CN104046246A - 含钨基材的化学机械平坦化 - Google Patents
含钨基材的化学机械平坦化 Download PDFInfo
- Publication number
- CN104046246A CN104046246A CN201410265586.4A CN201410265586A CN104046246A CN 104046246 A CN104046246 A CN 104046246A CN 201410265586 A CN201410265586 A CN 201410265586A CN 104046246 A CN104046246 A CN 104046246A
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- China
- Prior art keywords
- piperazine
- methyl
- ethyl
- carboxylic acid
- boc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000126 substance Substances 0.000 title claims abstract description 65
- 239000000758 substrate Substances 0.000 title claims abstract description 22
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 108
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 107
- 239000010937 tungsten Substances 0.000 claims abstract description 107
- 238000005498 polishing Methods 0.000 claims abstract description 103
- 239000000203 mixture Substances 0.000 claims abstract description 81
- 239000000654 additive Substances 0.000 claims abstract description 51
- 230000000996 additive effect Effects 0.000 claims abstract description 49
- 150000004885 piperazines Chemical class 0.000 claims abstract description 40
- 229940066771 systemic antihistamines piperazine derivative Drugs 0.000 claims abstract description 34
- 238000000034 method Methods 0.000 claims abstract description 28
- 239000011949 solid catalyst Substances 0.000 claims abstract description 22
- XLJMAIOERFSOGZ-UHFFFAOYSA-M cyanate Chemical class [O-]C#N XLJMAIOERFSOGZ-UHFFFAOYSA-M 0.000 claims abstract description 14
- 239000007788 liquid Substances 0.000 claims abstract description 14
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 claims description 257
- 229960005141 piperazine Drugs 0.000 claims description 157
- -1 (2-chloro-phenyl) - piperazine-1-carboxylic acid amide Chemical compound 0.000 claims description 130
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 58
- 239000000463 material Substances 0.000 claims description 50
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 30
- 239000000084 colloidal system Substances 0.000 claims description 29
- 230000007797 corrosion Effects 0.000 claims description 27
- 238000005260 corrosion Methods 0.000 claims description 27
- 239000000377 silicon dioxide Substances 0.000 claims description 27
- 239000002245 particle Substances 0.000 claims description 25
- 239000003112 inhibitor Substances 0.000 claims description 19
- 239000002253 acid Substances 0.000 claims description 18
- GKKCIDNWFBPDBW-UHFFFAOYSA-M potassium cyanate Chemical compound [K]OC#N GKKCIDNWFBPDBW-UHFFFAOYSA-M 0.000 claims description 18
- 239000003082 abrasive agent Substances 0.000 claims description 15
- IMUDHTPIFIBORV-UHFFFAOYSA-N aminoethylpiperazine Chemical compound NCCN1CCNCC1 IMUDHTPIFIBORV-UHFFFAOYSA-N 0.000 claims description 15
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical group OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 14
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims description 14
- 125000003545 alkoxy group Chemical group 0.000 claims description 13
- 150000001875 compounds Chemical class 0.000 claims description 13
- 229910052742 iron Inorganic materials 0.000 claims description 13
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 12
- 125000000217 alkyl group Chemical group 0.000 claims description 12
- 150000001412 amines Chemical class 0.000 claims description 12
- XLJMAIOERFSOGZ-UHFFFAOYSA-N anhydrous cyanic acid Natural products OC#N XLJMAIOERFSOGZ-UHFFFAOYSA-N 0.000 claims description 12
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 12
- JKMHFZQWWAIEOD-UHFFFAOYSA-N 2-[4-(2-hydroxyethyl)piperazin-1-yl]ethanesulfonic acid Chemical compound OCC[NH+]1CCN(CCS([O-])(=O)=O)CC1 JKMHFZQWWAIEOD-UHFFFAOYSA-N 0.000 claims description 11
- IHPYMWDTONKSCO-UHFFFAOYSA-N 2,2'-piperazine-1,4-diylbisethanesulfonic acid Chemical compound OS(=O)(=O)CCN1CCN(CCS(O)(=O)=O)CC1 IHPYMWDTONKSCO-UHFFFAOYSA-N 0.000 claims description 10
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 claims description 10
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 10
- 150000007942 carboxylates Chemical class 0.000 claims description 10
- 150000001733 carboxylic acid esters Chemical class 0.000 claims description 10
- 125000000962 organic group Chemical group 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- BYYCSTYYULCJLQ-UHFFFAOYSA-N 2-(2-methylpropyl)piperazine Chemical compound CC(C)CC1CNCCN1 BYYCSTYYULCJLQ-UHFFFAOYSA-N 0.000 claims description 9
- 230000003115 biocidal effect Effects 0.000 claims description 9
- 239000003139 biocide Substances 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 9
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 9
- FRICBZWJFIRJOB-UHFFFAOYSA-N 2-piperazin-1-ylbenzonitrile Chemical compound N#CC1=CC=CC=C1N1CCNCC1 FRICBZWJFIRJOB-UHFFFAOYSA-N 0.000 claims description 8
- 239000013543 active substance Substances 0.000 claims description 8
- 239000003153 chemical reaction reagent Substances 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 229910044991 metal oxide Inorganic materials 0.000 claims description 8
- 150000004706 metal oxides Chemical class 0.000 claims description 8
- 229910052700 potassium Inorganic materials 0.000 claims description 8
- 239000011591 potassium Substances 0.000 claims description 8
- 239000000872 buffer Substances 0.000 claims description 7
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 7
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 7
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 7
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 7
- 229960001866 silicon dioxide Drugs 0.000 claims description 7
- 235000012239 silicon dioxide Nutrition 0.000 claims description 7
- RXYPXQSKLGGKOL-UHFFFAOYSA-N 1,4-dimethylpiperazine Chemical compound CN1CCN(C)CC1 RXYPXQSKLGGKOL-UHFFFAOYSA-N 0.000 claims description 6
- DXYGTOJPNHDXRM-UHFFFAOYSA-N 1-(1-adamantyl)piperazine Chemical compound C1CNCCN1C1(C2)CC(C3)CC2CC3C1 DXYGTOJPNHDXRM-UHFFFAOYSA-N 0.000 claims description 6
- LMQFWBCKQMNEEH-UHFFFAOYSA-N 1-(2-ethylphenyl)piperazine Chemical compound CCC1=CC=CC=C1N1CCNCC1 LMQFWBCKQMNEEH-UHFFFAOYSA-N 0.000 claims description 6
- LVQFQZZGTZFUNF-UHFFFAOYSA-N 2-hydroxy-3-[4-(2-hydroxy-3-sulfonatopropyl)piperazine-1,4-diium-1-yl]propane-1-sulfonate Chemical compound OS(=O)(=O)CC(O)CN1CCN(CC(O)CS(O)(=O)=O)CC1 LVQFQZZGTZFUNF-UHFFFAOYSA-N 0.000 claims description 6
- 239000007995 HEPES buffer Substances 0.000 claims description 6
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 6
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 6
- QYTOONVFPBUIJG-UHFFFAOYSA-N azane;cyanic acid Chemical compound [NH4+].[O-]C#N QYTOONVFPBUIJG-UHFFFAOYSA-N 0.000 claims description 6
- IYPZRUYMFDWKSS-UHFFFAOYSA-N piperazin-1-amine Chemical class NN1CCNCC1 IYPZRUYMFDWKSS-UHFFFAOYSA-N 0.000 claims description 6
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims description 6
- ZVCDLGYNFYZZOK-UHFFFAOYSA-M sodium cyanate Chemical compound [Na]OC#N ZVCDLGYNFYZZOK-UHFFFAOYSA-M 0.000 claims description 6
- CWXPZXBSDSIRCS-UHFFFAOYSA-N tert-butyl piperazine-1-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCNCC1 CWXPZXBSDSIRCS-UHFFFAOYSA-N 0.000 claims description 6
- 239000004408 titanium dioxide Substances 0.000 claims description 6
- WIVGCIGQDNMDQO-UHFFFAOYSA-N (2-piperazin-1-ylpyridin-3-yl)-piperidin-1-ylmethanone Chemical compound C=1C=CN=C(N2CCNCC2)C=1C(=O)N1CCCCC1 WIVGCIGQDNMDQO-UHFFFAOYSA-N 0.000 claims description 5
- YRYAXQJXMBETAT-SSDOTTSWSA-N (2r)-4-[(2-methylpropan-2-yl)oxycarbonyl]piperazin-1-ium-2-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCN[C@@H](C(O)=O)C1 YRYAXQJXMBETAT-SSDOTTSWSA-N 0.000 claims description 5
- YRYAXQJXMBETAT-ZETCQYMHSA-N (2s)-4-[(2-methylpropan-2-yl)oxycarbonyl]piperazin-1-ium-2-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCN[C@H](C(O)=O)C1 YRYAXQJXMBETAT-ZETCQYMHSA-N 0.000 claims description 5
- ARHYWWAJZDAYDJ-UHFFFAOYSA-N 1,2-dimethylpiperazine Chemical compound CC1CNCCN1C ARHYWWAJZDAYDJ-UHFFFAOYSA-N 0.000 claims description 5
- OHUMKYGINIODOY-UHFFFAOYSA-N 1-(1-methylpiperidin-4-yl)piperazine Chemical compound C1CN(C)CCC1N1CCNCC1 OHUMKYGINIODOY-UHFFFAOYSA-N 0.000 claims description 5
- YRIFWVMRUFKWLM-UHFFFAOYSA-N 1-(2,5-dimethylphenyl)piperazine Chemical compound CC1=CC=C(C)C(N2CCNCC2)=C1 YRIFWVMRUFKWLM-UHFFFAOYSA-N 0.000 claims description 5
- MRBFGEHILMYPTF-UHFFFAOYSA-N 1-(2-Pyrimidyl)piperazine Chemical compound C1CNCCN1C1=NC=CC=N1 MRBFGEHILMYPTF-UHFFFAOYSA-N 0.000 claims description 5
- BMEMBBFDTYHTLH-UHFFFAOYSA-N 1-(2-methoxyethyl)piperazine Chemical compound COCCN1CCNCC1 BMEMBBFDTYHTLH-UHFFFAOYSA-N 0.000 claims description 5
- HVZJSUVDFMFZCP-UHFFFAOYSA-N 1-(2-propan-2-yloxyethyl)piperazine Chemical compound CC(C)OCCN1CCNCC1 HVZJSUVDFMFZCP-UHFFFAOYSA-N 0.000 claims description 5
- UXHZIFKPLFIPSX-UHFFFAOYSA-N 1-(2-pyrrolidin-1-ylethyl)piperazine Chemical compound C1CCCN1CCN1CCNCC1 UXHZIFKPLFIPSX-UHFFFAOYSA-N 0.000 claims description 5
- GWWCQKPWZIASLS-UHFFFAOYSA-N 1-(3-methoxypropyl)piperazine Chemical compound COCCCN1CCNCC1 GWWCQKPWZIASLS-UHFFFAOYSA-N 0.000 claims description 5
- XZYLSJPLCLKCMR-UHFFFAOYSA-N 1-(pyridin-4-ylmethyl)piperazine Chemical compound C=1C=NC=CC=1CN1CCNCC1 XZYLSJPLCLKCMR-UHFFFAOYSA-N 0.000 claims description 5
- MSSDTZLYNMFTKN-UHFFFAOYSA-N 1-Piperazinecarboxaldehyde Chemical compound O=CN1CCNCC1 MSSDTZLYNMFTKN-UHFFFAOYSA-N 0.000 claims description 5
- MPOFEHGMWPHBSF-UHFFFAOYSA-N 1-[(2-methylpropan-2-yl)oxycarbonyl]piperazin-4-ium-2-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCNCC1C(O)=O MPOFEHGMWPHBSF-UHFFFAOYSA-N 0.000 claims description 5
- LTVRGAWOEOKGJZ-UHFFFAOYSA-N 1-chloro-3-methoxy-2-methylbenzene Chemical compound COC1=CC=CC(Cl)=C1C LTVRGAWOEOKGJZ-UHFFFAOYSA-N 0.000 claims description 5
- OQZBAQXTXNIPRA-UHFFFAOYSA-N 1-pyridin-4-ylpiperazine Chemical compound C1CNCCN1C1=CC=NC=C1 OQZBAQXTXNIPRA-UHFFFAOYSA-N 0.000 claims description 5
- XAOHWSFGKCJOGT-UHFFFAOYSA-N 2-(4-aminopiperazin-1-yl)ethanol Chemical compound NN1CCN(CCO)CC1 XAOHWSFGKCJOGT-UHFFFAOYSA-N 0.000 claims description 5
- JOMNTHCQHJPVAZ-UHFFFAOYSA-N 2-methylpiperazine Chemical compound CC1CNCCN1 JOMNTHCQHJPVAZ-UHFFFAOYSA-N 0.000 claims description 5
- HCGFLVDMFDHYJD-UHFFFAOYSA-N 2-piperazin-1-ylpyrazine Chemical compound C1CNCCN1C1=CN=CC=N1 HCGFLVDMFDHYJD-UHFFFAOYSA-N 0.000 claims description 5
- INURTONYJXVENS-UHFFFAOYSA-N 3-piperazin-1-yl-n,n-dipropylpropan-1-amine Chemical compound CCCN(CCC)CCCN1CCNCC1 INURTONYJXVENS-UHFFFAOYSA-N 0.000 claims description 5
- AYGYICRITMSJOC-UHFFFAOYSA-N 3-piperazin-1-ylphenol Chemical compound OC1=CC=CC(N2CCNCC2)=C1 AYGYICRITMSJOC-UHFFFAOYSA-N 0.000 claims description 5
- UVLSCMIEPPWCHZ-UHFFFAOYSA-N 3-piperazin-1-ylpropan-1-amine Chemical compound NCCCN1CCNCC1 UVLSCMIEPPWCHZ-UHFFFAOYSA-N 0.000 claims description 5
- MVOFPBMQTXKONX-UHFFFAOYSA-N 3-piperazin-1-ylpropanenitrile Chemical compound N#CCCN1CCNCC1 MVOFPBMQTXKONX-UHFFFAOYSA-N 0.000 claims description 5
- MIPXOMNITKFHDA-UHFFFAOYSA-N 3-piperazin-1-ylpyridazine Chemical compound C1CNCCN1C1=CC=CN=N1 MIPXOMNITKFHDA-UHFFFAOYSA-N 0.000 claims description 5
- SAJZEJMFAWZNCQ-UHFFFAOYSA-N 4-(2-piperazin-1-ylethyl)morpholine Chemical compound C1CNCCN1CCN1CCOCC1 SAJZEJMFAWZNCQ-UHFFFAOYSA-N 0.000 claims description 5
- 125000003118 aryl group Chemical group 0.000 claims description 5
- GMHSTJRPSVFLMT-UHFFFAOYSA-L disodium PIPES Chemical compound [Na+].[Na+].[O-]S(=O)(=O)CCN1CCN(CCS([O-])(=O)=O)CC1 GMHSTJRPSVFLMT-UHFFFAOYSA-L 0.000 claims description 5
- OJURWUUOVGOHJZ-UHFFFAOYSA-N methyl 2-[(2-acetyloxyphenyl)methyl-[2-[(2-acetyloxyphenyl)methyl-(2-methoxy-2-oxoethyl)amino]ethyl]amino]acetate Chemical compound C=1C=CC=C(OC(C)=O)C=1CN(CC(=O)OC)CCN(CC(=O)OC)CC1=CC=CC=C1OC(C)=O OJURWUUOVGOHJZ-UHFFFAOYSA-N 0.000 claims description 5
- BRYCUMKDWMEGMK-UHFFFAOYSA-N piperazine-2-carboxamide Chemical compound NC(=O)C1CNCCN1 BRYCUMKDWMEGMK-UHFFFAOYSA-N 0.000 claims description 5
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 claims description 5
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 5
- GZRKXKUVVPSREJ-UHFFFAOYSA-N pyridinylpiperazine Chemical compound C1CNCCN1C1=CC=CC=N1 GZRKXKUVVPSREJ-UHFFFAOYSA-N 0.000 claims description 5
- RDZTWEVXRGYCFV-UHFFFAOYSA-M sodium 2-[4-(2-hydroxyethyl)piperazin-1-yl]ethanesulfonate Chemical compound [Na+].OCCN1CCN(CCS([O-])(=O)=O)CC1 RDZTWEVXRGYCFV-UHFFFAOYSA-M 0.000 claims description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 5
- NSILYQWHARROMG-MRVPVSSYSA-N tert-butyl (3r)-3-(hydroxymethyl)piperazine-1-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCN[C@@H](CO)C1 NSILYQWHARROMG-MRVPVSSYSA-N 0.000 claims description 5
- NSILYQWHARROMG-QMMMGPOBSA-N tert-butyl (3s)-3-(hydroxymethyl)piperazine-1-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCN[C@H](CO)C1 NSILYQWHARROMG-QMMMGPOBSA-N 0.000 claims description 5
- RMHRRMBFHGEDSR-UHFFFAOYSA-N tert-butyl 4-(5-aminopyridin-2-yl)piperazine-1-carboxylate Chemical compound C1CN(C(=O)OC(C)(C)C)CCN1C1=CC=C(N)C=N1 RMHRRMBFHGEDSR-UHFFFAOYSA-N 0.000 claims description 5
- MPOFEHGMWPHBSF-SSDOTTSWSA-N (2r)-1-[(2-methylpropan-2-yl)oxycarbonyl]piperazin-4-ium-2-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCNC[C@@H]1C(O)=O MPOFEHGMWPHBSF-SSDOTTSWSA-N 0.000 claims description 4
- JSSXHAMIXJGYCS-SCSAIBSYSA-N (R)-piperazine-2-carboxylic acid Chemical group [O-]C(=O)[C@H]1CNCC[NH2+]1 JSSXHAMIXJGYCS-SCSAIBSYSA-N 0.000 claims description 4
- OJXQXPJISCHJSV-UHFFFAOYSA-N 1-(2-isocyanoethyl)-4-methylpiperazine Chemical compound CN1CCN(CC[N+]#[C-])CC1 OJXQXPJISCHJSV-UHFFFAOYSA-N 0.000 claims description 4
- GNDQTDPZWUAOIW-UHFFFAOYSA-N 3-oxopiperazine-2-carboxylic acid Chemical compound OC(=O)C1NCCNC1=O GNDQTDPZWUAOIW-UHFFFAOYSA-N 0.000 claims description 4
- YRYAXQJXMBETAT-UHFFFAOYSA-N 4-[(2-methylpropan-2-yl)oxycarbonyl]piperazin-1-ium-2-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCNC(C(O)=O)C1 YRYAXQJXMBETAT-UHFFFAOYSA-N 0.000 claims description 4
- VAVOYRCCWLRTMS-UHFFFAOYSA-N 4-piperazin-1-ylaniline Chemical compound C1=CC(N)=CC=C1N1CCNCC1 VAVOYRCCWLRTMS-UHFFFAOYSA-N 0.000 claims description 4
- QUWFPBFDQYCMED-UHFFFAOYSA-N 9-(trifluoromethyl)fluoren-9-ol Chemical compound C1=CC=C2C(O)(C(F)(F)F)C3=CC=CC=C3C2=C1 QUWFPBFDQYCMED-UHFFFAOYSA-N 0.000 claims description 4
- DLFVBJFMPXGRIB-UHFFFAOYSA-N Acetamide Chemical compound CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 claims description 4
- MTFCXMJOGMHYAE-UHFFFAOYSA-N Ethyl piperazinoacetate Chemical compound CCOC(=O)CN1CCNCC1 MTFCXMJOGMHYAE-UHFFFAOYSA-N 0.000 claims description 4
- LNOQURRKNJKKBU-UHFFFAOYSA-N ethyl piperazine-1-carboxylate Chemical compound CCOC(=O)N1CCNCC1 LNOQURRKNJKKBU-UHFFFAOYSA-N 0.000 claims description 4
- SADPINFEWFPMEA-UHFFFAOYSA-N furan-2-yl(piperazin-1-yl)methanone Chemical compound C=1C=COC=1C(=O)N1CCNCC1 SADPINFEWFPMEA-UHFFFAOYSA-N 0.000 claims description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 4
- DWXLVZSMXXCSMJ-UHFFFAOYSA-N piperazine-1-sulfonamide Chemical compound NS(=O)(=O)N1CCNCC1 DWXLVZSMXXCSMJ-UHFFFAOYSA-N 0.000 claims description 4
- FBWPWWWZWKPJFL-QMMMGPOBSA-N (1r)-1-(4-hydroxy-3-methoxyphenyl)ethane-1,2-diol Chemical compound COC1=CC([C@@H](O)CO)=CC=C1O FBWPWWWZWKPJFL-QMMMGPOBSA-N 0.000 claims description 3
- ZVHNNCSUTNWKFC-OAQYLSRUSA-N (2r)-4-(9h-fluoren-9-ylmethoxycarbonyl)-1-[(2-methylpropan-2-yl)oxycarbonyl]piperazine-2-carboxylic acid Chemical compound C1[C@H](C(O)=O)N(C(=O)OC(C)(C)C)CCN1C(=O)OCC1C2=CC=CC=C2C2=CC=CC=C21 ZVHNNCSUTNWKFC-OAQYLSRUSA-N 0.000 claims description 3
- ZVHNNCSUTNWKFC-NRFANRHFSA-N (2s)-4-(9h-fluoren-9-ylmethoxycarbonyl)-1-[(2-methylpropan-2-yl)oxycarbonyl]piperazine-2-carboxylic acid Chemical compound C1[C@@H](C(O)=O)N(C(=O)OC(C)(C)C)CCN1C(=O)OCC1C2=CC=CC=C2C2=CC=CC=C21 ZVHNNCSUTNWKFC-NRFANRHFSA-N 0.000 claims description 3
- BXUYOVDONWPZGB-UHFFFAOYSA-N (3,5-dimethylphenyl)-piperazin-1-ylmethanone Chemical compound CC1=CC(C)=CC(C(=O)N2CCNCC2)=C1 BXUYOVDONWPZGB-UHFFFAOYSA-N 0.000 claims description 3
- YHGUVIUZDTUVKZ-UHFFFAOYSA-N (3-methylphenyl)-piperazin-1-ylmethanone Chemical compound CC1=CC=CC(C(=O)N2CCNCC2)=C1 YHGUVIUZDTUVKZ-UHFFFAOYSA-N 0.000 claims description 3
- VYUQPZHRDKLOPX-FQEVSTJZSA-N (3s)-3-methyl-1-tritylpiperazine Chemical compound C1CN[C@@H](C)CN1C(C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 VYUQPZHRDKLOPX-FQEVSTJZSA-N 0.000 claims description 3
- BSPUWRUTIOUGMZ-BYPYZUCNSA-N (3s)-3-methylpiperazin-2-one Chemical compound C[C@@H]1NCCNC1=O BSPUWRUTIOUGMZ-BYPYZUCNSA-N 0.000 claims description 3
- IHSZLKAMJQHQOS-UHFFFAOYSA-N (4-chlorophenyl)-piperazin-1-ylmethanone Chemical compound C1=CC(Cl)=CC=C1C(=O)N1CCNCC1 IHSZLKAMJQHQOS-UHFFFAOYSA-N 0.000 claims description 3
- SPRMQRGIDPGRNZ-WGDLNXRISA-N (e)-1-(2-hydroxyphenyl)-3-[4-[(e)-3-(2-hydroxyphenyl)-3-oxoprop-1-enyl]piperazin-1-yl]prop-2-en-1-one Chemical compound OC1=CC=CC=C1C(=O)\C=C\N1CCN(\C=C\C(=O)C=2C(=CC=CC=2)O)CC1 SPRMQRGIDPGRNZ-WGDLNXRISA-N 0.000 claims description 3
- LXFFLXZLJFRNNO-YCRREMRBSA-N (e)-3-(1,3-benzodioxol-5-yl)-1-[4-(4-methoxyphenyl)piperazin-1-yl]prop-2-en-1-one Chemical compound C1=CC(OC)=CC=C1N1CCN(C(=O)\C=C\C=2C=C3OCOC3=CC=2)CC1 LXFFLXZLJFRNNO-YCRREMRBSA-N 0.000 claims description 3
- YKYIFUROKBDHCY-ONEGZZNKSA-N (e)-4-ethoxy-1,1,1-trifluorobut-3-en-2-one Chemical group CCO\C=C\C(=O)C(F)(F)F YKYIFUROKBDHCY-ONEGZZNKSA-N 0.000 claims description 3
- QFRDYIANRONTKG-WLHGVMLRSA-N (e)-but-2-enedioic acid;1-carbazol-9-yl-3-[4-(3-carbazol-9-yl-2-hydroxypropyl)piperazin-1-yl]propan-2-ol Chemical compound OC(=O)\C=C\C(O)=O.C12=CC=CC=C2C2=CC=CC=C2N1CC(O)CN1CCN(CC(O)CN2C3=CC=CC=C3C3=CC=CC=C32)CC1 QFRDYIANRONTKG-WLHGVMLRSA-N 0.000 claims description 3
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
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- Chemical & Material Sciences (AREA)
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
用于抛光钨或含钨基材的化学机械抛光(CMP)组合物,包含:磨料,至少一种固体催化剂,选自哌嗪衍生物、氰酸盐以及其组合的化学添加剂,以及液体载体。还提供了使用用于抛光钨或含钨基材的水性制剂的系统和方法。
Description
发明背景
本发明概括地涉及半导体晶片上的含钨基材的化学机械平坦化(CMP)。
存在大量用于集成电路例如半导体晶片的制造中的材料。所述材料通常分为三类-介电材料、粘合和/或阻挡层、以及导电层。使用各种基材,例如,介电材料例如TEOS、等离子体增强的TEOS(PETEOS)以及低-k介电材料;阻挡/粘合层例如钽、钛、钽氮化物和钛氮化物;以及导电层例如铜、铝、钨和贵金属,是工业中已知的。
集成电路通过使用熟知的多层互连进行互连。互连结构通常具有第一金属化层、互连层、第二金属化层、以及通常第三和随后的金属化层。层间介电材料例如二氧化硅和有时的低-k材料用于使硅基材或阱中的不同金属化层电隔离。通过使用金属化的通孔、特别是钨通孔,制造不同互连层之间的电连接。U.S.专利4,789,648描述了制备多个金属化层和绝缘膜中的金属化通孔的方法。类似地,金属触点用于在互连层和在阱中形成的器件之间形成电连接。金属通孔和触点通常用钨填充,并且通常使用粘合层例如氮化钛(TiN)和/或钛,以便将金属层例如钨金属层粘合到介电材料上。
在一个半导体制造工艺中,金属化的通孔或触点通过钨沉积层形成,随后进行CMP步骤。在通常工艺中,通孔被刻蚀穿过层间电介质(ILD)至互连线或至半导体基材。接着,薄的粘合层例如氮化钛和/或钛通常在ILD上形成,并且导入经刻蚀的通孔中。然后,钨膜层状沉积在粘合层上并且进入通孔中。继续沉积直到通孔充满钨。最后,过量的钨通过化学机械抛光(CMP)除去,从而形成金属通孔。
目前,用于半导体基材平坦化的化学机械平坦化(CMP)对于本领域技术人员广为人知,并且在无数专利和开放的文献出版物中进行了描述。
在通常的CMP工艺中,放置基材(例如,晶片)以与连接到抛光盘的旋转抛光垫接触。CMP浆料,通常是磨料和化学活性混合物,在基材的CMP处理期间,供给至抛光垫。在CMP工艺期间,旋转抛光垫(固定在抛光盘上)和基材,同时晶片载体系统或抛光头紧靠基材施加压力(向下的力)。由于平行于基材的抛光垫的旋转运动的作用,浆料通过与待平坦化的基材膜发生化学和机械相互作用而完成平坦化(抛光)工艺。继续以这种方式进行抛光,直到基材上所期望的膜被除去,通常的目标为有效地平坦化基材。通常,金属CMP浆料包含悬浮在氧化性的水性介质中的研磨材料,例如二氧化硅或氧化铝。
金属(例如,钨)的去除速率与介电基质的去除速率的比率称为在CMP处理由金属和介电材料构成的基材过程中去除金属相对于去除电介质的“选择性”。
当使用相对于电介质具有去除金属高选择性的CMP浆料时,金属层容易过度抛光,在金属化区域形成凹陷或“碟化”效应。由于半导体制造中的平版印刷和其它局限,这种特征变形是不可接受的。
对于半导体制造,其它不适合的特征变形称为“侵蚀”。侵蚀是电介质区域和金属通孔或沟槽的密集阵列之间的形貌差异。在CMP中,密集阵列中的材料可以以比周围电介质的区域更快的速率被去除或者侵蚀。这导致在电介质的该区域和密集金属(例如,铜或钨)阵列之间产生形貌差异。
随着行业标准趋向更小的器件特征,持续存在对提供优异的IC芯片的纳米结构的平坦化的钨CMP浆料的开发需求。具体来说,对于28纳米技术节点和更高应用,浆料产品必须提供可调节的去除速率和可调节的金属和电介质之间的选择性,在保持足够的去除速率的同时,减少侵蚀和碟化缺陷。
存在着对提供低的碟化和插塞式凹陷(plug recess)效应的钨CMP工艺和浆料的显著需求,特别是基于半导体工业持续向越来越小的特征尺寸发展的事实。本发明可以为这种的显著需求提供解决方案。
本文所描述的钨CMP浆料组合物可以进行调节,以便在提供较低的静态刻蚀速率以在具有钨通孔的区域使氧化物的表面瑕疵,缺陷,腐蚀,以及侵蚀最小化的同时,提供可调节的以期望的抛光速率的有效抛光,钨相对于其它材料例如介电材料的受控的抛光选择性。
发明简介
本发明可用于钨CMP,其中期望和/或要求低碟化/插塞式凹陷、在平坦化基材上的低阵列侵蚀,保持或提高钨膜去除速率,并保持可调节的和/或高的钨选择性。
一方面,本发明提供了钨化学机械抛光(CMP)组合物,包含:
a)纳米尺寸磨料;
b)铁化合物涂布颗粒的固体催化剂;
c)化学添加剂,选自哌嗪衍生物,氰酸盐,以及其组合;
d)氧化剂;以及
e)其余部分基本上是液体载体;
其中,CMP组合物的pH为约2.0至约8。
另一方面,本发明提供了化学机械抛光含钨半导体基材的方法,包含下列步骤:
a)提供抛光垫;
b)提供化学机械抛光组合物,其包含:
1)纳米尺寸磨料;
2)铁化合物涂布颗粒的固体催化剂;
3)化学添加剂,选自哌嗪衍生物,氰酸盐,以及其组合;
4)氧化剂;
5)其余部分基本上是液体载体;并且
其中,组合物的pH为约2.0至约8。
c)使半导体基材的表面与所述抛光垫和所述化学机械抛光组合物接触;以及
d)抛光半导体基材的表面;
其中所述包含钨的表面的至少一部分与所述抛光垫和所述化学机械抛光组合物二者接触。
而又一方面,本发明提供了选择性化学机械抛光的方法,包含下列步骤:
a)提供具有包含钨和至少一种其它材料的表面的半导体基材;
b)提供抛光垫;
c)提供化学机械抛光(CMP)组合物,其包含:
1)纳米尺寸磨料;
2)铁化合物涂布颗粒的固体催化剂;
3)化学添加剂,选自哌嗪衍生物,氰酸盐,以及其组合;
4)氧化剂;以及
5)其余部分基本上是液体载体;
其中,CMP组合物的pH为约2.0至约8。
d)使半导体基材的表面与所述抛光垫和所述化学机械抛光组合物接触;以及
e)抛光所述半导体基材的表面;
其中所述包含钨的表面的至少一部分与所述抛光垫和所述化学机械抛光组合物二者接触;并且钨的去除速率与所述至少一种其它材料的去除速率的比率等于或大于1。
而又一方面,本发明提供了选择性化学机械抛光的系统,包含:
a)具有包含钨和至少一种其它材料的表面的半导体基材;
b)抛光垫;
c)化学机械抛光(CMP)组合物,包含:
1)纳米尺寸磨料;
2)铁化合物涂布颗粒的固体催化剂;
3)化学添加剂,选自哌嗪衍生物,氰酸盐,以及其组合;
4)氧化剂;以及
5)其余部分基本上是液体载体;
其中,CMP组合物的pH为约2.0至约8。
其中所述包含钨的表面的至少一部分与所述抛光垫和所述化学机械抛光组合物二者接触。
任选地,化学机械抛光(CMP)组合物还包含一种或多种下列组分:
腐蚀抑制剂;
pH缓冲剂;
表面活性剂;以及
当抛光组合物的pH为5.0-8.0时的杀生物剂。
典型地,纳米尺寸磨料选自二氧化硅,氧化铝,氧化铈,二氧化钛,氧化锆,以及其组合。
固体催化剂是铁化合物涂布的颗粒。合适用于制备固体催化剂的颗粒包含胶体二氧化硅和其它类型的胶体或纳米尺寸的无机金属氧化物颗粒。
哌嗪衍生物的实例是,但不限于,取代的单氨基哌嗪衍生物,以及取代的双氨基哌嗪衍生物,以及其组合。
氰酸盐的实例是,但不限于,氰酸钾,氰酸钠,氰酸铵以及氰酸四烷基铵。
本发明的特征包括:
#1.钨化学机械抛光(CMP)组合物,包含:
a)0.1wt%至25wt%的纳米尺寸磨料,选自二氧化硅,氧化铝,氧化铈,二氧化钛,氧化锆,以及其组合;
b)0.1wt%至0.5wt%的铁化合物涂布颗粒的固体催化剂,选自铁化合物涂布的胶体二氧化硅,胶体或纳米尺寸的无机金属氧化物颗粒,以及其组合;
c)0.0001wt%至0.5wt%的化学添加剂,选自哌嗪衍生物,氰酸盐,以及其组合;
d)0.5wt%至10wt%的氧化剂;以及
e)其余部分是液体载体;
其中,CMP组合物的pH为约2.0至约8;
#2.#1所述的钨化学机械抛光(CMP)组合物,其中,所述化学添加剂是具有下列通用分子结构的哌嗪衍生物:
其中,R1和R2独立地选自烷基,烷氧基,具有一个或多个羟基的有机基团,取代的有机磺酸,取代的有机磺酸盐,取代的有机羧酸,取代的有机羧酸盐,有机羧酸酯,有机胺,以及其组合。
#3.#2所述的钨化学机械抛光(CMP)组合物,其中,所述哌嗪衍生物是具有下列分子结构的取代的有机单氨基哌嗪衍生物(a)或取代的有机双氨基哌嗪衍生物(b):
其中
键合到哌嗪6元环的1或4位的氮原子上的有机胺官能团可以是相同或不同的;
n为1-6,表示桥连来自哌嗪环的氮原子和来自有机胺官能团的氮原子的有机烷基的不同长度;以及
有机胺官能团选自伯胺基H2N-R-,仲有机胺基HRN-R’-,以及叔有机胺基RR’N-R”-;
其中,R,R’,R”和R”’各自独立地选自质子,烷基,烷氧基,具有一个或多个羟基的有机基团,取代的有机磺酸,取代的有机磺酸盐,取代的有机羧酸,取代的有机羧酸盐,有机羧酸酯,有机胺,以及其组合;并且R,R’,R”和R”’可以是相同或不同的。
#4.#2所述的钨化学机械抛光(CMP)组合物,其中,所述哌嗪衍生物选自(R)-哌嗪-2-羧酸;1-(2-羟乙基)哌嗪;哌嗪-2,6-二酮;1-(2-氨乙基)哌嗪;1,4-双(2-羟乙基)哌嗪;1,4-双(丙烯酰基)哌嗪;哌嗪-1-乙酸叔丁酯;1-(3-甲基苯甲基)哌嗪;4-Boc-哌嗪-2羧酸;1-(二苯甲基)哌嗪;1,4-Di-Boc-哌嗪-2羧酸;2-(哌嗪-1-羰基)-苯甲酸;4-(哌嗪-1-羰基)-哌啶-1-羧酸叔丁酯;哌嗪-1-羧酸(2-氯-苯基)酰胺哌嗪-1-羧酸二甲酰胺;哌嗪-1-羧酸二乙酰胺;哌嗪-1-羧酸二苯基酰胺;哌嗪-1-磺酰胺;哌嗪-2-羧酰胺;1,2-二甲基-哌嗪;1-(2-丁基)哌嗪;2-异丁基-哌嗪;2-叔丁基哌嗪;r-2-异丁基-哌嗪;s-2-异丁基-哌嗪;2-异丙基-哌嗪;1-(2-嘧啶基)哌嗪;1-(4-三氟甲基苯基)哌嗪;1-(环丙基甲基)哌嗪;1-(2-吡嗪基)-哌嗪;1-(2-三氟甲基苯基)哌嗪;1-(6-哒嗪基)哌嗪;2-(4-三氟甲基苯基)哌嗪;2-苯基-哌嗪-1-羧酸苯甲酯;1-(1-萘甲基)哌嗪;1-(1-戊基)哌嗪;1-(2-戊基)哌嗪;1-(3-戊基)哌嗪;1-(丙酰基)哌嗪;2-苯基-哌嗪-1-羧酸叔丁酯;1-Boc-哌嗪;1-(4-氯苯基)哌嗪;1-(2-呋喃甲酰基)哌嗪;1-(2-氟苯基)哌嗪;1-(2-羟基苯基)哌嗪;1-(2-苯乙基)哌嗪;1-(4-氟苯基)哌嗪;1-(2-甲基苯甲基)哌嗪;1-(4-羟基苯基)哌嗪;1-(4-甲基苯甲基)哌嗪;1-(3-羟基苯基)哌嗪;1-(1-苯乙基)哌嗪;1-(2,4-二甲基苯基)哌嗪;1-(2,5-二甲基苯基)哌嗪;1-(2,5-二甲基苯基)哌嗪;1-(2,6-二甲苯基)哌嗪;1-(2-乙基苯基)哌嗪;1-(2-乙基苯基)哌嗪;1-(3,4-二甲基苯基)哌嗪;1-(3,5-二甲基苯基)哌嗪;1-(3-氟苯基)哌嗪;1-(3-呋喃甲酰基)哌嗪;1-(N-庚基)哌嗪;1-新戊酰基-哌嗪;2,3-二甲基-哌嗪-1-羧酸叔丁酯;2-(2-氯苯基)哌嗪;2-(4-氯苯基)哌嗪;n-4-cbz-哌嗪-2-羧酸甲酯;1-(2-吡啶基)哌嗪;1-(2-甲氧基苯基)哌嗪;1-(4-甲氧基苯基)哌嗪;1-(4-氯二苯甲基)哌嗪;1-(4-吡啶基)哌嗪;1-(4-氨基苯基)哌嗪;1-(4-甲氧基苯甲基)哌嗪;1-(2-氰基苯基)哌嗪;1-(1-金刚烷基)哌嗪;1-(4-硝基苯基)哌嗪;1-(2-甲氧基乙基)哌嗪;2-(三氟甲基)哌嗪;1-(3,4-二氯苯基)哌嗪;1-Boc-哌嗪-2-羧酸;1-(2,5-二氟苯甲基)哌嗪;1-(2-乙氧基乙基)哌嗪;1-(3,4-二氯苯甲基)哌嗪;1-(3-甲氧基苯基)哌嗪;1-(环己基甲基)哌嗪;1-(3-甲基苯基)哌嗪;1-(4-甲基苯基)哌嗪;1-(3-氟苯甲基)哌嗪;1-(4-氟苯甲基)哌嗪;2-(3-甲氧基苯基)哌嗪;1-(3-氯苯甲基)哌嗪;1-(环丙基羰基)哌嗪;(R)-1-Boc-哌嗪-2-羧酸;(R)-2-苯甲基-哌嗪;(R)-3-羟甲基-哌嗪-1-羧酸叔丁酯;(R)-4-N-Boc-哌嗪-2-羧酸;(S)-2-苯甲基-哌嗪;(S)-2-苯甲基-哌嗪-1-羧酸叔丁酯;(S)-3-羟甲基-哌嗪-1-羧酸叔丁酯;(S)-4-N-Boc-哌嗪-2-羧酸;1-(1-哌啶磺酰基)哌嗪;1-(2,2,2-三氟乙基)哌嗪;1-(2,3-二氟苯基)哌嗪;1-(2,4,6-三甲基苯甲基)哌嗪;1-(2,4-二氯苯甲基)哌嗪;1-(2,4-二氟苯基)哌嗪;1-(2,6-二氯苯甲基)哌嗪;1-(2-氯苯甲基)哌嗪;1-(2-环己基乙基)哌嗪;1-(2-二异丙基氨基乙基)哌嗪;1-(2-二丙基氨基乙基)哌嗪;1-(2-乙氧基苯基)哌嗪;1-(2-乙基丁酰基)哌嗪;1-(2-氟苯甲基)哌嗪;1-(2-异丙氧基乙基)哌嗪;1-(2-甲巯基苯基)哌嗪;1-(2-甲基丙酰基)哌嗪;1-(2-吗啉基乙基)哌嗪;1-(2-苯氧基乙基)哌嗪;1-(2-哌啶基乙基)哌嗪;1-(2-吡咯烷基乙基)哌嗪;1-(3,3-二甲基丁酰基)哌嗪;1-(3,4-二氯苯甲酰基)哌嗪;1-(3-(3,5-二氯苯基)哌嗪;4-二氟苯甲酰基)哌嗪;1-(3,4-二甲基苯甲基)哌嗪;1-(3,5-二甲氧基苯甲酰基)哌嗪;1-(3,5-二甲基苯甲酰基)哌嗪;1-(3-氨基丙基)哌嗪;1-(3-氰基丙基)哌嗪;1-(3-二乙氨基丙基)哌嗪;1-(3-二丙氨基丙基)哌嗪;1-(3-甲氧基丙基)哌嗪;1-(3-吗啉基丙基)哌嗪;1-(3-苯基丙基)哌嗪;1-(3-哌啶基丙基)哌嗪;1-(3-吡咯烷基丙基)哌嗪;1-(4-氯苯甲酰基)哌嗪;1-(4-氯苯甲基)哌嗪;1-(4-乙氧基苯基)哌嗪;1-(4-甲氧基苯甲酰基)哌嗪;1-(4-甲氧基丁基)哌嗪;1-(4-苯基丁基)哌嗪;1-(4-吡啶基甲基)哌嗪;1-(4-叔丁基苯甲基)哌嗪;1-(环己基羰基)哌嗪;1-(乙烷磺酰基)哌嗪;1-(苯基乙酰基)哌嗪;1-cbz-哌嗪-2-羧酸;1-己酰基-哌嗪;1-甲基磺酰基-哌嗪;2,3-二苯基-哌嗪;2-(2-呋喃基)哌嗪;2-(2-甲氧基苯基)哌嗪;2-(2-噻吩基)哌嗪;2-(3-氧代-哌嗪-1-羰基)-苯甲酸;2-(4-氯苯基)哌嗪-1-羧酸叔丁酯;2-(4-甲氧基苯基)哌嗪;2-(4-甲基苯基)哌嗪;2-苯甲基-哌嗪;3-(4-氯苯基)哌嗪-1-羧酸叔丁酯;3-氧代-哌嗪-2-羧酸;3-苯基-哌嗪-1-羧酸乙酯;4-(4-Boc-哌嗪-1-羰基)苯基硼酸频哪醇酯;[5-(4-甲基-哌嗪-1-磺酰基)-吡啶-2-基]-肼;哌嗪-1-羧酸甲酯;1-乙基-2-甲基-哌嗪;1,4-双(3-氨基丙基)哌嗪;1-[2-(2-羟基乙氧基)乙基]哌嗪;1-(2-甲基-烯丙基)-哌嗪;2-(3-三氟甲基-苯基)哌嗪;4-N-Boc-2-甲基-哌嗪;-(四氢2-呋喃甲酰基)-哌嗪;1-(四氢-2-呋喃甲基)哌嗪;(R)-1-Boc-2-乙基-哌嗪;(R)-1-Boc-3-乙基-哌嗪;(S)-1-Boc-2-乙基-哌嗪;(S)-1-Boc-3-乙基-哌嗪;1-[1-(2-甲氧基苯基)乙基]哌嗪;1-[1-(3-甲氧基苯基)乙基]哌嗪;1-[1-(4-甲氧基苯基)-乙基]哌嗪;1-[2-(2-甲基苯氧基)乙基]哌嗪;1-(4-乙氧基-苯甲基)-哌嗪;1-Boc-2,6-二甲基-哌嗪;1-Boc-3,3-二甲基-哌嗪;1-Boc-3,5-二甲基-哌嗪;1-Boc-5-氧代-哌嗪-2-羧酸;1-N-(叔丁氧基羰基)-2-乙基-哌嗪;2-(2-氟-苯基)-哌嗪;2-(3-氟-苯基)-哌嗪;2-甲基-1-(3-甲基苯基)-哌嗪;4-(5-氨基吡啶-2-基)哌嗪-1-羧酸叔丁酯;1-[2-(二甲氨基)乙基]哌嗪;1-(1-甲基-4-哌啶基)哌嗪;1-乙酰基-4-(4-羟基苯基)哌嗪;1-[4-(三氟甲基)苯甲基]哌嗪;1-Boc-4-(2-甲酰基苯基)哌嗪;1-氨基-4-(2-羟基乙基)哌嗪;1-Boc-(4-苯甲基)哌嗪;1-Boc-4-[3-(乙氧基羰基)苯基]哌嗪;1-双(4-氟苯基)甲基哌嗪;1-Boc-4-(3-羟丙基)哌嗪;1-Boc-4-(4-甲酰基苯基)哌嗪;1-Boc-4-(4-甲氧基羰基苯基)哌嗪;1-(1,3-二氧戊环-2-基甲基)哌嗪;1-(3-氨基丙基)-4-(2-甲氧基苯基)哌嗪;1-[3-(二甲氨基)丙基]哌嗪;1-(1,2,3,4-四氢萘-2-基)哌嗪;1-(4-氨基丁基)-4-(2-甲氧基苯基)哌嗪;1-Boc-4-(2-甲氧基羰基苯基)哌嗪;1-Boc-4-(5-硝基-2-吡啶基)哌嗪;(R)-1-Boc-2-苯甲基-哌嗪;(R)-1-N-Boc-2-异丙基-哌嗪;(R)-1-N-Boc-4-N-Fmoc-2-哌嗪羧酸;(R)-1-N-cbz-2-甲基-哌嗪;(R)-4-N-三苯甲基-2-甲基-哌嗪;(R)-N4-苯甲基-2-(苯甲基氧甲基)哌嗪;(S)-1-Boc-2-羟甲基-哌嗪;(S)-1-Boc-2-异丁基-哌嗪;(S)-1-Boc-3-苯甲基-哌嗪;(S)-1-Boc-3-异丙基-哌嗪;(S)-1-N-Boc-4-N-Fmoc-哌嗪-2-羧酸;(S)-4-N-三苯甲基-2-甲基-哌嗪;(S)-n4-苯甲基-2-(甲基硫乙基)哌嗪;1-[(2,6-二氯苯基)磺酰基]哌嗪;1-[(2-甲基-1,3-噻唑-5-基)甲基]哌嗪;1-[(4,5-二甲基-1,3-噁唑-2-基)甲基]哌嗪;1-[(4-环己基苯基)磺酰基]哌嗪;1-[(4-异丁基苯基)磺酰基]哌嗪;1-[(4-甲基-1,2,5-噁二唑-3-基)甲基]哌嗪;1-[(4-仲丁基苯基)磺酰基]哌嗪;1-[(4-叔丁基-2,6-二甲基苯基)磺酰基]哌嗪;1-[1-(吡啶-2-基)乙基]哌嗪;1-[1-(吡啶-3-基)乙基]哌嗪;1-[1-(噻吩-2-基)乙基]哌嗪;1-[2-(1-丙基)-氧乙基]-哌嗪;1-[2-(1H-吡咯-1-基)乙基]哌嗪;1-[2-(2-甲氧基-苯氧基)-乙基]-哌嗪;1-[2-(二烯丙基氨基)-乙基]-哌嗪;1-[2-(三氟甲基)吡啶-4-基]哌嗪;1-[2-(三氟甲基)喹啉-4-基]哌嗪;1-[2-氟-4-(甲基磺酰基)苯基]哌嗪;1-[2-氟-4-(甲基磺酰基)苯基]-4-(2-羟乙基)哌嗪;1-[3-(1-哌啶羰基)-2-吡啶基]哌嗪;1-[3-(二氟甲氧基)苯甲酰基]哌嗪;1-[3-(三氟甲基)吡啶-2-基]哌嗪;1-[4-(甲基磺酰基)苯基]哌嗪;1-[4-(三氟甲基)嘧啶-2-基]哌嗪;1-(1H-咪唑-2-基甲基)哌嗪;1-(2,6-二甲基吡啶-4-基)哌嗪;1-(2-二苯甲氧-乙基)-哌嗪;1-(2-羟乙基)-4-异丙基-哌嗪;1-(2-咪唑-1-基-乙基)-哌嗪;1-(2-异氰基-乙基)-4-甲基-哌嗪;1-(2-甲基-噻唑-4-基甲基)-哌嗪;1-(2-N-Boc-氨基乙基)哌嗪;1-(2-吡啶-2-基-乙基)-哌嗪;1-(2-吡啶-4-基-乙基)-哌嗪;1-(2-噻吩-2-基-乙基)-哌嗪;1-(3,5-二甲基-异噁唑-4-基甲基)-哌嗪;1-(3-甲氧基-苯甲基)-哌嗪;1-(3-甲基-苯甲酰基)-哌嗪;1-(3-甲基-吡啶-2-基甲基)哌嗪;1-(3-甲基吡啶-2-基)哌嗪;1-(3-甲基吡啶-4-基)哌嗪;1-(4,6-二甲基嘧啶-2-基)哌嗪;1-(4-氰基-苯甲基)哌嗪;1-(4-乙氧基-苯磺酰基)-哌嗪;1-(4-乙氧基-吡啶-2-基)-哌嗪;1-(4-氟苯甲基)-4-(2-羟乙基)哌嗪;1-(4-羟基-苯基)-哌嗪-4-羧酸叔丁酯;(现在14页)N-Boc-哌啶;2-甲基哌嗪;2,6-二甲基哌嗪;反式-2,5-二甲基哌嗪;1,4-二甲基哌嗪;(R)-1-Boc-3-甲基哌嗪;1-Boc-3-氧代哌嗪;1,4-双-(2-甲氧基-5-甲基-苯磺酰基)-2-甲基-哌嗪;1-[(1-甲基-1H-吡唑-3-基)羰基]哌嗪;1-[(1-甲基-1H-吡唑-4-基)甲基]哌嗪;1-(2-(N,N-双-(2-羟丙基)-氨基)-乙基)-4-(2-羟丙基)-哌嗪;1-(2-甲氧基苯基)-4-((4-(2-甲氧基苯基)-1-哌嗪基)(氧代)乙酰基)哌嗪;1-(3-(2,3-二氢-1,4-苯并二噁英-6-基)丙烯酰基)-4-(4-氟苯基)哌嗪;1-(4-氯苯基)4-[(7-{[4-(4-氯苯基)-1-哌嗪基]磺酰基}-9H-芴-2-基)磺酰基]哌嗪;1-(4-氟苯基)-4-((4-(4-氟苯基)-1-哌嗪基)(氧代)乙酰基)哌嗪;1-(4-硝基苯基)-4-(3-{[4-(4-硝基苯基)-1-哌嗪基]羰基}苯甲酰基)哌嗪;1-(4-硝基苯基)-4-(4-{[4-(4-硝基苯基)-1-哌嗪基]羰基}苯甲酰基)哌嗪;1-乙酰基-4-(1-乙基-1H-咪唑-2-基)哌嗪;1-二苯甲基-4-{2-[5-(苯甲基硫基(sulfanyl))-4-(2-甲基-2-丙烯基)-4H-1,2,4-三唑-3-基]乙基}哌嗪;1-苯甲基-4-[2-[(2’,4’-二氟[1,1’-联苯基]-4-基)氧]乙基]哌嗪;1-苯甲基-4-(3-((2’,4’-二氟(1,1’联苯基)-4-基)氧]丙基]哌嗪;1-异丙基-4-[(1-甲基-1H-吡咯-2-基)甲基]哌嗪;1-甲基-4-({7-[(4-甲基-1-哌嗪基)磺酰基]-9H-芴-2-基}磺酰基)哌嗪;1-苯基-4-[苯基(4-苯基-1-哌嗪基)甲基]哌嗪;1-甲基-4-(甲基磺酸基)哌嗪;4-(2-羟基-乙基)-哌嗪-1-羧酸(4-异丙基-苯基)-酰胺;6-羟甲基-1,3-二甲基-哌嗪-2,5-二酮;2,2’-(哌嗪-1,4-二基)二乙烷磺酸双(2-甲氧基苯基)酯;1-(金刚烷-1-亚磺酰基)-4-甲基-哌嗪;1-(苯基磺酰基)-4-(2-吡啶基)哌嗪;1-苯甲基-4-(2-甲氧基丙酰基)哌嗪;1-环己基-4-(甲基磺酰基)哌嗪;1-乙基-4-(3-呋喃基甲基)哌嗪;1-(3-苯氧基-4-吡啶基)哌嗪;1-(2-吡啶基)-4-(3-(2,3,4-三甲氧基苯基)丙烯酰基)哌嗪;1-(3-(1,3-苯并二氧杂环戊烯-5-基)丙烯酰基)-4-(2-吡啶基)哌嗪;1-(3-(1,3-苯并二氧杂环戊烯-5-基)丙烯酰基)-4-(4-甲氧基苯基)哌嗪;1,4-双-(2-吡啶基亚甲基氨基)-哌嗪;1,4-双-(3,4,5-三甲氧基苯亚甲基氨基-哌嗪;1,4-双-(乙酰乙酰基)-哌嗪;1,4-二(2-呋喃甲酰基)哌嗪;1,4-双[2-(4-吡啶基)乙基]哌嗪;1,4-双[2-(2-吡啶基)乙基]哌嗪;1,4-双(2-羧基苯甲酰基)哌嗪;1,4-双(3-吡啶基甲基)哌嗪;1-(乙氧基羰基甲基)哌嗪;2,3,5,6-四羟基-哌嗪-1,4-二甲醛;4-苯甲基-哌嗪-1-羧酸环己基酰胺;2,2’-(哌嗪-1,4-二基)双(2-乙醛酸)二乙酯;2,2’-(哌嗪-1,4-二基)二乙酸二乙酯;3,3’-(哌嗪-1,4-二基)二丙酸二甲酯;(2E,2’E)-3,3’-(哌嗪-1,4-二基)双(1-(2-羟基苯基)丙-2-烯-1-酮);2,2’-(哌嗪-1,4-二基)双(N-(1,5-二甲基-3-氧代-2-苯基-2,3-二氢-1H-吡唑-4-基)乙酰胺);2,2’-(哌嗪-1,4-二基)二丙酰胺;,2’-(哌嗪-1,4-二基)二丙腈;3,3’-(哌嗪-1,4-二基)双(1-(9H-咔唑-9-基)丙烷-2-醇)富马酸酯;3,3’-(哌嗪-1,4-二基)双(1-苯基丙烷-1-酮);3,3’-(哌嗪-1,4-二基)二丙烷-1-醇;4,4’-(哌嗪-1,4-二基)双(3-乙氧基环丁-3-烯-1,2-二酮);哌嗪-1,4-二硫代羧酸双-苯基酰胺;1,4-二-叔丁基-哌嗪-2,5-二酮;1,4-双十二烷基-哌嗪;1,4-双十六烷基-哌嗪;1-(1-哌啶基羰基)哌嗪;1-(1-金刚烷基甲基)哌嗪;1-(3,4-二甲氧基苯甲基)哌嗪;1-(3-吡啶基羰基)哌嗪;4-哌嗪基苯甲腈;(S)-3-甲基-2-酮哌嗪;(R)-3-甲基-2-酮哌嗪;4-(Boc-哌嗪-1-基)-3-硝基苯甲酸;1,1’-(哌嗪-1,4-二基)二丙烷-2-醇;2,2’-(哌嗪-1,4-二基)双(1-苯基乙醇);2,2’-(哌嗪-1,4-二基)双(2-甲基丙腈);哌嗪-N,N’-双(2-乙烷磺酸);1-甲酰基哌嗪;PIPES钠盐;PIPES二钠盐;PIPES二钾盐;哌嗪-N,N’-双(2-羟基丙烷磺酸);1-哌嗪羧酸乙酯;POPSO二钠盐;4-羟基-3-甲氧基苯基乙二醇半哌嗪盐;柠檬酸倍半哌嗪盐水合物;4-(2-羟乙基)哌嗪-1-乙烷磺酸;4-(2-羟乙基)-1-哌嗪丙烷磺酸;HEPES钠盐;N-(2-羟乙基)哌嗪-N’-(4-丁烷磺酸);3-甲基-2-酮哌嗪;HEPES钾盐;3-哌嗪基丙腈;哌嗪乙酸乙酯;雌酮硫酸酯哌嗪;1-哌嗪丙醇;4-(2-氨基-1-苯基乙基)哌嗪羧酸叔丁酯;4-[2-(氨基甲基)苯基]哌嗪-1-羧酸叔丁酯;4-[5-(羟甲基)吡啶-2-基]哌嗪-1-羧酸叔丁酯;4-(3-氨基苯甲基)哌嗪-1-羧酸叔丁酯;4-(4-[(甲基氨基)甲基]苯基)哌嗪-1-羧酸叔丁酯;4-(4-氰基吡啶-2-基)哌嗪-1-羧酸叔丁酯;4-(5-甲酰基吡啶-2-基)哌嗪-1-羧酸叔丁酯;4-(氧杂环丁烷-3-基)哌嗪-1-羧酸叔丁酯;4-(哌啶-3-基)哌嗪-1-羧酸叔丁酯;4-(吡咯烷-2-基羰基)哌嗪-1-羧酸叔丁酯;4-(1H-吡咯并[2,3-b]吡啶-4-基)哌嗪-1-羧酸叔丁酯;1-[2-(2,5-二甲基-1H-吡咯-1-基)乙基]哌嗪;1-((1,5-二甲基-1H-吡唑-4-基)甲基)哌嗪;1-(1-乙基-5-甲基-1H-吡唑-4-基甲基)-哌嗪;4-(2-氨基-1-[4-(三氟甲基)苯基]乙基)哌嗪羧酸叔丁酯;3-(4-氟-苯基)-哌嗪-1-羧酸叔丁酯;3-(4-羟基-苯基)-哌嗪-1-羧酸叔丁酯;3-呋喃-2-基-哌嗪-1-羧酸叔丁酯;3-噻吩-2-基-哌嗪-1-羧酸苯甲酯;4-(2-氨基-苯基)-哌嗪-1-羧酸叔丁酯;4-(2-氨基乙基)-1-boc-哌嗪;4-(5-羧基-吡啶-2-基)-2-甲基-哌嗪-1-羧酸叔丁酯;4-Boc-1-(6-甲基-2-吡啶基)哌嗪;Fmoc-4-羧甲基-哌嗪;4-Boc-哌嗪-2-羧酸甲酯;N,N-二甲基-1-哌嗪磺酰胺;N-1-Boc-N-4-Fmoc-2-哌嗪羧酸;N-4-Boc-N-1-cbz-2-哌嗪羧酸;N-4-Boc-N-1-Fmoc-2-哌嗪乙酸;哌嗪-1-甲脒(carboximidamide)与硫酸化合物(1∶1);1-乙基-哌啶-4-基-哌嗪;1-呋喃-2-基甲基-哌嗪;1-甲基-4-(2-哌啶-4-基-乙基)-哌嗪;1-甲基-4-(6-氨基吡啶-3-基)哌嗪;1-甲基-4-(哌啶-4-基)-哌嗪;1-N-Boc-4-(氮杂环丁烷-3-基)哌嗪;1-吡啶-2-基甲基-哌嗪;1-吡啶-3-基甲基-哌嗪;1-噻唑-2-基-哌嗪;2-(2,5-二甲氧基-苯基)-哌嗪;2-羧甲基-3-氧代-哌嗪-1-羧酸叔丁酯;2-乙氧基羰基甲基-3-氧代-哌嗪-1-羧酸叔丁酯;1-(4-甲基-环己基)-哌嗪;1-(4-甲基-哌啶-1-磺酰基)-哌嗪;1-(4-三氟甲基-吡啶-2-基)-哌嗪;1-(5-甲基-2-吡啶基)哌嗪;1-(5-甲基-2噻唑基)哌嗪;1-(5-硝基吡啶-2-基)哌嗪;1-(6-丁氧基-2-吡啶基)哌嗪;1-(6-甲基吡啶-2-基)哌嗪;1-(N-甲基哌嗪-3-基-甲基)哌嗪;1-(噻吩-2-基乙酰基)哌嗪;1-Boc-4-(哌啶-4-基)-哌嗪;1-Boc-4-氰基甲基-哌嗪;1-环己-3烯基-甲基-哌嗪,以及其组合。
#5.#2所述的钨化学机械抛光(CMP)组合物,其中,所述哌嗪衍生物选自单取代的1-(2-氨乙基)哌嗪;双取代的1,4-双(3-氨基丙基)哌嗪,以及其组合。
#6.#1所述的钨化学机械抛光(CMP)组合物,其中,所述化学添加剂是氰酸盐,选自氰酸钾,氰酸钠,氰酸铵,氰酸四烷基铵,以及其组合。
#7.#1所述的钨化学机械抛光(CMP)组合物,还包含如下的一种或多种
腐蚀抑制剂;
pH缓冲剂;
表面活性剂;以及
当抛光组合物的pH为5.0-8.0时的杀生物剂。
#8.选择性化学机械抛光的方法,包含下列步骤:
a)提供具有包含钨和至少一种其它材料的表面的半导体基材;
b)提供抛光垫;
c)提供化学机械抛光(CMP)组合物,包含
1)0.1wt%至25wt%的纳米尺寸磨料,选自二氧化硅,氧化铝,氧化铈,二氧化钛,氧化锆,以及其组合;
2)0.1wt%至0.5wt%的铁化合物涂布颗粒的固体催化剂,选自铁化合物涂布的胶体二氧化硅,胶体或纳米尺寸的无机金属氧化物颗粒,以及其组合;
3)0.0001wt%至0.5wt%的化学添加剂,选自哌嗪衍生物,氰酸盐,以及其组合;
4)0.5wt%至10wt%的氧化剂;以及
5)其余部分是液体载体;
其中,CMP组合物的pH为约2.0至约8;
c)使半导体基材的表面与所述抛光垫和所述化学机械抛光组合物接触;以及
d)抛光半导体基材的表面;
其中所述包含钨的表面的至少一部分与所述抛光垫和所述化学机械抛光组合物二者接触;并且钨的去除速率与所述至少一种其它材料的去除速率的比率等于或大于1。
#9.#8所述的化学机械抛光含钨半导体基材的方法,其中,所述化学添加剂是具有下列通用分子结构的哌嗪衍生物:
其中,R1和R2独立地选自烷基,烷氧基,具有一个或多个羟基的有机基团,取代的有机磺酸,取代的有机磺酸盐,取代的有机羧酸,取代的有机羧酸盐,有机羧酸酯,有机胺,以及其组合。
#10.#8所述的化学机械抛光含钨半导体基材的方法,其中,所述哌嗪衍生物是(a)取代的有机单氨基哌嗪衍生物或(b)取代的有机双氨基哌嗪衍生物,具有下列分子结构:
其中
键合到哌嗪6元环的1或4位的氮原子上的有机胺官能团可以是相同或不同的;
n为1-6,表示桥连来自哌嗪环的氮原子和来自有机胺官能团的氮原子的有机烷基的不同长度;以及
有机胺官能团选自伯胺基H2N-R-,仲有机胺基HRN-R’-,以及叔有机胺基RR’N-R”-;
其中,R,R’,R”和R”’各自独立地选自质子,烷基,烷氧基,具有一个或多个羟基基团的有机基团,取代的有机磺酸,取代的有机磺酸盐,取代的有机羧酸,取代的有机羧酸盐,有机羧酸酯,有机胺,以及其组合;并且R,R’,R”和R”’可以是相同或不同的。
#11.#9所述的化学机械抛光含钨半导体基材的方法,其中,所述化学添加剂是选自上述#4所列出的哌嗪衍生物。
#12.#9所述的化学机械抛光含钨半导体基材的方法,其中,所述化学添加剂是选自单取代1-(2-氨乙基)哌嗪;双取代1,4-双(3-氨基丙基)哌嗪,以及其组合的哌嗪衍生物。
#13.#9所述的化学机械抛光含钨半导体基材的方法,其中,所述化学添加剂是选自氰酸钾,氰酸钠,氰酸铵,氰酸四烷基铵,以及其组合的氰酸盐。
#14.#9所述的化学机械抛光含钨半导体基材的方法,其中,所述化学机械抛光(CMP)组合物还包含如下的一种或多种
腐蚀抑制剂;
pH缓冲剂;
表面活性剂;以及
当抛光组合物的pH为5.0-8.0时的杀生物剂。
#15.选择性化学机械抛光的系统,包含:
a)具有包含钨和至少一种其它材料的表面的半导体基材;
b)抛光垫;
c)化学机械抛光(CMP)组合物,包含
1)0.1wt%至25wt%的纳米尺寸磨料,选自二氧化硅,氧化铝,氧化铈,二氧化钛,氧化锆,以及其组合;
2)0.1wt%至0.5wt%的铁化合物涂布颗粒的固体催化剂,选自铁化合物涂布的胶体二氧化硅,胶体或纳米尺寸的无机金属氧化物颗粒,以及其组合;
3)0.0001wt%至0.5wt%的化学添加剂,选自哌嗪衍生物,氰酸盐,以及其组合;
4)0.5wt%至10wt%的氧化剂;以及
5)其余部分是液体载体;
其中,CMP组合物的pH为约2.0至约8;
其中所述包含钨的表面的至少一部分与所述抛光垫和所述化学机械抛光组合物二者接触。
#16.#15所述的选择性化学机械抛光的系统,其中,所述化学添加剂是具有下列通用分子结构的哌嗪衍生物:
其中,R1和R2独立地选自烷基,烷氧基,具有一个或多个羟基的有机基团,取代的有机磺酸,取代的有机磺酸盐,取代的有机羧酸,取代的有机羧酸盐,有机羧酸酯,有机胺,以及其组合。
#17.#16所述的选择性化学机械抛光的系统,其中,所述哌嗪衍生物是取代的有机单氨基哌嗪衍生物(a)或取代的有机双氨基哌嗪衍生物(b),具有下列分子结构:
其中
键合到哌嗪6元环的1或4位的氮原子上的有机胺官能团可以是相同或不同的;
n为1-6,表示桥连来自哌嗪环的氮原子和来自有机胺官能团的氮原子的有机烷基的不同长度;以及
有机胺官能团选自伯胺基H2N-R-,仲有机胺基HRN-R’-,以及叔有机胺基RR’N-R”-;
其中,R,R’,R”和R”’各自独立地选自质子,烷基,烷氧基,具有一个或多个羟基的有机基团,取代的有机磺酸,取代的有机磺酸盐,取代的有机羧酸,取代的有机羧酸盐,有机羧酸酯,有机胺,以及其组合;并且R,R’,R”和R”’可以是相同或不同的。
#18.#15所述的选择性化学机械抛光的系统,其中,所述化学添加剂是选自上述#4所列出的哌嗪衍生物。
#19.#15所述的选择性化学机械抛光的系统,其中,所述化学添加剂是选自单取代1-(2-氨乙基)哌嗪;双取代1,4-双(3-氨基丙基)哌嗪,以及其组合的哌嗪衍生物。
#20.#15所述的选择性化学机械抛光的系统,其中,所述化学添加剂是选自氰酸钾,氰酸钠,氰酸铵,氰酸四烷基铵,以及其组合的氰酸盐。
#21.#15所述的选择性化学机械抛光的系统,其中所述化学机械抛光(CMP)组合物还包含如下的一种或多种
腐蚀抑制剂;
pH缓冲剂;
表面活性剂;以及
当抛光组合物的pH为5.0-8.0时的杀生物剂。
针对本发明任意一个方面描述的特征可以用于本发明的任意其它方面。
发明详述
本文中的缩写具有以下含义:
Boc:叔丁氧羰基
cbz:苄氧羰基
Fmoc:芴甲氧羰基
PIPES:哌嗪-1,4-二乙磺酸
POPSO:哌嗪-1,4-二[2-羟基丙磺酸]
HEPES:4-(2-羟乙基)哌嗪-1-乙磺酸
本文所公开的钨浆料组合物适当地主要包含纳米尺寸磨料,胶体二氧化硅颗粒表面上的固体催化剂,以及所选的适当化学添加剂,所选的适当氧化剂,以及其余部分基本上是液体载体。
化学机械抛光(CMP)组合物任选地还包含如下的一种或多种:
腐蚀抑制剂;
pH缓冲剂;
表面活性剂;以及
当抛光组合物的pH为5.0-8.0时的杀生物剂。
用于本文所公开的钨CMP抛光组合物的纳米尺寸磨料颗粒包括,但不限于如下:具有各种尺寸和各种形状的(磨料的各种形状包括球形,蚕茧形,聚集体形和其它形状)、具有窄或宽粒径分布的胶体二氧化硅,在胶体二氧化硅晶格内掺杂其它金属氧化物的胶体二氧化硅颗粒,例如氧化铝掺杂的二氧化硅颗粒,胶体氧化铝,其包括α-,β-以及γ-型的氧化铝,胶体和光活性的二氧化钛,氧化铈,胶体氧化铈,纳米尺寸金刚石颗粒,纳米尺寸氮化硅颗粒,单峰、双峰、多峰的胶体磨料颗粒,氧化锆,基于有机聚合物的软磨料,表面涂布或修饰的磨料,以及其混合物。
用于本文所公开的钨CMP抛光组合物的磨料颗粒的平均粒径优选在5nm至500纳米的范围,更优选在15nm至250纳米的范围,以及最优选在25nm至150纳米的范围。平均粒径可以通过例如动态光散射技术进行测定。
本发明的钨CMP抛光组合物包含0.1wt%至25wt%的磨料;优选,从0.5wt%至5wt%。
通常,固体催化剂是铁化合物涂布的颗粒。氧化铁是优选的铁化合物。适合用于制备固体催化剂的颗粒包括胶体二氧化硅和其它类型的胶体或纳米尺寸的无机金属氧化物颗粒。固体催化剂的实例是在胶体二氧化硅上涂布的氧化铁。用作固体催化剂的合适氧化铁涂布胶体二氧化硅颗粒的实例在美国专利US7014669,US7029508以及US7427305中公开。
本发明的CMP浆料包含范围从0.01wt%至10wt%的固体催化剂;优选地,范围从0.1wt%至0.5wt%。存在两种类型的化学添加剂。
第一种类型的所选化学添加剂为抛光组合物提供了在钨膜上的低静态刻蚀速率。降低静态刻蚀速率在钨金属膜表面上提供了更好的腐蚀保护,并且在抛光钨或含钨基材的同时,降低了碟化、侵蚀和插塞式凹陷。通过降低静态刻蚀速率,化学添加剂被认为是用于钨金属表面腐蚀保护的腐蚀抑制剂。
用于钨抛光组合物的第二种类型的化学添加剂不仅表现为腐蚀抑制剂以降低在钨金属膜表面上的静态刻蚀速率,从而提供更好的W金属表面腐蚀保护,而且提高钨膜的去除速率。本文所公开的钨抛光组合物中的第二种类型的化学添加剂是双功能化学添加剂。
另外,在提高钨膜去除速率的同时,抛光介电膜上的去除速率优选不受影响。因而,可以提高钨/介电(W/D)膜的抛光选择性,从而为钨CMP抛光浆料提供更高的抛光W/D膜选择性。包含第二种类型的化学添加剂的钨化学机械抛光组合物可以在钨膜表面上提供更好的腐蚀保护,以及更高的抛光W/D膜选择性,从而满足半导体工业中的各种需求。
第一和第二化学添加剂二者均可以实现可调节的去除速率以及可调节的抛光W/D膜选择性。
用于所公开的钨CMP浆料的作为腐蚀抑制剂的所选且合适的第一类型的化学添加剂包括,但不限于如下:哌嗪及其衍生物。
一些优选的哌嗪衍生物的通用分子结构为:
其中,R1和R2独立地选自氢,任选取代的烷基,任选取代的芳基,任选取代的芳烷基,任选取代的烷氧基,任选取代的具有一个或多个羟基的有机基团,任选取代的有机磺酸(-RSO3H),任选取代的有机磺酸盐,任选取代的酮类,任选取代的有机羧酸(-RCO2H),任选取代的有机羧酸盐(-RCOOM),任选取代的有机羧酸酯(-RCOOR’),任选取代的有机胺(例如,-RNH2),任选取代的有机酰胺,以及其组合。基于有机胺的哌嗪衍生物被认为是可在本文所公开的钨化学机械抛光组合物中用作腐蚀抑制剂的重要化学添加剂。
R和R’可以是例如烃侧链,以及M可以是例如钠,铵,或钾。可能的取代基包括氟和氯。
在一些优选的实施方式中,R1是有机胺基团,其为烷基氨基,优选直链烷基氨基,更优选伯烷基氨基。实例是2-氨基乙基和3-氨基丙基。在这些实施方式中,R2合适地是氢或与R1相同的基团。
特别地,合适的哌嗪及其衍生物包括:(a)取代的有机单氨基哌嗪衍生物以及(b)取代的有机双氨基哌嗪衍生物,它们具有下列分子结构:
如(a)中所示,具有合适的有机胺官能团的单取代的有机胺化合物键合到哌嗪6元环的1或4位的氮原子上。
如(b)中所示,具有合适的有机胺官能团的双取代的有机胺化合物键合到哌嗪6元环的1和4位的氮原子上。
(a)和(b)中的有机胺官能团可以是伯胺基H2N-,仲有机胺基HRN-,或叔有机胺基RR’N-(也称为R”’2N-)。(a)和(b)中的R,R’,R”和R”’可以各自独立地选自质子(氢),烷基,烷氧基,具有一个或多个羟基的有机基团,取代的有机磺酸,取代的有机磺酸盐,取代的有机羧酸,取代的有机羧酸盐,有机羧酸酯,有机胺,以及其组合;并且R,R’,R”和R”’可以是相同或不同的。(a)中的R”优选不是有机胺基。
n的数目可以从1至6变化,它表示桥连来自哌嗪环的氮原子和来自有机胺或氨基基团的氮原子的有机烷基的不同长度。优选n=2或3。
另外,在哌嗪1位上的有机胺官能团可以与在哌嗪4位上的有机胺官能团相同,或者它可以与在哌嗪4位上的有机胺官能团不同。
在一些式(a)和(b)的优选实施方式中,R和R’是氢。在这种情形下,式(a)中的R”优选是氢并且式(b)中的每个R”’优选是氢。合适地,n=2或3,使得哌嗪环上的优选基团是2-氨基乙基和3-氨基丙基。可以是单取代(式(a))或双取代(式(b)),取代基可以相同或不同。
在哌嗪环的碳上(2,3,5,6位)的取代或其它改性(例如,氧代基)也被认为是可以的。
这样的第一类型化学添加剂的实例包括,但不限于1-(苯甲氧羰基)哌嗪;(R)-哌嗪2-羧酸;1-(2-羟乙基)哌嗪;哌嗪-2,6-二酮;1-(2-氨乙基)哌嗪;1,4-双(2-羟乙基)哌嗪;1,4-双(2-丙烯酰基)哌嗪;哌嗪-1-乙酸叔丁酯;1-(3-甲基苯甲基)哌嗪;4-Boc-哌嗪-2羧酸;1-(二苯甲基)哌嗪;1,4-二-Boc-哌嗪-2羧酸;2-(哌嗪-1-羰基)-苯甲酸;4-(哌嗪-1-羰基)-哌啶-1-羧酸叔丁酯;哌嗪-1-羧酸;(2-氯-苯基)酰胺哌嗪-1-羧酸二甲酰胺;哌嗪-1-羧酸二乙酰胺;哌嗪-1-羧酸二苯基酰胺;哌嗪-1-磺酰胺;哌嗪-2-羧酰胺;1,2-二甲基-哌嗪;1-(2-丁基)哌嗪;2-异丁基-哌嗪;2-叔丁基哌嗪;r-2-异丁基-哌嗪;s-2-异丁基-哌嗪;2-异丙基-哌嗪;1-(2-嘧啶基)哌嗪;1-(4-三氟甲基苯基)哌嗪;1-(环丙基甲基)哌嗪;1-(2-吡嗪基)-哌嗪;1-(2-三氟甲基苯基)哌嗪;1-(6-哒嗪基)哌嗪;2-(4-三氟甲基苯基)哌嗪;2-苯基-哌嗪-1-羧酸苯甲酯;1-(1-萘甲基)哌嗪;1-(1-戊基)哌嗪;1-(2-戊基)哌嗪;1-(3-戊基)哌嗪;1-(丙酰基)哌嗪;2-苯基-哌嗪-1-羧酸叔丁酯;1-Boc-哌嗪;1-(4-氯苯基)哌嗪;1-(2-呋喃甲酰基)哌嗪;1-(2-氟苯基)哌嗪;1-(2-羟基苯基)哌嗪;1-(2-苯乙基)哌嗪;1-(4-氟苯基)哌嗪;1-(2-甲基苯甲基)哌嗪;1-(4-羟基苯基)哌嗪;1-(4-甲基苯甲基)哌嗪;1-(3-羟基苯基)哌嗪;1-(1-苯乙基)哌嗪;1-(2,4-二甲基苯基)哌嗪;1-(2,5-二甲基苯基)哌嗪;1-(2,5-二甲基苯基)哌嗪;1-(2,6-二甲苯基)哌嗪;1-(2-乙基苯基)哌嗪;1-(2-乙基苯基)哌嗪;1-(3,4-二甲基苯基)哌嗪;1-(3,5-二甲基苯基)哌嗪;1-(3-氟苯基)哌嗪;1-(3-呋喃甲酰基)哌嗪;1-(N-庚基)哌嗪;1-新戊酰基-哌嗪;2,3-二甲基-哌嗪-1-羧酸叔丁酯;2-(2-氯苯基)哌嗪;2-(4-氯苯基)哌嗪;n-4-cbz-哌嗪-2-羧酸甲酯;1-(2-吡啶基)哌嗪;1-(2-甲氧基苯基)哌嗪;1-(4-甲氧基苯基)哌嗪;1-(4-氯二苯甲基)哌嗪;1-(4-吡啶基)哌嗪;1-(4-氨基苯基)哌嗪;1-(4-甲氧基苯甲基)哌嗪;1-(2-氰基苯基)哌嗪;1-(1-金刚烷基)哌嗪;1-(4-硝基苯基)哌嗪;1-(2-甲氧基乙基)哌嗪;2-(三氟甲基)哌嗪;1-(3,4-二氯苯基)哌嗪;1-Boc-哌嗪-2-羧酸;1-(2,5-二氟苯甲基)哌嗪;1-(2-乙氧基乙基)哌嗪;1-(3,4-二氯苯甲基)哌嗪;1-(3-甲氧基苯基)哌嗪;1-(环己基甲基)哌嗪;1-(3-甲基苯基)哌嗪;1-(4-甲基苯基)哌嗪;1-(3-氟苯甲基)哌嗪;1-(4-氟苯甲基)哌嗪;2-(3-甲氧基苯基)哌嗪;1-(3-氯苯甲基)哌嗪;1-(环丙基羰基)哌嗪;(R)-1-Boc-哌嗪-2-羧酸;(R)-2-苯甲基-哌嗪;(R)-3-羟甲基-哌嗪-1-羧酸叔丁酯;(R)-4-N-Boc-哌嗪-2-羧酸;(S)-2-苯甲基-哌嗪;(S)-2-苯甲基-哌嗪-1-羧酸叔丁酯;(S)-3-羟甲基-哌嗪-1-羧酸叔丁酯;(S)-4-N-Boc-哌嗪-2-羧酸;1-(1-哌啶磺酰基)哌嗪;1-(2,2,2-三氟乙基)哌嗪;1-(2,3-二氟苯基)哌嗪;1-(2,4,6-三甲基苯甲基)哌嗪;1-(2,4-二氯苯甲基)哌嗪;1-(2,4-二氟苯基)哌嗪;1-(2,6-二氯苯甲基)哌嗪;1-(2-氯苯甲基)哌嗪;1-(2-环己基乙基)哌嗪;1-(2-二异丙基氨基乙基)哌嗪;1-(2-二丙基氨基乙基)哌嗪;1-(2-乙氧基苯基)哌嗪;1-(2-乙基丁酰基)哌嗪;1-(2-氟苯甲基)哌嗪;1-(2-异丙氧基乙基)哌嗪;1-(2-甲巯基苯基)哌嗪;1-(2-甲基丙酰基)哌嗪;1-(2-吗啉基乙基)哌嗪;1-(2-苯氧基乙基)哌嗪;1-(哌啶基乙基)哌嗪;1-(2-吡咯烷基乙基)哌嗪;1-(3,3-二甲基丁酰基)哌嗪;1-(3,4-二氯苯甲酰基)哌嗪;1-(3-(3,5-二氯苯基)哌嗪;4-二氟苯甲酰基)哌嗪;1-(3,4-二甲基苯甲基)哌嗪;1-(3,5-二甲氧基苯甲酰基)哌嗪;1-(3,5-二甲基苯甲酰基)哌嗪;1-(3-氨基丙基)哌嗪;1-(3-氰基丙基)哌嗪;1-(3-二乙氨基丙基)哌嗪;1-(3-二丙氨基丙基)哌嗪;1-(3-甲氧基丙基)哌嗪;1-(3-吗啉基丙基)哌嗪;1-(3-苯基丙基)哌嗪;1-(3-哌啶基丙基)哌嗪;1-(3-吡咯烷基丙基)哌嗪;1-(4-氯苯甲酰基)哌嗪;1-(4-氯苯甲基)哌嗪;1-(4-乙氧基苯基)哌嗪;1-(4-甲氧基苯甲酰基)哌嗪;1-(4-甲氧基丁基)哌嗪;1-(4-苯基丁基)哌嗪;1-(4-吡啶基甲基)哌嗪;1-(4-叔丁基苯甲基)哌嗪;1-(环己基羰基)哌嗪;1-(乙烷磺酰基)哌嗪;1-(苯基乙酰基)哌嗪;1-cbz-哌嗪-2-羧酸;1-己酰基-哌嗪;1-甲基磺酰基-哌嗪;2,3-二苯基-哌嗪;2-(2-呋喃基)哌嗪;2-(2-甲氧基苯基)哌嗪;2-(2-噻吩基)哌嗪;2-(3-氧代-哌嗪-1-羰基)-苯甲酸;2-(4-氯苯基)哌嗪-1-羧酸叔丁酯;2-(4-甲氧基苯基)哌嗪;2-(4-甲基苯基)哌嗪;2-苯甲基-哌嗪;3-(4-氯苯基)哌嗪-1-羧酸叔丁酯;3-氧代-哌嗪2-羧酸;3-苯基-哌嗪-1-羧酸乙酯;4-(4-Boc-哌嗪-1-羰基)苯基硼酸频哪醇酯;[5-(4-甲基-哌嗪-1-磺酰基)-吡啶-2-基]-肼;哌嗪-1-羧酸甲酯;1-乙基-2-甲基-哌嗪;1,4-双(3-氨基丙基)哌嗪;1-[2-(2-羟基乙氧基)乙基]哌嗪;1-(2-甲基-烯丙基)-哌嗪;2-(3-三氟甲基-苯基)哌嗪;4-N-Boc-2-甲基-哌嗪;-(四氢-2-呋喃甲酰基)-哌嗪;1-(四氢-2-呋喃甲基)哌嗪;(R)-1-Boc-2-乙基-哌嗪;(R)-1-Boc-3-乙基-哌嗪;(S)-1-Boc-2-乙基-哌嗪;(S)-1-Boc-3-乙基-哌嗪;1-[1-(2-甲氧基苯基)乙基]哌嗪;1-[1-(3-甲氧基苯基)乙基]哌嗪;1-[1-(4-甲氧基苯基)-乙基]哌嗪;1-[2-(2-甲基苯氧基)乙基]哌嗪;1-(4-乙氧基-苯甲基)-哌嗪;1-Boc-2,6-二甲基-哌嗪;1-Boc-3,3-二甲基-哌嗪;1-Boc-3,5-二甲基-哌嗪;1-Boc-5-氧代-哌嗪-2-羧酸;1-N-(叔丁氧基羰基)-2-乙基-哌嗪;2-(2-氟-苯基)-哌嗪;2-(3-氟-苯基)-哌嗪;2-甲基-1-(3-甲基苯基)-哌嗪;4-(5-氨基吡啶-2-基)哌嗪-1-羧酸叔丁酯;1-[2-(二甲氨基)乙基]哌嗪;1-(1-甲基-4-哌啶基)哌嗪;1-乙酰基-4-(4-羟基苯基)哌嗪;1-[4-(三氟甲基)苯甲基]哌嗪;1-Boc-4-(2-甲酰基苯基)哌嗪;1-氨基-4-(2-羟基乙基)哌嗪;1-Boc-(4-苯甲基)哌嗪;1-Boc-4-[3-(乙氧基羰基)苯基]哌嗪;1-双(4-氟苯基)甲基哌嗪;1-Boc-4-(3-羟丙基)哌嗪;1-Boc-4-(4-甲酰基苯基)哌嗪;1-Boc-4-(4-甲氧基羰基苯基)哌嗪;1-(1,3-二氧戊环-2-基甲基)哌嗪;1-(3-氨基丙基)-4-(2-甲氧基苯基)哌嗪;1-[3-(二甲氨基)丙基]哌嗪;1-(1,2,3,4-四氢萘-2-基)哌嗪;1-(4-氨基丁基)-4-(2-甲氧基苯基)哌嗪;1-Boc-4-(2-甲氧基羰基苯基)哌嗪;1-Boc-4-(5-硝基-2-吡啶基)哌嗪;(R)-1-Boc-2-苯甲基-哌嗪;(R)-1-N-Boc-2-异丙基-哌嗪;(R)-1-N-Boc-4-N-Fmoc-2-哌嗪羧酸;(R)-1-N-cbz-2-甲基-哌嗪;(R)-4-N-三苯甲基-2-甲基-哌嗪;(R)-N4-苯甲基-2-(苯甲基氧甲基)哌嗪;(S)-1-Boc-2-羟甲基-哌嗪;(S)-1-Boc-2-异丁基-哌嗪;(S)-1-Boc-3-苯甲基-哌嗪;(S)-1-Boc-3-异丙基-哌嗪;(S)-1-N-Boc-4-N-Fmoc-哌嗪-2-羧酸;(S)-4-N-三苯甲基-2-甲基-哌嗪;(S)-n4-苯甲基-2-(甲基硫乙基)哌嗪;1-[(2,6-二氯苯基)磺酰基]哌嗪;1-[(2-甲基-1,3-噻唑-5-基)甲基]哌嗪;1-[(4,5-二甲基-1,3-噁唑2-基)甲基]哌嗪;1-[(4环己基苯基)磺酰基]哌嗪;1-[(4-异丁基苯基)磺酰基]哌嗪;1-[(4-甲基-1,2,5-噁二唑-3-基)甲基]哌嗪;1-[(4-仲丁基苯基)磺酰基]哌嗪;1-[(4-叔丁基-2,6-二甲基苯基)磺酰基]哌嗪;1-[1-(吡啶-2-基)乙基)哌嗪;1-[1-(吡啶-3-基)乙基]哌嗪;1-[1-(噻吩-2-基)乙基]哌嗪;1-[2-(1-丙基)-氧乙基]-哌嗪;1-[2-(1H-吡咯-1-基)乙基]哌嗪;1-[2-(2-甲氧基-苯氧基)-乙基]-哌嗪;1-[2-(二烯丙基氨基)-乙基]-哌嗪;1-[2-(三氟甲基)吡啶-4-基]哌嗪;1-[2-(三氟甲基)喹啉-4-基]哌嗪;1-[2-氟-4-(甲基磺酰基)苯基]哌嗪;1-[2-氟-4-(甲基磺酰基)苯基]-4-(2-羟乙基)哌嗪;1-[3-(1-哌啶羰基)-2-吡啶基]哌嗪;1-[3-(二氟甲氧基)苯甲酰基]哌嗪;1-[3-(三氟甲基)吡啶-2-基]哌嗪;1-[4-(甲基磺酰基)苯基]哌嗪;1-[4-(三氟甲基)嘧啶-2-基]哌嗪;1-(1H-咪唑-2-基甲基)哌嗪;1-(2,6-二甲基吡啶-4-基)哌嗪;1-(2-二苯甲氧-乙基)-哌嗪;1-(2-羟乙基)-4-异丙基-哌嗪;1-(2-咪唑-1-基-乙基)-哌嗪;1-(2-异氰基-乙基)-4-甲基-哌嗪;1-(2-甲基-噻唑-4-基-甲基)-哌嗪;1-(2-N-Boc-氨基乙基)哌嗪;1-(2-吡啶-2-基-乙基)-哌嗪;1-(2-吡啶-4-基-乙基)-哌嗪;1-(2-噻吩-2-基-乙基)-哌嗪;1-(3,5-二甲基-异噁唑-4-基甲基)-哌嗪;1-(3-甲氧基-苯甲基)-哌嗪;1-(3-甲基-苯甲酰基)-哌嗪;1-(3-甲基-吡啶-2-基甲基)哌嗪;1-(3-甲基吡啶-2-基)哌嗪;1-(3-甲基吡啶-4-基)哌嗪;1-(4,6-二甲基嘧啶-2-基)哌嗪;1-(4-氰基-苯甲基)哌嗪;1-(4-乙氧基-苯磺酰基)-哌嗪;1-(4-乙氧基-吡啶-2-基)-哌嗪;1-(4-氟苯甲基)-4-(2-羟乙基)哌嗪;1-(4-羟基-苯基)-哌嗪-4-羧酸叔丁酯;N-Boc-哌啶;2-甲基哌嗪;2,6-二甲基哌嗪;反式-2,5-二甲基哌嗪;1,4-二甲基哌嗪;(R)-1-Boc-3-甲基哌嗪;1-Boc-3-氧代哌嗪;1,4-双-(2-甲氧基-5-甲基-苯磺酰基)-2-甲基-哌嗪;1-[(1-甲基-1H-吡唑-3-基)羰基]哌嗪;1-[(1-甲基-1H-吡唑-4-基)甲基]哌嗪;1-(2-(N,N-双-(2-羟丙基)-氨基)-乙基)-4-(2-羟丙基)-哌嗪;1-(2-甲氧基苯基)-4-((4-(2-甲氧基苯基)-1-哌嗪基)(氧代)乙酰基)哌嗪;1-(3-(2,3-二氢-1,4-苯并二噁英-6-基)丙烯酰基)-4-(4-氟苯基)哌嗪;1-(4-氯苯基)-4-[(7-{[4-(4-氯苯基)-1-哌嗪基]磺酰基}-9H-芴-2-基)磺酰基]哌嗪;1-(4-氟苯基)-4-((4-(4-氟苯基)-1-哌嗪基)(氧代)乙酰基)哌嗪;1-(4-硝基苯基)-4-(3-{[4-(4-硝基苯基)-1-哌嗪基]羰基}苯甲酰基)哌嗪;1-(4-硝基苯基)-4-(4-{[4-(4-硝基苯基)-1-哌嗪基]羰基}苯甲酰基)哌嗪;1-乙酰基-4-(1-乙基-1H-咪唑-2-基)哌嗪;1-二苯甲基-4-{2-[5-(苯甲基硫基)-4-(2-甲基-2-丙烯基)-4H-1,2,4-三唑-3-基]乙基}哌嗪;1-苯甲基-4-[2-[(2’,4’-二氟[1,1’-联苯基]-4-基)氧]乙基]哌嗪;1-苯甲基-4-(3-((2’,4’-二氟(1,1’-联苯基)-4-基)氧]丙基]哌嗪;1-异丙基-4-[(1-甲基-1H-吡咯2-基)甲基]哌嗪;1-甲基-4-({7-[(4-甲基-1-哌嗪基)磺酰基]-9H-芴-2-基}磺酰基)哌嗪;1-苯基-4-[苯基(4-苯基-1-哌嗪基)甲基]哌嗪;1-甲基-4-(甲基磺酰基)哌嗪;4-(2-羟基-乙基)-哌嗪-1-羧酸(4-异丙基-苯基)-酰胺;6-羟甲基-1,3-二甲基-哌嗪-2,5-二酮;2,2’-(哌嗪-1,4-二基)二乙烷磺酸双(2-甲氧基苯基)酯;1-(金刚烷-1-亚磺酰基)-4-甲基-哌嗪;1-(苯基磺酰基)-4-(2-吡啶基)哌嗪;1-苯甲基-4-(2-甲氧基丙酰基)哌嗪;1-环己基-4-(甲基磺酰基)哌嗪;1-乙基-4-(3-呋喃基甲基)哌嗪;1-(3-苯氧基-4-吡啶基)哌嗪;1-(2-吡啶基)-4-(3-(2,3,4-三甲氧基苯基)丙烯酰基)哌嗪;1-(3-(1,3-苯并二氧杂环戊烯-5-基)丙烯酰基)-4-(2-吡啶基)哌嗪;1-(3-(1,3-苯并二氧杂环戊烯-5-基)丙烯酰基)-4-(4-甲氧基苯基)哌嗪;1,4-双-(2-吡啶基亚甲基氨基)-哌嗪;1,4-双-(3,4,5-三甲氧基苯亚甲基氨基-哌嗪;1,4-双-(乙酰乙酰基)-哌嗪;1,4-二(2-呋喃甲酰基)哌嗪;1,4-双[2-(4-吡啶基)乙基]哌嗪;1,4-双[2-(2-吡啶基)乙基]哌嗪;1,4-双(2-羧基苯甲酰基)哌嗪;1,4-双(3-吡啶基甲基)哌嗪;1-(乙氧基羧基甲基)哌嗪;2,3,5,6-四羟基-哌嗪-1,4-二甲醛;4-苯甲基-哌嗪-1-羧酸环己基酰胺;2,2’-(哌嗪-1,4-二基)双(2-乙醛酸)二乙酯;2,2’-(哌嗪-1,4-二基)二乙酸二乙酯;3,3’-(哌嗪-1,4-二基)二丙酸二甲酯;(2E,2’E)-3,3’-(哌嗪-1,4-二基)双(1-(2-羟基苯基)丙-2-烯-1-酮);2,2’-(哌嗪-1,4-二基)双(N-(1,5-二甲基-3-氧代-2-苯基-2,3-二氢-1H-吡唑-4-基)乙酰胺);2,2’-(哌嗪-1,4-二基)二丙酰胺;2,2’-(哌嗪-1,4-二基)二丙腈;3,3’-(哌嗪-1,4-二基)双(1-(9H-咔唑-9基)丙烷-2-醇)富马酸酯;3,3’-(哌嗪-1,4-二基)双(1-苯基丙烷-1-酮);3,3’-(哌嗪-1,4-二基)二丙烷-1-醇;4,4’-(哌嗪-1,4-二基)双(3-乙氧基环丁-3-烯-1,2-二酮);哌嗪-1,4-二硫代羧酸双-苯基酰胺;1,4-二-叔丁基-哌嗪-2,5-二酮;1,4-双十二烷基-哌嗪;1,4-双十六烷基-哌嗪;1-(1-哌啶基羰基)哌嗪;1-(1-金刚烷基甲基)哌嗪;1-(3,4-二甲氧基苯甲基)哌嗪;1-(3-吡啶基羰基)哌嗪;4-哌嗪基苯甲腈;(S)-3-甲基-2-酮哌嗪;(R)-3-甲基-2-酮哌嗪;4-(Boc-哌嗪1-基)-3-硝基苯甲酸;1,1’-(哌嗪-1,4-二基)二丙烷-2-醇;2,2’-(哌嗪-1,4-二基)双(1-苯基乙醇);2,2’-(哌嗪-1,4-二基)双(2-甲基丙腈);哌嗪-N,N’-双(2-乙烷磺酸);1-甲酰基哌嗪;PIPES钠盐;PIPES二钠盐;PIPES二钾盐;哌嗪-N,N’-双(2-羟基丙烷磺酸);1-哌嗪羧酸乙酯;POPSO二钠盐;4-羟基-3-甲氧基苯基乙二醇半哌嗪盐;柠檬酸倍半哌嗪盐水合物;4-(2-羟乙基)哌嗪-1-乙烷磺酸;4-(2-羟乙基)-1-哌嗪丙烷磺酸;HEPES钠盐;N-(2-羟乙基)哌嗪-N’-(4-丁烷磺酸);3-甲基-2-酮哌嗪;HEPES钾盐;3-哌嗪基丙腈;哌嗪乙酸乙酯;雌酮硫酸酯哌嗪;1-哌嗪丙醇;4-(2-氨基-1-苯基乙基)哌嗪羧酸叔丁酯;4-[2-(氨基甲基)苯基]哌嗪-1-羧酸叔丁酯;4-[5-(羟甲基)吡啶-2-基]哌嗪-1-羧酸叔丁酯;4-(3-氨基苯甲基)哌嗪-1-羧酸叔丁酯;4-(4-[(甲基氨基)甲基]苯基)哌嗪-1-羧酸叔丁酯;4-(4-氰基吡啶-2-基)哌嗪-1-羧酸叔丁酯;4-(5-甲酰基吡啶-2-基)哌嗪-1-羧酸叔丁酯;4-(氧杂环丁烷-3-基)哌嗪-1-羧酸叔丁酯;4-(哌啶-3-基)哌嗪-1-羧酸叔丁酯;4-(吡咯烷-2-基羰基)哌嗪-1-羧酸叔丁酯;4-(1H-吡咯并[2,3-b]吡啶-4-基)哌嗪-1-羧酸叔丁酯;1-[2-(2,5-二甲基-1H-吡咯-1-基)乙基]哌嗪;1-((1,5-二甲基-1H-吡唑-4-基)甲基)哌嗪;1-(1-乙基-5-甲基-1H-吡唑-4-基甲基)-哌嗪;4-(2-氨基-1-[4-(三氟甲基)苯基]乙基)哌嗪羧酸叔丁酯;3-(4-氟-苯基)-哌嗪-1-羧酸叔丁酯;3-(4-羟基-苯基)-哌嗪-1-羧酸叔丁酯;3-呋喃-2-基-哌嗪1-羧酸叔丁酯;3-噻吩-2-基-哌嗪-1-羧酸苯甲酯;4-(2-氨基-苯基)-哌嗪-1-羧酸叔丁酯;4-(2-氨基乙基)-1-boc-哌嗪;4-(5-羧基-吡啶-2-基)-2-甲基-哌嗪-1-羧酸叔丁酯;4-Boc-1-(6-甲基-2-吡啶基)哌嗪;Fmoc-4-羧甲基-哌嗪;4-Boc-哌嗪-2-羧酸甲酯;N,N-二甲基-1-哌嗪磺酰胺;N-1-Boc-N-4-Fmoc-2-哌嗪羧酸;N-4-Boc-N-1-cbz-2-哌嗪羧酸;N-4-Boc-N-1-Fmoc-2-哌嗪乙酸;哌嗪-1-甲脒与硫酸化合物(1∶1);1-乙基-4-哌啶-4-基-哌嗪;1-呋喃-2-基甲基-哌嗪;1-甲基-4-(2-哌啶-4-基-乙基)-哌嗪;1-甲基-4-(6-氨基吡啶-3-基)哌嗪;1-甲基-4-(哌啶-4-基)-哌嗪;1-N-Boc-4-(氮杂环丁烷-3-基)哌嗪;1-吡啶-2-基甲基-哌嗪;1-吡啶-3-基甲基-哌嗪;1-噻唑-2-基-哌嗪;2-(2,5-二甲氧基-苯基)-哌嗪;2-羧甲基-3-氧代-哌嗪-1-羧酸叔丁酯;2-乙氧基羧基甲基-3-氧代-哌嗪-1-羧酸叔丁酯;1-(4-甲基-环己基)-哌嗪;1-(4-甲基-哌啶-1-磺酰基)-哌嗪;1-(4-三氟甲基-吡啶-2-基)-哌嗪;1-(5-甲基-2-吡啶基)哌嗪;1-(5-甲基-2-噻唑基)-哌嗪;1-(5-硝基吡啶-2-基)哌嗪;1-(6-丁氧基2-吡啶基)哌嗪;1-(6-甲基吡啶-2-基)哌嗪;1-(N-甲基哌啶-3-基-甲基)哌嗪;1-(噻吩-2-基乙酰基)哌嗪;1-Boc-4-(哌啶-4-基)-哌嗪;1-Boc-4-氰基甲基-哌嗪;1-环己-3-烯基甲基-哌嗪。
哌嗪衍生物优选选自(R)-哌嗪-2-羧酸;1-(2-羟乙基)哌嗪;哌嗪-2,6-二酮;1-(2-氨乙基)哌嗪;1,4-双(2-羟乙基)哌嗪;1,4-双(丙烯酰基)哌嗪;哌嗪-1-乙酸叔丁酯;1-(3-甲基苯甲基)哌嗪;4-(哌嗪-1-羰基)-哌啶-1-羧酸叔丁酯;哌嗪-1-羧酸二乙酰胺;哌嗪-1-磺酰胺;哌嗪-2-羧酰胺;1,2-二甲基-哌嗪;2-异丙基-哌嗪;1-(2-嘧啶基)哌嗪;1-(2-吡嗪基)-哌嗪;1-(6-哒嗪基)哌嗪;1-(3-羟基苯基)哌嗪;1-(2-吡啶基)哌嗪;1-(4-甲氧基苯基)哌嗪;1-(4-吡啶基)哌嗪;1-(4-氨基苯基)哌嗪;1-(4-甲氧基苯甲基)哌嗪;1-(2-氰基苯基)哌嗪;1-(2-甲氧基乙基)哌嗪;1-Boc-哌嗪-2羧酸;1-(2-乙氧基乙基)哌嗪;(R)-1-Boc-哌嗪-2-羧酸;(R)-3-羟甲基-哌嗪-1-羧酸叔丁酯;(R)-4-N-Boc-哌嗪-2-羧酸;(S)-3-羟甲基-哌嗪-1-羧酸叔丁酯;(S)-4-N-Boc-哌嗪-2-羧酸;1-(1-哌啶磺酰基)哌嗪;1-(2-二异丙基氨基乙基)哌嗪;1-(2-二丙基氨基乙基)哌嗪;1-(2-乙氧基苯基)哌嗪;1-(2-乙基丁酰基)哌嗪;1-(2-异丙氧基乙基)哌嗪;1-(2-甲巯基苯基)哌嗪;1-(2-吗啉基乙基)哌嗪;1-(2-哌啶基乙基)哌嗪;1-(2-吡咯烷基乙基)哌嗪;1-(3-氨基丙基)哌嗪;1-(3-氰基丙基)哌嗪;1-(3-二乙氨基丙基)哌嗪;1-(3-二丙氨基丙基)哌嗪;1-(3-甲氧基丙基)哌嗪;1-(3-吗啉基丙基)哌嗪;1-(3-哌啶基丙基)哌嗪;1-(3-吡咯烷基丙基)哌嗪;1-(4-甲氧基丁基)哌嗪;1-(4-吡啶基甲基)哌嗪;1-(乙烷磺酰基)哌嗪;3-氧代-哌嗪-2-羧酸;4-甲基哌嗪-1-羧酸酯;1,4-双(3-氨基丙基)哌嗪;1-[2-(2-羟基乙氧基)乙基]哌嗪;4-(5-氨基吡啶-2-基)哌嗪-1-羧酸叔丁酯;1-[2-(二甲氨基)乙基]哌嗪;1-(1-甲基-4-哌啶基)哌嗪;1-氨基-4-(2-羟基乙基)哌嗪;1-(3-氨基丙基)-4-(2-甲氧基苯基)哌嗪;1-[3-(二甲氨基)丙基]哌嗪;1-(4-氨基丁基)-4-(2-甲氧基苯基)哌嗪;1-[3-(1-哌啶羰基)-2-吡啶基]哌嗪;1-(1H-咪唑-2-基甲基)哌嗪;1-(2,6-二甲基吡啶-4-基)哌嗪;1-(2-羟乙基)-4-异丙基-哌嗪;1-(2-咪唑-1-基-乙基)-哌嗪;1-(2-异氰基-乙基)-4-甲基-哌嗪;1-(4-乙氧基-吡啶-2-基)-哌嗪;2-甲基哌嗪;2,6-二甲基哌嗪;反式-2,5-二甲基哌嗪;1,4-二甲基哌嗪;1,4-双(3-吡啶基甲基)哌嗪;1-(乙氧基羰基甲基)哌嗪;2,3,5,6-四羟基-哌嗪-1,4-二甲醛;3,3’-(哌嗪-1,4-二基)二丙酸二甲酯;2,2’-(哌嗪-1,4-二基)二丙酰胺;2,2’-(哌嗪-1,4-二基)二丙腈;(R)-3-甲基-2-酮哌嗪;2,2’-(哌嗪-1,4-二基)双(2-甲基丙腈);哌嗪-N,N’-双(2-乙烷磺酸);1-甲酰基哌嗪;PIPES钠盐;PIPES二钠盐;PIPES二钾盐;哌嗪-N,N’-双(2-羟基丙烷磺酸);1-哌嗪羧酸乙酯;POPSO二钠盐;4-羟基-3-甲氧基苯基乙二醇半哌嗪盐;4-(2-羟乙基)哌嗪-1-乙烷磺酸;4-(2-羟乙基)-1-哌嗪丙烷磺酸;HEPES钠盐;N-(2-羟乙基)哌嗪-N’-(4-丁烷磺酸);3-甲基-2-酮哌嗪;HEPES钾盐;3-哌嗪基丙腈;哌嗪乙酸乙酯,以及其组合。
在具体说明光学活性化合物的(R)或(S)对映异构体的情况下,认为相对的对映异构体以及所述对映异构体的外消旋或其它混合物也是可以的。
用于所公开的钨CMP抛光组合物的作为腐蚀抑制剂的这种第一类型的化学添加剂的两个实例是:单取代的1-(2-氨基乙基)哌嗪(对于(a))和双取代的1,4-双(3-氨基丙基)哌嗪(对于(b))。
本发明的CMP浆料优选包含范围从0.0001%至0.10%,优选范围从0.0005%至0.010%的第一种类型的化学添加剂。
具有作为腐蚀抑制剂在钨金属膜表面上提供腐蚀保护以及作为钨去除速率促进剂提高钨膜去除速率的双重功能的第二种类型的化学添加剂包括:各种氰酸盐(CNO)。这些氰酸盐包括氰酸钾,氰酸钠,氰酸铵,以及氰酸烷基铵,包括氰酸四烷基铵。
本发明的CMP浆料优选包含范围从0.0002%至0.5%,优选范围从0.001%至0.25%的第二种类型的化学添加剂。
用于所公开的钨CMP浆料的氧化剂包括,但不限于以下:高碘酸,过氧化氢,碘酸钾,高锰酸钾,过硫酸铵,钼酸铵,硝酸铁,硝酸,硝酸钾,以及其混合物。优选的氧化剂是过氧化氢。
本发明的CMP浆料包含从0.5wt%至10wt%的氧化剂;优选从1wt%至4wt%,以及最优选从2wt%至3wt%。
提供液体成分的主要部分的液体载体可以是水或水和与水混溶的其它液体的混合物。有利地,溶剂是水,例如DI(去离子)水。
用于所公开的钨CMP浆料的pH缓冲剂包括,但不限于:硝酸,盐酸,硫酸,磷酸,其它无机或有机酸,以及其混合物。优选的pH调节剂是硝酸。
本发明的CMP浆料合适地包含从0.01wt%至0.5wt%的硝酸;优选从0.05wt%至0.15wt%。
用于所公开的钨CMP浆料的腐蚀抑制剂包括,但不限于:聚氮丙啶,以及其它有机聚合或低聚的伯和仲胺。
本发明的CMP浆料任选地包含优选范围从0.0001wt%至0.25wt%、优选从0.0003wt%至0.01wt%的腐蚀抑制剂。
用于所公开的钨CMP浆料的表面活性剂包括,但不限于以下:
(a).非离子表面润湿剂
这些试剂通常是在同一分子中具有各种疏水和亲水基团的含氧或含氮化合物。分子量的范围从几百至超过1百万。这些材料的粘度同样具有非常宽的分布。
(b).阴离子表面润湿剂
这些化合物在分子骨架的主要部分上具有负的净电荷,这些化合物包括,但不限于以下具有合适疏水尾的盐:烷基羧酸盐,烷基硫酸盐,烷基磷酸盐,烷基双羧酸盐,烷基双硫酸盐,烷基双磷酸盐,烷氧基羧酸盐,烷氧基硫酸盐,烷氧基磷酸盐,烷氧基双羧酸盐,烷氧基双硫酸盐,烷氧基双磷酸盐,取代的芳基羧酸盐,取代的芳基硫酸盐,取代的芳基磷酸盐,取代的芳基双羧酸盐,取代的芳基双硫酸盐,取代的芳基双磷酸盐,等等。这种类型的表面润湿剂的抗衡离子包括,但不限于:钾,铵以及其它正离子。这些阴离子表面润湿剂的分子量范围从数百至数十万。
(c).阳离子表面润湿剂
这些化合物在分子骨架的主要部分上具有正的净电荷,这些化合物包括,但不限于以下具有合适亲水尾的盐:羧酸盐,硫酸盐,磷酸盐,双羧酸盐,双硫酸盐,双磷酸盐,等等。这种类型的表面润湿剂的抗衡离子包括,但不限于:钾,铵以及其它正离子。这些阴离子表面润湿剂的分子量范围从数百至数十万。
(d).两性表面润湿剂
这些化合物在主分子链上具有正和负电荷,并且具有它们相应的抗衡离子。这类双极性表面润湿剂的实例包括,但不限于氨基羧酸、氨基磷酸、以及氨基磺酸的盐。
任选用于钨CMP浆料的表面活性剂优选范围从0.0001%至0.50%;优选范围从0.0005%至0.10%。
用于所公开的钨CMP浆料的杀生物剂包括,但不限于可商购的杀生物剂产品,例如Kathon,Kathon II以及其它。
任选用于钨CMP浆料的杀生物剂优选范围从0.0001%至0.1%;优选从0.0005%至0.010。
本发明进一步通过下列实施例说明。
实施例
本文所述的相关工艺需要使用前述用于化学机械平坦化由钨构成的基材的组合物。
在工艺中,基材(例如,具有W表面的晶片)面朝下放置在抛光垫上,所述抛光垫与CMP抛光机的可旋转抛光盘固定连接。通过这种方式,待抛光和平坦化的基材与抛光垫直接接触放置。晶片载体系统或抛光头用于使基材保持在位,并且在抛光盘和基材旋转的同时,在CMP工艺期间紧靠着基材的背侧施加向下的压力。在CMP工艺期间,抛光组合物(浆料)施加到(通常连续地)抛光垫上,以便影响材料的去除,从而平坦化基材。
本文所述的抛光组合物和相关工艺对于CMP多种多样的基材是有效的,包括,具有特别是可用于抛光钨基材的大多数基材。
通用试验步骤
在下面给出的实施例中,使用下面给出的步骤和试验条件进行CMP试验。
用于实施例的CMP工具是,由位于3050 Boweres Avenue,SantaClara,Califomia,95054的Applied Materials制造。IC-1010垫,由Dow Chemicals提供,用在抛光盘上用于空白晶片抛光研究。垫通过抛光二十五个假氧化物(通过等离子增强CVD由TEOS前驱体(PETEOS)的沉积得到)晶片进行磨合。
为了使工具设置和垫磨合达标,两个PETEOS监视器在基准条件下利用OX-K胶体二氧化硅(由Air Products Chemicals Inc.的平坦化平台提供)进行抛光。抛光试验使用空白的厚度为8K埃的W晶片以及TEOS晶片进行。这些空白晶片购自位于1150Campbell Ave,CA,95126的Silicon ValleyMicroeletronics。
参数
埃——长度单位
W:钨
BP:背压,单位psi
CMP:化学机械平坦化=化学机械抛光
CS:载体速率
DF:向下的力:在CMP期间施加的压力,单位psi
min:分钟
ml:毫升
mV:毫伏
psi:磅/平方英寸
PS:抛光工具的抛光盘旋转速率,单位rpm(转/分钟)
SF:抛光组合物流速,ml/min
wt%:(所列成分的)重量百分比
TEOS:原硅酸四乙酯
NU%(或WIWNU%):晶片内不均匀率%
NU%=(|抛光前的W膜厚度-抛光后的W膜厚度|/总W膜厚度的平均值)×100%
W RR3.0psi:在CMP工具的3.0psi(21kPa)的向下压力下测定的钨去除速率
TEOS RR3.0psi:在CMP工具的3.0psi(21kPa)的向下压力下测定的TEOS去除速率
W:TEOS选择性:在相同向下压力(3.0psi,21kPa)时的(W去除速率)/(TEOS去除速率)
静态刻蚀速率
静态刻蚀速率是提供与CMP浆料的化学活性水平相关的经验数据的量度。通常,较高的静态刻蚀速率表示更具攻击性的化学组合物,其导致相关金属膜表面刻蚀相对快,具有导致更多金属腐蚀缺陷的更大可能性。
将从钨空白晶片上切割的芯片暴露于标准钨浆料和所公开的CMP钨抛光制剂二者。
标准W浆料显示于表1中,包含:
0.4wt%的固体催化剂——在胶体二氧化硅上涂布的氧化铁;
0.5wt%的胶体二氧化硅;
3.0wt%的过氧化氢;以及
余量是DI水;
在使用点时的pH大约为3.4。
表1显示出在温度40℃下5分钟采集的静态刻蚀速率的归一化数据。
在温度40℃下,向标准W浆料中加入所选的化学添加剂作为腐蚀抑制剂,分别地在1(2-氨基乙基)哌嗪作为添加剂时静态刻蚀速率降低90%,在氰酸钾作为添加剂时降低84%,和在1,4-二氮杂双环[2.2.2]辛烷(对比例)作为添加剂时降低74%。
对于表1所显示的测试,0.00025%的1(2-氨基乙基)哌嗪,0.001%的氰酸钾以及0.010%的1,4-二氮杂双环[2.2.2]辛烷分别加入到标准W浆料中。
表1中的数据说明在抛光过程中由于摩擦所达到的温度(40℃)下的优异的腐蚀保护性。
表1.腐蚀抑制剂对钨金属的静态刻蚀速率的影响
化学机械抛光
使用第一种类型的化学添加剂作为腐蚀抑制剂和第二种类型的化学添加剂作为在钨金属膜表面提供腐蚀保护以及提高钨膜的去除速率的双重功能添加剂进行化学机械抛光。
对于第一类和第二类化学添加剂,测试结果分别列于表2和3中。
在表2中,10ppm(0.001wt%)的1-(2-氨基乙基)哌嗪定义为加入到标准W浆料制剂中的1X的1-(2-氨基乙基)哌嗪。
标准W浆料显示于表2中,包含:
0.4wt%的固体催化剂——在胶体二氧化硅上涂布的氧化铁;
0.5wt%的胶体二氧化硅;
3.0wt%的过氧化氢;以及
余量是DI水;
在使用点时的pH大约为3.4。
表2.第一种类型的化学添加剂对W的CMP浆料性能的影响
如表2中所显示的结果,向标准的W CMP浆料中,加入第一种类型的化学添加剂,具体来说是1-(2-氨基乙基)哌嗪,降低了NU%。
由于1-(2-氨基乙基)哌嗪表现为W CMP浆料制剂的强腐蚀抑制剂,因此随着1-(2-氨基乙基)哌嗪浓度增加,钨的去除速率降低。
表2还表明可调节的W:TEOS选择性随着1-(2-氨基乙基)哌嗪的浓度变化而变化。
在表3中,25ppm(0.0025wt%)的氰酸钾定义为用于样品浆料中的1X的氰酸钾。
表3中的1XKCNO浆料包含:
0.4wt%的固体催化剂——在胶体二氧化硅上涂布的氧化铁;
0.5wt%的胶体二氧化硅;
3.0wt%的过氧化氢;
25ppm的氰酸钾以及
余量是DI水;
在使用点时的pH大约为3.4。
表3中所示的参比W浆料包含:
0.4wt%的固体催化剂——在胶体二氧化硅上涂布的氧化铁;
0.5wt%的胶体二氧化硅;
3.0wt%的过氧化氢;
0.00037wt%的聚氮丙啶;以及
余量是DI水;
在使用点时的pH大约为3.4。
表3.第二种类型的化学添加剂对W的CMP浆料性能的影响
如表3中所显示的结果,向标准钨CMP浆料中加入第二种类型的化学添加剂,氰酸钾,观察到几个显著结果。
当1X,2X,或4X浓度的氰酸钾加入到标准钨化学机械抛光组合物中时,钨膜去除速率增加超过25%。
当1X,2X和4X的氰酸钾用作添加剂时,NU%分别从6.29%降低至3.07%,2.93%和2.87%。
当1X,2X和4X的氰酸钾用作添加剂时,抛光W/D膜的选择性分别从141增加至336,332和272。
使用氰酸钾提供了高选择性以及可调节的W:TEOS选择性,同时降低了NU%。
当与标准W浆料对比时,即使是2ppm浓度的氰酸钾(0.08X POU浓度),仍然观察到,在NU%为4.02%时,超过20%的W膜去除速率提升。
本发明的实施方式如上所述,包括实施例,是本发明可以作出的无数实施方式的示例。应当想到,可以使用本方法的许多其它构造,并且在方法中所用的材料可以选自除明确公开的那些之外的许多材料。
Claims (13)
1.钨化学机械抛光(CMP)组合物,包含:
a)0.1wt%至25wt%的纳米尺寸磨料,选自二氧化硅,氧化铝,氧化铈,二氧化钛,氧化锆,以及其组合;
b)0.1wt%至0.5wt%的铁化合物涂布颗粒的固体催化剂,选自铁化合物涂布的胶体二氧化硅,铁化合物涂布的胶体无机金属氧化物颗粒,铁化合物涂布的纳米尺寸无机金属氧化物颗粒,以及其组合;
c)0.0001wt%至0.5wt%的化学添加剂,选自哌嗪衍生物,氰酸盐,以及其组合;
d)0.5wt%至10wt%的氧化剂;以及
e)液体载体;
其中,所述CMP组合物的pH为约2.0至约8.0。
2.权利要求1所述的钨化学机械抛光(CMP)组合物,其中,所述哌嗪衍生物具有下列通用分子结构:
其中,R1和R2独立地选自氢,任选取代的烷基,任选取代的芳基,任选取代的芳烷基,任选取代的烷氧基,任选取代的具有一个或多个羟基的有机基团,任选取代的有机磺酸,任选取代的有机磺酸盐,任选取代的酮类,任选取代的有机羧酸,任选取代的有机羧酸盐,任选取代的有机羧酸酯,任选取代的有机胺以及任选取代的有机羧酸酰胺。
3.权利要求1所述的钨化学机械抛光(CMP)组合物,其中,所述哌嗪衍生物是具有下列分子结构的任选取代的有机单氨基哌嗪衍生物(a)或任选取代的有机双氨基哌嗪衍生物(b):
其中
n独立地选自1-6;以及
R,R’,R”和R”’各自独立地选自氢,任选取代的烷基,任选取代的芳基,任选取代的芳烷基,任选取代的烷氧基,任选取代的具有一个或多个羟基的有机基团,任选取代的有机磺酸,任选取代的有机磺酸盐,任选取代的酮类,任选取代的有机羧酸,任选取代的有机羧酸盐,任选取代的有机羧酸酯,任选取代的有机胺以及任选取代的有机羧酸酰胺。
4.权利要求1所述的钨化学机械抛光(CMP)组合物,其中,所述哌嗪衍生物选自(R)-哌嗪-2-羧酸;1-(2-羟乙基)哌嗪;哌嗪-2,6-二酮;1-(2-氨乙基)哌嗪;1,4-双(2-羟乙基)哌嗪;1,4-双(丙烯酰基)哌嗪;哌嗪-1-乙酸叔丁酯;1-(3-甲基苯甲基)哌嗪;4-Boc-哌嗪-2羧酸;1-(二苯甲基)哌嗪;1,4-二-Boc-哌嗪-2羧酸;2-(哌嗪-1-羰基)-苯甲酸;4-(哌嗪-1-羰基)-哌啶-1-羧酸叔丁酯;哌嗪-1-羧酸;(2-氯-苯基)酰胺哌嗪-1-羧酸二甲酰胺;哌嗪-1-羧酸-二乙酰胺;哌嗪-1-羧酸-二苯基酰胺;哌嗪-1-磺酰胺;哌嗪-2-羧酰胺;1,2-二甲基-哌嗪;1-(2-丁基)哌嗪;2-异丁基-哌嗪;2-叔丁基哌嗪;r-2-异丁基-哌嗪;s-2-异丁基-哌嗪;2-异丙基-哌嗪;1-(2-嘧啶基)哌嗪;1-(4-三氟甲基苯基)哌嗪;1-(环丙基甲基)哌嗪;1-(2-吡嗪基)-哌嗪;1-(2-三氟甲基苯基)哌嗪;1-(6-哒嗪基)哌嗪;2-(4-三氟甲基苯基)哌嗪;2-苯基-哌嗪-1-羧酸苯甲酯;1-(1-萘甲基)哌嗪;1-(1-戊基)哌嗪;1-(2-戊基)哌嗪;1-(3-戊基)哌嗪;1-(丙酰基)哌嗪;2-苯基-哌嗪-1-羧酸叔丁酯;1-Boc-哌嗪;1-(4-氯苯基)哌嗪;1-(2-呋喃甲酰基)哌嗪;1-(2-氟苯基)哌嗪;1-(2-羟基苯基)哌嗪;1-(2-苯乙基)哌嗪;1-(4-氟苯基)哌嗪;1-(2-甲基苯甲基)哌嗪;1-(4-羟基苯基)哌嗪;1-(4-甲基苯甲基)哌嗪;1-(3-羟基苯基)哌嗪;1-(1-苯乙基)哌嗪;1-(2,4-二甲基苯基)哌嗪;1-(2,5-二甲基苯基)哌嗪;1-(2,5-二甲基苯基)哌嗪;1-(2,6-二甲苯基)哌嗪;1-(2-乙基苯基)哌嗪;1-(2-乙基苯基)哌嗪;1-(3,4-二甲基苯基)哌嗪;1-(3,5-二甲基苯基)哌嗪;1-(3-氟苯基)哌嗪;1-(3-呋喃甲酰基)哌嗪;1-(N-庚基)哌嗪;1-新戊酰基-哌嗪;2,3-二甲基-哌嗪-1-羧酸叔丁酯;2-(2-氯苯基)哌嗪;2-(4-氯苯基)哌嗪;n-4-cbz-哌嗪-2-羧酸甲酯;1-(2-吡啶基)哌嗪;1-(2-甲氧基苯基)哌嗪;1-(4-甲氧基苯基)哌嗪;1-(4-氯二苯甲基)哌嗪;1-(4-吡啶基)哌嗪;1-(4-氨基苯基)哌嗪;1-(4-甲氧基苯甲基)哌嗪;1-(2-氰基苯基)哌嗪;1-(1-金刚烷基)哌嗪;1-(4-硝基苯基)哌嗪;1-(2-甲氧基乙基)哌嗪;2-(三氟甲基)哌嗪;1-(3,4-二氯苯基)哌嗪;1-Boc-哌嗪-2-羧酸;1-(2,5-二氟苯甲基)哌嗪;1-(2-乙氧基乙基)哌嗪;1-(3,4-二氯苯甲基)哌嗪;1-(3-甲氧基苯基)哌嗪;1-(环己基甲基)哌嗪;1-(3-甲基苯基)哌嗪;1-(4-甲基苯基)哌嗪;1-(3-氟苯甲基)哌嗪;1-(4-氟苯甲基)哌嗪;2-(3-甲氧基苯基)哌嗪;1-(3-氯苯甲基)哌嗪;1-(环丙基羰基)哌嗪;(R)-1-Boc-哌嗪-2-羧酸;(R)-2-苯甲基-哌嗪;(R)-3-羟甲基-哌嗪-1-羧酸叔丁酯;(R)-4-N-Boc-哌嗪-2-羧酸;(S)-2-苯甲基-哌嗪;(S)-2-苯甲基-哌嗪-1-羧酸叔丁酯;(S)-3-羟甲基-哌嗪-1-羧酸叔丁酯;(S)-4-N-Boc-哌嗪-2-羧酸;1-(1-哌啶磺酰基)哌嗪;1-(2,2,2-三氟乙基)哌嗪;1-(2,3-二氟苯基)哌嗪;1-(2,4,6-三甲基苯甲基)哌嗪;1-(2,4-二氯苯甲基)哌嗪;1-(2,4-二氟苯基)哌嗪;1-(2,6-二氯苯甲基)哌嗪;1-(2-氯苯甲基)哌嗪;1-(2-环己基乙基)哌嗪;1-(2-二异丙基氨基乙基)哌嗪;1-(2-二丙基氨基乙基)哌嗪;1-(2-乙氧基苯基)哌嗪;1-(2-乙基丁酰基)哌嗪;1-(2-氟苯甲基)哌嗪;1-(2-异丙氧基乙基)哌嗪;1-(2-甲巯基苯基)哌嗪;1-(2-甲基丙酰基)哌嗪;1-(2-吗啉基乙基)哌嗪;1-(2-苯氧基乙基)哌嗪;1-(2-哌啶基乙基)哌嗪;1-(2-吡咯烷基乙基)哌嗪;1-(3,3-二甲基丁酰基)哌嗪;1-(3,4-二氯苯甲酰基)哌嗪;1-(3-(3,5-二氯苯基)哌嗪;4-二氟苯甲酰基)哌嗪;1-(3,4-二甲基苯甲基)哌嗪;1-(3,5-二甲氧基苯甲酰基)哌嗪;1-(3,5-二甲基苯甲酰基)哌嗪;1-(3-氨基丙基)哌嗪;1-(3-氰基丙基)哌嗪;1-(3-二乙氨基丙基)哌嗪;1-(3-二丙氨基丙基)哌嗪;1-(3-甲氧基丙基)哌嗪;1-(3-吗啉基丙基)哌嗪;1-(3-苯基丙基)哌嗪;1-(3-哌啶基丙基)哌嗪;1-(3-吡咯烷基丙基)哌嗪;1-(4-氯苯甲酰基)哌嗪;1-(4-氯苯甲基)哌嗪;1-(4-乙氧基苯基)哌嗪;1-(4-甲氧基苯甲酰基)哌嗪;1-(4-甲氧基丁基)哌嗪;1-(4-苯基丁基)哌嗪;1-(4-吡啶基甲基)哌嗪;1-(4-叔丁基苯甲基)哌嗪;1-(环己基羰基)哌嗪;1-(乙烷磺酰基)哌嗪;1-(苯基乙酰基)哌嗪;1-cbz-哌嗪-2-羧酸;1-己酰基-哌嗪;1-甲基磺酰基-哌嗪;2,3-二苯基-哌嗪;2-(2-呋喃基)哌嗪;2-(2-甲氧基苯基)哌嗪;2-(2-噻吩基)哌嗪;2-(3-氧代-哌嗪-1-羰基)-苯甲酸;2-(4-氯苯基)哌嗪-1-羧酸叔丁酯;2-(4-甲氧基苯基)哌嗪;2-(4-甲基苯基)哌嗪;2-苯甲基-哌嗪;3-(4-氯苯基)哌嗪-1-羧酸叔丁酯;3-氧代-哌嗪-2-羧酸;3-苯基-哌嗪-1-羧酸乙酯;4-(4-Boc-哌嗪-1-羰基)苯基硼酸频哪醇酯;[5-(4-甲基-哌嗪-1-磺酰基)-吡啶-2-基]-肼;哌嗪-1-羧酸甲酯;1-乙基-2-甲基-哌嗪;1,4-双(3-氨基丙基)哌嗪;1-[2-(2-羟基乙氧基)乙基]哌嗪;1-(2-甲基-烯丙基)-哌嗪;2-(3-三氟甲基-苯基)哌嗪;4-N-Boc-2-甲基-哌嗪;1-(四氢-2-呋喃甲酰基)-哌嗪;1-(四氢-2-呋喃甲基)哌嗪;(R)-1-Boc-2-乙基-哌嗪;(R)-1-Boc-3-乙基-哌嗪;(S)-1-Boc-2-乙基-哌嗪;(S)-1-Boc-3-乙基-哌嗪;1-[1-(2-甲氧基苯基)乙基]哌嗪;1-[1-(3-甲氧基苯基)乙基]哌嗪;1-[1-(4-甲氧基苯基)-乙基]哌嗪;1-[2-(2-甲基苯氧基)乙基]哌嗪;1-(4-乙氧基-苯甲基)-哌嗪;1-Boc-2,6-二甲基-哌嗪;1-Boc-3,3-二甲基-哌嗪;1-Boc-3,5-二甲基-哌嗪;1-Boc-5-氧代-哌嗪-2-羧酸;1-N-(叔丁氧基羰基)-2-乙基-哌嗪;2-(2-氟-苯基)-哌嗪;2-(3-氟-苯基)-哌嗪;2-甲基-1-(3-甲基苯基)-哌嗪;4-(5-氨基吡啶-2-基)哌嗪-1-羧酸叔丁酯;1-[2-(二甲氨基)乙基]哌嗪;1-(1-甲基-4-哌啶基)哌嗪;1-乙酰基-4-(4-羟基苯基)哌嗪;1-[4-(三氟甲基)苯甲基]哌嗪;1-Boc-4-(2-甲酰基苯基)哌嗪;1-氨基-4-(2-羟基乙基)哌嗪;1-Boc-(4-苯甲基)哌嗪;1-Boc-4-[3-(乙氧基羰基)苯基]哌嗪;1-双(4-氟苯基)甲基哌嗪;1-Boc-4-(3-羟丙基)哌嗪;1-Boc-4-(4-甲酰基苯基)哌嗪;1-Boc-4-(4-甲氧基羰基苯基)哌嗪;1-(1,3-二氧戊环-2-基甲基)哌嗪;1-(3-氨基丙基)-4-(2-甲氧基苯基)哌嗪;1-[3-(二甲氨基)丙基]哌嗪;1-(1,2,3,4-四氢萘-2-基)哌嗪;1-(4-氨基丁基)-4-(2-甲氧基苯基)哌嗪;1-Boc-4-(2-甲氧基羰基苯基)哌嗪;1-Boc-4-(5-硝基-2-吡啶基)哌嗪;(R)-1-Boc-2-苯甲基-哌嗪;(R)1-N-Boc-2-异丙基-哌嗪;(R)-1-N-Boc-4-N-Fmoc-2-哌嗪羧酸;(R)-1-N-cbz-2-甲基-哌嗪;(R)-4-N-三苯甲基-2-甲基-哌嗪;(R)-N4-苯甲基-2-(苯甲基氧甲基)哌嗪;(S)-1-Boc-2-羟甲基-哌嗪;(S)-1-Boc-2-异丁基-哌嗪;(S)-1-Boc-3-苯甲基-哌嗪;(S)-1-Boc-3-异丙基-哌嗪;(S)-1-N-Boc-4-N-Fmoc-哌嗪-2-羧酸;(S)-4-N-三苯甲基-2-甲基-哌嗪;(S)-4-苯甲基-2-(甲基硫乙基)哌嗪;1-[(2,6-二氯苯基)磺酰基]哌嗪;1-[(2-甲基-1,3-噻唑-5-基)甲基]哌嗪;1-[(4,5-二甲基-1,3-噁唑-2-基)甲基]哌嗪;1-[(4-环己基苯基)磺酰基]哌嗪;1-[(4-异丁基苯基)磺酰基]哌嗪;1-[(4-甲基-1,2,5-噁二唑-3-基)甲基]哌嗪;1-[(4-仲丁基苯基)磺酰基]哌嗪;1-[(4-叔丁基-2,6-二甲基苯基)磺酰基]哌嗪;1-[1-(吡啶-2-基)乙基]哌嗪;1-[1-(吡啶-3-基)乙基]哌嗪;1-[1-(噻吩-2-基)乙基]哌嗪;1-[2-(1-丙基)-氧乙基]-哌嗪;1-[2-(1H-吡咯-1-基)乙基]哌嗪;1-[2-(2-甲氧基-苯氧基)-乙基]-哌嗪;1-[2-(二烯丙基氨基)-乙基]-哌嗪;1-[2-(三氟甲基)吡啶-4-基]哌嗪;1-[2-(三氟甲基)喹啉-4-基]哌嗪;1-[2-氟-4-(甲基磺酰基)苯基]哌嗪;1-[2-氟-4-(甲基磺酰基)苯基]-4-(2-羟乙基)哌嗪;1-[3-(1-哌啶羰基)-2-吡啶基]哌嗪;1-[3-(二氟甲氧基)苯甲酰基]哌嗪;1-[3-(三氟甲基)吡啶-2-基]哌嗪;1-[4-(甲基磺酰基)苯基]哌嗪;1-[4-(三氟甲基)嘧啶-2-基]哌嗪;1-(1H-咪唑-2-基甲基)哌嗪;1-(2,6-二甲基吡啶-4-基)哌嗪;1-(2-二苯甲氧-乙基)-哌嗪;1-(2-羟乙基)-4-异丙基-哌嗪;1-(2-咪唑-1-基-乙基)-哌嗪;1-(2-异氰基-乙基)-4-甲基-哌嗪;1-(2-甲基-噻唑-4-基甲基)-哌嗪;1-(2-N-Boc-氨基乙基)哌嗪;1-(2-吡啶-2-基-乙基)-哌嗪;1-(2-吡啶-4-基-乙基)-哌嗪;1-(2-噻吩-2-基-乙基)-哌嗪;1-(3,5-二甲基-异噁唑-4-基甲基)-哌嗪;1-(3-甲氧基-苯甲基)-哌嗪;1-(3-甲基-苯甲酰基)-哌嗪;1-(3-甲基-吡啶-2-基甲基)哌嗪;1-(3-甲基吡啶-2-基)哌嗪;1-(3-甲基吡啶-4-基)哌嗪;1-(4,6-二甲基嘧啶-2-基)哌嗪;1-(4-氰基-苯甲基)哌嗪;1-(4-乙氧基-苯磺酰基)-哌嗪;1-(4-乙氧基-吡啶-2-基)-哌嗪;1-(4-氟苯甲基)-4-(2-羟乙基)哌嗪;1-(4-羟基-苯基)-哌嗪-4-羧酸叔丁酯;N-Boc-哌啶;2-甲基哌嗪;2,6-二甲基哌嗪;反式-2,5-二甲基哌嗪;1,4-二甲基哌嗪;(R)-1-Boc-3-甲基哌嗪;1-Boc-3-氧代哌嗪;1,4-双-(2-甲氧基5-甲基-苯磺酰基)-2-甲基-哌嗪;1-[(1-甲基-1H-吡唑-3-基)羰基]哌嗪;1-[(1-甲基-1H-吡唑-4-基)甲基]哌嗪;1-(2-(N,N-双-(2-羟丙基)-氨基)-乙基)-4-(2-羟丙基)-哌嗪;1-(2-甲氧基苯基)-4-((4-(2-甲氧基苯基)-1-哌嗪基)(氧代)乙酰基)哌嗪;1-(3-(2,3-二氢-1,4-苯并二噁英-6-基)丙烯酰基)-4-(4-氟苯基)哌嗪;1-(4-氯苯基)-4-[(7-{[4-(4-氯苯基)-1-哌嗪基]磺酰基}-9H-芴-2-基)磺酰基]哌嗪;1-(4-氟苯基)-4-((4-(4-氟苯基)-1-哌嗪基)(氧代)乙酰基)哌嗪;1-(4-硝基苯基)-4-(3-{[4-(4-硝基苯基)-1-哌嗪基]羰基}苯甲酰基)哌嗪;1-(4-硝基苯基)-4-(4-{[4-(4-硝基苯基)-1-哌嗪基]羰基}苯甲酰基)哌嗪;1-乙酰基-4-(1-乙基-1H-咪唑-2-基)哌嗪;1-二苯甲基-4-{2-[5-(苯甲基硫基)-4-(2-甲基-2-丙烯基)-4H-1,2,4-三唑-3-基]乙基}哌嗪;1-苯甲基-4-[2-[(2’,4’-二氟[1,1’-联苯基]-4-基)氧]乙基]哌嗪;1-苯甲基-4-(3-((2’,4’-二氟(1,1’-联苯基)-4-基)氧]丙基]哌嗪;1-异丙基-4-[(1-甲基-1H-吡咯-2-基)甲基]哌嗪;1-甲基-4-({7-[(4-甲基-1-哌嗪基)磺酰基]-9H-芴-2-基}磺酰基)哌嗪;1-苯基-4-[苯基(4-苯基-1-哌嗪基)甲基]哌嗪;1-甲基-4-(甲基磺酰基)哌嗪;4-(2-羟基-乙基)-哌嗪-1-羧酸(4-异丙基-苯基)-酰胺;6-羟甲基-1,3-二甲基-哌嗪-2,5-二酮;2,2’-(哌嗪-1,4-二基)二乙烷磺酸双(2-甲氧基苯基)酯;1-(金刚烷-1-亚磺酰基)-4-甲基-哌嗪;1-(苯基磺酰基)-4-(2-吡啶基)哌嗪;1-苯甲基-4-(2-甲氧基丙酰基)哌嗪;1-环己基-4-(甲基磺酰基)哌嗪;1-乙基-4-(3-呋喃基甲基)哌嗪;1-(3-苯氧基-4-吡啶基)哌嗪;1-(2-吡啶基)-4-(3-(2,3,4-三甲氧基苯基)丙烯酰基)哌嗪;1-(3-(1,3-苯并二氧杂环戊烯-5-基)丙烯酰基)-4-(2-吡啶基)哌嗪;1-(3-(1,3-苯并二氧杂环戊烯-5-基)丙烯酰基)-4-(4-甲氧基苯基)哌嗪;1,4-双-(2-吡啶基亚甲基氨基)-哌嗪;1,4-双-(3,4,5-三甲氧基苯亚甲基氨基-哌嗪;1,4-双-(乙酰乙酰基)-哌嗪;1,4-二(2-呋喃甲酰基)哌嗪;1,4-双[2-(4-吡啶基)乙基]哌嗪;1,4-双[2-(2-吡啶基)乙基]哌嗪;1,4-双(2-羧基苯甲酰基)哌嗪;1,4-双(3-吡啶基甲基)哌嗪;1-(乙氧基羰基甲基)哌嗪;2,3,5,6-四羟基-哌嗪-1,4-二甲醛;4-苯甲基-哌嗪-1-羧酸环己基酰胺;2,2’-(哌嗪-1,4-二基)双(2-乙醛酸)二乙酯;2,2’-(哌嗪-1,4-二基)二乙酸二乙酯;3,3’-(哌嗪-1,4-二基)二丙酸二甲酯;(2E,2’E)-3,3’-(哌嗪-1,4-二基)双(1-(2-羟基苯基)丙-2-烯-1-酮);2,2’-(哌嗪-1,4-二基)双(N-(1,5-二甲基-3-氧代-2-苯基-2,3-二氢-1H-吡唑-4-基)乙酰胺);2,2’-(哌嗪-1,4-二基)二丙酰胺;2,2’-(哌嗪-1,4-二基)二丙腈;3,3’-(哌嗪-1,4-二基)双(1-(9H-咔唑-9基)丙烷-2-醇)富马酸酯;3,3’-(哌嗪-1,4-二基)双(1-苯基丙烷-1-酮);3,3’-(哌嗪-1,4-二基)二丙烷-1-醇;4,4’-(哌嗪-1,4-二基)双(3-乙氧基环丁-3-烯-1,2-二酮);哌嗪-1,4-二硫代羧酸双-苯基酰胺;1,4-二-叔丁基-哌嗪-2,5-二酮;1,4-双十二烷基-哌嗪;1,4-双十六烷基-哌嗪;1-(1-哌啶基羰基)哌嗪;1-(1-金刚烷基甲基)哌嗪;1-(3,4-二甲氧基苯甲基)哌嗪;1-(3-吡啶基羰基)哌嗪;4-哌嗪基苯甲腈;(S)-3-甲基-2-酮哌嗪;(R)-3-甲基-2-酮哌嗪;4-(Boc-哌嗪-1-基)-3-硝基苯甲酸;1,1’-(哌嗪-1,4-二基)二丙烷-2-醇;2,2’-(哌嗪-1,4-二基)双(1-苯基乙醇);2,2’-(哌嗪-1,4-二基)双(2-甲基丙腈);哌嗪-N,N’-双(2-乙烷磺酸);1-甲酰基哌嗪;PIPES钠盐;PIPES二钠盐;PIPES二钾盐;哌嗪-N,N’-双(2-羟基丙烷磺酸);1-哌嗪羧酸乙酯;POPSO二钠盐;4-羟基-3-甲氧基苯基乙二醇半哌嗪盐;柠檬酸倍半哌嗪盐水合物;4-(2-羟乙基)哌嗪-1-乙烷磺酸;4-(2-羟乙基)-1-哌嗪丙烷磺酸;HEPES钠盐;N-(2-羟乙基)哌嗪-N’-(4-丁烷磺酸);3-甲基-2-酮哌嗪;HEPES钾盐;3-哌嗪基丙腈;哌嗪乙酸乙酯;雌酮硫酸酯哌嗪;1-哌嗪丙醇;4-(2-氨基-1-苯基乙基)哌嗪羧酸叔丁酯;4-[2-(氨基甲基)苯基]哌嗪-1-羧酸叔丁酯;4-[5-(羟甲基)吡啶-2-基]哌嗪-1-羧酸叔丁酯;4-(3-氨基苯甲基)哌嗪-1-羧酸叔丁酯;4-(4-[(甲基氨基)甲基]苯基)哌嗪-1-羧酸叔丁酯;4-(4-氰基吡啶-2-基)哌嗪-1-羧酸叔丁酯;4-(5-甲酰基吡啶-2-基)哌嗪-1-羧酸叔丁酯;4-(氧杂环丁烷-3-基)哌嗪-1-羧酸叔丁酯;4-(哌啶-3-基)哌嗪-1-羧酸叔丁酯;4-(吡咯烷-2-基羰基)哌嗪-1-羧酸叔丁酯;4-(1H-吡咯并[2,3-b]吡啶-4-基)哌嗪-1-羧酸叔丁酯;1-[2-(2,5-二甲基-1H-吡咯-1-基)乙基]哌嗪;1-((1,5-二甲基-1H-吡唑-4-基)甲基)哌嗪;1-(1-乙基-5-甲基-1H-吡唑-4-基甲基)-哌嗪;4-(2-氨基-1-[4-(三氟甲基)苯基]乙基)哌嗪羧酸叔丁酯;3-(4-氟-苯基)-哌嗪-1-羧酸叔丁酯;3-(4-羟基-苯基)-哌嗪-1-羧酸叔丁酯;3-呋喃-2-基-哌嗪-1-羧酸叔丁酯;3-噻吩-2-基-哌嗪-1-羧酸苯甲酯;4-(2-氨基-苯基)-哌嗪-1-羧酸叔丁酯;4-(2-氨基乙基)-1-boc-哌嗪;4-(5-羧基-吡啶-2-基)-2-甲基-哌嗪-1-羧酸叔丁酯;4-Boc-1-(6-甲基-2-吡啶基)哌嗪;Fmoc-4-羧甲基-哌嗪;4-Boc-哌嗪-2-羧酸甲酯;N,N-二甲基-1-哌嗪磺酰胺;N-1-Boc-N-4-Fmoc-2-哌嗪羧酸;N-4-Boc-N-1-cbz-2-哌嗪羧酸;N-4-Boc-N-1-Fmoc-2-哌嗪乙酸;哌嗪-1-甲脒与硫酸化合物(1∶1);1-乙基-4-哌啶-4-基-哌嗪;1-呋喃-2-基甲基-哌嗪;1-甲基-4-(2-哌啶-4-基-乙基)-哌嗪;1-甲基-4-(6-氨基吡啶-3-基)哌嗪;1-甲基-4-(哌啶-4-基)-哌嗪;1-N-Boc-4-(氮杂环丁烷-3-基)哌嗪;1-吡啶-2-基甲基-哌嗪;1-吡啶-3-基甲基-哌嗪;1-噻唑-2-基-哌嗪;2-(2,5-二甲氧基-苯基)-哌嗪;2-羧甲基-3-氧代-哌嗪-1-羧酸叔丁酯;2-乙氧基羰基甲基-3-氧代-哌嗪-1-羧酸叔丁酯;1-(4-甲基-环己基)-哌嗪;1-(4-甲基-哌啶-1-磺酰基)-哌嗪;1-(4-三氟甲基-吡啶-2-基)-哌嗪;1-(5-甲基-2-吡啶基)哌嗪;1-(5-甲基-2-噻唑基)哌嗪;1-(5-硝基吡啶-2-基)哌嗪;1-(6-丁氧基-2-吡啶基)哌嗪;1-(6-甲基吡啶-2-基)哌嗪;1-(N-甲基哌啶-3-基-甲基)哌嗪;1-(噻吩-2-基乙酰基)哌嗪;1-Boc-4-(哌啶-4-基)-哌嗪;1-Boc-4-氰基甲基-哌嗪;1-环己-3烯基甲基-哌嗪,及其组合。
5.权利要求1所述的钨化学机械抛光(CMP)组合物,其中,所述哌嗪衍生物选自(R)-哌嗪-2-羧酸;1-(2-羟乙基)哌嗪;哌嗪-2,6-二酮;1-(2-氨乙基)哌嗪;1,4-双(2-羟乙基)哌嗪;1,4-双(丙烯酰基)哌嗪;哌嗪-1-乙酸叔丁酯;1-(3-甲基苯甲基)哌嗪;4-(哌嗪-1-羰基)-哌啶-1-羧酸叔丁酯;哌嗪-1-羧酸二乙酰胺;哌嗪-1-磺酰胺;哌嗪-2-羧酰胺;1,2-二甲基-哌嗪;2-异丙基-哌嗪;1-(2-嘧啶基)哌嗪;1-(2-吡嗪基)-哌嗪;1-(6-哒嗪基)哌嗪;1-(3-羟基苯基)哌嗪;1-(2-吡啶基)哌嗪;1-(4-甲氧基苯基)哌嗪;1-(4-吡啶基)哌嗪;1-(4-氨基苯基)哌嗪;1-(4-甲氧基苯甲基)哌嗪;1-(2-氰基苯基)哌嗪;1-(2-甲氧基乙基)哌嗪;1-Boc-哌嗪-2-羧酸;1-(2-乙氧基乙基)哌嗪;(R)-1-Boc-哌嗪-2-羧酸;(R)-3-羟甲基-哌嗪1-羧酸叔丁酯;(R)-4-N-Boc-哌嗪-2-羧酸;(S)-3-羟甲基-哌嗪-1-羧酸叔丁酯;(S)-4-N-Boc-哌嗪-2-羧酸;1-(1-哌啶磺酰基)哌嗪;1-(2-二异丙基氨基乙基)哌嗪;1-(2-二丙基氨基乙基)哌嗪;1-(2-乙氧基苯基)哌嗪;1-(2-乙基丁酰基)哌嗪;1-(2-异丙氧基乙基)哌嗪;1-(2-甲巯基苯基)哌嗪;1-(2-吗啉基乙基)哌嗪;1-(2-哌啶基乙基)哌嗪;1-(2-吡咯烷基乙基)哌嗪;1-(3-氨基丙基)哌嗪;1-(3-氰基丙基)哌嗪;1-(3-二乙氨基丙基)哌嗪;1-(3-二丙氨基丙基)哌嗪;1-(3-甲氧基丙基)哌嗪;1-(3-吗啉基丙基)哌嗪;1-(3-哌啶基丙基)哌嗪;1-(3-吡咯烷基丙基)哌嗪;1-(4-甲氧基丁基)哌嗪;1-(4-吡啶基甲基)哌嗪;1-(乙烷磺酰基)哌嗪;3-氧代-哌嗪-2-羧酸;4-甲基哌嗪-1-羧酸酯;1,4-双(3-氨基丙基)哌嗪;1-[2-(2-羟基乙氧基)乙基]哌嗪;4-(5-氨基吡啶-2-基)哌嗪-1-羧酸叔丁酯;1-[2-(二甲氨基)乙基]哌嗪;1-(1-甲基-4-哌啶基)哌嗪;1-氨基-4-(2-羟基乙基)哌嗪;1-(3-氨基丙基)-4-(2-甲氧基苯基)哌嗪;1-[3-(二甲氨基)丙基]哌嗪;1-(4-氨基丁基)-4-(2-甲氧基苯基)哌嗪;1-[3-(1-哌啶羰基)-2-吡啶基]哌嗪;1-(1H-咪唑-2-基甲基)哌嗪;1-(2,6-二甲基吡啶-4-基)哌嗪;1-(2-羟乙基)-4-异丙基-哌嗪;1-(2-咪唑-1-基-乙基)-哌嗪;1-(2-异氰基-乙基)-4-甲基-哌嗪;1-(4-乙氧基-吡啶-2-基)-哌嗪;2-甲基哌嗪;2,6-二甲基哌嗪;反式-2,5-二甲基哌嗪;1,4-二甲基哌嗪;1,4-双(3-吡啶基甲基)哌嗪;1-(乙氧基羰基甲基)哌嗪;2,3,5,6-四羟基-哌嗪-1,4-二甲醛;3,3’-(哌嗪-1,4-二基)二丙酸二甲酯;2,2’-(哌嗪-1,4-二基)二丙酰胺;2,2’-(哌嗪-1,4-二基)二丙腈;(R)-3-甲基-2-酮哌嗪;2,2’-(哌嗪-1,4-二基)双(2-甲基丙腈);哌嗪-N,N,-双(2-乙烷磺酸);1-甲酰基哌嗪;PIPES钠盐;PIPES二钠盐;PIPES二钾盐;哌嗪-N,N’-双(2-羟基丙烷磺酸);1-哌嗪羧酸乙酯;POPSO二钠盐;4-羟基-3-甲氧基苯基乙二醇半哌嗪盐;4-(2-羟乙基)哌嗪1-乙烷磺酸;4-(2-羟乙基)-1-哌嗪丙烷磺酸;HEPES钠盐;N-(2-羟乙基)哌嗪-N’-(4-丁烷磺酸);3-甲基-2-酮哌嗪;HEPES钾盐;3-哌嗪基丙腈;哌嗪乙酸乙酯,及其组合。
6.权利要求1所述的钨化学机械抛光(CMP)组合物,其中,所述哌嗪衍生物选自1-(2-氨乙基)哌嗪,1,4-双(3-氨基丙基)哌嗪,及其组合。
7.前述权利要求任一项所述的钨化学机械抛光(CMP)组合物,其中,所述化学添加剂是或包含选自如下的氰酸盐:氰酸钾,氰酸钠,氰酸铵,氰酸烷基铵,及其组合。
8.前述权利要求任一项所述的钨化学机械抛光(CMP)组合物,其中,其还包含如下的一种或多种
腐蚀抑制剂;
pH缓冲剂;
表面活性剂;以及
当抛光组合物的pH为5.0-8.0时的杀生物剂。
9.前述权利要求任一项所述的组合物,其中,所述组合物的其余部分基本上是液体载体。
10.前述权利要求任一项所述的组合物,其中,所述纳米尺寸磨料是胶体二氧化硅;所述固体催化剂是氧化铁涂布的胶体二氧化硅;所述化学添加剂是1-(2-氨乙基)哌嗪或氰酸钾;所述氧化剂是过氧化氢;所述腐蚀抑制剂聚氮丙啶是任选存在的;以及所述组合物的其余部分是去离子水。
11.选择性化学机械抛光的方法,包含下列步骤:
a)提供具有包含钨和至少一种其它材料的表面的半导体基材;
b)提供抛光垫;
c)提供前述权利要求任一项所述的化学机械抛光(CMP)组合物;
d)使半导体基材的表面与所述抛光垫和所述化学机械抛光组合物接触;以及
e)抛光所述半导体基材的表面;
其中所述包含钨的表面的至少一部分与所述抛光垫和所述化学机械抛光组合物二者接触;并且钨的去除速率与所述至少一种其它材料的去除速率的比率等于或大于1。
12.选择性化学机械抛光的系统,包含:
a)抛光垫;
b)权利要求1-10任一项所述的化学机械抛光(CMP)组合物。
13.权利要求12所述的系统,其还包含具有包含钨和至少一种其它材料的表面的半导体基材;其中所述包含钨的表面的至少一部分与所述抛光垫和所述化学机械抛光组合物二者接触。
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US20140273458A1 (en) | 2014-09-18 |
CN104046246B (zh) | 2016-06-15 |
IL231408A0 (en) | 2014-08-31 |
KR20140111992A (ko) | 2014-09-22 |
SG10201400557WA (en) | 2014-10-30 |
EP2779217A2 (en) | 2014-09-17 |
TW201435073A (zh) | 2014-09-16 |
TWI503407B (zh) | 2015-10-11 |
JP2014194016A (ja) | 2014-10-09 |
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