CN102565568A - Charge plate monitor - Google Patents
Charge plate monitor Download PDFInfo
- Publication number
- CN102565568A CN102565568A CN2011103539778A CN201110353977A CN102565568A CN 102565568 A CN102565568 A CN 102565568A CN 2011103539778 A CN2011103539778 A CN 2011103539778A CN 201110353977 A CN201110353977 A CN 201110353977A CN 102565568 A CN102565568 A CN 102565568A
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- main body
- assay plate
- measuring
- analyzer main
- flat panel
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R13/00—Arrangements for displaying electric variables or waveforms
- G01R13/02—Arrangements for displaying electric variables or waveforms for displaying measured electric variables in digital form
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Elimination Of Static Electricity (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
A charge plate monitor can evaluate the performance of electrostatic eliminator, even if electricity eliminated object such as substrate for a liquid crystal display is becoming large that causes electrostatic eliminator to be constructed in long shape. To solve the problem, the charging board monitor uses measuring plates to detect positive and negative ions generated by the electrostatic eliminator, and to evaluate the electricity eliminating performance and ionic balance performance of the positive and negative ions for the electrostatic eliminator. One measuring main body (100) includes a function of measuring the decay time of decaying electrical potential of the measuring plate pre-applied with a predetermined voltage to a predetermined value, and a function of measuring ionic balance according to the potential of the measuring plate; and measuring plates (201, 202, 203), wherein the number of plates is in coordination with the length of the evaluated object's electrostatic eliminator (300) and the measuring plates (201, 202, 203) are connected with the measuring main body (100) in parallel or in series.
Description
Technical field
The present invention relates to be used to measure the electric charge flat panel monitor that electrical property and ionic equilibrium performance (balance of negative ions keep performance) are estimated the performance of ion generator of removing of ion generator.
Background technology
Figure 14 representes the structure of the diagrammatical of electric charge flat panel monitor in the past.
In with figure; CPM ' is the electric charge flat panel monitor; 100A is the analyzer main body, and 101A is the display part that is made up of LCD etc., and 200A is the assay plate that is connected to analyzer main body 100A; The 300th, as the ion generator (イ オ Na イ ザ) of the bar structure of evaluation object, the 301st, disposed a plurality of emitter-base bandgap grading (sparking electrode) to the length direction of ion generator 300.
In analyzer main body 100A, built-in high voltage source, surface potential meter, electric field meter, timer etc.In addition, Yi Bian assay plate 200A for example become be the conductive plate of 150 [mm] across the spaced-apart alignment of 10～15 [mm] two structure, integral body has the electrostatic capacitance of about 20 [PF].
Analyzer main body 100A mainly has the function of the surface potential of measuring assay plate 200A, and through the method for following narration, that measures ion generator removes electrical property and ionic equilibrium performance.
In order to measure the electrical property that removes of ion generator 300 through this electric charge flat panel monitor; From the high-voltage power supply of analyzer main body 100A assay plate 200A is for example applied+high voltage of 1000 [V] or-1000 [V]; Thereby make it charged, and the ion that will be generated by the emitter-base bandgap grading 301 of ion generator 300 hit assay plate 200A.Under this state, the current potential of being measured assay plate 200A by analyzer main body 100A is decayed to+required time of 100 [V] or by the positive ion neutralization and decay to the required time of-100 [V] from-1000 [V] from+1000 [V] by the negative ion neutralization.These times are short more, and then the ion generation of ion generator 300 or generation rate are high more, can be evaluated as except that electrical property high more.In addition, for all kinds in the scope that applies voltage existence ± 1000～± 5000 [V] of assay plate 200A.
Here, the pattern that will carry out said determination action is called the attenuation measurement pattern.
In addition, in order to measure the ionic equilibrium performance, through assay plate 200A ground connection is made as 0 [V] with its current potential, and will hit assay plate 200A by the positive and negative ion that ion generator 300 generates.At this moment; If positive ion amount and negative ion amount that ion generator 300 generates equate; Then the current potential of assay plate 200A is stable near 0 [V], thus measure the size and the polarity of this current potential through analyzer main body 100A, thus can estimate the ionic equilibrium performance of ion generator.
Here, the pattern that will carry out said determination action is called the ionic equilibrium mode determination.
In addition, in recent years, become maximization as the base-board of liquid crystal display or the plasma display that remove electric object of ion generator gradually with substrate, follow in this, the length of the ion generator of bar structure is lengthening gradually also.
Under the situation that the performance of coming through the electric charge flat panel monitor the ion generator of so long size makes an experiment; Also can know from Figure 14; Need a plurality of emitter-base bandgap gradings 301 that dispose, the position of an electric charge flat panel monitor CPM ' is relatively moved and sequentially determining on the length direction of ion generator 300 according to total length along ion generator 300.Therefore, there is the problem that spends more time and time for the performance of estimating an ion generator.
With respect to this, in order once just to accomplish the mensuration of the ion generator 300 of long size, arranges many electric charge flat panel monitor CPM ' and measure and get final product, but owing to general electric charge flat panel monitor CPM ' is at high price, so spend more cost.
In addition; In patent documentation 1; Following ion balance monitor is disclosed; Assay plate is divided into a plurality of sections, to the applying respectively under the state of positive and negative bias voltage of these each sections, measures ionic equilibrium and the positive and negative ion generation rate of the generation ion of ion generator at a distance from a section.
Patent documentation
[patent documentation 1] Japan special table 2008-519260 communique ([0012] section～[0017] section, Fig. 1～Fig. 3 etc.)
In the technology in the past of patent documentation 1 record; Through assay plate being divided into a plurality of sections bias voltages that apply regulation; Thereby can measure ionic equilibrium and ion generation rate simultaneously, but can not solve as stated numerous and diverse and minute long-term of such caused operation of lengthization that is accompanied by ion generator.
Summary of the invention
Therefore; The problem that the present invention will solve is; A kind of electric charge flat panel monitor (charge plate monitor) is provided; Even it also can come to estimate efficiently the performance of ion generator through an electric charge flat panel monitor because of the maximization ion generator that removes electric object becomes long size.
In order to solve above-mentioned problem; The invention of technical scheme 1 is a kind of electric charge flat panel monitor; It is the positive and negative ion that generates by ion generator detecting by assay plate; And estimate the electric charge flat panel monitor of the ionic equilibrium performance of removing electrical property and positive and negative ion of said ion generator; And also being the current potential that will be used for measuring the said assay plate that has applied assigned voltage in advance decays to the function of the die-away time till the setting and is included in the electric charge flat panel monitor that an analyzer main body constitutes based on the function that the current potential of said assay plate is measured ionic equilibrium by said ion
With corresponding and comprise many said assay plates, with these assay plates parallel connections or be connected in series to said analyzer main body as the length of the said ion generator of evaluation object.
In the electric charge flat panel monitor that the invention of technical scheme 2 is put down in writing in technical scheme 1, said analyzer main body comprises: display part shows said die-away time and the mensuration result of ionic equilibrium in many said assay plates respectively.
In the electric charge flat panel monitor that the invention of technical scheme 3 is put down in writing in technical scheme 1 or 2, many said assay plates are set the address respectively, said analyzer main body is handled the determination data of each assay plate according to said address.
According to the present invention; Through assay plate to an analyzer main body parallel connection or the necessary platform number of connecting; Thereby can use an electric charge flat panel monitor estimate long size ion generator remove electrical property and ionic equilibrium performance, can be in the short time and realize the performance evaluation of ion generator at low cost.
In addition, if change the platform number of the assay plate that is connected to the analyzer main body accordingly, then can also be applied in the different various ion generators of length with the length of ion generator.
Description of drawings
Fig. 1 is the structural drawing of the diagrammatical of the 1st embodiment of the present invention.
Fig. 2 is the structural drawing of the diagrammatical of the 2nd embodiment of the present invention.
Fig. 3 is the structural drawing of the diagrammatical of the 3rd embodiment of the present invention.
Fig. 4 is the structural drawing of the diagrammatical of the 4th embodiment of the present invention.
Fig. 5 (a)～(b) is the detailed structural drawing of the 1st embodiment.
Fig. 6 (a)～(b) is the detailed structural drawing of the 2nd embodiment.
Fig. 7 (a)～(b) is the detailed structural drawing of the 4th embodiment.
Fig. 8 is the key diagram of the user mode of embodiment of the present invention.
Fig. 9 is the key diagram of the user mode of embodiment of the present invention.
Figure 10 is the mensuration result's of the expression embodiment of the present invention routine figure of demonstration.
Figure 11 is the mensuration result's of the expression embodiment of the present invention routine figure of demonstration.
Figure 12 is the mensuration result's of the expression embodiment of the present invention routine figure of demonstration.
Figure 13 is the mensuration result's of the expression embodiment of the present invention routine figure of demonstration.
Figure 14 is the figure of structure that representes the diagrammatical of electric charge flat panel monitor in the past.
Label declaration
100,150: the analyzer main body
101: display part
102a：CPU
102b: dull and stereotyped control circuit
The 102c:A/D translation circuit
102d: infrared unit
102e: input part
102f: display circuit
102g: sensor part
102h: wireless treatment circuit
102i: antenna
201,202,203: assay plate
201A, 201C: dull and stereotyped control part
201B: dull and stereotyped main body
201a: control circuit
201b: positive voltage produces circuit
201c: circuit for generating negative voltage
201d: sensor drive driving circuit
201e: electrostatic transducer
201f: storer
201g: wireless treatment circuit
201h: antenna
300: ion generator
301: emitter-base bandgap grading
G: substrate
Embodiment
Below, along description of drawings embodiment of the present invention.
At first, electric charge flat panel monitor of the present invention is made up of an analyzer main body and Duo Tai assay plate.
Fig. 1～Fig. 3 be through wired connection the structural drawing of diagrammatical of embodiment of analyzer main body and Duo Tai assay plate.The 1st embodiment of Fig. 1 is to the be connected in parallel example of many (for example 3) assay plates 201,202,203 of an analyzer main body 100; The 2nd embodiment of Fig. 2 is to the be connected in series example of many assay plates 201,202,203 of an analyzer main body 100, and the 3rd embodiment of Fig. 3 is to for example the be connected in parallel example of 3 circuit that many assay plates 201,202,203 are connected in series of an analyzer main body 100.
In addition; The 4th embodiment of Fig. 4 is to an analyzer main body 100 ground connection behind 3 circuit that many assay plates 201,202,203 are connected in series that for example is connected in parallel, and and analyzer main body 100 between through wireless connections the example of each series circuit.
In addition, in embodiment illustrated in figures 1 and 2, also can be through wireless connections analyzer main body 100 and Duo Tai assay plate 201,202, between 203 or between these series circuits.
In above-mentioned the 1st～the 4th embodiment, according to the total length as the ion generator (not shown) of the bar structure of evaluation object, the parallel connection or several assay plates of necessary platform that have been connected in series.For example, the length of the assay plate 201 in Fig. 1 (perhaps width) is under the situation of L, with 3 assay plates of proper spacing alignment arrangements 201,202,203, makes it can evenly cover the total length that total length is the above ion generator of 3L.
Then, Fig. 5 is the detailed structural drawing of the 1st embodiment.
The detailed structure of Fig. 5 (a) expression analyzer main body 100, the detailed structure of Fig. 5 (b) expression assay plate 201,202,203.In addition because assay plate 201,202,203 all is identical structure, so in Fig. 5 (b) illustration assay plate 201.
Shown in Fig. 5 (a), analyzer main body 100 comprises: CPU102a, and unified control electric charge flat panel monitor is whole, and follows the calculation process of potential measurement and the timer action etc. of assay plate 201,202,203; Dull and stereotyped control circuit 102b is used to control the action of assay plate 201,202,203; And A/D translation circuit 102c, the current potential (simulating signal) of assay plate 201,202,203 is transformed to digital signal.Here, in CPU102a, in the storer of inside, stored the address that is used for confirming respectively assay plate 201,202,203.
In addition; In analyzer main body 100, be provided with infrared unit 102d; This infrared unit 102d be used for based on as the ion generator of measuring the result remove electrical property and ionic equilibrium, control through infrared communication and apply voltage etc. for ion generator.In addition, the element that is not necessary in the present invention of this infrared unit 102d.Though not shown, based on the control of the ion generator of measuring the result, also can carry out through wireless communication unit by CPU102a.
In CPU102a, connected by the input part 102e that the connection that is used to carry out power supply is broken off or the switch of various input operations or touch panel etc. constitute, and connected the display circuit 102f that is used to drive said display part 101.
In addition, in analyzer main body 100, be provided with the sensor part 102g of temperature sensor, humidity sensor, air velocity transducer etc.This sensor part 102g is used to measure the ambient environmental conditions of analyzer main body 100, also can be as required, and be separately positioned on assay plate 201,202,203 sides and measure each dull and stereotyped ambient environmental conditions.
The structure of assay plate 201 then, is described based on Fig. 5 (b).
As stated, dull and stereotyped main body 201B becomes the conductive plate of the size of the regulation that ion detection is used and has aimed at two structure, but is convenient to explanation, has omitted the diagram of detailed structure.
In addition, positive voltage produces circuit 201b and circuit for generating negative voltage 201c also can be built in the analyzer main body 100.
In addition, in analyzer main body 100 and dull and stereotyped control part 201A, difference is built-in power circuit (not shown).
The action of the 1st embodiment then, is described.
At first, will be configured in the top of assay plate 201,202,203 as the ion generator of the object of performance evaluation, the ion that will produce from ion generator offers assay plate 201,202,203 through air-supply parts etc.
In analyzer main body 100, select the mode determination (attenuation measurement pattern, ionic equilibrium mode determination) of regulation by input part 102e, and via dull and stereotyped control circuit 102b assay plate 201,202,203 is seen off control signal (measuring instruction) from CPU102a.
Current, in the attenuation measurement pattern, drive positive voltage via the control circuit 201a in the dull and stereotyped control part 201A of assay plate 201 and produce circuit 201b or circuit for generating negative voltage 201c, dull and stereotyped main body 201B is for example applied+1000 [V] or-1000 [V].At this moment; The current potential of dull and stereotyped main body 201B is via electrostatic transducer 201e, sensor drive driving circuit 201d and control circuit 201a; Be input to CPU102a from the A/D translation circuit 102c of analyzer main body 100; So in CPU102a, the current potential that comes assay plate main body 201B through built-in timer decays to+100 [V] or decay to the time till-100 [V] from-1000 [V] from+1000 [V].
In addition; In this attenuation measurement pattern; Measure respectively from ion generator and only produce negative ion and the current potential of dull and stereotyped main body 201B decays to+time till 100 [V] from+1000 [V], perhaps only produce positive ion and decay to the time till-100 [V] from-1000 [V].
In addition, the determination data of each assay plate 201 (dull and stereotyped main body 201B) is sent to CPU102a by the address in the annex memory 201f.
In CPU102a, with display part 101 carried out numeral demonstration via display circuit 102f the die-away time of measuring.As display mode, be shown as the die-away time when for example positive voltage being applied and "+1.2 [s] ", the die-away time when negative voltage is applied be shown as " 2.0 [s] " and get final product.
Above-mentioned action also is identical for other different assay plates 202,203 of address, in CPU102a, can differentiate the die-away time of each assay plate 201,202,203 of being measured and shows simultaneously.
Because can be according to the die-away time of in this attenuation measurement pattern, measuring; Mensuration is from the ion generation of ion generator, in other words except that electrical property; So can carry out for the control that applies voltage of ion generator or urge the alarm etc. of the cleaning of emitter-base bandgap grading according to this result, in the transmission of these control signals or alarm signal, can use infrared unit 102d.
In addition; Under the situation of the mensuration instruction that transmits the ionic equilibrium mode determination from 100 pairs of assay plate 201 sides of analyzer main body; In dull and stereotyped control part 201A; Do not make positive voltage produce circuit 201b, circuit for generating negative voltage 201c action and the current potential of assay plate main body 201B, and extra address and be sent to the CPU102a of analyzer main body 100.At this moment, make ion generator produce positive and negative ion in advance.
In CPU102a; Because can be through detecting the polarity and the big or small equilibrium state that detects the negative ions amount that transmits the current potential that comes; So can show as follows: when negative ions amount balance, show " ± 0 [V] ", when imbalance, show "+3 [V] ", " 7 [V] " etc. through display part 101.
Then, Fig. 6 is the detailed structural drawing of the 2nd embodiment, the structure of Fig. 6 (a) expression analyzer main body 100, the structure of Fig. 6 (b) expression assay plate 201.Except assay plate 201,202,203 was connected in series to the point of analyzer main body 100, the 2nd embodiment was structurally identical with the 1st embodiment.
The action of the 2nd embodiment is identical with the 1st embodiment basically; But need be, and in the control circuit 201a of the assay plate that is connected in series to analyzer main body 100 201, each determination data be concentrated the step that passes out to CPU102a etc. to each determination data (current potential of dull and stereotyped main body) of the assay plate 201,202,203 that is connected in series extra address respectively.
In addition, in the 3rd embodiment shown in Figure 3, basically also can application drawing 5 or the structure of Fig. 6, each address of many assay plates that are connected by CPU102a and control circuit 201a management SP gets final product.
In addition, Fig. 7 is the detailed structural drawing of the 4th embodiment, the structure of Fig. 7 (a) expression analyzer main body 150, the structure of Fig. 7 (b) expression assay plate 201.
In the analyzer main body 150 shown in Fig. 7 (a); In CPU102a, connected wireless treatment circuit 102h; In this wireless treatment circuit 102h, connected antenna 102i; This analyzer main body 150 and assay plate 201,202, between 203, can control signal or determination data be carried out radio communication with digital signal.As this communication, can utilize well-known communication modes such as low-power wireless communication, bluetooth (registered trademark), frequency spectrum diffusion communication.
In the assay plate 201 shown in Fig. 7 (b), in dull and stereotyped control part 201C, be provided with wireless treatment circuit 201g and antenna 201h, be used for and above-mentioned analyzer main body 150 between radio communication.
Except analyzer main body 150 sides and assay plate 201,202, communication component between 203 are the point of wireless communication unit; The action of the 4th embodiment is identical with the 1st embodiment; But according to the 4th embodiment; Have the trouble that does not need analyzer main body 150 sides and assay plate 201,202, the wiring between 203, and these are provided with the advantage that does not limit etc. in the place.
Then, Fig. 8, Fig. 9 are the figure of the user mode of expression embodiment of the present invention (for example, the 3rd or the 4th embodiment), and Fig. 8 is equivalent to planimetric map, and Fig. 9 is equivalent to outboard profile.
In Fig. 8; G representes the substrate as the LCD that removes electric object of ion generator 300 etc., and imagination uses the electric charge flat panel monitor of each above-mentioned embodiment to implement to be configured in position relation as shown in the figure the situation of performance evaluation of 3 ion generators 300 of this substrate G.
In Fig. 8, through the circuit that is connected in series of 33 assay plates 201,202,203 that the analyzer main body has been connected in parallel, thereby 9 assay plates of integral body are distributed to passage 1～9, and this channel number is attached in the frame of each assay plate.
Like Fig. 8, shown in Figure 9; Set a plurality of passages from the position of the length direction of the ion generator 300 that disposes corresponding to substrate G; And the corresponding respectively assay plate of these passages measured remove electricity time or ionic equilibrium, thereby can carry out the performance evaluation of many ion generators 300 effectively.
Figure 10～Figure 13 is the mensuration result's of the expression embodiment of the present invention routine figure of demonstration.
Figure 10 is to each channel C H1～CH9 shown in Figure 9; Summary shown the positive voltage of attenuation measurement pattern die-away time (+t), die-away time of negative voltage (t) and the example of ionic equilibrium, also shown the detected ambient environmental conditions by said sensor part 102g in the lump.
As display packing; Consider as inferior method: die-away time (+t), (t) and the numerical value of ionic equilibrium surpassed under the situation of the 1st setting value that is equivalent to note with orange demonstration numerical value, under having surpassed greater than the situation of the 2nd setting value of the 1st setting value with red display numerical value to warn.
In addition, these are measured the result and are stored in the analyzer main body, and can also be sent to upper surveillance as required, perhaps read from the personal computer of outside through wired or wireless communication.
Figure 11 is the example that the determination data identical with Figure 10 shown with two-dimensional approach corresponding to the position of each channel C H1～CH9.
In addition, Figure 12, Figure 13 be with curve display the example of state of the ionic equilibrium in each passage, Figure 12 is the example of summarizing under the situation that has shown a plurality of passages, Figure 13 is the example that has shown each passage respectively.In addition, transverse axis is the position on each assay plate (dull and stereotyped main body), and the longitudinal axis is positive and negative current potential.The characteristic line of considering each curve shows look or line kind by each channel change.
As above illustrated, according to each embodiment, through 1 analyzer main body is connected the assay plate of necessary platform number, thus can use 1 electric charge flat panel monitor estimate long size ion generator remove electrical property, ionic equilibrium performance.
Claims (3)
1. electric charge flat panel monitor; It is the positive and negative ion that generates by ion generator detecting by assay plate; And estimate the electric charge flat panel monitor of the ionic equilibrium performance of removing electrical property and positive and negative ion of said ion generator; And also being the current potential that will be used for measuring the said assay plate that has applied assigned voltage in advance decays to the function of the die-away time till the setting and is included in the electric charge flat panel monitor that an analyzer main body constitutes based on the function that the current potential of said assay plate is measured ionic equilibrium by said ion; It is characterized in that
With corresponding and comprise many said assay plates, with these assay plates parallel connections or be connected in series to said analyzer main body as the length of the said ion generator of evaluation object.
2. electric charge flat panel monitor as claimed in claim 1 is characterized in that,
Said analyzer main body comprises:
Display part shows said die-away time and the mensuration result of ionic equilibrium in many said assay plates respectively.
3. according to claim 1 or claim 2 electric charge flat panel monitor is characterized in that,
Many said assay plates are set the address respectively, and said analyzer main body is handled the determination data of each assay plate according to said address.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-250378 | 2010-11-09 | ||
| JP2010250378A JP2012103056A (en) | 2010-11-09 | 2010-11-09 | Charge plate monitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102565568A true CN102565568A (en) | 2012-07-11 |
Family
ID=46267502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103539778A Pending CN102565568A (en) | 2010-11-09 | 2011-11-09 | Charge plate monitor |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2012103056A (en) |
| KR (1) | KR20120049780A (en) |
| CN (1) | CN102565568A (en) |
| TW (1) | TW201219800A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336214A (en) * | 2013-07-10 | 2013-10-02 | 深圳市华星光电技术有限公司 | Monitoring device and monitoring method of electrostatic eliminator |
| CN110888154A (en) * | 2018-09-10 | 2020-03-17 | Nrd有限责任公司 | Ionizer monitoring system and ion sensor |
| CN112858800A (en) * | 2019-11-27 | 2021-05-28 | 鸿劲精密股份有限公司 | Charge detection device of operation classification equipment |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101629915B1 (en) | 2015-02-17 | 2016-06-13 | (주)동일기연 | Charge plate monitoring Apparatus |
| KR102036009B1 (en) * | 2017-12-05 | 2019-10-24 | 은성훈 | Ion Detecting Device |
| KR102148644B1 (en) * | 2019-03-13 | 2020-08-28 | 주식회사 네오세미텍 | System and method for managing total ion |
| KR102122268B1 (en) * | 2019-03-15 | 2020-06-16 | 주식회사 제이테피언스 | System for preventing static electricity generation through each location decay time measurement and the method thereof |
| KR102280765B1 (en) * | 2021-02-05 | 2021-07-21 | 지문영 | Apparatus for evaluating performance of ionizer and its method |
| CN112986761B (en) * | 2021-02-08 | 2022-08-16 | 苏州天华超净科技股份有限公司 | Method for monitoring working performance of electrostatic eliminator |
| KR102493135B1 (en) * | 2021-02-18 | 2023-01-30 | 김선철 | Charge Plate Monitor with small charging plate based on network |
| KR102504492B1 (en) * | 2021-03-29 | 2023-02-28 | (주)선재하이테크 | Sensor module for electrostatic charge measurement and system for electrostatic charge monitoring using the same |
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- 2011-02-11 KR KR1020110012270A patent/KR20120049780A/en not_active Application Discontinuation
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| CN1951159A (en) * | 2004-05-26 | 2007-04-18 | 修谷鲁电子机器股份有限公司 | Neutralization apparatus |
| JP2007180074A (en) * | 2005-12-27 | 2007-07-12 | Olympus Corp | Static electricity detection device, and substrate inspection device |
| JP2008112707A (en) * | 2006-10-03 | 2008-05-15 | Shishido Seidenki Kk | Charge monitoring device, and method for evaluating performance of ion generating device |
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| CN103336214A (en) * | 2013-07-10 | 2013-10-02 | 深圳市华星光电技术有限公司 | Monitoring device and monitoring method of electrostatic eliminator |
| WO2015003375A1 (en) * | 2013-07-10 | 2015-01-15 | 深圳市华星光电技术有限公司 | Monitoring device and monitoring method for static electricity eliminator |
| CN110888154A (en) * | 2018-09-10 | 2020-03-17 | Nrd有限责任公司 | Ionizer monitoring system and ion sensor |
| CN112858800A (en) * | 2019-11-27 | 2021-05-28 | 鸿劲精密股份有限公司 | Charge detection device of operation classification equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012103056A (en) | 2012-05-31 |
| TW201219800A (en) | 2012-05-16 |
| KR20120049780A (en) | 2012-05-17 |
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Application publication date: 20120711 |