JP6413570B2 - Light source device - Google Patents

Description

  Embodiments described herein relate generally to a light source device that is used for curing liquid crystal or the like and includes a plurality of solid state light emitting elements.

  Currently, a light source device having a solid light-emitting element that emits ultraviolet rays is used in a photoreaction process such as curing, polymerization, and bonding of a liquid crystal panel. The light source device irradiates a predetermined area with ultraviolet rays by connecting in parallel a plurality of solid light emitting element arrays configured by connecting a plurality of solid light emitting elements in series.

International Publication No. 2014/103598

  By the way, in the conventional light source device, ultraviolet rays may be irradiated with non-uniform illuminance due to temperature variation between solid-state light emitting element arrays during lighting. Therefore, in the light source device, it is required to suppress non-uniform irradiation of ultraviolet rays on the irradiation object.

  An object of this invention is to provide the light source device which suppresses the non-uniform irradiation of the ultraviolet-ray with respect to a to-be-irradiated object.

  The light source device according to the embodiment includes a light emitting unit, a current adjusting unit, a heat radiating unit, and a control unit. The light emitting unit includes a solid light emitting element array having a plurality of solid light emitting elements that are connected in series and arranged on a predetermined line and emit ultraviolet rays. The light emitting unit has a plurality of solid light emitting element arrays arranged in a direction intersecting a predetermined line. Two or more current adjusting means are provided, and can correspond to one or more solid light emitting element rows of the light emitting section and can change a current value flowing through the solid light emitting elements of the corresponding solid light emitting element row. The heat dissipating means dissipates heat generated by the solid light emitting elements of two or more solid light emitting element arrays adjacent to each other in the direction in which the light emitting units intersect by flowing a fluid in a direction intersecting a predetermined line. The control means controls the current adjusting means. The control means causes the current adjusting means to change the value of the current flowing through the solid light emitting elements of the solid light emitting element array so that the relative illuminance of ultraviolet rays emitted from the solid light emitting elements of the plurality of solid light emitting element arrays becomes equal.

  ADVANTAGE OF THE INVENTION According to this invention, the light source device which suppresses the non-uniform irradiation of the ultraviolet-ray with respect to a to-be-irradiated object can be provided.

FIG. 1 is a diagram illustrating a schematic configuration of an ultraviolet irradiation device including a light source device according to an embodiment. 2 is a cross-sectional view taken along line II-II in FIG. FIG. 3 is a block diagram illustrating a schematic configuration of the light emitting unit of the light source device according to the embodiment from below. FIG. 4 is a block diagram illustrating a schematic configuration of a schematic configuration of the light source device according to the first modification of the first embodiment as viewed from below. FIG. 5 is a block diagram illustrating a schematic configuration of a schematic configuration of the light source device according to the second modification of the first embodiment as seen from below. FIG. 6 is a block diagram illustrating a schematic configuration of the light source device according to the second embodiment, which is illustrated from below. FIG. 7 is a block diagram illustrating a schematic configuration of the light source device according to the third embodiment, which is illustrated from below. FIG. 8 is a block diagram illustrating a schematic configuration of the light source device according to the fourth embodiment, which is illustrated from below. FIG. 9 is a diagram illustrating a configuration of the light source device according to the fifth embodiment. FIG. 10 is a side view of the ultraviolet irradiation device including the light source device according to the sixth embodiment when viewed in the Y-axis direction. FIG. 11 is a perspective view illustrating a schematic configuration of the light source device according to the sixth embodiment. FIG. 12 is a side view of the light source device according to the sixth embodiment. FIG. 13 is a perspective view illustrating a schematic configuration of a light source device according to Modification 1 of Embodiment 6. FIG. 14 is a perspective view illustrating a schematic configuration of a light source device according to Modification 2 of Embodiment 6.

  The light source devices 1, 1-1, 1-2, 2, 4, 5, 6, 6-1, and 6-2 according to the embodiments and the like described below include a light emitting unit 20, a current adjusting unit 30, and the like. And a heat dissipating means 40 and a control means 70. The light emitting unit 20 includes a solid light emitting element array 22 having a plurality of solid light emitting elements 23 that are connected in series and arranged on a predetermined line and emit ultraviolet rays. The light emitting unit 20 has a plurality of solid light emitting element arrays 22 arranged in a direction intersecting a predetermined line. Two or more current adjusting means 30 are provided, and can correspond to one or more solid light emitting element rows 22 of the light emitting section 20 and can change a current value flowing through the solid light emitting element 23 of the corresponding solid light emitting element row 22. The heat dissipating means 40 dissipates heat generated by the solid light emitting elements 23 of the two or more solid light emitting element arrays 22 adjacent to each other in the intersecting direction of the light emitting units 20 by flowing a fluid in a direction intersecting a predetermined line. The control unit 70 controls the current adjustment unit 30. The control means 70 sets the current value flowing through the solid light emitting elements 23 of the solid light emitting element array 22 to the current adjusting means 30 so that the relative illuminance of ultraviolet rays emitted from the solid light emitting elements 23 of the plurality of solid light emitting element arrays 22 becomes equal. Change it.

  Further, in the light source devices 1, 1-1, 1-2, 2, 3, 4, 5, 6-1, and 6-2 according to the embodiments and the like described below, The temperature detecting means 60 is provided and capable of detecting the temperature at a predetermined position. The control means 70 is based on the detection result of the temperature detecting means 60 and the solid state light emitting element array 22 corresponding to the current adjusting means 30. The value of the current flowing through the light emitting element 23 is changed.

  In the light source devices 1,1-1,1-2,2,3,4,5,6,6-1,6-2 according to the embodiments described below, the temperature detecting means 60 is connected to the fluid. A plurality are provided at intervals along the flow direction.

  Further, in the light source devices 1, 1-1, 1-2, 2, 4, 4, 6, 6-1, and 6-2 according to the embodiments described below, the solid-state light emitting element 23 has a peak wavelength. Emits ultraviolet rays of 240 nm to 450 nm.

[Embodiment 1]
Next, the light source device 1 according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a diagram illustrating a schematic configuration of an ultraviolet irradiation apparatus including a light source device according to the embodiment, FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1, and FIG. 3 is a light source device according to the embodiment. It is a block diagram which shows the schematic structure which shows the light emission part from the bottom.

  The light source device 1 according to the first embodiment (hereinafter simply referred to as the light source device) constitutes the ultraviolet irradiation device 100 shown in FIG. The ultraviolet irradiation apparatus 100 is an apparatus that irradiates an object W (shown in FIG. 1) with ultraviolet rays having a predetermined wavelength, for example, used in photoreaction processes such as curing, polymerization, and bonding of liquid crystal panels.

  As shown in FIG. 1, the ultraviolet irradiation device 100 includes a light source device 1 and a stage 10 on which an object to be irradiated W is placed on a placement surface 10a. Hereinafter, directions orthogonal to each other parallel to the mounting surface 10a are referred to as an X-axis direction and a Y-axis direction, and a direction orthogonal to the mounting surface 10a is referred to as a Z-axis direction. The light source device 1 includes a light emitting unit 20, a plurality of current adjusting means 30 (shown in FIG. 3), a heat radiating means 40, a housing 50, a temperature detecting means 60, and a control means 70.

  As shown in FIGS. 1 and 3, the light emitting unit 20 includes a mounting substrate 21 (corresponding to a substrate) and a plurality of solid state light emitting element arrays 22. The mounting substrate 21 is disposed in the X-axis direction and the Y-axis direction, that is, parallel to the placement surface 10a. The mounting substrate 21 has a plurality of solid-state light-emitting elements 23 constituting the solid-state light-emitting element array 22 mounted on a surface 21 a that faces the mounting surface 10 a along the Z-axis direction. The mounting substrate 21 has the solid-state light emitting elements 23 arranged on the surface side by side on the surface 21a along both the X-axis direction and the Y-axis direction. The mounting substrate 21 connects the solid-state light emitting elements 23 according to a predetermined pattern.

  The plurality of solid light emitting element arrays 22 have a plurality of solid light emitting elements 23 mounted on the surface 21 a of the mounting substrate 21. The solid light emitting elements 23 constituting each solid light emitting element array 22 are arranged on a straight line parallel to the X-axis direction as a predetermined line on the mounting substrate 21, and an anode and a cathode are connected in series. The solid state light emitting device 23 emits ultraviolet rays. Electric power from a DC power supply 24 (shown in FIG. 3) is supplied to the solid state light emitting elements 23 constituting the solid state light emitting element array 22. The light emitting unit 20 includes a plurality of solid state light emitting element arrays 22 arranged in the Y axis direction orthogonal to (crossing) the X axis direction as a predetermined line. The plurality of solid light emitting element arrays 22 are connected in parallel to each other and connected in parallel to the DC power supply 24. For this reason, the power supplied from the DC power supply 24 flows through the plurality of solid state light emitting element arrays 22 as current along the arrow K shown in FIGS. 1 to 3 parallel to the X-axis direction. Thus, the light emitting unit 20 has n (natural number) solid light emitting element rows 22. That is, the light emitting unit 20 includes a first solid light emitting element array 22, a second solid light emitting element array 22,..., An n-1 solid light emitting element array 22, an nth solid light emitting element array 22 as solid light emitting element arrays. have.

  The solid-state light-emitting elements 23 constituting the solid-state light-emitting element array 22 emit ultraviolet rays that oscillate uniformly in all directions, and are composed of LEDs (Light Emitting Diodes), LDs (Laser Diodes), and the like. The solid state light emitting device 23 emits ultraviolet light having a peak wavelength of 240 nm or more and 450 nm or less. In addition, the peak wavelength as used in this specification means the wavelength of an ultraviolet-ray with the strongest relative illumination among the ultraviolet-rays which the solid light emitting element 23 discharge | releases. In addition, the relative illuminance referred to in the present invention is an index representing the relative illuminance of ultraviolet rays emitted from the light emitting unit 10, that is, the solid light emitting element 12. Relative illuminance can be used as relative illuminance by standardizing illuminance measured using a so-called illuminometer such as Ushio Electric's UV integrated light meter UIT-250, photoreceiver UVD-S365. The illuminance meter is not limited to the above, and for example, UV-MO3A manufactured by Oak Manufacturing Co., Ltd., or a light receiver UV-SN35 may be used. Further, the relative illuminance may be, for example, a value in which a change in the intensity of ultraviolet rays is relatively detected by using a light receiving element that receives ultraviolet rays and outputs an electrical signal at a position where the irradiated object W is placed.

  Two or more current adjusting means 30 are provided corresponding to one or more solid light emitting element rows 22 of the light emitting unit 20. In the first embodiment, the current adjusting unit 30 corresponds to the solid state light emitting element array 22 on a one-to-one basis. The current adjusting means 30 is composed of, for example, a variable resistor whose resistance value can be changed, and is connected in series with a plurality of solid state light emitting elements 23 constituting the corresponding solid state light emitting element array 22. The current adjusting means 30 can change the value of the current flowing through the solid light emitting element 23 of the corresponding solid light emitting element array 22 by changing the resistance value. The current adjusting unit 30 may be mounted on the mounting substrate 21 or may be disposed outside the mounting substrate 21.

  The heat dissipating means 40 causes the gas as a fluid to flow along the back surface 21b of the mounting substrate 21 in the Y-axis direction orthogonal to (intersects) the X-axis direction as a predetermined line, so that the light emitting unit 20 intersects. The heat generated by the solid light emitting elements 23 of the two or more solid light emitting element rows 22 adjacent to each other in the Y-axis direction is radiated to the outside of the light source device 1. In the first embodiment, the heat radiating means 40 dissipates heat generated by the solid light emitting elements 23 of all the solid light emitting element arrays 22 to the outside of the light source device 1 by flowing a gas in the Y-axis direction. As shown in FIGS. 1 and 2, the heat radiating means 40 includes a heat sink 41 and a heat radiating fan 42. The heat sink 41 is attached to the back surface 21 b on the back side of the front surface 21 a of the mounting substrate 21 of the light emitting unit 20. The heat sink 41 is made of a material having a low thermal resistance (metal or the like) such as an aluminum alloy. In the present embodiment, the heat sink 41 is integrally provided with a flat plate-like substrate attachment portion 41 a attached to the back surface 21 b of the mounting substrate 21 and a plurality of fins 41 b protruding from the substrate attachment portion 41 a in the direction away from the stage 10. ing. The fins 41b are formed in a flat plate shape protruding in the Z-axis direction and extending linearly in the Y-axis direction from the board mounting portion 41a, and a plurality of fins 41b are provided at regular intervals with an interval in the X-axis direction.

  The heat radiating fan 42 is attached to one end of the heat sink 41 in the Y-axis direction, and rotates to take in gas as a fluid outside the light source device 1 between the fins 41b of the heat sink 41 and flow between the fins 41b. After that, it is discharged out of the light source device 1. The heat dissipating fan 42 dissipates heat generated by the solid light emitting elements 23 of the solid light emitting element array 22 to the outside of the light source device 1 through the mounting substrate 21 and the heat sink 41 by causing the gas to flow between the fins 41b.

  Further, in the present invention, the heat radiating means 40 is attached to the back surface 21b of the mounting substrate 21 and sealed inside, and a liquid as a fluid flows inside, and a liquid in the heat pipe flows. It may be composed of a pump or the like.

  The housing 50 covers the back surface 21 b of the mounting substrate 21 and the heat sink 41 of the heat radiating means 40. In this embodiment, the housing 50 is formed in a box shape with both ends in the Y-axis direction being open. The housing 50 takes in gas as a fluid through one opening 50a on the side away from the heat radiating fan 42 as the heat radiating fan 42 of the heat radiating means 40 rotates, and heat sinks from the other opening 50b near the heat radiating fan 42. The gas heated by 41 is discharged outside.

  The temperature detecting means 60 is provided at a predetermined position of the light emitting unit 20 and can detect the temperature at the predetermined position. In the first embodiment, a plurality of temperature detecting means 60 are provided in the light emitting unit 20 with an interval in the Y-axis direction that is the flow direction of the gas as the fluid by the heat radiating means 40. In the first embodiment, the temperature detecting means 60 includes the center in the X-axis direction of the end of the housing 50 on the surface 21a of the mounting substrate 21 near the one opening 50a and the other opening of the housing 50 on the surface 21a of the mounting substrate 21. A total of two are provided at each of the ends near the portion 50b and the center in the X-axis direction. The temperature detection unit 60 outputs the detection result to the control unit 70.

  The control means 70 controls the ultraviolet irradiation operation by the ultraviolet irradiation device 100. The control means 70 is mainly composed of an arithmetic processing unit constituted by a CPU or the like, and a microprocessor (not shown) provided with a ROM, a RAM, etc. Etc. are connected to the operation means used when registering.

  The control means 70 controls the current adjusting means 30 provided corresponding to each solid light emitting element array 22 of the light emitting unit 20 of the light source device 1, and the current flowing through the solid light emitting elements 23 in each solid light emitting element array 22. Change the value. When the control means 70 changes the value of the current flowing through the solid state light emitting elements 23 in each solid state light emitting element array 22, the relative illuminance of ultraviolet rays emitted from the solid state light emitting elements 23 of the plurality of solid state light emitting element arrays 22 becomes equal. Further, based on the detection result of the temperature detection means 60, the value of the current flowing through the solid state light emitting elements 23 in the solid state light emitting element array 22 corresponding to each current adjusting means 30 is changed.

  Next, the processing operation of the irradiation object W of the ultraviolet irradiation device 100 will be described. First, the operator registers the processing content information in the control means 70, and starts the processing operation when there is an instruction to start the processing operation. When the processing operation is started, the control unit 70 operates the heat dissipation fan 42 of the heat dissipation unit 40 of the light source device 1.

  Then, the ultraviolet irradiation device 100 places the irradiated object W on the placement surface 10a of the stage 10 after a predetermined time has elapsed since the heat radiation fan 42 of the heat radiation means 40 is operated, and each solid light emission of the light emitting unit 20. Ultraviolet rays are emitted from each solid state light emitting element 23 in the element row 22 to irradiate the irradiated object W on the mounting surface 10a with ultraviolet rays. The control means 70 controls the current adjusting means 30 to apply power to each solid state light emitting element array 22. The irradiated object W irradiated with ultraviolet rays for a certain period of time is removed from the placement surface 10 a of the stage 10, and the irradiated object W before ultraviolet irradiation is placed on the placement surface 10 a of the stage 10. In the same manner as described above, ultraviolet rays are irradiated.

  The ultraviolet irradiation device 100 of the present invention may be provided with a filter or an optical element between the light source device 1 and the stage 10 as necessary.

  The light source device 1 according to the embodiment having the configuration described above corresponds to each current adjusting unit 30 such that the control unit 70 equalizes the relative illuminance of ultraviolet rays emitted from the solid state light emitting elements 23 of the plurality of solid state light emitting element arrays 22. The value of the current flowing through the solid light emitting element 23 of the solid light emitting element array 22 is changed. For this reason, the light source device 1 can suppress the illuminance unevenness of the ultraviolet rays irradiated to the irradiated object W. Therefore, the light source device 1 can suppress non-uniform irradiation of ultraviolet rays onto the irradiation object W.

  Further, the light source device 1 includes a temperature detection unit 60 that detects a temperature on the surface 21a of the mounting substrate 21 as a predetermined position of the light emitting unit 20, and the control unit 70 is based on the detection result of the temperature detection unit 60. Each current adjusting means 30 is controlled. For this reason, the light source device 1 can suppress the illuminance unevenness of the ultraviolet rays irradiated to the irradiated object W. For this reason, the light source device 1 can make the relative illuminance of the ultraviolet rays emitted from the solid light emitting elements 23 of the plurality of solid light emitting element arrays 22 as equal as possible, and the illuminance of the ultraviolet rays irradiated to the irradiation object W. Unevenness can be suppressed. Therefore, the light source device 1 can suppress non-uniform irradiation of ultraviolet rays onto the irradiation object W.

  Further, the light source device 1 is provided with a plurality of temperature detecting means 60 at intervals along the fluid flow direction, so that the light flows into the solid light emitting elements 23 of the solid light emitting element array 22 corresponding to each current adjusting means 30. The current value can be changed. For this reason, the light source device 1 can make the relative illuminance of the ultraviolet rays emitted from the solid light emitting elements 23 of the plurality of solid light emitting element arrays 22 as equal as possible, and the illuminance of the ultraviolet rays irradiated to the irradiation object W. Unevenness can be suppressed. Therefore, the light source device 1 can suppress non-uniform irradiation of ultraviolet rays onto the irradiation object W.

  Further, the light source device 1 emits ultraviolet rays having a peak wavelength of 240 nm or more and 450 nm or less of the solid light emitting element 22, thereby suppressing uneven irradiation of the ultraviolet rays onto the object W to be irradiated.

[Modification 1]
Next, the light source device 1-1 according to the first modification of the first embodiment of the present invention will be described with reference to the drawings. FIG. 4 is a block diagram illustrating a schematic configuration of a schematic configuration of the light source device according to the first modification of the first embodiment as viewed from below. In FIG. 4, the same parts as those of the first embodiment described above are denoted by the same reference numerals and description thereof is omitted.

  The light source device 1-1 according to the first modification of the first embodiment does not include the temperature detection unit 60 as illustrated in FIG. Furthermore, the control means 70 of the light source device 1-1 controls the current adjusting means 30 based on a value stored in advance.

  Similarly to the first embodiment, the light source device 1-1 according to the first modification of the first embodiment can suppress unevenness in the illuminance of the ultraviolet rays irradiated to the irradiation object W, and uneven irradiation of the ultraviolet rays onto the irradiation object W. Can be suppressed.

[Modification 2]
Next, a light source device 1-2 according to Modification 2 of Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 5 is a block diagram illustrating a schematic configuration of a schematic configuration of the light source device according to the second modification of the first embodiment as seen from below. In FIG. 5, the same parts as those of the first embodiment described above are denoted by the same reference numerals and description thereof is omitted.

  As illustrated in FIG. 5, the light source device 1-2 according to the second modification of the first embodiment includes a temperature detection unit 60 corresponding to each solid-state light emitting element array 22. That is, in the light source device 1-2 according to the modified example 2, the solid state light emitting element array 22 and the temperature detecting unit 60 correspond one-to-one, and the corresponding solid state light emitting element array 22 and the temperature detecting unit 60 are close to each other. It is arranged at the position to do.

  Similarly to the first embodiment, the light source device 1-2 according to the second modification of the first embodiment can suppress unevenness in the illuminance of the ultraviolet rays irradiated to the irradiation object W, and uneven irradiation of the ultraviolet rays onto the irradiation object W. Can be suppressed.

[Embodiment 2]
Next, a light source device 2 according to Embodiment 2 of the present invention will be described with reference to the drawings. FIG. 6 is a block diagram illustrating a schematic configuration of the light source device according to the second embodiment, which is illustrated from below. In FIG. 6, the same parts as those in the first embodiment described above are denoted by the same reference numerals, and the description thereof is omitted.

  In the light source device 2 according to the second embodiment, as shown in FIG. 6, the solid light emitting elements 23 in which the solid light emitting element arrays 22 are connected in series on a plurality of straight lines parallel to the X-axis direction are arranged. In FIG. 6, the temperature detection unit 60 is omitted, but in the second embodiment, the temperature detection unit 60 may be arranged in the same manner as in the first embodiment and the second modification.

  Similarly to the first embodiment, the light source device 2 according to the second embodiment can suppress unevenness in the illuminance of the ultraviolet rays irradiated on the irradiation object W, and can suppress uneven irradiation of the ultraviolet rays on the irradiation object W. .

[Embodiment 3]
Next, a light source device 3 according to Embodiment 3 of the present invention will be described with reference to the drawings. FIG. 7 is a block diagram illustrating a schematic configuration of the light source device according to the third embodiment, which is illustrated from below. In FIG. 7, the same parts as those in the first embodiment, the second embodiment, and the like described above are denoted by the same reference numerals and description thereof is omitted.

  In the light source device 3 according to Embodiment 3, as shown in FIG. 7, the solid light emitting elements 23 in which the solid light emitting element arrays 22 are connected in series on a plurality of straight lines parallel to the X-axis direction are arranged. In the third embodiment, as in the first embodiment, each solid light emitting element array 22 may be arranged on one straight line parallel to the X-axis direction. In FIG. 7, the temperature detection unit 60 is omitted, but in the third embodiment, the temperature detection unit 60 may be arranged in the same manner as in the first embodiment and the second modification.

  Furthermore, as shown in FIG. 7, the heat radiating means 40 of the light source device 3 according to Embodiment 3 is provided with fans 43 that suck gas into the housing 50 at both ends in the Y-axis direction, and the housing 50 from the center in the Y-axis direction. A discharge port 44 for discharging gas is provided outside.

  The light source device 3 according to the third embodiment can suppress unevenness in the illuminance of ultraviolet rays irradiated to the irradiation object W and suppress uneven irradiation of ultraviolet rays on the irradiation object W, as in the first embodiment. it can.

[Embodiment 4]
Next, a light source device 4 according to Embodiment 4 of the present invention will be described with reference to the drawings. FIG. 8 is a block diagram illustrating a schematic configuration of the light source device according to the fourth embodiment, which is illustrated from below. In FIG. 8, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the light source device 4 according to the fourth embodiment, each solid light emitting element array 22 is formed in a straight line parallel to the X-axis direction, and the direction of current flowing through each adjacent solid light emitting element array 22 as shown in FIG. Is reversed. In FIG. 8, the temperature detection means 60 is omitted, but in the fourth embodiment, the temperature detection means 60 may be arranged in the same manner as in the first embodiment and the second modification. Further, in FIG. 8, the current adjusting unit 30 is omitted, but in the present invention, the current adjusting unit 30 is provided corresponding to each solid light emitting element array 22. In FIG. 8, the control means 70 is omitted.

  As in the first embodiment, the light source device 4 according to the fourth embodiment can suppress unevenness in the illuminance of the ultraviolet rays irradiated to the irradiation object W, and can suppress uneven irradiation of the ultraviolet rays onto the irradiation object W. it can.

[Embodiment 5]
Next, a light source device 5 according to Embodiment 5 of the present invention will be described with reference to the drawings. FIG. 9A is a side view of the light source device according to the fifth embodiment, and FIG. 9B is a plan view showing a schematic configuration of the light source device according to the fifth embodiment from below. In FIG. 9, the same parts as those of the first embodiment described above are denoted by the same reference numerals and the description thereof is omitted.

  As shown in FIG. 9A, the light source device 5 according to the fifth embodiment is provided with a pair of mounting substrates 21 so that the back surfaces 21b face each other with a space therebetween, and the X axis is placed on the surface 21a of each mounting substrate 21. A plurality of solid light emitting element arrays 22 parallel to the direction are provided. In addition, the housing 50 connects both ends of the mounting substrate 21 in the X-axis direction, and the heat radiating means 40 flows the gas between the mounting substrates 21 along the Y-axis direction. In FIG. 9, the temperature detection unit 60 is omitted, but in the fifth embodiment, the temperature detection unit 60 may be arranged similarly to the first embodiment and the second modification. Further, in FIG. 9, the current adjusting means 30 is omitted, but in the present invention, the current adjusting means 30 is provided corresponding to each solid-state light emitting element array 22. In FIG. 9, the control means 70 is omitted.

  As in the first embodiment, the light source device 5 according to the fifth embodiment can suppress unevenness in the illuminance of ultraviolet rays irradiated to the irradiation object W, and suppress uneven irradiation of ultraviolet rays on the irradiation object W. it can.

[Embodiment 6]
Next, a light source device 6 according to Embodiment 6 of the present invention will be described with reference to the drawings. FIG. 10 is a side view of the ultraviolet irradiation device including the light source device according to the sixth embodiment when viewed in the Y-axis direction, and FIG. 11 is a perspective view illustrating a schematic configuration of the light source device according to the sixth embodiment. FIG. 12 is a side view of the light source device according to the sixth embodiment. 13 is a perspective view illustrating a schematic configuration of a light source device according to Modification 1 of Embodiment 6. FIG. 14 is a perspective view illustrating a schematic configuration of a light source device according to Modification 2 of Embodiment 6. is there. 10 to 14, the same parts as those of the first embodiment described above are denoted by the same reference numerals and the description thereof is omitted.

  As shown in FIGS. 11 and 12, the light source device 6 according to Embodiment 6 includes a plurality of solid state light emitting element arrays 22 on the outer peripheral surface 21 a of the mounting substrate 21 having an annular cross section. The solid-state light-emitting element array 22 includes a plurality of solid-state light-emitting elements 23 that are arranged on a circumference as a predetermined line on the outer peripheral surface 21 a of the mounting substrate 21 and connected in series. The plurality of solid state light emitting element rows 22 are arranged side by side in the Y-axis direction orthogonal to (intersect) a predetermined line. The heat radiating means 40 radiates heat generated by the solid state light emitting device 23 by flowing a gas as a fluid inside the mounting substrate 21 along the Y-axis direction. Further, the temperature detecting means 60 is provided at both ends of the outer peripheral surface 21a of the mounting substrate 21 in the Y-axis direction. Furthermore, the ultraviolet irradiation device 100 including the light source device 6 according to the sixth embodiment reflects the ultraviolet rays emitted from the solid light emitting element 23 of the light source device 6 toward the irradiation object W on the mounting surface 10 a of the stage 10. A mirror 101 is provided.

  In addition, as shown in FIG. 13, the light source device 6-1 according to the first modification of the sixth embodiment is provided with a temperature detecting unit 60 corresponding to each solid-state light emitting element array 22, and the second modification of the sixth embodiment is used. As shown in FIG. 14, the light source device 6-2 does not include the temperature detection unit 60.

  The light source devices 6, 6-1 and 6-2 according to the sixth embodiment, the first modification, and the second modification can suppress the illuminance unevenness of the ultraviolet rays irradiated to the irradiation object W, similarly to the first embodiment and the like. The non-uniform irradiation of the ultraviolet rays with respect to the irradiation object W can be suppressed.

  The light source devices 1,1-1,1-2,2,3,4,5,6,6-1,6-2 of the first to sixth embodiments described above are liquid crystal panel curing, polymerization, bonding, etc. The example which comprises the ultraviolet irradiation device 100 used for this photoreaction process is shown. However, the light source device 1,1-1,1-2,2,3,4,5,6,6-1,6-2 of the present invention includes, for example, various types such as a semiconductor manufacturing apparatus and a photochemical reaction of a chemical substance. Various devices may be configured.

  Moreover, in Embodiment 1-5 mentioned above, although the solid-state light-emitting element row | line | column 22 was comprised by arranging the some solid-state light-emitting element 23 connected in series on the straight line parallel to a X-axis direction, in this invention, it is not limited to this. . For example, the solid light emitting element array 22 may be configured by arranging a plurality of solid state light emitting elements 23 connected in series on a circle as a predetermined line. In this case, it is desirable that the plurality of solid state light emitting element arrays 22 be arranged concentrically.

  Although embodiments and modifications of the present invention have been described, these embodiments and modifications are presented as examples and are not intended to limit the scope of the invention. These embodiments and modifications can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. These embodiments and modifications are included in the scope of the present invention and the gist thereof, and are also included in the invention described in the claims and the equivalents thereof.

1,1-1,1-2,2,3,4,5,6,6-1,6-2 Light source device 20 Light emitting unit 21 Mounting substrate (substrate)
22 Solid-state light-emitting element array 23 Solid-state light-emitting element 30 Current adjustment means 40 Heat radiation means 60 Temperature detection means 70 Control means W Object to be irradiated

Claims (4)

A light-emitting section in which a plurality of solid-state light-emitting element arrays each having a plurality of solid-state light-emitting elements that emit ultraviolet rays that are connected in series and arranged on a predetermined line are arranged on the substrate in a direction intersecting the predetermined line;
Two or more current adjusting means corresponding to one or more of the solid-state light-emitting element rows of the light-emitting section and capable of changing a current value flowing through the solid-state light-emitting elements of the corresponding solid-state light-emitting element row;
A substrate mounting portion to which the substrate is mounted; and two or more solids that protrude in a direction away from the substrate mounting portion and extend in a direction intersecting the predetermined line and adjacent to the intersecting direction of the light emitting unit a heat sink for chromatic and a plurality of fins extending over the light-emitting element array, a plurality of the upstream side of the plurality of fins in the direction crossing the predetermined line along between the plurality of fins toward the downstream side And a fan arranged to flow a fluid passing between the fins, and the heat generated by the solid state light emitting elements of the two or more solid state light emitting element arrays adjacent to each other in the intersecting direction of the light emitting section. Heat radiating means for radiating heat with a plurality of fins;
Control means for controlling the current adjusting means;
The control means sets a current value flowing through the solid state light emitting elements in the solid state light emitting element array to the current adjusting means so that relative illuminances of ultraviolet rays emitted from the solid state light emitting element arrays of the plurality of solid state light emitting element arrays become equal. Light source device to be changed. Provided with a temperature detection means provided at a predetermined position of the light emitting unit and capable of detecting the temperature of the predetermined position;
2. The light source device according to claim 1, wherein the control unit causes the current adjustment unit to change a current value flowing through the solid state light emitting element of the solid state light emitting element array based on a detection result of the temperature detecting unit.   The light source device according to claim 2, wherein a plurality of the temperature detection units are provided at intervals along the flow direction of the fluid.   The light source device according to any one of claims 1 to 3, wherein the solid-state light emitting element emits ultraviolet light having a peak wavelength of 240 nm or more and 450 nm or less.

Images