JP5771776B2 - UV irradiation equipment - Google Patents

UV irradiation equipment Download PDF

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JP5771776B2
JP5771776B2 JP2010284807A JP2010284807A JP5771776B2 JP 5771776 B2 JP5771776 B2 JP 5771776B2 JP 2010284807 A JP2010284807 A JP 2010284807A JP 2010284807 A JP2010284807 A JP 2010284807A JP 5771776 B2 JP5771776 B2 JP 5771776B2
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led modules
ultraviolet rays
ultraviolet
diffraction grating
optical element
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JP2012134308A (en
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田中 隆
隆 田中
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Panasonic Intellectual Property Management Co Ltd
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Description

本発明は、予め決められた照射対象に紫外線を照射する紫外線照射装置に関する。   The present invention relates to an ultraviolet irradiation device that irradiates a predetermined irradiation target with ultraviolet rays.

従来、ライン状の光を照射対象に照射する照射装置として、特許文献1には、複数の発光ダイオードが一列に並んで配置され、複数の発光ダイオードから放射された光の放射方向に2つの回折格子が形成された装置が開示されている。特許文献1に記載された照射装置では、2つの回折格子の一方が透明基材の表面に形成され、他方が透明基材の裏面に形成されている。特許文献1に記載された照明装置は、各発光ダイオードから放射された光を回折格子でライン方向に拡散させることによって、照射対象においてライン方向の照度分布を均一にすることができる。   Conventionally, as an irradiation device that irradiates an irradiation target with line-shaped light, Patent Document 1 discloses that a plurality of light-emitting diodes are arranged in a line and two diffraction directions are emitted in the radiation direction of light emitted from the plurality of light-emitting diodes. An apparatus in which a grid is formed is disclosed. In the irradiation apparatus described in Patent Document 1, one of the two diffraction gratings is formed on the surface of the transparent substrate, and the other is formed on the back surface of the transparent substrate. The illuminating device described in Patent Document 1 can make the illuminance distribution in the line direction uniform in the irradiation target by diffusing the light emitted from each light emitting diode in the line direction with a diffraction grating.

特許第3659770号公報Japanese Patent No. 3659770

しかしながら、特許文献1に記載された照射装置には、ライン方向と直交する幅方向の配光を規定していないという問題があった。   However, the irradiation apparatus described in Patent Document 1 has a problem that light distribution in the width direction orthogonal to the line direction is not defined.

本発明は上記の点に鑑みて為され、本発明の目的は、回折光学素子の両面に回折格子パターンが形成された構造で、照射対象にライン状に照射される紫外線の幅方向の配光を精度よく制御することができる紫外線照射装置を提供することにある。   The present invention has been made in view of the above points, and an object of the present invention is a structure in which a diffraction grating pattern is formed on both surfaces of a diffractive optical element, and light distribution in the width direction of ultraviolet rays irradiated to the irradiation target in a line shape. An object of the present invention is to provide an ultraviolet irradiation device capable of controlling the temperature accurately.

本発明の紫外線照射装置は、予め決められた照射対象に紫外線を照射する紫外線照射装置であって、一列に並んで配置され、各々に設けられたLEDが電流供給されると前記紫外線を放射する複数のLEDモジュールと、前記複数のLEDモジュールに対して当該複数のLEDモジュールから放射された前記紫外線の放射方向に設けられ、当該紫外線を回折する回折光学素子とを備え、前記回折光学素子は、前記照射対象に照射される前記紫外線が前記複数のLEDモジュールが並んでいる方向に細長くライン状になるように、前記複数のLEDモジュールから放射された前記紫外線の入射面および出射面の各面に、当該紫外線の放射方向と直交する断面において当該紫外線の幅を一定にする回折格子パターンが形成されており、前記回折格子パターンは、前記複数のLEDモジュールが並んでいる方向に沿って複数の溝が形成され、前記複数のLEDモジュールが並んでいる方向において、断面形状が同じであることを特徴とする。 The ultraviolet irradiation apparatus of the present invention is an ultraviolet irradiation apparatus that irradiates a predetermined irradiation target with ultraviolet rays, and is arranged in a line, and emits the ultraviolet rays when an LED provided in each is supplied with current. A plurality of LED modules; and a diffractive optical element that is provided in a radiation direction of the ultraviolet rays emitted from the plurality of LED modules with respect to the plurality of LED modules, and that diffracts the ultraviolet rays. The ultraviolet rays emitted from the plurality of LED modules are applied to each surface of the incident surface and the emission surface so that the ultraviolet rays applied to the irradiation target are elongated in a line shape in the direction in which the plurality of LED modules are arranged. in a cross section perpendicular to the radial direction of the ultraviolet and the diffraction grating pattern to the width of the ultraviolet light constant is formed, the diffraction grating Pattern, the plurality of along the direction in which the LED module are arranged a plurality of grooves are formed in a direction are arranged a plurality of LED modules, and wherein the cross-sectional shape is the same.

この紫外線照射装置において、前記複数のLEDモジュールは、当該複数のLEDモジュールが並んでいる方向において、2以上の前記LEDモジュールから放射された前記紫外線の少なくとも一部を重ね合わせて前記照射対象に照射するように配置されていることが好ましい。   In the ultraviolet irradiation apparatus, the plurality of LED modules irradiate the irradiation target by superimposing at least a part of the ultraviolet rays emitted from two or more LED modules in a direction in which the plurality of LED modules are arranged. It is preferable that they are arranged.

本発明によれば、回折光学素子の入射面および出射面に形成された2つの回折格子パターンを用いて、照射対象にライン状に照射される紫外線の幅方向の配光を精度よく制御することができる。   According to the present invention, by using two diffraction grating patterns formed on the incident surface and the exit surface of the diffractive optical element, it is possible to accurately control the light distribution in the width direction of the ultraviolet rays irradiated to the irradiation target in a line shape. Can do.

実施形態1に係る紫外線照射装置の要部を示す概略図である。It is the schematic which shows the principal part of the ultraviolet irradiation device which concerns on Embodiment 1. FIG. 同上に係る紫外線照射装置の電気的な構成を示すブロック図である。It is a block diagram which shows the electrical structure of the ultraviolet irradiation device which concerns on the same as the above. 同上に係る紫外線照射装置に用いられる回折光学素子を説明する説明図である。It is explanatory drawing explaining the diffractive optical element used for the ultraviolet irradiation device which concerns on the same as the above. 同上に係る紫外線照射装置に用いられる回折光学素子であって、(a)は出射面の回折格子パターンを示す部分拡大図、(b)は入射面の回折格子パターンを示す部分拡大図である。It is a diffractive optical element used for the ultraviolet irradiation device which concerns on the same as the above, Comprising: (a) is the elements on larger scale which show the diffraction grating pattern of an output surface, (b) is the elements on larger scale which show the diffraction grating pattern of an entrance plane. 1個当たりのLEDモジュールから放射された紫外線について、(a)は幅方向の強度分布を示す特性図、(b)はライン方向の強度分布を示す特性図である。(A) is a characteristic diagram which shows the intensity distribution of the width direction, (b) is a characteristic diagram which shows the intensity distribution of a line direction about the ultraviolet-ray radiated | emitted from the LED module per unit. 1個のLEDモジュールから放射された紫外線の配光を示す概略図である。It is the schematic which shows the light distribution of the ultraviolet-ray radiated | emitted from one LED module. 実施形態2に係る紫外線照射装置に用いられる回折光学素子の要部であって、(a)は出射面の回折格子パターンを示す部分拡大図、(b)は入射面の回折格子パターンを示す部分拡大図である。FIG. 4 is a main part of a diffractive optical element used in an ultraviolet irradiation apparatus according to Embodiment 2, wherein (a) is a partially enlarged view showing a diffraction grating pattern on an exit surface, and (b) is a portion showing a diffraction grating pattern on an entrance surface. It is an enlarged view. 同上に係る紫外線照射装置において紫外線の回折について説明する説明図である。It is explanatory drawing explaining the diffraction of an ultraviolet-ray in the ultraviolet irradiation device which concerns on the same as the above.

以下の実施形態1,2では、予め決められた照射対象に紫外線を照射する紫外線照射装置について説明する。   In the following first and second embodiments, an ultraviolet irradiation apparatus that irradiates a predetermined irradiation target with ultraviolet rays will be described.

(実施形態1)
実施形態1に係る紫外線照射装置は、図2に示すように、紫外線を外部に放射する複数のLEDモジュール1と、各LEDモジュール1に直流電力を供給する直流電源2と、直流電源2を制御して各LEDモジュール1への供給電力を制御する制御部3とを備えている。また、本実施形態の紫外線照射装置は、図1に示すように、各々がLEDモジュール1から放射された紫外線を回折する複数の回折光学素子(Diffractive Optical Element:DOE)4をさらに備えている。本実施形態の紫外線照射装置は、予め決められた照射対象5に紫外線を照射する。
(Embodiment 1)
As shown in FIG. 2, the ultraviolet irradiation device according to the first embodiment controls a plurality of LED modules 1 that radiate ultraviolet rays to the outside, a DC power source 2 that supplies DC power to each LED module 1, and the DC power source 2. And the control part 3 which controls the electric power supplied to each LED module 1 is provided. Further, as shown in FIG. 1, the ultraviolet irradiation device of the present embodiment further includes a plurality of diffractive optical elements (DOE) 4 that each diffract ultraviolet rays emitted from the LED module 1. The ultraviolet irradiation device of this embodiment irradiates ultraviolet rays to a predetermined irradiation object 5.

複数のLEDモジュール1は、図1のX軸方向に一列に並んで配置されている。図示しないが、各LEDモジュール1は、LEDチップと、上記LEDチップが収納される基台とを備えている。上記LEDチップは、直流電源2(図2参照)から電流が供給されると、照射対象5に向けて紫外線を放射する。なお、各LEDモジュール1は、1個のLEDチップのみを備えていてもよいし、複数個のLEDチップを備えていてもよい。   The plurality of LED modules 1 are arranged in a line in the X-axis direction of FIG. Although not shown, each LED module 1 includes an LED chip and a base on which the LED chip is stored. The LED chip emits ultraviolet rays toward the irradiation target 5 when a current is supplied from the DC power supply 2 (see FIG. 2). Each LED module 1 may include only one LED chip, or may include a plurality of LED chips.

図2に示す直流電源2は、例えばAC−DCコンバータなどを備え、交流電源6から交流電力を受け取り、受け取った交流電力を直流電力に変換する。この直流電力は、制御部3による制御に基づいて直流電源2から各LEDモジュール1に供給される。つまり、直流電源2から各LEDモジュール1のLEDチップに電流が流れる。   The DC power source 2 shown in FIG. 2 includes, for example, an AC-DC converter, receives AC power from the AC power source 6, and converts the received AC power into DC power. This DC power is supplied from the DC power supply 2 to each LED module 1 based on control by the control unit 3. That is, a current flows from the DC power source 2 to the LED chip of each LED module 1.

制御部3は、例えばマイクロコンピュータなどで構成され、PWM(Pulse Width Modulation)制御によって、直流電源2から各LEDモジュール1に供給される直流電力を制御する。   The control unit 3 is composed of, for example, a microcomputer and controls DC power supplied from the DC power supply 2 to each LED module 1 by PWM (Pulse Width Modulation) control.

図1に示す各回折光学素子4は、LEDモジュール1に対して紫外線の放射方向(図1のZ軸方向)に設けられ、LEDモジュール1から放射された紫外線を回折する。回折光学素子4の材料としては、主としてガラス材料、代表的なものとして合成石英ガラスやホウケイ酸クラウン光学ガラスなどがあり、用途などに応じて種々選択することができる。   Each diffractive optical element 4 shown in FIG. 1 is provided in the radiation direction of ultraviolet rays (Z-axis direction in FIG. 1) with respect to the LED module 1 and diffracts ultraviolet rays emitted from the LED module 1. The material of the diffractive optical element 4 is mainly a glass material, and representative examples include synthetic quartz glass and borosilicate crown optical glass, and various materials can be selected depending on the application.

各回折光学素子4は、図3に示すように、紫外線の入射面41および出射面42の両面に回折格子パターンが形成されている。各回折格子パターンは、複数のLEDモジュール1が並んでいる方向と直交する方向(図3のY軸方向)の配光を制御して回折後の紫外線が帯状の紫外線71,72になるように入射面41および出射面42に形成されている。回折光学素子4で回折された紫外線は、複数のLEDモジュール1が並んでいる方向(図3のX軸方向)に細長いライン状の紫外線73となって、出射面42から照射対象5に出射される。つまり、各回折格子パターンは、照射対象5に照射される紫外線が複数のLEDモジュール1が並んでいる方向に細長くライン状になるように、紫外線の放射方向(図3のZ軸方向)と直交する断面において上記紫外線の幅(図3のY軸方向の長さ)を一定にするように入射面41および出射面42に形成されている。   As shown in FIG. 3, each diffractive optical element 4 has a diffraction grating pattern formed on both the incident surface 41 and the exit surface 42 of ultraviolet rays. Each diffraction grating pattern controls the light distribution in the direction orthogonal to the direction in which the plurality of LED modules 1 are arranged (the Y-axis direction in FIG. 3) so that the diffracted ultraviolet rays become band-like ultraviolet rays 71 and 72. It is formed on the entrance surface 41 and the exit surface 42. The ultraviolet light diffracted by the diffractive optical element 4 becomes a line-shaped ultraviolet light 73 elongated in the direction in which the plurality of LED modules 1 are arranged (the X-axis direction in FIG. 3), and is emitted from the emission surface 42 to the irradiation target 5. The That is, each diffraction grating pattern is orthogonal to the ultraviolet radiation direction (Z-axis direction in FIG. 3) so that the ultraviolet rays irradiated to the irradiation target 5 are elongated and lined in the direction in which the plurality of LED modules 1 are arranged. The incident surface 41 and the output surface 42 are formed so that the width of the ultraviolet rays (the length in the Y-axis direction in FIG. 3) is constant in the cross section.

ところで、各回折光学素子4の入射面41および出射面42には、図4に示すように、回折格子パターンとして、それぞれ、複数のLEDモジュール1が並んでいる方向(図4のX軸方向)に沿って複数の溝43,44が形成されている。つまり、入射面41に形成された回折格子パターンは、複数のLEDモジュール1が並んでいる方向において、断面形状が同じである。同様に、出射面42に形成された回折格子パターンは、複数のLEDモジュール1が並んでいる方向において、断面形状が同じである。   By the way, as shown in FIG. 4, on the incident surface 41 and the emission surface 42 of each diffractive optical element 4, a direction in which a plurality of LED modules 1 are arranged as a diffraction grating pattern (X-axis direction in FIG. 4). A plurality of grooves 43 and 44 are formed along the line. That is, the diffraction grating pattern formed on the incident surface 41 has the same cross-sectional shape in the direction in which the plurality of LED modules 1 are arranged. Similarly, the diffraction grating pattern formed on the emission surface 42 has the same cross-sectional shape in the direction in which the plurality of LED modules 1 are arranged.

上記のような回折格子パターンが回折光学素子4の入射面41および出射面42に形成されていることによって、各LEDモジュール1から放射された紫外線は、幅方向(図1のY軸方向)においては図5(a)に示すように急峻に立ち上がるように配光制御される。一方、複数のLEDモジュール1が並んでいる方向(図1のX軸方向)においては配光制御されない(図5(b)参照)。   Since the diffraction grating pattern as described above is formed on the entrance surface 41 and the exit surface 42 of the diffractive optical element 4, the ultraviolet rays emitted from each LED module 1 are in the width direction (Y-axis direction in FIG. 1). As shown in FIG. 5A, the light distribution is controlled so as to rise sharply. On the other hand, light distribution is not controlled in the direction in which the plurality of LED modules 1 are arranged (X-axis direction in FIG. 1) (see FIG. 5B).

したがって、LEDモジュール1が1個である場合、図6に示すように細長く配光された紫外線が照射対象5に照射される。LEDモジュール1が複数個である場合、図1に示すようなライン状の紫外線が照射対象5に照射される。   Therefore, when the number of the LED modules 1 is one, as shown in FIG. When there are a plurality of LED modules 1, the irradiation target 5 is irradiated with a linear ultraviolet ray as shown in FIG. 1.

本実施形態の回折光学素子4では、入射面41および出射面42の両面に形成された回折格子パターンによって、配光制御を容易にする。なお、回折格子パターンが1つである場合、回折角を大きく変化させる必要があるため、配光制御が難しい。   In the diffractive optical element 4 of the present embodiment, light distribution control is facilitated by the diffraction grating patterns formed on both the entrance surface 41 and the exit surface 42. In addition, when there is one diffraction grating pattern, it is necessary to change the diffraction angle greatly, so that light distribution control is difficult.

ところで、本実施形態の複数のLEDモジュール1は、図1に示すように、複数のLEDモジュール1が並んでいる方向(図1のX軸方向)において、2以上のLEDモジュール1から放射された紫外線の一部を重ね合わせて照射対象5に照射するように配置されている。   By the way, as shown in FIG. 1, the plurality of LED modules 1 of the present embodiment are radiated from two or more LED modules 1 in the direction in which the plurality of LED modules 1 are arranged (X-axis direction in FIG. 1). It arrange | positions so that a part of ultraviolet-ray may be piled up and it may irradiate to the irradiation object 5. FIG.

上述した構成の紫外線照射装置は、例えば印刷機において、印刷用紙の上の印刷インクを紫外線によって定着させるために用いられる。複数のLEDモジュール1は、印刷インクが付着した印刷用紙に紫外線を照射できるように取り付けられる。   The ultraviolet irradiation device having the above-described configuration is used, for example, in a printing machine to fix printing ink on printing paper with ultraviolet rays. The plurality of LED modules 1 are attached so that ultraviolet rays can be applied to the printing paper to which the printing ink is attached.

以上、本実施形態の紫外線照射装置によれば、各回折光学素子4の入射面41および出射面42に形成された2つの回折格子パターンを用いて、照射対象5にライン状に照射される紫外線の幅方向の配光を精度よく制御することができる。   As described above, according to the ultraviolet irradiation device of the present embodiment, the ultraviolet rays irradiated to the irradiation target 5 in a line using the two diffraction grating patterns formed on the incident surface 41 and the emission surface 42 of each diffractive optical element 4. The light distribution in the width direction can be accurately controlled.

また、本実施形態の紫外線照射装置によれば、各回折光学素子4の入射面41および出射面42において、それぞれ複数のLEDモジュール1が並んでいる方向に沿って溝43,44を形成すればよいので、各回折格子パターンの形状を簡単にすることができる。   Moreover, according to the ultraviolet irradiation device of the present embodiment, if the grooves 43 and 44 are formed along the direction in which the plurality of LED modules 1 are arranged on the entrance surface 41 and the exit surface 42 of each diffractive optical element 4, respectively. Since it is good, the shape of each diffraction grating pattern can be simplified.

さらに、本実施形態の紫外線照射装置によれば、複数のLEDモジュール1が並んでいる方向つまりライン方向において、紫外線の強度のむらを低減することができ、均一な配光分布に近づけることができる。   Furthermore, according to the ultraviolet irradiation device of the present embodiment, unevenness in the intensity of ultraviolet rays can be reduced in the direction in which the plurality of LED modules 1 are arranged, that is, in the line direction, and a uniform light distribution can be obtained.

(実施形態2)
実施形態2に係る紫外線照射装置は、実施形態1の回折格子パターンとは異なる回折格子パターンが回折光学素子4に形成されている点で、実施形態1に係る紫外線照射装置と相違する。以下、本実施形態の紫外線照射装置について図7,8を用いて説明する。なお、実施形態1の紫外線照射装置と同様の構成要素については、同一の符号を付して説明を省略する。
(Embodiment 2)
The ultraviolet irradiation device according to the second embodiment is different from the ultraviolet irradiation device according to the first embodiment in that a diffraction grating pattern different from the diffraction grating pattern of the first embodiment is formed on the diffractive optical element 4. Hereinafter, the ultraviolet irradiation device of the present embodiment will be described with reference to FIGS. In addition, about the component similar to the ultraviolet irradiation device of Embodiment 1, the same code | symbol is attached | subjected and description is abbreviate | omitted.

本実施形態の回折光学素子4は、図7に示すような回折格子パターンが入射面41および出射面42に形成されている。なお、実施形態1の回折光学素子4(図4参照)と同様の機能については説明を省略する。   In the diffractive optical element 4 of the present embodiment, a diffraction grating pattern as shown in FIG. 7 is formed on the entrance surface 41 and the exit surface 42. Note that description of functions similar to those of the diffractive optical element 4 (see FIG. 4) of Embodiment 1 is omitted.

本実施形態の回折光学素子4では、図8(a)に示すように、入射面41および出射面42の両面に形成された回折格子パターンによって、配光制御を容易にする。これに対して、図8(b)に示すように回折格子パターンが1つである場合、回折角θを大きく変化させる必要があるため、配光制御が難しい。   In the diffractive optical element 4 of this embodiment, as shown in FIG. 8A, light distribution control is facilitated by the diffraction grating patterns formed on both the entrance surface 41 and the exit surface. On the other hand, when the number of diffraction grating patterns is one as shown in FIG. 8B, it is necessary to change the diffraction angle θ greatly, so that the light distribution control is difficult.

以上、本実施形態の紫外線照射装置においても、各回折光学素子4の入射面41および出射面42に形成された2つの回折格子パターンを用いて、照射対象5にライン状に照射される紫外線の幅方向の配光を精度よく制御することができる。   As described above, also in the ultraviolet irradiation device according to the present embodiment, the ultraviolet rays irradiated to the irradiation target 5 in a line shape using the two diffraction grating patterns formed on the incident surface 41 and the emission surface 42 of each diffractive optical element 4. The light distribution in the width direction can be accurately controlled.

また、本実施形態の紫外線照射装置においても、各回折光学素子4の入射面41および出射面42において、それぞれ複数のLEDモジュール1が並んでいる方向に沿って溝43,44を形成すればよいので、各回折格子パターンの形状を簡単にすることができる。   Also in the ultraviolet irradiation device of the present embodiment, the grooves 43 and 44 may be formed along the direction in which the plurality of LED modules 1 are arranged on the entrance surface 41 and the exit surface 42 of each diffractive optical element 4. Therefore, the shape of each diffraction grating pattern can be simplified.

なお、各実施形態での回折光学素子4の回折格子パターンの形状は一例であり、回折光学素子4の回折格子パターンは、各実施形態での形状には限定されない。   In addition, the shape of the diffraction grating pattern of the diffractive optical element 4 in each embodiment is an example, and the diffraction grating pattern of the diffractive optical element 4 is not limited to the shape in each embodiment.

1 LEDモジュール
4 回折光学素子
41 入射面
42 出射面
43,44 溝
5 照射対象
DESCRIPTION OF SYMBOLS 1 LED module 4 Diffractive optical element 41 Incident surface 42 Outgoing surface 43,44 Groove 5 Irradiation object

Claims (2)

予め決められた照射対象に紫外線を照射する紫外線照射装置であって、
一列に並んで配置され、各々に設けられたLEDが電流供給されると前記紫外線を放射する複数のLEDモジュールと、
前記複数のLEDモジュールに対して当該複数のLEDモジュールから放射された前記紫外線の放射方向に設けられ、当該紫外線を回折する回折光学素子とを備え、
前記回折光学素子は、前記照射対象に照射される前記紫外線が前記複数のLEDモジュールが並んでいる方向に細長くライン状になるように、前記複数のLEDモジュールから放射された前記紫外線の入射面および出射面の各面に、当該紫外線の放射方向と直交する断面において当該紫外線の幅を一定にする回折格子パターンが形成されており、前記回折格子パターンは、前記複数のLEDモジュールが並んでいる方向に沿って複数の溝が形成され、前記複数のLEDモジュールが並んでいる方向において、断面形状が同じである
ことを特徴とする紫外線照射装置。
An ultraviolet irradiation device for irradiating ultraviolet rays to a predetermined irradiation object,
A plurality of LED modules arranged in a line and emitting the ultraviolet rays when the LEDs provided in each are supplied with current;
A diffractive optical element provided in the radiation direction of the ultraviolet rays emitted from the plurality of LED modules with respect to the plurality of LED modules, and diffracting the ultraviolet rays,
The diffractive optical element includes an incident surface of the ultraviolet rays emitted from the plurality of LED modules such that the ultraviolet rays applied to the irradiation target are elongated and linear in a direction in which the plurality of LED modules are arranged. A diffraction grating pattern that makes the width of the ultraviolet ray constant in a cross section orthogonal to the radiation direction of the ultraviolet ray is formed on each surface of the emission surface, and the diffraction grating pattern is a direction in which the plurality of LED modules are arranged. A plurality of grooves are formed along the line, and the cross-sectional shape is the same in the direction in which the plurality of LED modules are arranged .
前記複数のLEDモジュールは、当該複数のLEDモジュールが並んでいる方向において、2以上の前記LEDモジュールから放射された前記紫外線の少なくとも一部を重ね合わせて前記照射対象に照射するように配置されていることを特徴とする請求項1記載の紫外線照射装置。The plurality of LED modules are arranged to irradiate the irradiation target with at least a part of the ultraviolet rays emitted from the two or more LED modules in a direction in which the plurality of LED modules are arranged. The ultraviolet irradiation device according to claim 1, wherein:
JP2010284807A 2010-12-21 2010-12-21 UV irradiation equipment Expired - Fee Related JP5771776B2 (en)

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