TW201140769A - Semiconductor die package structure - Google Patents

Semiconductor die package structure Download PDF

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Publication number
TW201140769A
TW201140769A TW100104460A TW100104460A TW201140769A TW 201140769 A TW201140769 A TW 201140769A TW 100104460 A TW100104460 A TW 100104460A TW 100104460 A TW100104460 A TW 100104460A TW 201140769 A TW201140769 A TW 201140769A
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TW
Taiwan
Prior art keywords
semiconductor die
package
spacer
flip
die
Prior art date
Application number
TW100104460A
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English (en)
Inventor
Piyush Gupta
Shantanu Kalchuri
Original Assignee
Qualcomm Inc
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Publication date
Application filed by Qualcomm Inc filed Critical Qualcomm Inc
Publication of TW201140769A publication Critical patent/TW201140769A/zh

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  • Engineering & Computer Science (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Wire Bonding (AREA)

Description

201140769 六、發明說明： 【發明所屬之技術領域】 本發明大體上係關於經封裝半導體晶粒。更具體而言 之’本發明係關於改良之半導體晶粒封裝，在該等半導體 晶粒封裝中，一第一晶粒置放在一第二晶粒及一間隔物 上。 【先前技術】 按照慣例’晶片封裝包括多個半導體晶粒。一些晶片封 裝包括一小外形尺寸之一射頻（RF)晶粒及一較大數位晶 粒。在圖1中展示一個先前技術晶片封裝。該晶片封裝1 〇〇 包括一 RF晶粒1〇1及一數位晶粒102 ^在圖丨中，該較大數 位晶粒102結構化為一覆晶球狀柵格陣列（Bga)，並且該 RF晶粒1 〇 1使用若干導線接合結構。該晶片封裝1 〇〇使用毛 細側填料103，該毛細側填料1 〇3增加生產成本並導致一較 大總封裝’此係該毛細側填料丨〇3自該較大數位晶粒1 〇2之 長度尺寸及寬度尺寸稍微向外延伸之故。此外，因為導線 之電感極高且在該RF晶粒101中導致非線性，所以將若干 導線接合用於該堆疊之RF晶粒101傾向於使RF效能降級。 另一做法（未在本文中展示）以若干導線接合結構實施晶粒 1〇1及102兩者。此做法亦遭受降低之RF效能。 又一做法（亦未在本文中展示）將晶粒101及102兩者並列 置放於該封裝中。然而，該並列做法以增加之封裝大小為 代價，與圖1中所展示之實施例相比更為如此。 【發明内容】 154097.doc 201140769 本發明之各種實施例包括一種系統級封裝，該系統級封 裝具有·一覆晶半導體晶粒’其處於一封裝基板上；一間 隔物’其處於該封裝基板上；及一導線接合半導體晶粒， 其由該間隔物及該覆晶半導體晶粒支撐。 根據另一實施例，一種晶片封裝包括：一覆晶半導體晶 粒’其處於一封裝基板上；用於散熱之構件，其處於該封 裝基板上；及一導線接合半導體晶粒，其由該散熱構件及 該覆晶半導體晶粒支撐。 根據本發明之另一實施例，一種用於組裝一系統級封裝 之方法包括：在一封裝基板上安置一覆晶半導體晶粒；在 該封裝基板上安置一覆晶間隔物；及將一導線接合半導體 晶粒安置至該間隔物及該覆晶半導體晶粒上。 根據本發明之又一實施例，一種系統級封裝包含：一覆 晶半導體晶粒，其處於一封裝基板上；用於提供機械支撐 之構件，其安置於該封裝基板上；及一導線接合半導體晶 粒，其安置於該機械支撐構件及該覆晶半導體晶粒上。 前文已相當廣泛地概述了本發明之特徵及技術優勢以便 可較好地理解下文[實施方式]。下文將描述形成本發明之 申請專利範圍之標的物的額外特徵及優勢。熟習此項技術 者應瞭解’所揭示之概念及特定實施例可容易用作用於修 改或設計用於進行本發明之相同目的之其他結構的基礎。 熟習此項技術者亦應認識到’此等等效構造並不脫離如在 隨附申請專利範圍中所闡述之本發明之技術。當結合附圖 考慮時，自以下描述將較好地理解咸信為本發明所特有之 154097.doc -4- 201140769 新穎特徵（關於其組織及操作方法兩者）以及另外的目的及 優勢。然而，應明確理解，該等圖中之每一者僅出於說明 及描述目的而加以提供且不意欲界定本發明之限制。 【實施方式】 為達成對本發明之較全面理解，現參考結合附圖進行之 以下描述。 圖2展示一例示性無線通信系統200，在該無線通信系統 200中’可有利地使用本發明之一實施例。出於說明之目 的，圖1展示三個遠端單元220、230及240以及兩個基地台 250及260。應認識到’無線通信系統可具有更多遠端單元 及基地台。遠端單元220、230及240分別包括改良之半導 體晶粒封裝225A、225B及225C，該等改良之半導體晶粒 封裝為如下文進一步論述之實施例，圖2展示自該等基地 台250及260至該等遠端單元22〇、23〇及24〇之前向鏈路信 號280以及自該等遠端單元220、230及240至基地台250及 260之反向鏈路信號29〇。 在圖2中，將遠端單元22〇展示為一行動電話，將遠端單 元230展示為一攜帶型電腦，且將遠端單元240展示A . 線區域迴路系統中之-電腦。舉例而言，該等遠端 為订動電話、手持型個人通㈣統（pcs)單元、諸如個人 資料助理之攜帶型資料單元、具有Gps能力之裝置 =二亡盒、諸如音樂播放器、視訊播放器之媒體播放 娱樂早元、諸如儀錶讀取設備之固定位置資料單_、 或储存或操取資料或電腦指令之任何其他裝置，或其:何 154097.doc 201140769 組合。雖然圖2說明根據本發明之教示之若干遠端單元， 但本發明不限於此等例示性所說明單元《本發明可適合地 用於包括一半導體晶粒封裝之任何裝置中。 圖3 A及圖3B分別為根據本發明之一實施例而調適之例 示性晶片封裝300的俯視圖方塊圖及側視圖方塊圖。圖3A 展示該晶片封裝300之俯視圖。圖3B展示該晶片封裝300之 側視圖。 該晶片封裝300包括實施為一覆晶bgA之一 RF晶粒301、 具有導線接合304之一數位晶粒3〇2及安置於一封裝基板 305上之一間隔物303。在該晶片封裝3〇〇中，該數位晶粒 302安置於該間隔物303及該RF晶片3 〇 1上，並由該間隔物 303及該RF晶片301支撐。因為該RF晶粒3〇1被實施為一覆 晶BGA，所以其並不遭受圖丨中所展示之實施例之降低的 RF效能。 此外，在一些實施例中，因為唯模製側填料（muf)3〇6 包住且充分支撐晶片3〇1及302兩者，所以該晶片封裝3〇〇 可放棄使用一毛細側填料而改為使用該唯模製側填料 3〇6。通常，唯模製側填充製程限於用於小晶粒及高間距 晶粒。在圖3中’該較小晶粒（3〇1)為具有一較大間距之一 覆晶晶粒以使得該較小晶粒易於調適以接合唯模製側填充 製程來使用。相比而言’在圖!中，較大數位晶粒⑽為具 有一小間距之一覆晶晶粒，從而使得唯模製側填充製程與 毛細側填料103相比而言較不合需要。如熟習此項技術者 所熟知’側填料將一晶粒黏著至一封裝上之該側填料之接 154097.doc 201140769 觸點以免又熱膨脹效應及機械衝擊效應。該唯模製側填料 306為囊封整個封裝而非—單個晶粒之側填料。圖3A及圖 3B中所展示之實施例利用該唯模製側填料娜作為該灯晶 粒301之—側填料，藉此消除由圖1之先前技術所採取之塗 覆毛細側填料的步驟。但應注意，各種實施例並不排除使 用毛細側填料。 該RF晶粒301置放於該封裝3〇〇之略偏心處以使得可易於 將來自該RF晶粒301之信號投送至該封裝3〇〇之邊緣。然 而，右自該封裝300消除該間隔物3〇3，則該數位晶粒3〇2 之w垂之量會過量。因而，在一個態樣中，該間隔物3们 對省數位晶粒302提供機械支撐，同時允許該RF晶粒3〇1置 放於偏心處。此外’在圖3A及圖3B之實施例中，該唯模 製側填料306由具有諸如矽石粒子之微粒之環氧樹脂製 成在本貫細•例中’該間隔物3 03由比該唯模製侧填料3〇6 之％氧樹脂化合物有效地傳導熱之矽製成。因而，該間隔 物303藉由其材料提供用於將熱自該數位晶粒3〇2轉移至該 基板305之一路徑，藉此提供散熱。在另一實施例中，該 間隔物303包括通孔中之諸如銅之導熱材料以進一步提高 該間隔物303之熱轉移能力。 圖4為根據本發明之一實施例而調適的一例示性晶片封 裝400之說明。在許多實施例中’有可能使用一薄膜沈積 製程以在一或多個間隔物上實施被動裝置。舉例而言，被 動裝置包括電感器、電容器及電阻器。該晶片封裝4〇0包 括貫施為一覆晶BGA之一間隔物403，該間隔物403具有整 154097.doc 201140769 合於其上之被動裝置（圖中未展示）。該等被動裝置藉由該 間隔物403之覆晶接觸點與該晶片封裝400中之其他組件電 連通，且該間隔物403提供如上文關於圖3Α及圖3Β所論述 之機械支撐及熱轉移。在一些實施例中，在諸如該間隔物 403之一間隔物上實施被動裝置可藉由以其他方式將置放 於外部之被動裝置移動於該間隔物之佔據面積内來節省空 間。 上文所展示之貫施例包括一個導線接合晶粒、一個間隔 物及一個較小覆晶晶粒，但實施例不限於此。舉例而言， 晶片封裝可包括兩個或兩個以上導線接合晶粒、間隔物及 較小覆晶晶粒中之每一者。因而’一些實施例可包括各自 包括安置於一間隔物及一覆晶晶粒之頂部上之一導線接合 晶粒的兩個或兩個以上結構。此外，其他實施例可包括各 自包括安置於一或多個間隔物及一或多個覆晶晶粒上之一 導線接合晶粒的結構。此外’雖然已在上文令提及若干特 定材料’但應注意’可將現在已知或稍後開發之用於基 板、晶粒、間隔物及側填料之其他適合的材料併入至本發 明之各種實施例中。 圖5為根據本發明之一實施例而調適之用於製造一晶片 封裝的例示性程序500之說明。舉例而言，可在一製造設 施中藉由一或多個機器及電腦控制之程序來執行程序 500。 在區塊501中，在一封裝基板上安置—覆晶半導體晶 粒《在一些實施例中，該覆晶半導體晶粒包括一 RF晶粒。 154097.doc 201140769 該區塊501可包括用於安置該半導體晶粒之各種適合技術 令之任-者’包括但不限於，將該半導體晶粒上之焊料凸 塊與该封裝基板上之接觸點對準，且在對準之後使焊料材 料流動。 在區塊502中’在該封裴基板上安置一間隔物。在該間 隔物具有整合於其上之被動裝置的實施例t，彳以相似於 區塊501中之用於在該封裝基板上安置該晶粒之技術的方 式來在該封裝基板上#置該間隔#。在該間隔物為一虛設 間隔物的實施例中，可藉由（例如）使用環氧樹脂晶粒附著 材料來在該封裝基板上安置該間隔物。 在區塊503中，藉由（例如）使用環氧樹脂晶粒附著材料 來將一導線接合半導體晶粒安置至該間隔物及該覆晶半導 體晶粒上。數位晶粒之類型之實例包括（但不限於）數位信 號處理器（DSP)、特殊應用積體電路（ASIC)、通用處理器 及其類似物。在一些實施例中，該區塊5〇3亦包括在該導 線接合半導體晶粒及該封裝基板之接觸點之間形成導線接 合連接。 在區塊504中，將唯模製側填料塗覆至該封裝以使得該 模製側填料包圍該覆晶半導體晶粒、該間隔物及該導線接 合晶粒’如圖3A、圖3B及圖4中所展示。一旦完成該封裝 本身’即可準備在諸如一蜂巢式電話、—導航裝置、一媒 體播放器、一個人數位助理（PDA)、一電腦或其類似物之 一或多個裝置中安裝該封裝。 雖然將該程序500展示為一系列離散製程，但是實施例 154097.doc 201140769 未必限於圖5中所展示之程序。一些實施例可在程序5〇〇中 增加、省略、重排或修改一或多個區塊。舉例而言，可將 區塊501與區塊502調換或同時執行區塊5〇1與區塊5〇2。此 外，在一些實施例中，可將毛細側填料塗覆至該覆晶半導 體晶粒，而在其他實施例中可省略該毛細側填料而改為唯 模製側填料。此外，各種實施例可包括藉由（例如）薄膜處 理而在該間隔物上整合被動裝置。 各種實施例包括與先前技術晶片封裝相比之若干優勢。 舉例而言，一些實施例藉由將—RF晶片實施為一覆晶 BGA(而非一導線接合結構）來提高RF效能而不會總體上增 加忒封裝之大小》事實上，一些實施例藉由利用垂直堆疊 及消除毛細側填料而利用一小於圖丨中所展示之封裝的封 裝另外，一些貫施例藉由將間隔物用於一導線接合晶粒 之散熱而利用間隔物中之矽（或其他）材料之導熱特性。 儘管已詳細地描述本發明及其優點，但應理解，在不脫 離如由隨附申料利冑圍所界定的本發明之技術的情況 下，可在本文中進行各種改變、替代及變更。此外，本申 請案之範脅不意欲限於本說明書中描述之製程、機器、製 品、物質組成、手段、方法及步驟之特^實施例。如一般 熟習此項技術者將易於自本發明而瞭解，可根據本發明利 用執行與本文中所描述之對應實施例實質上相同之功能或 達成與該等對應實施例實質上相同之結果的#前現有或稍 後待開發的製程、機器、製品1質組成、手段、方法或 步驟因此’隨附中請專利範圍意欲在其料内包括此等 154097.doc 201140769 方法或步驟。 製程、機器、製品、物質組成、手段 【圖式簡單說明】 圖1為一先前技術晶片封裝之說明； 圖2為展示一例示性無線通信系統之方塊圖，在該無線 通信系統中，可有利地使用本發明之一實施例； 圖3 A及圖3B分別為根據本發明之一實施例而調適之一 例不性晶片封裝的俯視圖方塊圖及側視圖方塊圖； 圖4為根據本發明之一實施例而調適的一例示性晶片封 裝之說明；及 圖5為根據本發明之一實施例而調適之用於製造一晶片 封裝的一例示性程序之說明。 【主要元件符號說明】 100 晶片封裝 101 RF晶粒 102 數位晶粒 103 毛細側填料 220 遠端單元 225A 改良之半導體晶粒封裝 225B 改良之半導體晶粒封裝 225C 改良之半導體晶粒封裝 230 遠端單元 240 遠端單元 250 基地台 260 基地台 154097.doc 201140769 280 前向鏈路信號 290 反向鏈路信號 300 晶片封裝 301 RF晶粒 302 數位晶粒 303 間隔物 304a 導線接合 304b 導線接合 305 封裝基板 306 唯模製側填料 400 晶片封裝 403 間隔物 154097.doc ·12·

Claims (1)

  1. 201140769 七、申請專利範園·· 1. 一種系統級封裝，其包含： 一覆晶半導體晶粒，其處於—封裝基板上； 一間隔物’其處於該封裝基板上；及 一導線接合半導體晶粒，其由該間隔物及 體晶粒支撐。 设日日千等 2·如請求項!之系統，其進一步包含—模製側填料1模 製側填料包圍該覆晶半導體晶粒、該㈣物及該導線接 合半導體晶粒。 3.如請求項2之系統，其中該模製側填料包含一環氧樹脂 材料。 θ 4. 如請求項丨之系統，其進一步包含—毛細側填料，該毛 細側填料包圍該覆晶半導體晶粒之至少一部分。 5. 如請求項1之系統，其中該間隔物包含—整合之被動裝 置。 ’ 6. 如請求項1之系統，其中該系統級封裝安置於選自由以 下各者組成之一婵之一項目中： 一手持型裝置；及 一個人電腦。 7. 如請求項1之系統，其中該覆晶半導體晶粒包含一射頻 (RF)晶教。 8. 如請求項1之系統’其中該導線接合半導體晶粒包含— 數位晶粒。 9. 如請求項1之系統’其中該間隔物與該導線接合半導體 154097.doc 201140769 日日粒經熱輕接。 10 ·如清求項9之系統，苴中兮 ”中 '"間隔物包3 -材料，該材科 、於安置於該封裝基板上之一模製側填 的一熱導率》 …导羊 11 一種用於組裝一系統級封裝之方法，其包含： 在一封裝基板上安置一覆晶半導體晶粒； 在該封裝基板上安置一間隔物；及 將一導線接合半導體晶粒安置至該間隔物及該覆晶丰 導體晶粒上。 12_如請求項丨丨之方法，其進一步包含： 將模製側填料塗覆至該封裝以使得該模製側填料包圍 該覆晶半導體晶粒、該間隔物及該導線接合半導體晶 粒0 13. 如請求項11之方法，其進_步包含： 在该間隔物上整合至少—個被動裝置。 14. 如請求項11之方法，其進一步包含在選自由以下各者組 成之一群之一裝置中安裝該系統級封裝： 一媒體播放器； 一導航裝置； 一通信裝置； 一個人數位助理（PDA);及 一電腦。 15. —種系統級封裝，其包含： 一覆晶半導體晶粒’其處於一封裝基板上； 154097.doc 201140769 二於散熱之構件，其處於該封裝基板上；及 導線接。半導體晶粒’其由該散熱構件及該覆晶半 導體晶粒支樓。 16. 17. 18. 19. 20. 一模製側填料，該模 該散熱構件及該導線 如請求項15之系統，其進一步包含 製側填料包圍肖覆晶半導體晶粒、 接合半導體晶粒。 如β求項15之系統，其不包含包圍該覆晶半導體晶粒之 毛細側填料。 一種系統級封裝，其包含： 封裝基板上； 其安置於該封裝基板 覆晶半導體晶粒，其處於— 用於提供機械支撐之構件， 上；及 一導線接合半導體晶粒，其安罟私外地u丄也 ^ 兵女置於該機械支撐構件及 該覆晶半導體晶粒上。 如請求項18之系統，其中該機械支擇構件包含_整合之 被動裝置及一球狀柵格陣列。 如請求们8之系統，其中該覆晶半導體晶粒包含—射頻 (RF)晶教。 154097.doc
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