CN101978308A - Light irradiation method for light irradiation device and light irradiation device - Google Patents
Light irradiation method for light irradiation device and light irradiation device Download PDFInfo
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- CN101978308A CN101978308A CN2010800012812A CN201080001281A CN101978308A CN 101978308 A CN101978308 A CN 101978308A CN 2010800012812 A CN2010800012812 A CN 2010800012812A CN 201080001281 A CN201080001281 A CN 201080001281A CN 101978308 A CN101978308 A CN 101978308A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
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Abstract
Provided is a light irradiation method for irradiating a linear light beam (LB) from a light irradiation device including a plurality of optical elements (LED) arrayed in one direction (X). The light irradiation method comprises generating a linear light beam having light irradiation faces (SF) extending in the direction (X) by irradiating a beam having an elongated elliptical irradiation area (T) from each optical element (LED) and superimposing the irradiation areas; opposing the irradiation faces (SF) of the linear light beam to a linear photo-curable resin (S) formed on a substrate (P) along the direction (X); irradiating the linear light beam onto the linear photo-curable resin (S); and relatively moving one of the irradiation face (SF) of the linear light beam and the substrate (P) in the direction (X), while the linear light beam is irradiated onto the linear photo-curable resin.
Description
Technical field
The present invention relates to the light illuminating method and the light irradiation device of light irradiation device.
Background technology
In LCDs, the device substrate that is formed with thin film transistor (TFT) with rectangular configuration is disposed with minimum interval relatively with the relative substrate that is formed with photomask and color filter etc.Then, when two plate bases are superimposed, between this two plate base and contained in the containment member region surrounded of light-cured resin and enclose liquid crystal.Then,, make described containment member solidify and two plate bases are fitted, make LCDs thus by ultraviolet ray is radiated on the containment member.
At this moment, as making the containment member ultraviolet curing come the device of bonding two plate bases can enumerate light irradiation device.As such light irradiation device, for example can use arc discharge formula metal halide lamp etc. as light source, ultraviolet ray is radiated on whole of adhesive substrates.(for example, patent documentation 1)
In addition, in recent years, when only linearity containment member irradiation ultraviolet radiation being reduced power consumption, use for adhesive substrates specification change etc. also can be easily and the light irradiation device of the ultraviolet LED that adapts in time gazed at.In the light irradiation device that has used described ultraviolet LED, a plurality of ultraviolet LEDs along a direction with predefined spacing arrangement setting.Then, the light exit side at each ultraviolet LED disposes optical systems such as packaged lens, cylindrical lens.Thus, become the light beam that the transverse section is a linearity (linearity light beam) by optical systems such as these packaged lens, cylindrical lenses and shine from the light of each ultraviolet LED outgoing to the linearity containment member.
Patent documentation 1: TOHKEMY 2006-66585 communique
, the illumination based on the luminous linearity light beam that produces of a plurality of ultraviolet LEDs all the same on all positions of described irradiation area, promptly be all mutually preferred.
Yet in light irradiation device in the past, a plurality of ultraviolet LEDs are configured to along the be separated by form at predefined interval of a direction.Therefore, use the formed linearity light beam of a plurality of ultraviolet LEDs road along the line direction alternately to produce the peak value and the valley of illumination, make described illumination also different on all positions of line direction.
Must shine containment member according to predefined regulation accumulative total illumination.In this case, as mentioned above, if Illumination Distribution is variant, when the illumination of wanting more than containment member gives regulation accumulative total illumination, owing to must be that benchmark calculates irradiation time,, thereby cause production efficiency to descend so irradiation time will be elongated with the brightness value of minimum (valley).
Summary of the invention
The present invention proposes in order to address the above problem, it is a kind of that its purpose is to provide, even the Illumination Distribution of linearity light beam is different on line direction, also can make the light illuminating method and the light irradiation device of the light irradiation device that the consistance of the linearity light beam accumulative total illumination in irradiation object zone improves.
A form of the present invention is a kind of method from the light irradiation device irradiation linearity light beam that comprises a plurality of optical elements of arranging along direction.Described method possesses following steps: by having the light of elliptical shape irradiation area and described each irradiation area is overlapping from described a plurality of optical elements irradiation respectively, generate the described linearity light beam that has along the photoirradiated surface of described direction extension; The described photoirradiated surface that makes described linearity light beam is along a described direction and the linearity light-cured resin face-off that is formed on the substrate; With described linearity light beam irradiates on described linearity light-cured resin; With described linearity light beam irradiates during on the described linearity light-cured resin, the described photoirradiated surface of described linearity light beam and a side of described substrate are relatively moved along a described direction.
Other forms of the present invention are light irradiation device.Described light irradiation device possesses: mounting table, and its mounting is formed with the substrate of linearity light-cured resin; Light irradiation unit, it comprises a plurality of optical elements of arranging along a direction, by having the light of elliptical shape irradiation area and described each irradiation area is overlapping from described a plurality of optical elements irradiation respectively, generate the linearity light beam that has along the photoirradiated surface of described direction extension; Optical element driver, it drives each optical element of described light irradiation unit; The 1st mobile device, it makes described light irradiation unit move along the direction vertical with a described direction; The 2nd mobile device, it makes the described substrate on described light irradiation unit or the described mounting table move along a described direction; And control device, it controls described the 1st mobile device, make of the light-cured resin face-off of the described photoirradiated surface of described linearity light beam along a described direction and described linearity, control described optical element driver and described the 2nd mobile device simultaneously, the described photoirradiated surface of described linearity light beam and a side of described substrate are relatively moved on one side along a described direction, Yi Bian make described linearity light beam irradiates on described linearity light-cured resin.
Based on the present invention, even the Illumination Distribution of linearity light beam under uneven situation on the line direction, also can make the homogeneity for the accumulative total illumination of the linearity light beam in irradiation object zone improve.Thus, can shorten irradiation time, thereby can enhance productivity.
Description of drawings
Fig. 1 is the skeleton view of the ultraviolet lamp of present embodiment.
Fig. 2 is the front view of above-mentioned ultraviolet lamp.
Fig. 3 is the overall perspective that is used to illustrate the mounting table of ultraviolet lamp.
Fig. 4 is the overall perspective that is used to illustrate the illuminance transducer of ultraviolet lamp.
Fig. 5 is the major part enlarged perspective of illuminance transducer.
Fig. 6 is the major part sectional view that is used to illustrate the illuminance transducer of ultraviolet irradiation unit.
Fig. 7 is the figure that shows the configuration status of illumination module.
Fig. 8 (a) is the mode chart that is used to illustrate from the linearity light beam of ultraviolet lamp outgoing (b).
Fig. 9 is the Illumination Distribution figure that is used to illustrate the line direction uneven illumination of linearity light beam.
Figure 10 is the Illumination Distribution figure that is used to illustrate the photoirradiated surface Illumination Distribution of linearity light beam.
Figure 11 is the electric circuit construction figure that is used to illustrate the electric formation of ultraviolet lamp.
Figure 12 is the process flow diagram that is used to illustrate the processing action of the control device of obtaining linearity beam center position.
Figure 13 is the process flow diagram of the processing action of the control device when being used to illustrate with the linearity light beam irradiates to containment member.
Embodiment
Below, with reference to accompanying drawing, an embodiment that light irradiation device of the present invention is embodied as the ultraviolet lamp that is used for baseplate-laminating is described.
In Fig. 1, ultraviolet lamp 1 is arranged at and does not give in the illustrated production line, and this production line is enclosed liquid crystal and made active array type LCDs P between 2 kinds of substrate W1, W2.Ultraviolet lamp 1 is used in the middle of the manufacturing process of LCDs P, makes operation between the infrabasal plate W1 of LCDs P and upper substrate W2, that solidified by the formed containment member S of ultraviolet curable resin.Ultraviolet lamp 1 possesses ultraviolet irradiation unit 3, and described ultraviolet irradiation unit 3 will generate to the ultraviolet ray of the containment member S irradiation form with linearity light beam LB.Described ultraviolet irradiation unit 3 is set on the door frame 2.In addition, ultraviolet curable resin is an example of light-cured resin, and ultraviolet irradiation unit is an example of light irradiation unit of the present invention.
As shown in Figure 1, ultraviolet lamp 1 has and is arranged on ground machine frame 5.Machine frame 5 has 4 pillar 5a around being configured in, and these 4 pillar 5a are located on the ground by upright.In addition, machine frame 5 has 4 lower frame 5b, 2 intermediate frame 5c and 2 upper booms (left upper portion framework 5d and right upper portion framework 5e).4 lower frame 5b link the bottom of the pillar 5a adjacent with its difference.A pars intermedia that links the pair of right and left pillar 5a of front side (among the figure, the reverse direction side of Y direction) among 2 intermediate frame 5c.In addition, another root among 2 intermediate frame 5c links the pars intermedia of the pair of right and left pillar 5a of rear side (among the figure, Y direction side).Left upper portion framework 5d links the upper end of the front and back pair of posts 5a in left side (among the figure, the reverse direction side of directions X).Upper end, right side framework 5e links the upper end of the front and back pair of posts 5a on right side (among the figure, the directions X side).In addition, in this manual, be [directions X], [Y direction] and [Z direction] with left and right directions, fore-and-aft direction and the above-below direction separate provision of ultraviolet lamp 1.At this, in the example of Fig. 1, fore-and-aft direction (Y direction) be upper boom 5d, 5e vertically, and left and right directions (directions X) for be erected at door frame 2 between upper boom 5d, the 5e vertically.
In machine frame 5, be provided with mounting table ST mounting LCDs P, that form by octagonal opaque plate.As Fig. 2 and shown in Figure 3, the lower surface STa of mounting table ST is configured in than described mounting table ST and more supports by the supporting bracket 7 (with reference to Fig. 2) of downside, described supporting bracket 7 is set on the tetragonal framework 6, and this quadrangle framework 6 can knee-action by the ball-screw that does not give illustrated tape guide portion with respect to lower frame 5b.
As shown in Figure 3, the middle position at mounting table ST is formed with through hole 8.Then, dispose positioning disk TB in described through hole 8, described positioning disk TB is set on the substrate mobile device 9 (with reference to Figure 11), and this substrate mobile device 9 is set on the tetragonal framework 6.Positioning disk TB is by substrate mobile device 9 can direction (directions X) and the fore-and-aft direction (Y direction) vertical with directions X move to the left and right with respect to mounting table ST.In addition, positioning disk TB can be that rotation center is rotated with the axis L of described positioning disk TB by substrate mobile device 9.
The positioning disk TB of substrate mobile device 9 will never give the next LCDs P of illustrated Handling device carrying after described positioning disk TB positions, and mounting is to mounting table ST again.In addition, substrate mobile device 9 revolves the LCDs P that is positioned on the mounting table ST and turn 90 degrees, and once more with its mounting to mounting table ST.
In addition, the form with the predetermined space of being separated by is formed with a plurality of pilot holes 10 on mounting table ST.Being configured in than tetragonal framework 6 more leans on the jacking pin (not giving diagram) of the substrate transfer device (not giving diagram) of lower position to haunt from each pilot hole 10.That is to say, under the state that each jacking pin is given prominence to from each pilot hole 10, never give the leading section that the next LCDs P of illustrated Handling device carrying is passed to each jacking pin.Because each jacking pin sinks in each pilot hole 10 under this state, LCDs P is passed on the positioning disk TB and is positioned.So after finished the location, positioning disk TB sank in the through hole 8, thus, LCDs P is arrived mounting table ST by mounting under the state that is positioned.
In addition, the both sides, front and back of the through hole on mounting table ST 8 are formed with a pair of detection window 11 that extends along left and right directions (directions X) with the form that runs through.In addition, as shown in Figure 2, at the illumination testing apparatus 12 (in Fig. 2, only showing) that the downside of mounting table ST is provided with and each detection window 11 is corresponding respectively.Illumination testing apparatus 12 is configured in the position relative with respectively corresponding detection window 11.
As shown in Figure 4, illumination testing apparatus 12 has guide rail 13, and described guide rail 13 is fixed on the tetragonal framework 6 with the form that is supported, and is set on the left and right directions (directions X) along the detection window 11 of mounting table ST.Guide rail 13 is an example of guide member of the present invention.Guide rail 13 has the spigot surface 13a that loads balladeur train 14, and described spigot surface 13a is configured to the form relative with detection window 11.Shown in Fig. 5 enlarged, balladeur train 14 can move back and forth on guide rail 13 along left and right directions (directions X).
Balladeur train 14 is connected on the carriage motor M1 (with reference to Figure 11) by being with (not giving diagram) synchronously.M1 is driven by carriage motor, and balladeur train 14 moves back and forth on guide rail 13 along directions X by synchronous band.
Upper surface at balladeur train 14 is installed with illuminance transducer 15.This illuminance transducer 15 receives the ultraviolet ray that sees through detection window 11 and detects described ultraviolet illumination from going into perforation 15a.In more detail, when directions X moved back and forth, illuminance transducer 15 received linearity light beam LB (with reference to Fig. 8) by the detection window 11 that forms along directions X, and detects the illumination of described rectilinear light beam LB at balladeur train 14.In addition, illuminance transducer 15 can be along directions X illumination of detection of straight lines shape light beam LB discretely on a plurality of positions, also can be along the directions X illumination of detection of straight lines shape light beam LB continuously.
In addition, the transverse width Dx of detection window 11 is than the big enough amounts of the live width D of linearity light beam LB, and in the present embodiment, the transverse width Dx of detection window 11 is 2 times～3 times of live width D of linearity light beam LB.
As shown in Figure 3, with through the line of the transverse width Dx center Pwo of detection window 11 center line as detection window 11.In this case, illuminance transducer 15 go into perforation 15a, become with the center line of detection window 11, be the track of center Pwo face-off along the motion track of directions X.
Between the left upper portion framework 5d and right upper portion framework 5e that are arranged on the machine frame 5, set up door frame 2.A pair of door frame main body 2a before and after door frame 2 has.The lower surface of the left part of each door frame main body 2a is by the supporting of the upper surface of left upper portion framework 5d, and the lower surface of the right part of each door frame main body 2a is supported by the upper surface of right upper portion framework 5e simultaneously.The guide rail 21 of the guide rail 21 of left upper portion framework 5d and right upper portion framework 5e is parallel to each other and extends along the Y direction.Therefore, a pair of door frame 2 in front and back that extends to directions X can move along the Y direction.
Two ends screw togather with the ball-screw (not giving diagram) that is supported on each framework 5d, the 5e with the form that can rotate about a pair of door frame main body 2a in front and back, and door frame main body 2a can move back and forth along Y direction (fore-and-aft direction) by ball screw.So by using door frame motor M2 (with reference to Figure 11) Spin Control ball-screw, front and back a pair of door frame main body 2a can move back and forth on pair of guide rails 21 along Y direction (fore-and-aft direction).In addition, though door frame 2a moves by making the ball-screw rotation, also can use linear motor that door frame main body 2a is moved.
The lower surface of each door frame main body 2a is configured to surperficial relative and parallel with the directions X form with mounting table ST.Then, as shown in Figure 6, ultraviolet irradiation unit 3 is arranged on the lower surface of each door frame main body 2a along directions X by installing component 23.That is to say that in this example, 2 ultraviolet irradiation unit 3 are set to the parallel form with a pair of door frame main body 2a.The formation of each ultraviolet irradiation unit 3 is identical.The ultraviolet irradiation unit 3 that is installed on the installing component 23 can move back and forth along door frame main body 2a and Y direction.Ultraviolet irradiation unit 3 will shine by mounting and will be fixed on the LCDs P on the mounting table ST (the containment member S between substrate W1, the W2) by be linearity light beam LB that ultraviolet ray that straight line extends forms along directions X.
Installing component 23 (ultraviolet irradiation unit 3) is by being set at the ball screw (not giving diagram) on the door frame main body 2a, being installed in along the form that directions X (left and right directions) moves back and forth on the door frame main body 2a.Therefore, come the ball-screw of Spin Control door frame main body 2a by using unit motor M3 (with reference to Figure 11), UV unit 3 can move back and forth along directions X (left and right directions) with respect to door frame main body 2a.
In the curing process of sealing framework S, ultraviolet irradiation unit 3 by mounting and be fixed on LCDs P on the mounting table ST above move back and forth along the Y direction.Then, the Y direction of ultraviolet irradiation unit 3 mobile be stopped in, on the position of the Width center Puo (with reference to Fig. 6) of ultraviolet irradiation unit 3 and the precalculated position of display screen P (being formed on linearity containment member S between substrate W1, the W2, that extend along directions X) face-off.Then, on the mobile position that is stopped of this Y direction, ultraviolet illumination module 3 moves back and forth along directions X.Then, ultraviolet irradiation unit 3 moves back and forth (scanning) in the state bottom with containment member S face-off along directions X, the ultraviolet linearity light beam LB that extend along directions X equally towards the linearity containment member S irradiation of extending along directions X on the limit, thus described containment member S is solidified.
Then, with reference to Fig. 6～Fig. 9, ultraviolet irradiation unit 3 is described.
As Fig. 6 and shown in Figure 7, ultraviolet irradiation unit 3 has web 31, and this web 31 is fixed in the lower surface of the basket 30 of installing component 23 along directions X.Lower surface at web 31 is fixed with a plurality of (being 40 in the present embodiment) illumination module 32 with the form that is in line along directions X.Each illumination module 32 has a plurality of (being 8 in the present embodiment) ultraviolet LED LED.Ultraviolet LED LED is an example of optical element.
As shown in Figure 7, each illumination module 32 has circuit board 33, with the form that is in line along directions X 8 ultraviolet LED LED is installed on described circuit board 33.The circuit board 33 of each illumination module 32 is fixed on the lower surface of web 31 by bolt 34.At this moment, the ultraviolet LED LED that is mounted is positioned at downside, and 8 ultraviolet LED LED arrange along directions X.Further, adjacent illumination module 32 is positioned as, and the ultraviolet LED LED between the adjacent circuit board 33 equally spaced is aligned to the form of linearity along directions X.
Therefore, in the present embodiment, 320 ultraviolet LED LED equally spaced are configured to linearity along directions X.
Dispose packaged lens 35 respectively being installed in downside on the circuit board 33, each ultraviolet LED LED along a straight line.Incide each packaged lens 35 from the ultraviolet ray of corresponding respectively ultraviolet LED LED outgoing.Then, each packaged lens 35 suppresses the ultraviolet diffusion of described incident, and respectively with its outgoing downwards.
With each illumination module 32 downsides corresponding configuration, 8 packaged lens 35, dispose along directions X and can block all bar-shaped cylindrical lenses 36 of 8 packaged lens 35.From each packaged lens 35 outgoing, the diffusion repressed ultraviolet ray incide the cylindrical lens 36.Described cylindrical lens 36 makes from the ultraviolet ray of each packaged lens 35 incidents and assembles to the Y direction, and makes the light outgoing that is agglomerated into elliptical shape.
In detail, shown in Fig. 8 (a) and (b), the packaged lens 35 under being configured in respectively from the diffusion of the ultraviolet (UV) of each ultraviolet LED LED outgoing suppresses.Then, only assemble and be agglomerated into elliptical shape from the ultraviolet (UV) of each packaged lens 35 outgoing by cylindrical lens 36 to the Y direction.Thus, the irradiation area T that is radiated on the upper substrate W2 from the ultraviolet (UV) of each ultraviolet LED LED outgoing becomes the oblong shape that has major axis along directions X.Then, (overlap the zone) between the long axis direction end of each irradiation area T and overlapped, form photoirradiated surface SF thus along the linearly extension of directions X.That is to say, become the linearity ultraviolet ray (being linearity light beam LB) of extending from the ultraviolet (UV) of each ultraviolet LED LED outgoing, and this linearity ultraviolet ray is irradiated onto on the upper substrate W2 along directions X (left and right directions).
The photoirradiated surface SF of linearity light beam LB is the set of a plurality of irradiation area T.In this case, in the part of assembling to the Y direction from each bar ultraviolet (UV) of each ultraviolet LED LED outgoing, the illumination of photoirradiated surface SF (that is the illumination of each irradiation area T) is for the highest.Therefore, the highest part of illumination is the optical axis center portion from each ultraviolet (UV) of each ultraviolet LED LED outgoing in each irradiation area T, i.e. the central part of each irradiation area T.In addition, since less in the light quantity of assembling to the Y direction from coincidence zone that the ultraviolet (UV) of adjacent ultraviolet LED LED outgoing overlaps respectively, be minimum so illumination is not high.
Therefore, as shown in Figure 9,, there is the maximal value of illumination along the configuration space Pd of directions X every ultraviolet LED LED from the linearity light beam LB of ultraviolet irradiation unit 3 outgoing.Its result is because in linearity light beam LB, along maximal value (peak value) and the minimum value (valley) of directions X every configuration space Pd generation illumination, so produce uneven illumination on photoirradiated surface SF.
As shown in Figure 6, each packaged lens 35 of illumination module 32 and cylindrical lens 36 are held parts 40 and keep, and described holding member 40 is installed on the circuit board 33 along directions X.When circuit board 33 was fixed on the lower surface of web 31 by bolt 34, described holding member 40 was fixed on the circuit board 33 by described bolt 34 simultaneously.
Lower surface middle position at holding member 40 is concaved with accommodating groove 41 along directions X, has taken in cylindrical lens 36 in described accommodating groove 41.
In addition, at the inner bottom surface of accommodating groove 41, with the corresponding respectively position of each packaged lens 35 on equally spaced be formed with through hole 42.The diameter of described through hole 42 is slightly smaller than the diameter of packaged lens 35, and the part of each packaged lens 35 that is configured in the lower surface of ultraviolet LED LED is embedded in the through hole 42.So if holding member 40 is fixed on the circuit board 33, packaged lens 35 will be held and be fixed on holding member 40 and be installed between the ultraviolet LED LED on the circuit board 33.
Dispose a pair of coming off at the lower surface of holding member 40 along the Y direction and prevent plate 43.When holding member 40 was fixed on the lower surface of circuit board 33 by bolt 34, described a pair of coming off prevented that plate 43 is fixed on the holding member 40 by described bolt 34 simultaneously.
A pair of coming off prevents that plate 43 has elastic card claw 43a respectively, and described elastic card claw 43a is configured to separate predetermined interval and the form that faces one another.Each elastic card claw 43a exerts pressure from downside and blocks the cylindrical lens 36 that is accommodated in the accommodating groove 41, so that cylindrical lens 36 can not come off from accommodating groove 41.
Then, with reference to Figure 11, the electric formation of ultraviolet lamp 1 is described.
In Figure 11, ultraviolet lamp 1 possesses control device 50.Control device 50 for example is made of microcomputer, and it possesses: central processing unit (CPU) 50a; ROM50b, the control programs processing action that its storage is used to make CPU50a to carry out for example linearity light beam LB to be shone on the containment member S etc., various processing actions; RAM50c, it temporarily stores result of calculation of CPU50a etc.; And imput output circuit 50d.
In this example, control device 50 makes the positive and negative rotation of unit motor M3 by unit motor drive circuit 53, makes ultraviolet irradiation unit 3 move back and forth 1/2nd the distance of ultraviolet LED LED configuration space Pd along directions X with respect to door frame main body 2a thus.Therefore, from the photoirradiated surface SF of the linearity light beam LB of ultraviolet irradiation unit 3 irradiation with the state of the containment member S face-off of LCDs P under, move back and forth 1/2nd the distance of configuration space Pd along directions X.That is to say that the photoirradiated surface SF of linearity light beam LB moves back and forth on linearity containment member S along directions X.
Further, control device 50 is connected on the image processing apparatus 55.On LCDs P, be formed with and be used for the alignment mark that display screen P positioned with respect to mounting table ST.The position cameras CA that described alignment mark is set at mounting table ST downside takes.Image processing apparatus 55 calculates the departure of LCDs P and exports control device 50 to by described view data from the view data of position cameras CA input alignment mark.
Then, the action to the ultraviolet lamp 1 that constitutes with above-mentioned form describes.
(initial setting)
When shining linearity light beam LB on the linearity containment member S, the cross central line Lox (peak on the Width of illumination) of linearity light beam LB need be sealed the horizontal center line of framework S in alignment with linearity.Thus, the ultraviolet ray irradiation of high energy efficiency can be carried out, thereby power consumption, shortening irradiation time can be reduced.
Yet, can't be correctly the centre line L ox of the Width of linearity light beam LB be judged by visual.So, in the prior art,, must consider to prolong irradiation time safely in order to prevent to produce uncured portion, make to be difficult to reduce power consumption and to be difficult to shorten irradiation time.
Therefore, make shine equally on the linearity containment member S that directions X extends from linearity light beam LB ultraviolet irradiation unit 3 outgoing, that extend along directions X in, the Width center Po that grasps linearity light beam LB exactly is for preferred.At this moment, as shown in Figure 8, in general, on line (centre line L ox) top of the center Po that passes through described live width D, the illumination of the photoirradiated surface SF of linearity light beam LB is for the highest.
Yet because the error etc. of the machinery of ultraviolet irradiation unit 3 for example, the center Po of linearity light beam LB might not be consistent with the Width center Puo of ultraviolet irradiation unit 3.
Therefore, in order to reduce power consumption, to shorten irradiation time and carry out the ultraviolet ray irradiation of high energy efficiency, need obtain the position (center Po) of the centre line L ox of linearity light beam LB, and need be with the center line of described centre line L ox in alignment with linearity containment member S.
At this, in advance to detecting by visual that can't learn, linearity light beam LB center Po.
Below, with reference to the process flow diagram of processing action shown in Figure 12, display control unit 50, the processing action of detection from the centre line L ox position of the linearity light beam LB of ultraviolet irradiation unit 3 outgoing described.
At first, control device 50 drives door frame motor M2, door frame main body 2a is moved, up to the transverse center position Puo that is set at the ultraviolet irradiation unit 3 on the door frame main body 2a and (step S1-1) till the center Pwo of detection window 11 is consistent along the Y direction from predefined reference position.At this moment, control device 50 (CPU50a) input comes from the detection signal of door frame position-detection sensor 61, and calculates the displacement under the various situations that door frame main body 2a (being ultraviolet irradiation unit 3) begins from reference position.
Then, control device 50 judge ultraviolet irradiation unit 3 Width center Puo whether with the center Pwo of detection window 11 consistent (step S1-2).In addition, the distance of 11 center Pwo from the reference position to the detection window (detecting distance) is obtained in advance, and is stored in advance among the ROM50b of control device 50.Therefore, control device 50 can judge by comparing displacement and detecting distance whether the center Puo of ultraviolet irradiation unit 3 is consistent with the center Pwo of detection window 11.
Then, when the center Puo of the center of detection window 11 Pwo and ultraviolet irradiation unit 3 is inconsistent (step S1-2 is for denying), control device 50 returns step S1-1, and door frame main body 2a is moved till center Pwo, Puo unanimity.
The displacement of door frame main body 2a reach detection apart from the time (in step S1-2 for being), be that the center Puo of ultraviolet irradiation unit 3 is when consistent with the center Pwo of detection window 11, control device 50 stops door frame motor M2, makes door frame main body 2a stop to move (step S1-3).
Then, control device 50 control ultraviolet LED driving circuits 51 make all ultraviolet LED LED of ultraviolet irradiation unit 3 luminous, and make linearity light beam LB to detection window 11 outgoing (step S1-4).
Then, control device 50 makes carriage motor M1 just change driving, and makes balladeur train 14 move (toward moving) till the rear end (step S1-5) from the front end of guided way 13.Thus, illuminance transducer 15 on the guided way 13 during moving, the illumination to the photoirradiated surface SF that incides the linearity light beam LB among the perforation 15a by detection window 11 on the motion track of going into perforation 15a detects (step S1-6).For example, illuminance transducer 15 detects (perhaps, also can be on motion track the illumination to linearity light beam LB detect) continuously to the illumination of linearity light beam LB on a plurality of positions on the motion track of going into perforation 15a.Then, control device 50 is based on from the detection signal of sledge position detecting sensor 62 with from the luminance detection signal of illuminance transducer 15, obtain illumination at the linearity light beam LB photoirradiated surface SF that goes into each position on the perforation 15a motion track, and store among the RAM50c and remove (step S1-6, S1-7), till illuminance transducer 15 arrives the other end.
When illuminance transducer 15 arrives the other ends (in step S1-7 for being), control device 50 makes carriage motor M1 stop (step S1-8).Then, control device 50 judges whether to make door frame main body 2a (the center Puo of ultraviolet irradiation unit 3) from the center Pwo of the detection window 11 little predefined stipulated number (step S1-9) that moved of side direction (the reverse direction side of Y direction) forward.Also do not make (being not) under the little mobile situation of door frame main body 2a in step S1-9, control device 50 drives door frame motor M2, and makes door frame main body 2a little (step S1-10) predefined distance (in the present embodiment for the live width D of linearity light beam LB 1/10th distance) that moves of side direction forward.Afterwards, carry out the transition to step S1-5, control device 50 makes carriage motor M1 inversion driving, and till making balladeur train 14 move to front end from the rear end of guided way 13.
Thus, from center Pwo forward side direction (the reverse direction side of Y direction) bias the position of predefined distance, illuminance transducer 15 double action on guided way 13.Then, during described double action, illuminance transducer 15 each position on the motion track of going into perforation 15a is detected the illumination that incides the linearity light beam LB photoirradiated surface SF among the perforation 15a by detection window 11.Then, control device 50 to be obtaining the illumination of each position on the motion track of going into perforation 15a of illuminance transducer 15 with above-mentioned same form, and stores among the RAM50c and remove (step S1-6,1-7).
After, carry out same action up to making door frame main body 2a forward till the little mobile stipulated number of side direction.Then, the front side to a plurality of bias position on during the reciprocating action of balladeur train 14 hocketed, the illumination of linearity light beam LB is detected along directions X.Side direction forward little move be implemented stipulated number after (in step S1-9 for being), control device 50 make door frame main body 2a (the center Puo of ultraviolet irradiation unit 3) from the center Pwo of detection window 11 to little mobile (step S1-11) the predefined distance (being the distance of linearity light beam LB width 1/10th in the present embodiment) of rear direction (Y direction side).
Then, control device 50 makes carriage motor M1 just change driving, and make balladeur train 14 from the front end of guide rail 13 toward moving till the rear end (step S1-12) (when balladeur train 14 is positioned at the rear end of guided way 13, make balladeur train 14 toward moving arrive the front end of guided way 13 till).Thus, from center Pwo to rear direction (Y direction side) bias the position of predefined distance, illuminance transducer 15 double action on guided way 13.Then, during moving, illuminance transducer 15 each position on the motion track of going into perforation 15a is detected the illumination that incides the linearity light beam LB photoirradiated surface SF among the perforation 15a by detection window 11 described.Then, control device 50 is based on from the detection signal of sledge position detecting sensor 62 with from the luminance detection signal of illuminance transducer 15, obtain the illumination of the photoirradiated surface SF each position, linearity light beam LB on the motion track of going into perforation 15a, and store among the RAM50c and remove (step S1-13, S1-14), till illuminance transducer 15 arrives the other end.
When illuminance transducer 15 arrives the other ends (in step S1-14 for being), control device 50 makes carriage motor M1 stop (step S1-15).Then, control device 50 judge whether to make door frame main body 2a (the center Puo of ultraviolet irradiation unit 3) from the center Pwo of detection window 11 to the little predefined stipulated number (step S1-16) that moved of rear direction (Y direction side).If do not reach stipulated number (being not) in step S1-16, control device 50 just drives door frame motor M2, makes door frame main body 2a further to the little predefined distance (step S1-11) that moves of rear direction.
Then, carry out the transition to step S1-12, control device 50 makes carriage motor M1 inversion driving, and till making balladeur train 14 from the rear end double action of guided way 13 to front end.
Afterwards, carry out same action up to making door frame main body 2a till the little mobile stipulated number of rear direction.Then, during the reciprocating action of balladeur train 14 on a plurality of bias position of rear direction was hocketed, the illumination of linearity light beam LB was detected along directions X.Move to rear direction little be implemented stipulated number after (in step S1-16 for being) control device 50 detection of end have the illumination of the linearity light beam LB (photoirradiated surface SF) of preset width, make door frame main body 2a move to reference position (step S1-17).
Then, control device 50 is obtained Illumination Distribution ID as shown in figure 10, linearity light beam LB photoirradiated surface SF, and obtains the position (center Po) of (step S1-18) the centre line L ox that illumination is the highest from the Illumination Distribution that this is obtained.
That is to say, control device 50 judges whether the highest centre line L ox of illumination (the center Po of linearity light beam LB) is consistent with the center Puo of ultraviolet irradiation unit 3, if inconsistent words, the center Po that obtains linearity light beam LB with respect to bias before and after the center Puo of ultraviolet irradiation unit 3 what.Then, the center Po of the linearity light beam LB that control device 50 will be obtained in step S1-18 sets as the new center Puo of ultraviolet irradiation unit 3, and stores (step S1-19) among the RAM50c into, finishes initial setting and handles action.
Therefore, the new center Puo that is used as ultraviolet irradiation unit 3 from the highest centre line L ox (center Po) of illumination of the linearity light beam LB of ultraviolet irradiation unit 3 outgoing is set.So, ultraviolet lamp 1 is by coming moving of control gate frame body 2a to the new center Puo of the described ultraviolet irradiation unit of having set 3 as benchmark, can be constantly the highest part of illumination from the linearity light beam LB of ultraviolet irradiation unit 3 outgoing be shone on the containment member S exactly.Control device 50 is an example of center of the present invention setting device.
(ultraviolet ray irradiation)
Then, with reference to as shown in Figure 13, the process flow diagram of the processing of display control unit 50 action illustrates following processing action, be about to shine on the linearity containment member S from linearity light beam LB ultraviolet irradiation unit 3 outgoing, that extend along directions X, make containment member S ultraviolet curing, and the infrabasal plate W1 of LCDs P and upper substrate W2 are fitted.
At first, control device 50 is with respect to being positioned in LCDs P on the mounting table ST, that be positioned, ultraviolet irradiation unit 3 is configured in, and is formed at the top position (step S2-1) of the infrabasal plate W1 of LCDs P and the face-off of the linearity containment member S between the upper substrate W2.
That is to say, control device 50 makes a pair of door frame main body 2a that is positioned at reference position move along the Y direction by driving each door frame motor M2, and the center Puo that is set at each ultraviolet irradiation unit 3 on each door frame main body 2a is moved to, till being formed on top position between infrabasal plate W1 and the upper substrate W2, corresponding linearity containment member S face-off respectively.
When the Puo linearity containment member S corresponding with difference in the center of each ultraviolet irradiation unit 3 stands facing each other, control device 50 drives ultraviolet LED driving circuit 51, makes whole ultraviolet LED LED luminous (step S2-2) of each illumination module 32.
Pass through each packaged lens 35 and cylindrical lens 36 from the ultraviolet (UV) of whole ultraviolet LED LED outgoing, form the linearity light beam LB that extends along a direction (directions X).Each ultraviolet irradiation unit 3 shines described linearity light beam LB on the LCDs P (linearity containment member S), thereby containment member S is solidified.
50 pairs of irradiation times of control device are carried out timing, and linearity light beam LB is shone the predefined time (irradiation time) (step S2-3) to LCDs P (linearity containment member S).That is to say, the linearity light beam LB that extends along directions X be irradiated onto equally the linearity containment member S that extends along directions X directly over the position, thereby make the linearity containment member S disposal solidifying that extends along directions X.
At this moment, in during till irradiation time reaches the predefined time (being not in step S2-3), control device 50 driver element motor drive circuits 53 drive the motor M3 rotating of each unit, and make each ultraviolet irradiation unit 3 move back and forth preset distance (in the present embodiment, for configuration space Pd 1/2nd distance) along directions X with respect to door frame 2 (and mounting table ST).That is to say, make each ultraviolet irradiation unit 3 relatively move back and forth (step S2-4) along directions X with respect to LCDs P.
Thus, linearity light beam LB (photoirradiated surface SF) position directly over the linearity containment member S that extends along directions X along directions X extends is moved back and forth along directions X.Below, the moving back and forth of photoirradiated surface SF of linearity light beam LB is called [scanning].Described scanning is carried out in described predefined irradiation time.
In addition, the speed that moves back and forth of each ultraviolet irradiation unit 3 is set in the present embodiment, can be in described predefined irradiation time the reciprocal translational speed of 1/2nd of configuration space Pd distance 2 times.
As mentioned above, because the phenomenon of uneven illumination can appear in linearity light beam LB on directions X, so carry out described linearity light beam LB moving back and forth along directions X in order to reduce described uneven illumination.That is to say, this uneven illumination below in linearity light beam LB, existing, promptly the maximal value of illumination and minimum value occur with predetermined spacing (configuration space Pd) on directions X.Therefore, if with the form that scans linearity light beam LB is not shone on the containment member S, on maximal illumination position and minimal illumination position, the time that reaches predefined regulation accumulative total illumination will be obviously different along directions X.
So LB scans with the linearity light beam, make illumination on containment member S the equalization of linearity light beam LB along directions X, make the time that reaches predefined regulation accumulative total illumination along directions X homogenization on sealing framework S thus.
Therefore, need not supply with the ultraviolet ray that regulation adds up illumination, and will be set irradiation time as benchmark by the position on the containment member S of minimum (valley) illumination irradiation for all positions to containment member S.So, can shorten irradiation time (predefined irradiation time).Further, can be with ultraviolet ray to be radiated on the sealing framework S by the illumination of homogenization on the directions X.In addition, in the present embodiment, when irradiation time reached predefined irradiation time, the ultraviolet ray of predefined regulation accumulative total illumination was irradiated on all positions of containment member S along directions X.
Therefore, when irradiation time reaches predefined irradiation time (in step S2-3 for being), containment member S is cured and makes that infrabasal plate W1 and upper substrate W2 are fitted.So control device 50 makes whole ultraviolet LED LED extinguish (step S2-5) by ultraviolet LED driving circuit 51.
After whole ultraviolet LED LED were extinguished, control device 50 judged whether to have shone ultraviolet ray (step S2-6) to all linearity containment member S.There is not (being not) under the situation of full illumination in step S2-6, control device 50 make ultraviolet irradiation unit 3 be configured in top position with the next new linearity containment member S face-off of LCDs P after (step S2-7), turn back to step S2-2, carry out processing same as described above.
When linearity light beam LB being shone on all linearity containment member S (in step S2-6 for being), control device 50 make door frame main body 2a move to reference position after (step S2-8), finish ultraviolet ray irradiation to a LCDs P.Wait for then the new LCDs P of the next one is carried out the ultraviolet ray irradiation.
(detection)
Below, described detection method is described.
At first, control device 50 moves door frame main body 2a, up to the center of ultraviolet irradiation unit 3 Puo with till the center Pwo of detection window 11 is consistent.
Then, control device 50 makes all ultraviolet LED LED of ultraviolet irradiation unit 3 luminous by ultraviolet LED driving circuit 51, and makes linearity light beam LB to detection window 11 outgoing.
Then, control device 50 makes illuminance transducer 15 past moving along guided way 13, on the motion track of going into perforation 15a the illumination of going into the linearity light beam LB among the perforation 15a that incides illumination sensor 15 by detection window 11 is detected.Then, control device 50 is based on from the detection signal of sledge position detecting sensor 62 with from the luminance detection signal of illuminance transducer 15, obtains the center of the Width of linearity light beam LB, promptly by the illumination along each ultraviolet LED LED of directions X configuration.Like this, the ultraviolet LED LED of 50 pairs of illumination declines of control device judges.
Then, control device 50 judges whether the LED that needs replacing is arranged in the ultraviolet LED LED that illumination descends.At this, under the situation that does not need to change, how many driving voltages control device 50 calculating need increase for the illumination that the ultraviolet LED LED that illumination is descended reaches regulation again.Then, control device 50 is supplied among the corresponding ultraviolet LED LED by ultraviolet LED driving circuit 51 by the driving voltage that will obtain, makes the ultraviolet ray of all ultraviolet LED LED outgoing equal illuminations.
Thus, can be on containment member S with the uniform linearity light beam of illumination LB prolonged exposure.
In addition, according to testing result, when occurring needing the ultraviolet LED LED of replacing, control device is specified the ultraviolet LED LED that changes and is provided with the illumination module 32 (circuit board 33) of this ultraviolet LED LED, and reports the necessity of replacing.Control device 50 is an example of luminous power judgment means of the present invention.
Below, the advantage of the ultraviolet lamp 1 of present embodiment is as follows.
(1) ultraviolet lamp 1 makes ultraviolet irradiation unit 3 move back and forth preset distance with respect to door frame main body 2a (and LCDs P) along directions X under the state that linearity light beam LB and the linearity containment member S that extends along directions X are stood facing each other.Its result compares with conventional art, makes along the uneven illumination of the linearity light beam LB of directions X to reduce, thereby can improve the homogeneity of the accumulative total illumination that is irradiated onto on the containment member S.
(2) ultraviolet irradiation unit 3 moves back and forth 1/2nd the distance of each ultraviolet LED LED configuration space Pd along directions X with respect to door frame main body 2a (and LCDs P).Therefore, the photoirradiated surface SF of linearity light beam LB moves back and forth 1/2nd the distance of configuration space Pd on the containment member S of LCDs P along directions X.
Therefore, can make along directions X and have the accumulative total illumination of linearity light beam LB of uneven illumination every configuration space Pd along the directions X of containment member S equalization more.
Its result, because each position of containment member S is evenly solidified, and bestow regulation accumulative total illumination to each position of containment member S, so irradiation time need be with the position of minimal illumination irradiation as benchmark, thereby can shorten the irradiation time of linearity light beam LB, and can enhance productivity.
(3) with move back and forth 1/2nd the distance that distance be made as ultraviolet LED LED configuration space Pd of ultraviolet irradiation unit 3, minimize, can make door frame main body 2a miniaturization by making described displacement along directions X.
(4) on the mounting table ST of mounting LCDs P, be formed with the detection window 11 that extends along directions X with the form that runs through.Further, the downside of mounting table ST and the position relative with detection window 11 are provided with illumination testing apparatus 12, and described illumination testing apparatus 12 has the illuminance transducer 15 that moves back and forth along detection window 11.Before beginning to be cured operation, ultraviolet lamp 1 makes linearity light beam LB along Y direction bias, and illuminance transducer 15 is moved back and forth along directions X, detect brightness value thus to the linearity light beam LB photoirradiated surface SF of detection window 11 irradiations.Then, obtain the center Po of linearity light beam LB photoirradiated surface SF, the center Po of described photoirradiated surface SF is set as the new center Puo of ultraviolet irradiation unit 3 by the brightness value of photoirradiated surface SF.
Therefore, from the linearity light beam LB of ultraviolet irradiation unit 3 outgoing, the new center Puo that the center Po that illumination is the highest is used as ultraviolet irradiation unit 3 sets.Described setting is owing to not undertaken by visual, so can carry out this setting accurately.Therefore, can be constantly the highest center Po of illumination from the linearity light beam LB of ultraviolet irradiation unit 3 outgoing be shone on the containment member S exactly.
(5) illumination testing apparatus 12 is set at the downside of mounting table ST, and it has the illuminance transducer 15 that moves along directions X.Therefore, in containment member S irradiation linearity light beam LB, can not be affected, can prevent to make the whole maximization of device because of possessing illumination testing apparatus 12.
(6) ultraviolet lamp 1 is by the illumination of the center Po of the linearity light beam LB that extends along directions X, judges the luminous power of each ultraviolet LED LED that arranges along directions X.Therefore, can make the illumination of each ultraviolet LED LED even, and can have or not the life-span to judge each ultraviolet LED LED.
In addition, above-mentioned embodiment also can change to following form.
Though in the above-described embodiment, make ultraviolet irradiation unit 3 move back and forth 1/2nd the distance of each ultraviolet LED LED configuration space Pd along directions X, described displacement is not limited in 1/2nd of configuration space Pd.[photoirradiated surface of linearity light beam or substrate are relatively moved along a direction] of the present invention be characterized as the unexistent feature of conventional art.For example, even displacement is 1/3rd of configuration space Pd, compares with conventional art and also can reduce the uneven illumination of linearity light beam LB.Preferably, displacement is 1/2nd of configuration space Pd.Perhaps, displacement also can be for exceeding 1/2nd the distance of configuration space Pd.In this case, if make ultraviolet irradiation unit 3 move back and forth configuration space Pd 1/2nd distance integer (integers more than 2) doubly, the homogeneity of accumulative total illumination of the directions X of containment member S is further improved.
In the above-described embodiment, the accumulative total illumination equalization for the directions X that makes containment member S makes ultraviolet irradiation unit 3 move back and forth 2 times along directions X.Ultraviolet irradiation unit 3 is moved back and forth more than 1 time or 3 times along directions X.
In the above-described embodiment, for the accumulative total illumination equalization of the directions X that makes containment member S, ultraviolet irradiation unit 3 is moved back and forth along directions X.Ultraviolet irradiation unit 3 is moved back and forth, and any one move mode in its moving in the past or double action is moved.In this case, when the distances that make ultraviolet irradiation unit 3 toward moving or double action according to predefined irradiation time are the integral multiple of 1/2nd distance of configuration space Pd, just can make the accumulative total illumination equalization more of the directions X of containment member S.
In the above-described embodiment, make the positive and negative rotation of ball-screw, and ultraviolet irradiation unit 3 is moved back and forth along directions X by unit motor M3 by the 2nd mobile device.Also can use unit motor M3 to make the offset cam rotation,, replace aforesaid way by ultraviolet irradiation unit 3 being moved back and forth by the offset cam of described motor M3 driven in rotation.
In the above-described embodiment, ultraviolet irradiation unit 3 is moved back and forth along directions X with respect to door frame main body 2a.Also ultraviolet irradiation unit 3 can be fixed on the door frame main body 2a, and this door frame main body 2a be moved back and forth along directions X with respect to mounting table ST (LCDs P) replace above-mentioned form.Perhaps, also ultraviolet irradiation unit 3 can be made as the form that can not move along directions X, and mounting table ST is made as the form that can move along directions X.In this case, for example substrate mobile device 9 plays the effect that makes the 2nd mobile device that display screen P (mounting table ST) relatively moves with respect to ultraviolet irradiation unit 3.
In the above-described embodiment, making illuminance transducer 15 when directions X moves the illumination of detection of straight lines shape light beam LB photoirradiated surface SF, make ultraviolet irradiation unit 3 move the interval of linearity light beam LB width 1/10th along the Y direction.Yet, make ultraviolet irradiation unit 3 be not limited in 1/10th of linearity light beam LB width along the interval that the Y direction moves, also can do suitable change.
In the above-described embodiment, when passing through the illumination of illuminance transducer 15 detection of straight lines shape light beam LB photoirradiated surface SF, door frame main body 2a is moved along the Y direction is little.Also can make the illumination testing apparatus 12 of the downside that is arranged on mounting table ST replace aforesaid way along little the moving of Y direction.
Though in the above-described embodiment, be provided with 2 door frame main body 2a (2 ultraviolet irradiation unit 3), also can suitably change its quantity.
Though in the above-described embodiment, on each ultraviolet irradiation unit 3, dispose 12 illumination modules 32, also can suitably change its quantity.
Though in the above-described embodiment, 8 ultraviolet LED LED have been installed on the circuit board 33 of each illumination module, also can have suitably changed its quantity.
Though in the above-described embodiment, specialize for ultraviolet lamp, except the ultraviolet LED LED of irradiation ultraviolet radiation, also can be applied on the light irradiation device of the light emitting diode that has used the outgoing visible light as light irradiation device.
Though in the above-described embodiment, be embodied as the ultraviolet lamp 1 that infrabasal plate W1 and upper substrate W2 containment member S that fit, that formed by ultraviolet curable resin is cured to being used to, also can be applied in the light irradiation device that is used for handling other substrates.
Claims (12)
1. method from the light irradiation device irradiation linearity light beam that comprises a plurality of optical elements of arranging along direction,
Described method possesses following steps:
By having the light of elliptical shape irradiation area and described each irradiation area is overlapping from described a plurality of optical elements irradiation respectively, generate the described linearity light beam that has along the photoirradiated surface of described direction extension;
The described photoirradiated surface that makes described linearity light beam is along a described direction and the linearity light-cured resin face-off that is formed on the substrate;
With described linearity light beam irradiates on described linearity light-cured resin;
With described linearity light beam irradiates during on the described linearity light-cured resin, the described photoirradiated surface of described linearity light beam and a side of described substrate are relatively moved along a described direction.
2. method according to claim 1, wherein,
The described step that relatively moves comprises: a side who makes the described photoirradiated surface of described linearity light beam and described substrate is along the relatively move distance more than 1/2nd of configuration space of described a plurality of optical elements of a described direction.
3. light irradiation device possesses:
Mounting table, its mounting is formed with the substrate of linearity light-cured resin;
Light irradiation unit, it comprises a plurality of optical elements of arranging along a direction, by having the light of elliptical shape irradiation area and described each irradiation area is overlapping from described a plurality of optical elements irradiation respectively, generate the linearity light beam that has along the photoirradiated surface of described direction extension;
Optical element driver, it drives each optical element of described light irradiation unit;
The 1st mobile device, it makes described light irradiation unit move along the direction vertical with a described direction;
The 2nd mobile device, it makes the described substrate on described light irradiation unit or the described mounting table move along a described direction; With
Control device, it controls described the 1st mobile device, make of the light-cured resin face-off of the described photoirradiated surface of described linearity light beam along a described direction and described linearity, and control described optical element driver and described the 2nd mobile device, the described photoirradiated surface of described linearity light beam and a side of described substrate are relatively moved on one side along a described direction, Yi Bian make described linearity light beam irradiates on described linearity light-cured resin.
4. light irradiation device according to claim 3, wherein,
Described the 2nd mobile device makes described light irradiation unit and relatively moves along a described direction with respect to the described substrate that is positioned on the described mounting table.
5. light irradiation device according to claim 3, wherein,
The side that described the 2nd mobile device makes the described substrate on described light irradiation unit and the described mounting table is along the relatively move distance more than 1/2nd of configuration space of described a plurality of optical elements of a described direction.
6. light irradiation device according to claim 3 further possesses:
Illuminance transducer, it detects the illumination of described linearity light beam; With
The 3rd mobile device, it makes described illuminance transducer move along a described direction,
Described control device is controlled described the 1st mobile device, with described light irradiation unit be configured in described illuminance transducer directly over the position, and control described optical element driver, described illuminance transducer and described the 3rd mobile device, while make described illuminance transducer move the illumination of the described photoirradiated surface that detects described linearity light beam.
7. light irradiation device according to claim 6 further possesses:
Detection window, described detection window so that the form that described linearity light beam sees through be formed in the described mounting table along a described direction; With
Guide member, described guide member is configured in described mounting table downside with the form relative with described detection window, and along the mobile channeling conduct of described detection window to described illuminance transducer,
Described illuminance transducer is during moving along described guide member, and detection is by the illumination of the described photoirradiated surface of the described linearity light beam of described detection window incident.
8. light irradiation device according to claim 6,
Further possesses the center setting device, described center setting device is based on the center of being judged the live width direction of described linearity light beam by the illumination of the photoirradiated surface of detected, the described linearity light beam of described illuminance transducer, and the center of described linearity light beam is set as the center on described light irradiation unit, vertical with the described direction direction.
9. light irradiation device according to claim 8,
Further possesses the luminous power judgment means, it moves described illuminance transducer along a described direction on the circuit of the described center of the described linearity light beam of process, illumination to the described center of described linearity light beam is judged, and is judged the luminous power of described a plurality of optical elements based on the illumination that this is judged.
10. light irradiation device according to claim 3, wherein,
Described light irradiation unit comprises along described direction arranges a plurality of circuit boards that are provided with, described a plurality of optical elements along a described direction linearity be installed on described a plurality of circuit board.
11. light irradiation device according to claim 3, wherein,
Described light irradiation unit comprises:
A plurality of packaged lens, a plurality of packaged lens receive the light of an outgoing from described a plurality of optical elements separately; With
Cylindrical lens, it receives the light from described a plurality of packaged lens outgoing.
12. according to any described light irradiation device in the claim 3～11, wherein,
Described a plurality of optical element is a ultraviolet LED, and described light-cured resin is a uv curing resin.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
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| JP2009110135 | 2009-04-28 | ||
| JP2009110136 | 2009-04-28 | ||
| JP2009-110136 | 2009-04-28 | ||
| JP2009-110135 | 2009-04-28 | ||
| PCT/JP2010/051013 WO2010125836A1 (en) | 2009-04-28 | 2010-01-27 | Light irradiation method for light irradiation device and light irradiation device |
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| CN101978308A true CN101978308A (en) | 2011-02-16 |
| CN101978308B CN101978308B (en) | 2012-09-19 |
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| JP (1) | JP5230875B2 (en) |
| KR (1) | KR101240367B1 (en) |
| CN (1) | CN101978308B (en) |
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2010
- 2010-01-27 CN CN2010800012812A patent/CN101978308B/en not_active Expired - Fee Related
- 2010-01-27 WO PCT/JP2010/051013 patent/WO2010125836A1/en active Application Filing
- 2010-01-27 JP JP2010523222A patent/JP5230875B2/en not_active Expired - Fee Related
- 2010-01-27 KR KR1020107022207A patent/KR101240367B1/en active IP Right Grant
- 2010-02-23 TW TW099105211A patent/TWI402152B/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013067715A1 (en) * | 2011-11-09 | 2013-05-16 | 深圳市华星光电技术有限公司 | Method for detecting uv irradiance of multilayer uv oven during tft-lcd process and combined substrate-retrieving device for implementing the method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201038384A (en) | 2010-11-01 |
| JPWO2010125836A1 (en) | 2012-10-25 |
| CN101978308B (en) | 2012-09-19 |
| KR20100132024A (en) | 2010-12-16 |
| JP5230875B2 (en) | 2013-07-10 |
| KR101240367B1 (en) | 2013-03-11 |
| WO2010125836A1 (en) | 2010-11-04 |
| TWI402152B (en) | 2013-07-21 |
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