一黏著層,且該散熱層透過該第一黏著層貼附至該薄膜基板及該晶片。
  11. 如申請專利範圍第7項所述的薄膜覆晶封裝,其中該保護層的尺寸大於該散熱層的尺寸,且在該保護層的一輪廓線與該散熱層的一輪廓線之間維持一保護距離。
  12. 如申請專利範圍第11項所述的薄膜覆晶封裝,其中該散熱片材更包括一第二黏著層,該第二黏著層形成於該保護層的黏著表面上且貼附於該散熱層。
  13. 如申請專利範圍第12項所述的薄膜覆晶封裝,其中該保護層包括一邊界區,該邊界區環繞該保護層的該黏著表面的一邊界,且該第二黏著層暴露出該保護層的該邊界區。
  14. 如申請專利範圍第1項所述的薄膜覆晶封裝,更包括一輔助散熱片材,該輔助散熱片材設置於該薄膜基板的一第二表面上,其中該第二表面與該第一表面相對。
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