TW201109255A - Loading and unloading method between loading and unloading machine, transfer cart and device - Google Patents

Loading and unloading method between loading and unloading machine, transfer cart and device Download PDF

Info

Publication number
TW201109255A
TW201109255A TW099129436A TW99129436A TW201109255A TW 201109255 A TW201109255 A TW 201109255A TW 099129436 A TW099129436 A TW 099129436A TW 99129436 A TW99129436 A TW 99129436A TW 201109255 A TW201109255 A TW 201109255A
Authority
TW
Taiwan
Prior art keywords
units
cassette
loading
processing device
transport vehicle
Prior art date
Application number
TW099129436A
Other languages
English (en)
Chinese (zh)
Inventor
Akihiro Noda
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of TW201109255A publication Critical patent/TW201109255A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0414—Storage devices mechanical using stacker cranes provided with satellite cars adapted to travel in storage racks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting
TW099129436A 2009-09-03 2010-09-01 Loading and unloading method between loading and unloading machine, transfer cart and device TW201109255A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009203444A JP2011051748A (ja) 2009-09-03 2009-09-03 ローダアンローダと搬送車と装置間のロードアンロード方法

Publications (1)

Publication Number Publication Date
TW201109255A true TW201109255A (en) 2011-03-16

Family

ID=43840214

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099129436A TW201109255A (en) 2009-09-03 2010-09-01 Loading and unloading method between loading and unloading machine, transfer cart and device

Country Status (4)

Country Link
JP (1) JP2011051748A (ja)
KR (1) KR20110025080A (ja)
CN (1) CN102009843A (ja)
TW (1) TW201109255A (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103010747B (zh) * 2011-09-21 2016-04-20 瑞世达科技(厦门)有限公司 传送整合装置及其传送方法
JP6297989B2 (ja) * 2015-01-27 2018-03-20 光洋サーモシステム株式会社 搬送装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3045756B2 (ja) * 1990-10-17 2000-05-29 株式会社森精機製作所 工作機械のパレット交換装置
JP2001130708A (ja) * 1999-11-05 2001-05-15 Murata Mach Ltd 自動倉庫システム
CN1105672C (zh) * 2000-10-28 2003-04-16 云南昆船设计研究院 密集型自动化物流仓储方法及其装置
JP2005145713A (ja) * 2003-08-29 2005-06-09 Hitachi Kiden Kogyo Ltd 基板の搬送装置
JP4904722B2 (ja) * 2005-06-02 2012-03-28 株式会社Ｉｈｉ 基板搬送装置

Also Published As

Publication number Publication date
KR20110025080A (ko) 2011-03-09
JP2011051748A (ja) 2011-03-17
CN102009843A (zh) 2011-04-13

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