201219800 計、電場計、計時器等。又， 利疋板200A係例如將一邊 150 [mm]的導電性板依1〇〜15「 i3Lmin]間隔重疊2片的構造， 體具有約20[pF]的靜電容。 測定器本體1 0 〇 A主要係句紅、B丨^ 匕括測疋著測定板200A之表 面電位的機能，依照以下所述方 ^ 法，測定靜電消除裝置的 除電性能與離子均衡性能。 利用該充電板監測器測定饈201219800 meter, electric field meter, timer, etc. Further, the slab 200A is a structure in which two conductive sheets of 150 [mm] are overlapped by one to 15 "i3Lmin", and the body has a static capacitance of about 20 [pF]. The measuring unit body 10 〇 A is mainly for sentence red, B丨^ 疋 疋 疋 测定 测定 测定 测定 测定 测定 测定 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 200 delicate
At ± J疋靜電4除裝置300的除電性 月匕時’從測定器本體1 〇 〇 A的其厭你 的阿壓電源對測定板200A施加 例如+1 000 [V]或-1 000 [v]的高 门电Μ而使帶電，再將由靜 消除裝置300的射極301所生忐雖工， 所生成離子碰抵測定板200Α。在 此狀態下’針對測定板20〇α 曰〕電位被負離子中和並從 + ι〇〇〇[ν]衰減至+100[ν]所需 而戈旳砰間、或被正離子中和並 從-1 000 [v]衰減至_100[v]所 L」所窩要的時間，利用測定器本體 1 00Α進行測定。該等時間越 , 门越短利用靜電消除裝置300進 仃的離子產生量或產生率越高， f估為除電性能較高。 另外，對測定板200A的施加電壓传^+1nnn cn 电i你在±1000〜±5000 [V]範圍 内存在有各種形式。 此處將執行上述測定動作的描斗 疋動作的杈式稱「衰減測定模式」。 再者’在測疋離子均衡性能日年，J4 . 衡性此af错由將測定板200A予 二接地’將其電位成為0[V]’再將由靜電消除裝置300所 成的正負離子碰抵測定板舰。此時，若靜電消除裝置 所生成的正離子量與負離子量相等，測定板2嶋的電 位便在0 [ V ]附近呈稃定，田而拉士At ± J疋 static electricity 4, except for the static electricity of the device 300, 'apply to the measuring plate 200A from the measuring device body 1A, for example, +1 000 [V] or -1 000 [v] The high gate is charged and charged, and the generated ions are generated by the emitter 301 of the static eliminating device 300, and the generated ions hit the measuring plate 200 Α. In this state, the potential for the measurement plate 20〇α 曰 is neutralized by the negative ions and attenuated from + ι〇〇〇[ν] to +100[ν], and is neutralized by positive ions or The time required to decay from -1 000 [v] to _100 [v] L" was measured using a measuring instrument body of 100 Α. The shorter the time, the shorter the door is, the higher the amount of ion generation or the rate of generation by the static electricity eliminating device 300 is, and f is estimated to be higher in the static elimination performance. In addition, the voltage applied to the measuring board 200A is transmitted in the range of ±1000 to ±5000 [V]. There are various forms in the memory. Here, the 描 type of the stroke operation of the above-described measurement operation is referred to as "attenuation measurement mode". Furthermore, in the day of the measurement of the ion balance performance, J4. The balance of the af is caused by the grounding of the measuring plate 200A to 'the potential is 0 [V]' and the positive and negative ions formed by the static eliminating device 300 are hit. Determination of the board ship. At this time, if the amount of positive ions generated by the static elimination device is equal to the amount of negative ions, the potential of the measuring plate 2 is set at 0 [V], and the field is closed.
穂疋因而藉由利用測定器本體100A 測定該電位的大小與極性， ^ ^ ^ 仗1静電确除裝置的離子 201219800 均衡性能。 此處將執彳千μ、+、 式」。 _測定動作的模式稱「離子均衡測定模 再者’屬於利用靜電消除裝 晶顯示器用基板血電费鹿… 除電對象物的液 m㈣L 器用基板’近年正朝大型化一 途凟進，隨此頰务，& 土 變長。 構造靜電㈣裝置的長度亦隨之 & §依此利用充電板監測器試驗長條靜電消除裝置之性 L由第U圖中得知’發生必需配合橫跨靜電消除 300全長配置的多射扛 、直 夕數射極3G1，將1台充電板監測器CPM’ 的位置朝靜電消除奘署qnn>tAe _ @請裝置3GG的長邊方向進行相對性移動， 並依序施行測定的必要 田 V. _ , 疋的乂要。因而’為評估i台靜電消除裝置 的性能’冑會有手續較多、耗費時間的問題。 相對於此，為能對長條靜電消除裝置300施行i次測 定便可完成，雖若將充電板監測器CPM’呈複數台排列並進 行測定便可，但一般因為充電板監測器CPM，係屬高單價， 因而會導致耗費較多的成本。 另外，將測定板分割為複數片段，在對該等各片段每 隔一個分別施加正、負偏壓電壓的狀態下，測定由靜電消 除裝置所生成離子的離子均衡與正負離子產生率之離子均 衡監測器，在專利文獻1中有揭示。 [先行技術文獻] [專利文獻] [專利文獻1]曰本專利特表2008-519260號公報（段落 201219800 [0012卜[0017]、帛1圖〜第3圖等） 【發明内容】 (發明所欲解決之課題） 專利文獻1所記載的翌4 H U知技術’將測定板分割為複數 片段並施加既定偏壓電壓， ^ 稭此可同時測定離子均衡及離 子產生率，但如前述，因靜 、 ^ 靜電為除裝置的長條化而衍生之 插作煩雜與载時間長期化等問題仍未獲解決。 緣是，本發明的解決課題係在於提供 象物的大型化，而造成靜電 ：因除電對 于、装置呈長條的情況，仍.可 利用1台充電板監測器效率佳士 手佳地δ子估靜電消除裝置性能之 充電板監測器。 (解決課題之手段） 為解決上述課題，申請專利銘 Μ寻矛J &圍第1項發明的充電板 監測器’係利用測定板檢測由靜電消除裝置所生成的正負 離子，並評估上述靜電消除裝置的除電性能及正負離子之 離子均衡性能的充電板監測器；而1台測定器本體係包 括.測定經預先施加既定電壓的上述測定板之電位，因上 述料而衰減至既定值之衰減時間的機能，以及根據上述 測定板的電位，測定離子均衡的機能； ^上述測定板係配合評估對象的上述靜電消除裝置之長 度而设置複數台，該等測定板係對上述測定器本體呈並聯 或串聯連接。 申請專利範圍第2項發明係在申請專利範圍第i項所 201219800 記載的充電板監測器 該顯示部係分別顯示 離子均衡測定結果。 中’上述測定器本體係包括顯示部， 複數台上述測定板的上述衰減時間及 申請專利範圍第q 弟3項發明係在申請專利範圍第 項所記載的充電板監洌 ^ ^ l ^ ^ 'J裔中’在複數台上述測定板中八Therefore, by measuring the magnitude and polarity of the potential by the measuring device body 100A, ^ ^ ^ 仗 1 electrostatically confirms the ion 201219800 equalization performance of the device. Here, you will be given a thousand μ, +, formula. _The mode of the measurement operation is called "Ion-Equilibrium Measurement Molder", which belongs to the substrate for the use of the static elimination of the crystal display. The liquid m (four) L-substrate substrate is in the process of large-scale development in recent years. , & soil becomes longer. The length of the static electricity (4) device is also followed by & § § The use of the charging plate monitor to test the strip static elimination device L is known from the U figure 300 full-length configuration of multi-shot, straight-day emitter 3G1, the position of a charging board monitor CPM' to the static elimination department qnn> tAe _ @ please device 3GG long-direction direction, and It is necessary to carry out the measurement of the field V. _ , 疋 。 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而The device 300 can be completed by performing i measurement. Although the charging plate monitor CPM' is arranged in a plurality of stages and can be measured, generally because the charging plate monitor CPM is high in unit price, it is costly. In addition, the measurement plate is divided into a plurality of segments, and ion balance and positive and negative ion generation rates of ions generated by the static elimination device are measured in a state where positive and negative bias voltages are applied to each of the segments. An ion-balanced monitor is disclosed in Patent Document 1. [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open Publication No. 2008-519260 (paragraph 201219800 [0012] [0017] (3rd, etc.) [Explanation of the Invention] (Problems to be Solved by the Invention) The 翌4 HU-known technique described in Patent Document 1 divides the measurement plate into a plurality of segments and applies a predetermined bias voltage, which can be simultaneously measured. Ion balance and ion generation rate, but as described above, the problems of insertion and cumbersome insertion and long-term loading due to static and static electricity are not solved. It is to provide large-scale of the object, and cause static electricity: due to the situation of the electricity removal, the device is long, still can use a charging plate monitor efficiency, Jiashi hand Jiadi δ sub-estimation static elimination device Charger board monitor. (Means for solving the problem) In order to solve the above problems, the patent application "Ming Μ Μ J J & The charging plate monitor of the first invention" is used to detect the generation of the static elimination device by the measuring plate. a positive and negative ion, and a charging plate monitor for evaluating the static elimination performance of the static elimination device and the ion balance performance of the positive and negative ions; and one measuring device includes: measuring the potential of the measuring plate to which a predetermined voltage is applied in advance, because the above material And the function of attenuating the decay time to a predetermined value, and measuring the function of ion equalization according to the potential of the measuring plate; ^ the measuring plate is matched with the length of the static eliminating device to be evaluated, and the plurality of measuring plates are provided. The above detector bodies are connected in parallel or in series. Patent Document No. 2 is a charging plate monitor described in Patent Application No. i. 201219800. The display unit displays ion balance measurement results. The above-mentioned measuring device includes a display unit, the above-mentioned decay time of the plurality of measuring plates, and the invention patent scope. The third invention is in charge of the charging plate according to the second paragraph of the patent application scope. ^ ^ l ^ ^ ' J in the 'in the multiple of the above determination board eight
Μ㈣4上述心器本制依照上述位址 I 定板所獲得的測定數據施行處理。 各# (發明效果） 根據本發明，雜+ 藉由對1台測定器本體並聯或_聯 必要台數的測定板，倆^ m ^ # * 了使用1台充電板監測器，評估具 條靜電消除裝置的除電性能與離子均衡性能，俾可實現: 時間且低成本的靜電消除裝置之性能評估。 、再者，若配合靜電消除裝置的長度，變更測定器本體 所連接的測定板台數’即 p使對長度不同的各種靜電消除 置仍可適用。 、 【實施方式】 以下’沿用圖式說明本發明的實施形態。 、首先’本發明的充電板監測器係由1台測定器本體與 複數台測定板構成β 體與複數台測定板利用 圖’第1圖的第1實施 有 第1圖〜第3圖所示係測定器本 線進行連接的實施形態概略構造 形態係對i台測定ϋ本體1GG，並聯連接著複數台（例如3 台）測定板2〇1，202,203的例1 2圖的第之實施形態係對 6 201219800 1台測定器本體100，串聯連接著複數台、、目,丨^上 疋板 201’ 202, 203的例，第3圖的第3實施形態係對 „。 1台測定 器本體100，將由複數台測定板2〇1，2〇2, 203串聯連接的 電路’並聯連接例如3個的例子。 再者’第4圖的第4實施形態係對1台測定器本體 1〇〇，將由複數台測定板201，202, 203串聯連接的電路，並 聯連接例如3個並接地，且各串聯電路在與測定器本體^ 之間係利用無線連接的例。 另外，第1圖與第2圖所示實施形態，在測定器本體 100與複數台測定板201，202, 203之間、或與該等串聯電 路之間’亦可利用無線進行連接。 上述第卜第4實施形態中，測定板係配合屬於評估對 象的棒型構造靜電消除裝置（未圖示）全長，並聯或串聯連 接著必要的剛好台數。例如第丨圖的測定板2〇1之長度（或 寬度）為L時，對全長為3L以上的靜電消除裝置，為能均 等覆蓋全長，只要將3台測定板2〇12〇2,2〇3依適當間隔 排列配置便可。 其次，第5圖所示係第丨實施形態的詳細構造圖。 第5(a)圖所示係測定器本體1〇〇的詳細構造第5(b) 2所示係測定板201，202, 203的詳細構造。另外，因為測 疋板201，202, 203均屬相同構造，因而第5(b)圖中僅例示 測定板2 01而已。 如第5(a)圖所不，測定器本體1〇〇係包括：Cpui〇2a、 控制電路l〇2b、及A/D轉換電路102c。該cpul〇2a係統 201219800 括地控制充電板監測器全體，且執行由測定板2 〇 1，2 〇 2，2 〇 ；3 的電位測定與計時器動作等所衍生的運算處理。該板控制 電路102b係對測定板20 1,202,203的動作進行控制。該 A/D轉換電路l〇2c係將測定板201，202, 203的電位（類比 信號），轉換為數位信號。此處在CPU1 02a係在内部記憶體 中記憶著為將測定板201，202, 203分別予以特定的位址。 再者，在測定器本體1〇〇中設有紅外線單元1〇2(1。該 紅外線單元1 〇2d係為根據屬於測定結果的靜電消除裝置 之除電性能與離子均衡，利用紅外線通信控制著對靜電消 除裝置的施加電壓等。另外’該紅外線單元丨〇2d在本發明 中並非屬必要要件。雖未圖示，根據測定結果的靜電消除 裝置控制’亦可利用CPU1 02a經由無線通信手段實施。 CPU1 02a連接著為進行電源之關/開與各種輸入操作用 由開關或觸控板等構成的輸入部丨〇2e，且連接著為驅動上 述顯示部101用的顯示電路102f。 再者，在測定器本體100中設有諸如溫度感測器、 度感測器、風速感測器等感測器部1〇2p該感測器部1〇2运 係測定測定器本體i 00的周圍環境條件，視必要亦可分別 設置於測定板2〇12〇22〇3側，俾測定各板的周圍環境條 件。 ’、 其次，根據第5(b)圖說明測定板201的構造6 測定板201係由板控制部201A與板本體2〇1 B構成。 板控制部201A係包括：控制電路201a、正電壓產生電路 201b與負電壓產生電路2〇lc、感測器驅動電路2〇ld、靜 8 201219800 電感測器2〇1e、及記憶體201f。該控制電路2〇ia係連接 於測定器本體1〇〇。該正電壓產生電路2〇ib與負電壓產生 電路2〇lc係在衰減測定模式中4對板本體2()ιβ施加正 或負高電壓用。該靜電感測g 2〇le係為檢測板本體2〇ib 的電位用。該感測器驅動電路2Qld係為驅動該靜電感測器 2(Ue用。該記憶體201ί係記憶著板本體咖（測定板2〇ι) 的位址。 板本體201Β係如前述，構成由離子檢測用既定大小的 導電性板2片重疊之構造，為求方便，相㈣細構造便省 略圖示。 另外，正電壓產生電路201b及負電塵產生電路陳 亦可内建於測定器本體1〇〇中。 ^再者，在測定器本體100及板控制部201A中分別内建 著電源電路（未圖示）。 接著，說明該第1實施形態的動作。 ^首先，將屬於性能評估對象的靜電消除裝置配置於測 心板201，202, 2G3的上方，冑由靜電消除裝置所產生的離 用C風手#又荨供應給測定板2 01，2 0 2，2 0 3。 …在測^器本體1 〇〇中，利用輸入部1 02e選擇既定的測 疋拉式（衰減測定模式、離子均衡測定模式），再從CPMOh 經由板控制電路黯對測定板2Q1，2Q2,2()3送出控制 (測定指令）。 ° ; 内今，衰減測定模式係經由測定板201的板控制部2〇1A 控制電路201a，驅動著正電壓產生電路2〇lb或負電 201219800 壓產生電路201C，而對板本體2〇 1B施加例如+1000 [v]或 -ιοοο[ν]。此時’板本體201B的電位係經由靜電感測器 2〇le、感測器驅動電路2〇ld及控制電路2〇la，從測定器 本體100的A/D轉換電路l〇2c輸入給cPU102a，因此 CPU 102a便利用内建的計時器測定板本體2〇 1 b的電位從 + i〇〇〇[v]衰減至+100[v]、或從 _1〇〇〇[v]衰減至 _ι〇〇[ν]的 時間。 另外，該衰減測定模式中，使從靜電消除裝置僅產生 負離子，並分別測定板本體201B的電位從+1 000 [V]衰減至 +1 0 0 [V ]的時間，或使僅產生正離子並分別測定從-1 0 0 0 [ V ] 农減至-10 〇 [ V ]的時間。 再者，個個測定板201(板本體201B)的測定數據，1 被附加上記憶體201f内的位址並傳送給CPU102a。 CPU102a係經由顯示電路1〇2f及顯示部ι〇ι，依數4 顯示所測得的衰減時間。顯示形式係只要依例如將施加」 電壓時的衰減時間為「+1.2[s]」、將施加負電壓時的幻 時間為「-2. 〇[s]」的方式進行顯示便可。 上述動作係除位址不同之外，相關其他的測定^ 句相15] ’ CPU1 〇2a可判斷所測得的各測定^ 〇l’202,2G3之衰減時間，並同時顯示^ 雪、」用該农減測定模式所測得衰減時間，便可測定從* 裝置的離子產生量，換言之可㈣除電性能，因ΐ 可配合此項社里，也/ 與發出催促i行射極r對靜電消除裝置的施加電壓控制’ m潔的警報等，該等控制信號與警寿 10 201219800 信號的傳送係可使用紅外線單元102de 再者，當從測^器本體_將離子均衡敎模式的測 定指令傳送給敎板201側時，在板控制部20U中於未使 正電壓產生電路201b、負電壓產生電路2Qlc進行動作的 情況下，敎板本體2G1B的電位，並附加位址，再傳送給 疋器本體100的CPU102a。此時，使從靜電消除裝置產 生正負離子。 CPU102a係藉由檢測所傳送至電位的極性及大小便 可檢測正負離子量的均衡狀態，因而利用顯㈣m可執 行當正負離子量呈均衡時便顯示Γ±〇[ν]」，當呈不均衡時 便顯示諸如「+3[V]」、「-7[ν]」等顯示。 其次’帛6圖所示係第2實施形態的詳細構造圖，第 6—U)圖所示係測定器本體⑽的構造，帛6(b)圖所示係測 定板201的構造。該第2實施形態係除對測定器本體1 〇〇， 串聯連接測定& 2G1，202, 203之處外，其餘在構造上均與 第1實施形態相同。 該第2實施形態的動作基本上係與第丨實施形態相 同，需要對串聯連接的測定板2〇1，2〇2 2〇3之各測定數據 (板本體的電位）’分別附加位址，並在直接連接於測定器 本體100的測定板201之控制電路20la中，將各測定數據 整合為一，再傳送給CPU102a等順序。 另外，相關第3圖所示第3實施形態，基本上亦可適 用第5圖或第6圖的構造，只要利用cpui〇2a及控制電路 201a管理串並聯連接的多數台測定板之各位址便可。 11 201219800 再者，第7圖所示係第4實施形態的詳細構造圖，第 7(a)圖所不係測定器本體15〇的構造，第7(b)圖所示係測 定板201的構造。 第7(a)圖所示測定器本體i5〇，cpui〇2a係連接於無 線處理電路l〇2h，該無線處理電路1〇2h則連接於天線 i〇2i，構成在與測定板201，2〇2,2〇3之間，可將控制信號 與測定數據利用數位信號進行無線通信狀態。該無線通信 方式係可利用例如：小電力無線通信 '藍芽（註冊商標）、 展頻通信等周知通信方式。 第7 ( b )圖所示測定板2 〇 1 ’在板控制部2 〇 1 c中設置無 線處理電路2 01 g及天線2 01 h，並使用於與上述測定器本 體150間之無線通信。 該第4實施形態的動作’係除測定器本體15〇側與測 疋板201，202, 203之間的通信手段，係屬於無線通信手段 之外’其餘均與第1實施形態同樣，根據第4實施形態， 具有在測定器本體150側與測定板2〇1，2〇2,2〇3間沒有配 線麻煩，且該等的設置場所不受限制等優點。 其次，第8圖、第9圖所示係本發明實施形態(例如第 3或第4實施形態)的使用狀態圖，第8圖係相當於平面圖， 第9圖係相當於側視圖。 第8圖中，6係靜電消除褒置300之除電對象物的'、夜 :曰:顯示器等基板’假設使用前述各實施形態的充電板監測 器’實施對該基板G依如圖示位置關係所配置3台靜電消 除裝置300之性能評估的情況。 〆 12 201219800 第8圖中，μ山时 ^ 稽由將3台測定板201, 202, 203的串聯連 接電路，對測定。。+祕 、 斋本體並聯連接3個，藉此整體便將9台 測定板分配於頻# 、、1〜9 ’並將該頻道編號附記於各測定板 的框内。 如第8圖、笛。图化- 乐y圖所示，從對應基板G所配置靜電消 除裝置300的县硌士 a 邊方向位置開始設定複數頻道，使該等頻 道分別對應於測中& ^ 〇 、疋板，並測定除電時間與離子均衡，藉此 更可有效率地執行複數台靜電消除裝置·的性能評估。 第10圖〜第医！— 一 斤不係本發明實施形態的測定結果顯 不例圖。 ▲第10圖所不係針對第9圖所示各頻道CH卜CH9，利用 =測定模式所測得正電壓的衰減時間（⑴、負電壓的衰 、、（）&離子均衡之整合顯示例，亦合併顯示利用 上述感測器部lG2git行檢測的關環境條件。 具丁方法可考慮當衰減時間(+ ”、㈠)及離子均衡的 數值’超過相當於需要、、*音从铱，< …思的第1設定值時’便將數值依 澄色顯不，當超過大於兮铉, 大於該第1設定值的第2設定值時，倕 將數值依紅色顯示並警告等方法。 另外，該等測定結果係記憶於測定器本體中，視必 傳送給上位的監視系统，式谌Λ亦叫αι ^ 统或構成可從外部的個人電腦利用 有線或無線通信進行讀出。 第11圖所示係與第 各頻道CH1〜CH9的位置， 再者，第12圖、第 10圖同樣的，使測定數據對應於 並二維顯示的例子。 13圖所示係各頻道的離子均衡狀 13 201219800 態依圖形顯示的你丨i@ , n 、 子第12圖所示係當整合複數頻道的情 況’第13圖所示係個 Μ乃』顯不各頻道的例子。另外，橫軸係 各個測定板（板本體）上a# ¥ ^ . , )上的位置，縱軸係正負的電位。各圖 形的特性線可考慮依每個頻道改變顯示顏色與線種。 。。依如以上所說明’才艮據各實施形態，藉㈣1台測定 :本體連接必要台數的測定板，便可使用1台充電板監測 益’評估長條靜電消除裝置的除電性能、離子均衡性能。 【圖式簡單說明】 第1圖係本發明第1實施形態的概略構造圖。 第2圖係本發明第2實施形態的概略構造圖。 第3圖係本發明第3實施形態的概略構造圖。 第4圖係本發明第4實施形態的概略構造圖。 第5(a)、（b)圖係第1實施形態的詳細構造圖。 第6(a)、（b)圖係第2實施形態的詳細構造圖。 第7(a)、（b)圖係第4實施形態的詳細構造圖。 第8圖係本發明實施形態的使用狀態說明圖。 第9圖係本發明實施形態的使用狀態說明圖。 第10圖係本發明實施形態的測定結果顯示例圖。 第11圖係本發明實施形態的測定結果顯示例圖。 第12圖係本發明實施形態的測定結果顯示例圖。 第13圖係本發明實施形態的測定結果顯示例圖。 第14圖係習知充電板監測器的概略構造圖。 14 201219800 【主要元件符號說明】 1 0 0〜測定器本體； 1 01〜顯示部； 1 0 2 i〜天線； 150~測定器本體； 200A〜測定板； 201, 202, 203〜測定板 2 01 a〜控制電路； 201A，2010板控制部 201b〜正電壓產生電路； 201B〜板本體； 201c~負電壓產生電路； 2 01 d〜感測器驅動電路 20le〜靜電感測器； 2 01 f〜記憶體； 201g〜無線處理電路； 201h~天線； 300〜靜電消除裝置； 301〜射極； 100A~測定器本體； 102a〜CPU ; 102b〜板控制電路； 102c〜A/D轉換電路； 102d〜紅外線單元； 1 0 2 e ~輸入部； 1 0 2 f〜顯示電路； 102g〜感測器部； 102h〜無線處理電路； CPM’〜充電板監測器； G〜基板。 15Μ (4) 4 The above-mentioned cardiac device system is processed according to the measurement data obtained by the above-mentioned address I plate. Each # (Effect of the Invention) According to the present invention, the impurity + by using one measuring instrument body in parallel or _ the necessary number of measuring plates, two ^ m ^ # * using a charging plate monitor to evaluate the static electricity Eliminating the device's static elimination performance and ion equalization performance, it can achieve: Time and low-cost performance evaluation of static elimination devices. Furthermore, if the length of the static electricity eliminating device is matched, the number of measuring plates connected to the measuring device body, i, which is p, can be applied to various static electricity eliminating devices having different lengths. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, the charging plate monitor of the present invention is composed of a single measuring device main body and a plurality of measuring plates, and the first and third measuring plates are formed by the first embodiment of the first embodiment. EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT 6 201219800 One measuring unit body 100 is connected in series with a plurality of stages, an example of a top plate 201' 202, 203, and a third embodiment of Fig. 3 is a pair of measuring units 100. For example, three circuits in which a plurality of measurement boards 2〇1, 2〇2, and 203 are connected in series are connected in parallel. Further, in the fourth embodiment of the fourth embodiment, one measuring unit body 1 is used. A circuit in which a plurality of measurement boards 201, 202, and 203 are connected in series is connected in parallel to, for example, three, and is grounded, and each series circuit is electrically connected to the measuring unit body. In addition, FIG. 1 and FIG. In the embodiment shown, the measuring device body 100 and the plurality of measuring plates 201 Between 202, 203, or between the series circuits, it is also possible to connect by wireless. In the fourth embodiment, the measuring board is equipped with a rod-type static electricity eliminating device belonging to the evaluation target (not shown). Full length, the number of necessary units is connected in parallel or in series. For example, when the length (or width) of the measuring plate 2〇1 of the second drawing is L, the static elimination device having a total length of 3 L or more is capable of uniformly covering the entire length. It is sufficient to arrange three measuring plates 2〇12〇2 and 2〇3 at appropriate intervals. Next, Fig. 5 is a detailed structural view of the third embodiment. Fig. 5(a) shows the measurement. The detailed structure of the main body 1〇〇 is shown in Fig. 5(b) 2 as the detailed structure of the measuring plates 201, 202, and 203. In addition, since the measuring plates 201, 202, and 203 are all of the same structure, the fifth (b) Only the measuring plate 201 is illustrated in the drawing. As shown in Fig. 5(a), the measuring device body 1 includes: a CPU 2a, a control circuit 102b, and an A/D conversion circuit 102c. 2a system 201219800 covers the whole of the charging board monitor, and is executed by the measuring board 2 〇 1, 2 〇 2, 2 The calculation process derived from the potential measurement of 3 and the timer operation, etc. The plate control circuit 102b controls the operation of the measurement plates 20 1, 202, 203. The A/D conversion circuit 10c is an evaluation plate 201, 202, 203 The potential (analog signal) is converted into a digital signal. Here, CPU1 02a stores in the internal memory a specific address for the measurement boards 201, 202, and 203. Further, in the analyzer body 1 There is an infrared unit 1〇2 (1). The infrared ray unit 1 〇 2d controls the voltage applied to the static electricity erasing device by infrared communication based on the static elimination performance and ion equalization of the static electricity eliminating device belonging to the measurement result. Further, the infrared unit 丨〇 2d is not essential in the present invention. Although not shown, the static elimination device control based on the measurement result can be implemented by the CPU 102a via a wireless communication means. The CPU 1 02a is connected to an input unit 丨〇 2e for switching the power source on/off and various input operations, such as a switch or a touch panel, and a display circuit 102f for driving the display unit 101. Furthermore, a sensor portion such as a temperature sensor, a degree sensor, a wind speed sensor, etc., is provided in the measuring device body 100. The sensor portion 1 2 is a measuring instrument body i 00 The ambient conditions may be separately set on the side of the measuring plate 2〇12〇22〇3 as necessary, and the surrounding environmental conditions of each plate are measured. Next, the structure 6 of the measurement plate 201 will be described based on Fig. 5(b). The measurement plate 201 is composed of a plate control unit 201A and a plate main body 2〇1B. The board control unit 201A includes a control circuit 201a, a positive voltage generating circuit 201b, a negative voltage generating circuit 2〇1c, a sensor driving circuit 2〇ld, a static 8 201219800 inductance detector 2〇1e, and a memory 201f. The control circuit 2A is connected to the measuring device body 1A. The positive voltage generating circuit 2 〇 ib and the negative voltage generating circuit 2 〇 lc are used to apply a positive or negative high voltage to the pair of plate bodies 2 () ιβ in the attenuation measurement mode. This electrostatic sensing g 2〇le is used to detect the potential of the plate body 2〇ib. The sensor driving circuit 2Qld is for driving the electrostatic sensor 2 (Ue. The memory 201 is used to memorize the address of the board body coffee (measuring board 2〇ι). The board body 201 is as described above, and is constituted by In the ion detection, a structure in which two conductive plates of a predetermined size are overlapped is used for convenience, and the phase (four) thin structure is omitted. The positive voltage generating circuit 201b and the negative electric dust generating circuit may be built in the measuring device body 1 Further, a power supply circuit (not shown) is built in the measuring device main body 100 and the board control unit 201A. Next, the operation of the first embodiment will be described. ^ First, it is a performance evaluation target. The static elimination device is disposed above the core plates 201, 202, 2G3, and the release C wind hand # generated by the static elimination device is supplied to the measurement plate 2 01, 2 0 2, 2 0 3 ... In the measuring device body 1 ,, the predetermined measuring and pulling type (attenuation measurement mode, ion equalization measurement mode) is selected by the input unit 102e, and the measuring plate 2Q1, 2Q2, 2() is passed from the CPMOh via the plate control circuit. 3 send out control (measurement command). °; inner and present, decline The measurement mode is driven by the board control unit 2〇1A control circuit 201a of the measurement board 201, and the positive voltage generation circuit 2〇1b or the negative power 201219800 voltage generation circuit 201C is driven, for example, +1000 [v] is applied to the board body 2〇1B or -ιοοο[ν]. At this time, the potential of the board body 201B is via the electrostatic sensor 2, the sensor drive circuit 2〇ld and the control circuit 2〇la, from the A/D converter circuit of the analyzer body 100. L〇2c is input to the cPU 102a, so the CPU 102a conveniently uses the built-in timer to measure the potential of the board body 2〇1 b from +i〇〇〇[v] to +100[v], or from _1〇〇〇 [v] The time of attenuation to _ι〇〇[ν]. In the attenuation measurement mode, only negative ions are generated from the static elimination device, and the potential of the plate body 201B is measured to be attenuated from +1000 [V] to + 1 0 0 [V ] time, or only positive ions are generated and the time from -1 0 0 0 [ V ] is reduced to -10 〇 [ V ], respectively. Further, each measuring plate 201 (plate body) The measurement data of 201B) is added to the address in the memory 201f and transmitted to the CPU 102a. The CPU 102a is via the display circuit 1〇2f and the display unit ι〇ι The measured decay time is displayed in the number 4. The display format is "+1.2 [s]" when the voltage is applied, for example, and the magic time when the negative voltage is applied is "-2. 〇 [s The above operation can be performed. In addition to the different address, the other measurement results are related to the 15] 'CPU1 〇 2a can determine the measured decay time of each measurement ^ 〇 l '202, 2G3 And simultaneously display ^ snow, "The decay time measured by the agricultural subtraction measurement mode can be used to determine the amount of ion generated from the * device, in other words, (4) the static elimination performance, because it can be used in this society, Urging the i-row emitter r to apply voltage control to the static elimination device, etc., such control signals and the signal transmission system of the police 10 201219800 can use the infrared unit 102de, and when from the tester body _ When the measurement command of the ion equalization mode is transmitted to the side of the seesaw 201, when the positive voltage generating circuit 201b and the negative voltage generating circuit 2Qlc are not operated in the board control unit 20U, the potential of the seesaw body 2G1B is added. Address, then passed to the device CPU102a 100. At this time, positive and negative ions are generated from the static electricity eliminating device. The CPU 102a can detect the equilibrium state of the positive and negative ions by detecting the polarity and magnitude of the potential transmitted. Therefore, the display (4) m can be used to display Γ±〇[ν] when the positive and negative ions are equalized, and the imbalance is displayed. Displays such as "+3[V]" and "-7[ν]". Next, a detailed structural view of the second embodiment is shown in Fig. 6, and a structure of the measuring device body (10) is shown in Fig. 6-U), and a structure of the measuring plate 201 is shown in Fig. 6(b). In the second embodiment, the measurement unit body 1 is connected to the measurement unit & 2G1, 202, and 203 in series, and the rest of the structure is the same as that of the first embodiment. The operation of the second embodiment is basically the same as that of the second embodiment, and it is necessary to add an address to each measurement data (potential of the plate body) of the measurement plates 2〇1, 2〇2 2〇3 connected in series. Further, in the control circuit 20a of the measuring board 201 directly connected to the measuring device main body 100, each measurement data is integrated into one, and then transmitted to the CPU 102a and the like. Further, in the third embodiment shown in Fig. 3, basically, the structure of Fig. 5 or Fig. 6 can be applied, and the addresses of the plurality of measurement boards connected in series and in parallel can be managed by using cpui 2a and control circuit 201a. can. 11 201219800 In addition, FIG. 7 is a detailed structural view of the fourth embodiment, and FIG. 7(a) does not show the structure of the measuring device body 15A, and FIG. 7(b) shows the measuring plate 201. structure. The measuring device main body i5〇, cpui〇2a shown in Fig. 7(a) is connected to the wireless processing circuit 110h, and the wireless processing circuit 1〇2h is connected to the antenna i〇2i, and is formed on the measuring board 201, 2 Between 2, 2〇3, the control signal and the measurement data can be wirelessly communicated using the digital signal. This wireless communication method can utilize, for example, a small-power wireless communication "Blue Bud (registered trademark), spread spectrum communication, and the like. The measuring board 2 〇 1 ' shown in Fig. 7(b) is provided with a wireless processing circuit 2 01 g and an antenna 201h in the board control unit 2 〇 1 c, and is used for wireless communication with the measuring unit body 150. The operation of the fourth embodiment is the same as that of the first embodiment except that the communication means between the side of the measuring device main body 15 and the measuring plates 201, 202, and 203 belongs to the wireless communication means. In the embodiment, there is an advantage that there is no trouble in wiring between the measuring instrument main body 150 side and the measuring plates 2〇1, 2〇2, and 2〇3, and the installation places are not limited. Next, Fig. 8 and Fig. 9 show a state of use of an embodiment (e.g., the third or fourth embodiment) of the present invention, and Fig. 8 corresponds to a plan view, and Fig. 9 corresponds to a side view. In Fig. 8, the "substrate: 曰: substrate such as a display" of the 6-series static elimination device 300 is assumed to have a positional relationship with respect to the substrate G by using the charging plate monitor of each of the above embodiments. The performance evaluation of the three static elimination devices 300 is configured. 〆 12 201219800 In Fig. 8, the μ mountain time is measured by a series connection circuit of three measuring boards 201, 202, and 203. . The three secrets and the main body are connected in parallel, and the nine measuring plates are distributed to the frequency #, , 1 to 9 ' as a whole, and the channel number is attached to the frame of each measuring plate. As shown in Figure 8, flute. As shown in the figure y, the plural channels are set from the position of the county gentleman a side of the static electricity eliminating device 300 disposed on the corresponding substrate G, so that the channels correspond to the measurement & ^ 〇, 疋, and The de-energization time and ion equalization are measured, whereby the performance evaluation of the plurality of static elimination devices can be performed more efficiently. Figure 10 ~ the first doctor! — One kilogram is not shown as an example of the measurement results of the embodiment of the present invention. ▲ Figure 10 is not for the integrated display of the positive voltage measured by the = measurement mode for each channel CH bu CH9 shown in Figure 9 ((1), negative voltage decay, () & ion balance integrated display example Also, the closed environment conditions detected by the above-mentioned sensor part lG2git line are combined and displayed. The method of the Ding method can be considered when the decay time (+", (1)) and the value of the ion balance exceeds the equivalent, and the * sound is from 铱, <; ... When thinking about the first set value, the value will be displayed according to the color. When the value exceeds 兮铉 and is greater than the second set value of the first set value, the value will be displayed in red and warned. The measurement results are stored in the main body of the measuring device, and must be transmitted to the upper monitoring system, which is also called alpha system or can be read from an external personal computer by wired or wireless communication. The position of the respective channels CH1 to CH9 is shown, and the measurement data is corresponding to the two-dimensional display in the same manner as in Fig. 12 and Fig. 10. Fig. 13 shows the ion balance of each channel. 201219800 Status shows you 丨i@ , n, sub-figure 12 shows the case where the complex channel is integrated. The figure shown in Figure 13 is a different channel. In addition, the horizontal axis is on each measurement board (board body) a# ¥ ^ The position on the vertical axis is positive and negative. The characteristic line of each graph can be changed according to each channel to change the display color and line type. According to the above description, according to each implementation form, (4) 1 unit Measurement: The measuring board of the necessary number of the main body is connected, and the charging performance and the ion balance performance of the long static elimination device can be monitored by using one charging plate. [Simplified illustration] Fig. 1 is the first embodiment of the present invention 2 is a schematic structural view of a second embodiment of the present invention. Fig. 3 is a schematic structural view of a third embodiment of the present invention. Fig. 4 is a schematic structural view of a fourth embodiment of the present invention. 5(a) and (b) are detailed structural diagrams of the first embodiment. 6(a) and 6(b) are detailed structural diagrams of the second embodiment. 7(a) and (b) The figure is a detailed structural view of the fourth embodiment. Fig. 8 is a view showing the state of use of the embodiment of the present invention. Fig. 9 is a view showing an example of the use of the embodiment of the present invention. Fig. 10 is a view showing an example of the measurement result of the embodiment of the present invention. Fig. 11 is a view showing an example of the measurement result of the embodiment of the present invention. Fig. 13 is a view showing an example of measurement results of an embodiment of the present invention. Fig. 14 is a schematic structural view of a conventional charging plate monitor. 14 201219800 [Description of main component symbols] 1 0 0 to the measuring device body; 1 01 to the display portion; 1 0 2 i to the antenna; 150 to the measuring device body; 200A to the measuring plate; 201, 202, 203 to the measuring plate 2 01 a to the control circuit; 201A, 2010 Board control unit 201b to positive voltage generating circuit; 201B to board body; 201c to negative voltage generating circuit; 2 01 d~sensor driving circuit 20le~electrostatic sensor; 2 01 f~memory; 201g~wireless processing circuit 201h~ antenna; 300~ static elimination device; 301~electrode; 100A~determiner body; 102a~CPU; 102b~ board control circuit; 102c~A/D conversion circuit; 102d~infrared unit; 1 0 2 e ~ Input Department; 1 0 2 f~ display circuit; 102g~ sensor part; 102h~ wireless processing circuit; CPM'~ charging board monitor; G~ substrate. 15