CN113702723A - Ion online monitoring device and monitoring method based on resistance type sensor - Google Patents
Ion online monitoring device and monitoring method based on resistance type sensor Download PDFInfo
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Abstract
The invention provides an ion online monitoring device and a monitoring method based on a resistance-type sensor, which comprises an ion detection substrate, a signal amplification module and a transmission device which are sequentially connected; the ion detection substrate comprises an insulating substrate and a charge ion contact substrate, and the charge ion contact substrate is embedded in the middle of the insulating substrate; the signal amplification module comprises a charge input unit, an operational amplification unit, a digital conversion unit and an MCU control unit which are connected in sequence. According to the invention, weak charge voltage is formed by accumulating electrostatic ion charges, the weak charge voltage is transmitted to the signal amplification module for voltage amplification, the weak charge voltage is transmitted to the transmission device for big data analysis after being processed, and the spatial ion concentration and the balance voltage value are monitored in real time according to the data analysis result, so that the electrostatic ion concentration of the static removing equipment is stabilized within a normal concentration range, the risk of electrostatic protection failure can be reduced to a certain extent, and the product quality is further improved.
Description
Technical Field
The invention relates to the technical field of ion monitoring, in particular to an ion online monitoring device and method based on a resistance type sensor.
Background
Electrostatic hazards are caused by electrostatic charges or electrostatic field energy. During the production process and the operation of operators, static electricity is generated due to accumulation of relatively static positive charges and negative charges caused by relative movement, contact and separation of certain materials. The voltage of the high-voltage discharge lamp can reach dozens of kilovolts, so that discharge is easy to occur, discharge sparks are generated, the product quality is poor, and electronic equipment is damaged.
At present, the static removing equipment mainly comprises high-voltage ionization static removing equipment such as an ion fan, an ion wind rod and the like, and in practical application, the static removing equipment often causes the risk of ion out-of-control due to various application environment factors or circuit out-of-control, causes static prevention and control failure and the source of static generation, causes certain static damage or static latency to electronic products and semiconductor devices, and finally causes product damage.
At present, the static removing equipment in the field of static prevention in the industry only has the static removing capability of generating positive and negative ions, does not have the self-judgment capability of ion balance voltage failure and the online monitoring capability of ion concentration, and often causes the static failure risk; in laboratory environment applications, there is no on-line electrostatic ion charge monitoring device, and therefore detection cannot be made due to object motion or static electricity generated during operation.
Disclosure of Invention
In view of the above problems, embodiments of the present invention provide an ion online monitoring device and an ion online monitoring method based on a resistive sensor, which overcome or at least partially solve the above problems.
The invention provides an ion online monitoring device based on a resistance-type sensor, which is used for monitoring the ion concentration of static elimination equipment and comprises an ion detection substrate, a signal amplification module and a transmission device which are sequentially connected;
the ion detection substrate comprises an insulating substrate and a charge ion contact substrate, and the charge ion contact substrate is embedded in the middle of the insulating substrate and is flush with the insulating substrate;
the signal amplification module comprises a charge input unit, an operational amplification unit, a digital conversion unit and an MCU control unit which are connected in sequence;
when the online monitoring device works, the ion detection substrate collects the concentration of electrostatic ions of the static eliminating equipment, and transmits collected signals to the operational amplification unit in the form of voltage signals for voltage amplification, the amplified voltage signals are converted by the digital conversion unit and then transmitted to the MCU control unit for data processing, and the MCU control unit transmits the processed voltage signals to the transmission device for big data storage and analysis to obtain analysis results.
Further, the operational amplification unit includes an operational amplifier chip U2, the charge INPUT unit includes an INPUT terminal, an INPUT terminal of the INPUT terminal is connected with an output terminal of the ion detection substrate, an output terminal of the INPUT terminal is divided into three paths of outputs, a first path is from the INPUT terminal to a resistor R1 to a switch S1 to an HV + terminal, a second path is from the INPUT terminal to a resistor R2 to a switch S2 to an HV-terminal, and a third path is from the INPUT terminal to a resistor R3 to an IN + pin of the operational amplifier chip U2.
Further, the charge input unit further includes a resistor R4 and a capacitor C5, one end of the capacitor C5 is connected between the resistor R3 and the IN + pin of the operational amplifier chip U2, the other end of the capacitor C5 is grounded, one end of the resistor R4 is connected between the resistor R3 and the capacitor C5, and the other end of the resistor R4 is grounded.
Further, the digital conversion unit comprises an RC filter and an AD conversion chip U3;
the RC filter comprises a resistor R5, a capacitor C6 and a capacitor C8, wherein an OUT pin of the operational amplifier chip U2 is connected with an IN pin of the resistor R5 and the AD conversion chip U3; one end of the capacitor C6 is connected with the input end of the resistor R5, and the other end of the capacitor C6 is grounded; one end of the capacitor C8 is connected with the output end of the resistor R5, and the other end of the capacitor C8 is grounded.
Furthermore, the signal amplification module also comprises a beta value setting circuit, a zero offset compensation circuit and a harmonic filtering circuit;
the beta value setting circuit comprises a resistor RF1 and a resistor RF2, an OUT pin of the operational amplifier chip U2 is connected to the resistor RF2 to the resistor RF1 to the ground, and an IN-pin and a Case pin of the operational amplifier chip U2 are respectively connected between the resistor RF1 and the resistor RF 2;
the zero offset compensation circuit comprises an adjustable resistor VR1, two ends of the adjustable resistor VR1 are respectively connected with an offset1 pin and an offset2 pin of the operational amplifier chip U2, and a movable contact of the adjustable resistor VR1 is connected with a-VCC pin of the operational amplifier chip U2;
the harmonic filtering circuit comprises an inductor L2, an inductor L3, a capacitor C7, a capacitor C9, a capacitor C10 and a capacitor C11, wherein a + VCC pin of the operational amplifier chip U2 is connected to a + VDD pin of the inductor L2 and the AD conversion chip U3; a-VCC pin of the operational amplifier chip U2 to the inductor L3 to an RE pin and a-VSS pin of the AD conversion chip U3; one end of the capacitor C7 is connected to the input end of the inductor L3, the other end of the capacitor C7 is grounded, one end of the capacitor C9 is connected to the output end of the inductor L3, and the other end of the capacitor C9 is grounded; the capacitor C10 is connected to the input terminal of the inductor L3, the other terminal of the capacitor C10 is grounded, the capacitor C11 is connected to the output terminal of the inductor L3, and the other terminal of the capacitor C10 is grounded.
Furthermore, the transmission device comprises a system monitoring platform server, a data transceiving transfer station, a display terminal, a database memory, at least one data transceiver and a collection node;
the input end of the acquisition node is connected with the output end of the MCU control unit;
the data transceiver transfer station is respectively connected with the data transceiver and the system monitoring platform server in duplex communication, the system monitoring platform server is respectively connected with the display terminal and the database storage in duplex communication, the data transceiver is connected with the acquisition node in duplex communication, and the data transceiver and the acquisition node are in one-to-one correspondence.
Furthermore, the ion detection substrate also comprises an early warning indicator light and two fixed supporting points arranged at one end of the ion detection substrate; the early warning indicator lamp is arranged on the upper surface of the ion detection substrate and is connected with the transmission lead; the fixed supporting point is used for fixing the ion detection substrate on the static eliminating equipment.
Furthermore, the display device also comprises a display processor, and the input end of the display processor is connected with the output end of the MCU control unit.
In an embodiment of the present invention, there is further provided a monitoring method of the on-line ion monitoring apparatus based on a resistive sensor as described above, where the method is used to monitor an ion concentration of a static elimination device, and the monitoring method includes:
the ion detection substrate collects the concentration of static ions and accumulates the charges of the concentration of the static ions until the charge ions contact the substrate to form a charge voltage;
the signal amplification module receives the charge voltage and amplifies the charge voltage;
the digital conversion unit receives and converts the amplified charge voltage to obtain a voltage signal to be processed;
the MCU control unit receives the voltage signal to be processed and performs data processing;
and the transmission device collects and analyzes the processed voltage signal to obtain an analysis result.
Furthermore, the transmission device comprises a system monitoring platform server, a data transceiving transfer station, a display terminal, a database memory, at least one data transceiver and a collection node;
the step of the transmission device collecting and analyzing the processed voltage signal comprises the following steps:
the system monitoring platform server forwards a detection data acquisition instruction to the data transceiver through the data transceiving relay station according to a preset time interval and the IP address of the target data transceiver;
after the data transceiver receives the detection data retrieval instruction, sending the detection data retrieval instruction to the acquisition node;
the acquisition node acquires data according to the detection data acquisition instruction and returns the acquired data to the system monitoring platform server;
the system monitoring platform server sends the data to the database memory for storage analysis; or the system monitoring platform server sends the data to the database memory for storage and analysis, and sends the analysis result to the display terminal for display.
The application has the following advantages:
in the embodiment of the application, the ion detection substrate, the signal amplification module and the transmission device are connected in sequence; the ion detection substrate comprises an insulating substrate and a charge ion contact substrate, and the charge ion contact substrate is embedded in the middle of the insulating substrate and is flush with the insulating substrate; the signal amplification module comprises a charge input unit, an operational amplification unit, a digital conversion unit and an MCU control unit which are connected in sequence; when the online monitoring device works, the ion detection substrate collects the concentration of electrostatic ions of the static eliminating equipment, and transmits collected signals to the operational amplification unit in the form of voltage signals for voltage amplification, the amplified voltage signals are converted by the digital conversion unit and then transmitted to the MCU control unit for data processing, and the MCU control unit transmits the processed voltage signals to the transmission device for big data storage and analysis to obtain analysis results. According to the invention, weak charge voltage is formed by accumulating electrostatic ion charges, the weak charge voltage is transmitted to the signal amplification module for voltage amplification, and then the weak charge voltage is transmitted to the transmission device for big data analysis after conversion and processing, so that analysis data such as the ion concentration and the voltage value of the electrostatic ions are obtained, and the space ion concentration and the balanced voltage value are monitored in real time according to the data analysis result, so that the electrostatic ion concentration of the static removing equipment is stabilized within a normal concentration range, the risk of electrostatic protection failure can be reduced to a certain extent, and the product quality is further improved.
Drawings
In order to more clearly illustrate the technical solutions of the present application, the drawings needed to be used in the description of the present application will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
Fig. 1 is a schematic circuit diagram of a signal amplification module according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an ion detection substrate according to an embodiment of the present invention;
fig. 3 is a schematic diagram of a transmission device according to an embodiment of the present invention.
1. An ion detection substrate; 11. an insulating substrate; 12. the charged ions contact the substrate; 13. an early warning indicator light; 14. fixing the supporting point; 2. a signal amplification module; 21. a charge input unit; 22. an operational amplification unit; 23. a digital conversion unit; 24. an MCU control unit; 25. a beta value setting circuit; 26. a zero offset compensation circuit; 27. a harmonic filtering circuit; 3. a monitoring platform server; 4. a data transmitting and receiving transfer radio station; 5. a data transceiver; 6. collecting nodes; 7. displaying the terminal; 8. a database memory.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, because the ion charge current is very weak, the ordinary amplification device cannot meet the amplification requirement due to small input impedance, the input impedance (R ═ V/I) is required to be greater than or equal to 1012 Ω according to the grade of the electrostatic material, the input bias current I is less than or equal to 1nA, and the ultra-low bias current operational amplifier produced by the company TI is selected according to the requirement; the input stage of the operational amplifier adopts a PN junction isolation process, and the input bias current is less than or equal to 75fA (1nA is 1000fA), so that the high-impedance characteristic reaches and exceeds the traditional specially designed amplifier consisting of a hybrid integrated circuit.
Referring to fig. 1 to 3, a schematic circuit diagram of a signal amplification module according to an embodiment of the present invention, a schematic structural diagram of an ion detection substrate according to an embodiment of the present invention, and a schematic operation diagram of a transmission device according to an embodiment of the present invention are respectively shown. Specifically, the device is used for monitoring the ion concentration of the static eliminating equipment and comprises an ion detection substrate 1, a signal amplification module 2 and a transmission device which are sequentially connected;
the ion detection substrate 1 comprises an insulating substrate 11, a charge ion contact substrate 12 and a transmission lead, wherein the charge ion contact substrate 12 is embedded in the middle of the insulating substrate 11 and is flush with the insulating substrate 11; the transmission lead is arranged at the end part of the insulating substrate 11 and is connected with the signal amplification module 2;
the signal amplification module 2 comprises a charge input unit 21, an operational amplification unit 22, a digital conversion unit 23 and an MCU control unit 24 which are connected in sequence;
when the online monitoring device works, the ion detection substrate 1 collects the concentration of electrostatic ions of the static elimination equipment, accumulates the concentration into weak charge voltage, transmits the weak charge voltage to the operational amplification unit 22 for voltage amplification, the amplified charge voltage is converted by the digital conversion unit 23 and then transmitted to the MCU control unit 24 for data processing, and the MCU control unit 24 transmits the processed charge voltage to the transmission device for big data storage and analysis to obtain an analysis result.
In the embodiment of the application, the ion detection substrate 1, the signal amplification module 2 and the transmission device are connected in sequence; the ion detection substrate 1 comprises an insulating substrate 11, a charge ion contact substrate 12 and a transmission lead, wherein the charge ion contact substrate 12 is embedded in the middle of the insulating substrate 11 and is flush with the insulating substrate 11; the transmission lead is arranged at the end part of the insulating substrate 11 and is connected with the signal amplification module 2; the signal amplification module 2 comprises a charge input unit 21, an operational amplification unit 22, a digital conversion unit 23 and an MCU control unit 24 which are connected in sequence; when the online monitoring device works, the ion detection substrate 1 collects the concentration of electrostatic ions of the static elimination equipment, accumulates the concentration into weak charge voltage, transmits the weak charge voltage to the operational amplification unit 22 for voltage amplification, the amplified charge voltage is converted by the digital conversion unit 23 and then transmitted to the MCU control unit 24 for data processing, and the MCU control unit 24 transmits the processed charge voltage to the transmission device for big data storage and analysis to obtain an analysis result. According to the invention, weak charge voltage is formed by accumulating electrostatic ion charges, the weak charge voltage is transmitted to the signal amplification module 2 for voltage amplification, and then the weak charge voltage is transmitted to the transmission device for big data analysis after conversion and processing, so that analysis data such as the ion concentration and the voltage value of the electrostatic ions are obtained, and the space ion concentration and the voltage value are monitored in real time according to the data analysis result, so that the electrostatic ion concentration of the static removing equipment is stabilized within a normal concentration range, the risk of electrostatic protection failure can be reduced to a certain extent, and the product quality is further improved.
In the following, an ion on-line monitoring device based on a resistive sensor in the present exemplary embodiment will be further described.
IN an embodiment of the present invention, the operational amplification unit 22 includes an operational amplifier chip U2, the charge INPUT unit 21 includes an INPUT terminal, an INPUT terminal of the INPUT terminal is connected to an output terminal of the ion detection substrate 1, an output terminal of the INPUT terminal is divided into three paths, a first path is from the INPUT terminal to a resistor R1 to a switch S1 to an HV + terminal, a second path is from the INPUT terminal to a resistor R2 to a switch S2 to an HV-terminal, and a third path is from the INPUT terminal to a resistor R3 to an IN + pin of the operational amplifier chip U2.
IN one implementation, the charge voltage accumulated on the charge ion contact substrate 12 is output to the INPUT terminal via the transmission conductor and is output to the operational amplifier chip U2 via a third path, i.e., from the INPUT terminal to the resistor R3 to the IN + pin of the operational amplifier chip U2, which is voltage amplified by the operational amplifier chip U2.
In a specific implementation, the resistor R1, the resistor R2, the switch S1 and the switch S2 form a function monitoring circuit, in a normal working state, the switch S1 and the switch S2 are in an open state, in a circuit self-checking process, the MCU control unit 24 respectively sends a closing signal to the switch S1 and the switch S2, closes the switch S1, respectively applies positive and negative 100V voltages to the HV + terminal and the HV-terminal, the charge input unit 21 obtains a positive voltage value signal, the positive voltage value signal is transmitted to the MCU control unit 24 through the operational amplifier chip U2, the closing S2 input circuit obtains a negative voltage value signal, the negative voltage value signal is transmitted to the MCU control unit 24 through the operational amplifier chip U2, the MUC controller judges whether the operational amplifier chip U2 is normal according to the fed back positive and negative voltage value signals, if the MUC controller receives the fed back positive and negative voltage value signals, the operational amplifier chip U2 is judged to be normal, otherwise, it is abnormal; the monitoring failure of the operational amplifier chip U2 in the working process can be prevented by monitoring the operational amplifier chip U2, wherein the resistances of the resistor R1 and the resistor R2 are both G Ω resistors, the calculation is carried out according to the formula I, V/R, HV/R, and the input current is controlled to be less than or equal to 1 nA.
In a specific implementation, the resistor R1, the resistor R2, the switch S1 and the switch S2 further form an ionization device static electricity removal capability judgment circuit, positive and negative 100V voltages are applied to an HV + terminal and an HV-terminal respectively, and due to the fact that the ion concentration of the static electricity removal device is relatively high, the accumulated charge current of the output positive and negative ions is far larger than the applied current of the resistor R1 and the resistor R2; when a positive voltage is applied to the HV + terminal and a negative voltage is applied to the HV-terminal, the HV-terminal is disconnected, according to the positive and negative ion current neutralization effect, if the feedback voltage of the current resistor R1 and the resistor R2 is less than the static elimination device bias voltage, the bias voltage signal of the static elimination device can be transmitted to the MCU control unit 24 through the operational amplifier chip U2, which indicates that the static elimination capability of the static elimination device is normal, and if the feedback voltage of the current resistor R1 and the resistor R2 > the static elimination device bias voltage, the bias voltage of the static elimination device cannot be transmitted to the MCU control unit 24 through the operational amplifier chip U2, which indicates that the static elimination capability of the static elimination device is failed.
In an embodiment of the present invention, the charge input unit 21 further includes a resistor R4 and a capacitor C5, one end of the capacitor C5 is connected between the resistor R3 and the pin 3 of the operational amplifier chip U2, the other end of the capacitor C5 is grounded, one end of the resistor R4 is connected between the resistor R3 and the capacitor C5, and the other end of the resistor R4 is grounded.
It should be noted that the resistor R4 is a voltage dividing resistor, and the capacitor C5 is used for harmonic filtering; because the input current is small, the resistor R3 and the resistor R4 both adopt G omega resistors, and the over-large attenuation of the divided voltage is prevented.
In an embodiment of the present invention, the digital conversion unit 23 includes an RC filter and an AD conversion chip U3; the RC filter comprises a resistor R5, a capacitor C6 and a capacitor C8, wherein an OUT pin of the operational amplifier chip U2 is connected with an IN pin of the resistor R5 and the AD conversion chip U3; one end of the capacitor C6 is connected with the input end of the resistor R5, and the other end of the capacitor C6 is grounded; one end of the capacitor C8 is connected with the output end of the resistor R5, and the other end of the capacitor C8 is grounded.
IN a specific implementation, the ion detection substrate 1 accumulates the collected static ions into weak charge voltage, the charge voltage is INPUT from an INPUT terminal of the charge INPUT unit 21 through a transmission wire, the charge voltage is INPUT from an IN + pin of the operational amplifier chip U2 through a resistor R3 for voltage amplification, the amplified charge voltage is INPUT from an OUT pin of the operational amplifier chip U2 through a resistor R5 from an IN pin of the AD conversion chip U3 for digital conversion, and the converted charge voltage is output to the MCU control unit 24 for storage and processing; the resistor R5, the capacitor C6 and the capacitor C8 form an RC filter for filtering harmonic interference signals.
In an embodiment of the present invention, the signal amplification module 2 further includes a β value setting circuit 25, a zero offset compensation circuit 26, and a harmonic filtering circuit 27; the beta value setting circuit 25 comprises a resistor RF1 and a resistor RF2, an OUT pin of the operational amplifier chip U2 is connected to the resistor RF2 to the resistor RF1 to the ground, an IN-pin and a Case pin of the operational amplifier chip U2 are respectively connected between the resistor RF1 and the resistor RF 2; wherein β is 1+ RF2/RF1, and β is the amplification factor set by the operational amplifier chip U2.
In an embodiment of the present invention, the offset-zero compensation circuit 26 includes an adjustable resistor VR1, two ends of the adjustable resistor VR1 are respectively connected to the offset1 pin and the offset2 pin of the operational amplifier chip U2, and a moving contact of the adjustable resistor VR1 is connected to the-VCC pin of the operational amplifier chip U2; the tuning resistor VR1 may adjust the zero offset due to the offset voltage inherent to the op-amp chip U2, providing amplifier zero accuracy.
In an embodiment of the present invention, the harmonic filtering circuit 27 includes an inductor L2, an inductor L3, a capacitor C7, a capacitor C9, a capacitor C10, and a capacitor C11, and a + VCC pin of the operational amplifier chip U2 is connected to a + VDD pin of the inductor L2 to the AD conversion chip U3; a-VCC pin of the operational amplifier chip U2 to the inductor L3 to an RE pin and a-VSS pin of the AD conversion chip U3; one end of the capacitor C7 is connected to the input end of the inductor L3, the other end of the capacitor C7 is grounded, one end of the capacitor C9 is connected to the output end of the inductor L3, and the other end of the capacitor C9 is grounded; the capacitor C10 is connected to the input terminal of the inductor L3, the other end of the capacitor C10 is grounded, the capacitor C11 is connected to the output terminal of the inductor L3, and the other end of the capacitor C10 is grounded; the inductor L2, the inductor L3, the capacitor C7, the capacitor C9, the capacitor C10 and the capacitor C11 form a + 5V-5V harmonic filter circuit, and can provide stable voltage for the operational amplifier.
In an embodiment of the present invention, the transmission device includes a system monitoring platform server 3, a data transceiving relay station 4, a display terminal 7, a database storage 8, at least one data transceiver 5, and an acquisition node 6; the input end of the acquisition node 6 is connected with the output end of the MCU control unit 24; the data transceiver relay station 4 is respectively connected to the data transceiver 5 and the system monitoring platform server 3 in duplex communication, the system monitoring platform server 3 is respectively connected to the display terminal 7 and the database memory 8 in duplex communication, and the data transceiver 5 is connected to the acquisition node 6 in duplex communication, wherein the data transceiver 5 and the acquisition node 6 are in one-to-one correspondence.
In a specific implementation, the system monitoring platform server 3 circularly sends a detection data acquisition instruction through the data transceiving relay station 4 according to a certain time interval and IP addresses of different data transceivers 5, the data transceivers 5 transmit the detection data acquisition instruction to the acquisition nodes 6 after receiving the detection data acquisition instruction, the acquisition nodes 6 acquire data from the MCU control unit 24 and then feed back the data to the system monitoring platform server 3 in an original way, the system monitoring platform server 3 sends the received feedback data to the database memory 8 for storage and data analysis statistics, and when the acquisition nodes 6 do not receive the detection data acquisition instruction, each acquisition node 6 is in a silent state and does not acquire data; through setting up a plurality of receipt transceivers and collection node 6, respectively the one-to-one sets up into the multiunit, can infinitely enlarge collection node 6, and mutual interference is little between each frequency channel, also is difficult for being disturbed by other equipment, has superior characteristics such as transmission data is stable, the node is big, fast disturbance is little fast, breaks through traditional transmission mode and receives the restriction of node and mutual interference's shortcoming easily.
In an embodiment of the present invention, the ion detection substrate 1 further includes an early warning indicator 13 and two fixed support points 14 disposed at one end of the ion detection substrate 1; the early warning indicator lamp 13 is arranged on the upper surface of the ion detection substrate 1 and is in signal connection with the transmission lead, and when accumulated positive and negative ions are serious, the control system outputs an early warning signal through the early warning device to perform light early warning; the fixed supporting point 14 is used for fixing the ion detection substrate 1 on the static eliminating device.
In an embodiment of the present invention, the apparatus further includes a display processor, an input end of the display processor is connected to an output end of the MCU control unit 24, and the MCU control unit 24 processes the amplified charge voltage and then sends the data to the display processor for displaying, so as to monitor a voltage data state.
In an embodiment of the present invention, there is further provided a monitoring method of the ion online monitoring apparatus based on a resistive sensor as described above, the method is used for monitoring an ion concentration of a static elimination device, and includes:
the ion detection substrate 1 collects electrostatic ion charges and accumulates the electrostatic ion charges until the charge ions contact the substrate 12 to form weak charge voltage;
the signal amplification module 2 receives the weak charge voltage and amplifies the voltage;
the digital conversion unit 23 receives and converts the amplified charge voltage to obtain a voltage signal to be processed;
the MCU control unit 24 receives the voltage signal to be processed and performs data processing;
and the transmission device collects and analyzes the processed voltage signal to obtain an analysis result.
In the embodiment of the application, weak charge voltage is formed by accumulating electrostatic ion charges, the weak charge voltage is transmitted to the signal amplification module 2 for voltage amplification, and then the weak charge voltage is transmitted to the transmission device for big data analysis after conversion and processing, so that analysis data such as the ion concentration and the voltage value of electrostatic ions are obtained, the space ion concentration and the voltage value are monitored in real time according to a data analysis result, and therefore the electrostatic ion concentration of the static removing equipment is stabilized within a normal concentration range, the risk of electrostatic protection failure can be reduced to a certain extent, and the product quality is further improved.
In an embodiment of the present invention, the transmission device includes a system monitoring platform server 3, a data transceiver relay station 4, a display terminal 7, a database memory 8, at least one data transceiver 5, and a collection node 6, and the step of collecting and analyzing the processed voltage signal by the transmission device includes:
the system monitoring platform server 3 forwards a detection data acquisition instruction to the data transceiver 5 through the data transceiving relay station 4 according to a preset time interval and the IP address of the target data transceiver 5;
after receiving the detection data acquisition instruction, the data transceiver 5 sends the detection data acquisition instruction to the acquisition node 6;
the acquisition node 6 acquires data according to the detection data acquisition instruction and returns the acquired data to the system monitoring platform server 3;
the system monitoring platform server 3 sends the data to a database memory 8 for storage and analysis; or, the system monitoring platform server 3 sends the data to the database memory 8 for storage and analysis, and sends the analysis result to the display terminal 7 for display.
The embodiments in the present specification are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
While preferred embodiments of the present invention have been described, additional variations and modifications of these embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the embodiments of the invention.
Finally, it should also be noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or terminal that comprises the element.
The ion online monitoring device and the ion online monitoring method based on the resistive sensor are introduced in detail, and specific examples are applied to explain the principle and the implementation manner of the ion online monitoring device, and the description of the embodiments is only used for helping to understand the method and the core idea of the ion online monitoring device; meanwhile, for a person skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.
Claims (10)
1. An ion online monitoring device based on a resistance sensor is used for monitoring the ion concentration of static removing equipment and is characterized by comprising an ion detection substrate, a signal amplification module and a transmission device which are sequentially connected;
the ion detection substrate comprises an insulating substrate and a charge ion contact substrate, and the charge ion contact substrate is embedded in the middle of the insulating substrate and is flush with the insulating substrate;
the signal amplification module comprises a charge input unit, an operational amplification unit, a digital conversion unit and an MCU control unit which are connected in sequence;
when the online monitoring device works, the ion detection substrate collects the concentration of electrostatic ions of the static eliminating equipment, and transmits collected signals to the operational amplification unit in the form of voltage signals for voltage amplification, the amplified voltage signals are converted by the digital conversion unit and then transmitted to the MCU control unit for data processing, and the MCU control unit transmits the processed voltage signals to the transmission device for big data storage and analysis to obtain analysis results.
2. The resistive sensor based on ion on-line monitoring device of claim 1, wherein the operational amplifier unit comprises an operational amplifier chip U2, the charge INPUT unit comprises an INPUT terminal, an INPUT terminal of the INPUT terminal is connected with an output terminal of the ion detection substrate, an output terminal of the INPUT terminal is divided into three paths, a first path is from the INPUT terminal to a resistor R1 to a switch S1 to a HV + terminal, a second path is from the INPUT terminal to a resistor R2 to a switch S2 to a HV-terminal, and a third path is from the INPUT terminal to a resistor R3 to an IN + pin of the operational amplifier chip U2.
3. The ion online monitoring device based on the resistive sensor as claimed IN claim 2, wherein the charge input unit further comprises a resistor R4 and a capacitor C5, one end of the capacitor C5 is connected between the resistor R3 and the IN + pin of the operational amplifier chip U2, the other end of the capacitor C5 is grounded, one end of the resistor R4 is connected between the resistor R3 and the capacitor C5, and the other end of the resistor R4 is grounded.
4. The ion online monitoring device based on the resistance-type sensor as claimed in claim 2, wherein the digital conversion unit comprises an RC filter and an AD conversion chip U3;
the RC filter comprises a resistor R5, a capacitor C6 and a capacitor C8, wherein an OUT pin of the operational amplifier chip U2 is connected with an IN pin of the resistor R5 and the AD conversion chip U3; one end of the capacitor C6 is connected with the input end of the resistor R5, and the other end of the capacitor C6 is grounded; one end of the capacitor C8 is connected with the output end of the resistor R5, and the other end of the capacitor C8 is grounded.
5. The ion online monitoring device based on the resistive sensor as recited in claim 4, wherein the signal amplification module further comprises a β value setting circuit, a zero offset compensation circuit and a harmonic filtering circuit;
the beta value setting circuit comprises a resistor RF1 and a resistor RF2, an OUT pin of the operational amplifier chip U2 is connected to the resistor RF2 to the resistor RF1 to the ground, and an IN-pin and a Case pin of the operational amplifier chip U2 are respectively connected between the resistor RF1 and the resistor RF 2;
the zero offset compensation circuit comprises an adjustable resistor VR1, two ends of the adjustable resistor VR1 are respectively connected with an offset1 pin and an offset2 pin of the operational amplifier chip U2, and a movable contact of the adjustable resistor VR1 is connected with a-VCC pin of the operational amplifier chip U2;
the harmonic filtering circuit comprises an inductor L2, an inductor L3, a capacitor C7, a capacitor C9, a capacitor C10 and a capacitor C11, wherein a + VCC pin of the operational amplifier chip U2 is connected to a + VDD pin of the inductor L2 and the AD conversion chip U3; a-VCC pin of the operational amplifier chip U2 to the inductor L3 to an RE pin and a-VSS pin of the AD conversion chip U3; one end of the capacitor C7 is connected to the input end of the inductor L3, the other end of the capacitor C7 is grounded, one end of the capacitor C9 is connected to the output end of the inductor L3, and the other end of the capacitor C9 is grounded; the capacitor C10 is connected to the input terminal of the inductor L3, the other terminal of the capacitor C10 is grounded, the capacitor C11 is connected to the output terminal of the inductor L3, and the other terminal of the capacitor C10 is grounded.
6. The ion online monitoring device based on the resistance sensor as claimed in claim 1, wherein the transmission device comprises a system monitoring platform server, a data transceiving relay station, a display terminal, a database memory, at least one data transceiver and an acquisition node;
the input end of the acquisition node is connected with the output end of the MCU control unit;
the data transceiver transfer station is respectively connected with the data transceiver and the system monitoring platform server in duplex communication, the system monitoring platform server is respectively connected with the display terminal and the database storage in duplex communication, the data transceiver is connected with the acquisition node in duplex communication, and the data transceiver and the acquisition node are in one-to-one correspondence.
7. The ion online monitoring device based on the resistive sensor as claimed in claim 1, wherein the ion detection substrate further comprises an early warning indicator light and two fixed supporting points arranged at one end of the ion detection substrate; the early warning indicator lamp is arranged on the upper surface of the ion detection substrate and is connected with the transmission lead; the fixed supporting point is used for fixing the ion detection substrate on the static eliminating equipment.
8. The ion online monitoring device based on the resistive sensor as claimed in claim 1, further comprising a display processor, wherein an input end of the display processor is connected with an output end of the MCU control unit.
9. A monitoring method of an ion online monitoring device based on a resistance-type sensor according to any one of claims 1 to 8, wherein the method is used for monitoring the ion concentration of a static elimination device and comprises the following steps:
the ion detection substrate collects the concentration of static ions and accumulates the charges of the concentration of the static ions until the charge ions contact the substrate to form a charge voltage;
the signal amplification module receives the charge voltage and amplifies the charge voltage;
the digital conversion unit receives and converts the amplified charge voltage to obtain a voltage signal to be processed;
the MCU control unit receives the voltage signal to be processed and performs data processing;
and the transmission device collects and analyzes the processed voltage signal to obtain an analysis result.
10. The ion online monitoring method based on the resistive sensor as claimed in claim 9, wherein the transmission device comprises a system monitoring platform server, a data transceiving relay station, a display terminal, a database memory, at least one data transceiver and an acquisition node;
the step of the transmission device collecting and analyzing the processed voltage signal comprises the following steps:
the system monitoring platform server forwards a detection data acquisition instruction to the data transceiver through the data transceiving relay station according to a preset time interval and the IP address of the target data transceiver;
after the data transceiver receives the detection data retrieval instruction, sending the detection data retrieval instruction to the acquisition node;
the acquisition node acquires data according to the detection data acquisition instruction and returns the acquired data to the system monitoring platform server;
the system monitoring platform server sends the data to the database memory for storage analysis; or the system monitoring platform server sends the data to the database memory for storage and analysis, and sends the analysis result to the display terminal for display.
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| CN202110990673.6A CN113702723A (en) | 2021-08-26 | 2021-08-26 | Ion online monitoring device and monitoring method based on resistance type sensor |
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| CN202110990673.6A CN113702723A (en) | 2021-08-26 | 2021-08-26 | Ion online monitoring device and monitoring method based on resistance type sensor |
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