KR102297802B1 - Light source device - Google Patents

Abstract

An object of the present invention is to provide a light source device capable of suppressing aging deterioration of ultraviolet irradiation performance. The light source device 1 includes a light emitting element 5 , a ceramic substrate 110 , and a heat dissipation member 120 . The light emitting device 5 emits light having a dominant wavelength in the ultraviolet region. The ceramic substrate 110 has a light emitting device 5 installed on one side, and a conductive pattern 11 made of a conductor and at least a conductive pattern 11 on the side on which the light emitting device 5 is installed using ceramics as a base material. ) an overcoat 18 is formed. The heat dissipation member 120 is provided on the opposite side of the surface of the ceramic substrate 110 on the side on which the light emitting element 5 is installed and is made of a metal material.
Further, the present invention provides a light source device for suppressing non-uniform irradiation of ultraviolet rays to an irradiated object.
The light source device 1 of the embodiment includes a light emitting unit 20 , a current adjusting unit, a heat dissipating unit 40 , and a control unit 70 . The light emitting unit 20 includes a solid light emitting element array 22 connected in series and having a plurality of solid light emitting elements 23 arranged on a predetermined line. In the light emitting unit 20, the solid light emitting element array 22 is arranged in a direction intersecting a predetermined line. Two or more current adjusting means are installed to correspond to one or more solid light emitting device rows 22 of the light emitting unit 20 and to change the current value flowing through the solid light emitting device 23 of the corresponding solid light emitting device row 22 . The heat dissipation means 40 flows the fluid in a direction intersecting a predetermined line to generate heat generated by the solid light emitting device 23 of two or more solid light emitting device rows 22 adjacent to the intersecting direction of the light emitting unit 20 . radiate heat The control means 70 radiates heat generated by the solid light emitting elements 23 of the plurality of solid light emitting element rows 22 . The control means 70 changes the current value by the current adjusting means so that the relative illuminance of the ultraviolet rays emitted by the solid light emitting devices 23 of the plurality of solid light emitting device rows 22 are equal.
In addition, the present invention provides an ultraviolet irradiation device in which deterioration of the absorption type polarizing element is suppressed.
The ultraviolet irradiation device 301 of the embodiment includes a light source 310 having a light emitting element 312 emitting ultraviolet rays (U); and an absorption type polarizer 20 that transmits polarized light UA of a polarization axis parallel to a predetermined reference direction PA among the ultraviolet rays U emitted from the light source 310 .

Description

Light source device {LIGHT SOURCE DEVICE}

The present invention relates to a light source device.

A light source device using a light emitting element such as an LED (Light Emitting Diode) or LD (Laser Diode) as a light source uses a plurality of light emitting elements to secure an irradiation area or to obtain a desired light intensity and uniformity. Light emitting devices adjust light output by adjusting current, but there is individual difference in Vf (forward voltage). sometimes it affects. Therefore, it is preferable that the light emitting elements are electrically connected in series, but when a plurality of light emitting elements are electrically connected in series, the applied voltage becomes high. In such a case, when an aluminum substrate generally used as a mounting substrate is used, it is necessary to secure the withstand voltage by thickening the insulating layer of the substrate. The temperature rises easily, which can also cause a decrease in efficiency. For this reason, some light source devices use, as a board|substrate on which the light emitting element is mounted, the board|substrate using ceramics as a base material.

In addition, a light source device having a solid light emitting device emitting ultraviolet rays is currently used in a photoreaction process such as curing, polymerization, and bonding of a liquid crystal panel. The light source device connects a plurality of solid light emitting element rows formed by connecting a plurality of solid light emitting elements in series in parallel, and irradiates an ultraviolet ray to a predetermined area.

In addition, as a technology replacing the rubbing process, which is an alignment treatment of the alignment film of the current liquid crystal panel, a photo-alignment technology (for example, refer to Patent Document 3 and Patent Document 4) is attracting attention. An ultraviolet irradiation device used in photo-alignment technology includes a rod-shaped lamp serving as a light source and a polarizing element. In this kind of ultraviolet irradiation device, the polarizing element passes ultraviolet rays of a polarization axis in a predetermined direction among the ultraviolet rays emitted by the rod-shaped lamp, and irradiates the passed ultraviolet rays to the irradiated object to align the alignment film.

Japanese Patent Laid-Open No. 2012-89553 International Publication No. 2014/103598 Japanese Laid-Open Patent Publication No. 2009-265290 Japanese Patent Laid-Open No. 2011-145381

The light source device is used not only for irradiating visible light, but also for photoreaction or ultraviolet curing by irradiating an irradiated object with ultraviolet ray. In the light source device used for irradiating ultraviolet rays as described above, a light emitting element emitting ultraviolet rays is used as a light emitting element. Since such a light source device is often used with high output and the amount of heat is likely to increase, it is necessary to increase the cooling performance.

As a method for improving the cooling performance of the light source device, for example, water cooling in which cooling is performed by circulating cooling water is mentioned. It is preferable to do In this way, when aluminum is used as a base material for a substrate on which a light emitting device is mounted, a solder resist layer is coated to prevent oxidation or corrosion of the wiring conductor layer and to protect the insulating layer from heat when electronic components are mounted on an aluminum substrate. do.

However, when a light source device is set as the structure cooled by water cooling, while dew condensation may generate|occur|produce, since a soldering resist has high water absorption, it may absorb the water|moisture content which generate|occur|produced by dew condensation. In this case, it is considered that the insulation resistance of the solder resist is lowered to short circuit between the wiring conductors, or the wiring conductor is corroded by the absorbed moisture. For this reason, in the lighting fixture using the light emitting element which emits an ultraviolet-ray, it has become very difficult to irradiate an ultraviolet-ray efficiently over a long period of time.

In addition, in the conventional light source device, ultraviolet rays may be irradiated with non-uniform illuminance due to the temperature difference between the solid light emitting element rows at the time of lighting. Therefore, in the light source device, it is required to suppress the non-uniform irradiation of ultraviolet rays to the object to be irradiated.

In addition, the development of an ultraviolet irradiation device using an absorption-type polarizing element capable of obtaining higher polarization characteristics than a reflective-type polarizing element has recently been developed. However, the absorption-type polarizing element is weak to heat, for example, in an ultraviolet irradiation device using a discharge lamp such as a mercury lamp or a metal halide lamp as a light source, the deterioration of the absorption-type polarizing element is remarkable due to the heat emitted from the discharge lamp, and ultraviolet irradiation The device cannot withstand practical use.

The present invention has been made in view of the above, and an object of the present invention is to provide a light source device that suppresses deterioration of ultraviolet irradiation performance with aging.

Another object of the present invention is to provide a light source device that suppresses non-uniform irradiation of ultraviolet rays to an irradiated object.

Moreover, an object of this invention is to provide the ultraviolet irradiation apparatus which suppressed deterioration of the absorption type polarizing element.

The light source device of the embodiment includes a light emitting element; ceramic substrate; and a heat dissipation member. The light emitting device emits light having a dominant wavelength in the ultraviolet region. In the ceramic substrate, a light emitting element is provided on one side and ceramics are used as a base material, and a conductor pattern made of a conductor and an overcoat covering at least the conductor pattern are formed on the surface on which the light emitting element is installed. The heat dissipation member is provided on the opposite side of the surface of the ceramic substrate on the side on which the light emitting element is installed, and is made of a metallic material.

Further, the light source device of the embodiment includes a light emitting unit, a current adjusting means, a heat dissipating means and a control means. The light emitting section includes a solid light emitting element array having a plurality of solid light emitting elements emitting ultraviolet rays, which are connected in series and arranged on a predetermined line. The light emitting part is arranged in a plurality of rows of solid light emitting elements in a direction intersecting a predetermined line. Two or more current adjusting means are provided, and the current value corresponding to one or more solid light emitting element rows of the light emitting part and flowing through the solid light emitting elements of the corresponding solid light emitting element row can be changed. The heat dissipating means dissipates heat generated by the solid light emitting devices of two or more solid light emitting device rows adjacent to the intersecting direction of the light emitting part by flowing the fluid in a direction intersecting a predetermined line. The control means controls the current adjustment means. The control means changes the current value flowing through the solid light emitting elements of the solid light emitting element row in the current adjusting means so that the relative illuminance of the ultraviolet rays emitted by the solid light emitting elements of the plurality of solid light emitting element rows becomes equal.

Further, the ultraviolet irradiation apparatus of the embodiment includes: a light source having a light emitting element emitting ultraviolet rays; and an absorption type polarizing element that transmits polarized light having a polarization axis parallel to a predetermined reference direction among ultraviolet rays emitted from the light source.

ADVANTAGE OF THE INVENTION According to this invention, the light source device which suppresses the aging deterioration of the irradiation performance of an ultraviolet-ray can be provided.

Further, according to the present invention, it is possible to provide a light source device that suppresses non-uniform irradiation of ultraviolet rays to an irradiated object.

Further, according to the present invention, it is possible to provide an ultraviolet irradiation device in which deterioration of the absorption type polarizing element is suppressed.

1 is a cross-sectional view of a light source device according to a first embodiment.
Fig. 2 is a sectional view of a modified example 1-1 of the light source device according to the first embodiment, in which a package is used.
Fig. 3 is a diagram showing a schematic configuration of an ultraviolet irradiation device provided with a light source device according to Embodiments 2 to 7;
Fig. 4 is a cross-sectional view taken along line II-II in Fig. 3;
Fig. 5 is a block diagram showing a schematic configuration of the light emitting part of the light source device according to the second to seventh embodiments as viewed from below.
Fig. 6 is a schematic structural block diagram of a schematic configuration of a light source device according to Modification 2-1 of the second embodiment as viewed from below.
Fig. 7 is a schematic block diagram showing the schematic configuration of a light source device according to Modification 2-2 of the second embodiment as viewed from below.
Fig. 8 is a schematic structural block diagram showing the schematic configuration of the light source device according to the third embodiment as viewed from below.
Fig. 9 is a schematic block diagram showing the schematic configuration of a light source device according to the fourth embodiment as viewed from below.
Fig. 10 is a schematic structural block diagram of a schematic configuration of a light source device according to a fifth embodiment as viewed from below.
11 is a diagram showing the configuration of a light source device according to the sixth embodiment.
Fig. 12 is a side view of the ultraviolet irradiation device provided with the light source device according to the seventh embodiment, seen in the Y-axis direction.
13 is a perspective view showing a schematic configuration of a light source device according to a seventh embodiment.
14 is a side view of the light source device according to the seventh embodiment.
15 is a perspective view showing a schematic configuration of a light source device according to Modification 2-1 of Embodiment 7;
Fig. 16 is a perspective view showing a schematic configuration of a light source device according to 2-2 in a modification of the seventh embodiment.
Fig. 17 is a perspective view showing a schematic configuration of an ultraviolet irradiation apparatus according to the eighth embodiment.
Fig. 18 is a view of the ultraviolet irradiation apparatus according to the eighth embodiment seen from the Y-axis direction.
19 is a view of the light source 310 of the ultraviolet irradiation device according to the eighth embodiment as viewed from the Z-axis direction.
20 is a view of the ultraviolet irradiation apparatus according to the ninth embodiment as viewed from the Y-axis direction.
It is the figure which looked at the modified example of the ultraviolet irradiation apparatus which concerns on Embodiment 9 from the Y-axis direction.

A light source device 1 according to Embodiment 1 described below includes a light emitting element 5 , a ceramic substrate 110 , and a heat dissipation member 120 . The light emitting device 5 emits light having a dominant wavelength in the ultraviolet region. The ceramic substrate 110 has a light emitting element 5 disposed on one side, and a conductive pattern 11 made of a conductor and at least a conductive pattern 11 made of a conductor on the surface on the side on which the light emitting element 5 is installed using ceramics as a base material. An overcoat 18 covering the pattern 11 is formed. The heat dissipation member 120 is provided on the opposite side of the surface of the ceramic substrate 110 on the side on which the light emitting element 5 is installed and is made of a metal material.

Further, in the light source device 1 according to the first embodiment described below, the light emitting elements 5 are provided with a plurality of light emitting elements 5 having different dominant wavelengths of irradiated light.

In the light source device 1 according to the first embodiment described below, alumina or aluminum nitride is used as the base material for the ceramic substrate 110 .

In addition, in the light source device 1 according to Embodiment 1 described below, the overcoat 18 reflects ultraviolet rays.

In addition, in the light source device 1 according to Embodiment 1 described below, the overcoat 18 absorbs ultraviolet rays.

[Embodiment 1]

Next, a light source device according to the first embodiment will be described with reference to the drawings. 1 is a cross-sectional view of a light source device according to a first embodiment. The light source device 1 shown in Fig. 1 has a plurality of light emitting elements 5 that are light sources in the light source device 1, and the plurality of light emitting elements 5 are ceramic substrates formed in a plate shape using ceramics as a base material. 110) is installed on one side. As the base material of the ceramic substrate 110, for example, when a reflective characteristic is required, it is preferable to use white and high reflectance alumina. In addition, when securing higher heat dissipation performance, it is preferable to use aluminum nitride having high thermal conductivity. That is, the ceramic substrate 110 is made of an inorganic material.

The light emitting element 5 is capable of emitting light having a dominant wavelength in the ultraviolet region, and irradiates light with a dominant wavelength of 240 nm or more and 405 nm or less. In addition, in the plurality of light emitting elements 5, a plurality of light emitting elements 5 having different dominant wavelengths of irradiated light within the wavelength range of ultraviolet rays are provided, whereby the light emitting elements 5 can emit light in a wide range within the wavelength range of ultraviolet rays. The wavelength can be irradiated by a plurality of light emitting elements 5 . In addition, the plurality of light emitting elements 5 can be irradiated by all of the light emitting elements 5 . In addition, the plurality of light emitting devices 5 do not have to have different dominant wavelengths in all the light emitting devices 5 , and when viewed from the plurality of light emitting devices 5 as a whole, the dominant wavelengths of the light irradiated between the light emitting devices 5 are different. It is good to include

A conductive pattern 11 and an overcoat 18 are formed on the surface of the ceramic substrate 110 on the side on which the light emitting element 5 is provided. The conductive pattern 11 is made of a conductor and has a high conductivity material such as copper or silver as a main component. The conductive pattern 11 made of a conductor is an arbitrary circuit pattern and is formed on the ceramic substrate 110. In the light source device 1 according to the present embodiment, the electrical connection state of the plurality of light emitting elements 5 is It is formed to be in series. Each light emitting element 5 is connected to the conductive pattern 11 by a solder 12, whereby the light emitting element 5 and the conductive pattern 11 are electrically connected. That is, in the light source device 1 according to the present embodiment, in order to prevent an adverse effect on the uniformity caused by connecting the plurality of light emitting elements 5 in parallel, the plurality of light emitting elements 5 are connected in series, have.

The overcoat 18 is made of an inorganic material for insulation and corrosion prevention, and is formed to cover at least the conductive pattern 11 . That is, the overcoat 18 is formed on the surface of the ceramic substrate 110 on the side on which the light emitting element 5 is installed, except for the mounting part and the power supply part 15, and covers the ceramic substrate 110. . For this reason, in the portion where the conductive pattern 11 is formed, the overcoat 18 is the light emitting element 5 or the solder on the surface opposite to the surface on the side on which the ceramic substrate 110 is located in the conductive pattern 11 . It is formed in a part other than the part where (12) is located. The overcoat 18 is made of glass as a main component and includes particles that reflect or absorb ultraviolet rays. In addition, the overcoat 18 may be comprised by the member which reflects an ultraviolet-ray, and may be comprised by the member which absorbs an ultraviolet-ray. As long as the overcoat 18 can suppress ultraviolet rays from reaching the conductive pattern 11, any configuration may be adopted.

In addition, the ceramic substrate 110 is provided with a power supply unit 15 electrically connected to an external power source (not shown). A pair of the power feeding units 15 is provided on the ceramic substrate 110 , and the pair of power feeding units 15 are on the side on which the light emitting element 5 or the conductive pattern 11 is disposed in the ceramic substrate 110 . installed on the side. For example, the pair of power feeding units 15 are provided on the side of the ceramic substrate 110 on the side on which the light emitting element 5 and the conductive pattern 11 are installed, near the opposite ends of the ceramic substrate 110 , and the conductive pattern (11) is electrically connected. In addition, the power feeding part 15 may be provided in a part other than this, and it does not matter where it is installed as long as it is electrically connected to the conductive pattern 11 and it is a form which can receive power supplied from a power source.

In addition, a heat dissipation member 120 made of a metallic material is provided on the opposite side of the surface of the ceramic substrate 110 on the side on which the light emitting element 5 is installed. The heat dissipating member 120 is a so-called water cooling type heat dissipating member 120 using cooling water as a cooling medium. The heat dissipation member 120 is made of, for example, aluminum, which is a material having high thermal conductivity, and is formed in a rectangular cylindrical shape with an end closed. The heat dissipation member 120 formed in the shape of a rectangular cylinder is installed in a state in which one surface of the outer peripheral surface of the rectangular cylinder is in contact with the surface opposite to the surface of the ceramic substrate 110 on which the light emitting element 5 is installed.

In addition, the heat dissipation member 120 is provided with an inlet 123 through which the cooling water flows and an outlet 124 through which the cooling water in the heat dissipation member 120 flows out. For example, the inlet 123 is installed at one end in the longitudinal direction of the heat dissipation member 120 , and the outlet 124 is installed at the other end in the longitudinal direction of the heat dissipation member 120 . The heat dissipating member 120 has an inside of the cooling water flow path 21 , the cooling water flows into the heat dissipating member 120 from the inlet 123 , and the cooling water flowing into the heat dissipating member 120 is the heat dissipating member 120 . It is possible to flow out from the outlet 124 through the inner flow passage 121 . The inlet 123 and the outlet 124 are connected to a cooling path having a pump (not shown) that sucks in and sends out cooling water, and a heat exchanger (not shown) such as a radiator that cools the cooling water, whereby the heat dissipation member Cooling water flowing through the flow path 121 in 120 circulates while being cooled by a heat exchanger.

The light source device 1 according to the embodiment is configured as described above, and its operation will be described below. When the light source device 1 is turned on, power is supplied to the pair of power supply units 15 from an external power source. The electric power supplied to the power supply unit 15 is supplied to the light emitting element 5 via the conductive pattern 11 and solder. The light emitting element 5 is lit by the electric power supplied in this way, and irradiates light (hereinafter referred to as ultraviolet light) having a dominant wavelength in the ultraviolet region. The ultraviolet ray irradiated from the light emitting element 5 is irradiated while being diffused from the surface on the side where the light emitting element 5 is provided in the light source device 1, and is irradiated with respect to the irradiated object.

Although the light emitting element 5 is turned on by the electric power supplied in this way, in the light source device 1 which concerns on this embodiment, the some light emitting element 5 is connected in series. For this reason, when the light emitting element 5 is turned on by applying a high voltage, the light emitting element 5 is mounted on the ceramic substrate 110 made of ceramics, so insulation breakdown does not occur and the light emitting element ( 5) can be turned on continuously. That is, when the substrate on which the light emitting element 5 is installed is made of a material having a low withstand voltage such as aluminum, depending on the thickness of the substrate, when a high voltage is applied to the light emitting element 5, insulation breakdown occurs. However, ceramics have high withstand voltage. For this reason, even when a high voltage is applied to the light emitting element 5, insulation breakdown does not occur, and the light emitting element 5 can be turned on and the ultraviolet rays can be continuously irradiated.

In addition, since the light emitting element 5 irradiating ultraviolet light in this way generates heat when it is turned on, in the light source device 1 according to the present embodiment, the temperature increase is suppressed by the heat dissipating member 120 while the light emitting element 5 is heated. ) is turned on. In detail, when the light emitting element 5 is turned on, heat generated in the light emitting element 5 is transferred to the ceramic substrate 110 through the solder 12 or the conductive pattern 11 and from the ceramic substrate 110 . It is also transmitted to the heat dissipation member 120 . The heat transferred to the heat dissipation member 120 is transmitted to the cooling water in the heat dissipation member 120 .

On the other hand, when the light emitting element 5 is turned on, the cooling water flows into the heat dissipation member 120 from the inlet 123 by the driving of a pump installed in the cooling path of the heat dissipating member 120 , and the cooling water in the heat dissipating member 120 . is discharged from the outlet 124 . For this reason, the heat generated in the light emitting device 5 is transferred and the cooling water whose temperature has risen is discharged from the outlet 124 .

The cooling water discharged from the outlet 124 is cooled by heat exchange in a heat exchanger provided in the cooling path. Thereby, the heat generated by the light emitting element 5 is emitted to the outside of the light source device 1 . The cooling water cooled in the heat exchanger flows back into the heat dissipating member 120 from the inlet 123, and receives heat from the light emitting device 5 while flowing through the flow path 121 in the heat dissipating member 120, and the temperature rises and the outlet ( 124). The heat dissipation member 120 emits heat to the outside of the light source device 1 while the cooling water circulates as described above, thereby suppressing an increase in the temperature of the light source device 1 due to the heat generated by the light emitting device 5 . That is, the heat dissipation member 120 cools the light source device 1 . In addition, the cooling medium passing through the flow path 121 in the heat dissipation member 120 is not limited to cooling water, and may be a liquid, for example, a gas such as compressed air or nitrogen gas.

Here, when cooling is performed by the heat dissipating member 120 in this way, dew condensation may occur depending on the environment at the time of use of the light source device 1 or the cooling state of the heat dissipating member 120 . When dew condensation occurs, moisture adheres to the surface of the light source device 1 , but the ceramic substrate 110 is made of an inorganic material, and the conductive pattern 11 is covered with an overcoat 18 . For this reason, even when moisture adheres to the surface of the light source device 1 due to dew condensation, the ceramic substrate 110 and the conductive pattern 11 are less likely to be corroded by the moisture.

In addition, since the heat dissipation member 120 is formed using aluminum, which is a material having high thermal conductivity, although the heat dissipation property is high, rust may occur. The heat dissipation member 120 may rust in this way, but the heat dissipation member 120 is installed in a state where the ceramic substrate 110 made of ceramics is interposed between the light emitting element 5 and the conductive pattern 11 . has been For this reason, even when rust occurs in the heat dissipating member 120 , since it is blocked by the molten ceramic substrate 110 , problems such as insulation breakdown due to rust or corrosion of the electric path in the light source device 1 occur. it's getting harder to do

Moreover, when irradiating an ultraviolet-ray to a to-be-irradiated object and performing a photoreaction or ultraviolet curing, an ultraviolet-ray may be irradiated with respect to the to-be-irradiated object from a short distance. For this reason, even in the light source device 1 according to the present embodiment, when the irradiated object is subjected to photoreaction or ultraviolet curing, the irradiated object may be irradiated with ultraviolet rays from a short distance. In the case of a chemical reaction, substances called impurities are generated. When this impurity adheres to the metal material constituting the heat dissipation member 120, rust is likely to occur from the attached portion, but a ceramic substrate is placed between the heat dissipation member 120 and the target object when irradiated with ultraviolet rays. (110) is located. For this reason, even when impurities are generated by the chemical reaction of the irradiated object, it is suppressed that the impurities reach the heat dissipation member 120, and even in a situation where impurities are likely to be generated by the chemical reaction of the irradiated object, the generation of the impurities It is difficult to generate rust of the heat dissipation member 120 due to the

The light source device 1 according to the above embodiment uses a ceramic substrate 110 as a substrate, and a heat dissipation member 120 for cooling the heat generated when the light emitting element 5 is turned on is formed from the ceramic substrate 110 . is provided on the opposite side of the surface on the side where the light emitting element 5 is installed. Further, the conductive pattern 11 is covered with an overcoat 18 . Thereby, it is possible to suppress corrosion due to moisture in the dew condensation even when dew condensation occurs during cooling while ensuring cooling performance. As a result, the aging deterioration of ultraviolet irradiation performance can be suppressed.

In addition, since the conductive pattern 11 is covered with the overcoat 18, exposure to ultraviolet rays emitted from the light emitting element 5 and reflected from the irradiated object and reaching the conductive pattern 11 can be prevented from being exposed to ultraviolet rays. The aging deterioration of irradiation performance can be suppressed.

In addition, since the ceramic substrate 110 is used for the substrate, which uses ceramics for the substrate, which has high insulating properties and does not need to form a heat conductive layer mainly composed of resin, etc. on the substrate, even when a plurality of light emitting elements 5 are mounted. , it is possible to secure high withstand voltage while maintaining thermal conductivity. Moreover, since ceramics have UV resistance compared with resin, deterioration can be suppressed also in the structure in which an ultraviolet-ray is irradiated to a board|substrate. As a result of these, the aging deterioration of ultraviolet irradiation performance can be suppressed.

In addition, by providing a plurality of light emitting elements 5 with different dominant wavelengths of irradiated light as the light emitting element 5, when the irradiated object undergoes a chemical reaction such as a photoreaction or ultraviolet curing, it can be reacted more reliably. . That is, in the chemical reaction by irradiating ultraviolet rays, the wavelength of light at which a chemical reaction easily occurs may differ depending on the material of the irradiated object. Any material can be used to easily carry out a chemical reaction. As a result, the non-uniformity of the chemical reaction can be suppressed by irradiating the to-be-irradiated object with an ultraviolet-ray.

In addition, although the ceramic substrate 110 is made of an inorganic material, when alumina is used as the base material of the ceramic substrate 110, the ultraviolet rays irradiated from the light emitting element 5 can be reflected with high reflectance, so Research performance can be improved. In addition, when aluminum nitride is used as the base material of the ceramic substrate 110, the heat when the light emitting element 5 is turned on can be transmitted to the heat dissipation member 120 more reliably due to the high thermal conductivity of the aluminum nitride. , the heat dissipation performance can be improved. In addition, even when either alumina or aluminum nitride is used for the base material of the ceramic substrate 110 , when rust occurs in the heat dissipating member 120 , the rust is the light emitting element 5 or conductive pattern in the ceramic substrate 110 . (11) can be prevented from being transmitted to the surface on the installed side. Accordingly, it is possible to more reliably suppress the occurrence of problems such as corrosion in the electrical path of the light source device 1 due to rust generated in the heat dissipating member 120 . As a result, it is possible to suppress the aging deterioration of the ultraviolet irradiation performance.

In addition, since a light emitting element 5 irradiated with light having a dominant wavelength of 240 nm or more and 405 nm or less is used, when a chemical reaction is performed by irradiating an irradiated object with ultraviolet rays, the reaction can be made more reliably. As a result, when the light source device 1 is used as a lighting device for performing a photoreaction or ultraviolet curing with respect to an irradiated object, it is possible to suppress non-uniformity of the chemical reaction.

In addition, since the overcoat 18 reflects most of the ultraviolet rays, it is possible to further suppress the ultraviolet rays from reaching the conductive pattern 11 . As a result, the aging deterioration of the irradiation performance of ultraviolet rays can be suppressed.

In addition, since the overcoat 18 absorbs most of the ultraviolet rays, it is possible to further suppress the ultraviolet rays from reaching the conductive pattern 11 . As a result, the aging deterioration of the irradiation performance of ultraviolet rays can be suppressed.

[Modified Example 1-1]

Further, in the above-described light source device 1 , the light emitting element 5 is directly connected to the conductive pattern 11 by solder 12 , but the light emitting element 5 is not directly connected to the conductive pattern 11 . good. Fig. 2 is a sectional view of a modified example 1-1 of the light source device according to the first embodiment, in which a package is used. The light emitting element 5 is, for example, as shown in FIG. 2, as the package 130, which is integrated with the reflector 32, and uses the package 130 to form a conductive pattern (with solder 12). 11), you may provide in the ceramic substrate 110. Ceramics are used for the package material of the package 130 in which the light emitting element 5 serves as a light source in order to prevent deterioration due to ultraviolet rays. That is, as for the reflector 32, ceramics are used for the base material.

By installing the package 130 in which the light emitting element 5 and the reflector 32 are integrated in this way on the ceramic substrate 110 , the ultraviolet rays when the light emitting element 5 is turned on are emitted from the reflector 32 . It can be reflected and irradiated. Thereby, it can suppress that the ultraviolet-ray irradiated from the light emitting element 5 diffuses too much, and can irradiate efficiently in a desired direction. As a result, the irradiation performance of ultraviolet rays can be improved, and high irradiation performance can be maintained over a long period of time. In addition, since ceramics are used for the package material of the package 130 , the thermal expansion becomes equal to the thermal expansion of the ceramic substrate 110 . As a result, damage to the mounting portion can be reduced, and durability can be improved. In addition, the installation style of the light emitting element 5 is not limited to FIG. That is, although one light emitting device 5 is installed in one package 130 in FIG. 2 , for example, a plurality of light emitting devices 5 having different dominant wavelengths of light irradiated in one package 130 are installed. good to be

The light source devices 1, 1-1, 1-2, 2, 3, 4, 5, 6, 6-1, 6-2 according to Embodiments 2 to 7 and the like described below include a light emitting unit 20, a current It includes an adjustment means 30 , a heat dissipation means 40 , and a control means 70 . The light emitting unit 20 includes a solid light emitting element array 22 having a plurality of solid light emitting elements 23 that are connected in series and arranged on a predetermined line for emitting ultraviolet rays. The light emitting unit 20 is arranged in a plurality of solid light emitting element arrays 22 in a direction intersecting a predetermined line. Two or more current adjusting means 30 are provided, corresponding to one or more solid light emitting element rows 22 of the light emitting unit 20, and the current flowing through the solid light emitting element 23 of the corresponding solid light emitting element row 22 value can be changed. The heat dissipation means 40 flows the fluid in a direction intersecting a predetermined line to generate heat generated by the solid light emitting devices 23 of two or more solid light emitting device rows 22 adjacent in the intersecting direction of the light emitting unit 20 . radiate heat The control means 70 controls the current adjustment means 30 . The control means 70 is connected to the current adjusting means 30 so that the relative illuminance of the ultraviolet rays emitted by the solid light emitting devices 23 of the plurality of solid light emitting device rows 22 are equal. The value of the current flowing through the light emitting element 23 is changed.

In addition, in the light source devices 1, 1-1, 1-2, 2, 3, 4, 5, 6, 6-1, 6-2 according to Embodiments 2 to 7 etc. described below, the light emitting unit 20 is and a temperature detecting means 60 installed at a predetermined position of The value of the current flowing through the solid light emitting element 23 of the solid light emitting element column 22 corresponding to is changed.

In addition, in the light source devices 1, 1-1, 1-2, 2, 3, 4, 5, 6, 6-1, 6-2 according to the second to seventh embodiments described below, the temperature detecting means 60 ), are installed at intervals according to the flow direction of the fluid.

[Embodiment 2]

Next, a light source device 1 according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 3 is a view showing a schematic configuration of an ultraviolet irradiation device including a light source device according to an embodiment, Fig. 4 is a sectional view taken along the line II-II in Fig. 3, and Fig. 5 is a view showing a light emitting part of the light source device according to the embodiment from below. It is a block diagram showing this schematic configuration.

The light source device 1 (hereinafter simply referred to as a light source device) according to the second embodiment constitutes the ultraviolet irradiation device 100 shown in FIG. 3 . The ultraviolet irradiation device 100 is, for example, used in a photoreaction process such as curing, polymerization, and bonding of a liquid crystal panel, and is a device for irradiating an irradiated object W (shown in FIG. 3 ) with ultraviolet rays of a predetermined wavelength.

The ultraviolet irradiation apparatus 100 is provided with the light source apparatus 1 and the stage 10 etc. which arrange|position the to-be-irradiated object W on the placement surface 10a as shown in FIG. In addition, hereafter, the mutually orthogonal direction parallel to the mounting surface 10a is described as an X-axis direction and a Y-axis direction, and the direction orthogonal to the mounting surface 10a is described as a Z-axis direction. The light source device 1 includes a light emitting unit 20, a plurality of current adjusting means 30 (shown in FIG. 5), a heat dissipating means 40, a case body 50, a temperature detecting means 60 and a control means ( 70) is provided.

The light emitting unit 20 includes a mounting substrate 21 (corresponding to a substrate) and a plurality of solid light emitting element arrays 22 as shown in FIGS. 3 and 5 . The mounting substrate 21 is disposed in the X-axis direction and the Y-axis direction, that is, parallel to the arrangement surface 10a. The mounting substrate 21 has a plurality of solid light emitting elements 23 constituting the solid light emitting element array 22 mounted on the surface substrate 21a opposite to the arrangement surface 10a along the Z-axis direction. In the mounting substrate 21, the solid light-emitting elements 23 are arranged on the surface 21a along both the X-axis direction and the Y-axis direction, and are arranged on a plane. The mounting substrate 21 connects the solid light emitting device 23 in a predetermined pattern.

The plurality of solid light emitting device arrays 22 has a plurality of solid light emitting devices 23 mounted on the surface 21a of the mounting substrate 21 . The solid light emitting elements 23 constituting each solid light emitting element row 22 are arranged on a predetermined line on the mounting substrate 21 and on a straight line parallel to the X-axis direction, and an anode and a cathode are connected in series, have. The solid light emitting device 23 emits ultraviolet rays. Power from a series power source 24 (shown in Fig. 5) is supplied to the solid light emitting elements 23 constituting the solid light emitting element array 22. As shown in Figs. In the light emitting unit 20, a plurality of solid light emitting element arrays 22 are arranged in a plurality of lines in a Y-axis direction orthogonal to (intersecting) the X-axis direction as a predetermined line. A plurality of solid-state light emitting element arrays 22 are connected in parallel to each other and connected in parallel to a DC power supply 24 . For this reason, the electric power supplied from the DC power supply 24 flows through the plurality of solid light emitting element arrays 22 as current along the arrow K shown in FIGS. 3 to 5 parallel to the X-axis direction. In this way, the light emitting unit 20 has n (natural number) solid light emitting element rows 22 . That is, the light emitting unit 20 is a solid light emitting element string, and includes a first solid light emitting element string 22 , a second solid light emitting element string 22 , . . . , an n-1th solid light emitting element string 22 and an nth solid light emitting element string 22 .

The solid-state light-emitting device 23 constituting the solid-state light-emitting device array 22 is to emit ultraviolet rays vibrating in all directions evenly, and is composed of a Light Emitting Diode (LED), a Laser Diode (LD), and the like. The solid light emitting device 23 emits ultraviolet rays having a peak wavelength of 240 nm or more and 450 nm or less. In addition, the peak wavelength referred to in the present specification refers to a wavelength of an ultraviolet ray having the strongest relative illuminance among ultraviolet rays emitted by the solid light emitting device 23 . In addition, the relative illuminance referred to in the present invention is an indicator indicating the relative illuminance of ultraviolet rays emitted from the light emitting unit 20 , that is, the solid light emitting device 23 . Relative illuminance can be used as illuminance which normalizes the illuminance measured using so-called illuminance meters, such as the UV-integrated light meter UIT-250 made by Ushio Denki, and the light receiver UVD-S365, for example, and compares it. In addition, the illuminance meter is not limited to the above, For example, you may use UV-MO3A by Okusei Co., Ltd., and UV-SN35 light receiver. The relative illuminance may be, for example, a position where the irradiated object W is placed, by using a light receiving element that receives an ultraviolet ray and outputs an electric signal to relatively detect a change in the ultraviolet ray intensity.

Two or more current adjusting means 30 are provided to correspond to one or more solid light emitting element rows 22 of the light emitting unit 20 . In Embodiment 2, the current adjusting means 30 corresponds to the solid light emitting element string 22 in a one-to-one manner. The current adjusting means 30 is constituted by, for example, a variable resistor whose resistance value can be changed, and is connected in series with a plurality of solid light emitting elements 23 constituting the corresponding solid light emitting element array 22 . The current adjusting means 30 is capable of changing the value of the current flowing through the solid light emitting element 23 of the corresponding solid light emitting element row 22 by changing the resistance value. The current adjusting means 30 may be mounted on the mounting substrate 21 or may be disposed outside the mounting substrate 21 .

The heat dissipation means 40 flows the gas as a fluid along the back surface 21b of the mounting substrate 21 in the Y-axis direction orthogonal (intersecting) to the X-axis direction as a predetermined line, so that the light emitting unit 20 intersects. The heat generated by the solid light emitting elements 23 of the two or more solid light emitting element rows 22 adjacent to the Y-axis direction as a direction to radiate heat to the outside of the light source device 1 . In the second embodiment, the heat dissipating means 40 flows the gas in the Y-axis direction and radiates heat generated by the solid light emitting elements 23 of all the solid light emitting element rows 22 out of the light source device 1 . As shown in FIGS. 3 and 4 , the heat dissipation means 40 includes a heat sink 41 and a heat dissipation fan 42 . The heat sink 41 is attached to the rear surface 21b on the rear surface side of the surface 21a of the mounting substrate 21 of the light emitting unit 20 . The heat sink 41 is made of a material (metal, etc.) having low thermal resistance, such as an aluminum alloy. In this embodiment, the heat sink 41 protrudes in a direction away from the stage 10 from the flat plate-shaped substrate attachment portion 41a attached to the back surface 21b of the mounting substrate 21 and the substrate attachment portion 41a. A plurality of fins 41b are provided integrally. The pins 41b are formed in a flat plate shape protruding from the substrate attaching portion 41a in the Z-axis direction and extending linearly in the Y-axis direction, and are provided in plurality at equal intervals in the X-axis direction.

The heat dissipation fan 42 is attached to one end of the heat sink 41 in the Y-axis direction and rotates to knit the gas as a fluid outside the light source device 1 between the fins 41b of the heat sink 41 and the like, and the fins After flowing between (41b), it is discharged out of the light source device (1). The heat dissipation fan 42 flows the gas between the fins 41b, thereby dissipating heat generated by the solid light emitting device 23 of the solid light emitting device row 22 through the mounting substrate 21, the heat sink 41, and the like, a light source. Dissipate heat outside the device (1).

In addition, in the present invention, the heat dissipation means 40 is attached to the back surface 21b of the mounting substrate 21 and the inside is sealed so that the liquid as a fluid flows inside the box-shaped heat pipe, and the liquid in the heat pipe flows. It may be composed of a pump or the like.

The case body 50 covers the back surface 21b of the mounting substrate 21 and the heat sink 41 of the heat dissipation means 40 . In the present embodiment, the case body 50 is formed in a box shape in which both ends in the Y-axis direction are opened. In the case body 50, when the heat radiation fan 42 of the heat radiation means 40 rotates, the gas as a fluid is knitted through one opening 50a on the side away from the heat radiation fan 42, and the heat radiation fan 42. The gas heated by the heat sink 41 is discharged to the outside from the other opening 50b nearby.

The temperature detecting means 60 is provided at a predetermined position of the light emitting unit 20 and is capable of detecting the temperature of the predetermined position. In the second embodiment, a plurality of temperature detecting means 60 are provided in the light emitting unit 20 at intervals in the Y-axis direction, which is the flow direction of the gas as a fluid by the heat dissipating means 40 . In the second embodiment, the temperature detecting means 60 includes a center in the X-axis direction of the end near one opening 50a of the case body 50 of the surface 21a of the mounting substrate 21, and the surface of the mounting substrate 21 The case body 50 of (21a) is provided at the center of the X-axis direction at the end near the other opening 50b, and two in total are provided. The temperature detection means (60) outputs the detection result to the control means (70).

The control means 70 controls the irradiation operation of ultraviolet rays by the ultraviolet irradiation device 100 . The control means 70 is mainly constituted by a microprocessor (not shown) including an arithmetic processing unit including, for example, a CPU or a ROM, a RAM, etc. It is connected to the operation means used when registering content information and the like.

The control means 70 controls the current adjusting means 30 provided in correspondence with each solid light emitting element string 22 of the light emitting part 20 of the light source device 1 to control the solid state in each solid light emitting element string 22 . The value of the current flowing through the light emitting element 23 is changed. The control means 70 changes the value of the current flowing through the solid light emitting device 23 in each solid light emitting element string 22, Based on the detection result of the temperature detecting means 60, the current value flowing through the solid light emitting element 23 in the solid light emitting element row 22 corresponding to each current adjusting means 30 is changed so that the relative illuminance becomes equal. make it

Next, the processing operation of the irradiated object W of the ultraviolet irradiation apparatus 100 will be described. First, the operator registers the processing content information in the control means 70, and when there is an instruction to start the processing operation, the processing operation is started. When the processing operation is started, the control means 70 operates the heat radiation fan 42 of the heat radiation means 40 of the light source device 1 .

Then, the ultraviolet irradiation device 100 operates the heat dissipation fan 42 of the heat dissipation means 40, and when a predetermined time elapses, the irradiated object W is disposed on the arrangement surface 10a of the stage 10, Ultraviolet rays are emitted from each solid light emitting element 23 of each solid light emitting element row 22 of the light emitting part 20, and the ultraviolet ray is irradiated to the irradiated object W on the arrangement surface 10a. The control means 70 controls the current adjustment means 30 to apply power to each solid light emitting element array 22 . For a certain period of time, the irradiated object W irradiated with ultraviolet rays is separated from the arrangement surface 10a of the stage 10 , and the irradiated object W before ultraviolet irradiation is arranged on the arrangement surface 10a of the stage 10 . . UV rays are irradiated in the same manner as in the above-described process.

In the ultraviolet irradiation apparatus 100 of the present invention, if necessary, a filter or an optical element may be provided between the light source apparatus 1 and the stage 10 .

In the light source device 1 according to the embodiment of the above-described configuration, the control means 70 controls each current so that the relative illuminances of the ultraviolet rays emitted by the solid light emitting elements 23 of the plurality of solid light emitting element rows 22 are equal. The value of the current flowing through the solid light emitting element 23 of the solid light emitting element column 22 corresponding to the adjusting means 30 is changed. For this reason, the light source device 1 can suppress the illuminance nonuniformity of the ultraviolet-ray irradiated to the to-be-irradiated object W. Therefore, the light source device 1 can suppress the non-uniform irradiation of the ultraviolet rays to the irradiated object W. As shown in FIG.

In addition, the light source device 1 is provided with a temperature detecting means 60 for detecting the temperature on the surface 21a of the mounting substrate 21 as a predetermined position of the light emitting part 20, and the control means 70 is the temperature Each current adjustment means 30 is controlled based on the detection result of the detection means 60 . For this reason, the light source device 1 can suppress the illuminance nonuniformity of the ultraviolet-ray irradiated to the to-be-irradiated object W. As shown in FIG. For this reason, the light source device 1 can make the relative illuminance of the ultraviolet rays emitted by the solid light emitting elements 23 of the plurality of solid light emitting element rows 22 to be very equal, and the ultraviolet ray irradiated to the irradiated object W. It is possible to suppress the illuminance unevenness of Therefore, the light source device 1 can suppress the non-uniform irradiation of the ultraviolet rays to the irradiated object W. As shown in FIG.

In addition, a plurality of temperature detecting means 60 are provided in the light source device 1 at intervals along the flow direction of the fluid, so that the solid light emitting element of the solid light emitting element array 22 corresponding to each current adjusting means 30 is provided. The value of the current flowing in (23) can be changed. For this reason, the light source device 1 can make the relative illuminance of the ultraviolet rays emitted by the solid light emitting elements 23 of the plurality of solid light emitting element rows 22 to be very equal, and the ultraviolet ray irradiated to the irradiated object W. It is possible to suppress the illuminance unevenness of Therefore, the light source device 1 can suppress the non-uniform irradiation of the ultraviolet rays to the irradiated object W. As shown in FIG.

In addition, the light source device 1 emits ultraviolet rays having a peak wavelength of 240 nm or more and 450 nm or less of the solid light emitting device 22 , so that non-uniform irradiation of ultraviolet rays to the irradiated object W can be suppressed.

[Modified Example 2-1]

Next, a light source device 1-1 according to Modification 2-1 of Embodiment 2 of the present invention will be described with reference to the drawings. Fig. 6 is a schematic structural block diagram of a schematic configuration of a light source device according to Modification 2-1 of the second embodiment as viewed from below. In FIG. 6, the same parts as those of Embodiment 2 described above are denoted by the same reference numerals, and description thereof is omitted.

The light source device 1-1 according to Modification 2-1 of the second embodiment does not include the temperature detecting means 60 as shown in FIG. In addition, the control means 70 of the light source device 1-1 controls the current adjustment means 30 based on a value stored in advance.

The light source device 1-1 according to the modified example 2-1 of the second embodiment can suppress the unevenness of the illuminance of the ultraviolet ray irradiated to the irradiated object W, similarly to the second embodiment, and It is possible to suppress non-uniform irradiation of ultraviolet rays.

[Modified Example 2-2]

Next, a light source device 1-2 according to Modification 2-2 of Embodiment 2 of the present invention will be described with reference to the drawings. Fig. 7 is a schematic block diagram showing the schematic configuration of a light source device according to Modification 2-2 of the second embodiment as viewed from below. In FIG. 7, the same parts as those of Embodiment 2 described above are denoted by the same reference numerals, and description thereof is omitted.

As shown in FIG. 7, the light source device 1-2 according to Modification 2-2 of the second embodiment includes a temperature detecting means 60 corresponding to each solid light-emitting element string 22. As shown in FIG. That is, in the light source device 1-2 according to Modification Example 2-2, the solid-state light-emitting element string 22 and the temperature detecting means 60 correspond one-to-one, and the corresponding solid-state light-emitting element string 22 and The temperature detecting means 60 is arranged at a position adjacent to it.

The light source device 1-2 according to the modification 2-2 of the second embodiment can suppress the unevenness of the illuminance of the ultraviolet ray irradiated to the irradiated object W, similarly to the second embodiment, and It is possible to suppress non-uniform irradiation of ultraviolet rays.

[Embodiment 3]

Next, a light source device 2 according to a third embodiment of the present invention will be described with reference to the drawings. Fig. 8 is a schematic structural block diagram showing the schematic configuration of the light source device according to the third embodiment as viewed from below. In Fig. 8, the same parts as those of the second embodiment and the like described above are denoted by the same reference numerals, and descriptions thereof are omitted.

As shown in Fig. 8, the light source device 2 according to the third embodiment includes solid light emitting elements 23 in which each solid light emitting element row 22 is connected in series on a plurality of straight lines parallel to the X-axis direction. are placing In addition, although the temperature detection means 60 is abbreviate|omitted in FIG. 8, in Embodiment 3, you may arrange|position the temperature detection means 60 similarly to Embodiment 2 and Modification 2-2.

The light source device 2 according to the third embodiment can suppress uneven illuminance of the ultraviolet ray irradiated to the irradiated object W, and suppresses the non-uniform irradiation of the ultraviolet ray to the irradiated object W, similarly to the second embodiment. can do.

[Embodiment 4]

Next, a light source device 3 according to a fourth embodiment of the present invention will be described with reference to the drawings. Fig. 9 is a schematic block diagram showing the schematic configuration of a light source device according to the fourth embodiment as viewed from below. In Fig. 9, the same parts as those of the second embodiment, the third embodiment, and the like described above are denoted by the same reference numerals, and description thereof is omitted.

As shown in Fig. 9, the light source device 3 according to the fourth embodiment includes solid light emitting elements 23 in which each solid light emitting element row 22 is connected in series on a plurality of straight lines parallel to the X-axis direction. are placing Further, in the fourth embodiment, similarly to the second embodiment, the solid light emitting element rows 22 may be arranged on a single straight line parallel to the X-axis direction. In addition, although the temperature detection means 60 is abbreviate|omitted in FIG. 9, in Embodiment 4, you may arrange|position the temperature detection means 60 similarly to Embodiment 2 and Modification Example 2-2.

Further, in the heat dissipation means 40 of the light source device 3 according to the fourth embodiment, as shown in FIG. 9, fans 43 for sucking gas into the case body 50 are provided at both ends in the Y-axis direction, An exhaust port 44 for discharging gas out of the case body 50 from the center in the Y-axis direction is provided.

The light source device 3 according to the fourth embodiment can suppress uneven illuminance of the ultraviolet ray irradiated to the irradiated object W, and suppresses the non-uniform irradiation of the ultraviolet ray to the irradiated object W, similarly to the second embodiment and the like. can do.

[Embodiment 5]

Next, a light source device 4 according to a fifth embodiment of the present invention will be described with reference to the drawings. Fig. 10 is a schematic structural block diagram of a schematic configuration of a light source device according to a fifth embodiment as viewed from below. In Fig. 10, the same parts as in Embodiment 2 and the like described above are denoted by the same reference numerals, and description thereof is omitted.

In the light source device 4 according to the fifth embodiment, each solid light-emitting element string 22 is formed in a straight line parallel to the X-axis direction, and as shown in FIG. 10, each solid light-emitting element string 22 adjacent to each other. The direction of the current flowing through it is reversed. In addition, although the temperature detection means 60 is abbreviate|omitted in FIG. 10, in Embodiment 5, you may arrange|position the temperature detection means 60 similarly to Embodiment 2 and Modification 2-2. In addition, although the current adjusting means 30 is omitted in FIG. 10, the current adjusting means 30 is provided in correspondence with each solid light emitting element array 22 in the present invention. In addition, in FIG. 10, the control means 70 is abbreviate|omitted.

The light source device 4 according to the fifth embodiment can suppress uneven illuminance of the ultraviolet ray irradiated to the irradiated object W, and suppresses the non-uniform irradiation of the ultraviolet ray to the irradiated object W, similarly to the second embodiment and the like. can do.

[Embodiment 6]

Next, a light source device 5 according to a sixth embodiment of the present invention will be described with reference to the drawings. Fig. 11(a) is a side view of the light source device according to the sixth embodiment, and Fig. 11(b) is a plan view of the schematic configuration of the light source device according to the sixth embodiment as viewed from below. In Fig. 11, the same reference numerals are given to the same parts as in the second embodiment and the like, and descriptions thereof are omitted.

In the light source device 5 according to the sixth embodiment, as shown in Fig. 11(a), a pair of mounting substrates 21 are provided so that the rear surfaces 21b face each other at a distance from each other, and A plurality of solid light emitting element rows 22 parallel to the X-axis direction are provided on the surface 21a. In addition, the case body 50 connects both ends of the mounting substrate 21 in the X-axis direction, and the heat dissipating means 40 flows the gas along the Y-axis direction between the mounting substrates 21 . In addition, although the temperature detection means 60 is abbreviate|omitted in FIG. 11, you may arrange|position the temperature detection means 60 in Embodiment 6 similarly to Embodiment 2 and Modification Example 2-2. In addition, although the current adjusting means 30 is omitted in FIG. 11, the current adjusting means 30 is provided in correspondence with each solid light emitting element array 22 in the present invention. In addition, in FIG. 11, the control means 70 is abbreviate|omitted.

The light source device 5 according to the sixth embodiment can suppress uneven illuminance of the ultraviolet ray irradiated to the irradiated object W in the same manner as in the second embodiment and the like, thereby suppressing the uneven irradiation of the ultraviolet ray to the irradiated object W can

[Embodiment 7]

Next, a light source device 6 according to a seventh embodiment of the present invention will be described with reference to the drawings. Fig. 12 is a side view of an ultraviolet irradiation device having a light source device according to the seventh embodiment, seen from the Y-axis direction, Fig. 13 is a perspective view showing a schematic configuration of the light source device according to the seventh embodiment, and Fig. 14 is the embodiment 7 is a side view of the light source device. Fig. 15 is a perspective view showing a schematic configuration of a light source device according to Modification 2-1 of the seventh embodiment, and Fig. 16 is a perspective view showing a schematic configuration of a light source device according to Modification Example 2-2 of the seventh embodiment. am. In Figs. 12 to 16, the same parts as in Embodiment 2 and the like described above are denoted by the same reference numerals, and description thereof is omitted.

In the light source device 6 according to the seventh embodiment, as shown in Figs. 13 and 14, a plurality of solid-state light emitting element rows 22 are provided on the outer peripheral surface 21a of the mounting substrate 21 having a circular cross section. are doing The solid light emitting element array 22 has a plurality of solid light emitting elements 23 arranged on the periphery as a predetermined line on the outer peripheral surface 21a of the mounting substrate 21 and connected in series. The plurality of solid light emitting element arrays 22 are arranged in a plurality in the Y-axis direction orthogonal to (intersecting) the predetermined line. The heat dissipating means 40 flows a gas as a fluid inside the mounting substrate 21 along the Y-axis direction, and radiates heat generated by the solid heat dissipating element 23 . Further, the temperature detecting means 60 is provided at both ends of the outer peripheral surface 21a of the mounting substrate 21 in the Y-axis direction. Further, the ultraviolet irradiation device 100 provided with the light source device 6 according to the sixth embodiment emits the ultraviolet light emitted by the solid light emitting device 23 of the light source device 6 on the arrangement surface 10a of the stage 10 . A mirror 101 that reflects toward the irradiated object W is provided.

Further, in the light source device 6-1 according to Modification 2-1 of the seventh embodiment, as shown in FIG. 15, a temperature detecting means 60 is provided in correspondence with each solid light emitting element row 22, and the As shown in FIG. 16, the light source device 6-2 according to Modification 2-2 of the 7th mode does not include the temperature detecting means 60. As shown in FIG.

The light source devices 6, 6-1, and 6-2 according to the 7th embodiment, the modified example 2-1, and the modified example 2-2 have non-uniform illuminance of the ultraviolet ray irradiated to the irradiated object W, similarly to the second embodiment and the like. can be suppressed, and non-uniform irradiation of ultraviolet rays to the irradiated object W can be suppressed.

The light source devices 1, 1-1, 1-2, 2, 3, 4, 5, 6, 6-1, 6-2 of the above-described embodiments 2 to 7, etc., include curing, polymerization, bonding, etc. of the liquid crystal panel. It shows an example of configuring the ultraviolet irradiation device 100 used in the photoreaction process of. However, the light source device 1, 1-1, 1-2, 2, 3, 4, 5, 6, 6-1, 6-2 of the present invention is, for example, a semiconductor manufacturing device or a photochemical reaction of a chemical substance, etc. A variety of devices may be configured.

Further, in the above-described embodiments 2 to 6, a plurality of solid light emitting elements 23 connected in series on a straight line parallel to the X-axis direction were arranged to form a solid light emitting element array 22, but the present invention is limited to this it's not going to be For example, a plurality of solid light emitting elements 23 connected in series may be arranged on a circle as a predetermined line to constitute the solid light emitting element array 22 . In this case, it is preferable that the plurality of solid light emitting element arrays 22 are arranged concentrically.

The ultraviolet irradiation apparatuses 301, 3-1, and 3-2 according to the eighth embodiment described below include a light source 310 having a light emitting element 312 emitting ultraviolet rays U, and emission from the light source 310 It has an absorption type polarizing element 320 that transmits the polarized light UA of the polarization axis PA parallel to the predetermined reference direction among the ultraviolet rays U.

Further, in the ultraviolet irradiation apparatuses 301, 3-1, and 3-2 according to the eighth embodiment described below, the light emitting element 312 includes a first light emitting element 314 emitting ultraviolet rays of a first peak wavelength and , a second light emitting device 316 emitting ultraviolet rays having a second peak wavelength different from the first peak wavelength.

Further, between the light sources 310 and 311 and the absorption type polarizing element 320 in the ultraviolet irradiation apparatuses 301, 3-1, and 3-2 according to the eighth embodiment described below, the optical members 14c, 16c, 330, 340).

[Embodiment 8]

Next, an ultraviolet irradiation apparatus 301 according to an eighth embodiment of the present invention will be described with reference to the drawings. Fig. 17 is a perspective view showing the schematic configuration of the ultraviolet irradiation apparatus according to the eighth embodiment, Fig. 18 is a view of the ultraviolet irradiation apparatus according to the eighth embodiment seen from the Y-axis direction, and Fig. 19 is the ultraviolet irradiation apparatus according to the eighth embodiment. A view of the light source 310 in the Z-axis direction.

The ultraviolet irradiation apparatus 301 of the eighth embodiment shown in Fig. 17 has a polarization axis PA parallel to a predetermined reference direction on the surface of the irradiated object W as an object of orientation treatment (shown by an arrow in Fig. 17, It is a device for irradiating polarized light (UA) in the direction of vibration). The ultraviolet irradiation device 301 of the embodiment is used for, for example, production of an alignment film of a liquid crystal panel, an alignment film of a viewing angle compensation film, a polarizing film, and the like. The ultraviolet irradiation device 301 mainly irradiates polarized light UA having a wavelength of 365 (nm) as a desired wavelength to the surface of the irradiated object W. In addition, "ultraviolet rays" as used in this embodiment means light in the wavelength range from 240 (nm) to 450 (nm), for example.

In addition, the polarization axis PA of the polarized light UA irradiated to the surface of the irradiated object W is appropriately set according to the structure, use, or required specification of the irradiated object W. As shown in FIG. Hereinafter, the width direction of the irradiated object W is referred to as the X-axis direction, orthogonal to the X-axis direction, and the longitudinal direction of the irradiated object W is referred to as the Y-axis direction, and the Y-axis direction and the direction orthogonal to the X-axis direction. is called the Z-axis direction. In addition, with respect to the direction parallel to the Z-axis, the direction toward the tip of the arrow indicating the Z-axis direction is called upward, and the direction opposite to the direction toward the tip of the arrow indicating the Z-axis direction is called downward.

As shown in FIG. 17, the ultraviolet irradiation device 301 includes a light source 310 having a light emitting element 312 that evenly vibrates in all directions and emits ultraviolet rays U having a wavelength of about 365 (nm); It has an absorption type polarizer 320 .

The light source 310 is a light emitting device 312 is used. The ultraviolet ray U emitted by the light source 310 includes ultraviolet rays having a wavelength of about 365 (nm) and has various polarization axis components, so-called unpolarized light. In the present embodiment, one light source 310 is provided, and is disposed above the absorption type polarizing element 320 and the irradiated object W. As shown in FIG.

The absorption type polarizer 320 is irradiated with ultraviolet (U) emitted from the light source 310 . The absorption-type polarizing element 320 transmits polarized light (ultraviolet ray UA) of the polarization axis PA parallel to the reference direction in the ultraviolet ray U toward the irradiated object W. As shown in FIG. That is, the absorption type polarizer 320 extracts the polarized light UA of the polarization axis PA which vibrates only in the reference direction from the ultraviolet light U having the polarization axis PA. In addition, the polarized light UA of the polarization axis PA vibrated only in the reference direction is generally called linearly polarized light. In addition, the polarization axis PA of the polarized light UA is the vibration direction of the electric field and the magnetic field of the said polarized light UA.

In the eighth embodiment, the absorption type polarizing element 320 is provided below the light source 310 and above the surface of the irradiated object W. As shown in FIG. The absorption-type polarizing element 320 is formed of metal nanoparticles arranged in a predetermined direction included in the glass plate, and absorbs the ultraviolet rays of the polarization axis crossing the reference direction among the ultraviolet rays (U) emitted from the light source 310, and the reference It is a polarizing element that transmits the polarized light UA of the polarization axis PA parallel to the direction. As the absorption type polarizing element 320, for example, colorpol (registered trademark) UV375BC5 manufactured by CODIXX can be used.

Next, the light source 310 will be described in detail with reference to FIGS. 18 and 19 .

In the ultraviolet irradiation apparatus 301 according to the eighth embodiment, the light source 310 is configured by providing a plurality of light emitting elements 312 on a base 311 . The base 311 supports the plurality of light emitting devices 312 . In addition, the gas 311 suppresses the temperature rise of the plurality of light emitting devices 312 by transferring heat emitted from the plurality of light emitting devices 312 to the outside of the ultraviolet irradiation device 301 . In addition, the base 311 may be made of a material having good heat dissipation, such as a metal such as aluminum or a ceramic substrate. In addition, a heat dissipation medium passage through which a heat dissipation medium (not shown) for rapidly transferring heat emitted from the plurality of light emitting elements 312 may be provided inside the base 311 . Further, the heat dissipation medium may include a heat dissipation medium supply port for supplying a heat dissipation medium (not shown) and a heat dissipation medium discharge port for discharging the heat dissipation medium. In addition, the heat radiation medium may be circulated by a circulation mechanism (not shown).

The light emitting device 312 is installed on the base 311 and emits ultraviolet (U). The light emitting element 312 emits at least ultraviolet (U) and is made of a semiconductor such as a light emitting diode (LED) or a laser diode (LD). The light emitting device 312 includes a first light emitting device 314 emitting an ultraviolet ray having a first peak wavelength and a second light emitting device 316 emitting an ultraviolet ray having a second peak wavelength different from the first peak wavelength. The first light emitting device 314 is formed to surround the light emitting chip 14a that emits ultraviolet light of a first peak wavelength, and has a reflector 14b having an opening portion. The periphery of the light emitting chip 14a and the opening portion of the reflector 14b where the light emitting chip 14a is disposed are sealed with a glass cover (not shown). The second light emitting device 316 is formed to surround the light emitting chip 16a emitting ultraviolet rays of the second peak wavelength, and has a reflector 16b having an opening portion. The periphery of the light emitting chip 16a and the opening portion of the reflector 16b in which the light emitting chip 16a is disposed are sealed with a glass cover (not shown). The light emitting device 312 emits ultraviolet (U) by mixing ultraviolet rays of a first peak wavelength emitted from the first light emitting device 314 and ultraviolet rays of a second peak wavelength emitted from the second light emitting device 316 .

Next, the operation of the ultraviolet irradiation device 301 according to the eighth embodiment will be described. The ultraviolet irradiation device 301 according to the embodiment of the above-described configuration places the irradiated object W under the absorption-type polarizing element 320 , and emits the ultraviolet light U from the light source 310 . Then, the ultraviolet (U) emitted from the light source 310 is directly emitted toward the absorption type polarizer 320 . In addition, the ultraviolet irradiation device 301 directs the polarized light UA of the polarization axis PA parallel to the reference direction in the ultraviolet light U toward the light irradiation area of the surface of the object W by the absorption type polarizing element 320 . It penetrates, and an orientation treatment of the surface of the irradiated object W is performed.

When a wire grid type polarizing element is used in the ultraviolet irradiation apparatus 301 according to the embodiment of the above-described configuration, there are so-called front and back sides of a surface on which the wire grid is formed and a surface on which the wire grid is not formed, and the front and back sides of the wire grid polarizer are provided. The extinction ratio is changed by However, since the metal nanoparticles formed inside the absorption type polarizer 320 absorb light vibrated in a direction other than the reference direction, the absorption type polarizer 320 does not have a so-called front and back side like the wire grid polarizer, so it is easy to handle. .

In addition, in the ultraviolet irradiation device 301 , the light source 310 emits only ultraviolet rays of a first peak wavelength and ultraviolet rays of a second peak wavelength, and emits light other than ultraviolet rays of the first peak wavelength and ultraviolet rays of the second peak wavelength. I never do that. That is, it is regulated that light other than ultraviolet (U) is irradiated to the absorption type polarizing element 320 . For this reason, the ultraviolet irradiation device 301 can reduce the amount of light absorbed by the absorption-type polarizing element 320 , specifically, the amount of light absorbed by the metal nanoparticles formed inside the absorption-type polarizing element 320 . If the amount of light absorbed by the metal nanoparticles can be reduced, the temperature rise of the absorptive polarizing element 320 is suppressed, and the possibility that the absorptive polarizing element 320 becomes high temperature is lowered, for example, an absorptive polarized light. It is possible to suppress problems such as damage to the element 320 . Therefore, the ultraviolet irradiation device 301 can suppress problems such as damage to the absorption-type polarizing element 320 even when the absorption-type polarizing element 320 is used.

In addition, in the ultraviolet irradiation device 301 , the absorption-type polarizing element 320 is irradiated with ultraviolet (U) and light of a wavelength other than ultraviolet (U) is regulated, so the absorption-type polarizing element 320 is subjected to ultraviolet rays. It is possible to suppress a decrease in the extinction ratio of the absorption-type polarizing element 320 compared to the case where light other than (U) is irradiated. In addition, the extinction ratio (ER) is a numerical value indicating the quality of polarization, and is expressed as ER=Ip/Is using the P polarization intensity (Ip) and the S polarization intensity (Is).

The ultraviolet irradiation device 301 may suppress irradiation of light other than ultraviolet rays of the first peak wavelength and ultraviolet rays of the second peak wavelength to the absorption type polarizing element 320 . That is, the ultraviolet irradiation device 301 suppresses long-wavelength ultraviolet rays, visible rays, and infrared rays from being irradiated to the absorption-type polarizing element 320 , so that the long-wavelength ultraviolet rays, visible rays, and infrared rays are applied to the absorption-type polarizing element 320 . irradiation can be suppressed. Therefore, the ultraviolet irradiation device 301 can suppress deterioration of the absorption-type polarizing element of the absorption-type polarizing element 320 .

In addition, since the ultraviolet irradiation device 301 uses a light emitting element 312 having a first light emitting element 314 and a second light emitting element 316 emitting ultraviolet rays of a first peak wavelength as the light source 310, the absorption While suppressing a decrease in the lifetime and extinction ratio of the type polarizing element 320, a sufficient amount of ultraviolet (U) can be irradiated to the irradiated object W, and the time required for irradiating light to the object can be suppressed.

In addition, the ultraviolet irradiation device 301 uses a first light emitting element emitting an ultraviolet ray of a first peak wavelength and a second light emitting element emitting an ultraviolet ray of a second peak wavelength, thereby emitting an ultraviolet ray of a single peak wavelength. The energy given to the irradiated object is further improved compared to the case where only the element is used.

In addition, since the dominant wavelength of the light emitted from the light emitting element 312 is 240 to 450 nm, the ultraviolet irradiation can be performed more reliably on the irradiated object, and the non-uniformity of the photochemical reaction of the irradiated object can be suppressed.

In addition, the light emitting device 312 is not limited to the above configuration. For example, the first light emitting chip 14a constituting the first light emitting device 314 and the second light emitting chip 16a constituting the second light emitting device 316 are accommodated in the same reflector 14a to emit light. It may be configured as the element 314 .

In addition, the absorption type polarizer 320 is not limited to the above configuration. For example, a plurality of absorption-type polarizing elements 320 may be stacked to form an integrated absorption-type polarizing element 320 .

[Embodiment 9]

20 is a side view showing a schematic configuration of a modification of the ultraviolet irradiation apparatus according to the ninth embodiment.

In this embodiment, an ultraviolet irradiation device 3-1 having a lens 14c, a lens 16c, and a lens 330 as optical members between the light source 310 and the absorption type polarizing element 320 is shown.

The lens 14c is installed in contact with the reflector 14b of the first light emitting device 314 and arranges the direction of light emitted from the first light emitting device 314 . In addition, the lens 16c is installed in contact with the reflector 16b of the second light emitting device 316 , and the direction of light emitted from the second light emitting device 316 is arranged. The lens 14c and the lens 16c are made of, for example, a material such as quartz glass that transmits ultraviolet rays emitted from the first light emitting chip 14a and the second light emitting chip 16a.

The lens 330 aligns the light emitted from the first light emitting element 314 and the second light emitting element 316, and functions as a so-called collimator lens. The lens 330 is installed in the vicinity of the absorption type polarizing element 320 , and arranges the direction of light emitted from the light source 310 . Like the lens 14c and the lens 16c, the lens 330 is made of, for example, a material such as quartz glass that transmits the ultraviolet (U) emitted from the light source 310 .

Even with such a structure, deterioration of an absorption type polarizing element can be suppressed similarly to Embodiment 8.

In addition, by providing an optical member between the light source 310 and the absorbing polarizing element 320, the direction of the ultraviolet (U) can be arranged until it reaches the absorbing polarizing element 320, so when installing the optical member In contrast, deterioration of the polarization axis and extinction ratio of the irradiated object can be suppressed.

Fig. 21 is a side view showing a schematic configuration of another modified example of the ultraviolet irradiation apparatus according to the ninth embodiment.

In this modified example, the ultraviolet irradiation device 3-2 in which the wire grid polarizer 340 is installed between the light source 310 and the absorption type polarizer 320 is shown. Even with such a structure, it becomes possible to suppress the deterioration of an extinction ratio similarly to Embodiment 9.

In addition, by using the wire grid polarizer 340, the amount of unpolarized ultraviolet (U) light can be reduced, so that the amount of unwanted ultraviolet light (U) reaching the absorption type polarizer 320 can be reduced. As a result, deterioration of the absorption-type polarizing element can be further suppressed.

Although several embodiments of the present invention have been described, these embodiments have been presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in other various forms, and various abbreviations, substitutions, and changes can be implemented in the range which does not deviate from the summary of invention. These embodiments and their modifications are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

1, 1-1, 1-2, 2, 3, 4, 5, 6, 6-1, 6-2: light source device
5: light emitting element 10: stage
11: Conductive pattern 12: Solder
15: feeding unit 18: overcoat
20: light emitting part 21: mounting board (board)
22: solid light emitting element row 23: solid light emitting element
30: current adjustment means 32: reflector
40: heat dissipation means 60: temperature detection means 70: control means 110: ceramic substrate
120: heat dissipation member 121: flow path 123: inlet 124: outlet 130: package
301, 3-1, 3-2: ultraviolet irradiation device 310: light source
311: base 312: light emitting element
314: first light emitting device 316: second light emitting device
320: absorption type polarizing element 330: optical member
340: wire grid polarizer U: ultraviolet
UA: ultraviolet (polarized light) PA: polarization axis W: irradiated object (object)

Claims (10)

a light emitting device emitting light having a dominant wavelength in the ultraviolet region;
a ceramic substrate on which the light emitting element is installed on one side of the substrate and is made of ceramics, and a conductive pattern made of a conductor and an overcoat covering at least the conductive pattern are formed on the surface of the side on which the light emitting element is installed; and
and a heat dissipation member provided on the opposite side of the surface of the ceramic substrate on the side on which the light emitting element is installed, made of a metal material, and having a flow path through which a cooling medium passes therein. The method of claim 1,
The light emitting device is a light source device, in which a plurality of the light emitting devices having different dominant wavelengths of irradiated light are installed. 3. The method according to claim 1 or 2,
The ceramic substrate is a light source device, in which alumina or aluminum nitride is used as a substrate. 3. The method according to claim 1 or 2,
The overcoat reflects ultraviolet rays, a light source device. 3. The method according to claim 1 or 2,
The overcoat absorbs ultraviolet rays, a light source device. a light emitting unit in which a plurality of solid light emitting element rows connected in series and having a plurality of solid light emitting elements emitting ultraviolet rays, which are arranged on a predetermined line, are arranged in a direction intersecting the predetermined line and arranged on a substrate;
two or more current adjusting means corresponding to the one or more solid light emitting element rows of the light emitting part and capable of changing the current values flowing through the solid light emitting elements of the corresponding solid light emitting element rows;
A plurality of substrate attachment portions to which the substrate is attached, protruding in a direction away from the substrate attachment portion and extending in a direction intersecting a predetermined line, spanning two or more solid light emitting device rows adjacent to the intersecting direction of the light emitting portion a heat sink having fins of a heat sink to flow a fluid passing between the plurality of fins from an upstream side to a downstream side of the plurality of fins in a direction intersecting the predetermined line along between the plurality of fins A fan is disposed, the fluid flows in a direction intersecting the predetermined line, and heat generated by the solid light emitting devices of the two or more solid light emitting device rows adjacent to the intersecting direction of the light emitting unit is generated by the plurality of fins a heat dissipating means for dissipating heat through; and
a control means for controlling the current adjustment means;
wherein the control means changes the current value flowing through the solid light emitting device of the solid light emitting device string to the current adjusting means so that the relative illuminance of the ultraviolet light emitted by the solid light emitting device of the plurality of solid light emitting device rows becomes equal, light source device. 7. The method of claim 6,
a temperature detection means provided at a predetermined position of the light emitting unit and capable of detecting a temperature of the predetermined position;
and said control means causes said current adjusting means to change a value of a current flowing through said solid light emitting element in said column of solid light emitting elements based on a detection result of said temperature detecting means. 8. The method of claim 7,
and a plurality of the temperature detecting means are provided at intervals along the flow direction of the fluid. delete delete

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