JP4904133B2 - Charge monitoring device and ion generation device performance evaluation method - Google Patents

Description

  The present invention relates to a charge monitoring device for evaluating the performance of an ion generating device used for static elimination of a charged object. Furthermore, the present invention relates to a method for evaluating the performance of an ion generation device using this charge monitoring device.

  In general, an ion generation device (so-called ionizer) generates a corona discharge from a discharge needle by applying a high voltage between the discharge needle and a counter electrode facing the discharge needle. And by this corona discharge, air is ionized and positive and negative air ions are generated. This type of ion generation device can neutralize the charge of the charged material by the generated positive and negative air ions, and thus is normally used as a charge removal device that neutralizes the charged material.

  As an apparatus for evaluating the static elimination characteristics, ion balance, and the like of this type of ion generation apparatus, an apparatus called a charged plate monitor standardized by IEC 61340-5-1 or JIS TR C0027-1 (for example, a non-existing apparatus). Patent Documents 1 and 2) are used. FIG. 9 is a diagram showing a schematic configuration of the charging plate monitor device.

  As shown in the figure, this charging plate monitoring device includes a charging plate 100, a high voltage power source 102 for applying a positive or negative DC high voltage to the charging plate 100 via a switch 101, and a potential of the charging plate 100 as a non-contact sensor. The surface potential measuring device 104 that measures the voltage via the 103 and the timer 105 that measures the decay time of the potential of the charging plate 100 are provided.

  The charging plate 100 is a 150 mm square metal plate (rectangular plate-like conductor), and is attached to a grounded metal plate 106 via an insulator 107. The charging plate 100 functions as a pseudo charged object.

  When evaluating the performance of the ion generating apparatus using such a charged plate monitor device, a DC high voltage of +1000 V or −1000 V is applied from the high voltage power source 102 to the charging plate 100, and the charging plate 100 is charged. . Then, in this charged state, the ion generating device disposed opposite to the charging plate 100 is operated to neutralize the charge on the charging plate 100 (to eliminate the charge on the charging plate 100).

At this time, the timer 105 measures the decay time required for the potential of the charging plate 100 to decay from +1000 V to +100 V or from −1000 V to −100 V. Further, the surface potential measuring device 104 measures the potential of the charging plate 100 in a steady state after the potential of the charging plater 100 is attenuated (steady value of the potential) as an offset voltage. These decay times and offset voltages are used as indicators for evaluating the performance of the ion generator. That is, the decay time corresponds to the time required for charge removal of the charged object by the ion generating device. Therefore, as the decay time is shorter, it means that charge removal of the charged object can be performed in a shorter time. The offset voltage is an indicator of the balance between the positive and negative air ions generated in the ion generator (ion balance), and the closer the offset voltage is to 0, the smaller the ion balance bias.
Technical report of IEC 61340-5-1 (1998) / “Technical Report: Protection of electronic device from electrostatic Phenomena-General requirments” Appendix A. JIS TR C 0027-1 (2002) / "Protection of electronic devices from electrostatic phenomena-General requirements" 6 “Ionizer Test Method and Equipment”

  By the way, the charged object to be neutralized by the ion generator is usually an insulator or an object in which an insulator and a conductor are mixed, so that the charge distribution during charging is generally uniform. Don't be. For example, there are many cases where the charge distribution is such that positive or negative charges are concentrated on one or a plurality of local parts of the charged object. In some cases, a local area charged with a positive charge and a local area charged with a negative charge are mixed.

  On the other hand, in the above-described conventional charged plate monitor device for evaluating the performance of the ion generating device, the charged plate 100 as a pseudo charged substance is a conductor, and therefore, when charged, it is either positive or negative. An equipotential surface is formed by the charges. Therefore, the charged plate 100 as a pseudo charged substance in the conventional charged plate monitor apparatus has a variety of non-uniform charge distributions (positive and negative) that occur in the charged substance that is actually neutralized by the ion generator. (Including a charge distribution in which charges are mixed) cannot be realized.

  In addition, the pattern of the electric field formed between the charged object and the ion generation device or between the charged object regions varies depending on the charging method of the charged object. The characteristics are generally different. For this reason, even if the neutralization performance of the ion generation device with respect to the charging plate as a pseudo conductor charged material satisfies the requirements, the neutralization performance of the ion generation device with respect to the actual charged material charged with a non-uniform charge distribution It does not always meet the requirements. For example, in an actual charged object, the time required for sufficient charge removal becomes too long locally, or the charge removal of the entire charged object becomes uneven (local charge removal is insufficient. There is a case. Therefore, in the conventional charged plate monitor device, it has been impossible to appropriately evaluate the performance of an ion generating device that uses a charged object that is charged with a non-uniform charge distribution as a charge removal target.

  Even if the entire charging plate is made of an insulating material, it is generally difficult to charge the charging plate in a reproducible desired form.

  The present invention has been made in view of such a background, and can realize a pseudo-charged material having various charge distributions, and the ion generation device related to charge removal of various charged objects to be neutralized by the ion generation device. It is an object of the present invention to provide a charge monitor device that can evaluate the performance of the battery. It is another object of the present invention to provide a performance evaluation method capable of appropriately evaluating an ion generation device using the charge monitoring device.

In order to achieve the above object, a charge monitoring device of the present invention is a charge monitoring device for evaluating the performance of an ion generating device that generates air ions for neutralizing a charged object. A plurality of conductor members insulated from each other that can be electrically charged or negatively charged as pseudo-charged materials, and sensors that generate an output corresponding to the potential or charge amount of each conductor member. The members are arranged so as to be distributed discretely when viewed in the Z-axis direction of an orthogonal coordinate system in which the X-axis, the Y-axis, and the Z-axis are orthogonal to each other. Of the outer surfaces of the conductor members, is exposed as a portion at least partially supplied with air ions emitted from the ion generating device, at least two conductors member of the plurality of conductors member, the Z-axis direction Wherein the position of the is provided to be different from each other.

  In the charge monitoring apparatus according to the present invention, since each of the plurality of conductor members is insulated from each other, each conductor member can be charged individually. That is, each conductor member can be charged with a voltage having a different size or polarity. Since the plurality of conductor members are arranged so as to be distributed discretely when viewed in the Z-axis direction, they change at least one-dimensionally or two-dimensionally depending on the whole of the plurality of conductor members. Thus, a pseudo-charged material having such a charge distribution (for example, a charge distribution that changes in one or both of the X-axis direction and the Y-axis direction) can be realized. In this case, since the magnitude | size and polarity of the voltage applied to each conductor member may be arbitrary, various desired electric charge distribution is realizable.

  And since at least a part of the outer surface of each conductor member is exposed, after charging each conductor member, by supplying air ions from the ion generator to the whole of the plurality of conductor members, Each conductor member can be neutralized. Furthermore, at this time, the form of charge removal can be observed for each conductor member by the output of the sensor. In other words, it is possible to observe the mode of charge removal by the ion generating device for each region corresponding to the position of each conductor member in the whole of the plurality of conductor members.

  As described above, according to the charge monitoring device of the present invention, pseudo-charged materials having various charge distributions can be realized by the entirety of the plurality of conductor members, and ions can be removed so as to remove charges. Since the form of static elimination can be observed locally (for each conductor member) of the pseudo charged object while operating the generating apparatus, the performance evaluation of the ion generating apparatus regarding the neutralization of various charged objects should be performed. Is possible.

Moreover, the charging monitor device of the present invention, at least two conductors member of the plurality of conductors member is positioned in the Z-axis direction are provided to be different from each other.

  In this way, not only the charge distribution that changes one-dimensionally or two-dimensionally when viewed in the Z-axis direction, but also the charge distribution that also changes in the Z-axis direction is caused by the entirety of the plurality of conductor members. Can be realized. In particular, when the arrangement of the conductor members when viewed in the Z-axis direction is an arrangement that is two-dimensionally discretely distributed, and the positions of two or more conductor members in the Z-axis direction are different from each other. The three-dimensional charge distribution can be realized by the entirety of the plurality of conductor members.

  In the charge monitoring device of the present invention, it is preferable that the plurality of conductor members are arranged in a matrix in the X-axis direction and the Y-axis direction when viewed in the Z-axis direction.

  According to this, the charged material that simulates the charge distribution can be easily realized by the whole of the plurality of conductor members regardless of the form of the charge distribution at the time of charging the charged material to be neutralized by the ion generating device.

  Next, a method for evaluating the performance of the ion generation apparatus according to the present invention is a method for evaluating the performance of the ion generation apparatus using the above-described charge monitoring apparatus according to the present invention, and a plurality of conductors of the charge monitoring apparatus. One or more conductor members of the member are charged positively or negatively by temporary application of a voltage having a predetermined set value corresponding to each of the one or more conductor members; and In a state where the ion generation device is arranged with a space in the Z-axis direction from each conductor member so that the air ions are supplied from the ion generation device to the exposed portion of the outer surface of each conductor member, A step of operating the generation device, and a step of observing a change over time in the potential or charge amount of each conductor member based on the output of the sensor corresponding to the conductor member during the operation of the ion generation device. And said that there were pictures.

  According to such a performance evaluation method, one or more conductor members of the plurality of conductor members of the charge monitoring device are positively charged with a voltage having a predetermined value corresponding to each of the one or more conductor members. Alternatively, by charging negatively, a pseudo charged substance having a desired charge distribution is realized by the entirety of the plurality of conductor members. Note that a conductor member that does not require charging (a conductor member other than the conductor member that applies the voltage of the set value) may be placed in an uncharged state by temporarily grounding it, for example.

  Next, by operating the ion generating device with the ion generating device arranged as described above, air ions are supplied to each conductor member, and each conductor member is neutralized. Then, during the operation of the ion generating apparatus, a change with time in the potential or the charge amount of each conductor member is observed based on the output of the sensor corresponding to the conductor member. For example, the time required for the potential or charge amount of each charged conductor member to decay from the initial value at the start of operation of the ion generator to a predetermined value, or the final convergence value of the potential or charge amount of each conductor member Is measured based on the output of the sensor. Thereby, the static elimination form in the location can be observed for every conductor member.

  In this case, a wide variety of charge distributions can be realized by the entirety of the plurality of conductor members, and changes in the potential or charge amount over time can be observed at each conductor member location. It is possible to observe a static elimination form similar to that of a charged object. Therefore, the ion generator can be appropriately evaluated based on the observation result.

  A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is an external perspective view of a charge monitor device according to the present embodiment, FIG. 2 is a plan view of the charge monitor device viewed from above, and FIG. 3 is a cross-sectional view taken along line III-III in FIG.

  Referring to FIG. 1, a charge monitoring device 1 of the present embodiment is arranged on a base 2, a substrate 4 supported on the base 2 via a plurality of support columns 3, and an upper side of the substrate 4. A plurality of (49 in the figure) conductor members 5 are provided. For the sake of convenience, the present embodiment will be described assuming an orthogonal coordinate system C in which the X axis, the Y axis, and the Z axis are three axes orthogonal to each other, as shown in FIG. The directions of the axes of the orthogonal coordinate system C may be any direction as long as they are orthogonal to each other. However, in the description of the present embodiment, the direction of the Z axis is the vertical direction (vertical direction), the X axis, and the Y axis. The direction of the axis is the horizontal direction. This also applies to other embodiments described later.

  The base 2 is formed in a flat plate shape using a conductive material such as metal and is grounded via a ground cable (not shown). Note that the base 2 does not have to be flat, and may be, for example, a box or a table. A DC high-voltage power supply 10 and a measuring instrument, which will be described later, may be attached to or stored in the base 2.

  In this embodiment, the substrate 4 has a rectangular plate shape made of an insulator, and is disposed above the base 2 in a horizontal posture parallel to the upper surface of the base 2 (attitude parallel to the XY coordinate plane). . The substrate 4 is supported on the base 2 by a plurality of support columns 3 interposed between portions near the outer periphery of the substrate 4 (four corners of the substrate 4 in this embodiment) and the base 2. Yes. Note that the substrate 4 does not have to be rectangular.

  The plurality of conductor members 5 function as pseudo charged materials as a whole, and the individual conductor members 5 function as local portions of the pseudo charged materials. In this embodiment, each conductor member 5 is formed into a disk shape having the same diameter and the same thickness, and the material thereof is a metal such as stainless steel. Each conductor member 5 has a plurality of (the same number as the conductor members 5) projecting in the Z-axis direction (normal direction of the substrate 4) upward from the upper surface of the substrate 4 corresponding to each conductor member 5. A) are fixed coaxially to the respective front end surfaces (upper end surfaces) of the columnar column 6. Each column 6 is made of an insulator. The conductor members 5 are arranged in a non-contact state as will be described later. The column body 6 may be fixed to the substrate 4 with an adhesive or the like, but may be formed integrally with the substrate 4. Each conductor member 5 may be fixed to the front end surface of the column body 6 with an adhesive or the like, but may be formed by vapor deposition on the front end surface of the column body 6.

  The plurality of conductor members 5 provided as described above are electrically insulated from each other through the column body 6 and the substrate 4 to which the respective conductor members 5 are fixed. Moreover, the upper surface and outer peripheral surface of each conductor member 5 are exposed as a part which receives the air ion supplied from the ion generator mentioned later.

  In the present embodiment, the entirety of these conductor members 5 are discretely arranged as follows. That is, the entire conductor members 5 are arranged in a matrix (lattice arrangement) in the X-axis direction and the Y-axis direction as shown in FIG. 2 when viewed in the Z-axis direction. ing. More specifically, when the arrangement of the plurality of conductor members 5 is projected onto the XY coordinate plane, a plurality of straight lines arranged in parallel with the X axis at intervals in the Y axis direction on the XY coordinate plane are viewed. The entire conductor member 5 is disposed so that each conductor member 5 is located at the intersection of each of the plurality of straight lines arranged in parallel with the Y axis at intervals in the X axis direction. In the present embodiment, these conductor members 5 are arranged at equal intervals in the X-axis direction and the Y-axis direction so as not to contact each other. Further, in the present embodiment, the distances of the respective conductor members 5 from the substrate 4, in other words, the positions of the respective conductor members 5 in the Z-axis direction are all the same. Therefore, the entire conductor member 5 is discretely arranged on the same plane parallel to the XY coordinate plane.

  As shown in FIG. 3, a plurality of measurement electrode members 7 (the same number as the conductor members 5) are fixed to the lower surface of the substrate 4 at positions immediately below the conductor members 5. Each measurement electrode member 7 is a conductive disk-like member, and the column body 6 and the substrate 4 are connected between the front end surface (upper end surface) of each column body 6 and the lower surface of the substrate 4. The column body 6 is electrically connected to the conductor member 5 via a rod-shaped conduction member 8 fitted and inserted into the column body 6 and the substrate 4 so as to penetrate in the axial direction (Z-axis direction) of the column body 6. On the base 2, a plurality of sensors 9 each generating an output corresponding to the potential or charge amount of each conductor member 5 are electrically connected to the conductor member 5 immediately below each conductor member 5. It is fixed so as to face the member 7. In the present embodiment, each sensor 9 is a non-contact type sensor. However, a contact type sensor may be used so that the sensor 9 is brought into contact with each measurement electrode member 7.

  In this embodiment, each conductor member 5 is fixed to the front end surface of the column 6 projecting from the substrate 4. However, each conductor member 5 is directly fixed to the upper surface of the substrate 4. Also good.

  Next, a method for evaluating the performance of the ion generation device using the charge monitoring device 1 of the present embodiment will be described.

  First, a set of potential set values to be charged to each conductor member 5 (a set of potential set values corresponding to the number of conductor members 5) is determined in advance. In this case, the set value of the potential need not be one type, and may be a plurality of types. Further, the set value of the potential of each conductor member 5 may be the same for all the conductor members 5, but each conductor member 5 may have a set value having a different magnitude (absolute value) or polarity, or The conductor members 5 may be classified into a plurality of groups, and set values having different sizes (absolute values) or polarities may be determined for each group. Moreover, the set value of the potential of any conductor member 5 may be set to zero.

  Such a set of potential set values depends on the performance required for the ion generation device to be evaluated, the evaluation item of the ion generation device, or the property of the charged object to be neutralized by the ion generation device (particularly the It may be set in consideration of the tendency of charge distribution during charging of charged objects). For example, when evaluating whether or not a charged object is appropriately discharged by an ion generator for discharging a specific charged object, a distribution of charges that are likely to be generated by the charged object (two-dimensional It is conceivable that one or more sets of potential set values of the conductor member 5 at each position are determined in a distribution form close to the distribution. Further, for example, when evaluating the charge removal performance of a portable ion generating apparatus in which the type of charge removal target is not specified, it is conceivable to arbitrarily determine a plurality of sets of potential set values for each conductor member 5.

  Next, as shown in FIG. 3, a DC high-voltage power supply 10 is connected to each conductor member 5, and a voltage having a set value determined as described above is temporarily applied to each conductor member 5 between the ground member, The conductor member 5 is charged. Note that the DC high-voltage power supply 10 is disconnected from each conductor member 5 after the charging. Further, it is not necessary to connect the conductor member 5 (the conductor member 5 that does not need to be charged) having a potential setting value of 0 to the DC high-voltage power supply 10, and temporarily ground the conductor member 5. Thus, the conductor member 5 is brought into an uncharged state. Alternatively, when the output voltage of the DC high-voltage power supply 10 can be set to 0 V, a voltage of 0 V may be applied from the DC high-voltage power supply 10 to the conductor member 5.

  Thus, by charging each conductor member 5 (more precisely, the conductor member 5 excluding the conductor member 5 whose potential setting value is 0 V), the entire conductor member 5 provided in the charge monitoring device 1 is A variety of desired charge distributions (two-dimensional charge distributions) can be realized in a pseudo manner. For example, when the set value of the potential of each conductor member 5 is the same for all the conductor members 5, a two-dimensional uniform charge distribution can be realized in a pseudo manner. Further, for example, when the potential setting values of the conductor members 5 at the same position in the Y-axis direction are different from each other, the row of the conductor members 5 at the same position in the Y-axis direction. Thus, a charge distribution that changes in the X-axis direction can be realized.

  Supplementally, when each conductor member 5 is charged, the conductor member 5 may be charged by connecting the DC high-voltage power supply 10 to the measurement electrode member 7 conducted to each conductor member 5. Further, for example, connection terminals that are electrically connected to each conductor member 5 may be provided concentrated on the outer periphery of the substrate 4 and the DC high-voltage power supply 10 may be connected to each conductor member 5 via the connection terminals. . Further, for two or more conductor members 5 having the same potential setting value, they are connected to each other and are connected to each other, and then connected to the DC high-voltage power supply 10 so that the conductor members 5 are bundled together. It is also possible to charge the same potential.

  In addition to charging the conductor member 5 as described above, as shown by a virtual line in FIG. 3, the ion generation device W to be evaluated is predetermined with each conductor member 5 in the Z-axis direction (vertical direction). It arrange | positions above the board | substrate 4 so that this space | interval may exist. At this time, air ions (positive and negative air ions) generated and released by the ion generator W can be supplied to the exposed portions (mainly the upper surface) of each conductor member 5. The ion generating device W is disposed above the substrate 4 with the ion emitting portion (not shown) facing the upper surface of each conductor member 5.

  Next, the ion generator W is operated, and supply of air ions (positive and negative air ions) from the ion generator W to each conductor member 5 is started. Then, during the operation of the ion generating apparatus W, the output of each sensor 9 is taken into a measuring instrument (not shown), and a change with time in the potential or charge amount of each conductor member 5 is observed. More specifically, for example, the time required for the potential or charge amount of each conductor member 5 to decay from an initial value (value at the start of operation of the ion generator W) to a predetermined value (hereinafter referred to as decay time). In addition, a steady-state value that is a final convergence value of the potential or charge amount of each conductor member 5 (a value of the potential or charge amount when a sufficient time has elapsed since the operation of the ion generating device W has started). Hereinafter, the offset value is measured from the output of each sensor 9. When a plurality of types of potential set values for each conductor member 5 are determined, the above measurement is performed for each set. And based on these measured values, the performance of the ion production | generation apparatus W is evaluated.

  In this case, by observing a change in potential or charge amount of each conductor member 5 with time, the conductor by the ion generator W is provided for each position of the conductor member 5 (two-dimensional position on the XY coordinate plane). It is possible to grasp how the charge removal of the member 5 is performed. In other words, it is possible to grasp the form of charge removal by the ion generator W for each local part of the entire conductor member 5. For example, depending on the measured value of the decay time of each conductor member 5, for each position of each conductor member 5, the time required for static elimination at that position (until the potential or charge amount of the conductor member 5 at that position is sufficiently attenuated) Time). Further, the degree of ion balance at each position of each conductor member 5 can be determined from the measured value of the offset value of each conductor member 5, and as a result, a horizontal plane (in the XY coordinate plane) including the entire conductor member 5 is obtained. The deviation of the two-dimensional ion balance on the parallel plane is grasped.

  Then, from the observation result of the change in the potential or charge amount of each conductor member 5 as described above, whether or not the actual charge removal by the ion generator W is appropriately performed, etc. Performance evaluation can be performed. For example, when the decay time of one conductor member 5 is significantly longer than the decay time of another conductor member 5, the charge distribution corresponding to the set of preset potential values as described above is used. It can be evaluated that if the charge removal time of a charged product that causes a shortage is too short, the charge removal of the charged product may be locally insufficient. Further, for example, when the offset value of one conductor member 5 is relatively larger than the offset value of the other conductor member 5, a two-dimensional deviation of ion balance (on the plane on which the conductor member 5 is arranged) It can be evaluated that there is a risk that the charge removal of the charged material may be uneven.

  In this way, by using the charge monitor device 1, the state of charge removal by the ion generator W is observed for each position of each conductor member 5 (for each local portion of the entire conductor member 5), and the ion The performance of the generator W can be evaluated, and each conductor member 5 can be charged to various potentials. For this reason, quality control of the ion generating device W can be appropriately performed while taking into consideration the properties of the charged object to be removed by the ion generating device W and the required performance of the ion generating device W. Furthermore, it is possible to find out installation failure of the ion generator W or the like. In addition, based on the evaluation results of the ion generator W, a guideline for improving and designing the ion generator W is accurately constructed in consideration of the properties of the charged object to be neutralized and the required performance of the ion generator W. It becomes possible.

  Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 4 is a cross-sectional view of the main part of the charge monitoring device of this embodiment. In the description of the present embodiment, the same reference numerals as those in the first embodiment are used for the same functional parts or the same components as those in the first embodiment, and detailed description thereof is omitted. And it demonstrates centering on the part which is different from 1st Embodiment.

  In the first embodiment, all of the plurality of conductor members 5 are arranged on the same plane parallel to the XY coordinate plane, and the positions of the conductor members 5 in the Z-axis direction are the same. The positions in the Z-axis direction of two or more conductor members 5 among the conductor members 5 are made different from each other. The present embodiment is different from the first embodiment only in this point.

  4 is a cross-sectional view showing an example in which the positions of two or more conductor members 5 in the Z-axis direction are different from each other in the present embodiment (a cross-section corresponding to the cross-sectional view taken along the line III-III in FIG. 2). Figure). As illustrated, in this embodiment, the lengths of the plurality of column bodies 6 (column bodies 6 arranged in the Y-axis direction in the illustrated example) are different from each other, and the front end surfaces (upper end surfaces) of the respective column bodies 6 are illustrated. ), The conductor member 5 is fixed as in the first embodiment. Thereby, the positions of the conductor members 5 in the Z-axis direction (distance from the upper surface of the substrate 4) are different from each other. Note that the conductor members 5 other than the four conductor members 5 shown in FIG. 4 may also have different positions in the Z-axis direction. In this case, the positions of all the conductor members 5 in the Z-axis direction need not be different from each other, and the positions of some of the conductor members 5 in the Z-axis direction may be the same.

  The remaining configuration of the charge monitoring device of this embodiment is the same as that of the first embodiment. Further, the method of evaluating the ion generation device by this charge monitoring device is the same as that of the first embodiment.

  As described above, when the charge monitoring device of this embodiment in which the positions of two or more conductor members 5 are different from each other is used, each conductor member 5 is charged in the same manner as in the first embodiment. By doing so, a spatial (three-dimensional) charge distribution can be realized in a pseudo manner. For this reason, for example, a charge distribution having the same form as the charge distribution at the time of charging a three-dimensional structure such as a semiconductor device or a magnetic head can be realized in a pseudo manner by the entire conductor member 5. As a result, it is possible to suitably evaluate the performance of the ion generating apparatus that uses the three-dimensional structure as a charge removal target.

  Supplementally, in the first embodiment, by charging each conductor member 5, the charge distribution realized by the entire conductor member 5 becomes two-dimensional. Therefore, the first embodiment has been described. The charge monitoring device 1 is suitable for use in the evaluation of the ion generation device W that uses a charged object (for example, a glass plate) having a planar charging surface as a charge removal target.

  In the first and second embodiments described above, each conductor member 5 is formed in a disk shape, but may be formed in another shape such as a polygonal shape. Further, each conductor member 5 may be made smaller within a range in which the potential or charge can be individually measured, and more conductor members 5 may be arranged densely.

  Next, a third embodiment of the present invention will be described with reference to FIGS. FIG. 5 is a perspective view of the charge monitoring device 11 in the present embodiment, and FIG. 6 is a sectional view taken along the line VI-VI in FIG. In the description of the present embodiment, the same reference numerals as those in the first embodiment are used for the same functional parts or the same components as those in the first embodiment, and detailed description thereof is omitted. And it demonstrates centering on the part which is different from 1st Embodiment.

  Referring to FIG. 5, the charge monitor device 11 of the present embodiment includes a substrate 4 supported on a base 2 via a plurality of support columns 3, as in the first embodiment. The charge monitoring device 11 includes a plurality of bar-shaped conductor members 12 fixed to the upper surface of the substrate 4. The entirety of these conductor members 12 functions as a pseudo charged material, and each conductor member 12 functions as a local region of the pseudo charged material. In this case, each conductor member 12 extends in the X-axis direction of FIG. 5 and is arranged at equal intervals in the Y-axis direction. In addition, the size (thickness, length, width) and shape of each conductor member 12 are the same. Therefore, these conductor members 12 are arranged on the same horizontal plane parallel to the XY coordinate plane.

  In addition, as shown in FIG. 6, the charge monitoring device 11 includes a plurality of measurement electrode members 13 that are electrically connected to the respective conductor members 12. In this embodiment, each measurement electrode member 13 is formed in a rod shape, and the substrate 4 is placed from the lower surface (upper surface of the substrate 4) in the longitudinal direction of each conductor member 12 to the lower side of the substrate 4. It is inserted into the substrate 4 directly below the conductor member 12 so as to penetrate in the normal direction (Z-axis direction). The upper end surface of the measurement electrode member 13 is brought into contact with the conductor member 12 to be conductive. Further, the lower end portion of the measurement electrode member 13 is slightly protruded to the lower side of the substrate 4. The conductor member 12 and the measurement electrode member 13 may be integrally formed. Further, similarly to the first embodiment, the measurement electrode member may be fixed to the lower surface of the substrate 4 and may be conducted to the conductor member 12 via the conduction member.

  On the base 2, a plurality of sensors 9 (the same number as the conductor members 5) that respectively generate outputs corresponding to the potential or charge amount of each conductor member 12 are directly below the conductor members 12. It is fixed so as to face the measurement electrode member 13 that is conducted to the member 12. The sensor 9 may be the same as that of the first embodiment.

  The performance evaluation of the ion generation apparatus using the charge monitor apparatus 11 of the present embodiment is performed in the same manner as in the first embodiment.

  In this case, in this embodiment, since each conductor member 12 extends in the X-axis direction and is discretely arranged in the Y-axis direction, the potential setting values of two or more conductor members 12 are different from each other. By doing so, it is possible to realize a pseudo charge distribution in which the charge amount changes in the Y-axis direction and there is no change in the charge amount in the X-axis direction. Such a charge monitoring device 11 according to the present embodiment is suitable for evaluating an ion generation device that uses a charged object such as a take-up film or printed material transferred in the X-axis direction as a charge removal target.

  In the present embodiment, the positions of the conductor members 12 in the Z-axis direction (positions in the normal direction of the substrate 4) are the same. However, as in the second embodiment, two or more conductor members 12 are used. The positions in the Z-axis direction may be different from each other. Further, the width of each conductor member 12 is made smaller within the range in which the potential or charge can be measured, and more conductor members 12 are brought closer to the width direction (Y-axis direction) of each conductor member 12. May be arranged. Furthermore, each conductor member 12 may extend in the Y-axis direction in FIG. 6 and may be arranged in parallel in the X-axis direction.

  In each embodiment described above, the size and shape of the conductor members 5 and 12 are the same, but the size and shape of the conductor members may be different from each other. For example, as shown in FIG. 7, conductor members 14 having different sizes (areas) and shapes may be discretely arranged on the upper side of the substrate 4. 7 shows a plan view (plan view similar to FIG. 2) when viewed in the direction of the Z-axis orthogonal to the X-axis and Y-axis shown in the figure.

  In this case, the size and shape of each conductor member 14 may be formed so that the ion generation apparatus to be evaluated can artificially realize the charge distribution during charging of the charged object to be neutralized. Further, in order to measure the potential or the charge amount of each conductor member 14 in FIG. 7, for example, similarly to the first embodiment or the third embodiment, the conductor member 14 is electrically connected to the lower surface side of the substrate 4. A plurality of measurement electrode members (the same number as the conductor members 14) are provided, and the potential or charge amount of each conductor member 14 is measured by a contact type or non-contact type sensor facing each of the measurement electrode members. You can do it.

  Also, any one of the conductor members 14 may be inclined with respect to the horizontal plane (XY coordinate plane), or the positions of the two or more conductor members 14 in the Z-axis direction may be different from each other. Good.

  Further, for example, as shown in FIG. 8, circular or annular conductor members 15 having different diameters and the same center point are arranged on the upper side of the substrate 4 so as to be discretely distributed in the radial direction. It may be. 8 is a plan view (plan view similar to FIG. 2) when viewed in the direction of the Z axis perpendicular to the X axis and Y axis of the same figure. In FIG. 8, in order to distinguish the location where the conductor member 15 exists from other locations, the conductor members 15 are marked with dots for convenience.

  In the example of FIG. 8, the conductor member 15 in the center of the substrate 4 is formed in a circular shape, and the other conductor members 15 are formed in an annular shape so as to surround the circular conductor member 15 in the center. Yes. The charge monitoring device having the conductor member 15 arranged in this manner is suitable for evaluation of an ion generating device for the purpose of removing static electricity from a specific local portion of a charged object, for example. In this case, in order to measure the potential or charge amount of each conductor member 15, for example, as in the first embodiment or the third embodiment, the conductor member 15 is electrically connected to the lower surface side of the substrate 4. A plurality of measurement electrode members (the same number as the conductor members 15) are provided, and the potential or charge amount of each conductor member 15 is measured by a contact type or non-contact type sensor facing each of the measurement electrode members. You can do it. Further, the positions of the two or more conductor members 15 in the Z-axis direction may be different from each other.

1 is an external perspective view of a charge monitoring device according to a first embodiment of the present invention. The top view which looked at the electrification monitoring device of Drawing 1 from the upper part. III-III sectional view taken on the line of FIG. Sectional drawing of the principal part of the charge monitor apparatus in 2nd Embodiment of this invention. The external appearance perspective view of the charge monitor apparatus in 3rd Embodiment of this invention. FIG. 6 is a cross-sectional view taken along line VI-VI of the charge monitoring device of FIG. 5. The figure which shows the deformation | transformation aspect of the arrangement pattern of the conductor member with which the charge monitor apparatus of embodiment is equipped. The figure which shows the other deformation | transformation aspect of the arrangement pattern of the conductor member with which the charge monitor apparatus of embodiment is equipped. The perspective view which shows schematic structure of the conventional charging plate monitor apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,11 ... Charge monitor apparatus, 5, 12, 14, 15 ... Conductive member, 9 ... Sensor, W ... Ion generator.

Claims (3)

A charge monitoring device for evaluating the performance of an ion generation device that generates air ions for neutralizing a charged object,
A plurality of mutually insulated conductor members that can be charged positively or negatively by application of voltage are provided as pseudo-charged materials, and a sensor that generates an output corresponding to the potential or amount of charge of each conductor member is provided. The plurality of conductor members are arranged so as to be distributed discretely when viewed in the Z-axis direction of an orthogonal coordinate system in which the X-axis, Y-axis, and Z-axis are three axes orthogonal to each other. At least a portion of the outer surface is exposed as a portion that receives a supply of air ions emitted from the ion generator ;
At least two or more conductor members of the plurality of conductor members are provided so that positions in the Z-axis direction are different from each other . 2. The charge monitor device according to claim 1, wherein the plurality of conductor members are arranged in a matrix in the X-axis direction and the Y-axis direction when viewed in the Z-axis direction. A method for evaluating the performance of the ion generation device using the charge monitor device according to claim 1 ,
One or more conductor members of the plurality of conductor members of the charge monitoring device are positively or negatively charged by temporarily applying a voltage having a predetermined set value corresponding to each of the one or more conductor members. The ion generating device is spaced from each conductor member in the Z-axis direction so that the air ions are supplied from the ion generating device to the exposed portion of the outer surface of each conductor member. Operating the ion generating device in a disposed state;
And observing a change with time in the potential or charge amount of each conductor member based on the output of the sensor corresponding to the conductor member during the operation of the ion generator. Performance evaluation method.

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