CN102565568A - 电荷平板监视器 - Google Patents

电荷平板监视器 Download PDF

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Publication number
CN102565568A
CN102565568A CN2011103539778A CN201110353977A CN102565568A CN 102565568 A CN102565568 A CN 102565568A CN 2011103539778 A CN2011103539778 A CN 2011103539778A CN 201110353977 A CN201110353977 A CN 201110353977A CN 102565568 A CN102565568 A CN 102565568A
Authority
CN
China
Prior art keywords
main body
assay plate
measuring
analyzer main
flat panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011103539778A
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English (en)
Chinese (zh)
Inventor
德永哲也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hugle Electronics Inc
Original Assignee
Hugle Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hugle Electronics Inc filed Critical Hugle Electronics Inc
Publication of CN102565568A publication Critical patent/CN102565568A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R13/00—Arrangements for displaying electric variables or waveforms
    • G01R13/02—Arrangements for displaying electric variables or waveforms for displaying measured electric variables in digital form
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Elimination Of Static Electricity (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN2011103539778A 2010-11-09 2011-11-09 电荷平板监视器 Pending CN102565568A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010250378A JP2012103056A (ja) 2010-11-09 2010-11-09 チャージプレートモニタ
JP2010-250378 2010-11-09

Publications (1)

Publication Number Publication Date
CN102565568A true CN102565568A (zh) 2012-07-11

Family

ID=46267502

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011103539778A Pending CN102565568A (zh) 2010-11-09 2011-11-09 电荷平板监视器

Country Status (4)

Country Link
JP (1) JP2012103056A (ko)
KR (1) KR20120049780A (ko)
CN (1) CN102565568A (ko)
TW (1) TW201219800A (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103336214A (zh) * 2013-07-10 2013-10-02 深圳市华星光电技术有限公司 静电消除器的监控装置及其监控方法
CN110888154A (zh) * 2018-09-10 2020-03-17 Nrd有限责任公司 离子发生器监视系统和离子传感器
CN112858800A (zh) * 2019-11-27 2021-05-28 鸿劲精密股份有限公司 作业分类设备的电荷侦测装置

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101629915B1 (ko) 2015-02-17 2016-06-13 (주)동일기연 챠지 플레이트 모니터링 장치
KR102036009B1 (ko) * 2017-12-05 2019-10-24 은성훈 이온 검출 장치
KR102148644B1 (ko) * 2019-03-13 2020-08-28 주식회사 네오세미텍 토탈 이온 관리 시스템 및 관리 방법
KR102122268B1 (ko) * 2019-03-15 2020-06-16 주식회사 제이테피언스 위치별 감쇠시간 측정을 통한 정전기 발생 방지 시스템 및 그 방법
KR102280765B1 (ko) * 2021-02-05 2021-07-21 지문영 이오나이저 성능 평가 장치 및 그 방법
CN112986761B (zh) * 2021-02-08 2022-08-16 苏州天华超净科技股份有限公司 静电消除器工作性能监测方法
KR102493135B1 (ko) * 2021-02-18 2023-01-30 김선철 네트워크 기반의 소형 대전판을 가지는 챠지 플레이트 모니터링 장치
KR102504492B1 (ko) * 2021-03-29 2023-02-28 (주)선재하이테크 정전하 측정 센서모듈 및 이를 이용한 정전하 모니터링 시스템

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5506507A (en) * 1992-09-18 1996-04-09 Sorbios Verfahrenstechnische Gerate Und Systeme Gmbh Apparatus for measuring ions in a clean room gas flow using a spherical electrode
CN1375061A (zh) * 1999-04-21 2002-10-16 布鲁斯·T·威廉姆斯 浮动平板电压监视器
JP2003332094A (ja) * 2002-05-09 2003-11-21 Keyence Corp 除電監視モニタ
CN1951159A (zh) * 2004-05-26 2007-04-18 修谷鲁电子机器股份有限公司 静电消除装置
JP2007180074A (ja) * 2005-12-27 2007-07-12 Olympus Corp 静電気検出装置および基板検査装置
JP2008112707A (ja) * 2006-10-03 2008-05-15 Shishido Seidenki Kk 帯電モニタ装置およびイオン生成装置の性能評価方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1010809A (ja) * 1996-06-21 1998-01-16 Canon Inc 画像形成装置および電位測定方法
JP2001013185A (ja) * 1999-06-29 2001-01-19 Hugle Electronics Inc 帯電分布測定装置
JP3770547B2 (ja) * 2002-03-01 2006-04-26 ヒューグルエレクトロニクス株式会社 イオナイザ制御システム

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5506507A (en) * 1992-09-18 1996-04-09 Sorbios Verfahrenstechnische Gerate Und Systeme Gmbh Apparatus for measuring ions in a clean room gas flow using a spherical electrode
CN1375061A (zh) * 1999-04-21 2002-10-16 布鲁斯·T·威廉姆斯 浮动平板电压监视器
JP2003332094A (ja) * 2002-05-09 2003-11-21 Keyence Corp 除電監視モニタ
CN1951159A (zh) * 2004-05-26 2007-04-18 修谷鲁电子机器股份有限公司 静电消除装置
JP2007180074A (ja) * 2005-12-27 2007-07-12 Olympus Corp 静電気検出装置および基板検査装置
JP2008112707A (ja) * 2006-10-03 2008-05-15 Shishido Seidenki Kk 帯電モニタ装置およびイオン生成装置の性能評価方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103336214A (zh) * 2013-07-10 2013-10-02 深圳市华星光电技术有限公司 静电消除器的监控装置及其监控方法
WO2015003375A1 (zh) * 2013-07-10 2015-01-15 深圳市华星光电技术有限公司 静电消除器的监控装置及其监控方法
CN110888154A (zh) * 2018-09-10 2020-03-17 Nrd有限责任公司 离子发生器监视系统和离子传感器
CN112858800A (zh) * 2019-11-27 2021-05-28 鸿劲精密股份有限公司 作业分类设备的电荷侦测装置

Also Published As

Publication number Publication date
TW201219800A (en) 2012-05-16
KR20120049780A (ko) 2012-05-17
JP2012103056A (ja) 2012-05-31

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Application publication date: 20120711