WO2015003375A1 - Monitoring device and monitoring method for static electricity eliminator - Google Patents

Monitoring device and monitoring method for static electricity eliminator Download PDF

Info

Publication number
WO2015003375A1
WO2015003375A1 PCT/CN2013/079252 CN2013079252W WO2015003375A1 WO 2015003375 A1 WO2015003375 A1 WO 2015003375A1 CN 2013079252 W CN2013079252 W CN 2013079252W WO 2015003375 A1 WO2015003375 A1 WO 2015003375A1
Authority
WO
WIPO (PCT)
Prior art keywords
static electricity
static eliminator
programmable logic
electrostatic
static
Prior art date
Application number
PCT/CN2013/079252
Other languages
French (fr)
Chinese (zh)
Inventor
齐明虎
林昆贤
汪永强
舒志优
杨卫兵
陈增宏
杨国坤
李晨阳子
蒋运芍
Original Assignee
深圳市华星光电技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Publication of WO2015003375A1 publication Critical patent/WO2015003375A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2827—Testing of electronic protection circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing

Definitions

  • the invention relates to a monitoring device for a static eliminator and a monitoring method thereof. Background technique
  • a static eliminator for example, an ion fan
  • the static eliminator neutralizes the static electricity on the surface of the glass substrate by the positive and negative ions generated by the static eliminator. Effectively prevent the glass substrate from being damaged by static electricity.
  • the performance of the static eliminator needs to be regularly checked to ensure its normal operation. At present, the performance of the static eliminator is detected in the production process, usually by the operator holding a hand-held static measuring instrument, and the performance of the static eliminator is regularly tested at a fixed time, which is time consuming and laborious, and greatly increases the cost.
  • an object of the present invention is to provide a monitoring device for a static eliminator, comprising: an electrostatic measuring sensor, a charging plate and a charged ion generated by the static eliminator, and
  • the static electricity measuring sensor collects neutralization data, and the neutralization data is a time required for the voltage value of the voltage on the charged plate recorded by the static electricity measuring sensor to decrease to a preset voltage value;
  • the static electricity measuring controller analyzes that the performance of the static eliminator is normal, the static eliminator is in a normal working state, and the time recorded by the static electricity measuring sensor is less than the preset time.
  • the static electricity measuring controller analyzes the performance of the static eliminator The static eliminator in abnormal a working state; a programmable logic controller, communicating with the static electricity measuring controller, and the programmable logic controller controls whether the alarm device sends an alarm signal based on an analysis result of the static electricity measuring controller, wherein When the programmable logic controller receives the result that the static electricity measuring controller analyzes the performance of the static eliminator, the programmable logic controller controls the alarm device not to issue an alarm signal; when the programmable When the logic controller receives the result that the static electricity measuring controller analyzes the performance abnormality of the static eliminator, the programmable logic controller controls the alarm device to send an alarm signal to remind the worker to eliminate the static electricity. Check and repair.
  • the alarm device is a human-computer interaction interface.
  • Another object of the present invention is to provide a monitoring device for a static eliminator, comprising: an electrostatic measuring sensor, a charged ion generated in the charging plate and the static eliminator, and the static measuring sensor collecting the neutralizing data
  • An electrostatic measurement controller configured to supply a voltage to a charged plate of the electrostatic measurement sensor and provide a control signal to the electrostatic measurement sensor, and the electrostatic measurement controller analyzes the neutralization data; programmable logic control Communicating with the electrostatic measurement controller, and the programmable logic controller controls whether the alarm device issues an alarm signal based on an analysis result of the electrostatic measurement controller.
  • Still another object of the present invention is to provide a monitoring method of a static eliminator, comprising: ???starting an electrostatic measuring sensor; and an electrostatic measuring controller supplying a voltage to a charging plate of the electrostatic measuring sensor; The charged ion generated by the static eliminator, and the static measuring sensor collects neutralizing data; the static measuring controller analyzes the neutralized data; and the programmable logic controller controls whether the alarm device is based on the analysis result An alarm signal is issued.
  • the neutralization data is a time required for the voltage value of the voltage on the charged board recorded by the electrostatic measurement sensor to decrease to a preset voltage value.
  • the static electricity measuring controller analyzes that the performance of the static electricity canceller is normal, the static electricity canceller is in a normal working state;
  • the static electricity measurement controller analyzes that the performance of the static eliminator is abnormal, and the static eliminator is in an abnormal working state.
  • the programmable logic controller controls the alarm device not to send And outputting an alarm signal; when the programmable logic controller receives the result that the static electricity measuring controller analyzes the performance abnormality of the static eliminator, the programmable logic controller controls the alarm device to issue an alarm signal, To remind the staff to check and repair the static eliminator.
  • the alarm device is a human-computer interaction interface. The monitoring device of the static eliminator of the invention and the monitoring method thereof can effectively monitor the performance status of the static eliminator, and if the monitoring static eliminator is abnormal, by generating an alarm signal, the worker is reminded to check the static eliminator.
  • FIG. 1 is a schematic diagram of a monitoring device of a static eliminator according to an embodiment of the present invention.
  • FIG. 1 is a schematic diagram of a monitoring device of a static eliminator according to an embodiment of the present invention. Referring to FIG.
  • a monitoring device of a static eliminator may include an electrostatic measurement sensor 10, an electrostatic measurement controller 11, and a programmable logic controller 12.
  • the glass substrate 15 can be removed from the process device 14 using the robot arm 13, and the static eliminator 16 can be disposed above the exit of the process device 14.
  • the static eliminator 16 generates positive and negative ions to neutralize the static electricity on the surface of the glass substrate 15, which can effectively prevent the glass substrate 15 from being electrostatically injured.
  • an electrostatic measurement sensor 10 may be mounted at the front end of the robot arm 13, and the electrostatic measurement sensor 10 is adjacent to the static eliminator 16. Electrostatic measuring sensor 10 The charged plate 101 can carry voltages of different polarities to neutralize the positive and negative ions generated by the static eliminator 16.
  • the charged plate 101 of the electrostatic measuring sensor 10 can carry a positive voltage to neutralize the negative ions generated by the static eliminator 16, or
  • the charged plate 101 of the static electricity measuring sensor 10 can carry a negative voltage to neutralize the positive ions generated by the static eliminator 16, while at the same time, the static electricity measuring sensor 10 collects the neutralization data during the neutralization process, wherein the neutralization data refers to It is the time required for the voltage value of the voltage on the charging plate 101 recorded by the electrostatic measuring sensor 10 to drop to a predetermined voltage value.
  • the static electricity measuring controller 11 can be built in the robot arm 13.
  • the static electricity measuring controller 11 can be used to supply voltages of different polarities to the charging plate 101 of the static electricity measuring sensor 10 and control signals to the static electricity measuring sensor 10 to control the working state of the static electricity measuring sensor 10, for example, the electrostatic measuring controller 11 can
  • the electrostatic measurement sensor 10 provides an activation signal to cause the electrostatic measurement sensor 10 to be activated and operated, or the electrostatic measurement controller 11 can also provide a transmission signal to the electrostatic measurement sensor 10 such that the electrostatic measurement sensor 10 transmits the neutralization data to the electrostatic measurement controller 11 .
  • the static electricity measuring controller 11 can analyze the neutralized data after receiving the neutralization data, and output the result of the analysis.
  • a Programmable Logic Controller 12 can be built into the robot arm 13. Programmable logic controller 12 can be used to control the operation of robotic arm 13.
  • the programmable logic controller 12 can communicate with the electrostatic measurement controller 11 such that the electrostatic measurement controller 11 transmits the results of its analysis to the programmable logic controller 12, which is based on the analysis of the electrostatic measurement controller 11. The result is to control whether the alarm device issues an alarm signal. For example, when the time recorded by the static electricity measuring sensor 10 is not less than a certain preset time, the static electricity measuring controller 11 analyzes that the static electricity canceller 16 has normal performance, the static electricity canceller 16 is in a normal working state, and the programmable logic controller 12 controls the alarm.
  • the device does not issue an alarm signal; when the time recorded by the static electricity measuring sensor 10 is less than a certain preset time, the static electricity measuring controller 11 analyzes that the static electricity canceller 16 has abnormal performance, and the static electricity canceller 16 is in an abnormal working state, the programmable logic controller 12 The control alarm device sends an alarm signal to remind the staff to check and repair the static eliminator 16.
  • the measurement frequency of the electrostatic measurement sensor 10 can be artificially set, for example, it can be set to be detected three times a month.
  • the position and height of the electrostatic measuring sensor 10 and the like can be set by the programmable logic controller 12 built in the robot arm 13 to more effectively monitor the performance status of the static eliminator 16.
  • the alarm device may be a human-machine interaction interface mounted on the robot arm 13.
  • the human-computer interaction interface can be, for example, a touch screen.
  • the programmable logic controller 12 controls the touch screen to emit red light to remind the worker.
  • the touch The screen can also be used to present various status data of the electrostatic measurement controller 11, for example, a voltage value of a voltage supplied from the electrostatic measurement controller 11 to the charging plate 101 of the electrostatic measurement sensor 10, the process of which drops to a preset voltage value Any of the voltage values, and the time required for the voltage value to fall to the preset voltage value.
  • the invention also provides a monitoring method of a static eliminator. 2 is a flow chart of a method of monitoring a static eliminator in accordance with an embodiment of the present invention. Referring to FIG. 1 and FIG. 2 together, a monitoring method of a static eliminator according to an embodiment of the present invention may include:
  • the static electricity measuring controller 11 supplies a voltage to the charging plate 101 of the static electricity measuring sensor 10;
  • step S5 The programmable logic controller 12 controls whether the alarm device issues an alarm signal based on the analysis result of the electrostatic measurement controller 11.
  • the neutralization data refers to a process in which the voltage value of the voltage on the charged plate 101 is decreased to a predetermined voltage value, and the electrostatic measurement sensor 10 records the voltage value of the voltage on the charged plate 101 to fall to the The time required to preset the voltage value.
  • step S4 when the time recorded by the static electricity measuring sensor 10 is not less than a certain preset time, the static electricity measuring controller 11 analyzes that the static electricity canceller 16 has normal performance, and the static electricity canceller 16 is in a normal working state; When the recorded time is less than a certain preset time, the static electricity measuring controller 11 analyzes that the static eliminator 16 is abnormal in performance, and the static eliminator 16 is in an abnormal working state.
  • step S5 when the programmable logic controller 12 receives the result that the static electricity measuring controller 11 analyzes the performance of the static eliminator 16, the programmable logic controller 12 controls the alarm device not to issue an alarm signal; When the controller 12 receives the result that the static electricity measuring controller 11 analyzes the abnormality of the static eliminator 16, the programmable logic controller 12 controls the alarm device to issue an alarm signal to remind the worker to check and repair the static eliminator 16.
  • the alarm device may be a human-computer interaction interface, such as a touch screen or the like.
  • the programmable logic controller 12 can control the phenomenon that the touch screen emits red light to remind the worker.
  • the touch screen can also be used to present various state data of the static electricity measuring controller 11, for example, a voltage value of a voltage supplied from the static electricity measuring controller 11 to the charging plate 101 of the static electricity measuring sensor 10, and the voltage value drops to a preset voltage. Any voltage value in the process of the value, and the time required for the voltage value to fall to the preset voltage value.
  • the monitoring device of the static eliminator according to the embodiment of the present invention and the monitoring method thereof can effectively monitor the performance status of the static eliminator, and if an abnormality occurs in the monitoring static eliminator, an alarm signal is generated, and the alarm is timely
  • the staff inspects and repairs the static eliminator to minimize the possibility of electrostatic damage to the product.
  • the static eliminator is not required to be detected by the worker, which saves manpower and saves time. Reduced costs.

Abstract

Disclosed are a monitoring device and monitoring method for a static electricity eliminator. The monitoring device comprises: a static electricity measurement sensor (10), wherein an electrification plate (101) thereof neutralizes charged ions generated by a static electricity eliminator (16), and the static electricity measurement sensor (10) collects neutralization data; a static electricity measurement controller (11) which is used for providing a voltage for the electrification plate (101) of the static electricity measurement sensor (10) and providing a control signal for the static electricity measurement sensor (10), and the static electricity measurement controller (11) analyses the neutralization data; and a programmable logic controller (12) which is in communication with the static electricity measurement controller (11), and the programmable logic controller (12) controls an alarm device whether to send out an alarm signal on the basis of the analysis result of the static electricity measurement controller (11). The monitoring device and monitoring method for the static electricity eliminator can effectively monitor the performance state of the the static electricity eliminator, which not only save human power but also saves time, so that the cost is effectively reduced.

Description

说 明 书 静电消除器的监控装置及其监控方法 技术领域  Description of the invention The monitoring device of the static eliminator and the monitoring method thereof
本发明涉及一种静电消除器的监控装置及其监控方法。 背景技术  The invention relates to a monitoring device for a static eliminator and a monitoring method thereof. Background technique
在工业生产中， 静电往往通过摩擦和接触而产生于产品上， 其危害是有目 共睹的。 现在， 越来越多的生产商开始采取各种措施在产品的生产过程中消除 静电。 例如在液晶显示领域中， 液晶显示面板的制作过程中， 玻璃基板表面的 静电会将周围环境中的粉尘颗粒吸附于该玻璃基板表面上， 因而造成污染及静 电障碍， 同时也极易损害玻璃基板上的电路，进而影响产品的性能，造成损失。 为了消除玻璃基板表面的静电， 在机器人手臂搬取玻璃基板的位置安装有静电 消除器 （例如： 离子风机）， 静电消除器通过其产生的正负离子来中和掉玻璃 基板表面的静电，这样可以有效防止玻璃基板被静电击伤。但是在生产过程中， 需要对静电消除器的性能做定期的检测， 以保证其能够正常运行。 目前在生产过程中对静电消除器性能的检测，通常是由操作人员持着手持 式静电测量仪， 定点定期的对静电消除器的性能进行测试， 此过程既费时又费 力， 大大增加了成本。 发明内容 为了解决上述现有技术存在的问题， 本发明的目的在于提供一种静电消除 器的监控装置， 其包括： 静电测量传感器， 其带电板中和所述静电消除器产生 的带电离子， 并且所述静电测量传感器收集中和数据， 所述中和数据为所述静 电测量传感器记录的所述带电板上电压的电压值下降到一预设电压值所需要 的时间； 静电测量控制器， 用于向所述静电测量传感器的带电板提供电压以及 向所述静电测量传感器提供控制信号， 并且所述静电测量控制器对所述中和数 据进行分析， 其中， 当所述静电测量传感器记录的时间不小于一预设时间时， 所述静电测量控制器分析出所述静电消除器的性能正常， 所述静电消除器处于 正常工作状态； 当所述静电测量传感器记录的时间小于所述预设时间时， 所述 静电测量控制器分析出所述静电消除器的性能异常， 所述静电消除器处于异常 工作状态； 可编程逻辑控制器， 与所述静电测量控制器进行通讯， 并且所述可 编程逻辑控制器基于所述静电测量控制器的分析结果来控制报警装置是否发 出报警信号， 其中， 当所述可编程逻辑控制器接收到所述静电测量控制器分析 出所述静电消除器的性能正常的结果时， 所述可编程逻辑控制器控制所述报警 装置不发出报警信号； 当所述可编程逻辑控制器接收到所述静电测量控制器分 析出所述静电消除器的性能异常的结果时， 所述可编程逻辑控制器控制所述报 警装置发出报警信号， 以提醒工作人员对所述静电消除器进行检査并维修。 此外， 所述报警装置为人机交互界面。 本发明的另一目的还在于提供一种静电消除器的监控装置， 其包括： 静电 测量传感器， 其带电板中和所述静电消除器产生的带电离子， 并且所述静电测 量传感器收集中和数据； 静电测量控制器， 用于向所述静电测量传感器的带电 板提供电压以及向所述静电测量传感器提供控制信号， 并且所述静电测量控制 器对所述中和数据进行分析； 可编程逻辑控制器， 与所述静电测量控制器进行 通讯， 并且所述可编程逻辑控制器基于所述静电测量控制器的分析结果来控制 报警装置是否发出报警信号。 本发明的又一目的还在于提供一种静电消除器的监控方法， 其包括歩骤： 启动静电测量传感器； 静电测量控制器向所述静电测量传感器的带电板提供电 压； 所述带电板中和所述静电消除器产生的带电离子， 同时， 所述静电测量传 感器收集中和数据； 所述静电测量控制器对所述中和数据进行分析； 可编程逻 辑控制器基于分析结果来控制报警装置是否发出报警信号。 此外， 所述中和数据为所述静电测量传感器记录的所述带电板上电压的电 压值下降到一预设电压值所需要的时间。 此外， 当所述静电测量传感器记录的时间不小于一预设时间时， 所述静电 测量控制器分析出所述静电消除器的性能正常，所述静电消除器处于正常工作 状态； 当所述静电测量传感器记录的时间小于所述预设时间时， 所述静电测量 控制器分析出所述静电消除器的性能异常， 所述静电消除器处于异常工作状 态。 此外， 当所述可编程逻辑控制器接收到所述静电测量控制器分析出所述静 电消除器的性能正常的结果时， 所述可编程逻辑控制器控制所述报警装置不发 出报警信号； 当所述可编程逻辑控制器接收到所述静电测量控制器分析出所述 静电消除器的性能异常的结果时， 所述可编程逻辑控制器控制所述报警装置发 出报警信号， 以提醒工作人员对所述静电消除器进行检査并维修。 此外， 所述报警装置为人机交互界面。 本发明的静电消除器的监控装置及其监控方法， 可有效地监控静电消除器 的性能状况， 如果监控静电消除器出现异常， 通过产生报警信号， 以及时提醒 工作人员对静电消除器进行检査维修， 最大程度地降低产品被静电击伤的可能 性， 同时， 不需工作人员手持静电测量仪对静电消除器进行检测， 既节省人力 又节约时间， 有效地降低了成本。 附图说明 图 1是根据本发明的实施例的静电消除器的监控装置的示意图。 In industrial production, static electricity is often produced on the product through friction and contact, and the hazards are obvious to all. Nowadays, more and more manufacturers are taking various measures to eliminate static electricity during the production process. For example, in the field of liquid crystal display, during the manufacturing process of the liquid crystal display panel, the static electricity on the surface of the glass substrate adsorbs dust particles in the surrounding environment on the surface of the glass substrate, thereby causing pollution and electrostatic obstacles, and also easily damaging the glass substrate. The circuit on the other, which in turn affects the performance of the product, causing losses. In order to eliminate the static electricity on the surface of the glass substrate, a static eliminator (for example, an ion fan) is installed at a position where the robot arm carries the glass substrate, and the static eliminator neutralizes the static electricity on the surface of the glass substrate by the positive and negative ions generated by the static eliminator. Effectively prevent the glass substrate from being damaged by static electricity. However, during the production process, the performance of the static eliminator needs to be regularly checked to ensure its normal operation. At present, the performance of the static eliminator is detected in the production process, usually by the operator holding a hand-held static measuring instrument, and the performance of the static eliminator is regularly tested at a fixed time, which is time consuming and laborious, and greatly increases the cost. SUMMARY OF THE INVENTION In order to solve the above problems in the prior art, an object of the present invention is to provide a monitoring device for a static eliminator, comprising: an electrostatic measuring sensor, a charging plate and a charged ion generated by the static eliminator, and The static electricity measuring sensor collects neutralization data, and the neutralization data is a time required for the voltage value of the voltage on the charged plate recorded by the static electricity measuring sensor to decrease to a preset voltage value; Providing a voltage to a charged plate of the electrostatic measuring sensor and providing a control signal to the static measuring sensor, and the static measuring controller analyzes the neutralized data, wherein when the electrostatic measuring sensor records the time The static electricity measuring controller analyzes that the performance of the static eliminator is normal, the static eliminator is in a normal working state, and the time recorded by the static electricity measuring sensor is less than the preset time. The static electricity measuring controller analyzes the performance of the static eliminator The static eliminator in abnormal a working state; a programmable logic controller, communicating with the static electricity measuring controller, and the programmable logic controller controls whether the alarm device sends an alarm signal based on an analysis result of the static electricity measuring controller, wherein When the programmable logic controller receives the result that the static electricity measuring controller analyzes the performance of the static eliminator, the programmable logic controller controls the alarm device not to issue an alarm signal; when the programmable When the logic controller receives the result that the static electricity measuring controller analyzes the performance abnormality of the static eliminator, the programmable logic controller controls the alarm device to send an alarm signal to remind the worker to eliminate the static electricity. Check and repair. In addition, the alarm device is a human-computer interaction interface. Another object of the present invention is to provide a monitoring device for a static eliminator, comprising: an electrostatic measuring sensor, a charged ion generated in the charging plate and the static eliminator, and the static measuring sensor collecting the neutralizing data An electrostatic measurement controller, configured to supply a voltage to a charged plate of the electrostatic measurement sensor and provide a control signal to the electrostatic measurement sensor, and the electrostatic measurement controller analyzes the neutralization data; programmable logic control Communicating with the electrostatic measurement controller, and the programmable logic controller controls whether the alarm device issues an alarm signal based on an analysis result of the electrostatic measurement controller. Still another object of the present invention is to provide a monitoring method of a static eliminator, comprising: ???starting an electrostatic measuring sensor; and an electrostatic measuring controller supplying a voltage to a charging plate of the electrostatic measuring sensor; The charged ion generated by the static eliminator, and the static measuring sensor collects neutralizing data; the static measuring controller analyzes the neutralized data; and the programmable logic controller controls whether the alarm device is based on the analysis result An alarm signal is issued. In addition, the neutralization data is a time required for the voltage value of the voltage on the charged board recorded by the electrostatic measurement sensor to decrease to a preset voltage value. In addition, when the time recorded by the static electricity measuring sensor is not less than a preset time, the static electricity measuring controller analyzes that the performance of the static electricity canceller is normal, the static electricity canceller is in a normal working state; When the time recorded by the measurement sensor is less than the preset time, the static electricity measurement controller analyzes that the performance of the static eliminator is abnormal, and the static eliminator is in an abnormal working state. In addition, when the programmable logic controller receives the result that the static electricity measuring controller analyzes the performance of the static eliminator, the programmable logic controller controls the alarm device not to send And outputting an alarm signal; when the programmable logic controller receives the result that the static electricity measuring controller analyzes the performance abnormality of the static eliminator, the programmable logic controller controls the alarm device to issue an alarm signal, To remind the staff to check and repair the static eliminator. In addition, the alarm device is a human-computer interaction interface. The monitoring device of the static eliminator of the invention and the monitoring method thereof can effectively monitor the performance status of the static eliminator, and if the monitoring static eliminator is abnormal, by generating an alarm signal, the worker is reminded to check the static eliminator. Maintenance, to minimize the possibility of electrostatic damage to the product, at the same time, does not require the staff to hold the static measuring instrument to detect the static eliminator, saving manpower and saving time, effectively reducing costs. BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a schematic diagram of a monitoring device of a static eliminator according to an embodiment of the present invention.
图 2是根据本发明的实施例的静电消除器的监控方法的流程图。 具体实施方式 现在对本发明的实施例进行详细的描述， 其示例表示在附图中， 其中， 相 同的标号始终表示相同部件。下面通过参照附图对实施例进行描述以解释本发 明。 在附图中， 为了清晰起见， 可以夸大层和区域的厚度。 在下面的描述中， 为了避免公知结构和 /或功能的不必要的详细描述所导致的本发明构思的混淆， 可省略公知结构和 /或功能的不必要的详细描述。 图 1是根据本发明的实施例的静电消除器的监控装置的示意图。 参照图 1， 根据本发明的实施例的静电消除器的监控装置可包括静电测量 传感器 10、 静电测量控制器 11和可编程逻辑控制器 12。 具体而言， 在液晶显示面板的制程中， 可使用机器人手臂 13从制程设备 14中搬取玻璃基板 15，可在制程设备 14的出口的上方设置静电消除器 16。当 机器人手臂 13从制程设备 14的出口搬取玻璃基板 15时， 静电消除器 16产生 正负离子来中和掉玻璃基板 15表面的静电， 这样可以有效防止玻璃基板 15被 静电击伤。 为了检测静电消除器 16的性能， 可在机器人手臂 13的前端安装静电测量 传感器 10，并且静电测量传感器 10邻近于静电消除器 16。静电测量传感器 10 的带电板 101可携带不同极性的电压来中和静电消除器 16产生的正负离子， 例如，静电测量传感器 10的带电板 101可携带正电压来中和静电消除器 16产 生的负离子， 或者， 静电测量传感器 10的带电板 101可携带负电压来中和静 电消除器 16产生的正离子， 与此同时， 静电测量传感器 10收集中和过程中的 中和数据， 其中， 该中和数据指的是静电测量传感器 10记录的带电板 101上 电压的电压值下降到某一预设电压值所需要的时间。 静电测量控制器 11可内置于机器人手臂 13中。 静电测量控制器 11可用 于向静电测量传感器 10的带电板 101提供不同极性的电压以及向静电测量传 感器 10提供控制信号来控制静电测量传感器 10的工作状态， 例如， 静电测量 控制器 11可向静电测量传感器 10提供启动信号来使得静电测量传感器 10启 动并工作， 或者， 静电测量控制器 11也可向静电测量传感器 10提供传送信号 使得静电测量传感器 10将中和数据传送到静电测量控制器 11。 静电测量控制 器 11在接收到中和数据后可对该中和数据进行分析， 并将分析的结果输出。 可编程逻辑控制器（Programmable Logic Controller) 12可内置于机器人手 臂 13中。 可编程逻辑控制器 12可用于控制机器人手臂 13的运作。 可编程逻 辑控制器 12可与静电测量控制器 11进行通讯， 使得静电测量控制器 11将其 分析的结果传送到可编程逻辑控制器 12， 可编程逻辑控制器 12基于静电测量 控制器 11 的分析结果来控制报警装置是否发出报警信号。 例如， 当静电测量 传感器 10记录的时间不小于某一预设时间时， 静电测量控制器 11分析出静电 消除器 16性能正常，静电消除器 16处于正常工作状态，可编程逻辑控制器 12 控制报警装置不发出报警信号； 当静电测量传感器 10记录的时间小于某一预 设时间时，静电测量控制器 11分析出静电消除器 16性能异常，静电消除器 16 处于异常工作状态， 可编程逻辑控制器 12控制报警装置发出报警信号， 以提 醒工作人员对静电消除器 16进行检査并维修。 此外， 静电测量传感器 10的测 量频率可人为设定， 例如可设为一月检测三次。 静电测量传感器 10的位置和 高度等可通过内置于机器人手臂 13的可编程逻辑控制器 12来设定， 以更加有 效地监控静电消除器 16的性能状况。 在本实施例中， 报警装置可为安装于机器人手臂 13上的人机交互界面。 人机交互界面可例如为触摸屏， 在静电消除器 16处于异常工作状态时， 可编 程逻辑控制器 12控制触摸屏发出红光等现象来提醒工作人员。 此外， 该触摸 屏也可用于呈现静电测量控制器 11 的各种状态数据， 例如， 静电测量控制器 11向静电测量传感器 10的带电板 101提供的电压的电压值， 该电压值下降到 预设电压值的过程中的任一电压值， 以及该电压值下降到预设电压值所需的时 间等。 本发明还提供了一种静电消除器的监控方法。 图 2是根据本发明的实施例 的静电消除器的监控方法的流程图。 一并参照图 1和图 2， 根据本发明的实施例的静电消除器的监控方法可包 括歩骤： 2 is a flow chart of a method of monitoring a static eliminator in accordance with an embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT OF THE INVENTION The embodiments of the present invention will now be described in detail, and in the accompanying drawings, The embodiments are described below to explain the present invention by referring to the figures. In the drawings, the thickness of layers and regions may be exaggerated for clarity. In the following description, unnecessary details of well-known structures and/or functions may be omitted in order to avoid obscuring the inventive concept of the present invention. 1 is a schematic diagram of a monitoring device of a static eliminator according to an embodiment of the present invention. Referring to FIG. 1, a monitoring device of a static eliminator according to an embodiment of the present invention may include an electrostatic measurement sensor 10, an electrostatic measurement controller 11, and a programmable logic controller 12. Specifically, in the process of the liquid crystal display panel, the glass substrate 15 can be removed from the process device 14 using the robot arm 13, and the static eliminator 16 can be disposed above the exit of the process device 14. When the robot arm 13 removes the glass substrate 15 from the exit of the processing apparatus 14, the static eliminator 16 generates positive and negative ions to neutralize the static electricity on the surface of the glass substrate 15, which can effectively prevent the glass substrate 15 from being electrostatically injured. In order to detect the performance of the static eliminator 16, an electrostatic measurement sensor 10 may be mounted at the front end of the robot arm 13, and the electrostatic measurement sensor 10 is adjacent to the static eliminator 16. Electrostatic measuring sensor 10 The charged plate 101 can carry voltages of different polarities to neutralize the positive and negative ions generated by the static eliminator 16. For example, the charged plate 101 of the electrostatic measuring sensor 10 can carry a positive voltage to neutralize the negative ions generated by the static eliminator 16, or The charged plate 101 of the static electricity measuring sensor 10 can carry a negative voltage to neutralize the positive ions generated by the static eliminator 16, while at the same time, the static electricity measuring sensor 10 collects the neutralization data during the neutralization process, wherein the neutralization data refers to It is the time required for the voltage value of the voltage on the charging plate 101 recorded by the electrostatic measuring sensor 10 to drop to a predetermined voltage value. The static electricity measuring controller 11 can be built in the robot arm 13. The static electricity measuring controller 11 can be used to supply voltages of different polarities to the charging plate 101 of the static electricity measuring sensor 10 and control signals to the static electricity measuring sensor 10 to control the working state of the static electricity measuring sensor 10, for example, the electrostatic measuring controller 11 can The electrostatic measurement sensor 10 provides an activation signal to cause the electrostatic measurement sensor 10 to be activated and operated, or the electrostatic measurement controller 11 can also provide a transmission signal to the electrostatic measurement sensor 10 such that the electrostatic measurement sensor 10 transmits the neutralization data to the electrostatic measurement controller 11 . The static electricity measuring controller 11 can analyze the neutralized data after receiving the neutralization data, and output the result of the analysis. A Programmable Logic Controller 12 can be built into the robot arm 13. Programmable logic controller 12 can be used to control the operation of robotic arm 13. The programmable logic controller 12 can communicate with the electrostatic measurement controller 11 such that the electrostatic measurement controller 11 transmits the results of its analysis to the programmable logic controller 12, which is based on the analysis of the electrostatic measurement controller 11. The result is to control whether the alarm device issues an alarm signal. For example, when the time recorded by the static electricity measuring sensor 10 is not less than a certain preset time, the static electricity measuring controller 11 analyzes that the static electricity canceller 16 has normal performance, the static electricity canceller 16 is in a normal working state, and the programmable logic controller 12 controls the alarm. The device does not issue an alarm signal; when the time recorded by the static electricity measuring sensor 10 is less than a certain preset time, the static electricity measuring controller 11 analyzes that the static electricity canceller 16 has abnormal performance, and the static electricity canceller 16 is in an abnormal working state, the programmable logic controller 12 The control alarm device sends an alarm signal to remind the staff to check and repair the static eliminator 16. Further, the measurement frequency of the electrostatic measurement sensor 10 can be artificially set, for example, it can be set to be detected three times a month. The position and height of the electrostatic measuring sensor 10 and the like can be set by the programmable logic controller 12 built in the robot arm 13 to more effectively monitor the performance status of the static eliminator 16. In this embodiment, the alarm device may be a human-machine interaction interface mounted on the robot arm 13. The human-computer interaction interface can be, for example, a touch screen. When the static eliminator 16 is in an abnormal working state, the programmable logic controller 12 controls the touch screen to emit red light to remind the worker. In addition, the touch The screen can also be used to present various status data of the electrostatic measurement controller 11, for example, a voltage value of a voltage supplied from the electrostatic measurement controller 11 to the charging plate 101 of the electrostatic measurement sensor 10, the process of which drops to a preset voltage value Any of the voltage values, and the time required for the voltage value to fall to the preset voltage value. The invention also provides a monitoring method of a static eliminator. 2 is a flow chart of a method of monitoring a static eliminator in accordance with an embodiment of the present invention. Referring to FIG. 1 and FIG. 2 together, a monitoring method of a static eliminator according to an embodiment of the present invention may include:
S1 : 启动静电测量传感器 10; S1: starting the electrostatic measuring sensor 10;
S2: 静电测量控制器 11向静电测量传感器 10的带电板 101提供电压；  S2: The static electricity measuring controller 11 supplies a voltage to the charging plate 101 of the static electricity measuring sensor 10;
S3： 带电板 101中和静电消除器 16产生的带电离子， 同时， 静电测量传 感器 10收集中和数据； S3: The charged plate 101 neutralizes the charged ions generated by the static eliminator 16, and at the same time, the electrostatic measuring sensor 10 collects the neutralized data;
S4: 静电测量控制器 11对中和数据进行分析； S4: The electrostatic measurement controller 11 analyzes the neutralization data;
S5: 可编程逻辑控制器 12基于静电测量控制器 11的分析结果来控制报警 装置是否发出报警信号。 在歩骤 S3中， 中和数据指的是在带电板 101上电压的电压值下降到预设 电压值的过程中， 静电测量传感器 10记录所述带电板 101上电压的电压值下 降到所述预设电压值所需要的时间。 在歩骤 S4中， 当静电测量传感器 10记录的时间不小于某一预设时间时， 静电测量控制器 11分析出静电消除器 16性能正常， 静电消除器 16处于正常 工作状态； 当静电测量传感器 10记录的时间小于某一预设时间时， 静电测量 控制器 11分析出静电消除器 16性能异常， 静电消除器 16处于异常工作状态。 在歩骤 S5中， 当可编程逻辑控制器 12接收到静电测量控制器 11分析出 静电消除器 16性能正常的结果时， 可编程逻辑控制器 12控制报警装置不发出 报警信号； 当可编程逻辑控制器 12接收到静电测量控制器 11分析出静电消除 器 16性能异常的结果时， 可编程逻辑控制器 12控制报警装置发出报警信号， 以提醒工作人员对静电消除器 16进行检査并维修。 在歩骤 S5 中， 报警装置可为人机交互界面， 例如触摸屏等。 在静电消除 器 16处于异常工作状态时， 可编程逻辑控制器 12可控制触摸屏发出红光等现 象来提醒工作人员。 此外， 该触摸屏也可用于呈现静电测量控制器 11 的各种 状态数据， 例如， 静电测量控制器 11向静电测量传感器 10的带电板 101提供 的电压的电压值， 该电压值下降到预设电压值的过程中的任一电压值， 以及该 电压值下降到预设电压值所需的时间等。 综上所述， 根据本发明的实施例的静电消除器的监控装置及其监控方法， 可有效地监控静电消除器的性能状况， 如果监控静电消除器出现异常， 通过产 生报警信号， 以及时提醒工作人员对静电消除器进行检査维修， 最大程度地降 低产品被静电击伤的可能性， 同时， 不需工作人员手持静电测量仪对静电消除 器进行检测， 既节省人力又节约时间， 有效地降低了成本。 S5: The programmable logic controller 12 controls whether the alarm device issues an alarm signal based on the analysis result of the electrostatic measurement controller 11. In step S3, the neutralization data refers to a process in which the voltage value of the voltage on the charged plate 101 is decreased to a predetermined voltage value, and the electrostatic measurement sensor 10 records the voltage value of the voltage on the charged plate 101 to fall to the The time required to preset the voltage value. In step S4, when the time recorded by the static electricity measuring sensor 10 is not less than a certain preset time, the static electricity measuring controller 11 analyzes that the static electricity canceller 16 has normal performance, and the static electricity canceller 16 is in a normal working state; When the recorded time is less than a certain preset time, the static electricity measuring controller 11 analyzes that the static eliminator 16 is abnormal in performance, and the static eliminator 16 is in an abnormal working state. In step S5, when the programmable logic controller 12 receives the result that the static electricity measuring controller 11 analyzes the performance of the static eliminator 16, the programmable logic controller 12 controls the alarm device not to issue an alarm signal; When the controller 12 receives the result that the static electricity measuring controller 11 analyzes the abnormality of the static eliminator 16, the programmable logic controller 12 controls the alarm device to issue an alarm signal to remind the worker to check and repair the static eliminator 16. In step S5, the alarm device may be a human-computer interaction interface, such as a touch screen or the like. When the static eliminator 16 is in an abnormal working state, the programmable logic controller 12 can control the phenomenon that the touch screen emits red light to remind the worker. In addition, the touch screen can also be used to present various state data of the static electricity measuring controller 11, for example, a voltage value of a voltage supplied from the static electricity measuring controller 11 to the charging plate 101 of the static electricity measuring sensor 10, and the voltage value drops to a preset voltage. Any voltage value in the process of the value, and the time required for the voltage value to fall to the preset voltage value. In summary, the monitoring device of the static eliminator according to the embodiment of the present invention and the monitoring method thereof can effectively monitor the performance status of the static eliminator, and if an abnormality occurs in the monitoring static eliminator, an alarm signal is generated, and the alarm is timely The staff inspects and repairs the static eliminator to minimize the possibility of electrostatic damage to the product. At the same time, the static eliminator is not required to be detected by the worker, which saves manpower and saves time. Reduced costs.
尽管已经参照其示例性实施例具体显示和描述了本发明，但是本领域的技 术人员应该理解， 在不脱离权利要求所限定的本发明的精神和范围的情况下， 可以对其进行形式和细节上的各种改变。  Although the present invention has been particularly shown and described with reference to the exemplary embodiments thereof, those skilled in the art Various changes on it.

Claims

权利要求书 claims
1、 一种静电消除器的监控装置， 其中， 所述监控装置包括： 静电测量传感器， 其带电板中和所述静电消除器产生的带电离子， 并且所 述静电测量传感器收集中和数据， 所述中和数据为所述静电测量传感器记录的 所述带电板上电压的电压值下降到一预设电压值所需要的时间； 静电测量控制器， 用于向所述静电测量传感器的带电板提供电压以及向所 述静电测量传感器提供控制信号， 并且所述静电测量控制器对所述中和数据进 行分析， 其中， 当所述静电测量传感器记录的时间不小于一预设时间时， 所述 静电测量控制器分析出所述静电消除器的性能正常， 所述静电消除器处于正常 工作状态； 当所述静电测量传感器记录的时间小于所述预设时间时， 所述静电 测量控制器分析出所述静电消除器的性能异常，所述静电消除器处于异常工作 状态； 可编程逻辑控制器， 与所述静电测量控制器进行通讯， 并且所述可编程逻 辑控制器基于所述静电测量控制器的分析结果来控制报警装置是否发出报警 信号， 其中， 当所述可编程逻辑控制器接收到所述静电测量控制器分析出所述 静电消除器的性能正常的结果时， 所述可编程逻辑控制器控制所述报警装置不 发出报警信号； 当所述可编程逻辑控制器接收到所述静电测量控制器分析出所 述静电消除器的性能异常的结果时， 所述可编程逻辑控制器控制所述报警装置 发出报警信号， 以提醒工作人员对所述静电消除器进行检査并维修。 1. A monitoring device for a static eliminator, wherein the monitoring device includes: an electrostatic measurement sensor whose charged plate neutralizes the charged ions generated by the static eliminator, and the electrostatic measurement sensor collects neutralization data, so The neutralization data is the time required for the voltage value of the voltage on the charged plate recorded by the electrostatic measurement sensor to drop to a preset voltage value; an electrostatic measurement controller, used to provide the voltage value to the charged plate of the electrostatic measurement sensor. voltage and a control signal is provided to the electrostatic measurement sensor, and the electrostatic measurement controller analyzes the neutralization data, wherein when the time recorded by the electrostatic measurement sensor is not less than a preset time, the electrostatic measurement sensor The measurement controller analyzes that the performance of the static eliminator is normal and that the static eliminator is in a normal working state; when the time recorded by the electrostatic measurement sensor is less than the preset time, the electrostatic measurement controller analyzes that the static eliminator is in normal working condition. The performance of the static eliminator is abnormal, and the static eliminator is in an abnormal working state; a programmable logic controller communicates with the electrostatic measurement controller, and the programmable logic controller is based on the electrostatic measurement controller. Analyze the results to control whether the alarm device issues an alarm signal, wherein, when the programmable logic controller receives the result that the static electricity measurement controller analyzes that the performance of the static eliminator is normal, the programmable logic controller The alarm device is controlled not to issue an alarm signal; when the programmable logic controller receives the result that the static electricity measurement controller analyzes the abnormal performance of the static eliminator, the programmable logic controller controls the The alarm device sends out an alarm signal to remind the staff to inspect and repair the static eliminator.
2、 根据权利要求 1所述的监控装置， 其中， 所述报警装置为人机交互界 面。 2. The monitoring device according to claim 1, wherein the alarm device is a human-computer interaction interface.
3、 一种静电消除器的监控装置， 其中， 所述监控装置包括： 静电测量传感器， 其带电板中和所述静电消除器产生的带电离子， 并且所 述静电测量传感器收集中和数据； 静电测量控制器， 用于向所述静电测量传感器的带电板提供电压以及向所 述静电测量传感器提供控制信号， 并且所述静电测量控制器对所述中和数据进 行分析； 可编程逻辑控制器， 与所述静电测量控制器进行通讯， 并且所述可编程逻 辑控制器基于所述静电测量控制器的分析结果来控制报警装置是否发出报警 信号。 3. A monitoring device for a static eliminator, wherein the monitoring device includes: a static electricity measurement sensor whose charged plate neutralizes the charged ions generated by the static electricity eliminator, and the static electricity measurement sensor collects neutralization data; static electricity a measurement controller configured to provide a voltage to the charged plate of the electrostatic measurement sensor and a control signal to the electrostatic measurement sensor, and the electrostatic measurement controller analyzes the neutralization data; A programmable logic controller communicates with the electrostatic measurement controller, and the programmable logic controller controls whether the alarm device issues an alarm signal based on the analysis results of the electrostatic measurement controller.
4、 根据权利要求 3所述的监控装置， 其中， 所述中和数据为所述静电测 量传感器记录的所述带电板上电压的电压值下降到一预设电压值所需要的时 间。 4. The monitoring device according to claim 3, wherein the neutralization data is the time required for the voltage value of the voltage on the charged plate recorded by the electrostatic measurement sensor to drop to a preset voltage value.
5、 根据权利要求 4所述的监控装置， 其中， 当所述静电测量传感器记录 的时间不小于一预设时间时，所述静电测量控制器分析出所述静电消除器的性 能正常， 所述静电消除器处于正常工作状态； 当所述静电测量传感器记录的时 间小于所述预设时间时， 所述静电测量控制器分析出所述静电消除器的性能异 常， 所述静电消除器处于异常工作状态。 5. The monitoring device according to claim 4, wherein when the time recorded by the electrostatic measurement sensor is not less than a preset time, the electrostatic measurement controller analyzes that the performance of the static eliminator is normal, The static eliminator is in a normal working state; when the time recorded by the static electricity measurement sensor is less than the preset time, the static electricity measurement controller analyzes that the performance of the static eliminator is abnormal, and the static eliminator is in abnormal operation. state.
6、 根据权利要求 5所述的监控装置， 其中， 当所述可编程逻辑控制器接 收到所述静电测量控制器分析出所述静电消除器的性能正常的结果时，所述可 编程逻辑控制器控制所述报警装置不发出报警信号； 当所述可编程逻辑控制器 接收到所述静电测量控制器分析出所述静电消除器的性能异常的结果时， 所述 可编程逻辑控制器控制所述报警装置发出报警信号， 以提醒工作人员对所述静 电消除器进行检査并维修。 6. The monitoring device according to claim 5, wherein when the programmable logic controller receives the result that the static electricity measurement controller analyzes that the performance of the static eliminator is normal, the programmable logic controller The programmable logic controller controls the alarm device not to send out an alarm signal; when the programmable logic controller receives the result that the static electricity measurement controller analyzes the abnormal performance of the static eliminator, the programmable logic controller controls the The alarm device sends an alarm signal to remind the staff to inspect and repair the static eliminator.
7、 根据权利要求 1所述的监控装置， 其中， 所述报警装置为人机交互界 面。 7. The monitoring device according to claim 1, wherein the alarm device is a human-computer interaction interface.
8、 一种静电消除器的监控方法， 其中， 所述监控方法包括歩骤： 启动静电测量传感器； 静电测量控制器向所述静电测量传感器的带电板提供电压； 所述带电板中和所述静电消除器产生的带电离子， 同时， 所述静电测量传 感器收集中和数据； 所述静电测量控制器对所述中和数据进行分析； 可编程逻辑控制器基于分析结果来控制报警装置是否发出报警信号。 8. A monitoring method for a static eliminator, wherein the monitoring method includes steps: starting an electrostatic measurement sensor; an electrostatic measurement controller providing voltage to a charged plate of the electrostatic measurement sensor; the charged plate neutralizing the The electrostatic eliminator generates charged ions. At the same time, the electrostatic measurement sensor collects neutralization data; the electrostatic measurement controller analyzes the neutralization data; and the programmable logic controller controls whether the alarm device issues an alarm based on the analysis results. Signal.
9、 根据权利要求 8所述的监控方法， 其中， 所述中和数据为所述静电测 量传感器记录的所述带电板上电压的电压值下降到一预设电压值所需要的时 间。 9. The monitoring method according to claim 8, wherein the neutralization data is the electrostatic measurement The time required for the voltage value of the voltage on the live plate recorded by the quantity sensor to drop to a preset voltage value.
10、 根据权利要求 9所述的监控方法， 其中， 当所述静电测量传感器记录 的时间不小于一预设时间时，所述静电测量控制器分析出所述静电消除器的性 能正常， 所述静电消除器处于正常工作状态； 当所述静电测量传感器记录的时 间小于所述预设时间时， 所述静电测量控制器分析出所述静电消除器的性能异 常， 所述静电消除器处于异常工作状态。 10. The monitoring method according to claim 9, wherein when the time recorded by the electrostatic measurement sensor is not less than a preset time, the electrostatic measurement controller analyzes that the performance of the static eliminator is normal, The static eliminator is in a normal working state; when the time recorded by the static electricity measurement sensor is less than the preset time, the static electricity measurement controller analyzes that the performance of the static eliminator is abnormal, and the static eliminator is in abnormal operation. state.
11、 根据权利要求 10所述的监控方法， 其中， 当所述可编程逻辑控制器 接收到所述静电测量控制器分析出所述静电消除器的性能正常的结果时， 所述 可编程逻辑控制器控制所述报警装置不发出报警信号； 当所述可编程逻辑控制 器接收到所述静电测量控制器分析出所述静电消除器的性能异常的结果时， 所 述可编程逻辑控制器控制所述报警装置发出报警信号， 以提醒工作人员对所述 静电消除器进行检査并维修。 11. The monitoring method according to claim 10, wherein when the programmable logic controller receives the result that the static electricity measurement controller analyzes that the performance of the static eliminator is normal, the programmable logic controller The programmable logic controller controls the alarm device not to send out an alarm signal; when the programmable logic controller receives the result that the static electricity measurement controller analyzes the abnormal performance of the static eliminator, the programmable logic controller controls the The alarm device sends an alarm signal to remind the staff to inspect and repair the static eliminator.
12、 根据权利要求 8所述的监控方法， 其中， 所述报警装置为人机交互界 面。 12. The monitoring method according to claim 8, wherein the alarm device is a human-computer interaction interface.
PCT/CN2013/079252 2013-07-10 2013-07-11 Monitoring device and monitoring method for static electricity eliminator WO2015003375A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310288849.9 2013-07-10
CN2013102888499A CN103336214A (en) 2013-07-10 2013-07-10 Monitoring device and monitoring method of electrostatic eliminator

Publications (1)

Publication Number Publication Date
WO2015003375A1 true WO2015003375A1 (en) 2015-01-15

Family

ID=49244417

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2013/079252 WO2015003375A1 (en) 2013-07-10 2013-07-11 Monitoring device and monitoring method for static electricity eliminator

Country Status (2)

Country Link
CN (1) CN103336214A (en)
WO (1) WO2015003375A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106019655A (en) * 2016-07-26 2016-10-12 武汉华星光电技术有限公司 Machine table
CN109673096A (en) * 2017-10-13 2019-04-23 威驰股份有限公司 Can remote monitoring electrostatic elimination system
CN110927469A (en) * 2019-10-17 2020-03-27 上海安平静电科技有限公司 Many-to-one type static elimination method and device
CN112730935A (en) * 2020-12-22 2021-04-30 湖南省益思迪科技有限公司 Static elimination monitoring equipment and monitoring method
CN112986761B (en) * 2021-02-08 2022-08-16 苏州天华超净科技股份有限公司 Method for monitoring working performance of electrostatic eliminator
CN113702723A (en) * 2021-08-26 2021-11-26 深圳联合净界科技有限公司 Ion online monitoring device and monitoring method based on resistance type sensor

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1951159A (en) * 2004-05-26 2007-04-18 修谷鲁电子机器股份有限公司 Neutralization apparatus
CN101180779A (en) * 2005-05-24 2008-05-14 修谷鲁电子机器股份有限公司 DC type ion generators
CN101286052A (en) * 2008-05-27 2008-10-15 上海安平静电科技有限公司 Ion blower fan intelligentized control system
CN101437602A (en) * 2004-10-29 2009-05-20 特瑞克股份有限公司 Ion balance monitor
CN102565568A (en) * 2010-11-09 2012-07-11 修谷鲁电子机器股份有限公司 Charge plate monitor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1951159A (en) * 2004-05-26 2007-04-18 修谷鲁电子机器股份有限公司 Neutralization apparatus
CN101437602A (en) * 2004-10-29 2009-05-20 特瑞克股份有限公司 Ion balance monitor
CN101180779A (en) * 2005-05-24 2008-05-14 修谷鲁电子机器股份有限公司 DC type ion generators
CN101286052A (en) * 2008-05-27 2008-10-15 上海安平静电科技有限公司 Ion blower fan intelligentized control system
CN102565568A (en) * 2010-11-09 2012-07-11 修谷鲁电子机器股份有限公司 Charge plate monitor

Also Published As

Publication number Publication date
CN103336214A (en) 2013-10-02

Similar Documents

Publication Publication Date Title
WO2015003375A1 (en) Monitoring device and monitoring method for static electricity eliminator
TWI580313B (en) A static elimination device
JP5937665B2 (en) Self-detection method of static electricity dissipation capability of ion generator
CN104438226A (en) Mask plate cleaning system
JP2012103056A (en) Charge plate monitor
JP6723436B2 (en) Atmospheric pressure plasma device
CN210775144U (en) Semiconductor detection machine
CN104049210B (en) The automatic detection device of optoelectronic switch
TWI442065B (en) Electrostatic discharge test method and test system
CN201616951U (en) Ion blower
JP6289524B2 (en) Static eliminator with static electricity detection function and static eliminator including static electricity detection
WO2020019692A1 (en) Electrostatic elimination device, and cleaner for cleaning electrostatic needle
CN104677428A (en) Multifunctional indoor air detection device
KR101416551B1 (en) Monitering and controlling system for static electricity occurrence on stage apparatus at display panel producing line
CN204731219U (en) Efficient indoor air pick-up unit
KR200435495Y1 (en) An ionizer controller to which several ionizers are connected
KR20210043125A (en) Apparatus and method for semiconductor static electricity management
CN210571032U (en) Thermal disaster detection device for limited space
CN110927469A (en) Many-to-one type static elimination method and device
CN206235871U (en) Oil gas electric equipment compartment module antistatic Inspection and monitoring system
CN110927468A (en) One-to-many type static elimination method and device
CN101488065A (en) Touch control detection method
US20130241225A1 (en) Vacuum pickup device and method for pickup
CN204330942U (en) Wire harness intelligent testing machine target wire harness self study mechanism for testing
TWI559093B (en) A screen exposure machine monitor system

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13889349

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13889349

Country of ref document: EP

Kind code of ref document: A1