CN209624721U - Substrate detection apparatus - Google Patents
Substrate detection apparatus Download PDFInfo
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- CN209624721U CN209624721U CN201821922033.1U CN201821922033U CN209624721U CN 209624721 U CN209624721 U CN 209624721U CN 201821922033 U CN201821922033 U CN 201821922033U CN 209624721 U CN209624721 U CN 209624721U
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- substrate
- control unit
- test control
- support portion
- unit
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Abstract
The utility model relates to a kind of substrate detection apparatus.The substrate detection apparatus of the utility model includes: loading stage, is set to base portion, and the upper side of the loading stage loads substrate；Support portion is set to the base portion, and across the loading stage；Probe unit is movably disposed at the support portion to prescribed direction；And test control unit, the detection signal of the substrate is generated, and be supplied to the probe unit, receives the signal of the probe unit measurement, electrical detection is executed to the substrate, the test control unit is installed on the base portion or the support portion.
Description
Technical field
The utility model relates to substrate detection apparatus, more specifically, the utility model relates to a kind of substrate detection apparatus,
The electrical defect for the substrate for constituting display panel is detected.
Background technique
Liquid crystal display device (Liquid Crystal Diplay, LCD) or organic light-emitting display device (ORGANIC
LIGHT EMITTING DISPLAY, OLED) various detections can be received in the fabrication process.
TEG (Test Element Group, testing element group) detection device is for detecting the TFT for constituting display panel
The equipment of the primary elements such as (Thin Film Transistor, thin film transistor (TFT)), R, C.When existing equipment respectively constitutes exploitation
The analysis tester and volume production manual probe used.Since existing analysis tester has that size issue and expense rise,
Use minimum number as measurement source SMU (source measuring unit), and by switch matrix expand channel come using.As survey
The SMU for determining source is connect with switch matrix, since detection device is excessive, it is by ten to the panel TEG as measure object
Several meters or more of measurement cable connection.Due to being the structure for needing repeatedly to connect, accordingly, it is difficult to micrometric measurement be realized, for reality
There is also limitations for now high speed measurement.
Electric array (Electrical Array) detection device is with the tft array of electrical characteristics (I/V) detection display panel
Equipment.In the recent period the OLED the case where, respectively constitutes and use and support the large-scale of the thousands of above channels to survey with fine pattern
Try device and volume production manual probe.Due to thousands of long connecting cables between tester and manual probe, it is accurate to there is measurement
The problem of degree reduces.Due to the increase of high pixel panel, the size of multichannel large test device is difficult to ensure operating space.
Detection for the electric circuit of traditional liquid crystal display panel carries out TEG detection by different equipment respectively
It is detected with Array.The problem of longer detection time with needs larger accordingly, there exist the space occupied by detection device.
Citation
Patent document
South Korea's Patent Publication the 10-2016-0090446th (on 08 01st, 2016 open)
Utility model content
The purpose of this utility model is that point in order to solve described problem, provides a kind of substrate detection apparatus, can shorten
Equipment is reduced for the test control unit of connecting detection substrate and the cable length of probe unit to improve measurement precision
Size.
Another purpose of the utility model, which also resides in, provides a kind of substrate detection apparatus, can execute together for substrate
TEG detection and Array detection.
The utility model provides a kind of substrate detection apparatus, comprising: loading stage is set to base portion, the loading stage
Upper side loads substrate；Support portion is set to the base portion, and across the loading stage；Probe unit, can to prescribed direction
It is movably arranged at the support portion；And test control unit, the detection signal for generating the substrate are supplied to the probe list
Member, receives the signal of the probe unit measurement, executes electrical detection to the substrate, the test control unit is installed on described
Base portion or the support portion.
In one embodiment, the test control unit is to be mounted on the state of the support portion, together with the support portion
It is mobile.
In addition, the test control unit is connect with the probe unit by test cable.
In addition, being provided with multiple probe units in the support portion, the test control unit has multiple SMU, more
A SMU is corresponding with each probe unit.
In one embodiment, the test control unit is arranged by multiple test cells with matrix shape.
The test control unit includes: control pattern unit and current sensing unit, and the control pattern unit applies arteries and veins
Pattern is rushed, applying the pulse pattern is for driving the electronic component for being formed in the substrate；The current sensing unit to
The electronic component for being formed in the substrate applies voltage and measures electric current.
In addition, the control pattern unit includes multiple plates, the multiple plate is respectively provided with multiple channels, the electric current
Sensing unit includes multiple plates, and the multiple plate is respectively provided with multiple channels.
In addition, the utility model also provides a kind of substrate detection apparatus, comprising: loading stage is set to base portion, the dress
The upper side of microscope carrier loads substrate；First support portion and the second support portion are set to the base portion, and across the loading
Platform；First probe unit and the first test control unit, first probe unit are movably disposed at described along prescribed direction
First support portion, first test control unit are installed on first support portion；And second probe unit and second test
Control unit, second probe unit are movably disposed at second support portion, the second test control along prescribed direction
Portion processed is installed on second support portion, and first test control unit and second test control unit execute mutually different
Detection.
In one embodiment, first test control unit and first probe unit are connected by the first test cable
It connects；Second test control unit is connect with second probe unit by the second test cable.
In addition, first test control unit executes TEG detection to the substrate；Second test control unit is to described
Substrate executes the detection of TFT matrix.
Utility model effect
The cable between the test control unit and probe unit for connecting detection substrate is shortened according to the utility model
Measurement precision can be improved in length, reduces the size of equipment.
In addition, can execute TEG detection by the same equipment according to the utility model and Array is detected, therefore contract
It is short detect required for the time, to improve productivity.
Detailed description of the invention
Fig. 1 is the perspective view of the substrate detection apparatus of preferred first embodiment according to the present utility model；
Fig. 2 is the perspective view of the substrate detection apparatus of preferred second embodiment according to the present utility model；
Fig. 3 is the test control unit that has on the substrate detection apparatus of preferred second embodiment according to the present utility model
The schematic diagram of composition；
Fig. 4 is the shape for indicating the substrate detection apparatus detection substrate using preferred second embodiment according to the present utility model
The block diagram of state；
Fig. 5 is the figure that the composition of substrate detection apparatus of preferred 3rd embodiment according to the present utility model is outlined.
Description of symbols
100,200,300: substrate detection apparatus
110,210: base portion
120,220,320: loading stage
130,230,330: support portion
140,240,340: probe unit
150,250,350: test control unit
Specific embodiment
Hereinafter, will be explained in more detail with reference to the drawing the preferred embodiment of the utility model.Firstly, please noting, to each attached drawing
Constituent element addition reference symbol identical constituent element when even indicating in different drawings, is also adopted as far as possible
It is indicated with the same symbol.In addition, during being illustrated to the utility model, to relevant known features or function
It illustrates in the case where being judged as that the main idea for making the utility model is fuzzy, detailed description thereof will be omitted.In addition, following meeting
The preferred embodiment of the utility model is illustrated, however, the technical idea of the utility model is without being limited thereto, it can also be by this
Field technical staff deforms and carries out a variety of implementations.
The utility model relates to a kind of substrate detection apparatus, examine to the electrical characteristics of the electronic component formed on substrate
It surveys.In the present invention, it can be the TFT base that TFT pattern is formed in liquid crystal display panel as the substrate of test object
Plate.As an embodiment, above-mentioned TFT substrate can be the TFT substrate to form oled panel.OLED as current driver mode
Pixel basic circuit is constituted by switch TFT and for elements such as the driving TFT of electric current flowing and capacitors.Especially, pass through
The OLED driving TFT element of LTPS engineering preparation is received through the influence of the crystallization preparation method of laser and element is respectively provided with
Electrical characteristics, such preparation characteristic has an impact the electric current flowed on driving TFT, and then induces quality discrepancy between pixel.
Therefore, substrate detection apparatus according to the present utility model can be used for detecting the TFT formed in TFT substrate, resistance or capacitor
Electrical characteristics, or the electrical characteristics for detecting tft array.
Fig. 1 is the perspective view of the substrate detection apparatus of preferred first embodiment according to the present utility model.
The substrate detection apparatus 100 of first preferred embodiment according to the present utility model includes: base portion 110；Loading stage
120, the top of base portion 110 is set and is mounted with substrate；Support portion 130, it is removable along the y axis in above-mentioned base portion 110
It is arranged dynamicly；Probe unit 140, above-mentioned support portion 130 along the x axis on be movably disposed；And test control unit
150, it is mounted on above-mentioned support portion 130.
Base portion 110 is the component for being supported substrate detection apparatus 100 relative to ground.
The upper side of base portion 110 is arranged in loading stage 120, has in the upper load of loading stage 120 as test object
Substrate.
Support portion 130 is arranged across loading stage 120, also, support portion 130 (is schemed in base portion 110 along prescribed direction
1 Y direction) it is movably disposed.Support portion 130 is mounted in base portion 110 by linear motor etc., so as to be driven
It is dynamic and mobile to prescribed direction.
Probe unit 140 is mounted on support portion 130, can be movably disposed along the x axis with support portion 130.Probe
Unit 140 has the probe contacted with the multiple electrodes formed on substrate.Probe unit 140 applies electric signal on substrate,
And receive the signal for carrying out the electronic component formed in self-reference substrate.
Test control unit 150 supplies the electric signal of generation to probe unit 140, and the electric signal is for detecting substrate
Electrical characteristics are received by probe unit 140 come the answer signal of the electronic component formed in self-reference substrate.These test control units
150 are construed as SMU (Source&Monitoring Unit, source measuring unit).
In the present invention, a feature of above-mentioned test control unit 150 is to be mounted on support portion 130.Testing and control
Portion 150 is electrically connected by test cable 160 with probe unit 140.In the present invention, test control unit 150 is mounted directly
In support portion 130, so as to shorten the length of test cable 160.On the other hand, for the embodiments of the present invention, on
State the side that test control unit 150 can also be fixed on base portion 110.
In the case where multiple support portion 130 are arranged on substrate detection apparatus 100, at least one of support portion 130
Above-mentioned test control unit 140 is set.In addition, in the case that each support portion 130 has multiple probe units 140, above-mentioned test
Control unit 150 have with corresponding SMU on each probe unit 140 so that test control unit 150 may include multiple SMU.
Fig. 2 is the perspective view of the substrate detection apparatus of preferred second embodiment according to the present utility model；Fig. 3 is according to this
The schematic diagram of the composition for the test control unit having on the substrate detection apparatus of the preferred second embodiment of utility model；Fig. 4 is
Indicate the block diagram of the state of the substrate detection apparatus detection substrate using preferred second embodiment according to the present utility model.
Referring to Fig. 2, the substrate detection apparatus 200 of the preferred second embodiment based on the utility model includes: base portion
210；Loading stage 220 is arranged in the top of base portion 210 and is mounted with substrate；Support portion 230, in above-mentioned base portion 210 along Y
Axis direction is movably disposed；Probe unit 240 is movably disposed along the x axis in above-mentioned support portion 230, and test
Control unit 250 is mounted on above-mentioned support portion 230.
Test control unit 250 is mounted on support portion 230, and test control unit 250 and probe unit 240 pass through test cable
Connection (not shown).
Referring to Fig. 3, test control unit 250 is constituted are as follows: multiple test cells can be arranged in matrix.Test control unit
250 are configured to include multiple control pattern units 252 and multiple current sensing units 254.
Control pattern unit 252 executes following function: on the one hand applying pulse pattern, is formed on substrate for driving
The circuit of TFT matrix；On the one hand it executes biasing (bias) line to panel and applies power supply.
Current sensing unit 254 executes following function: applying voltage to the TFT matrix circuit formed on substrate, to survey
Constant current waveform.
Referring to Fig. 4, test control unit 250 is connect by probe unit 240 with the substrate as test object.
As described above, test control unit 250 includes: multiple control pattern units 252 and multiple current sensing units 254,
It further include the assist control 256 for controlling them and logic control portion 258.Assist control 256 is from other main control
Portion 270 receives control command to control control pattern unit 252 and current sensing unit 254, thereby executing to substrate
Detection.
Referring to Fig. 4, in a second embodiment, control pattern unit 252 is made of the multiple plates for being respectively provided with multiple channels,
Above-mentioned current sensing unit 254 is also made of the multiple plates for being respectively provided with multiple channels.As shown in figure 3, these multiple plates can be with
It is packaged, and is mounted on the support portion 230 of substrate detection apparatus 200 with matrix shape arrangement.
Fig. 5 is the figure that the composition of substrate detection apparatus of preferred 3rd embodiment according to the present utility model is outlined.
The substrate detection apparatus 300 of preferred 3rd embodiment according to the present utility model includes: base portion (not shown)；Dress
Microscope carrier 320 is arranged in the top of base portion and is mounted with substrate；Support portion 330A, support portion 330B, in above-mentioned base portion along Y
Axis direction is movably disposed；Probe unit 340A, probe unit 340B, in above-mentioned support portion 330A, support portion 330B along X-axis
Direction is movably disposed；And test control unit 350A, test control unit 350B, it is mounted on above-mentioned support portion 330A, support
Portion 330B.
In Fig. 5, support portion 330A, support portion 330B include the first support portion 330A and the second support portion 330B.
One support portion 330A has the first probe unit 340A and the first test control unit 350A, has second in the second support portion 330B
Probe unit 340B and the second test control unit 350B.First test control unit 350A is mounted on the first support portion 330A, and
Test signal is transmitted to the first probe unit 340A, to apply electric signal to substrate, is received from the electricity formed on substrate
The signal of subcomponent and execute detection.Second test control unit 350B is mounted on the second support portion 330B, to the second probe unit
340B transmitting test signal, thus to substrate apply electric signal, receive the signal from the electronic component formed on substrate and
Execute detection.
In the third embodiment, the first test control unit 350A and the second test control unit 350B can execute substrate each
From different detections.
In one embodiment, above-mentioned first test control unit 350A can execute TEG detection, above-mentioned second test to substrate
Control unit 350B can execute matrix (Array) detection to substrate.
By constituting substrate detection apparatus as shown in Figure 5, substrate can be executed using a substrate detection apparatus more
A detection.
Described above is only the technical idea illustrated for illustrating the utility model, for the ordinary skill of this field
For personnel, without departing from the concept of the premise utility, a variety of improvement, deformation and displacement can also be made.Therefore,
Embodiment and attached drawing disclosed in the utility model are not intended to limit the technical idea of the utility model, and are only for
Illustrate the utility model, these embodiments and attached drawing are not the range for limiting the technical idea of the utility model.It should be understood that
, therefore, the scope of protection shall be subject to the appended claims for the utility model patent.These belong to the utility model
Protection scope.
Claims (10)
1. a kind of substrate detection apparatus, wherein include:
Loading stage, is set to base portion, and the upper side of the loading stage loads substrate；
Support portion is set to the base portion, and across the loading stage；
Probe unit is movably disposed at the support portion to prescribed direction；And
Test control unit, generates the detection signal of the substrate, and is supplied to the probe unit, receives the probe unit and surveys
Fixed signal executes electrical detection to the substrate,
The test control unit is installed on the base portion or the support portion.
2. substrate detection apparatus according to claim 1, wherein
The test control unit is moved together with being mounted on the state of the support portion with the support portion.
3. substrate detection apparatus according to claim 2, wherein
The test control unit is connect with the probe unit by test cable.
4. substrate detection apparatus according to claim 2, wherein
The support portion is provided with multiple probe units, the test control unit has multiple SMU, multiple SMU
It is corresponding with each probe unit.
5. substrate detection apparatus according to claim 1, wherein
The test control unit is arranged by multiple test cells with matrix shape.
6. substrate detection apparatus according to claim 5, wherein
The test control unit includes: control pattern unit and current sensing unit；
The control pattern unit applies pulse pattern, and applying the pulse pattern is for driving the electricity for being formed in the substrate
Subcomponent；
The current sensing unit applies voltage to the electronic component for being formed in the substrate and measures electric current.
7. substrate detection apparatus according to claim 6, wherein
The control pattern unit includes multiple plates, and the multiple plate is respectively provided with multiple channels, the current sensing unit packet
Multiple plates are included, the multiple plate is respectively provided with multiple channels.
8. a kind of substrate detection apparatus, wherein include:
Loading stage, is set to base portion, and the upper side of the loading stage loads substrate；
First support portion and the second support portion are set to the base portion, and across the loading stage；
First probe unit and the first test control unit, first probe unit are movably disposed at described along prescribed direction
First support portion, first test control unit are installed on first support portion；And
Second probe unit and the second test control unit, second probe unit are movably disposed at described along prescribed direction
Second support portion, second test control unit are installed on second support portion,
First test control unit and second test control unit execute mutually different detection.
9. substrate detection apparatus according to claim 8, wherein
First test control unit is connect with first probe unit by the first test cable；
Second test control unit is connect with second probe unit by the second test cable.
10. substrate detection apparatus according to claim 9, wherein
First test control unit executes TEG detection to the substrate；
Second test control unit executes the detection of TFT matrix to the substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020170179684A KR102614075B1 (en) | 2017-12-26 | 2017-12-26 | Substrate testing apparatus |
| KR10-2017-0179684 | 2017-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209624721U true CN209624721U (en) | 2019-11-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821922033.1U Active CN209624721U (en) | 2017-12-26 | 2018-11-21 | Substrate detection apparatus |
Country Status (2)
| Country | Link |
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| KR (1) | KR102614075B1 (en) |
| CN (1) | CN209624721U (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102157070B1 (en) * | 2020-03-03 | 2020-09-17 | 주식회사 프로이천 | Auto-Probe Apparatus |
| KR102157311B1 (en) * | 2020-03-03 | 2020-10-23 | 주식회사 프로이천 | Cam Up And Down Type Auto-Probe Apparatus |
| KR102202035B1 (en) * | 2020-09-03 | 2021-01-12 | 주식회사 프로이천 | Auto-Probe Apparatus |
| KR102202033B1 (en) * | 2020-09-03 | 2021-01-12 | 주식회사 프로이천 | Cam Up And Down Type Auto-Probe Apparatus |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3401713B2 (en) * | 1994-09-13 | 2003-04-28 | 富士通株式会社 | Integrated circuit test equipment |
| KR200276967Y1 (en) * | 1996-11-25 | 2002-11-20 | 주식회사 하이닉스반도체 | Prober of probe station for wafer inspection |
| KR100188144B1 (en) * | 1997-01-15 | 1999-06-01 | 삼성전자주식회사 | Apparatus of measuring display units |
| KR100936971B1 (en) * | 2007-08-07 | 2010-01-14 | (주)하이비젼시스템 | OS of probe card, evenness, leakage current measuring mean and the system |
| JP6084426B2 (en) * | 2012-10-15 | 2017-02-22 | 株式会社日本マイクロニクス | Inspection device |
| JP3194991U (en) * | 2013-06-30 | 2014-12-25 | フォトン・ダイナミクス・インコーポレーテッド | Improved automatic probe configuration station and method of operation thereof |
| KR102423194B1 (en) | 2015-01-21 | 2022-07-21 | 삼성디스플레이 주식회사 | Organic light emitting display apparatus and the test method of contact pad thereof |
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2017
- 2017-12-26 KR KR1020170179684A patent/KR102614075B1/en active IP Right Grant
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| Publication number | Publication date |
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| KR20190078021A (en) | 2019-07-04 |
| KR102614075B1 (en) | 2023-12-14 |
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