TW201306682A - 特別是呈切換或控制裝置構造部分形式的構件 - Google Patents

特別是呈切換或控制裝置構造部分形式的構件 Download PDF

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TW201306682A
TW201306682A TW101107999A TW101107999A TW201306682A TW 201306682 A TW201306682 A TW 201306682A TW 101107999 A TW101107999 A TW 101107999A TW 101107999 A TW101107999 A TW 101107999A TW 201306682 A TW201306682 A TW 201306682A
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mold
region
component
ridge
molding
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Michael Vogelgesang
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Bosch Gmbh Robert
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/0025Preventing defects on the moulded article, e.g. weld lines, shrinkage marks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/0046Details relating to the filling pattern or flow paths or flow characteristics of moulding material in the mould cavity
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/284Applying non-metallic protective coatings for encapsulating mounted components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C2045/14852Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles incorporating articles with a data carrier, e.g. chips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C2045/1486Details, accessories and auxiliary operations
    • B29C2045/14934Preventing penetration of injected material between insert and adjacent mould wall
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14336Coating a portion of the article, e.g. the edge of the article
    • B29C45/14418Sealing means between mould and article
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/34Electrical apparatus, e.g. sparking plugs or parts thereof
    • B29L2031/3406Components, e.g. resistors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/34Electrical apparatus, e.g. sparking plugs or parts thereof
    • B29L2031/3425Printed circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/563Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0201Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203Cooling of mounted components
    • H05K1/0209External configuration of printed circuit board adapted for heat dissipation, e.g. lay-out of conductors, coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09009Substrate related
    • H05K2201/09036Recesses or grooves in insulating substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09818Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09909Special local insulating pattern, e.g. as dam around component
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/13Moulding and encapsulation; Deposition techniques; Protective layers
    • H05K2203/1305Moulding and encapsulation
    • H05K2203/1316Moulded encapsulation of mounted components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/13Moulding and encapsulation; Deposition techniques; Protective layers
    • H05K2203/1305Moulding and encapsulation
    • H05K2203/1327Moulding over PCB locally or completely

Abstract

一種構件(10),特別是呈一種切換或控制裝置用的構造部分的形式者,具有一本體(15),該本體被一種由塑膠構成的模料(11)部分地灌膠包住,其中該本體(5)至少有一個區域(12)設計成沒有模料(11)者,其中,該本體(15)的區域(12)至少局部地被一構造(20)圍住,該構造(20)防止該模料(11)向該無模料(11)的區域(12)的方向侵入。(圖1)

Description

特別是呈切換或控制裝置構造部分形式的構件
本發明關於申請專利範圍第1項的引文的一種構件,特別是呈一種切換或控制裝置用的構造部分的形式者。
舉例而言,這類構件係電子工業習知者。在此,一種電路載體或一基材用所謂之模製法被一種用熱固性塑膠或一彈性體構成的模料灌膠包圍住。在製造程序時,所要灌膠的構造先在一模具的二個模半部之間定位,然後將模半部關閉,最後將模料注入模具的模腔中。為了防止該構件的一些功能面(例如用於導熱者)也被模料蓋住,因此模具例如設有框條或類似物,它們與要灌膠的構件直接倚靠接觸。當構件和上述框條(它們用於作密封)之間沒有縫隙(例如由構件誤差或模具磨損所致)或者有損壞,則須防止模料侵入那些須受保護維持無模料的區域中,但在實用上不能經常排除構件和框條間的區域實際上為密封者。在這些情形,模料會侵入的本來要保持無模料的區域,如此會造成構件預損壞或瑕疵功能,這些毛病特別是在構件較久的操作後才會顯現,因此特別嚴重。
本發明從上述先前技術著手,其目的在將申請專利範圍第1項的引文的一種構件(特別是一切換或控制裝置的構造部分)改革,以確實避免模料侵入須保持無模料的區域中。在一種構件(特別是一切換或控制裝置的構造部分)這種 目的作利用申請專利範圍第1項的特徵達成。在此,本發明係根據一構想,將模料向無模料的區域方向的通路利用一構造防止。該構造至少區域性地把在本體上的該區域圍住。此構造因此構成該模料向該要保持無模料的區域的方向的屏障。特別是模料不可能向該無模料的區域的方向越過該構造。因此本發明的構件就其使用壽命看始終具有良好功能性質,或者可避免由於模料造成降低品質的損壞。
本發明的構件的有利的進一步特點見於申請專利範圍附屬項。在申請專利範圍、說明書及/或圖式中揭示的至少二種特點構成的所有組合都在本發明的範圍內。
在本發明構件的一結構特點,該構造設計成凹陷部的方式,該凹陷部形成一儲存體積空間以儲存模料。舉例而言,這種結構可各依模料的儲存體積而定,利用一種切屑製造技術做成槽的形式,或利用無切屑的製造程序,例如利用雷射光裝置產生。
但也可用另一方式,將構造設計隆起形式。如果在該無模料區域中設有導線路或類似之隆起構造,則這種構造可特別廉價製造。在此情形,該隆起由一附加之導線路形式,它可以相對於模料沒有功能,或設計成導電之導線路,其中具有模料的一接點不會有負面作用。
本發明一特別有利的設計中,該凹陷部及隆起將該區域完全圍住。如此可確信,模料不會由任何方向朝向要保持無模料的區域的方向入侵。
在本發明另一設計中,該凹陷部或隆起分別設成距該 區域一段距離。因此在凹陷部或隆起部與要保持無模料的區域之間形成一種中間區域,它同樣可用於作模料的儲存體積。如果有大量的模料會向要保持無模的區域流動時,則這種實施例很有利。
特別有利的係使用本發明在一些構件,該要保持無模料的區域為一個用於發散熱的面,或一個可與另一構件連接的金屬接點面,例如一IC的端子接腳。因此要使用不含模料的區域當作散熱面時,很重要的一點為,該輻射能不能被周圍的模料阻礙其輻射,否則這點會使構件受過多熱應力。在另一實施例中,不具模料的區域與另一構件連接,此處重的是:構件之間舉例而言由良好導電連接,例如呈軟銲連接形式,但這種連接至少會受模料妨礙。
本發明其他優點、特徵和細節見於以下圖式之較佳實施例。
在此,相同的構件具有與圖式中所示的圖號表示。
在圖1中顯示一構件(10)的一個部分區域,例如特別用於作切換或控製裝置者。構件(10)舉例而言,要部分地被一模料(11)包圍。模料(11)特別是熱固性塑膠或彈性體,用於製造至少部分地被一模料(11)包入的構件(10)的方法一般稱模製法。
圖1中部分圖示的工具(模具)(100)用於製造構件(10),此工具(100)有一上工具半部(101)及一下工具半部(102),它們設成可向雙箭頭(103)(104)方向相對運動且互 間隔設置,該工具半部(101)(102)利用圖未示的驅動器運動。二工具半部(101)(102)整體形成一容納部(105)以容納構件(10),換言之,當二工具半部(101)(102)完全朝向運動且該構件(10)至少局部地呈形狀接合方式容納在二工具半部(101)(102)之間。
重要的是:在該具一本體(15)的構件(10)的上側與下側之間形成一個沒有模料(11)的區域(12)(12a)。這點係利用工具半部(101)(102)之相關設計達成,舉例而言,它們具有框條(106)(107)或側邊之限制件(108)(109),其防止模料(11)跑到要保持無模料的區域(12)(12a)中。
在圖式之實例中,構件(10)的左邊被該要保持無模料的區域(12)(12a)用一層(13)〔由模料(11)構成〕包圍。此外,構件(10)的一端側面(14)同樣用模料(11)蓋住,此模料經圖1未示的「注入通道」進入模半部(101)(102)中,其中模料(11)被加熱且受壓力。在模料(11)注入工具(模具)(100)時,模料(11)將構件(10)與模半部(101)(102)間形成的空腔整個地或完全地注滿,只有要保持無模料的區域(12)(12a)沒有模料。
在實際上不能排除由於有縫隙、材料磨損、構件不準確或類似因素使模料(11)侵入要保持無模料的區域(12)(12a)。此要保持無模料的區域(12)舉例而言,設計成一散熱面(18)形式,例如呈一銅層之導線形式。在此例子特別須防止面(18)的上側被模料(11)蓋住,否則會造成絕熱妨害熱,因此至少使面(18)的功能受限。
為了比較說明本發明,構件(10)的上側依先前技術設計,而構件下側(10)特別設計成用於防止模料(11)向要保持無模料的區域的方向侵入。在實用上,構件(10)宜在所有要保持無模料的區域(12)(亦即上、下側)都要作相關的措施。
在依先前技術的構件(10)上側,可看到模料(11)侵入要保持無模料的區域(12a),且舉例而言,部分地蓋住面(18)。在依本發明設計的構件(10)下側則在構件(10)表面設有一本發明的構造(20)。舉例而言,此構造可同樣為一銅層或類似地呈一隆起(27)形式。構造(20)宜完全包圍住該要保持無模料(11)的區域。換言之,構造(20)形成一封閉形狀。最好構造(20)設在框條(107)與散熱面(18)之間,且另外設成距散熱面(18)隔一段間隔。因此產生二條環繞之條帶狀區域(21)(22)它們形成模料(11)的一屏障或一儲存空間體積。因此特別可看出,在本發明的構件(10)的設計,即使下工具半部(102)和構件(10)間未密封,模料(11)也只能在框條(107)和構造(20)或隆起(27)間的第一區域(21)進入,但模料(11)不會跑到面(18)或要保持無模料的區域(12)。
圖2中,構件(10)設計成要和一電路載體(圖未示)(特別是一電路板)連接的電子構件形式。為此,構件(10)有端子接腳(24)(25),它們可利用軟銲連接件與電路載體或電路板的相關接點面接觸。此處,構造(20)的一附加功能為避免模料(11)侵入端子接腳(24)(25)的區域。特別是要避免端子接腳(24)(25)在要與電路載體或電路板接觸的區域沾到或覆以模料(11)。
此外由圖3可看出,在本發明的範疇中也可不採隆起(27),將構造(20)設計成凹陷部(26)形式,它們取代圖1的隆起。在此,在圖3中所示的剖面圖可看出,凹陷部(26)舉例而言,係藉一條完全圍繞散熱面(18)的槽的設計而形成,它形成一中間空間,呈一儲存空間體積形式,以儲存模料(11)。
上述之構件可用許多方式變更或變換,而不偏離本發明的構想。此構想在於:構件(10)可設有一構造(20),它防止在構件(10)灌膠時模料(11)侵入要保持無模料(11)的區域(12)(12a)中。
(10)‧‧‧構件
(11)‧‧‧模料
(12)‧‧‧無模料的區域
(12a)‧‧‧無模料的區域
(13)‧‧‧層
(14)‧‧‧端側面
(15)‧‧‧本體
(18)‧‧‧散熱面
(20)‧‧‧構造
(21)‧‧‧條帶狀區域
(22)‧‧‧條帶狀區域
(24)‧‧‧端子接腳
(25)‧‧‧端子接腳
(26)‧‧‧凹陷部
(27)‧‧‧隆起
(100)‧‧‧工具(模具)
(101)‧‧‧上工具半部
(102)‧‧‧下工具半部
(103)‧‧‧雙箭頭
(104)‧‧‧雙箭頭
(105)‧‧‧容納部
(106)‧‧‧框條
(107)‧‧‧框條
(108)‧‧‧限制件
(109)‧‧‧限制件
圖1係用於將一構件灌膠包覆的一工具部分區域的剖面圖,其中構件上側依先前技術設計,而構件下側係本發明的構件;圖2係一個具一散熱面的構件的立體圖,它設計成與一電路載體(例如一電路板)作導電接觸;圖3係經一圖2本發明的構造之(它用於將導熱面保持無模料)的區域的該構件之一部面圖。
(10)‧‧‧構件
(11)‧‧‧模料
(12)‧‧‧無模料的區域
(12a)‧‧‧無模料的區域
(13)‧‧‧層
(14)‧‧‧端側面
(15)‧‧‧本體
(18)‧‧‧散熱面
(20)‧‧‧構造
(21)‧‧‧條帶狀區域
(22)‧‧‧條帶狀區域
(27)‧‧‧隆起
(100)‧‧‧工具(模具)
(101)‧‧‧上工具半部
(102)‧‧‧下工具半部
(103)‧‧‧雙箭頭
(104)‧‧‧雙箭頭
(105)‧‧‧容納部
(106)‧‧‧框條
(107)‧‧‧框條
(108)‧‧‧限制件
(109)‧‧‧限制件

Claims (9)

  1. 一種構件(10),特別是呈一種切換或控制裝置用的構造部分的形式者,具有一本體(15),該本體被一種由塑膠構成的模料(11)部分地灌膠包住,其中該本體(5)至少有一個區域(12)設計成沒有模料(11)者,其特徵在:該本體(15)的區域(12)至少局部地被一構造(20)圍住,該構造(20)防止該模料(11)向該無模料(11)的區域(12)的方向侵入。
  2. 如申請專利範圍第1項之構件,其中:該構造(20)設計成凹陷部(26)的方式,該凹陷部形成一儲存體積空間以儲存模料(11)。
  3. 如申請專利範圍第1項之構件,其中:該構造(20)呈一隆起(27)的形式,該隆起構成模料(11)的屏障。
  4. 如申請專利範圍第2或第3項之構件,其中:該凹陷部(26)及隆起(27)將該區域(12)完全圍住。
  5. 如申請專利範圍第2或第3項之構件,其中:該凹陷部(26)或隆起(27)分別設成距該區域(12)一段距離。
  6. 如申請專利範圍第2或第3項之構件,其中:在該凹陷部(26)或隆起(27)與設有模料的區域(13)之間在背向該區域(12)的那一側上形成另一個沒有模料的區域(21)。
  7. 如申請專利範圍第1~3項任一項之構件,其中: 該要保持無模料(11)的區域(12)為一個用於發散熱的面(18),或一個可與另一構件連接的金屬接點面,例如一IC的端子接腳。
  8. 如申請專利範圍第1~3項任一項之構件,其中:該本體(15)為一電路載體,特別是一電路板。
  9. 如申請專利範圍第3項之構件,其中:該隆起(2)為一銅層,特別是一導線路。
TW101107999A 2011-03-11 2012-03-09 特別是呈切換或控制裝置構造部分形式的構件 TW201306682A (zh)

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JPH01285319A (ja) * 1988-05-12 1989-11-16 Sumitomo Electric Ind Ltd モールド金型
JP2784286B2 (ja) * 1991-12-09 1998-08-06 三菱電機株式会社 半導体センサー装置の製造方法
JP3274343B2 (ja) * 1996-02-09 2002-04-15 株式会社東芝 半導体装置
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