TW201435073A - 含鎢基材的化學機械研磨 - Google Patents
含鎢基材的化學機械研磨 Download PDFInfo
- Publication number
- TW201435073A TW201435073A TW103107964A TW103107964A TW201435073A TW 201435073 A TW201435073 A TW 201435073A TW 103107964 A TW103107964 A TW 103107964A TW 103107964 A TW103107964 A TW 103107964A TW 201435073 A TW201435073 A TW 201435073A
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- TW
- Taiwan
- Prior art keywords
- hexahydropyrazine
- methyl
- carboxylic acid
- boc
- ethyl
- Prior art date
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 title claims abstract description 124
- 239000010937 tungsten Substances 0.000 title claims abstract description 124
- 229910052721 tungsten Inorganic materials 0.000 title claims abstract description 124
- 239000000126 substance Substances 0.000 title claims abstract description 117
- 239000000758 substrate Substances 0.000 title claims abstract description 51
- 238000005498 polishing Methods 0.000 claims abstract description 134
- 239000000203 mixture Substances 0.000 claims abstract description 81
- 239000000654 additive Substances 0.000 claims abstract description 44
- 230000000996 additive effect Effects 0.000 claims abstract description 39
- 150000004885 piperazines Chemical class 0.000 claims abstract description 39
- 238000000034 method Methods 0.000 claims abstract description 24
- 239000007788 liquid Substances 0.000 claims abstract description 14
- 239000011949 solid catalyst Substances 0.000 claims abstract description 11
- 150000003839 salts Chemical class 0.000 claims abstract description 10
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 claims description 160
- -1 1-(3-methylbenzyl)hexahydropyrazine 4-Boc-hexahydropyrazine-2-carboxylic acid Chemical compound 0.000 claims description 63
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 33
- 239000002245 particle Substances 0.000 claims description 33
- 239000004065 semiconductor Substances 0.000 claims description 30
- 230000007797 corrosion Effects 0.000 claims description 28
- 238000005260 corrosion Methods 0.000 claims description 28
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 24
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 24
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 20
- 239000003112 inhibitor Substances 0.000 claims description 19
- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- IMUDHTPIFIBORV-UHFFFAOYSA-N aminoethylpiperazine Chemical compound NCCN1CCNCC1 IMUDHTPIFIBORV-UHFFFAOYSA-N 0.000 claims description 18
- 239000002253 acid Substances 0.000 claims description 17
- 150000002506 iron compounds Chemical class 0.000 claims description 17
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 16
- KYQCOXFCLRTKLS-UHFFFAOYSA-N Pyrazine Chemical compound C1=CN=CC=N1 KYQCOXFCLRTKLS-UHFFFAOYSA-N 0.000 claims description 16
- GKKCIDNWFBPDBW-UHFFFAOYSA-M potassium cyanate Chemical compound [K]OC#N GKKCIDNWFBPDBW-UHFFFAOYSA-M 0.000 claims description 16
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical group OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 14
- 239000007800 oxidant agent Substances 0.000 claims description 13
- 150000001412 amines Chemical class 0.000 claims description 12
- 239000001257 hydrogen Substances 0.000 claims description 12
- 229910052739 hydrogen Inorganic materials 0.000 claims description 12
- 150000001913 cyanates Chemical class 0.000 claims description 11
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 11
- ROSDSFDQCJNGOL-UHFFFAOYSA-N protonated dimethyl amine Natural products CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 claims description 11
- IHPYMWDTONKSCO-UHFFFAOYSA-N 2,2'-piperazine-1,4-diylbisethanesulfonic acid Chemical compound OS(=O)(=O)CCN1CCN(CCS(O)(=O)=O)CC1 IHPYMWDTONKSCO-UHFFFAOYSA-N 0.000 claims description 10
- 150000001733 carboxylic acid esters Chemical class 0.000 claims description 10
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 10
- 125000000962 organic group Chemical group 0.000 claims description 10
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 claims description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 9
- 125000000468 ketone group Chemical group 0.000 claims description 9
- XUSNPFGLKGCWGN-UHFFFAOYSA-N 3-[4-(3-aminopropyl)piperazin-1-yl]propan-1-amine Chemical compound NCCCN1CCN(CCCN)CC1 XUSNPFGLKGCWGN-UHFFFAOYSA-N 0.000 claims description 8
- PCNDJXKNXGMECE-UHFFFAOYSA-N Phenazine Natural products C1=CC=CC2=NC3=CC=CC=C3N=C21 PCNDJXKNXGMECE-UHFFFAOYSA-N 0.000 claims description 8
- 239000003139 biocide Substances 0.000 claims description 8
- 150000001734 carboxylic acid salts Chemical class 0.000 claims description 8
- 229910044991 metal oxide Inorganic materials 0.000 claims description 8
- 150000004706 metal oxides Chemical class 0.000 claims description 8
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims description 8
- 239000004094 surface-active agent Substances 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 claims description 7
- 230000003115 biocidal effect Effects 0.000 claims description 7
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims description 7
- 239000003054 catalyst Substances 0.000 claims description 7
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 7
- RFIOZSIHFNEKFF-UHFFFAOYSA-N piperazine-1-carboxylic acid Chemical compound OC(=O)N1CCNCC1 RFIOZSIHFNEKFF-UHFFFAOYSA-N 0.000 claims description 7
- GQSSZKRUQKGOJB-UHFFFAOYSA-N 1-(furan-2-ylmethyl)piperazine Chemical compound C=1C=COC=1CN1CCNCC1 GQSSZKRUQKGOJB-UHFFFAOYSA-N 0.000 claims description 6
- 229930194542 Keto Natural products 0.000 claims description 6
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 claims description 6
- QYTOONVFPBUIJG-UHFFFAOYSA-N azane;cyanic acid Chemical compound [NH4+].[O-]C#N QYTOONVFPBUIJG-UHFFFAOYSA-N 0.000 claims description 6
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 6
- 239000002105 nanoparticle Substances 0.000 claims description 6
- 239000006174 pH buffer Substances 0.000 claims description 6
- ZVCDLGYNFYZZOK-UHFFFAOYSA-M sodium cyanate Chemical compound [Na]OC#N ZVCDLGYNFYZZOK-UHFFFAOYSA-M 0.000 claims description 6
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 claims description 6
- 229910052902 vermiculite Inorganic materials 0.000 claims description 6
- 239000010455 vermiculite Substances 0.000 claims description 6
- 235000019354 vermiculite Nutrition 0.000 claims description 6
- MPOFEHGMWPHBSF-SSDOTTSWSA-N (2r)-1-[(2-methylpropan-2-yl)oxycarbonyl]piperazin-4-ium-2-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCNC[C@@H]1C(O)=O MPOFEHGMWPHBSF-SSDOTTSWSA-N 0.000 claims description 5
- NSMWYRLQHIXVAP-OLQVQODUSA-N (2r,5s)-2,5-dimethylpiperazine Chemical compound C[C@H]1CN[C@H](C)CN1 NSMWYRLQHIXVAP-OLQVQODUSA-N 0.000 claims description 5
- YRYAXQJXMBETAT-ZETCQYMHSA-N (2s)-4-[(2-methylpropan-2-yl)oxycarbonyl]piperazin-1-ium-2-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCN[C@H](C(O)=O)C1 YRYAXQJXMBETAT-ZETCQYMHSA-N 0.000 claims description 5
- JSSXHAMIXJGYCS-SCSAIBSYSA-N (R)-piperazine-2-carboxylic acid Chemical compound [O-]C(=O)[C@H]1CNCC[NH2+]1 JSSXHAMIXJGYCS-SCSAIBSYSA-N 0.000 claims description 5
- ARHYWWAJZDAYDJ-UHFFFAOYSA-N 1,2-dimethylpiperazine Chemical compound CC1CNCCN1C ARHYWWAJZDAYDJ-UHFFFAOYSA-N 0.000 claims description 5
- RXYPXQSKLGGKOL-UHFFFAOYSA-N 1,4-dimethylpiperazine Chemical compound CN1CCN(C)CC1 RXYPXQSKLGGKOL-UHFFFAOYSA-N 0.000 claims description 5
- OHUMKYGINIODOY-UHFFFAOYSA-N 1-(1-methylpiperidin-4-yl)piperazine Chemical compound C1CN(C)CCC1N1CCNCC1 OHUMKYGINIODOY-UHFFFAOYSA-N 0.000 claims description 5
- YRIFWVMRUFKWLM-UHFFFAOYSA-N 1-(2,5-dimethylphenyl)piperazine Chemical compound CC1=CC=C(C)C(N2CCNCC2)=C1 YRIFWVMRUFKWLM-UHFFFAOYSA-N 0.000 claims description 5
- BCANMDDAARPKKQ-UHFFFAOYSA-N 1-(2,6-dimethylpyridin-4-yl)piperazine Chemical compound CC1=NC(C)=CC(N2CCNCC2)=C1 BCANMDDAARPKKQ-UHFFFAOYSA-N 0.000 claims description 5
- FLNQAPQQAZVRDA-UHFFFAOYSA-N 1-(2-(2-Hydroxyethoxy)ethyl)piperazine Chemical compound OCCOCCN1CCNCC1 FLNQAPQQAZVRDA-UHFFFAOYSA-N 0.000 claims description 5
- BMEMBBFDTYHTLH-UHFFFAOYSA-N 1-(2-methoxyethyl)piperazine Chemical compound COCCN1CCNCC1 BMEMBBFDTYHTLH-UHFFFAOYSA-N 0.000 claims description 5
- HVZJSUVDFMFZCP-UHFFFAOYSA-N 1-(2-propan-2-yloxyethyl)piperazine Chemical compound CC(C)OCCN1CCNCC1 HVZJSUVDFMFZCP-UHFFFAOYSA-N 0.000 claims description 5
- GWWCQKPWZIASLS-UHFFFAOYSA-N 1-(3-methoxypropyl)piperazine Chemical compound COCCCN1CCNCC1 GWWCQKPWZIASLS-UHFFFAOYSA-N 0.000 claims description 5
- FTVJIPHSVIBSCD-UHFFFAOYSA-N 1-(4-ethoxypyridin-2-yl)piperazine Chemical compound CCOC1=CC=NC(N2CCNCC2)=C1 FTVJIPHSVIBSCD-UHFFFAOYSA-N 0.000 claims description 5
- GKBPGHNDWVURBD-UHFFFAOYSA-N 1-(oxolan-2-ylmethyl)piperazine Chemical compound C1CNCCN1CC1CCCO1 GKBPGHNDWVURBD-UHFFFAOYSA-N 0.000 claims description 5
- XZYLSJPLCLKCMR-UHFFFAOYSA-N 1-(pyridin-4-ylmethyl)piperazine Chemical compound C=1C=NC=CC=1CN1CCNCC1 XZYLSJPLCLKCMR-UHFFFAOYSA-N 0.000 claims description 5
- MPOFEHGMWPHBSF-UHFFFAOYSA-N 1-[(2-methylpropan-2-yl)oxycarbonyl]piperazin-4-ium-2-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCNCC1C(O)=O MPOFEHGMWPHBSF-UHFFFAOYSA-N 0.000 claims description 5
- LTVRGAWOEOKGJZ-UHFFFAOYSA-N 1-chloro-3-methoxy-2-methylbenzene Chemical compound COC1=CC=CC(Cl)=C1C LTVRGAWOEOKGJZ-UHFFFAOYSA-N 0.000 claims description 5
- IFNWESYYDINUHV-UHFFFAOYSA-N 2,6-dimethylpiperazine Chemical compound CC1CNCC(C)N1 IFNWESYYDINUHV-UHFFFAOYSA-N 0.000 claims description 5
- XAOHWSFGKCJOGT-UHFFFAOYSA-N 2-(4-aminopiperazin-1-yl)ethanol Chemical compound NN1CCN(CCO)CC1 XAOHWSFGKCJOGT-UHFFFAOYSA-N 0.000 claims description 5
- VARKIGWTYBUWNT-UHFFFAOYSA-N 2-[4-(2-hydroxyethyl)piperazin-1-yl]ethanol Chemical compound OCCN1CCN(CCO)CC1 VARKIGWTYBUWNT-UHFFFAOYSA-N 0.000 claims description 5
- CTWQVJFQCBFTKU-UHFFFAOYSA-N 2-methyl-3-piperazin-1-yl-1h-indole Chemical compound CC=1NC2=CC=CC=C2C=1N1CCNCC1 CTWQVJFQCBFTKU-UHFFFAOYSA-N 0.000 claims description 5
- JOMNTHCQHJPVAZ-UHFFFAOYSA-N 2-methylpiperazine Chemical compound CC1CNCCN1 JOMNTHCQHJPVAZ-UHFFFAOYSA-N 0.000 claims description 5
- AYGYICRITMSJOC-UHFFFAOYSA-N 3-piperazin-1-ylphenol Chemical compound OC1=CC=CC(N2CCNCC2)=C1 AYGYICRITMSJOC-UHFFFAOYSA-N 0.000 claims description 5
- UVLSCMIEPPWCHZ-UHFFFAOYSA-N 3-piperazin-1-ylpropan-1-amine Chemical compound NCCCN1CCNCC1 UVLSCMIEPPWCHZ-UHFFFAOYSA-N 0.000 claims description 5
- YWKVYGFJHOLYRV-UHFFFAOYSA-N 4-piperazin-1-ylbutanenitrile Chemical compound N#CCCCN1CCNCC1 YWKVYGFJHOLYRV-UHFFFAOYSA-N 0.000 claims description 5
- PFASLWCORRIXDW-UHFFFAOYSA-N C(C)NCC.N1(CCNCC1)C(=O)O Chemical compound C(C)NCC.N1(CCNCC1)C(=O)O PFASLWCORRIXDW-UHFFFAOYSA-N 0.000 claims description 5
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims description 5
- MTFCXMJOGMHYAE-UHFFFAOYSA-N Ethyl piperazinoacetate Chemical compound CCOC(=O)CN1CCNCC1 MTFCXMJOGMHYAE-UHFFFAOYSA-N 0.000 claims description 5
- RQYGKBWKHSGCKY-UHFFFAOYSA-N N1(CCCCC1)OS(=O)(=O)N1CCNCC1 Chemical compound N1(CCCCC1)OS(=O)(=O)N1CCNCC1 RQYGKBWKHSGCKY-UHFFFAOYSA-N 0.000 claims description 5
- QNXCMLLNNIMPBC-UHFFFAOYSA-N O1NC=CC=C1N1CCNCC1 Chemical compound O1NC=CC=C1N1CCNCC1 QNXCMLLNNIMPBC-UHFFFAOYSA-N 0.000 claims description 5
- GMHSTJRPSVFLMT-UHFFFAOYSA-L disodium PIPES Chemical compound [Na+].[Na+].[O-]S(=O)(=O)CCN1CCN(CCS([O-])(=O)=O)CC1 GMHSTJRPSVFLMT-UHFFFAOYSA-L 0.000 claims description 5
- KWURIFKZTJGMFD-UHFFFAOYSA-M potassium;2-[4-(2-hydroxyethyl)piperazin-1-yl]ethanesulfonate Chemical compound [K+].OCCN1CCN(CCS([O-])(=O)=O)CC1 KWURIFKZTJGMFD-UHFFFAOYSA-M 0.000 claims description 5
- RDZTWEVXRGYCFV-UHFFFAOYSA-M sodium 2-[4-(2-hydroxyethyl)piperazin-1-yl]ethanesulfonate Chemical compound [Na+].OCCN1CCN(CCS([O-])(=O)=O)CC1 RDZTWEVXRGYCFV-UHFFFAOYSA-M 0.000 claims description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 5
- CWXPZXBSDSIRCS-UHFFFAOYSA-N tert-butyl piperazine-1-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCNCC1 CWXPZXBSDSIRCS-UHFFFAOYSA-N 0.000 claims description 5
- WIVGCIGQDNMDQO-UHFFFAOYSA-N (2-piperazin-1-ylpyridin-3-yl)-piperidin-1-ylmethanone Chemical compound C=1C=CN=C(N2CCNCC2)C=1C(=O)N1CCCCC1 WIVGCIGQDNMDQO-UHFFFAOYSA-N 0.000 claims description 4
- YRYAXQJXMBETAT-SSDOTTSWSA-N (2r)-4-[(2-methylpropan-2-yl)oxycarbonyl]piperazin-1-ium-2-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCN[C@@H](C(O)=O)C1 YRYAXQJXMBETAT-SSDOTTSWSA-N 0.000 claims description 4
- XNBJJLRLOHVING-UHFFFAOYSA-N 1,4-bis(pyridin-3-ylmethyl)piperazine Chemical compound C=1C=CN=CC=1CN(CC1)CCN1CC1=CC=CN=C1 XNBJJLRLOHVING-UHFFFAOYSA-N 0.000 claims description 4
- GNZCODQFNKYDAL-UHFFFAOYSA-N 1-(1h-imidazol-2-ylmethyl)piperazine Chemical compound N=1C=CNC=1CN1CCNCC1 GNZCODQFNKYDAL-UHFFFAOYSA-N 0.000 claims description 4
- MRBFGEHILMYPTF-UHFFFAOYSA-N 1-(2-Pyrimidyl)piperazine Chemical compound C1CNCCN1C1=NC=CC=N1 MRBFGEHILMYPTF-UHFFFAOYSA-N 0.000 claims description 4
- FBQIUSDQWOLCNY-UHFFFAOYSA-N 1-(2-ethoxyphenyl)piperazine Chemical compound CCOC1=CC=CC=C1N1CCNCC1 FBQIUSDQWOLCNY-UHFFFAOYSA-N 0.000 claims description 4
- LMQFWBCKQMNEEH-UHFFFAOYSA-N 1-(2-ethylphenyl)piperazine Chemical compound CCC1=CC=CC=C1N1CCNCC1 LMQFWBCKQMNEEH-UHFFFAOYSA-N 0.000 claims description 4
- WTDMCLGFEXQYOU-UHFFFAOYSA-N 1-(2-imidazol-1-ylethyl)piperazine Chemical compound C1CNCCN1CCN1C=CN=C1 WTDMCLGFEXQYOU-UHFFFAOYSA-N 0.000 claims description 4
- OJXQXPJISCHJSV-UHFFFAOYSA-N 1-(2-isocyanoethyl)-4-methylpiperazine Chemical compound CN1CCN(CC[N+]#[C-])CC1 OJXQXPJISCHJSV-UHFFFAOYSA-N 0.000 claims description 4
- NJUNCRDVGUBYCB-UHFFFAOYSA-N 1-(2-pyridin-2-ylethyl)piperazine Chemical compound C1CNCCN1CCC1=CC=CC=N1 NJUNCRDVGUBYCB-UHFFFAOYSA-N 0.000 claims description 4
- PXJMEKXBONLMNG-UHFFFAOYSA-N 1-(2-pyridin-4-ylethyl)piperazine Chemical compound C1CNCCN1CCC1=CC=NC=C1 PXJMEKXBONLMNG-UHFFFAOYSA-N 0.000 claims description 4
- RCUHJBWDIITPIC-UHFFFAOYSA-N 1-(4-methoxybutyl)piperazine Chemical compound COCCCCN1CCNCC1 RCUHJBWDIITPIC-UHFFFAOYSA-N 0.000 claims description 4
- BIYGAOBOLDXNHM-UHFFFAOYSA-N 1-ethylsulfonylpiperazine Chemical compound CCS(=O)(=O)N1CCNCC1 BIYGAOBOLDXNHM-UHFFFAOYSA-N 0.000 claims description 4
- MJWWNBHUIIRNDZ-UHFFFAOYSA-N 1-pentylpiperazine Chemical compound CCCCCN1CCNCC1 MJWWNBHUIIRNDZ-UHFFFAOYSA-N 0.000 claims description 4
- OQZBAQXTXNIPRA-UHFFFAOYSA-N 1-pyridin-4-ylpiperazine Chemical compound C1CNCCN1C1=CC=NC=C1 OQZBAQXTXNIPRA-UHFFFAOYSA-N 0.000 claims description 4
- YKZLYEKCXZMSQH-UHFFFAOYSA-N 2,3,5,6-tetrahydroxypiperazine-1,4-dicarbaldehyde Chemical compound OC1C(O)N(C=O)C(O)C(O)N1C=O YKZLYEKCXZMSQH-UHFFFAOYSA-N 0.000 claims description 4
- KDYNMWFSJAIPSW-UHFFFAOYSA-N 2-(4-propan-2-ylpiperazin-1-yl)ethanol Chemical compound CC(C)N1CCN(CCO)CC1 KDYNMWFSJAIPSW-UHFFFAOYSA-N 0.000 claims description 4
- WFCSWCVEJLETKA-UHFFFAOYSA-N 2-piperazin-1-ylethanol Chemical compound OCCN1CCNCC1 WFCSWCVEJLETKA-UHFFFAOYSA-N 0.000 claims description 4
- HCGFLVDMFDHYJD-UHFFFAOYSA-N 2-piperazin-1-ylpyrazine Chemical compound C1CNCCN1C1=CN=CC=N1 HCGFLVDMFDHYJD-UHFFFAOYSA-N 0.000 claims description 4
- HBCSNWKQNPKIHK-UHFFFAOYSA-N 2-propan-2-ylpiperazine Chemical compound CC(C)C1CNCCN1 HBCSNWKQNPKIHK-UHFFFAOYSA-N 0.000 claims description 4
- GNDQTDPZWUAOIW-UHFFFAOYSA-N 3-oxopiperazine-2-carboxylic acid Chemical compound OC(=O)C1NCCNC1=O GNDQTDPZWUAOIW-UHFFFAOYSA-N 0.000 claims description 4
- INURTONYJXVENS-UHFFFAOYSA-N 3-piperazin-1-yl-n,n-dipropylpropan-1-amine Chemical compound CCCN(CCC)CCCN1CCNCC1 INURTONYJXVENS-UHFFFAOYSA-N 0.000 claims description 4
- VAVOYRCCWLRTMS-UHFFFAOYSA-N 4-piperazin-1-ylaniline Chemical compound C1=CC(N)=CC=C1N1CCNCC1 VAVOYRCCWLRTMS-UHFFFAOYSA-N 0.000 claims description 4
- BTGRAWJCKBQKAO-UHFFFAOYSA-N adiponitrile Chemical compound N#CCCCCC#N BTGRAWJCKBQKAO-UHFFFAOYSA-N 0.000 claims description 4
- 239000008367 deionised water Substances 0.000 claims description 4
- 229910021641 deionized water Inorganic materials 0.000 claims description 4
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 4
- ZPJZSEHCMJYUPI-UHFFFAOYSA-N methyl piperazine-1-carboxylate Chemical compound COC(=O)N1CCNCC1 ZPJZSEHCMJYUPI-UHFFFAOYSA-N 0.000 claims description 4
- IDWCYRNCJHGJAL-UHFFFAOYSA-N n-(2-piperazin-1-ylethyl)-n-propan-2-ylpropan-2-amine Chemical compound CC(C)N(C(C)C)CCN1CCNCC1 IDWCYRNCJHGJAL-UHFFFAOYSA-N 0.000 claims description 4
- MRDGZSKYFPGAKP-UHFFFAOYSA-N para-methoxyphenylpiperazine Chemical compound C1=CC(OC)=CC=C1N1CCNCC1 MRDGZSKYFPGAKP-UHFFFAOYSA-N 0.000 claims description 4
- DWXLVZSMXXCSMJ-UHFFFAOYSA-N piperazine-1-sulfonamide Chemical compound NS(=O)(=O)N1CCNCC1 DWXLVZSMXXCSMJ-UHFFFAOYSA-N 0.000 claims description 4
- CYJAWBVQRMVFEO-UHFFFAOYSA-N piperazine-2,6-dione Chemical compound O=C1CNCC(=O)N1 CYJAWBVQRMVFEO-UHFFFAOYSA-N 0.000 claims description 4
- BRYCUMKDWMEGMK-UHFFFAOYSA-N piperazine-2-carboxamide Chemical compound NC(=O)C1CNCCN1 BRYCUMKDWMEGMK-UHFFFAOYSA-N 0.000 claims description 4
- KRIOVPPHQSLHCZ-UHFFFAOYSA-N propiophenone Chemical compound CCC(=O)C1=CC=CC=C1 KRIOVPPHQSLHCZ-UHFFFAOYSA-N 0.000 claims description 4
- GZRKXKUVVPSREJ-UHFFFAOYSA-N pyridinylpiperazine Chemical compound C1CNCCN1C1=CC=CC=N1 GZRKXKUVVPSREJ-UHFFFAOYSA-N 0.000 claims description 4
- 125000003107 substituted aryl group Chemical group 0.000 claims description 4
- NSILYQWHARROMG-MRVPVSSYSA-N tert-butyl (3r)-3-(hydroxymethyl)piperazine-1-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCN[C@@H](CO)C1 NSILYQWHARROMG-MRVPVSSYSA-N 0.000 claims description 4
- NSILYQWHARROMG-QMMMGPOBSA-N tert-butyl (3s)-3-(hydroxymethyl)piperazine-1-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCN[C@H](CO)C1 NSILYQWHARROMG-QMMMGPOBSA-N 0.000 claims description 4
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- 125000004494 ethyl ester group Chemical group 0.000 description 1
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- 125000001183 hydrocarbyl group Chemical group 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- QDLAGTHXVHQKRE-UHFFFAOYSA-N lichenxanthone Natural products COC1=CC(O)=C2C(=O)C3=C(C)C=C(OC)C=C3OC2=C1 QDLAGTHXVHQKRE-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
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- 238000004377 microelectronic Methods 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- NQRQMDMOABSDEK-UHFFFAOYSA-N n-(2-piperazin-1-ylethyl)-n-propylpropan-1-amine Chemical compound CCCN(CCC)CCN1CCNCC1 NQRQMDMOABSDEK-UHFFFAOYSA-N 0.000 description 1
- QWIJFXJAUNKXGB-UHFFFAOYSA-N n-decylcyclohexanamine Chemical compound CCCCCCCCCCNC1CCCCC1 QWIJFXJAUNKXGB-UHFFFAOYSA-N 0.000 description 1
- 239000002113 nanodiamond Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- IRPDISVJRAYFBI-UHFFFAOYSA-N nitric acid;potassium Chemical compound [K].O[N+]([O-])=O IRPDISVJRAYFBI-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
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- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 239000006179 pH buffering agent Substances 0.000 description 1
- KHIWWQKSHDUIBK-UHFFFAOYSA-N periodic acid Chemical compound OI(=O)(=O)=O KHIWWQKSHDUIBK-UHFFFAOYSA-N 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- KYEVTVIFIFPALW-UHFFFAOYSA-N piperazin-1-yl(piperidin-1-yl)methanone Chemical compound C1CNCCN1C(=O)N1CCCCC1 KYEVTVIFIFPALW-UHFFFAOYSA-N 0.000 description 1
- PVCOXMQIAVGPJN-UHFFFAOYSA-N piperazine-1,4-diamine Chemical class NN1CCN(N)CC1 PVCOXMQIAVGPJN-UHFFFAOYSA-N 0.000 description 1
- JTHRRMFZHSDGNJ-UHFFFAOYSA-N piperazine-2,3-dione Chemical compound O=C1NCCNC1=O JTHRRMFZHSDGNJ-UHFFFAOYSA-N 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- NNFCIKHAZHQZJG-UHFFFAOYSA-N potassium cyanide Chemical compound [K+].N#[C-] NNFCIKHAZHQZJG-UHFFFAOYSA-N 0.000 description 1
- JLKDVMWYMMLWTI-UHFFFAOYSA-M potassium iodate Chemical compound [K+].[O-]I(=O)=O JLKDVMWYMMLWTI-UHFFFAOYSA-M 0.000 description 1
- 239000001230 potassium iodate Substances 0.000 description 1
- 235000006666 potassium iodate Nutrition 0.000 description 1
- 229940093930 potassium iodate Drugs 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 125000003373 pyrazinyl group Chemical group 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910021653 sulphate ion Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- YWHDUWJBVKOUGW-UHFFFAOYSA-N tert-butyl 2-butylpiperazine-1-carboxylate Chemical compound CCCCC1CNCCN1C(=O)OC(C)(C)C YWHDUWJBVKOUGW-UHFFFAOYSA-N 0.000 description 1
- LNDQGWAWYKFYAO-UHFFFAOYSA-N tert-butyl 4-(2-aminophenyl)piperazine-1-carboxylate Chemical compound C1CN(C(=O)OC(C)(C)C)CCN1C1=CC=CC=C1N LNDQGWAWYKFYAO-UHFFFAOYSA-N 0.000 description 1
- JFZGCXORLWXLGH-UHFFFAOYSA-N tert-butyl 4-(2-methoxycarbonylphenyl)piperazine-1-carboxylate Chemical compound COC(=O)C1=CC=CC=C1N1CCN(C(=O)OC(C)(C)C)CC1 JFZGCXORLWXLGH-UHFFFAOYSA-N 0.000 description 1
- PPSZULCLLFITMR-UHFFFAOYSA-N tert-butyl 4-[2-amino-1-[4-(trifluoromethyl)phenyl]ethyl]piperazine-2-carboxylate Chemical compound C(C)(C)(C)OC(=O)C1NCCN(C1)C(CN)C1=CC=C(C=C1)C(F)(F)F PPSZULCLLFITMR-UHFFFAOYSA-N 0.000 description 1
- QKCHWJYIPFBVRD-UHFFFAOYSA-N tert-butyl 4-[5-(hydroxymethyl)pyridin-2-yl]piperazine-1-carboxylate Chemical compound C1CN(C(=O)OC(C)(C)C)CCN1C1=CC=C(CO)C=N1 QKCHWJYIPFBVRD-UHFFFAOYSA-N 0.000 description 1
- PCCCSUUBJZRHGJ-UHFFFAOYSA-N tert-butyl 4-piperidin-3-ylpiperazine-1-carboxylate Chemical compound C1CN(C(=O)OC(C)(C)C)CCN1C1CNCCC1 PCCCSUUBJZRHGJ-UHFFFAOYSA-N 0.000 description 1
- FQFILJKFZCVHNH-UHFFFAOYSA-N tert-butyl n-[3-[(5-bromo-2-chloropyrimidin-4-yl)amino]propyl]carbamate Chemical compound CC(C)(C)OC(=O)NCCCNC1=NC(Cl)=NC=C1Br FQFILJKFZCVHNH-UHFFFAOYSA-N 0.000 description 1
- RWRDLPDLKQPQOW-UHFFFAOYSA-N tetrahydropyrrole Substances C1CCNC1 RWRDLPDLKQPQOW-UHFFFAOYSA-N 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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Abstract
用於拋光鎢或含鎢基材的化學機械拋光(CMP)組合物包含研磨料、至少一固態觸媒、選自由六氫吡嗪衍生物、氰酸鹽類及其組合所組成的群組之化學添加物及液態載劑。有許多系統及方法使用用於拋光鎢或含鎢基材的水性配方。
Description
本發明大體上關於半導體晶圓上的含鎢基材的化學機械研磨(CMP)。
有大量的材料均用於積體電路例如半導體晶圓的製造中。該等材料一般均落在三種分類範圍以內-介電材料、黏著及/或阻障層及傳導層。各種不同基材,例如,介電材料例如TEOS、電漿強化TEOS(PETEOS)及低-k介電材料;阻障/黏著層例如鉭、鈦、氮化鉭及氮化鈦;及傳導層例如銅、鋁、鎢及貴重金屬在此產業中乃習知。
積體電路透過使用眾所皆知的多層互連件相互連結。互連結構正常具有金屬化的第一層、互連層、金屬化的第二層及通常金屬化的第三及後續層。層間介電材料例如二氧化矽及有時候低-k材料係用以電絕緣矽基材或井中的不同金屬化層。不同互連層之間的電氣連結係透過使用金屬化通孔及特別是鎢通孔做到。美國專利第4,789,648號描述用於
製備多重金屬化層及絕緣體膜中的金屬化通孔。以類似的方式,使用金屬接點來形成互連層及井中所形成的元件之間的電氣連結。該等金屬通孔及接點一般均以鎢填充而且一般運用黏附層例如氮化鈦(TiN)及/或鉭以便將金屬層例如鎢金屬層黏附於該介電材料。
在一半導體製造方法中,金屬化通孔或接點係藉由空白鎢沉積接著CMP步驟形成。在典型的方法中,通孔通過該層間介電質(ILD)蝕刻至互連線或至半導體基材。接下來,薄黏附層例如氮化鈦及/或鈦一般形成在該ILD上方而且導入已蝕刻的通孔內。接著,將一鎢膜空白沉積在該黏附層上方及該通孔內。持續此沉積直到以鎢填滿該通孔為止。最後,藉由化學機械拋光(CMP)移除過量的鎢以形成金屬通孔。
用於研磨半導體基材的化學機械研磨(CMP)現在已廣為熟於此藝之士所知而且已經描述於許多專利及公開的文獻刊物中。
在一典型的CMP方法中,使基材(例如,晶圓)與黏貼於壓盤的旋轉拋光墊接觸。在該基材的CMP加工期間將CMP漿料,經常為研磨性及化學反應性混合物,供應給該墊子。在該CMP方法的期間,當晶圓承載系統或拋光頭靠著該基材施壓(向下作用力)時使該墊子(固定於該壓盤)及基材旋轉。該漿料基於該與基材平行的墊子的旋轉運動效應藉由與被研磨的基材膜發生化學及機械交互作用來完成該研磨(拋光)方法。依此方式持續拋光直到移除該基材上要求的膜並且達成將該基材有效平坦化的常見目的為止。金屬CMP漿料經
常含有懸浮於氧化性含水介質中的研磨性材料,例如矽石或礬土。
金屬(例如,鎢)的移除速率對該介電基底的移除速率之比值叫做在包含金屬及介電材料的基材的CMP加工期間的金屬移除相對於介電質移除的“選擇性”。
當使用金屬相對於介電質的移除具有高選擇性的CMP漿料時,該等金屬層易於過度研磨而在該等金屬化區域中造成凹陷或“碟化”效應。此特徵扭曲由於半導體製造時的微刻及其他束縛條件而無法接受。
不適用於半導體製造的另一特徵扭曲叫做“侵蝕”。侵蝕為介電質領域及金屬通孔或溝槽的緻密陣列之間的形貌差異。在CMP中,該緻密陣列中的材料可於比該周圍領域的介電質更快的速率下被移除或侵蝕。這造成該介電質領域與該緻密金屬(例如,銅或鎢)陣列之間的形貌差異。
當產業基準越來越趨向較小元件特徵時,對於能給與IC晶片奈米結構的優異研磨的CMP漿料有持續發展的需求。明確地說,有關28nm科技節點及超越的應用,漿料產物必須給與可調整的移除速率及介於金屬與介電質之間的可調整的選擇性,降低侵蝕及碟化現象同時維持充分的移除速率。
尤其是就事實上半導體產業繼續往越來越小的特徵尺寸移動的觀點來看對於能提供低碟化及柱塞凹陷效應的鎢CMP方法及漿料有明顯的需求。本發明可針對此顯著需求提供一解決方法。
此處所述的鎢CMP漿料組合物能經量身打造以於預期的研磨速率、被控制的鎢對其他材料(例如介電材料)的拋光選擇性下提供可調整、有效的拋光,同時提供較低的靜態蝕刻速率以使含鎢通孔的區域中的氧化物之表面瑕疵、缺陷、腐蝕及侵蝕現象減至最少。
本發明可用於希望及/或需要低碟化/柱塞凹部、經研磨基材上的低陣列侵蝕、保持或推升鎢膜移除速率及保持鎢的可調整及/或高選擇性之鎢CMP。
在一形態中,本發明提供一種鎢化學機械拋光(CMP)組合物,其包含:a)奈米級研磨料;b)塗覆鐵化合物的粒子的固態觸媒;c)化學添加物,其係選自由六氫吡嗪衍生物、氰酸鹽類及其組合所組成的群組;d)氧化劑;及e)剩下部分實質上為液態載劑;其中該CMP組合物的pH係從約2.0至約8.0。
在另一形態中,本發明提供一種化學機械拋光含鎢半導體基材之方法,其包含以下步驟:a)提供一拋光墊;b)提供一化學機械拋光組合物,其包含:1)奈米級研磨料;
2)塗覆鐵化合物的粒子的固態觸媒;3)化學添加物,其係選自由六氫吡嗪衍生物、氰酸鹽類及其組合所組成的群組;4)氧化劑;5)剩下部分實質上為液態載劑;及其中該CMP組合物的pH係從約2.0至約8;c)使該半導體基材的表面與該拋光墊及該化學機械拋光組合物接觸;及d)拋光該半導體基材的表面;其中使該含鎢表面的至少一部分與該拋光墊及該化學機械拋光組合物二者接觸。
在又另一形態中,本發明提供一種選擇性化學機械拋光之方法,其包含以下步驟:a)提供表面含有鎢及至少一其他材料的半導體基材;b)提供一拋光墊;c)提供一化學機械拋光(CMP)組合物,其包含:1)奈米級研磨料;2)塗覆鐵化合物的粒子的固態觸媒;3)化學添加物,其係選自由六氫吡嗪衍生物、氰酸鹽類及其組合所組成的群組;4)氧化劑;及5)剩下部分實質上為液態載劑;其中該CMP組合物的pH係從約2.0至約8;d)使該半導體基材的表面與該拋光墊及該化學機械拋光組合
物接觸;及e)拋光該半導體基材的表面;其中使該含鎢表面的至少一部分與該拋光墊及該化學機械拋光組合物二者接觸;而且該鎢移除速率對至少一其他材料移除速率的比值等於或大於1。
在又另一形態中,本發明提供一種選擇性化學機械拋光之系統,其包含:a)表面含有鎢及至少一其他材料的半導體基材;b)拋光墊;及c)化學機械拋光(CMP)組合物,其包含:1)奈米級研磨料;2)塗覆鐵化合物的粒子的固態觸媒;3)化學添加物,其係選自由六氫吡嗪衍生物、氰酸鹽類及其組合所組成的群組;4)氧化劑;及5)剩下部分實質上為液態載劑;其中該CMP組合物的pH係從約2.0至約8;其中該含鎢表面的至少一部分與該拋光墊及該化學機械拋光組合物二者接觸。
任意地,該化學機械拋光(CMP)組合物另外包含以下一或多者:腐蝕抑制劑;pH緩衝劑;表面活性劑;及
當該拋光組合物的pH係從5.0至8.0時除生物劑(biocide)。
通常,該奈米級研磨料係選自由矽石、礬土、鈰氧、鈦氧、鋯土及其組合所組成的群組。
該固態觸媒係該等塗覆鐵化合物的粒子。該等用於製備固態觸媒的粒子適當地包括膠態氧化矽及其他類型的膠態或奈米級無機金屬氧化物粒子。
六氫吡嗪衍生物的實例係,但不限於,經取代的單胺基六氫吡嗪衍生物及經取代的雙胺基六氫吡嗪衍生物及其組合。
氰酸鹽的實例係,但不限於,氟酸鉀、氰酸鈉、氰酸銨及氰酸四烷基銨。
本發明的特徵包括:
#1.一種鎢化學機械拋光(CMP)組合物,其包含:a)0.1重量%至25重量%奈米級研磨料,其係選自由矽石、礬土、鈰氧、鈦氧、鋯土及其組合所組成的群組;b)0.1重量%至0.5重量%塗覆鐵化合物的粒子的固態觸媒,其係選自由塗覆鐵化合物的膠態氧化矽、膠態或奈米級無機金屬氧化物粒子及其組合所組成的群組;c)0.0001重量%至0.5重量%化學添加物,其係選自由六氫吡嗪衍生物、氰酸鹽類及其組合所組成的群組;d)0.5重量%至10重量%氧化劑;及e)剩下部分係液態載劑;其中該CMP組合物的pH係從約2.0至約8。
#2.如#1 之鎢化學機械拋光(CMP)組合物,其中該六氫吡嗪衍生物具有以下一般分子結構:
其中R1及R2係獨立地選自由以下所組成的群組:烷基、烷氧基、具有一或更多羥基的有機基團、經取代的有機磺酸、經取代的有機磺酸鹽、經取代的有機羧酸、經取代的有機羧酸鹽、有機羧酸酯、有機胺及其組合。
#3.如#2 之鎢化學機械拋光(CMP)組合物,其中該六氫吡嗪衍生物係具有以下分子結構的經取代的有機單胺基六氫吡嗪衍生物(a)或經取代的有機雙胺基六氫吡嗪衍生物(b):
其中鍵結於六氫吡嗪的6員環上的第1或4個位置處的氮原子之有機胺官能基可為相同或不同;n係從1至6,其表示橋接該六氫吡嗪環的氮原子和該有機胺官能基的氮原子的有機烷基的不同長度;及該有機胺官能基係選自由以下所組成的群組:一級胺官能基
(H2N-R-)、二級有機胺基團(HRN-R'-)及三級有機胺基團(RR'N-R"-);其中R、R'、R"及R'''係各自獨立地選自由以下所組成的群組:質子、烷基、烷氧基、具有一或更多羥基的有機基團、經取代的有機磺酸、經取代的有機磺酸鹽、經取代的有機羧酸、經取代的有機羧酸鹽、有機羧酸酯、有機胺及其組合;而且R、R'、R"及R'''可為相同或不同。
#4.如#2 之鎢化學機械拋光(CMP)組合物,其中該六氫吡嗪衍生物係選自由以下所組成的群組:(R)-六氫吡嗪-2-羧酸;1-(2-羥乙基)六氫吡嗪;六氫吡嗪-2,6-二酮;1-(2-胺乙基)六氫吡嗪;1,4-雙(2-羥乙基)六氫吡嗪;1,4-雙(丙烯醯基)六氫吡嗪;六氫吡嗪-1-醋酸第三丁酯;1-(3-甲基苯甲基)六氫吡嗪;4-Boc-六氫吡嗪-2-羧酸;1-(二苯基甲基)六氫吡嗪;1,4-雙-Boc-六氫吡嗪-2-羧酸;2-(六氫吡嗪-1-羰基)-苯甲酸;4-(六氫吡嗪-1-羰基)-六氫吡啶-1-羧酸第三丁酯;六氫吡嗪-1-羧酸;(2-氯苯基)-醯胺六氫吡嗪-1-羧酸二甲醯胺;六氫吡嗪-1-羧酸二乙醯胺;六氫吡嗪-1-羧酸二苯醯胺;六氫吡嗪-1-磺醯胺;六氫吡嗪-2-羧醯胺;1,2-二甲基-六氫吡嗪;1-(2-丁基)-六氫吡嗪;2-異丁基-六氫吡嗪;2-第三丁基六氫吡嗪;r-2-異丁基-六氫吡嗪;s-2-異丁基-六氫吡嗪;2-異丙基-六氫吡嗪;1-(2-嘧啶基)六氫吡嗪;1-(4-三氟甲基苯基)六氫吡嗪;1-(環丙基甲基)六氫吡嗪;1-(2-吡嗪基)-六氫吡嗪;1-(2-三氟甲基苯基)-六氫吡嗪;1-(6-噠嗪基)六氫吡嗪;2-(4-三氟甲基苯基)六氫吡嗪;2-苯基-六氫吡嗪-1-羧酸苯甲酯;1-(1-萘甲
基)六氫吡嗪;1-(1-戊基)六氫吡嗪;1-(2-戊基)-六氫吡嗪;1-(3-戊基)-六氫吡嗪;1-(丙醯基)-六氫吡嗪;2-苯基-六氫吡嗪-1-羧酸第三丁酯;1-Boc-六氫吡嗪;1-(4-氯苯基)六氫吡嗪;1-(2-呋喃甲醯基)六氫吡嗪;1-(2-氟苯基)六氫吡嗪;1-(2-羥苯基)六氫吡嗪;1-(2-苯基乙基)六氫吡嗪;1-(4-氟苯基)六氫吡嗪;1-(2-甲基苯甲基)六氫吡嗪;1-(4-羥苯基)六氫吡嗪;1-(4-甲基苯甲基)六氫吡嗪;1-(3-羥苯基)六氫吡嗪;1-(1-苯基乙基)六氫吡嗪;1-(2,4-二甲基苯基)六氫吡嗪;1-(2,5-二甲基苯基)六氫吡嗪;1-(2,5-二甲基苯基)六氫吡嗪;1-(2,6-二甲苯基)六氫吡嗪;1-(2-乙基苯基)六氫吡嗪;1-(2-乙基苯基)六氫吡嗪;1-(3,4-二甲基苯基)六氫吡嗪;1-(3,5-二甲基苯基)六氫吡嗪;1-(3-氟苯基)六氫吡嗪;1-(3-呋喃甲醯基)六氫吡嗪;1-(N-庚基)六氫吡嗪;1-特戊醯基-六氫吡嗪;2,3-二甲基-六氫吡嗪-1-羧酸第三丁酯;2-(2-氯苯基)六氫吡嗪;2-(4-氯苯基)六氫吡嗪;n-4-cbz-六氫吡嗪-2-羧酸甲酯;1-(2-吡啶基)六氫吡嗪;1-(2-甲氧基苯基)六氫吡嗪;1-(4-甲氧基苯基)六氫吡嗪;1-(4-氯二苯甲基)六氫吡嗪;1-(4-吡啶基)六氫吡嗪;1-(4-胺苯基)六氫吡嗪;1-(4-甲氧基苯甲基)六氫吡嗪;1-(2-氰苯基)六氫吡嗪;1-(1-金剛烷基)六氫吡嗪;1-(4-硝基苯基)六氫吡嗪;1-(2-甲氧基乙基)六氫吡嗪;2-(三氟甲基)六氫吡嗪;1-(3,4-二氯苯基)六氫吡嗪;1-Boc-六氫吡嗪-2-羧酸;1-(2,5-二氟苯甲基)六氫吡嗪;1-(2-乙氧基乙基)六氫吡嗪;1-(3,4-二氯苯甲基)六氫吡嗪;1-(3-甲氧基苯基)六氫吡嗪;1-(環己基甲基)六氫吡嗪;1-(3-甲基苯基)六氫吡嗪;1-(4-甲基苯基)六氫吡嗪;
1-(3-氟苯甲基)六氫吡嗪;1-(4-氟苯甲基)六氫吡嗪;2-(3-甲氧基苯基)六氫吡嗪;1-(3-氯苯甲基)六氫吡嗪;1-(環丙基羰基)六氫吡嗪;(R)-1-Boc-六氫吡嗪-2-羧酸;(R)-2-苯甲基-六氫吡嗪;(R)-3-羥甲基-六氫吡嗪-1-羧酸第三丁酯;(R)-4-N-Boc-六氫吡嗪-2-羧酸;(S)-2-苯甲基-六氫吡嗪;(S)-2-苯甲基-六氫吡嗪-1-羧酸第三丁酯;(S)-3-羥甲基-六氫吡嗪-1-羧酸第三丁酯;(S)-4-N-Boc-六氫吡嗪-2-羧酸;1-(1-六氫吡啶基磺基)六氫吡嗪;1-(2,2,2-三氟乙基)六氫吡嗪;1-(2,3-二氟苯基)六氫吡嗪;1-(2,4,6-三甲基苯甲基)六氫吡嗪;1-(2,4-二氯苯甲基)六氫吡嗪;1-(2,4-二氟苯基)六氫吡嗪;1-(2,6-二氯苯甲基)六氫吡嗪;1-(2-氯苯甲基)六氫吡嗪;1-(2-環己基乙基)六氫吡嗪;1-(2-二異丙基胺乙基)六氫吡嗪;1-(2-二丙基胺乙基)-六氫吡嗪;1-(2-乙氧基苯基)六氫吡嗪;1-(2-乙基丁醯基)六氫吡嗪;1-(2-氟苯甲基)六氫吡嗪;1-(2-異丙氧基乙基)六氫吡嗪;1-(2-甲基巰苯基)六氫吡嗪;1-(2-甲基丙醯基)-六氫吡嗪;1-(2-嗎啉基(4-位基)乙基)六氫吡嗪;1-(2-苯氧基乙基)六氫吡嗪;1-(2-六氫吡啶基(1-位基)乙基)六氫吡嗪;1-(2-吡咯啶基(1-位基)乙基)六氫吡嗪;1-(3,3-二甲基丁醯基)六氫吡嗪;1-(3,4-二氯苯甲醯基)六氫吡嗪;1-(3-(3,5-二氯苯基)六氫吡嗪;4-二氟苯甲醯基)六氫吡嗪;1-(3,4-二甲基苯甲基)六氫吡嗪;1-(3,5-二甲氧基苯甲醯基)六氫吡嗪;1-(3,5-二甲基苯甲醯基)六氫吡嗪;1-(3-胺丙基)六氫吡嗪;1-(3-氰丙基)六氫吡嗪;1-(3-二乙基胺丙基)六氫吡嗪;1-(3-二丙基胺丙基)-六氫吡嗪;1-(3-甲氧基丙基)-六氫吡嗪;1-(3-嗎啉基(4-
位基)丙基)六氫吡嗪;1-(3-苯基丙基)六氫吡嗪;1-(3-六氫吡啶基(1-位基)丙基)六氫吡嗪;1-(3-吡咯啶基(1-位基)丙基)六氫吡嗪;1-(4-氯苯甲醯基)六氫吡嗪;1-(4-氯苯甲基)六氫吡嗪;1-(4-乙氧基苯基)六氫吡嗪;1-(4-甲氧基苯甲醯基)-六氫吡嗪;1-(4-甲氧基丁基)六氫吡嗪;1-(4-苯基丁基)-六氫吡嗪;1-(4-吡啶基甲基)六氫吡嗪;1-(4-第三丁基苯甲基)六氫吡嗪;1-(環己基羰基)六氫吡嗪;1-(乙磺基)六氫吡嗪;1-(苯基乙醯基)六氫吡嗪;1-cbz-六氫吡嗪-2-羧酸;1-己醯基-六氫吡嗪;1-甲基磺基-六氫吡嗪;2,3-二苯基-六氫吡嗪;2-(2-呋喃基)六氫吡嗪;2-(2-甲氧基苯基)六氫吡嗪;2-(2-噻吩基)六氫吡嗪;2-(3-酮基-六氫吡嗪-1-羰基)-苯甲酸;2-(4-氯苯基)六氫吡嗪-1-羧酸第三丁酯;2-(4-甲氧基苯基)六氫吡嗪;2-(4-甲基苯基)六氫吡嗪;2-苯甲基-六氫吡嗪;3-(4-氯苯基)六氫吡嗪-1-羧酸第三丁酯;3-酮基-六氫吡嗪-2-羧酸;3-苯基-六氫吡嗪-1-羧酸乙酯;4-(4-Boc-六氫吡嗪-1-羰基)苯基硼酸頻那醇(pinacol)酯;[5-(4-甲基-六氫吡嗪-1-磺基)-吡啶-2-基]-肼;六氫吡嗪-1-羧酸甲酯;1-乙基-2-甲基-六氫吡嗪;1,4-雙(3-胺丙基)六氫吡嗪;1-[2-(2-羥基乙氧基)乙基]六氫吡嗪;1-(2-甲基-烯丙基)-六氫吡嗪;2-(3-三氟甲基-苯基)-六氫吡嗪;4-N-Boc-2-甲基-六氫吡嗪;1-(四氫-2-呋喃甲醯基)-六氫吡嗪;1-(四氫-2-呋喃基甲基)六氫吡嗪;(R)-1-Boc-2-乙基-六氫吡嗪;(R)-1-Boc-3-乙基-六氫吡嗪;(S)-1-Boc-2-乙基-六氫吡嗪;(S)-1-Boc-3-乙基-六氫吡嗪;1-[1-(2-甲氧基苯基)乙基]六氫吡嗪;1-[1-(3-甲氧基苯基)乙基]六氫吡嗪;1-[1-(4-甲氧
基苯基)-乙基]-六氫吡嗪;1-[2-(2-甲基苯氧基)乙基]六氫吡嗪;1-(4-乙氧基-苯甲基)-六氫吡嗪;1-Boc-2,6-二甲基-六氫吡嗪;1-Boc-3,3-二甲基-六氫吡嗪;1-Boc-3,5-二甲基-六氫吡嗪;1-Boc-5-酮基-六氫吡嗪-2-羧酸;1-N-(第三丁基羰基)-2-乙基-六氫吡嗪;2-(2-氟-苯基)-六氫吡嗪;2-(3-氟-苯基)-六氫吡嗪;2-甲基-1-(3-甲基苯基)六氫吡嗪;4-(5-胺吡啶-2-基)六氫吡嗪-1-羧酸第三丁酯;1-[2-(二甲基胺)乙基]六氫吡嗪;1-(1-甲基-4-六氫吡啶基)六氫吡嗪;1-乙醯基-4-(4-羥苯基)六氫吡嗪;1-[4-(三氟甲基)苯甲基]六氫吡嗪;1-Boc-4-(2-甲醯基苯基)六氫吡嗪;1-胺基-4-(2-羥乙基)六氫吡嗪;1-Boc-(4-苯甲基)六氫吡嗪;1-Boc-4-[3-(乙氧基羰基)苯基]六氫吡嗪;1-雙(4-氟苯基)甲基六氫吡嗪;1-Boc-4-(3-羥丙基)六氫吡嗪;1-Boc-4-(4-甲醯基苯基)六氫吡嗪;1-Boc-4-(4-甲氧基羰基苯基)六氫吡嗪;1-(1,3-二氧雜環戊烷-2-基甲基)六氫吡嗪;1-(3-胺丙基)-4-(2-甲氧基苯基)六氫吡嗪;1-[3-(二甲基胺)丙基]六氫吡嗪;1-(1,2,3,4-四氫萘-2-基)六氫吡嗪;1-(4-胺丁基)-4-(2-甲氧基苯基)六氫吡嗪;1-Boc-4-(2-甲氧基羰基苯基)六氫吡嗪;1-Boc-4-(5-硝基-2-吡啶基)六氫吡嗪;(R)-1-Boc-2-苯甲基-六氫吡嗪;(R)-1-N-Boc-2-異丙基六氫吡嗪;(R)-1-N-Boc-4-N-Fmoc-2-六氫吡嗪羧酸;(R)-1-N-cbz-2-甲基-六氫吡嗪;(R)-4-N-三苯甲基-2-甲基六氫吡嗪;(R)-N4-苯甲基-2-(苯甲氧基甲基)六氫吡嗪;(S)-1-Boc-2-羥甲基-六氫吡嗪;(S)-1-Boc-2-異丁基-六氫吡嗪;(S)-1-Boc-3-苯甲基-六氫吡嗪;(S)-1-Boc-3-異丙基-六氫吡嗪;(S)-1-N-Boc-4-N-Fmoc-
六氫吡嗪-2-羧酸;(S)-4-N-三苯甲基-2-甲基-六氫吡嗪;(S)-4-苯甲基-2-(甲基硫乙基)六氫吡嗪;1-[(2,6-二氯苯基)磺基]六氫吡嗪;1-[(2-甲基-1,3-噻唑-5-基)甲基]六氫吡嗪;1-[(4,5-二甲基-1,3-噁唑-2-基)甲基]六氫吡嗪;1-[(4-環己基苯基)磺基]六氫吡嗪;1-[(4-異丁基苯基)磺基]六氫吡嗪;1-[(4-甲基-1,2,5-噁二唑-3-基)甲基]六氫吡嗪;1-[(4-第二丁基苯基)磺基]六氫吡嗪;1-[(4-第三丁基-2,6-二甲基苯基)磺基]六氫吡嗪;1-[1-(吡啶-2-基)乙基]六氫吡嗪;1-[1-(吡啶-3-基)乙基]六氫吡嗪;1-[1-(噻吩-2-基)乙基]六氫吡嗪;1-[2-(1-丙基)-氧乙基]-六氫吡嗪;1-[2-(1H-吡咯-1-基)乙基]六氫吡嗪;1-[2-(2-甲氧基-苯氧基)-乙基]-六氫吡嗪;1-[2-(二烯丙基胺)-乙基]-六氫吡嗪;1-[2-(三氟甲基)吡啶-4-基]六氫吡嗪;1-[2-(三氟甲基)醌醇-4-基]六氫吡嗪;1-[2-氟-4-(甲基磺基)苯基]六氫吡嗪;1-[2-氟-4-(甲基磺基)苯基]-4-(2-羥乙基)六氫吡嗪;1-[3-(1-六氫吡啶基羰基)-2-吡啶基]六氫吡嗪;1-[3-(二氟甲氧基)苯甲醯基]六氫吡嗪;1-[3-(三氟甲基)吡啶-2-基]六氫吡嗪;1-[4-(甲基磺基)苯基]六氫吡嗪;1-[4-(三氟甲基)嘧啶-2-基]六氫吡嗪;1-(1H-咪唑-2-基甲基)六氫吡嗪;1-(2,6-二甲基吡啶-4-基)六氫吡嗪;1-(2-二苯甲氧基-乙基)-六氫吡嗪;1-(2-羥乙基)-4-異丙基-六氫吡嗪;1-(2-咪唑-1-基-乙基)-六氫吡嗪;1-(2-異氰基-乙基)-4-甲基-六氫吡嗪;1-(2-甲基-噻唑-4-基甲基)-六氫吡嗪;1-(2-N-Boc-胺乙基)六氫吡嗪;1-(2-吡啶-2-基-乙基)-六氫吡嗪;1-(2-吡啶-4-基-乙基)-六氫吡嗪;1-(2-噻吩-2-基-乙基)六氫吡嗪;1-(3,5-二甲基-異噁唑-4-基甲基)-六氫吡嗪;1-(3-
甲氧基-苯甲基)-六氫吡嗪;1-(3-甲基-苯甲醯基)-六氫吡嗪;1-(3-甲基-吡啶-2-基甲基)-六氫吡嗪;1-(3-甲基吡啶-2-基)六氫吡嗪;1-(3-甲基吡啶-4-基)六氫吡嗪;1-(4,6-二甲基嘧啶-2-基)六氫吡嗪;1-(4-氰基-苯甲基)-六氫吡嗪;1-(4-乙氧基-苯磺基)-六氫吡嗪;1-(4-乙氧基-吡啶-2-基)-六氫吡嗪;1-(4-氟苯甲基)-4-(2-羥乙基)六氫吡嗪;1-(4-羥基-苯基)-六氫吡嗪-4-羧酸第三丁酯;(現在在第14頁)N-Boc-六氫吡啶;2-甲基六氫吡嗪;2,6-二甲基六氫吡嗪;反式-2,5-二甲基六氫吡嗪;1,4-二甲基六氫吡嗪;(R)-1-Boc-3-甲基六氫吡嗪;1-Boc-3-酮基六氫吡嗪;1,4-雙-(2-甲氧基-5-甲基-苯磺基)-2-甲基-六氫吡嗪;1-[(1-甲基-1H-吡唑-3-基)羰基]六氫吡嗪;1-[(1-甲基-1H-吡唑-4-基)甲基]六氫吡嗪;1-(2-(N,N-雙-(2-羥丙基)-胺)-乙基)-4-(2-羥丙基)-六氫吡嗪;1-(2-甲氧基苯基)-4-((4-(2-甲氧基苯基)-1-六氫吡嗪基)(酮基)乙醯基)六氫吡嗪;1-(3-(2,3-二氫-1,4-苯并二噁英-6-基)丙烯醯基)-4-(4-氟苯基)六氫吡嗪;1-(4-氯苯基)-4-[(7-{[4-(4-氯苯基)-1-六氫吡嗪基]磺基}-9H-茀-2-基)磺基]六氫吡嗪;1-(4-氟苯基基)-4-((4-(4-氟苯基基)-1-六氫吡嗪基)(酮基)乙醯基)六氫吡嗪;1-(4-硝基苯基)-4-(3-{[4-(4-硝基苯基)-1-六氫吡嗪基]羰基}苯甲醯基)六氫吡嗪;1-(4-硝基苯基)-4-(4-{[4-(4-硝基苯基)-1-六氫吡嗪基]羰基}苯甲醯基)六氫吡嗪;1-乙醯基-4-(1-乙基-1H-咪唑-2-基)六氫吡嗪;1-二苯甲基-4-{2-[5-(苯甲基硫基)-4-(2-甲基-2-丙烯基)-4H-1,2,4-三唑-3-基]乙基}六氫吡嗪;1-苯甲基-4-[2-[(2',4'-二氟[1,1'-二苯基]-4-基)氧基]乙基]六氫吡嗪;1-
苯甲基-4-(3-((2',4'-二氟(1,1'-二苯基)-4-基)氧基)丙基)六氫吡嗪;1-異丙基-4-[(1-甲基-1H-吡咯-2-基)甲基]六氫吡嗪;1-甲基-4-({7-[(4-甲基-1-六氫吡嗪基)磺基]-9H-茀-2-基}磺基)六氫吡嗪;1-苯基-4-[苯基(4-苯基-1-六氫吡嗪基)甲基]六氫吡嗪;1-甲基-4-(甲基磺基)六氫吡嗪;4-(2-羥基-乙基)-六氫吡嗪-1-羧酸(4-異丙基-苯基)-醯胺;6-羥甲基-1,3-二甲基-六氫吡嗪-2,5-二酮;2,2'-(六氫吡嗪-1,4-二基)二乙磺酸雙(2-甲氧基苯酯);1-(金剛烷-1-亞磺醯基)-4-甲基-六氫吡嗪;1-(苯基磺基)-4-(2-吡啶基)六氫吡嗪;1-苯甲基-4-(2-甲氧基丙醯基)六氫吡嗪;1-環己基-4-(甲基磺基)六氫吡嗪;1-乙基-4-(3-呋喃基甲基)六氫吡嗪;1-(3-苯氧基-4-吡啶基)六氫吡嗪;1-(2-吡啶基)-4-(3-(2,3,4-三甲氧基苯基)丙烯醯基)六氫吡嗪;1-(3-(1,3-苯并二噁茂-5-基)丙烯醯基)-4-(2-吡啶基)六氫吡嗪;1-(3-(1,3-苯并二噁茂-5-基)丙烯醯基)-4-(4-甲氧基苯基)六氫吡嗪;1,4-雙-(2-吡啶基亞甲基胺)-六氫吡嗪;1,4-雙-(3,4,5-三甲氧基苯亞甲胺基-六氫吡嗪;1,4-雙-(乙醯乙醯基)-六氫吡嗪;1,4-雙(2-呋喃甲醯基)六氫吡嗪;1,4-雙[2-(4-吡啶基)乙基]六氫吡嗪;1,4-雙(2-(2-吡啶基)乙基)六氫吡嗪;1,4-雙(2-羧氧基苯甲醯基)六氫吡嗪;1,4-雙(3-吡啶基甲基)六氫吡嗪;1-(乙氧基羰基甲基)六氫吡嗪;2,3,5,6-四羥基-六氫吡嗪-1,4-二甲醛;4-苯甲基-六氫吡嗪-1-羧酸環己基醯胺;2,2'-(六氫吡嗪-1,4-二基)雙(2-酮基醋酸)二乙酯;2,2'-(六氫吡嗪-1,4-二基)二醋酸二乙酯;3,3'-(六氫吡嗪-1,4-二基)二丙酸二甲酯;(2E,2'E)-3,3'-(六氫吡嗪-1,4-二基)雙(1-(2-羥苯基)丙-2-烯-1-酮);2,2'-(六氫吡
嗪-1,4-二基)雙(N-(1,5-二甲基-3-酮基-2-苯基-2,3-二氫-1H-吡唑-4-基)乙醯胺);2,2'-(六氫吡嗪-1,4-二基)二丙醯胺;2,2'-(六氫吡嗪-1,4-二基)二丙腈;雙(1-(9H-咔唑-9-基)丙-2-醇)反丁烯二酸3,3'-(六氫吡嗪-1,4-二酯);3,3'-(六氫吡嗪-1,4-二基)雙(1-苯基丙-1-酮);3,3'-(六氫吡嗪-1,4-二基)二丙-1-醇;4,4'-(六氫吡嗪-1,4-二基)雙(3-乙氧基環丁-3-烯-1,2-二酮;六氫吡嗪-1,4-二硫代羧酸雙-苯基醯胺;1,4-二-第三丁基-六氫吡嗪-2,5-二酮;1,4-二(十二基)-六氫吡嗪;1,4-二(十六基)-六氫吡嗪;1-(1-六氫吡啶基羰基)六氫吡嗪;1-(1-金剛烷基甲基)六氫吡嗪;1-(3,4-二甲氧基苯甲基)六氫吡嗪;1-(3-吡啶基羰基)六氫吡嗪;4-六氫吡嗪并苯腈;(S)-3-甲基-2-酮基六氫吡嗪;(R)-3-甲基-2-酮基六氫吡嗪;4-(Boc-六氫吡嗪-1-基)-3-硝基苯甲酸;1,1'-(六氫吡嗪-1,4-二基)二丙-2-醇;2,2'-(六氫吡嗪-1,4-二基)雙(1-苯基乙醇);2,2'-(六氫吡嗪-1,4-二基)雙(2-甲基丙腈);六氫吡嗪-N,N'-雙(2-乙磺酸);1-甲醯基六氫吡嗪;PIPES鈉鹽;PIPES二鈉鹽;PIPES二鉀鹽;六氫吡嗪-N,N'-雙(2-羥基丙磺酸);1-六氫吡嗪羧酸乙酯;POPSO二鈉鹽;4-羥基-3-甲氧基苯乙二醇半哌嗪鎓鹽;檸檬酸倍半哌嗪鹽水合物(citric acid sesquipiperazine salt hydrate);4-(2-羥乙基)六氫吡嗪-1-乙磺酸;4-(2-羥乙基)-1-六氫吡嗪丙磺酸;HEPES鈉鹽;N-(2-羥乙基)六氫吡嗪-N'-(4-丁磺酸);3-甲基-2-酮基六氫吡嗪;HEPES鉀鹽;3-六氫吡嗪并丙腈;六氫吡嗪并醋酸乙酯;雌酮硫酸酯哌嗪(Estropipate);1-六氫吡嗪丙醇;4-(2-胺基-1-苯基乙基)六氫吡嗪羧酸第三丁酯;4-[2-(胺甲基)苯基]六氫吡
嗪-1-羧酸第三丁酯;4-[5-(羥甲基)吡啶-2-基]六氫吡嗪-1-羧酸第三丁酯;4-(3-胺苯甲基)六氫吡嗪-1-羧酯第三丁酯;4-(4-[(甲基胺)甲基]苯基)六氫吡嗪-1-羧羧第三丁酯;4-(4-氰基吡啶-2-基)六氫吡嗪-1-羧酸第三丁酯;4-(5-甲醯基吡啶-2-基)六氫吡嗪-1-羧酸第三丁酯;4-(氧雜環丁-3-基)六氫吡嗪-1-羧酸第三丁酯;4-(六氫吡啶-3-基)六氫吡嗪-1-羧酸第三丁酯;4-(吡咯啶-2-基羰基)六氫吡嗪-1-羧酸第三丁酯;4-(1H-吡咯[2,3-b]吡啶-4-基)六氫吡嗪-1-羧酸第三丁酯;1-[2-(2,5-二甲基-1H-吡咯-1-基)乙基]六氫吡嗪;1-((1,5-二甲基-1H-吡唑-4-基)甲基)六氫吡嗪;1-(1-乙基-5-甲基-1H-吡唑-4-基甲基)-六氫吡嗪;4-(2-胺基-1-[4-(三氟甲基)苯基]乙基)六氫吡嗪羧酸第三丁酯;3-(4-氟-苯基)-六氫吡嗪-1-羧酸第三丁酯;3-(4-羥基-苯基)-六氫吡嗪-1-羧酸第三丁酯;3-呋喃-2-基-六氫吡嗪-1-羧酸第三丁酯;3-噻吩-2-基-六氫吡嗪-1-羧酸苯甲酯;4-(2-胺基-苯基)-六氫吡嗪-1-羧酸第三丁酯;4-(2-胺乙基)-1-boc-六氫吡嗪;4-(5-羧氧基-吡啶-2-基)-2-甲基-六氫吡嗪-1-羧酸第三丁酯;4-Boc-1-(6-甲基-2-吡啶基)六氫吡嗪;Fmoc-4-羧氧基甲基-六氫吡嗪;4-Boc-六氫吡嗪-2-羧酸甲酯;N,N-二甲基-1-六氫吡嗪磺醯胺;N-1-Boc-N-4-Fmoc-2-六氫吡嗪羧酸;N-4-Boc-N-1-cbz-2-六氫吡嗪羧酸;N-4-Boc-N-1-Fmoc-2-六氫吡嗪醋酸;帶有六氫吡嗪-1-羧脒(carboximidamide)的硫酸化合物(1:1);1-乙基-4-六氫吡啶-4-基-六氫吡嗪;1-呋喃-2-基甲基-六氫吡嗪;1-甲基-4-(2-六氫吡啶-4-基-乙基)-六氫吡嗪;1-甲基-4-(6-胺吡啶-3-基)六氫吡
嗪;1-甲基-4-(六氫吡啶-4-基)-六氫吡嗪;1-N-Boc-4-(四氫吖啶-3-基)六氫吡嗪;1-吡啶-2-基甲基-六氫吡嗪;1-吡啶-3-基甲基-六氫吡嗪;1-噻唑-2-基-六氫吡嗪;2-(2,5-二甲氧基-苯基)-六氫吡嗪;2-羧氧基甲基-3-酮基-六氫吡嗪-1-羧酸第三丁酯;2-乙氧基羰基甲基-3-酮基-六氫吡嗪-1-羧酸第三丁酯;1-(4-甲基-環己基)-六氫吡嗪;1-(4-甲基-六氫吡啶-1-磺基)-六氫吡嗪;1-(4-三氟甲基-吡啶-2-基)-六氫吡嗪;1-(5-甲基-2-吡啶基)六氫吡嗪;1-(5-甲基-2-噻唑基)-六氫吡嗪;1-(5-硝基吡啶-2-基)六氫吡嗪;1-(6-丁氧基-2-吡啶基)六氫吡嗪;1-(6-甲基吡啶-2-基)六氫吡嗪;1-(N-甲基六氫吡啶-3-基-甲基)六氫吡嗪;1-(噻吩-2-基乙醯基)六氫吡嗪;1-Boc-4-(六氫吡啶-4-基)-六氫吡嗪;1-Boc-4-氰甲基六氫吡嗪;1-環己-3-烯基甲基-六氫吡嗪及其組合。
#5.如#2 之鎢化學機械拋光(CMP)組合物,其中該六氫吡嗪衍生物係選自由以下所組成的群組:經單取代的1-(2-胺乙基)六氫吡嗪、經雙取代的1,4-雙-(3-胺丙基)六氫吡嗪及其組合。
#6.如#1 之鎢化學機械拋光(CMP)組合物,其中該化學添加物選自由氰酸鉀、氰酸鈉、氰酸銨、氰酸四烷基銨及其組合所組成的群組的氰酸鹽。
#7.如#1 之鎢化學機械拋光(CMP)組合物,其另外包含以下一或多者:腐蝕抑制劑;pH緩衝劑;
表面活性劑;及當該拋光組合物的pH係介於5.0至8.0時除生物劑(biocide)。
#8.一種選擇性化學機械拋光之方法,其包含以下步驟:a)提供表面含有鎢及至少一其他材料的半導體基材;b)提供一拋光墊;c)提供一化學機械拋光(CMP)組合物,其包含:1)0.1重量%至25重量%選自由矽石、礬土、鈰氧、鈦氧、鋯土及其組合所組成的群組的奈米級研磨料;2)0.1重量%至0.5重量%塗覆鐵化合物的粒子的固態觸媒,其係選自由塗覆鐵化合物的膠態氧化矽、膠態或奈米級無機金屬氧化物粒子及其組合所組成的群組;3)0.0001重量%至0.5重量%化學添加物,其係選自由六氫吡嗪衍生物、氰酸鹽類及其組合所組成的群組;4)0.5重量%至10重量%氧化劑;及5)剩下部分為液態載劑;其中該CMP組合物的pH係從約2.0至約8;d)使該半導體基材的表面與該拋光墊及該化學機械拋光組合物接觸;及e)拋光該半導體基材的表面;其中該含鎢表面的至少一部分與該拋光墊及該化學機械拋光組合物二者接觸;而且該鎢移除速率對至少一其他材料移除速率的比值等於或大於1。
#9.如#8 之含鎢半導體基材之化學機械拋光方法,其中該化學添加物係具有以下一般分子結構六氫吡嗪衍生物:
其中R1及R2係獨立地選自由以下所組成的群組:烷基、烷氧基、具有一或更多羥基的有機基團、經取代的有機磺酸、經取代的有機磺酸鹽、經取代的有機羧酸、經取代的有機羧酸鹽、有機羧酸酯、有機胺及其組合。
#10. 如#8 之含鎢半導體基材之化學機械拋光方法,其中該六氫吡嗪衍生物係具有以下分子結構的(a)經取代的有機單胺基六氫吡嗪衍生物或(b)經取代的有機雙胺基六氫吡嗪衍生物:
其中鍵結於六氫吡嗪的6員環上的第1或4個位置處的氮原子之有機胺官能基可為相同或不同;n係從1至6,其表示橋接該六氫吡嗪環的氮原子和該有機胺
官能基的氮原子的有機烷基的不同長度;及該有機胺官能基係選自由以下所組成的群組:一級胺官能基(H2N-R-)、二級有機胺基團(HRN-R'-)及三級有機胺基團(RR'N-R"-);其中R、R'、R"及R'''係各自獨立地選自由以下所組成的群組:質子、烷基、烷氧基、具有一或更多羥基的有機基團、經取代的有機磺酸、經取代的有機磺酸鹽、經取代的有機羧酸、經取代的有機羧酸鹽、有機羧酸酯、有機胺及其組合;而且R、R'、R"及R'''可為相同或不同。
#11. 如#9 之含鎢半導體基材之化學機械拋光方法,其中該化學添加物係選自以上#4所列示的群組的六氫吡嗪衍生物。
#12. 如#9 之含鎢半導體基材之化學機械拋光方法,其中該化學添加物係選自由經單取代的1-(2-胺乙基)六氫吡嗪、經雙取代的1,4-雙-(3-胺丙基)六氫吡嗪及其組合所組成的群組的六氫吡嗪衍生物。
#13. 如#9 之含鎢半導體基材之化學機械拋光方法,其中該化學添加物係選自由氰酸鉀、氰酸鈉、氰酸銨、氰酸四烷基銨及其組合所組成的群組的氰酸鹽。
#14. 如#9 之含鎢半導體基材之化學機械拋光方法,其中該化學機械拋光(CMP)組合物另外包含以下一或多者:腐蝕抑制劑;pH緩衝劑;
表面活性劑;及當該拋光組合物的pH係介於5.0至8.0時除生物劑。
#15. 一種選擇性化學機械拋光之系統,其包含:a)表面含有鎢及至少一其他材料的半導體基材;b)一拋光墊;c)一化學機械拋光(CMP)組合物,其包含:1)0.1重量%至25重量%選自由矽石、礬土、鈰氧、鈦氧、鋯土及其組合所組成的群組的奈米級研磨料;2)0.1重量%至0.5重量%塗覆鐵化合物的粒子的固態觸媒,其係選自由塗覆鐵化合物的膠態氧化矽、膠態或奈米級無機金屬氧化物粒子及其組合所組成的群組;3)0.0001重量%至0.5重量%化學添加物,其係選自由六氫吡嗪衍生物、氰酸鹽類及其組合所組成的群組;4)0.5重量%至10重量%氧化劑;及5)剩下部分為液態載劑;其中該CMP組合物的pH係從約2.0至約8;其中該含鎢表面的至少一部分與該拋光墊及該化學機械拋光組合物接觸。
#16. 如#15 之選擇性化學機械拋光之系統,其中該化學添加物係具有以下一般分子結構六氫吡嗪衍生物:
其中R1及R2係獨立地選自由以下所組成的群組:烷基、烷氧基、具有一或更多羥基的有機基團、經取代的有機磺酸、經取代的有機磺酸鹽、經取代的有機羧酸、經取代的有機羧酸鹽、有機羧酸酯、有機胺及其組合。
#17. 如#16 之選擇性化學機械拋光之系統,其中該六氫吡嗪衍生物係具有以下分子結構的經取代的有機單胺基六氫吡嗪衍生物(a)或經取代的有機雙胺基六氫吡嗪衍生物(b):
其中鍵結於六氫吡嗪的6員環上的第1或4個位置處的氮原子之有機胺官能基可為相同或不同;n係從1至6,其表示橋接該六氫吡嗪環的氮原子和該有機胺官能基的氮原子的有機烷基的不同長度;及該有機胺官能基係選自由以下所組成的群組:一級胺官能基(H2N-R-)、二級有機胺基團(HRN-R'-)及三級有機胺基團(RR'N-R"-);其中R、R'、R"及R'''係各自獨立地選自由以下所組成的群組:質子、烷基、烷氧基、具有一或更多羥基的有機基團、
經取代的有機磺酸、經取代的有機磺酸鹽、經取代的有機羧酸、經取代的有機羧酸鹽、有機羧酸酯、有機胺及其組合;而且R、R'、R"及R'''可為相同或不同。
#18. 如#15 之選擇性化學機械拋光之系統,其中該化學添加物係選自以上#4所列示的群組的六氫吡嗪衍生物。
#19. 如#15 之選擇性化學機械拋光之系統,其中該化學添加物係選自由經單取代的1-(2-胺乙基)六氫吡嗪、經雙取代的1,4-雙-(3-胺丙基)六氫吡嗪及其組合所組成的群組的六氫吡嗪衍生物。
#20. 如#15 之選擇性化學機械拋光之系統,其中該化學添加物係選自由氰酸鉀、氰酸鈉、氰酸銨、氰酸四烷基銨及其組合所組成的群組的氰酸鹽。
#21. 如#15 之選擇性化學機械拋光之系統,其中該化學機械拋光(CMP)組合物另外包含以下一或多者:腐蝕抑制劑;pH緩衝劑;表面活性劑;及當該拋光組合物的pH係介於5.0至8.0時除生物劑。
關聯本發明的任何形態所描述的特徵均能關聯本發明的任何其他形態。
本文所揭示的鎢漿料組合物合適地主要包含奈
米級研磨料、於膠態氧化矽粒子表面上的固態觸媒及經挑選的適合化學添加物、經挑選的適合氧化劑及實質上剩餘部分的液態載劑。
該化學機械拋光(CMP)組合物任意地另外包含以下一或多者:腐蝕抑制劑;pH緩衝劑;表面活性劑;及當該拋光組合物的pH係介於5.0至8.0時除生物劑。
用於本文所揭示的鎢CMP拋光組合物的奈米級研磨料粒子包括,但不限於,以下:具有窄細或寬廣的粒徑分佈、具有各種不同大小及具有各種不同形狀(該等研磨料的各種不同形狀包括球形、繭形、凝集體形及其他形狀)的膠態氧化矽、其他金屬氧化物摻入該膠態氧化矽晶格內的膠態氧化矽粒子(例如摻入氧化鋁的氧化矽粒子)、膠態氧化鋁(其包括α-、β-及γ-型氧化鋁)、膠態且光活性的二氧化鈦、氧化鈰、膠態氧化鈰、奈米級鑽石粒子、奈米級氮化矽粒子、單峰、雙峰、多峰膠態研磨料粒子、氧化鋯、以有機聚合物為底質的軟質研磨粒、經表面塗覆或改質的研磨料及其混合物。
用於本文所揭示的鎢CMP拋光組合物的研磨料粒子的平均粒徑較佳在5nm至500nm的範圍中,更佳在15nm至250nm的範圍中,而且最佳在25nm至150nm的範圍中。平均粒徑能舉例來說藉由動態光散射技術來測量。
本發明的鎢CMP拋光組合物含有0.1重量%至25
重量%研磨料;較佳地,0.5重量%至5重量%。
通常,該固態觸媒係塗覆鐵化合物的粒子。氧化鐵係較佳的鐵化合物。適用於製備固態觸媒的粒子包括膠態氧化矽及其他類型的膠態或奈米級無機金屬氧化物粒子。固態觸媒的實例係膠態氧化矽上塗覆氧化鐵。美國專利US7014669、US7029508及US7427305中有揭示當該固態觸媒使用的適合塗覆氧化鐵的膠態氧化矽粒子的實例。
本發明的CMP漿料含有介於0.01重量%至10重量%;較佳地介於0.1重量%至0.5重量%的固態觸媒。有兩類型的化學添加物。
第一型經選定的化學添加物提供於鎢膜上具有低靜態蝕刻速率的拋光組合物。降低靜態蝕刻速率提供於鎢金屬膜表面上較佳的腐蝕防護性,並且在拋光鎢或含鎢基材時降低該碟化現象、侵蝕現象及柱塞凹部。由於降低靜態蝕刻速率,於是該化學添加物被視為用於鎢金屬表面腐蝕防護的腐蝕抑制劑。
第二型用於該等鎢拋光組合物的化學添加物不僅表現成腐蝕抑制劑以降低於鎢金屬膜表面上的靜態蝕刻速率,提供較佳的鎢金屬表面腐蝕防護,而且還推升鎢膜移除速率。於本文所揭示的鎢拋光組合物中的第二型化學添加物係雙功能性化學添加物。
除此之外,在該鎢膜移除速率推升的情況下拋光介電膜時的移除速率較佳不受影響。因此,能提高拋光鎢/介電質(W/D)膜的選擇性以供給在拋光W/D膜時具有較高選擇
性的鎢CMP拋光漿料。該等含有第二型化學添加物的鎢化學機械拋光組合物能提供於鎢膜表面上較佳的腐蝕防護性及拋光W/D膜時較高的選擇性以符合半導體產業的各種不同需要。
該第一及第二化學添加物二者均能傳遞可調整的移除速率及可調整的W/D膜拋光選擇性。
當腐蝕抑制劑用於所揭示的鎢CMP漿料之經選定而且適合的第一型化學添加物包括,但不限於,以下:六氫吡嗪及其衍生物。
一些較佳六氫吡嗪衍生物的一般分子結構係:
其中R1及R2係獨立地選自氫、經任意取代的烷基、經任意取代的芳基、經任意取代的芳烷基、經任意取代的烷氧基、具有一或更多羥基的經任意取代的有機基團、經任意取代的有機磺酸(-RSO3H)、經任意取代的有機磺酸鹽、經任意取代的酮基、經任意取代的有機羧酸(-RCO2H)、經任意取代的有機羧酸鹽(-RCOOM)、經任意取代的有機羧酸酯(-RCOOR')、經任意取代的有機胺(例如-RNH2)、經任意取代的有機醯胺及其組合;以有機胺為基礎的六氫吡嗪衍生物被視為當本文所揭示的鎢化學機械拋光組合物中的腐蝕抑制劑使用的重要化學添加物。
R及R'可為舉例來說,烴側鏈,而且M可為,
舉例來說,鈉、銨或鉀。可行的取代基包括氟及氯。
在一些較佳具體實施例中,R1係有機胺基,其係烷基胺基,較佳為線性烷基胺基,更佳為一級烷基胺基。實例為2-胺乙基及3-胺丙基。在這樣的具體實施例中R2適當地為氫或與R1相同的基團。
明確地說,適合的六氫吡嗪類及其衍生物包括:具有以下分子結構的(a)經取代的有機單胺基六氫吡嗪衍生物及(b)經取代的有機雙胺基六氫吡嗪衍生物:
如(a)所示,該具有適合有機胺官能基的經單取代的有機胺化合物係鍵結於六氫吡嗪的6員環上的第1或4個位置處的氮原子。
如(a)所示,該具有適合有機胺官能基的經雙取代的有機胺化合物係鍵結於六氫吡嗪的6員環上的第1和4個位置處的氮原子。
於(a)和(b)中的有機胺官能基可為一級胺基(H2N)、二級有機胺基(HRN-)或三級有機胺基(RR'N-)(也能表示成R'''2N-)。於(a)和(b)中的R、R‘、R"及R'''可各自獨立地選自質子(氫)、烷基、烷氧基、具有一或更多羥基的有機基團、經取代的有機磺酸、經取代的有機磺酸鹽、經取代的有機羧
酸、經取代的有機羧酸鹽、有機羧酸酯、有機胺及其組合;R、R'、R"及R'''可為相同或不同。(a)中的R"較佳不為有機胺基。
n的數字可變化於1至6,其表示橋接該六氫吡嗪環的氮原子和該有機胺或胺基的氮原子的有機烷基的不同長度。較佳為n=2或3。
另外,於六氫吡嗪的第1個位置處的有機胺官能基能與於六氫吡嗪的第4個位置處的有機胺官能基相同,或其能與於六氫吡嗪的第4個位置處的有機胺官能基不同。
在式(a)及(b)的一些較佳具體實施例中,R及R'係氫。在此情況中,(a)中的R"較佳為氫而且式(b)中的各個R'''較佳為氫。適當地n=2或3,所以該六氫吡嗪環上的較佳基團係2-胺乙基及3-胺丙基。單取代(式(a))或雙取代(式(b))均可行,而且該等取代基係相同或不同。
預期也會有於該六氫吡嗪環的碳(第2、3、5、6個位置)之處的取代或其他修飾(例如酮基)。
此第一型化學添加物的實例包括,但不限於1-(苯甲氧基羰基)六氫吡嗪;(R)-六氫吡嗪-2-羧酸;1-(2-羥乙基)六氫吡嗪;六氫吡嗪-2,6-二酮;1-(2-胺乙基)六氫吡嗪;1,4-雙(2-羥乙基)六氫吡嗪;1,4-雙(丙烯醯基)六氫吡嗪;六氫吡嗪-1-醋酸第三丁酯;1-(3-甲基苯甲基)六氫吡嗪;4-Boc-六氫吡嗪-2-羧酸;1-(二苯基甲基)六氫吡嗪;1,4-雙-Boc-六氫吡嗪-2-羧酸;2-(六氫吡嗪-1-羰基)-苯甲酸;4-(六氫吡嗪-1-羰基)-六氫吡啶-1-羧酸第三丁酯;六氫吡嗪-1-羧酸;(2-氯苯基)-醯胺六氫吡嗪-1-羧酸二甲醯胺;六氫吡嗪-1-羧酸二乙醯胺;六
氫吡嗪-1-羧酸二苯醯胺;六氫吡嗪-1-磺醯胺;六氫吡嗪-2-羧醯胺;1,2-二甲基-六氫吡嗪;1-(2-丁基)-六氫吡嗪;2-異丁基-六氫吡嗪;2-第三丁基六氫吡嗪;r-2-異丁基-六氫吡嗪;s-2-異丁基-六氫吡嗪;2-異丙基-六氫吡嗪;1-(2-嘧啶基)六氫吡嗪;1-(4-三氟甲基苯基)六氫吡嗪;1-(環丙基甲基)六氫吡嗪;1-(2-吡嗪基)-六氫吡嗪;1-(2-三氟甲基苯基)-六氫吡嗪;1-(6-噠嗪基)六氫吡嗪;2-(4-三氟甲基苯基)六氫吡嗪;2-苯基-六氫吡嗪-1-羧酸苯甲酯;1-(1-萘甲基)六氫吡嗪;1-(1-戊基)六氫吡嗪;1-(2-戊基)-六氫吡嗪;1-(3-戊基)-六氫吡嗪;1-(丙醯基)-六氫吡嗪;2-苯基-六氫吡嗪-1-羧酸第三丁酯;1-Boc-六氫吡嗪;1-(4-氯苯基)六氫吡嗪;1-(2-呋喃甲醯基)六氫吡嗪;1-(2-氟苯基)六氫吡嗪;1-(2-羥苯基)六氫吡嗪;1-(2-苯基乙基)六氫吡嗪;1-(4-氟苯基)六氫吡嗪;1-(2-甲基苯甲基)六氫吡嗪;1-(4-羥苯基)六氫吡嗪;1-(4-甲基苯甲基)六氫吡嗪;1-(3-羥苯基)六氫吡嗪;1-(1-苯基乙基)六氫吡嗪;1-(2,4-二甲基苯基)六氫吡嗪;1-(2,5-二甲基苯基)六氫吡嗪;1-(2,5-二甲基苯基)六氫吡嗪;1-(2,6-二甲苯基)六氫吡嗪;1-(2-乙基苯基)六氫吡嗪;1-(2-乙基苯基)六氫吡嗪;1-(3,4-二甲基苯基)六氫吡嗪;1-(3,5-二甲基苯基)六氫吡嗪;1-(3-氟苯基)六氫吡嗪;1-(3-呋喃甲醯基)六氫吡嗪;1-(N-庚基)六氫吡嗪;1-特戊醯基-六氫吡嗪;2,3-二甲基-六氫吡嗪-1-羧酸第三丁酯;2-(2-氯苯基)六氫吡嗪;2-(4-氯苯基)六氫吡嗪;n-4-cbz-六氫吡嗪-2-羧酸甲酯;1-(2-吡啶基)六氫吡嗪;1-(2-甲氧基苯基)六氫吡嗪;1-(4-甲氧基苯基)六氫吡嗪;1-(4-氯二苯甲基)六
氫吡嗪;1-(4-吡啶基)六氫吡嗪;1-(4-胺苯基)六氫吡嗪;1-(4-甲氧基苯甲基)六氫吡嗪;1-(2-氰苯基)六氫吡嗪;1-(1-金剛烷基)六氫吡嗪;1-(4-硝基苯基)六氫吡嗪;1-(2-甲氧基乙基)六氫吡嗪;2-(三氟甲基)六氫吡嗪;1-(3,4-二氯苯基)六氫吡嗪;1-Boc-六氫吡嗪-2-羧酸;1-(2,5-二氟苯甲基)六氫吡嗪;1-(2-乙氧基乙基)六氫吡嗪;1-(3,4-二氯苯甲基)六氫吡嗪;1-(3-甲氧基苯基)六氫吡嗪;1-(環己基甲基)六氫吡嗪;1-(3-甲基苯基)六氫吡嗪;1-(4-甲基苯基)六氫吡嗪;1-(3-氟苯甲基)六氫吡嗪;1-(4-氟苯甲基)六氫吡嗪;2-(3-甲氧基苯基)六氫吡嗪;1-(3-氯苯甲基)六氫吡嗪;1-(環丙基羰基)六氫吡嗪;(R)-1-Boc-六氫吡嗪-2-羧酸;(R)-2-苯甲基-六氫吡嗪;(R)-3-羥甲基-六氫吡嗪-1-羧酸第三丁酯;(R)-4-N-Boc-六氫吡嗪-2-羧酸;(S)-2-苯甲基-六氫吡嗪;(S)-2-苯甲基-六氫吡嗪-1-羧酸第三丁酯;(S)-3-羥甲基-六氫吡嗪-1-羧酸第三丁酯;(S)-4-N-Boc-六氫吡嗪-2-羧酸;1-(1-六氫吡啶基磺基)六氫吡嗪;1-(2,2,2-三氟乙基)六氫吡嗪;1-(2,3-二氟苯基)六氫吡嗪;1-(2,4,6-三甲基苯甲基)六氫吡嗪;1-(2,4-二氯苯甲基)六氫吡嗪;1-(2,4-二氟苯基)六氫吡嗪;1-(2,6-二氯苯甲基)六氫吡嗪;1-(2-氯苯甲基)六氫吡嗪;1-(2-環己基乙基)六氫吡嗪;1-(2-二異丙基胺乙基)六氫吡嗪;1-(2-二丙基胺乙基)-六氫吡嗪;1-(2-乙氧基苯基)六氫吡嗪;1-(2-乙基丁醯基)六氫吡嗪;1-(2-氟苯甲基)六氫吡嗪;1-(2-異丙氧基乙基)六氫吡嗪;1-(2-甲基巰苯基)六氫吡嗪;1-(2-甲基丙醯基)-六氫吡嗪;1-(2-嗎啉基(4-位基)乙基)六氫吡嗪;1-(2-苯氧基乙基)六氫吡嗪;
1-(2-六氫吡啶基(1-位基)乙基)六氫吡嗪;1-(2-吡咯啶基(1-位基)乙基)六氫吡嗪;1-(3,3-二甲基丁醯基)六氫吡嗪;1-(3,4-二氯苯甲醯基)六氫吡嗪;1-(3-(3,5-二氯苯基)六氫吡嗪;4-二氟苯甲醯基)六氫吡嗪;1-(3,4-二甲基苯甲基)六氫吡嗪;1-(3,5-二甲氧基苯甲醯基)六氫吡嗪;1-(3,5-二甲基苯甲醯基)六氫吡嗪;1-(3-胺丙基)六氫吡嗪;1-(3-氰丙基)六氫吡嗪;1-(3-二乙基胺丙基)六氫吡嗪;1-(3-二丙基胺丙基)-六氫吡嗪;1-(3-甲氧基丙基)-六氫吡嗪;1-(3-嗎啉基(4-位基)丙基)六氫吡嗪;1-(3-苯基丙基)六氫吡嗪;1-(3-六氫吡啶基(1-位基)丙基)六氫吡嗪;1-(3-吡咯啶基(1-位基)丙基)六氫吡嗪;1-(4-氯苯甲醯基)六氫吡嗪;1-(4-氯苯甲基)六氫吡嗪;1-(4-乙氧基苯基)六氫吡嗪;1-(4-甲氧基苯甲醯基)-六氫吡嗪;1-(4-甲氧基丁基)六氫吡嗪;1-(4-苯基丁基)-六氫吡嗪;1-(4-吡啶基甲基)六氫吡嗪;1-(4-第三丁基苯甲基)六氫吡嗪;1-(環己基羰基)六氫吡嗪;1-(乙磺基)六氫吡嗪;1-(苯基乙醯基)六氫吡嗪;1-cbz-六氫吡嗪-2-羧酸;1-己醯基-六氫吡嗪;1-甲基磺基-六氫吡嗪;2,3-二苯基-六氫吡嗪;2-(2-呋喃基)六氫吡嗪;2-(2-甲氧基苯基)六氫吡嗪;2-(2-噻吩基)六氫吡嗪;2-(3-酮基-六氫吡嗪-1-羰基)-苯甲酸;2-(4-氯苯基)六氫吡嗪-1-羧酸第三丁酯;2-(4-甲氧基苯基)六氫吡嗪;2-(4-甲基苯基)六氫吡嗪;2-苯甲基-六氫吡嗪;3-(4-氯苯基)六氫吡嗪-1-羧酸第三丁酯;3-酮基-六氫吡嗪-2-羧酸;3-苯基-六氫吡嗪-1-羧酸乙酯;4-(4-Boc-六氫吡嗪-1-羰基)苯基硼酸頻那醇(pinacol)酯;[5-(4-甲基-六氫吡嗪-1-磺基)-吡啶-2-基]-肼;六氫吡嗪-1-
羧酸甲酯;1-乙基-2-甲基-六氫吡嗪;1,4-雙(3-胺丙基)六氫吡嗪;1-[2-(2-羥基乙氧基)乙基]六氫吡嗪;1-(2-甲基-烯丙基)-六氫吡嗪;2-(3-三氟甲基-苯基)-六氫吡嗪;4-N-Boc-2-甲基-六氫吡嗪;1-(四氫-2-呋喃甲醯基)-六氫吡嗪;1-(四氫-2-呋喃基甲基)六氫吡嗪;(R)-1-Boc-2-乙基-六氫吡嗪;(R)-1-Boc-3-乙基-六氫吡嗪;(S)-1-Boc-2-乙基-六氫吡嗪;(S)-1-Boc-3-乙基-六氫吡嗪;1-[1-(2-甲氧基苯基)乙基]六氫吡嗪;1-[1-(3-甲氧基苯基)乙基]六氫吡嗪;1-[1-(4-甲氧基苯基)-乙基]-六氫吡嗪;1-[2-(2-甲基苯氧基)乙基]六氫吡嗪;1-(4-乙氧基-苯甲基)-六氫吡嗪;1-Boc-2,6-二甲基-六氫吡嗪;1-Boc-3,3-二甲基-六氫吡嗪;1-Boc-3,5-二甲基-六氫吡嗪;1-Boc-5-酮基-六氫吡嗪-2-羧酸;1-N-(第三丁基羰基)-2-乙基-六氫吡嗪;2-(2-氟-苯基)-六氫吡嗪;2-(3-氟-苯基)-六氫吡嗪;2-甲基-1-(3-甲基苯基)六氫吡嗪;4-(5-胺吡啶-2-基)六氫吡嗪-1-羧酸第三丁酯;1-[2-(二甲基胺)乙基]六氫吡嗪;1-(1-甲基-4-六氫吡啶基)六氫吡嗪;1-乙醯基-4-(4-羥苯基)六氫吡嗪;1-[4-(三氟甲基)苯甲基]六氫吡嗪;1-Boc-4-(2-甲醯基苯基)六氫吡嗪;1-胺基-4-(2-羥乙基)六氫吡嗪;1-Boc-(4-苯甲基)六氫吡嗪;1-Boc-4-[3-(乙氧基羰基)苯基]六氫吡嗪;1-雙(4-氟苯基)甲基六氫吡嗪;1-Boc-4-(3-羥丙基)六氫吡嗪;1-Boc-4-(4-甲醯基苯基)六氫吡嗪;1-Boc-4-(4-甲氧基羰基苯基)六氫吡嗪;1-(1,3-二氧雜環戊烷-2-基甲基)六氫吡嗪;1-(3-胺丙基)-4-(2-甲氧基苯基)六氫吡嗪;1-[3-(二甲基胺)丙基]六氫吡嗪;1-(1,2,3,4-四氫萘-2-基)六氫吡嗪;1-(4-胺丁基)-4-(2-甲氧基
苯基)六氫吡嗪;1-Boc-4-(2-甲氧基羰基苯基)六氫吡嗪;1-Boc-4-(5-硝基-2-吡啶基)六氫吡嗪;(R)-1-Boc-2-苯甲基-六氫吡嗪;(R)-1-N-Boc-2-異丙基六氫吡嗪;(R)-1-N-Boc-4-N-Fmoc-2-六氫吡嗪羧酸;(R)-1-N-cbz-2-甲基-六氫吡嗪;(R)-4-N-三苯甲基-2-甲基六氫吡嗪;(R)-N4-苯甲基-2-(苯甲氧基甲基)六氫吡嗪;(S)-1-Boc-2-羥甲基-六氫吡嗪;(S)-1-Boc-2-異丁基-六氫吡嗪;(S)-1-Boc-3-苯甲基-六氫吡嗪;(S)-1-Boc-3-異丙基-六氫吡嗪;(S)-1-N-Boc-4-N-Fmoc-六氫吡嗪-2-羧酸;(S)-4-N-三苯甲基-2-甲基-六氫吡嗪;(S)-n4-苯甲基-2-(甲基硫乙基)六氫吡嗪;1-[(2,6-二氯苯基)磺基]六氫吡嗪;1-[(2-甲基-1,3-噻唑-5-基)甲基]六氫吡嗪;1-[(4,5-二甲基-1,3-噁唑-2-基)甲基]六氫吡嗪;1-[(4-環己基苯基)磺基]六氫吡嗪;1-[(4-異丁基苯基)磺基]六氫吡嗪;1-[(4-甲基-1,2,5-噁二唑-3-基)甲基]六氫吡嗪;1-[(4-第二丁基苯基)磺基]六氫吡嗪;1-[(4-第三丁基-2,6-二甲基苯基)磺基]六氫吡嗪;1-[1-(吡啶-2-基)乙基]六氫吡嗪;1-[1-(吡啶-3-基)乙基]六氫吡嗪;1-[1-(噻吩-2-基)乙基]六氫吡嗪;1-[2-(1-丙基)-氧乙基]-六氫吡嗪;1-[2-(1H-吡咯-1-基)乙基]六氫吡嗪;1-[2-(2-甲氧基-苯氧基)-乙基]-六氫吡嗪;1-[2-(二烯丙基胺)-乙基]-六氫吡嗪;1-[2-(三氟甲基)吡啶-4-基]六氫吡嗪;1-[2-(三氟甲基)醌醇-4-基]六氫吡嗪;1-[2-氟-4-(甲基磺基)苯基]六氫吡嗪;1-[2-氟-4-(甲基磺基)苯基]-4-(2-羥乙基)六氫吡嗪;1-[3-(1-六氫吡啶基羰基)-2-吡啶基]六氫吡嗪;1-[3-(二氟甲氧基)苯甲醯基]六氫吡嗪;1-[3-(三氟甲基)吡啶-2-基]六氫吡嗪;1-[4-(甲基磺
基)苯基]六氫吡嗪;1-[4-(三氟甲基)嘧啶-2-基]六氫吡嗪;1-(1H-咪唑-2-基甲基)六氫吡嗪;1-(2,6-二甲基吡啶-4-基)六氫吡嗪;1-(2-二苯甲氧基-乙基)-六氫吡嗪;1-(2-羥乙基)-4-異丙基-六氫吡嗪;1-(2-咪唑-1-基-乙基)-六氫吡嗪;1-(2-異氰基-乙基)-4-甲基-六氫吡嗪;1-(2-甲基-噻唑-4-基甲基)-六氫吡嗪;1-(2-N-Boc-胺乙基)六氫吡嗪;1-(2-吡啶-2-基-乙基)-六氫吡嗪;1-(2-吡啶-4-基-乙基)-六氫吡嗪;1-(2-噻吩-2-基-乙基)六氫吡嗪;1-(3,5-二甲基-異噁唑-4-基甲基)-六氫吡嗪;1-(3-甲氧基-苯甲基)-六氫吡嗪;1-(3-甲基-苯甲醯基)-六氫吡嗪;1-(3-甲基-吡啶-2-基甲基)-六氫吡嗪;1-(3-甲基吡啶-2-基)六氫吡嗪;1-(3-甲基吡啶-4-基)六氫吡嗪;1-(4,6-二甲基嘧啶-2-基)六氫吡嗪;1-(4-氰基-苯甲基)-六氫吡嗪;1-(4-乙氧基-苯磺基)-六氫吡嗪;1-(4-乙氧基-吡啶-2-基)-六氫吡嗪;1-(4-氟苯甲基)-4-(2-羥乙基)六氫吡嗪;1-(4-羥基-苯基)-六氫吡嗪-4-羧酸第三丁酯;N-Boc-六氫吡啶;2-甲基六氫吡嗪;2,6-二甲基六氫吡嗪;反式-2,5-二甲基六氫吡嗪;1,4-二甲基六氫吡嗪;(R)-1-Boc-3-甲基六氫吡嗪;1-Boc-3-酮基六氫吡嗪;1,4-雙-(2-甲氧基-5-甲基-苯磺基)-2-甲基-六氫吡嗪;1-[(1-甲基-1H-吡唑-3-基)羰基]六氫吡嗪;1-[(1-甲基-1H-吡唑-4-基)甲基]六氫吡嗪;1-(2-(N,N-雙-(2-羥丙基)-胺)-乙基)-4-(2-羥丙基)-六氫吡嗪;1-(2-甲氧基苯基)-4-((4-(2-甲氧基苯基)-1-六氫吡嗪基)(酮基)乙醯基)六氫吡嗪;1-(3-(2,3-二氫-1,4-苯并二噁英-6-基)丙烯醯基)-4-(4-氟苯基)六氫吡嗪;1-(4-氯苯基)-4-[(7-{[4-(4-氯苯基)-1-六氫吡嗪基]磺基}-9H-茀-2-基)磺
基]六氫吡嗪;1-(4-氟苯基)-4-((4-(4-氟苯基)-1-六氫吡嗪基)(酮基)乙醯基)六氫吡嗪;1-(4-硝基苯基)-4-(3-{[4-(4-硝基苯基)-1-六氫吡嗪基]羰基}苯甲醯基)六氫吡嗪;1-(4-硝基苯基)-4-(4-{[4-(4-硝基苯基)-1-六氫吡嗪基]羰基}苯甲醯基)六氫吡嗪;1-乙醯基-4-(1-乙基-1H-咪唑-2-基)六氫吡嗪;1-二苯甲基-4-{2-[5-(苯甲基硫基)-4-(2-甲基-2-丙烯基)-4H-1,2,4-三唑-3-基]乙基}六氫吡嗪;1-苯甲基-4-[2-[(2',4'-二氟[1,1'-二苯基]-4-基)氧基]乙基]六氫吡嗪;1-苯甲基-4-(3-((2',4'-二氟(1,1'-二苯基)-4-基)氧基)丙基)六氫吡嗪;1-異丙基-4-[(1-甲基-1H-吡咯-2-基)甲基]六氫吡嗪;1-甲基-4-({7-[(4-甲基-1-六氫吡嗪基)磺基]-9H-茀-2-基}磺基)六氫吡嗪;1-苯基-4-[苯基(4-苯基-1-六氫吡嗪基)甲基]六氫吡嗪;1-甲基-4-(甲基磺基)六氫吡嗪;4-(2-羥基-乙基)-六氫吡嗪-1-羧酸(4-異丙基-苯基)-醯胺;6-羥甲基-1,3-二甲基-六氫吡嗪-2,5-二酮;2,2'-(六氫吡嗪-1,4-二基)二乙磺酸雙(2-甲氧基苯酯);1-(金剛烷-1-亞磺醯基)-4-甲基-六氫吡嗪;1-(苯基磺基)-4-(2-吡啶基)六氫吡嗪;1-苯甲基-4-(2-甲氧基丙醯基)六氫吡嗪;1-環己基-4-(甲基磺基)六氫吡嗪;1-乙基-4-(3-呋喃基甲基)六氫吡嗪;1-(3-苯氧基-4-吡啶基)六氫吡嗪;1-(2-吡啶基)-4-(3-(2,3,4-三甲氧基苯基)丙烯醯基)六氫吡嗪;1-(3-(1,3-苯并二噁茂-5-基)丙烯醯基)-4-(2-吡啶基)六氫吡嗪;1-(3-(1,3-苯并二噁茂-5-基)丙烯醯基)-4-(4-甲氧基苯基)六氫吡嗪;1,4-雙-(2-吡啶基亞甲基胺)-六氫吡嗪;1,4-雙-(3,4,5-三甲氧基苯亞甲胺基-六氫吡嗪;1,4-雙-(乙醯乙醯基)-六氫吡嗪;1,4-雙(2-呋喃甲醯基)六氫吡嗪;
1,4-雙[2-(4-吡啶基)乙基]六氫吡嗪;1,4-雙(2-(2-吡啶基)乙基)六氫吡嗪;1,4-雙(2-羧氧基苯甲醯基)六氫吡嗪;1,4-雙(3-吡啶基甲基)六氫吡嗪;1-(乙氧基羰基甲基)六氫吡嗪;2,3,5,6-四羥基-六氫吡嗪-1,4-二甲醛;4-苯甲基-六氫吡嗪-1-羧酸環己基醯胺;2,2'-(六氫吡嗪-1,4-二基)雙(2-酮基醋酸)二乙酯;2,2'-(六氫吡嗪-1,4-二基)二醋酸二乙酯;3,3'-(六氫吡嗪-1,4-二基)二丙酸二甲酯;(2E,2'E)-3,3'-(六氫吡嗪-1,4-二基)雙(1-(2-羥苯基)丙-2-烯-1-酮);2,2'-(六氫吡嗪-1,4-二基)雙(N-(1,5-二甲基-3-酮基-2-苯基-2,3-二氫-1H-吡唑-4-基)乙醯胺);2,2'-(六氫吡嗪-1,4-二基)二丙醯胺;2,2'-(六氫吡嗪-1,4-二基)二丙腈;雙(1-(9H-咔唑-9-基)丙-2-醇)反丁烯二酸3,3'-(六氫吡嗪-1,4-二酯);3,3'-(六氫吡嗪-1,4-二基)雙(1-苯基丙-1-酮);3,3'-(六氫吡嗪-1,4-二基)二丙-1-醇;4,4'-(六氫吡嗪-1,4-二基)雙(3-乙氧基環丁-3-烯-1,2-二酮;六氫吡嗪-1,4-二硫代羧酸雙-苯基醯胺;1,4-二-第三丁基-六氫吡嗪-2,5-二酮;1,4-二(十二基)-六氫吡嗪;1,4-二(十六基)-六氫吡嗪;1-(1-六氫吡啶基羰基)六氫吡嗪;1-(1-金剛烷基甲基)六氫吡嗪;1-(3,4-二甲氧基苯甲基)六氫吡嗪;1-(3-吡啶基羰基)六氫吡嗪;4-六氫吡嗪并苯腈;(S)-3-甲基-2-酮基六氫吡嗪;(R)-3-甲基-2-酮基六氫吡嗪;4-(Boc-六氫吡嗪-1-基)-3-硝基苯甲酸;1,1'-(六氫吡嗪-1,4-二基)二丙-2-醇;2,2'-(六氫吡嗪-1,4-二基)雙(1-苯基乙醇);2,2'-(六氫吡嗪-1,4-二基)雙(2-甲基丙腈);六氫吡嗪-N,N'-雙(2-乙磺酸);1-甲醯基六氫吡嗪;PIPES鈉鹽;PIPES二鈉鹽;PIPES二鉀鹽;六氫吡嗪-N,N'-雙(2-羥
基丙磺酸);1-六氫吡嗪羧酸乙酯;POPSO二鈉鹽;4-羥基-3-甲氧基苯乙二醇半哌嗪鎓鹽;檸檬酸倍半哌嗪鹽水合物(citric acid sesquipiperazine salt hydrate);4-(2-羥乙基)六氫吡嗪-1-乙磺酸;4-(2-羥乙基)-1-六氫吡嗪丙磺酸;HEPES鈉鹽;N-(2-羥乙基)六氫吡嗪-N'-(4-丁磺酸);3-甲基-2-酮基六氫吡嗪;HEPES鉀鹽;3-六氫吡嗪并丙腈;六氫吡嗪并醋酸乙酯;雌酮硫酸酯哌嗪(Estropipate);1-六氫吡嗪丙醇;4-(2-胺基-1-苯基乙基)六氫吡嗪羧酸第三丁酯;4-[2-(胺甲基)苯基]六氫吡嗪-1-羧酸第三丁酯;4-[5-(羥甲基)吡啶-2-基]六氫吡嗪-1-羧酸第三丁酯;4-(3-胺苯甲基)六氫吡嗪-1-羧酸第三丁酯;4-(4-[(甲基胺)甲基]苯基)六氫吡嗪-1-羧酸第三丁酯;4-(4-氰基吡啶-2-基)六氫吡嗪-1-羧酸第三丁酯;4-(5-甲醯基吡啶-2-基)六氫吡嗪-1-羧酸第三丁酯;4-(氧雜環丁-3-基)六氫吡嗪-1-羧酸第三丁酯;4-(六氫吡啶-3-基)六氫吡嗪-1-羧酸第三丁酯;4-(吡咯啶-2-基羰基)六氫吡嗪-1-羧酸第三丁酯;4-(1H-吡咯[2,3-b]吡啶-4-基)六氫吡嗪-1-羧酸第三丁酯;1-[2-(2,5-二甲基-1H-吡咯-1-基)乙基]六氫吡嗪;1-((1,5-二甲基-1H-吡唑-4-基)甲基)六氫吡嗪;1-(1-乙基-5-甲基-1H-吡唑-4-基甲基)-六氫吡嗪;4-(2-胺基-1-[4-(三氟甲基)苯基]乙基)六氫吡嗪羧酸第三丁酯;3-(4-氟-苯基)-六氫吡嗪-1-羧酸第三丁酯;3-(4-羥基-苯基)-六氫吡嗪-1-羧酸第三丁酯;3-呋喃-2-基-六氫吡嗪-1-羧酸第三丁酯;3-噻吩-2-基-六氫吡嗪-1-羧酸苯甲酯;4-(2-胺基-苯基)-六氫吡嗪-1-羧酸第三丁酯;4-(2-胺乙基)-1-boc-六氫吡嗪;4-(5-羧氧基-吡啶-2-基)-2-甲基-六氫吡
嗪-1-羧酸第三丁酯;4-Boc-1-(6-甲基-2-吡啶基)六氫吡嗪;Fmoc-4-羧氧基甲基-六氫吡嗪;4-Boc-六氫吡嗪-2-羧酸甲酯;N,N-二甲基-1-六氫吡嗪磺醯胺;N-1-Boc-N-4-Fmoc-2-六氫吡嗪羧酸;N-4-Boc-N-1-cbz-2-六氫吡嗪羧酸;N-4-Boc-N-1-Fmoc-2-六氫吡嗪醋酸;帶有六氫吡嗪-1-羧脒(carboximidamide)的硫酸化合物(1:1);1-乙基-4-六氫吡啶-4-基-六氫吡嗪;1-呋喃-2-基甲基-六氫吡嗪;1-甲基-4-(2-六氫吡啶-4-基-乙基)-六氫吡嗪;1-甲基-4-(6-胺吡啶-3-基)六氫吡嗪;1-甲基-4-(六氫吡啶-4-基)-六氫吡嗪;1-N-Boc-4-(四氫吖啶-3-基)六氫吡嗪;1-吡啶-2-基甲基-六氫吡嗪;1-吡啶-3-基甲基-六氫吡嗪;1-噻唑-2-基-六氫吡嗪;2-(2,5-二甲氧基-苯基)-六氫吡嗪;2-羧氧基甲基-3-酮基-六氫吡嗪-1-羧酸第三丁酯;2-乙氧基羰基甲基-3-酮基-六氫吡嗪-1-羧酸第三丁酯;1-(4-甲基-環己基)-六氫吡嗪;1-(4-甲基-六氫吡啶-1-磺基)-六氫吡嗪;1-(4-三氟甲基-吡啶-2-基)-六氫吡嗪;1-(5-甲基-2-吡啶基)六氫吡嗪;1-(5-甲基-2-噻唑基)-六氫吡嗪;1-(5-硝基吡啶-2-基)六氫吡嗪;1-(6-丁氧基-2-吡啶基)六氫吡嗪;1-(6-甲基吡啶-2-基)六氫吡嗪;1-(N-甲基六氫吡啶-3-基-甲基)六氫吡嗪;1-(噻吩-2-基乙醯基)六氫吡嗪;1-Boc-4-(六氫吡啶-4-基)-六氫吡嗪;1-Boc-4-氰甲基六氫吡嗪;1-環己-3-烯基甲基-六氫吡嗪。
該六氫吡嗪衍生物較佳為選自由以下所組成的群組:(R)-六氫吡嗪-2-羧酸;1-(2-羥乙基)六氫吡嗪;六氫吡嗪-2,6-二酮;1-(2-胺乙基)六氫吡嗪;1,4-雙(2-羥乙基)六氫吡
嗪;1,4-雙(丙烯醯基)六氫吡嗪;六氫吡嗪-1-醋酸第三丁酯;1-(3-甲基苯甲基)六氫吡嗪;4-(六氫吡嗪-1-羰基)-六氫吡啶-1-羧酸第三丁酯;六氫吡嗪-1-羧酸二乙醯胺;六氫吡嗪-1-磺醯胺;六氫吡嗪-2-羧醯胺;1,2-二甲基-六氫吡嗪;2-異丙基-六氫吡嗪;1-(2-嘧啶基)六氫吡嗪;1-(2-吡嗪基)-六氫吡嗪;1-(6-噠嗪基)六氫吡嗪;1-(3-羥苯基)六氫吡嗪;1-(2-吡啶基)六氫吡嗪;1-(4-甲氧基苯基)六氫吡嗪;1-(4-吡啶基)六氫吡嗪;1-(4-胺苯基)六氫吡嗪;1-(4-甲氧基苯甲基)六氫吡嗪;1-(2-氰苯基)六氫吡嗪;1-(2-甲氧基乙基)六氫吡嗪;1-Boc-六氫吡嗪-2-羧酸;1-(2-乙氧基乙基)六氫吡嗪;(R)-1-Boc-六氫吡嗪-2-羧酸;(R)-3-羥甲基-六氫吡嗪-1-羧酸第三丁酯;(R)-4-N-Boc-六氫吡嗪-2-羧酸;(S)-3-羥甲基-六氫吡嗪-1-羧酸第三丁酯;(S)-4-N-Boc-六氫吡嗪-2-羧酸;1-(1-六氫吡啶基磺基)六氫吡嗪;1-(2-二異丙基胺乙基)六氫吡嗪;1-(2-二丙基胺乙基)-六氫吡嗪;1-(2-乙氧基苯基)六氫吡嗪;1-(2-乙基丁醯基)六氫吡嗪;1-(2-異丙氧基乙基)六氫吡嗪;1-(2-甲基巰苯基)六氫吡嗪;1-(2-嗎啉基(4-位基)乙基)六氫吡嗪;1-(2-六氫吡啶基(1-位基)乙基)六氫吡嗪;1-(2-吡咯啶基(1-位基)乙基)六氫吡嗪;1-(3-胺丙基)六氫吡嗪;1-(3-氰丙基)六氫吡嗪;1-(3-二乙基胺丙基)六氫吡嗪;1-(3-二丙基胺丙基)-六氫吡嗪;1-(3-甲氧基丙基)-六氫吡嗪;1-(3-嗎啉基(4-位基)丙基)六氫吡嗪;1-(3-六氫吡啶基(1-位基)丙基)六氫吡嗪;1-(3-吡咯啶基(1-位基)丙基)六氫吡嗪;1-(4-甲氧基丁基)六氫吡嗪;1-(4-吡啶基甲基)六氫吡嗪;1-(乙磺基)六氫吡嗪;3-酮基-六
氫吡嗪-2-羧酸;4-甲基六氫吡嗪-1-羧酸鹽;1,4-雙(3-胺丙基)六氫吡嗪;1-[2-(2-羥基乙氧基)乙基]六氫吡嗪;4-(5-胺吡啶-2-基)六氫吡嗪-1-羧酸第三丁酯;1-[2-(二甲基胺)乙基]六氫吡嗪;1-(1-甲基-4-六氫吡啶基)六氫吡嗪;1-胺基-4-(2-羥乙基)六氫吡嗪;1-(3-胺丙基)-4-(2-甲氧基苯基)六氫吡嗪;1-[3-(二甲基胺)丙基]六氫吡嗪;1-(4-胺丁基)-4-(2-甲氧基苯基)六氫吡嗪;1-[3-(1-六氫吡啶基羰基)-2-吡啶基]六氫吡嗪;1-(1H-咪唑-2-基甲基)六氫吡嗪;1-(2,6-二甲基吡啶-4-基)六氫吡嗪;1-(2-羥乙基)-4-異丙基-六氫吡嗪;1-(2-咪唑-1-基-乙基)-六氫吡嗪;1-(2-異氰基-乙基)-4-甲基-六氫吡嗪;1-(4-乙氧基-吡啶-2-基)-六氫吡嗪;2-甲基六氫吡嗪;2,6-二甲基六氫吡嗪;反式-2,5-二甲基六氫吡嗪;1,4-二甲基六氫吡嗪;1,4-雙(3-吡啶基甲基)六氫吡嗪;1-(乙氧基羰基甲基)六氫吡嗪;2,3,5,6-四羥基-六氫吡嗪-1,4-二甲醛;3,3'-(六氫吡嗪-1,4-二基)二丙酸二甲酯;2,2'-(六氫吡嗪-1,4-二基)二丙醯胺;2,2'-(六氫吡嗪-1,4-二基)二丙腈;(R)-3-甲基-2-酮基六氫吡嗪;2,2'-(六氫吡嗪-1,4-二基)雙(2-甲基丙腈);六氫吡嗪-N,N'-雙(2-乙磺酸);1-甲醯基六氫吡嗪;PIPES鈉鹽;PIPES二鈉鹽;PIPES二鉀鹽;六氫吡嗪-N,N'-雙(2-羥基丙磺酸);1-六氫吡嗪羧酸乙酯;POPSO二鈉鹽;4-羥基-3-甲氧基苯乙二醇半哌嗪鎓鹽;4-(2-羥乙基)六氫吡嗪-1-乙磺酸;4-(2-羥乙基)-1-六氫吡嗪丙磺酸;HEPES鈉鹽;N-(2-羥乙基)六氫吡嗪-N'-(4-丁磺酸);3-甲基-2-酮基六氫吡嗪;HEPES鉀鹽;3-六氫吡嗪并丙腈;六氫吡嗪并醋酸乙酯;及其組合。
在指明光學活性化合物的(R)或(S)鏡像異構物的情形中,預期也包括相反的鏡像異構物及該等鏡像異構物的外消旋或其他混合物。
此第一型化學添加物當所揭示的鎢CMP拋光組合物的腐蝕抑制劑的二實例係:經單取代的1-(2-胺乙基)六氫吡嗪(就(a)而言)及經雙取代的1,4-雙-(3-胺丙基)六氫吡嗪(就(b)而言)。
本發明的CMP漿料較佳含有介於0.0001%至0.10%;較佳地介於0.0005%至0.010%的第一型化學添加物。
具有在鎢屬膜表面上當腐蝕抑制劑以提供腐蝕防護性及當鎢移除速率推升劑以推升鎢膜移除速率的雙功能性的第二型化學添加物包括:各種不同的氰酸鹽類(CNO)。這些氰酸鹽類包括氰酸鉀、氰酸鈉、氰酸銨及包括氰酸四烷基銨在內的氰酸烷基銨。
本發明的CMP漿料較佳含有介於0.0002%至0.5%;較佳地介於0.001%至0.25%的第二型化學添加物。
用於所揭示的鎢CMP漿料的氧化劑包括,但不限於,以下:過碘酸、過氧化氫、碘酸鉀、高錳酸鉀、過硫酸銨、鉬酸銨、硝酸鐵、硝酸、硝酸鉀及其混合物。較佳的氧化劑係過氧化氫。
本發明的CMP漿料含有0.5重量%至10重量%的氧化劑;較佳地1重量%至4重量%,而且最佳地2重量%至3重量%。
佔液態組分主要部分的液態載劑可能是水或水
與其他能與水混溶的液體的混合物。有益的是溶劑為水,例如DI(去離子)水。
用於所揭示的鎢CMP漿料的pH緩衝劑包括,但不限於,以下:硝酸、氫氯酸、硫酸、磷酸、其他無機或有機酸類及其混合物。較佳的Ph調節劑係硝酸。
本發明的CMP漿料適當地含有0.01重量%至0.5重量%硝酸;較佳地0.05重量%至0.15重量%。
用於所揭示的鎢CMP漿料的腐蝕抑制劑包括,但不限於:聚乙烯亞胺及其他有機聚合或寡聚合一級及二級胺類。
本發明的CMP漿料任意地含有較佳地介於0.0001重量%至0.25重量%;較佳地介於0.0003重量%至0.01重量%的腐蝕抑制劑。
用於所揭示的鎢CMP漿料的表面活性劑包括,但不限於以下:
這些藥劑通常為同一分子中兼具各種不同疏水性及親水性部分的含氧-或氮-化合物。分子量介於數百至一百萬。這些材料的黏度也具有非常寬廣的分佈。
這些化合物於分子骨幹的主要部分上具有負淨電荷,這些化合物包括,但不限於以下具有適當疏水性尾部的鹽類:羧酸烷酯、硫酸烷酯、磷酸烷酯、二羧酸烷酯、重硫酸烷酯、二磷酸烷酯、烷氧基羧酸鹽、烷氧基硫酸鹽、烷氧基磷酸鹽、
烷氧基二羧酸鹽、烷氧基重硫酸鹽、烷氧基二磷酸鹽、經取代的羧酸芳酯、經取代的硫酸芳酯、經取代的磷酸芳酯、經取代的二羧酸芳酯、經取代的重硫酸芳酯、經取代的二磷酸芳酯等等。此類型表面潤濕劑的相反離子包括,但不限於以下離子:鉀、銨及其他正性離子。這些陰離子型表面潤濕劑的分子量介於數百至數十萬。
這些化合物於分子骨幹的主要部分上具有正淨電荷,這些化合物包括,但不限於以下具有適當親水性尾部的鹽類:羧酸鹽、硫酸鹽、磷酸鹽、二羧酸鹽、重硫酸鹽、二磷酸鹽等等。此類型表面潤濕劑的相反離子包括,但不限於以下離子:鉀、銨及其他正性離子。這些陽離子型表面潤濕劑的分子量介於數百至數十萬。
這些化合物於主要分子鏈上兼具正電荷及負電荷而且具有其相關的相反離子。此雙極性表面潤濕劑的實例包括,但不限於胺基-羧酸、胺基-磷酸及胺基-磺酸的鹽類。
任意用於該等鎢CMP漿料中的表面活性劑較佳地介於0.0001%至0.50%;較佳地介於0.0005%至0.10%。
用於所揭示的鎢CMP漿料的除生物劑包括,但不限於市售可得的除生物劑產物,例如Kathon及Kathon II等。
任意用於該等鎢CMP漿料中的除生物劑較佳地介於0.0001%至0.1%;較佳地介於0.0005%至0.010。
本發明進一步藉由以下實施例加以說明。
在此所述的相關方法連帶使用前述用於包含鎢的基材之化學機械研磨的組合物。
在該等方法中,基材(例如,具有鎢表面的晶圓)面向下放在一拋光墊上,該拋光墊固定地黏貼於CMP研磨機之旋轉壓盤上。依此方式,使要被拋光並且研磨的基材與該拋光墊直接接觸。使用晶圓承載系統或拋光頭部將基材固持於定位,並且在CMP加工期間對該基材背側施加向下的壓力,同時使該壓盤與該基材旋轉。在CMP加工期間在該墊子上施加(通常連續地)拋光組合物(漿料)以有效移除材料而研磨該基材。
在此所述的拋光組合物及相關方法能有效用於各式各樣基材的CMP,包括大部分基材,特別是有用於拋光鎢基材。
在以下所示的實施例中,使用以下指定的步驟及實驗條件進行CMP實驗。
用於這些實施例的CMP機具係由加州,95054,聖塔克拉克市,布拉耳士大道3050號之Applied Materials公司製造的Mirra®。在該壓盤上使用由Dow Chemicals所供應的IC1010墊子來研磨供空白晶圓。墊子拋光25個仿氧化物(藉
由TEOS前驅物(PETEOS)的電漿強化CVD沉積而成)晶圓之後破損。
為了使機具設定及墊子初期適合使用,利用Planarization Platform of Air Products Chemicals有限公司所供應的Syton® OX-K膠態氧化矽於基準條件下拋光二PETEOS監視器。拋光實驗係利用厚度8000埃的空白鎢晶圓及TEOS晶圓進行。這些空白晶圓係自加州,95126,坎貝爾大道1150號,Silicon Valley Microelectronics購得。
文中所用的參數係定義於下文。
Å:埃-長度的單位
W:鎢
BP:背壓,以psi單位表示
CMP:化學機械研磨=化學機械拋光
CS:載具速度
DF:向下作用力:CMP期間施加的壓力,單位psi
min:分鐘
ml:毫升
mV:毫伏特
psi:每平方吋磅數
PS:拋光機具的壓盤轉動速度,以rpm(每分鐘轉數)表示
SF:拋光組合物流量,ml/min
wt%:重量百分比(列示組分的)
TEOS:四乙基原矽酸酯
NU%(或WIWNU%):晶圓內不均勻性%
NU%=(|拋光前鎢膜厚度-拋光後鎢膜厚度|/總鎢膜厚度平均值)X 100%
W RR 3.0psi:於3.0psi(21kPa)的CMP機具向下壓力下測得的鎢移除速率
TEOS RR 3.0psi:於3.0psi(21kPa)的CMP機具向下壓力下測得的TEOS移除速率
W:TEOS選擇性:於相同向下作用力(3.0psi,21kPa)下的(鎢移除速率)/(TEOS移除速率)
靜態蝕刻速率係提供與CMP漿料的化學活性程度有關的實驗數據之度量法。通常,較高的靜態蝕刻速率表示更具侵蝕性的化學組合物,其導致有關金屬膜表面的較快蝕刻,以及造成更多金屬腐蝕缺陷的較高可能性。
使由鎢空白晶圓切割下來的晶片暴露於標準鎢漿料及所揭示的CMP鎢拋光配方二者。
表1所示的標準鎢漿料包含:0.4重量%固態觸媒-膠態氧化矽上塗覆氧化鐵;0.5重量%膠態氧化矽;3.0重量%過氧化氫;及剩餘部分的去離子水;使用點處的pH係大約3.4。
表1顯示於溫度40℃下經過5分鐘收集到的靜態蝕刻速率的標準化數據。
將選定的化學添加物加於標準鎢漿料中於溫度40℃下扮作腐蝕抑制劑,分別地就1-(2-胺乙基)六氫吡嗪當添加物而言使該靜態蝕刻速率降低90%,就氰酸鉀當添加物而言降低84%,而且就1,4-二氮雜環[2.2.2]辛烷(比較性)當添加物而言降低74%。
關於表1所示的試驗分別地將0.00025%的1-(2-胺乙基)六氫吡嗪、0.001%的氰酸鉀及0.010%的1,4-二氮雜環[2.2.2]辛烷加於標準鎢漿料。
表1中的數據暗示由於拋光時的摩擦而達成於該溫度(40℃)下的優異腐蝕防護性。
化學機械拋光係利用第一型化學添加物當腐蝕抑制劑及第二型化學添加物當提供於鎢金屬膜表面的腐蝕防護並且推升鎢膜移除速率的雙功能性添加物進行。
關於該第一及第二化學添加物分別將試驗結果列於表2及3。
在表2中,將10ppm(0.001重量%)的1-(2-胺乙基)六氫吡嗪定義成將1倍的1-(2-胺乙基)六氫吡嗪加於該標準鎢漿料配方。
表2所示的標準鎢漿料包含:0.4重量%固態觸媒-膠態氧化矽上塗覆氧化鐵;0.5重量%膠態氧化矽;3.0重量%過氧化氫;及剩餘部分的去離子水;使用點處的pH係大約3.4。
如表2所示的結果,將該第一型化學添加物,明確地說,1-(2-胺乙基)六氫吡嗪加入該標準鎢CMP漿料,NU%降低了。
因為1-(2-胺乙基)六氫吡嗪表現得像鎢CMP漿料配方的強力腐蝕抑制劑,所以當1-(2-胺乙基)六氫吡嗪的濃度提高時鎢移除速率降低了。
表2也指示當1-(2-胺乙基)六氫吡嗪的濃度改變時W:TEOS的可調整選擇性。
在表3中,將25ppm(0.0025重量%)的氰酸鉀定義成1倍的氰酸鉀用於樣品漿料中。
表3中的1倍KCNO漿料包含:0.4重量%固態觸媒-膠態氧化矽上塗覆氧化鐵;0.5重量%膠態氧化矽;3.0重量%過氧化氫;25ppm的氰酸鉀;及表3所示的標準鎢漿料包含:0.4重量%固態觸媒-膠態氧化矽上塗覆氧化鐵;0.5重量%膠態氧化矽;3.0重量%過氧化氫;0.00037重量%聚乙烯亞胺;及剩餘部分的去離子水;使用點處的pH係大約3.4。
如表3所示的結果,將該第二型化學添加物,氰
酸鉀,加入該標準鎢CMP漿料,觀察到數個突出的結果。
因為1-(2-胺乙基)六氫吡嗪表現得像鎢CMP漿料配方的強力腐蝕抑制劑,所以當1-(2-胺乙基)六氫吡嗪的濃度提高時鎢移除速率降低了。
表2也指示當1-(2-胺乙基)六氫吡嗪的濃度改變時W:TEOS的可調整選擇性。
當1倍、2倍或4倍濃度的氰酸鉀加入該標準鎢化學機械拋光組合物中時該等鎢膜移除速率提高多於25%。
當1倍、2倍或4倍濃度的氰酸鉀當添加物使用時NU%分別從6.29%降至3.07%、2.93%及2.87%。
當1倍、2倍或4倍濃度的氰酸鉀當添加物使用時W/D膜的的拋光選擇性分別從141提高至336、332及272。
氰酸鉀的使用提供高選擇性及可調整的W:TEOS選擇性,同時降低該NU%。
即使是於2ppm濃度的氰酸鉀(0.08倍POU濃度),與該標準鎢漿料相比時仍舊觀察到鎢膜移除速率隨著4.02%的NU%提高20%。
以上列示的發明具體實施例,包括工作實施例,示範可由本發明完成的許多具體實施例。預期有許多其他方法的構型均可利用,而且用於該方法的材料可選自那些已經明確揭示以外的許多材料。
Claims (13)
- 一種鎢化學機械拋光(CMP)組合物,其包含:a)0.1重量%至25重量%奈米級研磨料,其係選自由矽石、礬土、鈰氧、鈦氧、鋯土及其組合所組成的群組;b)0.1重量%至0.5重量%塗覆鐵化合物的粒子的固態觸媒,其係選自由塗覆鐵化合物的膠態氧化矽、塗覆鐵化合物的膠態無機金屬氧化物粒子、塗覆鐵化合物的奈米級無機金屬氧化物粒子及其組合所組成的群組;c)0.0001重量%至0.5重量%化學添加物,其係選自由六氫吡嗪衍生物、氰酸鹽類及其組合所組成的群組;d)0.5重量%至10重量%氧化劑;及e)液態載劑;其中該CMP組合物的pH係從約2.0至約8.0。
- 如申請專利範圍第1項之鎢化學機械拋光(CMP)組合物,其中該六氫吡嗪衍生物具有以下一般分子結構:
- 如申請專利範圍第1項之鎢化學機械拋光(CMP)組合物,其中該六氫吡嗪衍生物係具有以下分子結構的經任意取代的有機單胺基六氫吡嗪衍生物(a)或經任意取代的有機雙胺基六氫吡嗪衍生物(b):
- 如申請專利範圍第1項之鎢化學機械拋光(CMP)組合物,其中該六氫吡嗪衍生物係選自由以下所組成的群組:(R)-六氫 吡嗪-2-羧酸;1-(2-羥乙基)六氫吡嗪;六氫吡嗪-2,6-二酮;1-(2-胺乙基)六氫吡嗪;1,4-雙(2-羥乙基)六氫吡嗪;1,4-雙(丙烯醯基)六氫吡嗪;六氫吡嗪-1-醋酸第三丁酯;1-(3-甲基苯甲基)六氫吡嗪;4-Boc-六氫吡嗪-2-羧酸;1-(二苯基甲基)六氫吡嗪;1,4-雙-Boc-六氫吡嗪-2-羧酸;2-(六氫吡嗪-1-羰基)-苯甲酸;4-(六氫吡嗪-1-羰基)-六氫吡啶-1-羧酸第三丁酯;六氫吡嗪-1-羧酸;(2-氯苯基)-醯胺六氫吡嗪-1-羧酸二甲醯胺;六氫吡嗪-1-羧酸二乙醯胺;六氫吡嗪-1-羧酸二苯醯胺;六氫吡嗪-1-磺醯胺;六氫吡嗪-2-羧醯胺;1,2-二甲基-六氫吡嗪;1-(2-丁基)-六氫吡嗪;2-異丁基-六氫吡嗪;2-第三丁基六氫吡嗪;r-2-異丁基-六氫吡嗪;s-2-異丁基-六氫吡嗪;2-異丙基-六氫吡嗪;1-(2-嘧啶基)六氫吡嗪;1-(4-三氟甲基苯基)六氫吡嗪;1-(環丙基甲基)六氫吡嗪;1-(2-吡嗪基)-六氫吡嗪;1-(2-三氟甲基苯基)-六氫吡嗪;1-(6-噠嗪基)六氫吡嗪;2-(4-三氟甲基苯基)六氫吡嗪;2-苯基-六氫吡嗪-1-羧酸苯甲酯;1-(1-萘甲基)六氫吡嗪;1-(1-戊基)六氫吡嗪;1-(2-戊基)-六氫吡嗪;1-(3-戊基)-六氫吡嗪;1-(丙醯基)-六氫吡嗪;2-苯基-六氫吡嗪-1-羧酸第三丁酯;1-Boc-六氫吡嗪;1-(4-氯苯基)六氫吡嗪;1-(2-呋喃甲醯基)六氫吡嗪;1-(2-氟苯基)六氫吡嗪;1-(2-羥苯基)六氫吡嗪;1-(2-苯基乙基)六氫吡嗪;1-(4-氟苯基)六氫吡嗪;1-(2-甲基苯甲基)六氫吡嗪;1-(4-羥苯基)六氫吡嗪;1-(4-甲基苯甲基)六氫吡嗪;1-(3-羥苯基)六氫吡嗪;1-(1-苯基乙基)六氫吡嗪;1-(2,4-二甲基苯基)六氫吡嗪;1-(2,5-二甲 基苯基)六氫吡嗪;1-(2,5-二甲基苯基)六氫吡嗪;1-(2,6-二甲苯基)六氫吡嗪;1-(2-乙基苯基)六氫吡嗪;1-(2-乙基苯基)六氫吡嗪;1-(3,4-二甲基苯基)六氫吡嗪;1-(3,5-二甲基苯基)六氫吡嗪;1-(3-氟苯基)六氫吡嗪;1-(3-呋喃甲醯基)六氫吡嗪;1-(N-庚基)六氫吡嗪;1-特戊醯基-六氫吡嗪;2,3-二甲基-六氫吡嗪-1-羧酸第三丁酯;2-(2-氯苯基)六氫吡嗪;2-(4-氯苯基)六氫吡嗪;n-4-cbz-六氫吡嗪-2-羧酸甲酯;1-(2-吡啶基)六氫吡嗪;1-(2-甲氧基苯基)六氫吡嗪;1-(4-甲氧基苯基)六氫吡嗪;1-(4-氯二苯甲基)六氫吡嗪;1-(4-吡啶基)六氫吡嗪;1-(4-胺苯基)六氫吡嗪;1-(4-甲氧基苯甲基)六氫吡嗪;1-(2-氰苯基)六氫吡嗪;1-(1-金剛烷基)六氫吡嗪;1-(4-硝基苯基)六氫吡嗪;1-(2-甲氧基乙基)六氫吡嗪;2-(三氟甲基)六氫吡嗪;1-(3,4-二氯苯基)六氫吡嗪;1-Boc-六氫吡嗪-2-羧酸;1-(2,5-二氟苯甲基)六氫吡嗪;1-(2-乙氧基乙基)六氫吡嗪;1-(3,4-二氯苯甲基)六氫吡嗪;1-(3-甲氧基苯基)六氫吡嗪;1-(環己基甲基)六氫吡嗪;1-(3-甲基苯基)六氫吡嗪;1-(4-甲基苯基)六氫吡嗪;1-(3-氟苯甲基)六氫吡嗪;1-(4-氟苯甲基)六氫吡嗪;2-(3-甲氧基苯基)六氫吡嗪;1-(3-氯苯甲基)六氫吡嗪;1-(環丙基羰基)六氫吡嗪;(R)-1-Boc-六氫吡嗪-2-羧酸;(R)-2-苯甲基-六氫吡嗪;(R)-3-羥甲基-六氫吡嗪-1-羧酸第三丁酯;(R)-4-N-Boc-六氫吡嗪-2-羧酸;(S)-2-苯甲基-六氫吡嗪;(S)-2-苯甲基-六氫吡嗪-1-羧酸第三丁酯;(S)-3-羥甲基-六氫吡嗪-1-羧酸第三丁酯;(S)-4-N-Boc-六氫吡嗪-2-羧酸;1-(1-六氫吡啶基 磺基)六氫吡嗪;1-(2,2,2-三氟乙基)六氫吡嗪;1-(2,3-二氟苯基)六氫吡嗪;1-(2,4,6-三甲基苯甲基)六氫吡嗪;1-(2,4-二氯苯甲基)六氫吡嗪;1-(2,4-二氟苯基)六氫吡嗪;1-(2,6-二氯苯甲基)六氫吡嗪;1-(2-氯苯甲基)六氫吡嗪;1-(2-環己基乙基)六氫吡嗪;1-(2-二異丙基胺乙基)六氫吡嗪;1-(2-二丙基胺乙基)-六氫吡嗪;1-(2-乙氧基苯基)六氫吡嗪;1-(2-乙基丁醯基)六氫吡嗪;1-(2-氟苯甲基)六氫吡嗪;1-(2-異丙氧基乙基)六氫吡嗪;1-(2-甲基巰苯基)六氫吡嗪;1-(2-甲基丙醯基)-六氫吡嗪;1-(2-嗎啉基(4-位基)乙基)六氫吡嗪;1-(2-苯氧基乙基)六氫吡嗪;1-(2-六氫吡啶基(1-位基)乙基)六氫吡嗪;1-(2-吡咯啶基(1-位基)乙基)六氫吡嗪;1-(3,3-二甲基丁醯基)六氫吡嗪;1-(3,4-二氯苯甲醯基)六氫吡嗪;1-(3-(3,5-二氯苯基)六氫吡嗪;4-二氟苯甲醯基)六氫吡嗪;1-(3,4-二甲基苯甲基)六氫吡嗪;1-(3,5-二甲氧基苯甲醯基)六氫吡嗪;1-(3,5-二甲基苯甲醯基)六氫吡嗪;1-(3-胺丙基)六氫吡嗪;1-(3-氰丙基)六氫吡嗪;1-(3-二乙基胺丙基)六氫吡嗪;1-(3-二丙基胺丙基)-六氫吡嗪;1-(3-甲氧基丙基)-六氫吡嗪;1-(3-嗎啉基(4-位基)丙基)六氫吡嗪;1-(3-苯基丙基)六氫吡嗪;1-(3-六氫吡啶基(1-位基)丙基)六氫吡嗪;1-(3-吡咯啶基(1-位基)丙基)六氫吡嗪;1-(4-氯苯甲醯基)六氫吡嗪;1-(4-氯苯甲基)六氫吡嗪;1-(4-乙氧基苯基)六氫吡嗪;1-(4-甲氧基苯甲醯基)-六氫吡嗪;1-(4-甲氧基丁基)六氫吡嗪;1-(4-苯基丁基)-六氫吡嗪;1-(4-吡啶基甲基)六氫吡嗪;1-(4-第三丁基苯甲基)六氫吡嗪;1-(環 己基羰基)六氫吡嗪;1-(乙磺基)六氫吡嗪;1-(苯基乙醯基)六氫吡嗪;1-cbz-六氫吡嗪-2-羧酸;1-己醯基-六氫吡嗪;1-甲基磺基-六氫吡嗪;2,3-二苯基-六氫吡嗪;2-(2-呋喃基)六氫吡嗪;2-(2-甲氧基苯基)六氫吡嗪;2-(2-噻吩基)六氫吡嗪;2-(3-酮基-六氫吡嗪-1-羰基)-苯甲酸;2-(4-氯苯基)六氫吡嗪-1-羧酸第三丁酯;2-(4-甲氧基苯基)六氫吡嗪;2-(4-甲基苯基)六氫吡嗪;2-苯甲基-六氫吡嗪;3-(4-氯苯基)六氫吡嗪-1-羧酸第三丁酯;3-酮基-六氫吡嗪-2-羧酸;3-苯基-六氫吡嗪-1-羧酸乙酯;4-(4-Boc-六氫吡嗪-1-羰基)苯基硼酸頻那醇(pinacol)酯;[5-(4-甲基-六氫吡嗪-1-磺基)-吡啶-2-基]-肼;六氫吡嗪-1-羧酸甲酯;1-乙基-2-甲基-六氫吡嗪;1,4-雙(3-胺丙基)六氫吡嗪;1-[2-(2-羥基乙氧基)乙基]六氫吡嗪;1-(2-甲基-烯丙基)-六氫吡嗪;2-(3-三氟甲基-苯基)-六氫吡嗪;4-N-Boc-2-甲基-六氫吡嗪;1-(四氫-2-呋喃甲醯基)-六氫吡嗪;1-(四氫-2-呋喃基甲基)六氫吡嗪;(R)-1-Boc-2-乙基-六氫吡嗪;(R)-1-Boc-3-乙基-六氫吡嗪;(S)-1-Boc-2-乙基-六氫吡嗪;(S)-1-Boc-3-乙基-六氫吡嗪;1-[1-(2-甲氧基苯基)乙基]六氫吡嗪;1-[1-(3-甲氧基苯基)乙基]六氫吡嗪;1-[1-(4-甲氧基苯基)-乙基]-六氫吡嗪;1-[2-(2-甲基苯氧基)乙基]六氫吡嗪;1-(4-乙氧基-苯甲基)-六氫吡嗪;1-Boc-2,6-二甲基-六氫吡嗪;1-Boc-3,3-二甲基-六氫吡嗪;1-Boc-3,5-二甲基-六氫吡嗪;1-Boc-5-酮基-六氫吡嗪-2-羧酸;1-N-(第三丁基羰基)-2-乙基-六氫吡嗪;2-(2-氟-苯基)-六氫吡嗪;2-(3-氟-苯基)-六氫吡嗪;2-甲基 -1-(3-甲基苯基)六氫吡嗪;4-(5-胺吡啶-2-基)六氫吡嗪-1-羧酸第三丁酯;1-[2-(二甲基胺)乙基]六氫吡嗪;1-(1-甲基-4-六氫吡啶基)六氫吡嗪;1-乙醯基-4-(4-羥苯基)六氫吡嗪;1-[4-(三氟甲基)苯甲基]六氫吡嗪;1-Boc-4-(2-甲醯基苯基)六氫吡嗪;1-胺基-4-(2-羥乙基)六氫吡嗪;1-Boc-(4-苯甲基)六氫吡嗪;1-Boc-4-[3-(乙氧基羰基)苯基]六氫吡嗪;1-雙(4-氟苯基)甲基六氫吡嗪;1-Boc-4-(3-羥丙基)六氫吡嗪;1-Boc-4-(4-甲醯基苯基)六氫吡嗪;1-Boc-4-(4-甲氧基羰基苯基)六氫吡嗪;1-(1,3-二氧雜環戊烷-2-基甲基)六氫吡嗪;1-(3-胺丙基)-4-(2-甲氧基苯基)六氫吡嗪;1-[3-(二甲基胺)丙基]六氫吡嗪;1-(1,2,3,4-四氫萘-2-基)六氫吡嗪;1-(4-胺丁基)-4-(2-甲氧基苯基)六氫吡嗪;1-Boc-4-(2-甲氧基羰基苯基)六氫吡嗪;1-Boc-4-(5-硝基-2-吡啶基)六氫吡嗪;(R)-1-Boc-2-苯甲基-六氫吡嗪;(R)-1-N-Boc-2-異丙基六氫吡嗪;(R)-1-N-Boc-4-N-Fmoc-2-六氫吡嗪羧酸;(R)-1-N-cbz-2-甲基-六氫吡嗪;(R)-4-N-三苯甲基-2-甲基六氫吡嗪;(R)-N4-苯甲基-2-(苯甲氧基甲基)六氫吡嗪;(S)-1-Boc-2-羥甲基-六氫吡嗪;(S)-1-Boc-2-異丁基-六氫吡嗪;(S)-1-Boc-3-苯甲基-六氫吡嗪;(S)-1-Boc-3-異丙基-六氫吡嗪;(S)-1-N-Boc-4-N-Fmoc-六氫吡嗪-2-羧酸;(S)-4-N-三苯甲基-2-甲基-六氫吡嗪;(S)-4-苯甲基-2-(甲基硫乙基)六氫吡嗪;1-[(2,6-二氯苯基)磺基]六氫吡嗪;1-[(2-甲基-1,3-噻唑-5-基)甲基]六氫吡嗪;1-[(4,5-二甲基-1,3-噁唑-2-基)甲基]六氫吡嗪;1-[(4-環己基苯基)磺基]六氫吡嗪; 1-[(4-異丁基苯基)磺基]六氫吡嗪;1-[(4-甲基-1,2,5-噁二唑-3-基)甲基]六氫吡嗪;1-[(4-第二丁基苯基)磺基]六氫吡嗪;1-[(4-第三丁基-2,6-二甲基苯基)磺基]六氫吡嗪;1-[1-(吡啶-2-基)乙基]六氫吡嗪;1-[1-(吡啶-3-基)乙基]六氫吡嗪;1-[1-(噻吩-2-基)乙基]六氫吡嗪;1-[2-(1-丙基)-氧乙基]-六氫吡嗪;1-[2-(1H-吡咯-1-基)乙基]六氫吡嗪;1-[2-(2-甲氧基-苯氧基)-乙基]-六氫吡嗪;1-[2-(二烯丙基胺)-乙基]-六氫吡嗪;1-[2-(三氟甲基)吡啶-4-基]六氫吡嗪;1-[2-(三氟甲基)醌醇-4-基]六氫吡嗪;1-[2-氟-4-(甲基磺基)苯基]六氫吡嗪;1-[2-氟-4-(甲基磺基)苯基]-4-(2-羥乙基)六氫吡嗪;1-[3-(1-六氫吡啶基羰基)-2-吡啶基]六氫吡嗪;1-[3-(二氟甲氧基)苯甲醯基]六氫吡嗪;1-[3-(三氟甲基)吡啶-2-基]六氫吡嗪;1-[4-(甲基磺基)苯基]六氫吡嗪;1-[4-(三氟甲基)嘧啶-2-基]六氫吡嗪;1-(1H-咪唑-2-基甲基)六氫吡嗪;1-(2,6-二甲基吡啶-4-基)六氫吡嗪;1-(2-二苯甲氧基-乙基)-六氫吡嗪;1-(2-羥乙基)-4-異丙基-六氫吡嗪;1-(2-咪唑-1-基-乙基)-六氫吡嗪;1-(2-異氰基-乙基)-4-甲基-六氫吡嗪;1-(2-甲基-噻唑-4-基甲基)-六氫吡嗪;1-(2-N-Boc-胺乙基)六氫吡嗪;1-(2-吡啶-2-基-乙基)-六氫吡嗪;1-(2-吡啶-4-基-乙基)-六氫吡嗪;1-(2-噻吩-2-基-乙基)六氫吡嗪;1-(3,5-二甲基-異噁唑-4-基甲基)-六氫吡嗪;1-(3-甲氧基-苯甲基)-六氫吡嗪;1-(3-甲基-苯甲醯基)-六氫吡嗪;1-(3-甲基-吡啶-2-基甲基)-六氫吡嗪;1-(3-甲基吡啶-2-基)六氫吡嗪;1-(3-甲基吡啶-4-基)六氫吡嗪;1-(4,6-二甲基嘧啶-2-基)六氫吡 嗪;1-(4-氰基-苯甲基)-六氫吡嗪;1-(4-乙氧基-苯磺基)-六氫吡嗪;1-(4-乙氧基-吡啶-2-基)-六氫吡嗪;1-(4-氟苯甲基)-4-(2-羥乙基)六氫吡嗪;1-(4-羥基-苯基)-六氫吡嗪-4-羧酸第三丁酯;N-Boc-六氫吡啶;2-甲基六氫吡嗪;2,6-二甲基六氫吡嗪;反式-2,5-二甲基六氫吡嗪;1,4-二甲基六氫吡嗪;(R)-1-Boc-3-甲基六氫吡嗪;1-Boc-3-酮基六氫吡嗪;1,4-雙-(2-甲氧基-5-甲基-苯磺基)-2-甲基-六氫吡嗪;1-[(1-甲基-1H-吡唑-3-基)羰基]六氫吡嗪;1-[(1-甲基-1H-吡唑-4-基)甲基]六氫吡嗪;1-(2-(N,N-雙-(2-羥丙基)-胺)-乙基)-4-(2-羥丙基)-六氫吡嗪;1-(2-甲氧基苯基)-4-((4-(2-甲氧基苯基)-1-六氫吡嗪基)(酮基)乙醯基)六氫吡嗪;1-(3-(2,3-二氫-1,4-苯并二噁英-6-基)丙烯醯基)-4-(4-氟苯基)六氫吡嗪;1-(4-氯苯基)-4-[(7-{[4-(4-氯苯基)-1-六氫吡嗪基]磺基}-9H-茀-2-基)磺基]六氫吡嗪;1-(4-氟苯基)-4-((4-(4-氟苯基)-1-六氫吡嗪基)(酮基)乙醯基)六氫吡嗪;1-(4-硝基苯基)-4-(3-{[4-(4-硝基苯基)-1-六氫吡嗪基]羰基}苯甲醯基)六氫吡嗪;1-(4-硝基苯基)-4-(4-{[4-(4-硝基苯基)-1-六氫吡嗪基]羰基}苯甲醯基)六氫吡嗪;1-乙醯基-4-(1-乙基-1H-咪唑-2-基)六氫吡嗪;1-二苯甲基-4-{2-[5-(苯甲基硫基)-4-(2-甲基-2-丙烯基)-4H-1,2,4-三唑-3-基]乙基}六氫吡嗪;1-苯甲基-4-[2-[(2',4'-二氟[1,1'-二苯基]-4-基)氧基]乙基]六氫吡嗪;1-苯甲基-4-(3-((2',4'-二氟(1,1'-二苯基)-4-基)氧基)丙基)六氫吡嗪;1-異丙基-4-[(1-甲基-1H-吡咯-2-基)甲基]六氫吡嗪;1-甲基-4-({7-[(4-甲基 -1-六氫吡嗪基)磺基]-9H-茀-2-基}磺基)六氫吡嗪;1-苯基-4-[苯基(4-苯基-1-六氫吡嗪基)甲基]六氫吡嗪;1-甲基-4-(甲基磺基)六氫吡嗪;4-(2-羥基-乙基)-六氫吡嗪-1-羧酸(4-異丙基-苯基)-醯胺;6-羥甲基-1,3-二甲基-六氫吡嗪-2,5-二酮;2,2'-(六氫吡嗪-1,4-二基)二乙磺酸雙(2-甲氧基苯酯);1-(金剛烷-1-亞磺醯基)-4-甲基-六氫吡嗪;1-(苯基磺基)-4-(2-吡啶基)六氫吡嗪;1-苯甲基-4-(2-甲氧基丙醯基)六氫吡嗪;1-環己基-4-(甲基磺基)六氫吡嗪;1-乙基-4-(3-呋喃基甲基)六氫吡嗪;1-(3-苯氧基-4-吡啶基)六氫吡嗪;1-(2-吡啶基)-4-(3-(2,3,4-三甲氧基苯基)丙烯醯基)六氫吡嗪;1-(3-(1,3-苯并二噁茂-5-基)丙烯醯基)-4-(2-吡啶基)六氫吡嗪;1-(3-(1,3-苯并二噁茂-5-基)丙烯醯基)-4-(4-甲氧基苯基)六氫吡嗪;1,4-雙-(2-吡啶基亞甲基胺)-六氫吡嗪;1,4-雙-(3,4,5-三甲氧基苯亞甲胺基-六氫吡嗪;1,4-雙-(乙醯乙醯基)-六氫吡嗪;1,4-雙(2-呋喃甲醯基)六氫吡嗪;1,4-雙[2-(4-吡啶基)乙基]六氫吡嗪;1,4-雙(2-(2-吡啶基)乙基)六氫吡嗪;1,4-雙(2-羧氧基苯甲醯基)六氫吡嗪;1,4-雙(3-吡啶基甲基)六氫吡嗪;1-(乙氧基羰基甲基)六氫吡嗪;2,3,5,6-四羥基-六氫吡嗪-1,4-二甲醛;4-苯甲基-六氫吡嗪-1-羧酸環己基醯胺;2,2'-(六氫吡嗪-1,4-二基)雙(2-酮基醋酸)二乙酯;2,2'-(六氫吡嗪-1,4-二基)二醋酸二乙酯;3,3'-(六氫吡嗪-1,4-二基)二丙酸二甲酯;(2E,2'E)-3,3'-(六氫吡嗪-1,4-二基)雙(1-(2-羥苯基)丙-2-烯-1-酮);2,2'-(六氫吡嗪-1,4-二基)雙(N-(1,5-二甲基-3-酮基-2-苯基-2,3-二氫-1H-吡唑-4-基) 乙醯胺);2,2'-(六氫吡嗪-1,4-二基)二丙醯胺;2,2'-(六氫吡嗪-1,4-二基)二丙腈;雙(1-(9H-咔唑-9-基)丙-2-醇)反丁烯二酸3,3'-(六氫吡嗪-1,4-二酯);3,3'-(六氫吡嗪-1,4-二基)雙(1-苯基丙-1-酮);3,3'-(六氫吡嗪-1,4-二基)二丙-1-醇;4,4'-(六氫吡嗪-1,4-二基)雙(3-乙氧基環丁-3-烯-1,2-二酮;六氫吡嗪-1,4-二硫代羧酸雙-苯基醯胺;1,4-二-第三丁基-六氫吡嗪-2,5-二酮;1,4-二(十二基)-六氫吡嗪;1,4-二(十六基)-六氫吡嗪;1-(1-六氫吡啶基羰基)六氫吡嗪;1-(1-金剛烷基甲基)六氫吡嗪;1-(3,4-二甲氧基苯甲基)六氫吡嗪;1-(3-吡啶基羰基)六氫吡嗪;4-六氫吡嗪并苯腈;(S)-3-甲基-2-酮基六氫吡嗪;(R)-3-甲基-2-酮基六氫吡嗪;4-(Boc-六氫吡嗪-1-基)-3-硝基苯甲酸;1,1'-(六氫吡嗪-1,4-二基)二丙-2-醇;2,2'-(六氫吡嗪-1,4-二基)雙(1-苯基乙醇);2,2'-(六氫吡嗪-1,4-二基)雙(2-甲基丙腈);六氫吡嗪-N,N'-雙(2-乙磺酸);1-甲醯基六氫吡嗪;PIPES鈉鹽;PIPES二鈉鹽;PIPES二鉀鹽;六氫吡嗪-N,N'-雙(2-羥基丙磺酸);1-六氫吡嗪羧酸乙酯;POPSO二鈉鹽;4-羥基-3-甲氧基苯乙二醇半哌嗪鎓鹽;檸檬酸倍半哌嗪鹽水合物(citric acid sesquipiperazine salt hydrate);4-(2-羥乙基)六氫吡嗪-1-乙磺酸;4-(2-羥乙基)-1-六氫吡嗪丙磺酸;HEPES鈉鹽;N-(2-羥乙基)六氫吡嗪-N'-(4-丁磺酸);3-甲基-2-酮基六氫吡嗪;HEPES鉀鹽;3-六氫吡嗪并丙腈;六氫吡嗪并醋酸乙酯;雌酮硫酸酯哌嗪(Estropipate);1-六氫吡嗪丙醇;4-(2-胺基-1-苯基乙基)六氫吡嗪羧酸第三丁酯;4-[2-(胺甲基)苯基]六氫吡嗪-1-羧 酸第三丁酯;4-[5-(羥甲基)吡啶-2-基]六氫吡嗪-1-羧酸第三丁酯;4-(3-胺苯甲基)六氫吡嗪-1-羧酯第三丁酯;4-(4-[(甲基胺)甲基]苯基)六氫吡嗪-1-羧羧第三丁酯;4-(4-氰基吡啶-2-基)六氫吡嗪-1-羧酸第三丁酯;4-(5-甲醯基吡啶-2-基)六氫吡嗪-1-羧酸第三丁酯;4-(氧雜環丁-3-基)六氫吡嗪-1-羧酸第三丁酯;4-(六氫吡啶-3-基)六氫吡嗪-1-羧酸第三丁酯;4-(吡咯啶-2-基羰基)六氫吡嗪-1-羧酸第三丁酯;4-(1H-吡咯[2,3-b]吡啶-4-基)六氫吡嗪-1-羧酸第三丁酯;1-[2-(2,5-二甲基-1H-吡咯-1-基)乙基]六氫吡嗪;1-((1,5-二甲基-1H-吡唑-4-基)甲基)六氫吡嗪;1-(1-乙基-5-甲基-1H-吡唑-4-基甲基)-六氫吡嗪;4-(2-胺基-1-[4-(三氟甲基)苯基]乙基)六氫吡嗪羧酸第三丁酯;3-(4-氟-苯基)-六氫吡嗪-1-羧酸第三丁酯;3-(4-羥基-苯基)-六氫吡嗪-1-羧酸第三丁酯;3-呋喃-2-基-六氫吡嗪-1-羧酸第三丁酯;3-噻吩-2-基-六氫吡嗪-1-羧酸苯甲酯;4-(2-胺基-苯基)-六氫吡嗪-1-羧酸第三丁酯;4-(2-胺乙基)-1-boc-六氫吡嗪;4-(5-羧氧基-吡啶-2-基)-2-甲基-六氫吡嗪-1-羧酸第三丁酯;4-Boc-1-(6-甲基-2-吡啶基)六氫吡嗪;Fmoc-4-羧氧基甲基-六氫吡嗪;4-Boc-六氫吡嗪-2-羧酸甲酯;N,N-二甲基-1-六氫吡嗪磺醯胺;N-1-Boc-N-4-Fmoc-2-六氫吡嗪羧酸;N-4-Boc-N-1-cbz-2-六氫吡嗪羧酸;N-4-Boc-N-1-Fmoc-2-六氫吡嗪醋酸;帶有六氫吡嗪-1-羧脒(carloximidamide)的硫酸化合物(1:1);1-乙基-4-六氫吡啶-4-基-六氫吡嗪;1-呋喃-2-基甲基-六氫吡嗪;1-甲基-4-(2-六氫吡啶-4-基-乙基)-六氫吡嗪;1-甲基 -4-(6-胺吡啶-3-基)六氫吡嗪;1-甲基-4-(六氫吡啶-4-基)-六氫吡嗪;1-N-Boc-4-(四氫吖啶-3-基)六氫吡嗪;1-吡啶-2-基甲基-六氫吡嗪;1-吡啶-3-基甲基-六氫吡嗪;1-噻唑-2-基-六氫吡嗪;2-(2,5-二甲氧基-苯基)-六氫吡嗪;2-羧氧基甲基-3-酮基-六氫吡嗪-1-羧酸第三丁酯;2-乙氧基羰基甲基-3-酮基-六氫吡嗪-1-羧酸第三丁酯;1-(4-甲基-環己基)-六氫吡嗪;1-(4-甲基-六氫吡啶-1-磺基)-六氫吡嗪;1-(4-三氟甲基-吡啶-2-基)-六氫吡嗪;1-(5-甲基-2-吡啶基)六氫吡嗪;1-(5-甲基-2-噻唑基)-六氫吡嗪;1-(5-硝基吡啶-2-基)六氫吡嗪;1-(6-丁氧基-2-吡啶基)六氫吡嗪;1-(6-甲基吡啶-2-基)六氫吡嗪;1-(N-甲基六氫吡啶-3-基-甲基)六氫吡嗪;1-(噻吩-2-基乙醯基)六氫吡嗪;1-Boc-4-(六氫吡啶-4-基)-六氫吡嗪;1-Boc-4-氰甲基六氫吡嗪;1-環己-3-烯基甲基-六氫吡嗪及其組合。
- 如申請專利範圍第1項之鎢化學機械拋光(CMP)組合物,其中該六氫吡嗪衍生物係選自由以下所組成的群組:(R)-六氫吡嗪-2-羧酸;1-(2-羥乙基)六氫吡嗪;六氫吡嗪-2,6-二酮;1-(2-胺乙基)六氫吡嗪;1,4-雙(2-羥乙基)六氫吡嗪;1,4-雙(丙烯醯基)六氫吡嗪;六氫吡嗪-1-醋酸第三丁酯;1-(3-甲基苯甲基)六氫吡嗪;4-(六氫吡嗪-1-羰基)-六氫吡啶-1-羧酸第三丁酯;六氫吡嗪-1-羧酸二乙醯胺;六氫吡嗪-1-磺醯胺;六氫吡嗪-2-羧醯胺;1,2-二甲基-六氫吡嗪;2-異丙基-六氫吡嗪;1-(2-嘧啶基)六氫吡嗪;1-(2-吡嗪基)-六氫吡嗪; 1-(6-噠嗪基)六氫吡嗪;1-(3-羥苯基)六氫吡嗪;1-(2-吡啶基)六氫吡嗪;1-(4-甲氧基苯基)六氫吡嗪;1-(4-吡啶基)六氫吡嗪;1-(4-胺苯基)六氫吡嗪;1-(4-甲氧基苯甲基)六氫吡嗪;1-(2-氰苯基)六氫吡嗪;1-(2-甲氧基乙基)六氫吡嗪;1-Boc-六氫吡嗪-2-羧酸;1-(2-乙氧基乙基)六氫吡嗪;(R)-1-Boc-六氫吡嗪-2-羧酸;(R)-3-羥甲基-六氫吡嗪-1-羧酸第三丁酯;(R)-4-N-Boc-六氫吡嗪-2-羧酸;(S)-3-羥甲基-六氫吡嗪-1-羧酸第三丁酯;(S)-4-N-Boc-六氫吡嗪-2-羧酸;1-(1-六氫吡啶基磺基)六氫吡嗪;1-(2-二異丙基胺乙基)六氫吡嗪;1-(2-二丙基胺乙基)-六氫吡嗪;1-(2-乙氧基苯基)六氫吡嗪;1-(2-乙基丁醯基)六氫吡嗪;1-(2-異丙氧基乙基)六氫吡嗪;1-(2-甲基巰苯基)六氫吡嗪;1-(2-嗎啉基(4-位基)乙基)六氫吡嗪;1-(2-六氫吡啶基(1-位基)乙基)六氫吡嗪;1-(2-吡咯啶基(1-位基)乙基)六氫吡嗪;1-(3-胺丙基)六氫吡嗪;1-(3-氰丙基)六氫吡嗪;1-(3-二乙基胺丙基)六氫吡嗪;1-(3-二丙基胺丙基)-六氫吡嗪;1-(3-甲氧基丙基)-六氫吡嗪;1-(3-嗎啉基(4-位基)丙基)六氫吡嗪;1-(3-六氫吡啶基(1-位基)丙基)六氫吡嗪;1-(3-吡咯啶基(1-位基)丙基)六氫吡嗪;1-(4-甲氧基丁基)六氫吡嗪;1-(4-吡啶基甲基)六氫吡嗪;1-(乙磺基)六氫吡嗪;3-酮基-六氫吡嗪-2-羧酸;六氫吡嗪-1-羧酸4-甲酯;1,4-雙(3-胺丙基)六氫吡嗪;1-[2-(2-羥基乙氧基)乙基]六氫吡嗪;4-(5-胺吡啶-2-基)六氫吡嗪-1-羧酸第三丁酯;1-[2-(二甲基胺)乙基]六氫吡嗪;1-(1-甲基-4-六氫吡啶基)六氫吡嗪;1-胺基-4-(2-羥乙基)六 氫吡嗪;1-(3-胺丙基)-4-(2-甲氧基苯基)六氫吡嗪;1-[3-(二甲基胺)丙基]六氫吡嗪;1-(4-胺丁基)-4-(2-甲氧基苯基)六氫吡嗪;1-[3-(1-六氫吡啶基羰基)-2-吡啶基]六氫吡嗪;1-(1H-咪唑-2-基甲基)六氫吡嗪;1-(2,6-二甲基吡啶-4-基)六氫吡嗪;1-(2-羥乙基)-4-異丙基-六氫吡嗪;1-(2-咪唑-1-基-乙基)-六氫吡嗪;1-(2-異氰基-乙基)-4-甲基-六氫吡嗪;1-(4-乙氧基-吡啶-2-基)-六氫吡嗪;2-甲基六氫吡嗪;2,6-二甲基六氫吡嗪;反式-2,5-二甲基六氫吡嗪;1,4-二甲基六氫吡嗪;1,4-雙(3-吡啶基甲基)六氫吡嗪;1-(乙氧基羰基甲基)六氫吡嗪;2,3,5,6-四羥基-六氫吡嗪-1,4-二甲醛;3,3'-(六氫吡嗪-1,4-二基)二丙酸二甲酯;2,2'-(六氫吡嗪-1,4-二基)二丙醯胺;2,2'-(六氫吡嗪-1,4-二基)二丙腈;(R)-3-甲基-2-酮基六氫吡嗪;2,2'-(六氫吡嗪-1,4-二基)雙(2-甲基丙腈);六氫吡嗪-N,N'-雙(2-乙磺酸);1-甲醯基六氫吡嗪;PIPES鈉鹽;PIPES二鈉鹽;PIPES二鉀鹽;六氫吡嗪-N,N'-雙(2-羥基丙磺酸);1-六氫吡嗪羧酸乙酯;POPSO二鈉鹽;4-羥基-3-甲氧基苯乙二醇半哌嗪鎓鹽;4-(2-羥乙基)六氫吡嗪-1-乙磺酸;4-(2-羥乙基)-1-六氫吡嗪丙磺酸;HEPES鈉鹽;N-(2-羥乙基)六氫吡嗪-N'-(4-丁磺酸);3-甲基-2-酮基六氫吡嗪;HEPES鉀鹽;3-六氫吡嗪并丙腈;六氫吡嗪并醋酸乙酯;及其組合。
- 如申請專利範圍第1項之鎢化學機械拋光(CMP)組合物,其中該六氫吡嗪衍生物係選自由1-(2-胺乙基)六氫吡嗪、1,4- 雙(3-胺丙基)六氫吡嗪及其組合所組成的群組。
- 如前述申請專利範圍中任一項之鎢化學機械拋光(CMP)組合物,其中該化學添加物係或包含選自由氰酸鉀、氰酸鈉、氰酸銨、氰酸烷基銨及其組合所組成的群組的氰酸鹽。
- 如前述申請專利範圍中任一項之鎢化學機械拋光(CMP)組合物,其另外包含以下一或多者:腐蝕抑制劑;pH緩衝劑;表面活性劑;及當該拋光組合物的pH係從5.0至8.0時除生物劑(biocide)。
- 如前述申請專利範圍中任一項之組合物,其中該組合物剩下的部分實質上為液態載劑。
- 如前述申請專利範圍中任一項之組合物,其中該奈米級研磨料係膠態氧化矽;該固態觸媒係經塗覆氧化鐵的膠態氧化矽;該化學添加物係1-(2-胺乙基)六氫吡嗪或氰酸鉀;該氧化劑係過氧化氫;該腐蝕抑制劑聚乙烯亞胺係任意存在;而且該組合物剩下的部分係去離子水。
- 一種選擇性化學機械拋光之方法,其包含以下步驟:a)提供表面含有鎢及至少一其他材料的半導體基材; b)提供一拋光墊;c)提供如前述申請專利範圍中任一項所請求的化學機械拋光(CMP)組合物;d)使該半導體基材的表面與該拋光墊及該化學機械拋光組合物接觸;及e)拋光該半導體基材的表面;其中使該含鎢表面的至少一部分與該拋光墊及該化學機械拋光組合物二者接觸;而且該鎢移除速率對至少一其他材料移除速率的比值等於或大於1。
- 一種選擇性化學機械拋光之系統,其包含:a)一拋光墊;及b)如申請專利範圍第1至10項中任一項所請求的化學機械拋光(CMP)組合物。
- 如申請專利範圍第12項之系統,其另外包含表面含有鎢及至少一其他材料的半導體基材;其中該含鎢表面的至少一部分與該拋光墊及該化學機械拋光組合物二者接觸。
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