TW201412409A - 空氣軸承裝置及塗布裝置 - Google Patents
空氣軸承裝置及塗布裝置 Download PDFInfo
- Publication number
- TW201412409A TW201412409A TW102127675A TW102127675A TW201412409A TW 201412409 A TW201412409 A TW 201412409A TW 102127675 A TW102127675 A TW 102127675A TW 102127675 A TW102127675 A TW 102127675A TW 201412409 A TW201412409 A TW 201412409A
- Authority
- TW
- Taiwan
- Prior art keywords
- coating
- air bearing
- bearing device
- gas
- exhaust
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 108
- 238000000576 coating method Methods 0.000 title claims abstract description 108
- 230000007246 mechanism Effects 0.000 claims description 27
- 239000007788 liquid Substances 0.000 claims description 19
- 238000004891 communication Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 abstract description 4
- 125000006850 spacer group Chemical group 0.000 description 20
- 239000000758 substrate Substances 0.000 description 12
- 239000011521 glass Substances 0.000 description 11
- 239000010408 film Substances 0.000 description 9
- 239000011148 porous material Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Spray Control Apparatus (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012174198A JP2014031865A (ja) | 2012-08-06 | 2012-08-06 | エアベアリング装置及び塗布装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201412409A true TW201412409A (zh) | 2014-04-01 |
Family
ID=50067824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102127675A TW201412409A (zh) | 2012-08-06 | 2013-08-01 | 空氣軸承裝置及塗布裝置 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2014031865A (enExample) |
| KR (1) | KR20150040924A (enExample) |
| CN (1) | CN104583618A (enExample) |
| TW (1) | TW201412409A (enExample) |
| WO (1) | WO2014024583A1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201539620A (zh) * | 2014-02-18 | 2015-10-16 | Oiles Industry Co Ltd | 空氣軸承裝置及測定裝置 |
| US11097974B2 (en) | 2014-07-31 | 2021-08-24 | Corning Incorporated | Thermally strengthened consumer electronic glass and related systems and methods |
| US12338159B2 (en) | 2015-07-30 | 2025-06-24 | Corning Incorporated | Thermally strengthened consumer electronic glass and related systems and methods |
| JP6923555B2 (ja) | 2016-01-12 | 2021-08-18 | コーニング インコーポレイテッド | 薄厚熱強化及び化学強化ガラス系物品 |
| US11795102B2 (en) | 2016-01-26 | 2023-10-24 | Corning Incorporated | Non-contact coated glass and related coating system and method |
| TWI785156B (zh) | 2017-11-30 | 2022-12-01 | 美商康寧公司 | 具有高熱膨脹係數及對於熱回火之優先破裂行為的非離子交換玻璃 |
| EP3719443B1 (en) | 2019-04-03 | 2021-06-09 | Hexagon Technology Center GmbH | Coordinate-measuring machine with self-cleaning air bearing |
| KR20210154825A (ko) | 2019-04-23 | 2021-12-21 | 코닝 인코포레이티드 | 확정 응력 프로파일을 갖는 유리 라미네이트 및 그 제조방법 |
| US11697617B2 (en) | 2019-08-06 | 2023-07-11 | Corning Incorporated | Glass laminate with buried stress spikes to arrest cracks and methods of making the same |
| CN111894983A (zh) * | 2020-07-30 | 2020-11-06 | 西安工业大学 | 微孔节流的静压气体止推轴承 |
| CN114251362A (zh) * | 2020-09-24 | 2022-03-29 | 武汉科技大学 | 一种微纳多孔节流气浮球面轴承 |
| FR3139869A1 (fr) * | 2022-09-16 | 2024-03-22 | Micro-Contrôle - Spectra-Physics | Appareil pour la réduction des vibrations dans un système de régulation de mouvement à coussin d’air |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60113816A (ja) * | 1983-11-22 | 1985-06-20 | Miyoutoku:Kk | エア−スライド装置 |
| JPH07109217B2 (ja) * | 1986-01-31 | 1995-11-22 | 京セラ株式会社 | 静圧気体直線案内装置 |
| JPH09222124A (ja) * | 1996-02-19 | 1997-08-26 | Nippon Seiko Kk | 静圧気体軸受 |
| US6287004B1 (en) * | 1999-11-22 | 2001-09-11 | Nikon Corporation | Fluid bearing operable in a vacuum region |
| TWI222423B (en) * | 2001-12-27 | 2004-10-21 | Orbotech Ltd | System and methods for conveying and transporting levitated articles |
| JP2004019760A (ja) * | 2002-06-14 | 2004-01-22 | Nsk Ltd | 静圧軸受 |
| JP4468059B2 (ja) * | 2004-04-23 | 2010-05-26 | 太平洋セメント株式会社 | 静圧軸受け装置 |
| JP2008149238A (ja) * | 2006-12-15 | 2008-07-03 | Chugai Ro Co Ltd | 塗布装置 |
| US7607647B2 (en) * | 2007-03-20 | 2009-10-27 | Kla-Tencor Technologies Corporation | Stabilizing a substrate using a vacuum preload air bearing chuck |
| JP2011133724A (ja) * | 2009-12-25 | 2011-07-07 | Nikon Corp | 流体静圧軸受、移動体装置、露光装置、デバイス製造方法、及び清掃装置 |
-
2012
- 2012-08-06 JP JP2012174198A patent/JP2014031865A/ja active Pending
-
2013
- 2013-06-21 CN CN201380041409.1A patent/CN104583618A/zh active Pending
- 2013-06-21 WO PCT/JP2013/067076 patent/WO2014024583A1/ja not_active Ceased
- 2013-06-21 KR KR20157003630A patent/KR20150040924A/ko not_active Withdrawn
- 2013-08-01 TW TW102127675A patent/TW201412409A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN104583618A (zh) | 2015-04-29 |
| WO2014024583A1 (ja) | 2014-02-13 |
| KR20150040924A (ko) | 2015-04-15 |
| JP2014031865A (ja) | 2014-02-20 |
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