TW201404914A - 成膜裝置及成膜裝置用搬送托盤 - Google Patents

成膜裝置及成膜裝置用搬送托盤 Download PDF

Info

Publication number
TW201404914A
TW201404914A TW102112355A TW102112355A TW201404914A TW 201404914 A TW201404914 A TW 201404914A TW 102112355 A TW102112355 A TW 102112355A TW 102112355 A TW102112355 A TW 102112355A TW 201404914 A TW201404914 A TW 201404914A
Authority
TW
Taiwan
Prior art keywords
substrate
film forming
forming apparatus
transport
tray
Prior art date
Application number
TW102112355A
Other languages
English (en)
Chinese (zh)
Inventor
Itsushi Iio
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW201404914A publication Critical patent/TW201404914A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/02—Roller-ways having driven rollers
    • B65G13/06—Roller driving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H01L21/6723—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one plating chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW102112355A 2012-07-05 2013-04-08 成膜裝置及成膜裝置用搬送托盤 TW201404914A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012151666A JP2014015633A (ja) 2012-07-05 2012-07-05 成膜装置、及び成膜装置用搬送トレイ

Publications (1)

Publication Number Publication Date
TW201404914A true TW201404914A (zh) 2014-02-01

Family

ID=49928498

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102112355A TW201404914A (zh) 2012-07-05 2013-04-08 成膜裝置及成膜裝置用搬送托盤

Country Status (4)

Country Link
JP (1) JP2014015633A (ja)
KR (1) KR101511179B1 (ja)
CN (1) CN103526156A (ja)
TW (1) TW201404914A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10460978B2 (en) * 2017-03-08 2019-10-29 Lam Research Corporation Boltless substrate support assembly
CN110257793A (zh) * 2019-07-04 2019-09-20 深圳市捷佳伟创新能源装备股份有限公司 倾斜运输托盘的镀膜设备
JP7041702B2 (ja) * 2020-03-05 2022-03-24 キヤノントッキ株式会社 基板ホルダ、基板処理装置及び成膜装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100567681B1 (ko) * 2003-01-06 2006-04-07 이근종 가구용 서랍안내레일
JP4331707B2 (ja) * 2004-12-16 2009-09-16 三星モバイルディスプレイ株式會社 整列システム、垂直型トレイ移送装置及びこれを具備した蒸着装置
KR100639004B1 (ko) * 2005-01-05 2006-10-26 삼성에스디아이 주식회사 트레이의 감지 및 이송장치
JP2006191039A (ja) * 2005-01-05 2006-07-20 Samsung Sdi Co Ltd トレイ移送装置
JP4839405B2 (ja) * 2007-04-16 2011-12-21 株式会社アルバック コンベアおよび成膜装置とそのメンテナンス方法
KR101288599B1 (ko) * 2007-05-29 2013-07-22 엘지디스플레이 주식회사 기판 이송 장치
JP2011074423A (ja) * 2009-09-29 2011-04-14 Hitachi High-Technologies Corp 有機ｅｌデバイス製造装置及び有機ｅｌデバイス製造方法並びに成膜装置及び成膜方法
JP5639431B2 (ja) * 2010-09-30 2014-12-10 キヤノントッキ株式会社 成膜装置
JP5631159B2 (ja) * 2010-11-09 2014-11-26 キヤノン株式会社 シート搬送装置及び画像形成装置

Also Published As

Publication number Publication date
KR20140005761A (ko) 2014-01-15
JP2014015633A (ja) 2014-01-30
CN103526156A (zh) 2014-01-22
KR101511179B1 (ko) 2015-04-10

Similar Documents

Publication Publication Date Title
TWI425587B (zh) 輸送器及成膜裝置與其保養方法
TWI653698B (zh) 基板處理系統、應用於其之真空旋轉模組及於其之中沈積一層堆疊之方法
JP5945553B2 (ja) 被覆装置および被覆方法
TWI444496B (zh) Vacuum processing device
JP2002203884A (ja) 基板処理装置及び経由チャンバー
TW200844021A (en) Conveying device
JPS63299136A (ja) サブストレートをほぼ連続的に処理する装置
TW201404914A (zh) 成膜裝置及成膜裝置用搬送托盤
TW201415572A (zh) 成膜裝置用基板搬運托盤、及外部開閉驅動裝置
WO2011026295A1 (zh) 真空基片传送系统
JP2002057203A (ja) 基板処理装置
TW201832312A (zh) 傳輸模組、具有傳輸腔室的基板處理系統及使用基板傳輸系統的基板處理方法
JP2013174020A (ja) スパッタ装置
US20200002807A1 (en) Vacuum processing apparatus
TWI648866B (zh) 成膜裝置及成膜方法以及太陽電池之製造方法
JP5089906B2 (ja) 縦型化学気相成長装置
CN103283011B (zh) 成膜装置
JP2014058698A (ja) スパッタリング装置
KR101188863B1 (ko) 챔버용 기판 이송장치 및 그 챔버 시스템
KR20140113289A (ko) 기판반송트레이, 및 성막장치
JP6055229B2 (ja) 被処理体の搬送機構および真空処理装置
JP2008202146A (ja) 縦型化学気相成長装置及び該装置を用いた成膜方法
JP4478376B2 (ja) 縦型化学気相成長装置及び該装置を用いた成膜方法
JP2014078602A (ja) 基板搬送トレイ起伏装置
TWI503868B (zh) Vacuum processing device