TW201219800A - capable of evaluating the performance of electrostatic eliminator - Google Patents

capable of evaluating the performance of electrostatic eliminator Download PDF

Info

Publication number
TW201219800A
TW201219800A TW100104357A TW100104357A TW201219800A TW 201219800 A TW201219800 A TW 201219800A TW 100104357 A TW100104357 A TW 100104357A TW 100104357 A TW100104357 A TW 100104357A TW 201219800 A TW201219800 A TW 201219800A
Authority
TW
Taiwan
Prior art keywords
measuring
plate
measurement
plates
board
Prior art date
Application number
TW100104357A
Other languages
English (en)
Chinese (zh)
Inventor
Tetsuya Tokunaga
Original Assignee
Hugle Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hugle Electronics Inc filed Critical Hugle Electronics Inc
Publication of TW201219800A publication Critical patent/TW201219800A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R13/00—Arrangements for displaying electric variables or waveforms
    • G01R13/02—Arrangements for displaying electric variables or waveforms for displaying measured electric variables in digital form
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Elimination Of Static Electricity (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
TW100104357A 2010-11-09 2011-02-10 capable of evaluating the performance of electrostatic eliminator TW201219800A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010250378A JP2012103056A (ja) 2010-11-09 2010-11-09 チャージプレートモニタ

Publications (1)

Publication Number Publication Date
TW201219800A true TW201219800A (en) 2012-05-16

Family

ID=46267502

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100104357A TW201219800A (en) 2010-11-09 2011-02-10 capable of evaluating the performance of electrostatic eliminator

Country Status (4)

Country Link
JP (1) JP2012103056A (ko)
KR (1) KR20120049780A (ko)
CN (1) CN102565568A (ko)
TW (1) TW201219800A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112986761A (zh) * 2021-02-08 2021-06-18 苏州天华超净科技股份有限公司 静电消除器工作性能监测方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103336214A (zh) * 2013-07-10 2013-10-02 深圳市华星光电技术有限公司 静电消除器的监控装置及其监控方法
KR101629915B1 (ko) * 2015-02-17 2016-06-13 (주)동일기연 챠지 플레이트 모니터링 장치
KR102036009B1 (ko) * 2017-12-05 2019-10-24 은성훈 이온 검출 장치
EP3620786B1 (en) * 2018-09-10 2022-11-16 Nrd Llc Ion sensor
KR102148644B1 (ko) * 2019-03-13 2020-08-28 주식회사 네오세미텍 토탈 이온 관리 시스템 및 관리 방법
KR102122268B1 (ko) * 2019-03-15 2020-06-16 주식회사 제이테피언스 위치별 감쇠시간 측정을 통한 정전기 발생 방지 시스템 및 그 방법
CN112858800A (zh) * 2019-11-27 2021-05-28 鸿劲精密股份有限公司 作业分类设备的电荷侦测装置
KR102280765B1 (ko) * 2021-02-05 2021-07-21 지문영 이오나이저 성능 평가 장치 및 그 방법
KR102493135B1 (ko) * 2021-02-18 2023-01-30 김선철 네트워크 기반의 소형 대전판을 가지는 챠지 플레이트 모니터링 장치
KR102504492B1 (ko) * 2021-03-29 2023-02-28 (주)선재하이테크 정전하 측정 센서모듈 및 이를 이용한 정전하 모니터링 시스템

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4231905C2 (de) * 1992-09-18 1999-05-20 Stiehl Hans Henrich Dr Vorrichtung zur Messung von Ionen in einem Gas
JPH1010809A (ja) * 1996-06-21 1998-01-16 Canon Inc 画像形成装置および電位測定方法
US6433552B1 (en) * 1999-04-21 2002-08-13 Bruce T. Williams Floating plate voltage monitor
JP2001013185A (ja) * 1999-06-29 2001-01-19 Hugle Electronics Inc 帯電分布測定装置
JP3770547B2 (ja) * 2002-03-01 2006-04-26 ヒューグルエレクトロニクス株式会社 イオナイザ制御システム
JP2003332094A (ja) * 2002-05-09 2003-11-21 Keyence Corp 除電監視モニタ
JP3750817B2 (ja) * 2004-05-26 2006-03-01 ヒューグルエレクトロニクス株式会社 除電装置
JP2007180074A (ja) * 2005-12-27 2007-07-12 Olympus Corp 静電気検出装置および基板検査装置
JP4904133B2 (ja) * 2006-10-03 2012-03-28 シシド静電気株式会社 帯電モニタ装置およびイオン生成装置の性能評価方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112986761A (zh) * 2021-02-08 2021-06-18 苏州天华超净科技股份有限公司 静电消除器工作性能监测方法
CN112986761B (zh) * 2021-02-08 2022-08-16 苏州天华超净科技股份有限公司 静电消除器工作性能监测方法

Also Published As

Publication number Publication date
JP2012103056A (ja) 2012-05-31
CN102565568A (zh) 2012-07-11
KR20120049780A (ko) 2012-05-17

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