CN104583618A - 空气轴承装置及涂布装置 - Google Patents

空气轴承装置及涂布装置 Download PDF

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Publication number
CN104583618A
CN104583618A CN201380041409.1A CN201380041409A CN104583618A CN 104583618 A CN104583618 A CN 104583618A CN 201380041409 A CN201380041409 A CN 201380041409A CN 104583618 A CN104583618 A CN 104583618A
Authority
CN
China
Prior art keywords
air bearing
bearing device
coating
exhaust
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201380041409.1A
Other languages
English (en)
Chinese (zh)
Inventor
池田俊之
上田智士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oiles Corp
Original Assignee
Oiles Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oiles Corp filed Critical Oiles Corp
Publication of CN104583618A publication Critical patent/CN104583618A/zh
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Spray Control Apparatus (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
CN201380041409.1A 2012-08-06 2013-06-21 空气轴承装置及涂布装置 Pending CN104583618A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012174198A JP2014031865A (ja) 2012-08-06 2012-08-06 エアベアリング装置及び塗布装置
JP2012-174198 2012-08-06
PCT/JP2013/067076 WO2014024583A1 (ja) 2012-08-06 2013-06-21 エアベアリング装置及び塗布装置

Publications (1)

Publication Number Publication Date
CN104583618A true CN104583618A (zh) 2015-04-29

Family

ID=50067824

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380041409.1A Pending CN104583618A (zh) 2012-08-06 2013-06-21 空气轴承装置及涂布装置

Country Status (5)

Country Link
JP (1) JP2014031865A (enExample)
KR (1) KR20150040924A (enExample)
CN (1) CN104583618A (enExample)
TW (1) TW201412409A (enExample)
WO (1) WO2014024583A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111795630A (zh) * 2019-04-03 2020-10-20 赫克斯冈技术中心 具有自洁式空气轴承的坐标测量机
CN111894983A (zh) * 2020-07-30 2020-11-06 西安工业大学 微孔节流的静压气体止推轴承
CN114251362A (zh) * 2020-09-24 2022-03-29 武汉科技大学 一种微纳多孔节流气浮球面轴承

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201539620A (zh) * 2014-02-18 2015-10-16 Oiles Industry Co Ltd 空氣軸承裝置及測定裝置
US11097974B2 (en) 2014-07-31 2021-08-24 Corning Incorporated Thermally strengthened consumer electronic glass and related systems and methods
US12338159B2 (en) 2015-07-30 2025-06-24 Corning Incorporated Thermally strengthened consumer electronic glass and related systems and methods
JP6923555B2 (ja) 2016-01-12 2021-08-18 コーニング インコーポレイテッド 薄厚熱強化及び化学強化ガラス系物品
US11795102B2 (en) 2016-01-26 2023-10-24 Corning Incorporated Non-contact coated glass and related coating system and method
TWI785156B (zh) 2017-11-30 2022-12-01 美商康寧公司 具有高熱膨脹係數及對於熱回火之優先破裂行為的非離子交換玻璃
KR20210154825A (ko) 2019-04-23 2021-12-21 코닝 인코포레이티드 확정 응력 프로파일을 갖는 유리 라미네이트 및 그 제조방법
US11697617B2 (en) 2019-08-06 2023-07-11 Corning Incorporated Glass laminate with buried stress spikes to arrest cracks and methods of making the same
FR3139869A1 (fr) * 2022-09-16 2024-03-22 Micro-Contrôle - Spectra-Physics Appareil pour la réduction des vibrations dans un système de régulation de mouvement à coussin d’air

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113816A (ja) * 1983-11-22 1985-06-20 Miyoutoku:Kk エア−スライド装置
JPS62180114A (ja) * 1986-01-31 1987-08-07 Kyocera Corp 静圧気体直線案内装置
JPH09222124A (ja) * 1996-02-19 1997-08-26 Nippon Seiko Kk 静圧気体軸受
JP2001200843A (ja) * 1999-11-22 2001-07-27 Nikon Corp 真空中で動作する流体ベアリング
CN101204692A (zh) * 2006-12-15 2008-06-25 中外炉工业株式会社 涂布装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
JP2004019760A (ja) * 2002-06-14 2004-01-22 Nsk Ltd 静圧軸受
JP4468059B2 (ja) * 2004-04-23 2010-05-26 太平洋セメント株式会社 静圧軸受け装置
US7607647B2 (en) * 2007-03-20 2009-10-27 Kla-Tencor Technologies Corporation Stabilizing a substrate using a vacuum preload air bearing chuck
JP2011133724A (ja) * 2009-12-25 2011-07-07 Nikon Corp 流体静圧軸受、移動体装置、露光装置、デバイス製造方法、及び清掃装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113816A (ja) * 1983-11-22 1985-06-20 Miyoutoku:Kk エア−スライド装置
JPS62180114A (ja) * 1986-01-31 1987-08-07 Kyocera Corp 静圧気体直線案内装置
JPH09222124A (ja) * 1996-02-19 1997-08-26 Nippon Seiko Kk 静圧気体軸受
JP2001200843A (ja) * 1999-11-22 2001-07-27 Nikon Corp 真空中で動作する流体ベアリング
CN101204692A (zh) * 2006-12-15 2008-06-25 中外炉工业株式会社 涂布装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111795630A (zh) * 2019-04-03 2020-10-20 赫克斯冈技术中心 具有自洁式空气轴承的坐标测量机
US11181146B2 (en) 2019-04-03 2021-11-23 Hexagon Technology Center Gmbh Coordinate-measuring machine with self-cleaning air bearing
CN111894983A (zh) * 2020-07-30 2020-11-06 西安工业大学 微孔节流的静压气体止推轴承
CN114251362A (zh) * 2020-09-24 2022-03-29 武汉科技大学 一种微纳多孔节流气浮球面轴承

Also Published As

Publication number Publication date
WO2014024583A1 (ja) 2014-02-13
TW201412409A (zh) 2014-04-01
KR20150040924A (ko) 2015-04-15
JP2014031865A (ja) 2014-02-20

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