TW201038384A - Light irradiation method and light irradiation apparatus - Google Patents

Abstract

Provided is a light irradiation method for irradiating a linear light beam (LB) from a light irradiation device including a plurality of optical elements (LED) arrayed in one direction (X). The light irradiation method comprises generating a linear light beam having light irradiation faces (SF) extending in the direction (X) by irradiating a beam having an elongated elliptical irradiation area (T) from each optical element (LED) and superimposing the irradiation areas; opposing the irradiation faces (SF) of the linear light beam to a linear photo-curable resin (S) formed on a substrate (P) along the direction (X); irradiating the linear light beam onto the linear photo-curable resin (S); and relatively moving one of the irradiation face (SF) of the linear light beam and the substrate (P) in the direction (X), while the linear light beam is irradiated onto the linear photo-curable resin.

Description

201038384 ‘6. Description of the Invention: [Technical Field of the Invention] The present invention relates to a light irradiation method and a light irradiation device for a light irradiation device. [Prior Art] The element substrate and the counter substrate of the liquid crystal display panel are arranged to face each other with an extremely narrow gap, and the element substrate is arranged in a matrix to form a thin film transistor. The opposite substrate is formed with a light shielding film and color filter. Film and so on. Further, when the two substrates are stacked, the liquid crystal is sealed in a region surrounded by a sealing material having a photocurable resin between the two substrates. Next, ultraviolet rays are applied to the sealing material, and the sealing material is cured to bond the two substrates, thereby fabricating a liquid crystal display panel. In this case, there is a light irradiation device which bonds the two substrates to each other by ultraviolet curing the sealing material. Such a light irradiation device uses, for example, a 〇 arc discharge type metal halide lamp as a light source, and irradiates ultraviolet rays to the entire surface of a substrate to be bonded (e.g., Patent Document 1). In addition, in recent years, a light-emitting device using an ultraviolet light-emitting diode has been attracting attention. This device irradiates ultraviolet rays only to the linear sealing material ′ to reduce power consumption, and can easily and immediately adapt to changes in the specifications of the substrate. The plurality of ultraviolet light-emitting diodes of the light-irradiating device using the ultraviolet light-emitting diode are arranged in a direction at a predetermined pitch. Further, an optical system such as a hemispherical lens or a cylindrical lens is disposed on the light emitting side of each of the ultraviolet light emitting diodes. In this way, the light emitted from each of the violet 201038384 external light-emitting diodes is transmitted through an optical system such as a hemispherical lens or a cylindrical lens to form a light beam (linear beam) having a straight cross section and is irradiated to the straight line. Sealing material. Patent Document 1: JP-A-2006-66585 SUMMARY OF THE INVENTION The illuminance of a linear beam generated by the light emission of a plurality of ultraviolet light-emitting diodes is preferably uniformly distributed at all positions of the irradiation region, that is, the same. However, in the conventional light irradiation device, a plurality of ultraviolet light emitting diodes are arranged in a direction at a predetermined interval. Therefore, the peak ❻(3) illusion and the bottom line of the illuminance of the linear beam formed by the plurality of ultraviolet light-emitting diodes alternate in the line direction, so that the positions in the line direction are unevenly distributed. Must the _ sealing material illuminate the preset shape? ,system. In this month's situation, as described above, if the illuminance distribution is not uniform, it is desirable to make the production effect 4; the shooting time 'thus' the irradiation time becomes longer, and the light is guided; 201038384 One aspect of the invention is from the light Method of illuminating a linear beam by an illumination device' The light illumination device includes a plurality of optical elements arranged in a direction. The method includes the steps of: respectively illuminating light having an elliptical shaped illumination region from a plurality of optical elements and superimposing the respective illumination regions' domains, thereby generating a straight linear beam having a light irradiation surface extending in one direction a linear light-curable resin formed on the substrate in a direction along the light-irradiating surface of the linear beam; a linear light beam is irradiated onto the linear light-curable resin; and the linear light beam is irradiated onto the straight line During the photocurable resin, one of the light-irradiating surface of the linear beam and the substrate is relatively moved in one direction. Another aspect of the invention is a light illumination device. a light irradiation device: a stage on which a substrate is placed, the substrate is formed with a linear photocurable resin; and the light irradiation unit includes a plurality of optical elements 'arranged' along a direction from the plurality of optical elements Irradiating the light having the long elliptical shaped irradiation region and superimposing the respective irradiation regions, thereby generating a linear beam having a light irradiation surface extending in one direction; and the optical element driving device 'driving each optical element of the light irradiation unit a first moving device that moves the light irradiation unit in a direction orthogonal to one direction; a second moving device that moves the substrate on the light irradiation unit or the stage in one direction; and a control device that controls the first Moving the device such that the light-irradiating surface of the linear beam directly faces the linear photo-curable resin in one direction, and controls the optical element driving device and the second moving device so that the light-emitting surface of the linear beam and the substrate are The linear beam is irradiated to the linear photocurable resin while moving relatively in one direction. According to the present invention, even if the illuminance distribution of the linear beam is not uniform in the line direction 201038384, the uniform distribution of the cumulative illuminance of the linear beam to the irradiation target region can be improved. Thereby, the irradiation time can be shortened, and thus the production efficiency can be improved. [Embodiment] Hereinafter, an embodiment of a light irradiation device according to the present invention will be described with reference to the drawings, and an ultraviolet irradiation device for bonding substrates. In the first drawing, the ultraviolet ray irradiation apparatus 1 is provided in a production line which is not shown, which seals liquid crystal between the lower substrate W1 and the upper substrate W2 to manufacture an active matrix type liquid crystal display panel P. The ultraviolet irradiation device is used for a curing process in the manufacturing process of the liquid crystal display panel P, which hardens the sealing material s composed of the ultraviolet curable resin between the lower substrate W1 and the upper substrate W2 of the liquid crystal display panel P. The ultraviolet irradiation device 1 is provided with an ultraviolet irradiation unit 3 that generates ultraviolet rays that are irradiated onto the sealing material s in the form of a linear light beam LB. The ultraviolet irradiation unit 3 is provided on a gantry 2. Further, the ultraviolet curable resin is an example of a photocurable resin, and the ultraviolet ray irradiation unit 3 is an example of the light irradiation unit of the present invention. As shown in the first figure, the ultraviolet irradiation device i has a holder 5 provided on the ground. The bracket 5 has four pillars 5a' disposed on four sides, and the four pillars 5a are erected on the ground. Further, the bracket 5 has four lower frames 5b, two intermediate frames 5c, and two upper frames (the left upper frame 5d and the right upper frame 5e). The four lower frames 5b are respectively coupled to the lower portions of the adjacent pillars 5a. One of the two intermediate frames 5c is connected to the intermediate portion of the pair of right and left pillars 5a on the front side (201038384 in the opposite direction to the Y direction in the drawing). Further, the other of the two intermediate frames 5c is connected to the intermediate portion of the pair of left and right pillars 5a on the rear side (the Y-direction side in the drawing). The left upper frame 5d is connected to the upper end portion of the pair of front and rear pillars 5a on the left side (the reverse X direction side in the drawing). The upper upper frame 5e is connected to the upper end of the pair of front and rear pillars 5a on the right side (the X direction side in the drawing). In the present specification, the left and right directions of the ultraviolet irradiation device 1 are defined as "X direction", the front and rear directions are defined as "Y direction", and the vertical direction is defined as "Z direction". Here, in the example of the first figure, the front-rear direction (Y direction) is referred to as the longitudinal direction of the upper frames 5d, 5e, and the left-right direction (X direction) is referred to as the gantry between the upper frames 5d, 5e. The long side direction of the frame 2. The holder 5 is provided with a stage 'ST formed of an octagonal opaque plate on which the liquid crystal display panel P is placed. As shown in the second and third figures, the lower surface STa of the stage ST is supported by a support arm 7 (refer to the second figure) disposed on the lower side of the stage ST, and the support arm 7 is provided on The square frame body 6 can be moved up and down relative to the lower frame 5b by an unillustrated guide ball screw. A through hole is formed in the center position of the stage ST as shown in the third figure, such as 筮-囵u.

The center axis of the TB is in rotation and the crucible rotates. 7 201038384 After the alignment is performed on the opposite side of the substrate moving device 9, the liquid is operated in the ST position. In addition, the substrate moving device 9 causes the carrier to be placed on the stage without the panel Ρ rotated by 90 degrees, and then placed on the stage s, the liquid crystal display holes of the mouth ST are set to two:: drop, _ _ (not shown) can be丨 丨 〇 〇 〇 〇 二 二 : : : : f f f f f f f f f f f f f f f f Each of the liquid crystal display panels that are transported is: =: ΞΓ is delivered to the counter table tb, and the aligning liquid is immersed in the sea: the bundle, and the aligning table Τβ is retracted into the through hole 8. Therefore, the liquid sweetness display panel is placed on the stage ST in the state of being aligned. Further, the front and rear sides of the through hole 8 on the stage ST have a pair of detection windows u extending in the left-right direction (X direction). 1 夕 ' As shown in the second figure, the illuminance detecting device 12 corresponding to each of the detection windows 11 is provided on the lower side of the planting station ST (only one illuminance detecting device 12 is arranged in the second figure to face each other) The position of the detection window u. As shown in the fourth figure, the illuminance detecting device 12 has a guide rail 13 which is supported and fixed to the square frame 6, and the detection window 11 along the stage ST is in the left-right direction (X direction) The guide 13 is an example of the guide member of the present invention. The guide rail 13 has a guide surface 13a for carrying the carriage 8 201038384 (carriage) 14, and the guide rail 13 is disposed such that the guide surface 13a faces the detection window η. As shown in the fifth figure, the bracket 14 can reciprocate on the guide rail 13 in the left-right direction (X direction). The bracket 14 is connected to the carriage motor by a timing belt (not shown). M1 (refer to FIG. 11). The carriage motor M1 is driven, whereby the carriage 14 is reciprocated on the guide rail 13 in the X direction by the urging belt. 照 The illuminance sensor 15 is fixed on the upper surface of the bracket 14. The illuminance sensor 15 receives the penetrating detection window 11 from the incident hole 15a. The outer line detects the illuminance of the ultraviolet ray. In detail, when the cradle 14 reciprocates along the X direction, the illuminance sensor 15 receives the linear beam LB through the detection window 11 formed along the X direction (refer to the eighth The illuminance of the linear beam LB is detected, and the illuminance of the linear beam LB by the illuminance sensor 15 may be discretely detected at a plurality of positions along the X direction or continuously detected along the X direction. Further, the lateral width Dx of the detection window 11 is a width sufficiently larger than the line width D of the linear beam LB. In the present embodiment, the lateral width Dx of the detection window η is the line width D of the linear beam LB. The size is doubled to three times. As shown in the third figure, the line passing through the detection window 11 across the Dx center position Pwo is taken as the center line of the detection window 11. In this case, the illuminance sensor disposed along the χ direction The movement trajectory of the entrance hole 15a of 15 is a trajectory that is opposite to the center line Pwo of the detection window 11, that is, the left upper frame 5d and the right upper frame 5e of the bracket 5 201038384 each such as the gantry 2 °The gantry 2 has a pair of front and rear gantry main bodies 2a The main body 2a # the left side of the left side of the left side of the left side of the left side of the left side of the left side of the left side of the left side of the left side of the left side of the 5d part of the left side of the 5d part of the main frame 2& The squares 21 are parallel to each other and extend in the Y direction. Therefore, before and after the extension of the X direction, the gantry 2 is moved along the Υ direction. (The left and right ends of the dragon are separated from the ball screw 5d. j $ the ball screw can be rotated The ground is supported behind each of the upper frames - the gantry main body 2a is movable in the γ direction by the ball screw (the front is moved). In addition, the gantry motor M2 is used (refer to the twelfth screw, whereby the front and rear - the pair of dragons The frame main body 2a is reciprocated on the guide 21 in the C direction. It is also possible that the body "is # moved by the rotation of the ball screw" but the straw is moved by the linear motor to move the gantry main body 2a. The lower surface of the J gantry main body 2a is arranged in parallel with the χ direction, and the surface of the 219 corpse. F* outside' As shown in the sixth figure, the use of the cleavage portion and the ultraviolet ray irradiation unit 3 are disposed in the X direction along the gantry frame body 2a. That is, in this example, the two ultraviolet ray irradiation units are set. The gantry main body 2a is parallel to each other. The structure of each ultraviolet irradiation unit 3 is phase _. The ultraviolet ray irradiation unit 3 provided in the mounting member 23 and the gantry main body 2a reciprocate along the γ direction to illuminate the single π (3) A linear light beam composed of ultraviolet rays extending in a line along the X direction is irradiated to the sealing material S) between the substrate W1 and the upper substrate W2 on the liquid crystal display panel fixed to the stage ST. 201038384 Mounting member 23 ( The ultraviolet irradiation unit 3) is attached to the gantry main body 2a in the z-direction (the right and left sides are moved by the ball screw (not shown) provided in the body 2a. Therefore, the unit motor μ°3 is taken as the tenth- Figure) Rotary control gantry main body 2a The ball irradiates the ultraviolet irradiation unit 3 in the X direction (the left and right side | the frame main body 2a reciprocates. In the curing process of the sealing material s, the ultraviolet irradiation unit 3 is above the liquid crystal display panel 1 of the carrier ST Further, in the Y direction 1 , the ultraviolet ray irradiation unit 3 is in the central position in the width direction (see the sixth figure) and the predetermined position of the panel P (the linear sealing position extending in the x direction formed between the lower substrate W1), ultraviolet rays The irradiation unit 3 shifts the outer line in the γ direction, and 'the laser unit 3 reciprocates along the x direction at the position where the movement in the γ direction has stopped. In addition, the ultraviolet ray (scan) 密封 sealing material s fine The state is reciprocating along the χ direction, and the linear sealing material S extending in the X direction when the 曰檨 曰檨 曰檨 曰檨 此 此 此 此 此 此 此 使 直线 直线 直线 直线 直线 直线 直线 直线 直线 直线 直线 直线 直线 直线 直线 直线 直线 直线 直线Fig. 9 is a view showing the ultraviolet irradiation unit 3. As shown in Fig. 31 and Fig. 2, the ultraviolet irradiation unit 3 has a casing 30 which is fixed to the lower surface of the mounting member 23 in the X direction. Under the link plate 31 The array 32 is arranged along the X direction. Each of the plurality of illumination modules (forty in the present embodiment) has a plurality of illumination modules (there are eight in the present embodiment). 201038384 Ultraviolet light-emitting diodes. The light-emitting diode LED is an example of an optical element. As shown in the seventh figure, each of the illumination modules 32 has a circuit board 33 on which a series of eight ultraviolet light-emitting one-pole LEDs are arranged along the X direction. The diodes are connected to the circuit board %. The circuit board 33 of each of the illumination modules 32 is fixed to the lower surface of the connecting plate 31 by bolts 34. At this time, the ultraviolet light emitting diode LEDs that are arranged and connected are located under Side 'and eight UV LEDs are arranged along the X direction. Further, the adjacent illumination modules 32 are positioned such that the ultraviolet light-emitting diodes LEDs between the adjacent circuit boards 33 are arranged in a line shape at equal intervals in the meandering direction. Therefore, in the present embodiment, three hundred and twenty ultraviolet light-emitting diode LEDs are arranged in a line shape at equal intervals along the χ direction. The hemispherical lens % is disposed on the lower side of each of the ultraviolet light emitting diode LEDs which are arranged in a straight line and connected to the circuit board 33. The ultraviolet rays emitted from the ultraviolet light emitting diode LEDs corresponding to the respective hemispherical lens % are incident on the respective hemispherical lenses. Further, each of the hemispherical lenses 35 suppresses the diffusion of the incident ultraviolet rays 并使 and causes the ultraviolet rays to be emitted downward. The cylindrical face lens 36 covering the entire eight hemispherical lenses 35 is disposed along the X direction on the lower side of the eight hemispherical lenses 35 disposed corresponding to the respective illumination modules 32. The outer hemispherical lens 35 is emitted and diffused, and the outer line is incident on the cylindrical lens 36. The cylindrical lens 36 condenses the ultraviolet rays incident from the respective hemispherical lenses 35 toward the γ direction and emits light which is integrated into the Μ shape. ^ Μ 12 201038384 In detail, as shown in the eighth diagrams (8) and (b), the ultraviolet rays UV emitted from the respective ultraviolet light-emitting diode LEDs are respectively diffused by the hemispherical lens 35 disposed directly below. Further, the ultraviolet rays UV emitted from the respective hemispherical lenses 35 converge in the Y direction by the cylindrical lens 36 and are gathered into an elliptical shape. Thereby, the irradiation region τ of the ultraviolet ray UV emitted from each of the ultraviolet ray-emitting diodes on the upper substrate W2 has a long elliptical shape having a long axis in the χ direction. Further, the end portions (overlapping regions) in the long-axis direction of the respective irradiation regions τ overlap each other, and thus the light-irradiating surface SF extending linearly in the z-direction is formed. In other words, the ultraviolet ray UV emitted from each of the ultraviolet ray-emitting diodes is linear ultraviolet ray (i.e., linear light beam LB) extending in the x-direction (left-right direction), and is irradiated onto the upper substrate W2. The light irradiation surface sf of the linear light beam LB is a set of a plurality of irradiation regions τ. In this case, the illuminance of the light-irradiating surface SF (i.e., the illuminance on each of the irradiation regions τ) is the highest at the portion where the ultraviolet rays UV emitted from the respective ultraviolet-emitting diode LEDs converge most toward the Y direction. Therefore, the portion having the highest illuminance in each of the illuminating regions τ is the central portion of the optical axis of each ultraviolet ray UV that has been emitted from each of the ultraviolet ray-emitting diode LEDs, that is, the central portion of each of the irradiation regions T. Further, in the overlapping region where the ultraviolet rays UV emitted from the adjacent ultraviolet light-emitting diode LEDs overlap, the amount of light that converges in the Y direction is small, so that the illuminance is not high and is minimized. Therefore, in the linear light beam LB emitted from the ultraviolet irradiation unit 3, as shown in the ninth figure, when the arrangement interval of the ultraviolet light emitting diode LEDs along the X direction is Pd, there is a maximum 照 of illuminance. As a result, the linear beam LB is illuminating in the X direction when the arrangement interval is pd. 13 201038384 The surface SF has an illuminance not large 峰值 (peak) and a minimum 谷 (valley), and the illumination is uniform. The respective hemispherical lenses 35 and the cylindrical lens 36 of the (four) group 32 are held by the holding member 40, and the holding members 4 are attached to the circuit board 33 in the χ direction. The holding member 4 () is attached to the circuit board 33 on the lower surface 34 of the circuit board 33 which is fixed to the connecting plate 31 by bolts 34. A receiving groove 41 is recessed in the lower surface of the holding member 4G in the meandering direction, and the receiving groove 41 accommodates the cylindrical lens %. Further, the through hole 42 is formed at equal intervals in the inner bottom surface of the housing groove 41 at a position corresponding to each of the hemispherical lenses. The straight portion of the through hole 42 is smaller than the diameter of the hemispherical lens 35, and the portion of each of the hemispherical lenses 35 of the ultraviolet ray-emitting diode LEDf is placed in the through hole 42. Further, when the holding member 4 is fixed to the circuit board %, the hemispherical lens 35 is sandwiched and fixed between the holding member 4A and the ultraviolet light emitting diode LED disposed to be connected to the circuit board 33. C.) The pair of falling prevention plates 43 are disposed along the γ direction on the lower surface of the holding member 4G. The pair of fall prevention plates 43 are attached to the holding member 40 by the screw inspection when the holding member 4 is attached to the lower surface of the circuit board 33 by the bolts 34. Each of the pair of fall prevention plates 43 has an elastic locking claw 43a which is disposed to face each other with a predetermined interval therebetween. Each of the elastic latching claws 43a locks the cylindrical lens 100 accommodated in the housing groove 41 from the lower side to prevent the cylindrical lens 36 from coming off the receiving groove 41. 14 201038384 Next, the electrical structure of the ultraviolet irradiation device 1 will be described based on the eleventh diagram. In the eleventh diagram, the ultraviolet irradiation device 1 includes a control device 5 (the N control device 50 is composed of, for example, a microcomputer, and includes a central processing unit (CPU) 50a, R〇M50b for storing the control program, and a calculation result of the temporary memory CPU 50a. The RAM 50C and the input/output circuit 50d, wherein the control program is used to cause the CPU 50a to perform various processing operations, for example, to irradiate the linear beam LB to the sealing material S. The control device 50 is transmitted as an optical element driving device. The ultraviolet light emitting diode drive circuit 51 is connected to each of the ultraviolet light emitting diode LEDs of the ultraviolet light irradiation unit 3. The control device 50 outputs the light emission control signals of the respective ultraviolet light emitting diodes LED to the ultraviolet light emitting diode drive circuit 51, The light emission of each of the ultraviolet light emitting diode LEDs is controlled. The control device 50 is connected to the two gantry motors M2 that drive the pair of front and rear gantry main bodies 2a via the gantry motor drive circuit 52. The control device 50 outputs the gantry motor drive circuit 52. The drive control signals of each gantry motor M2 are used to control the driving of each gantry motor M2. 2 (gantry main body 2a), gantry motor drive circuit 52, and gantry motor M2 are examples of the first moving device of the present invention. The control device 50 is connected to the unit provided in the gantry main body 2a via the unit motor drive circuit 53. Motor M3. The control device 5 turns to the unit motor, and the drive circuit 53 rotates the drive control signal of the unit motor M3 to control the drive of the unit motor M3. The unit motor drive circuit 53 and the unit horse 15 201038384 reach M3 is the second of the present invention. An example of a mobile device. W In this example, the control device 50 transmits the front and back of the motor M3 through the unit motor drive circuit, thereby making the ultraviolet irradiation unit for the dragon's body 2a. The distance of one-half of the distance P d reciprocates along the χ direction. Therefore, the light-irradiating surface of the linear light beam lb irradiated by the m-ray irradiation unit 3 is aligned with the sealing material s of the liquid crystal display panel p, and is disposed. The distance of the interval Pd is reciprocated along the x direction. The light irradiation surface SF of the ? beam LB reciprocates in the X direction on the linear sealing material S. The control device 50 The carriage motor drive circuit 54 is connected to the bracket f up to M1. The control unit* 50 shawl motor drive circuit 54 outputs a dry Mi _ move (four) signal to (four) support (four) up to (4) drive bracket 14, bracket The motor drive circuit 54 and the carriage motor are an example of the third moving device of the present invention. I;. Further, the control device 50 is connected to the image processing device %. The liquid indicating panel p is formed with the alignment mark claws. Used to = the alignment of the board P with respect to the stage ST. The riding position mark will be taken by the registration camera CA set at 55^1^"^. Image processing device Image resource = if CA input the map material of the registration mark, according to the liquid (four) display panel? The offset is set to 5 U out of the county. The manufacturing device 5 is connected to the substrate moving device 9. The control device 5 生成 generates a substrate shift based on the offset calculated by the image processing device 55. The root axis moving device 9 makes the alignment servo A (four), the substrate γ direction or the two _ upper: = 7: toward: direction, offset. The surface is turned, It eliminates the control device 50 connected to the gantry position detection sense _

50 is based on the position from the gantry position detecting sensor 61: truss, ^ (ultraviolet illuminating unit 3) in each direction. For example, the control device 50 detects the current position with the preset position of the gantry frame (the ultraviolet irradiation unit 3) (the home position is determined by the home position). The control device 50 is connected to the carriage position detecting sensor 62 for input. The detection signal from the carriage position detecting sensor 62. The control device 5 detects each of the illuminance sensors 15 that reciprocate in the X direction together with the carriage 14 based on the detection signal from the carriage position detecting sensor 62. The position of the X direction at the time. The control device 50 is connected to the unit position detecting sensor 63, and inputs a detection signal from the unit position detecting sensor 63. The control device 50 detects the detection signal of the sensor 63 based on the unit position detecting, The position of the ultraviolet irradiation unit 3 that reciprocates in the X direction by the unit motor M3 is detected in the X direction (the relative position of the ultraviolet irradiation unit 3 in the X direction with respect to the stage ST). Next, the ultraviolet rays of the above-described configuration are described. The operation of the irradiation device 1. [Start setting] 17 201038384 When the linear sealing material S is irradiated with the linear beam LB, the linear beam must be in the width. The center line Lox (the peak position of the illuminance in the width direction) is aligned with the center line of the linear sealing material s in the width direction. Thereby, energy-efficient ultraviolet irradiation can be performed, so that power consumption can be reduced and the irradiation time can be shortened. However, the center line Lox of the linear beam LB in the width direction cannot be correctly judged visually. Therefore, in the conventional art, in order to be safe, it is necessary to lengthen the irradiation time so as to avoid an unhardened portion, so that it is difficult to consume power. Therefore, the linear light beam LB which is emitted from the ultraviolet ray irradiation unit 3 and extends in the χ direction is irradiated to the linear sealing material S which is similarly stretched in the χ direction, and it is desired to correctly grasp the planar light beam lb. At this time in the width direction, as shown in the figure, the portion of the linear beam LB = shot: SF on the line passing through the center position PO of the line width D (center line L0X) becomes the highest. For example, due to the mechanical error of the ultraviolet ray, and the mechanical error of the ray 3, the line g LB is placed at the center position Puq in the width direction. m, early shoot

Hi two good ultraviolet radiation, and then reduce the secret electric power inspection time 'and the position of the center line Lox (the center line of the linear straight beam quasi-linear sealing material S is set to p °), the center line Lox 'I have been unable to detect beforehand

The central location of Po. Hereinafter, a flow chart of the processing operation of the control device 50 18 201038384 shown in the linear beam LB of C, which is shown by the control device 50 18 201038384, will explain how to detect the position of the linear beam LB center line Lox emitted from the ultraviolet irradiation unit 3. First, the control device 50 drives the gantry motor M2 to move the gantry main body 2a from the preset starting position in the γ direction until the center position of the ultraviolet ray irradiation unit 3 provided in the gantry main body 2a in the width direction. It is the same as the center position Pwo of the detection window 11 (step S1-1). At this time, the control device 50 (CPU 50a) inputs the detection signal from the gantry position detecting sensor 61, and calculates the moving distance of each time from the start position of the gantry main body 2a (i.e., the ultraviolet irradiation unit 3). Further, the control device 50 discriminates whether or not the center position Pu of the ultraviolet irradiation unit 3 in the width-direction coincides with the center position of the detection window 11.

Pwo (Step S1-2) Further, the distance (inspection distance) from the start position to the detection window u center position Pwo is obtained in advance, and is recorded in advance in the R? M50b of the control device 50. Therefore, the control device 50 It is possible to compare the moving distance and the inspection distance to determine whether the center position Pu of the ultraviolet irradiation unit 3 吻合 matches the center position pw of the detection window 11. Further, when the center position Pwo of the detection window 11 and the center position of the ultraviolet irradiation unit 3 are Puo When there is no match (when step si-2 is NO), the control device 50 returns to step S1-1 to move the gantry main body 2a until the center position Pwo and Puo match. When the moving distance of the gantry main body 2a reaches the inspection distance (YES in step S1 - 2) 'that is, 'when the center of the ultraviolet irradiation unit 3 is only placed at the center position Pw of the Puo matching detection window η', the control device 5 stops 19 201038384 The gantry motor is from 2, S1 -3) 〇 to stop the movement of the gantry main body 2a (step setting device 50 controls the ultraviolet ray _ path 51, so that all the electroluminescent LED soot of the ultraviolet ray irradiation unit 3, and any I-line illuminating diode step S1: 4). The linear beam (3) is emitted toward the detection window 11 (stepwise, the control device 50 drives the carriage motor M1 to move the front end of the guide U to the rear end until the illuminance sensor 15 moves on the guide rail 13 On the movement trajectory of 15a, the illuminance of the light irradiation surface SF of the linear light beam LB incident through the detection window u is detected (step s = eg, the illuminance sensing H 15 is on the movement of the human perforation 15a) = position detects the illuminance of the linear beam LB (or the illuminance of the linear beam LB can also be continuously detected on the shift). In addition, the control track detects the sensing based on the 0 position before the illuminance sensor 15 reaches the other end. The detection signal of the device 62, the illuminance sensor>, and the illuminance detection signal, the bits on the movement trajectory of the incident hole 15a = the illuminance of the light irradiation surface SF of the linear light beam LB, and the RAM 50c is obtained (step S1- ό, S1-7), and again, when the illuminance sensor 15 reaches the other end (YES in step si_7), the control device 50 stops the carriage motor M1 (step S1_8) 4 times, and the control device 50 Judging whether the gantry main body 2a (ultraviolet) line unit 3 has been Center position a predetermined number of times Puo) η from the center position of the detection window Pw ', forward side in the direction (counter-Y direction side) of the jog preset (step 2 201038384 S1-9). In the case where the gantry main body 2a has not been slightly moved (NO in step S1-9), the control device 50 drives the gantry motor M2' to slightly move the gantry main body 2a toward the front side by a predetermined distance (in this embodiment, a straight line) A distance of one tenth of the line width D of the beam LB) (step S1-10). Then, the control device 50 moves to step S1-5' to invert the drive carriage motor M1 to move (reverse) the carriage 14 from the rear end of the guide rail 13 to the front end. Thereby, the illuminance sensor 15 is moved back on the guide rail 13 at a position deviated from the center position PW0 toward the front side (the reverse Y direction side) by a predetermined distance. Further, during this double shift, the illuminance sensor 15 detects the illuminance of the light irradiation surface SF of the linear light beam LB incident on the incident hole 15a via the detection window 11 at each position on the movement track of the entrance hole 15a. Further, the control device 50 obtains the illuminance at each position where the illuminance sensor 15 moves on the entrance hole 15a in the same manner as described above, and stores it in the RAM 50c (steps S1-6, S1-7). In the following, the same operation is performed until the gantry main body 2a is slightly moved forward by a predetermined number of times. Further, while the plurality of deviation positions in the front side direction alternately reciprocate the carriage 14, the illuminance of the linear light beam LB is detected along the X direction. When the jog in the front side direction is performed a predetermined number of times (YES in step S1_9), the control device 50 causes the gantry main body 2a (the center position Pu0 of the ultraviolet irradiation unit 3) to be moved from the center position Pw of the detection window 11 toward the rear side. The direction direction side is a distance that is slightly preliminarily (in the present embodiment, a distance of one tenth of the width of the linear light beam LB) (step S1 - ii). Next, the control device 50 drives the carriage motor M1 to rotate forward, so that the bracket 201038384 14 moves from the front end of the guide rail 13 to the rear end (step si_12) (in the case of the bracket 14 position 2, the rear end of the guide rail 13) 14 is repeated until the front end of the guide 13). Thereby, the illuminance sensor 15 is moved back on the guide rail 13 at a position 'from the center position Pwo toward the rear side direction (the Y-direction side) by a predetermined distance. Further, during the forward movement period, the illuminance of the light-irradiating surface SF of the linear beam lb incident on the incident hole 15a via the detection ® 11 is detected at each position on the movement locus of the incident hole 15a. Further, the control device 5 ' always moves in the incident hole 15a based on the detection signal from the carriage position detecting sensor 62 and the illuminance detecting signal from the illuminance sensor 15 before the illuminance sensor 15 reaches the other end The illuminance of the light-irradiating surface SF of the linear beam lb is obtained at each position on the track, and is stored in the RAM 5〇c (steps SM3, S1-14). When the illuminance sensor 15 reaches the other end (YES in step $1_14), the control device 50 stops the carriage motor M1 (step SM5). Next, the control device 50 determines whether or not the gantry main body 2a (the center position Puo of the ultraviolet irradiation unit 3) has been jogged from the center position pw of the detection window 11 toward the rear side (the Y direction side) by a predetermined number of times (step U). S1-16). If the predetermined number of times has not elapsed (NO in step S1-16), the handling device 50 drives the gantry motor M2' to further slightly move the gantry main body 2a toward the & side direction by a predetermined distance (step si-11). Further, the control device 50 moves to step S1-12, and the drive tray M1 is reversed to cause the carriage 14 to move back from the rear end of the guide 13 to the front end. Thereafter, the same operation is performed until the gantry main body 2a is slightly moved toward the rear 22 201038384 side by a predetermined number of times h, and the linear beam is alternately performed during the reciprocation of the carriage 14 at a plurality of deviation positions in the rear direction. The lm is detected in the mx direction. When the fine movement in the pure side direction is performed a predetermined number of times (YES in step S1_16), the control device 50 ends the detection of the illuminance of the linear light beam lb (light irradiation surface SF) having a predetermined width, and moves the gantry main 胄 2a to Start step S1-17). Ο

Next, the control device 50 obtains the illuminance distribution ID as shown in the tenth diagram of the linear light beam LB light irradiation surface SF, and obtains the position of the center line Lgx of the illuminance most * from the obtained illuminance distribution (center position ρ 〇 χStep S1-18). That is, the control device 50 determines whether or not the center line L〇x (the center position p〇 of the linear beam LB) having the highest illuminance is coincident with the center position Puo of the ultraviolet irradiation unit 3, and if not, the linear beam LB is obtained. The center position P〇 is deviated from the center position Puo of the ultraviolet irradiation unit 3. Further, the control device 5 sets the center position p〇 of the linear light beam lb obtained in step S1-18 as the new center position Pu〇 of the ultraviolet irradiation unit 3, and stores it in the RAM 5〇c (step S1-19), and End the processing of the initial setting. Therefore, the center line Lox (center position Po) having the highest illuminance of the linear light beam LB emitted from the ultraviolet irradiation unit 3 is set as the new center position puo of the ultraviolet irradiation unit 3. Therefore, the ultraviolet irradiation device 1 controls the movement of the gantry main body 2a with reference to the new center position Puo of the set ultraviolet irradiation unit 3, whereby the linear beam LB emitted from the ultraviolet rays 23 201038384 can be irradiated 7 L 3 early. The portion having the highest illuminance is always irradiated to the sealing material 8 with high precision. The control device 50 is an example of the center position setting device of the present invention. [Ultraviolet irradiation] Next, a description will be given of a processing operation in which the linear light beam LB extending from the ultraviolet irradiation unit 3 and extending in the X direction is irradiated to the straight line in accordance with the flowchart of the processing operation of the control device 50 shown in FIG. The sealing material S is cured by ultraviolet rays of the sealing material S, and is attached to the lower substrate W1 and the upper substrate W2 of the display panel P. First, the control device 50 arranges the ultraviolet irradiation unit 3 at an upper position facing the linear sealing material s formed on the liquid crystal display panel p, and the liquid crystal display panel P is placed on the stage ST and positioned. The sealing material S is formed between the lower substrate W1 and the upper substrate W2 of the liquid crystal display panel p. (Step S2-1). That is, the control device 50 drives the respective gantry motors m2 to thereby move the pair of gantry main bodies 2a at the home position in the γ direction so that the center positions of the respective ultraviolet ray irradiation units 3 provided in the main gantry bodies 仏Puo is moved between the lower substrate W1 and the upper substrate W2 until it moves to the upper position facing the corresponding linear sealing material s. When the center position Puo of each ultraviolet irradiation unit 3 faces the corresponding linear sealing material S, the control device 5 drives the ultraviolet light emitting diode driving circuit 51 to make all the ultraviolet light emitting diodes of the respective illumination modules 32. LED lighting. (Step S2-2). 24 201038384 Ultraviolet light υν emitted from all of the ultraviolet light emitting diodes is formed as a linear light beam LB extending in one direction (χ direction) through each of the hemispherical lenses 35 and the cylindrical lens 36. Each of the ultraviolet irradiation units 3 irradiates the linear light beam LB onto the liquid crystal display panel p (linear sealing material S) to cure the sealing material S. The control device 50 counts the irradiation time and irradiates the linear light beam LB to the liquid crystal display panel p (linear sealing material... preset time Ο

Between (irradiation time). (Step S2-3). In other words, the linear light beam LB extending in the X direction is irradiated at a position directly above the linear sealing material $ extending in the X direction, and the linear sealing material S extending in the x direction is hardened in a short time. At this time, 'the period before the irradiation time reaches the preset time (No in step Magic-3.) 'Control device 5〇 drive unit motor drive circuit 53 causes each unit motor Μ3 to rotate forward and backward, so that each ultraviolet irradiation unit 3 With respect to the truss 2 (and the stage ST), the predetermined ridge (the distance of the two-part interval Pd in the present embodiment) reciprocates in the χ direction. That is, each of the ultraviolet ray irradiation units 3 is reciprocally moved relative to the liquid crystal display panel P in the χ direction (step S2_4). Therefore, the position of the straight sealing material s extending in the X direction of the linear beam extending in the X direction is reciprocated along the direction. Hereinafter, the linear beam LB light irradiation surface is "scanned". This scanning is the rate of movement of the reciprocating movement of each of the ultraviolet irradiation units 3 by the preset irradiation. The speed is set to 25 201038384 as the moving rate, whereby the interval Pd can be set during the aforementioned preset irradiation time in the present embodiment. One-half of the distance is reciprocated twice. If the linear beam LB has uneven illuminance in the X direction, the reciprocating movement of the linear beam LB along the X direction is performed to reduce the unevenness of the image. That is, the linear beam LB has illuminance unevenness, and the maximum 値 and minimum 照 of the illuminance unevenness are generated at a predetermined interval (arrangement interval Pd) in the χ direction. Therefore, when the linear beam LB is not irradiated and the linear beam LB is irradiated to the sealing material S, the time to reach the preset prescribed cumulative illuminance is greatly different between the maximum illuminance position and the minimum illuminance position along the χ direction. Therefore, the linear light beam LB is scanned, and the illuminance of the linear light beam LB along the X direction is averaged on the sealing material s, whereby the time until the predetermined prescribed cumulative illuminance is reached is started along the χ direction on the sealing material 8. White,. Therefore, all the positions of the ρ(10) sealing material S provide a prescribed outer line, and the irradiation time is set based on the position on the sealing material s illuminated by the minimum (valley) illuminance. Therefore, the irradiation time (predetermined irradiation time) can be shortened. Further, ultraviolet rays can be irradiated to the sealing material s using the illuminance which has been uniformed in the direction of the crucible. Further, in the towel of the present embodiment, the ultraviolet rays of the predetermined cumulative illuminance which are preset are at all positions of the pre-S when the day ==. "The person x direction is irradiated into the sealing material W2: dense === 26 201038384 and thus fitted. Then, the control device 50 turns off all the ultraviolet light emitting diode LEDs by the ultraviolet light emitting diode = ^ > circuit 51 (step When all of the ultraviolet light emitting diode LEDs are turned off, the control device 5 determines whether or not the ultraviolet rays have been irradiated to all of the linear sealing materials S (step S2-6). If all the linear sealing materials S have not been irradiated (step S2) In the case of -6, the control device 5 sets the ultraviolet irradiation unit 〇3 to the upper position facing the new linear sealing material s of the liquid crystal display panel p (step S2-7), and returns to step S2-. 2. The same processing as described above is performed. When all of the linear sealing material S is irradiated with the linear light beam LB (YES in step S2-6), the control device 50 moves the gantry main body 2a to the home position. (Step S2-8), the ultraviolet irradiation of one liquid crystal display panel P is ended. Then, the ultraviolet irradiation of the next new liquid crystal display panel p is waited for. In some cases, the ultraviolet irradiation unit 3 is used for a long time, which causes each ultraviolet The characteristics (light-emitting ability) of the LEDs are changed, so that the ultraviolet light-emitting diodes with reduced illuminance may be present, and the uniformly distributed linear light beam LB cannot be obtained. Therefore, the illumination of each of the ultraviolet light-emitting diode LEDs is periodically checked. The inspection method will be described below. First, the control device moves the gantry main body 2a until the center position Puo of the ultraviolet irradiation unit 3 is at the center position Pwo of the detection window 11. 27 201038384 Next, the control device 50 is irradiated with ultraviolet rays. The light-emitting diode driving path 51 causes all of the ultraviolet-emitting LEDs of the ultraviolet-irradiation unit 3 to emit light, so that the linear light beam LB is emitted toward the detecting window n, and then the control device 50 causes the illuminance sensor 15 to follow the guide 13 The illuminance of the linear beam incident on the incident aperture 15a of the illuminance sensor 15 through the detection window u is detected on the movement trajectory of the entrance hole 15a. Then, the control device 50 detects the detection signal from the truss position detection sensation 62 and The illuminance detection signal from the illuminance sensor 15°,

I The illuminance at the center position in the width direction of the linear light beam LB is obtained, that is, the visibility of each of the ultraviolet diode LEDs arranged in the X direction is obtained. In this manner, the control device 50 determines the ultraviolet light emitting diode LED whose illuminance has been lowered. Further, the control device 5G judges whether or not there is an ultraviolet light-emitting diode LED which must be replaced among the ultraviolet light-emitting diodes whose illuminance has been lowered. Here, if it is not necessary to replace, the control device%

C The amount of driving voltage to be applied is such that the ultraviolet LED that has reduced illumination returns to the specified illuminance. In addition, the control device % by the external light-emitting diode driving circuit 51 supplies the obtained driving voltage to the corresponding ultraviolet light-emitting diode LED, thereby causing all the light-emitting diode LEDs to emit the same illumination. Ultraviolet light. Thereby, the bundle L B of the uniform (10) cloth can be continuously irradiated to the sealing material s. m green 7b In addition, 'check result', when there is a need for a more polar LED, the control device specifies the ultraviolet light to be replaced = 28 201038384 LED and the illumination module 32 with the ultraviolet light emitting diode LED (circuit substrate 33) ) 'And notify that it is necessary to replace. The control device % is an example of the luminous ability determining device of the present invention. Next, the advantages of the ultraviolet irradiation device 本 of the present embodiment are described below. (1) The ultraviolet irradiation device 1 causes the ultraviolet irradiation unit unit 3 to be along the gantry main body 2a (and the liquid crystal display panel p) in a state where the linear light beam LB faces the linear sealing material S extending in the X direction. The X direction reciprocates at a predetermined distance. As a result, the illuminance unevenness of the linear beam LB along the X direction can be reduced as compared with the prior art, thereby improving the uniform distribution of the cumulative illuminance irradiated to the sealing material S. - (2) The ultraviolet irradiation unit 3 reciprocates in the X direction with respect to the gantry main body 2a (and the liquid crystal display panel p) at a distance of one-half of the arrangement interval Pd of the respective ultraviolet light-emitting diodes. Therefore, the light-irradiating surface SF of the linear light beam LB reciprocates on the sealing material s of the liquid crystal display panel p in the X direction by a distance of one-half of the arrangement interval Pd. Therefore, the tens of illuminance of the linear light beam LB having the illuminance unevenness at the arrangement interval Pd in the X direction can be more averaged along the X direction of the sealing material $. As a result, the respective positions of the sealing material S can be uniformly hardened, and it is not necessary to calculate the irradiation time with the position at which the minimum illuminance is irradiated as a reference for providing the predetermined illuminance for each position of the sealing material S, so that the linear beam LB can be shortened. The irradiation time can improve production efficiency. 29 201038384 (3) The distance between the reciprocating movement of the ultraviolet irradiation unit 3 in the X direction is one-half of the arrangement interval Pd of the ultraviolet light-emitting diode LED, and the moving distance is reduced as much as possible, whereby the gantry main body 2a can be miniaturization. (4) A detection window 11 extending in the X direction is formed through the stage ST on which the liquid crystal display panel P is placed. Further, an illuminance detecting device 12 having an illuminance sensor 15 that reciprocates along the detecting window 11 is provided at a position facing the detecting window 11 on the lower side of the stage ST. Before the start of the hardening process, the ultraviolet irradiation device 1 deflects the linear light beam LB in the Y direction, and in this case, the illuminance sensor 15 reciprocates in the X direction, thereby detecting the irradiation toward the detection window 11. The illuminance 値 of the light irradiation surface SF of the linear beam LB. Further, the center position Po of the light irradiation surface SF of the linear light beam LB is obtained based on the illuminance 値 of the light irradiation surface SF, and the center position Po of the light irradiation surface SF is set to the new center position Puo of the ultraviolet irradiation unit 3. Therefore, the center position Po having the highest illuminance among the linear light beams LB emitted from the ultraviolet irradiation unit 3 is set to the new center position Puo of the ultraviolet irradiation unit 3. This setting is not performed visually, so it is performed with high precision. Therefore, the center position Po having the highest illuminance among the linear light beams emitted from the ultraviolet irradiation unit 3 can be irradiated to the sealing material S with high precision. (5) The illuminance detecting device 12 having the illuminance sensor 15 moving in the X direction is provided on the lower side of the stage ST. Therefore, when the linear light beam LB is irradiated to the sealing material S, no obstacle is formed. Therefore, it is possible to prevent the illuminance detecting device 12 from being enlarged by the 30 201038384. (6) The ultraviolet irradiation device 1 determines the light-emitting ability of each of the ultraviolet-emitting diode LEDs arranged in the X direction based on the illuminance at the center position Po of the linear beam LB extending in the X direction. Therefore, the illuminance of each of the ultraviolet light emitting diode LEDs can be evenly distributed, or the life of each of the ultraviolet light emitting diode LEDs can be judged. Further, the above embodiment may be modified as follows. In the above-described embodiment, the ultraviolet irradiation unit 3 is moved back in the X direction at a distance of one-half of the arrangement interval Pd of the respective ultraviolet light-emitting diode LEDs. However, the movement distance is not limited to the arrangement interval Pd. One of the points. The feature of "moving the light-irradiating surface of the linear beam or the substrate relatively in one direction" of the present invention is a feature not found in the prior art. For example, even if the moving distance is one third of the arrangement interval pd, the illuminance unevenness of the linear beam LB is lower than that of the prior art. Preferably, the moving distance is one-half of the configuration interval Pd. Or the moving distance may be a distance exceeding one-half of the arrangement interval Pd. In this case, when the ultraviolet irradiation unit 3 is reciprocated by an integer (two or more integers) times the distance of one-half of the arrangement interval pd, the uniform distribution of the integrated illumination of the sealing material S in the X direction can be further improved. Sex. In the above embodiment, in order to average the cumulative illuminance of the sealing material 8 in the X direction, the ultraviolet ray irradiation unit 3 is repeatedly moved twice in the X direction. It is also possible to move the ultraviolet irradiation unit 3 one or more times in the X direction. In the above embodiment, in order to average the cumulative illuminance of the sealing material S in the x direction, the ultraviolet ray irradiation unit 3 is reciprocated in the X direction. The ultraviolet irradiation unit 3 may not move back and forth, but may cause the ultraviolet irradiation unit 3 to move or re-shift. In this case, when the distance of the integral multiple of the distance of one-half of the interval Pd is moved or doubled during the preset irradiation time, the cumulative illuminance of the sealing material S in the X direction can be more averaged. . In the above embodiment, the ball screw is rotated forward and backward by the unit motor M3 of the second moving device, whereby the ultraviolet irradiation unit 3 is reciprocated in the X direction. Instead of doing so, the eccentric cam is rotated by the unit motor M3, and the ultraviolet ray irradiation unit 3 is reciprocated by the eccentric cam rotated by the motor M3. In the above embodiment, the ultraviolet irradiation unit 3 is reciprocated in the X direction with respect to the gantry main body 2a. Instead of doing so, the ultraviolet irradiation unit 3 may be fixed to the gantry main body 2a, and the gantry main body 2a may reciprocate in the x direction with respect to the stage ST (liquid crystal display panel P). Alternatively, the ultraviolet irradiation unit 3 cannot be moved in the x direction to move the stage ST in the X direction. In this case, for example, the substrate moving device 9 functions as a second moving device that relatively moves the panel P (stage ST) relative to the ultraviolet irradiation unit 3. In the above embodiment, when the illuminance sensor 15 is moved in the x direction and the illuminance of the linear beam LB light irradiation surface SF is detected, the ultraviolet irradiation unit 3 is caused to have a width of the linear beam LB along the Y direction 32 201038384 One tenth of the interval moves. However, the interval at which the ultraviolet ray irradiation unit 3 is moved in the Y direction is not limited to the interval of one tenth of the width of the linear light beam LB, and can be appropriately changed. In the above embodiment, when the illuminance sensor 15 detects the illuminance of the linear light beam LB light irradiation surface SF, the gantry main body 2a is slightly moved in the Y direction. Alternatively, the illuminance detecting device 12 provided on the lower side of the stage ST may be slightly moved in the Y direction.

In the above embodiment, two gantry main bodies 2a (two ultraviolet irradiation units 3) are provided, but the number thereof may be appropriately changed. In the above embodiment, twelve irradiation modules 32 are disposed in each of the ultraviolet irradiation units 3, but the number thereof may be appropriately changed. In the above embodiment, eight ultraviolet light emitting diode LEDs are connected to the circuit board 33 of each of the illumination modules 32, but the number thereof may be appropriately changed. In the above embodiment, the light irradiation device is embodied as an ultraviolet irradiation device. However, the light irradiation device may be applied not to the light irradiation device using the ultraviolet light emitting diode LEO but to the light irradiation device using the light emitting diode. The ultraviolet light emitting diode is led to ultraviolet light, and the latter light emitting diode emits visible light. Green; in the embodiment, the light irradiation device is specifically reduced to ultraviolet ray, ^b = ^% 峨 峨 line irradiation device - but can also be applied to::=== 33 201038384. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a perspective view of an ultraviolet irradiation device of the present embodiment. The second figure is a front view of the ultraviolet irradiation device. The third figure is an overall perspective view for explaining the stage of the ultraviolet irradiation device. The fourth figure is an overall perspective view for explaining the illuminance sensor of the ultraviolet ray irradiation device. The fifth figure is an enlarged perspective view of an important part of the illuminance sensor. Fig. 6 is a cross-sectional view showing an important part of the ultraviolet irradiation unit of the ultraviolet irradiation device. The seventh figure shows the configuration state of the illumination module. (a) and (b) of the eighth drawing are schematic views for explaining a linear light beam emitted from an ultraviolet irradiation device. The ninth diagram is an illuminance distribution diagram for explaining the illuminance unevenness of the linear beam in the line direction. The tenth diagram is an illuminance distribution diagram for explaining the illuminance distribution of the light-irradiated surface of the linear beam. Figure 11 is a block diagram showing the electrical structure of the ultraviolet irradiation device. 34 201038384 The twelfth diagram is a flow chart for explaining the processing operation of the control device used to obtain the center position of the linear beam. The thirteenth diagram is a flow chart for explaining the processing operation of the control device when the linear beam is irradiated onto the sealing material.

[Main component symbol description] 1 UV irradiation device 2 Gantry 2a Gantry main body 3 Ultraviolet irradiation unit 50 Control device 51 Ultraviolet light-emitting diode drive circuit 52 Gantry motor drive circuit 53 Unit motor drive circuit LED Ultraviolet light-emitting diode M2 Gantry motor M3 unit motor P liquid crystal display panel S sealing material ST carrier W1 lower substrate W2 upper substrate 35

Claims (1)

201038384 VII. Patent application scope: 1. A light irradiation method, which irradiates a linear beam from a light irradiation device including a plurality of optical elements arranged in one direction. The light irradiation method has the following steps: respectively, from the plurality of optical elements Irradiating the light having the long elliptical shape and irradiating the region, and superimposing the respective irradiation regions, thereby generating a linear light beam having a light irradiation surface extending in the one direction; and irradiating the light beam with the linear light beam a linear photocurable resin formed on the substrate along the one side of the surface; the linear beam is irradiated onto the linear photocurable resin; and the linear beam is irradiated onto the linear photocurability In the period of the resin, one of the light irradiation surface of the linear light beam and the substrate is relatively moved in the one direction. 2. The light irradiation method according to claim 1, wherein the relative movement includes: ???one of the light irradiation surface of the linear light beam and one of the substrates, and an arrangement interval of the plurality of optical elements One or more of the distances relatively move in the aforementioned one direction. 3. A light irradiation device comprising: a stage, a substrate on which a linear photocurable resin is formed, and a light irradiation unit including a plurality of optical elements arranged in a direction. Each of the plurality of optical elements illuminates the light having the long elliptical illumination region, and superimposes the respective irradiation regions, thereby generating a linear beam having a light irradiation surface extending along the one direction in the direction of 36 201038384; and an optical element driving device that drives the aforementioned Each of the optical elements of the light irradiation unit; the first moving means moves the light irradiation unit in a direction orthogonal to the one direction; the second moving means causes the light irradiation unit or the substrate on the stage to follow And the control device controls the first moving device such that the light-irradiating surface of the linear beam-shaped beam faces the linear photo-curable resin along the one direction, and controls the optical element driving device and In the second moving device, the light-irradiating surface of the linear beam and the substrate are One for relative movement along said one direction, while the linear beam is irradiated to the linear light-curing resin. 4. The light irradiation device of claim 3, wherein the second moving device relatively moves the light irradiation unit relative to the substrate placed on the stage along the one direction. The light-irradiating device of claim 3, wherein the second light-emitting device has one of the light-irradiating unit and the substrate on the stage disposed at intervals of the plurality of optical elements More than two-half of the distance is relatively moved along the aforementioned direction. 6. The light material arrangement of the third item of the patent application (4) further comprises: illuminance detecting the illuminance of the linear beam; and a third moving device for moving the illuminance sensor along the one direction; Controlling the first movable device to dispose the 37 201038384 light irradiation unit directly above the illuminance sensor, and controlling the optical element driving device, the illuminance sensor, and the third moving device to The illuminance sensor moves to simultaneously detect the illuminance of the linear light beam on the light irradiation surface. 7. The light irradiation device of claim 6, further comprising: a detection window formed in the stage along the one direction to allow the linear beam to penetrate; and a guiding member disposed on the stage a lower side facing the detection window to guide the movement of the illuminance sensor along the detection window; the illuminance sensor detecting the straight line incident through the detection window while moving along the guiding member The illuminance of the beam on the aforementioned light-irradiated surface. 8. The light irradiation device of claim 6, further comprising a center position setting device that determines based on the illuminance of the linear beam detected by the illuminance sensor on the light irradiation surface The center position of the linear beam in the line width direction is set as the center position of the light irradiation unit in a direction orthogonal to the one direction. 9. The light irradiation device of claim 8 further comprising a light-emitting capability determining device that moves the illuminance sensor along the one direction on a line passing through the center position of the linear beam The illuminance of the linear beam at the center position is determined, and the illuminating ability of the plurality of optical elements is determined based on the determined illuminance. The light-emitting device of claim 3, wherein the illumination unit 38 201038384 includes a plurality of circuit boards arranged along the one direction, and the plurality of optical elements are linearly arranged along the one direction. The plurality of circuit boards described above. 11. The light irradiation device of claim 3, wherein the illumination unit comprises: a plurality of hemispherical lenses respectively receiving light that has exited from one of the plurality of optical elements; and a cylindrical lens receiving the slave The light that has been emitted by the plurality of hemispherical lenses. The light-emitting device according to any one of claims 3 to 11, wherein the plurality of optical elements are ultraviolet light-emitting diodes, and the photo-curable resin is an ultraviolet curable resin. 39