TWI716451B - Ultraviolet radiation module and ultraviolet radiation device - Google Patents

Abstract

The invention provides an ultraviolet radiation module and an ultraviolet radiation device. The ultraviolet irradiation module includes: a frame body, one of which is open at one end; a light-emitting part, which is arranged inside the frame body close to the opening, and has a substrate and a light-emitting element; And a heat sink, which is provided inside the frame on the side of the substrate opposite to the side of the opening, and has a base and a plurality of fins, and the plurality of fins is at the end of the base and the side of the opening on the opposite side Department arrangement. The frame has a plurality of holes arranged along the arrangement direction of the plurality of fins on a surface in a direction orthogonal to the arrangement direction of the plurality of fins. The position of the end of the hole on the side of the opening is near the position of the end of the base on the opposite side to the side of the opening.

Description

Ultraviolet radiation module and ultraviolet radiation device

The invention relates to an ultraviolet irradiation module and an ultraviolet irradiation device.

Curing, drying, modification, etc. are performed by irradiating the resin or ink applied on the work with ultraviolet rays.

As a light source for irradiating ultraviolet rays, high-pressure mercury lamps or metal halide lamps are used.

In recent years, light-emitting diodes that irradiate ultraviolet rays are gradually replacing high-pressure mercury lamps or metal halide lamps.

If a light-emitting diode is used, compared with a high-pressure mercury lamp or the like, it is possible to achieve longer life, lower power consumption, and downsizing.

However, the output of light-emitting diodes will decrease with temperature rise. Moreover, if the light-emitting diode exceeds the specified temperature, its life will be shortened.

Therefore, in the case of using light-emitting diodes, the parts need to be cooled.

Here, if a water-cooled cooling component is used for the cooling of the light-emitting diode, there is a problem that auxiliary equipment is required, or liquid leakage measures must be taken, or the ultraviolet radiation module will be enlarged.

On the other hand, if the cooling part of the air cooling method is used for the cooling of the light emitting diode, these problems can be solved.

However, the air cooling method has the problem of lower cooling efficiency compared with the water cooling method. Moreover, in the case of an ultraviolet irradiation device with a plurality of ultraviolet irradiation modules, the cooling efficiency may decrease due to the exhaust or intake of the adjacent ultraviolet irradiation modules.

Therefore, it is desired to develop a technology that can improve cooling efficiency even with air cooling.

[Prior Art Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Registration No. 3194269 Gazette

[Problems to be solved by the present invention]

The problem to be solved by the present invention is to provide an ultraviolet irradiation module and an ultraviolet irradiation device that can improve cooling efficiency. If a light-emitting diode is used, compared with a high-pressure mercury lamp or the like, it is possible to achieve longer life, lower power consumption, and downsizing.

[Technical means to solve the problem]

The ultraviolet radiation module of the embodiment includes: a frame body with one end opening; a light-emitting part, which is arranged inside the frame body close to the opening, and has a substrate and a light-emitting element, and the light-emitting element is arranged on the The surface of the substrate on the side of the opening is irradiated with ultraviolet rays; and a heat dissipation portion is provided inside the frame on the side of the substrate opposite to the side of the opening, and has a base and a plurality of fins, the A plurality of fins are arranged side by side at the end of the base portion opposite to the opening side.

The frame body has a plurality of holes arranged along the arrangement direction of the plurality of fins on a surface in a direction orthogonal to the arrangement direction of the plurality of fins.

When the surface is viewed from a direction perpendicular to the surface on which the hole is provided, the position of the end of the hole on the opening side is located at the end of the base on the opposite side to the opening side The location nearby.

The ultraviolet irradiation device of the embodiment includes a plurality of the ultraviolet irradiation modules, and the plurality of ultraviolet irradiation modules are along the arrangement direction of the plurality of holes and a direction orthogonal to the arrangement direction of the plurality of holes And arrange the settings.

[Effects of the invention]

According to the embodiments of the present invention, it is possible to provide an ultraviolet irradiation module and an ultraviolet irradiation device capable of improving cooling efficiency. However, the output of light-emitting diodes will decrease with temperature rise. Moreover, if the light-emitting diode exceeds the specified temperature, its life will be shortened.

Embodiments of the present invention is an ultraviolet radiation module, which includes: a frame body with one end opening; a light-emitting part, which is provided inside the frame body close to the opening, and has a substrate and a light-emitting element. A light emitting element is provided on the surface of the substrate on the side of the opening and irradiates ultraviolet rays; and a heat sink is provided inside the frame on the side of the substrate opposite to the side of the opening, and has a base and multiple The plurality of fins are arranged side by side at the end of the base that is opposite to the opening side.

The frame body has a plurality of holes arranged along the arrangement direction of the plurality of fins on a surface in a direction orthogonal to the arrangement direction of the plurality of fins.

When the surface is viewed from a direction perpendicular to the surface on which the hole is provided, the position of the end of the hole on the opening side is located at the end of the base on the opposite side to the opening side The location nearby.

According to this ultraviolet irradiation module, cooling efficiency can be improved.

Furthermore, when the surface is viewed from a direction perpendicular to the surface on which the hole is provided, the hole can be located between the fins.

In this way, it is possible to prevent the gas that has passed through the hole from flowing outside the fin and the space between the fins.

Therefore, the cooling efficiency can be improved.

Furthermore, the present invention of an embodiment is an ultraviolet irradiation device including a plurality of the ultraviolet irradiation modules.

The plurality of ultraviolet irradiation modules are arranged along the arrangement direction of the plurality of holes and a direction orthogonal to the arrangement direction of the plurality of holes.

According to this ultraviolet irradiation device, adjacent ultraviolet irradiation modules do not compete with each other for the inhaled gas (the gas located between the ultraviolet irradiation modules), and the exhaust does not interfere, so the ultraviolet irradiation module 1 can be stably The inside is cooled.

Therefore, the decrease in cooling efficiency can be suppressed.

Moreover, according to the ultraviolet irradiation device, the distance between the ultraviolet irradiation modules can be shortened, so that the illuminance distribution on the workpiece can be uniformized.

Hereinafter, embodiments will be illustrated with reference to the drawings. In addition, in the drawings, the same components are denoted by the same symbols, and detailed descriptions are appropriately omitted.

FIG. 1 is a schematic perspective view for illustrating an ultraviolet irradiation module 1 of this embodiment.

As shown in FIG. 1, in the ultraviolet irradiation module 1, a housing 2, a light-emitting part 3, a heat dissipation part 4, a window part 5, a ventilation device 6 and a connector 7 are provided.

The appearance of the frame 2 can be a rectangular parallelepiped or a cube. If the frame 2 having such a form is adopted, a plurality of ultraviolet irradiation modules 1 can be installed close to each other.

A space is provided inside the frame 2.

At one end of the frame body 2, an opening 2b is provided. At the other end of the frame body 2, a top plate portion 2c is provided. The top plate 2c faces the opening 2b.

In addition, a plurality of holes 21 are provided on the side surface 2a of the frame 2.

In addition, the details of the hole 21 will be described later.

The material of the frame 2 is not particularly limited, but it is preferably formed of a material with high thermal conductivity.

For example, the material of the frame 2 can be metal or the like.

If the frame 2 is formed of a material with high thermal conductivity, the heat generated in the light-emitting portion 3 can be efficiently discharged to the outside of the ultraviolet irradiation module 1.

The light emitting unit 3 is provided inside the housing 2. The light emitting part 3 is provided close to the opening 2b of the housing 2.

The light emitting unit 3 has a substrate 31 and a light emitting element 32.

The substrate 31 is provided inside the frame 2. The substrate 31 can be screwed to the inside of the frame 2, for example.

The substrate 31 has a plate shape.

The material of the substrate 31 may be a material suitable for heat dissipation. For example, the substrate 31 may be formed of inorganic materials (ceramics) such as alumina or aluminum nitride, organic materials such as paper phenol or glass epoxy, metals such as copper, and the like. Moreover, the substrate 31 may also be formed of a material obtained by covering the surface of a metal plate with an insulating material. In addition, in the case of covering the surface of the metal plate with an insulating material, the insulating material may include organic materials or inorganic materials.

In the case where the amount of heat generated by the light emitting element 32 is large, it is preferable to use a material with high thermal conductivity to form the substrate 31 from the viewpoint of heat dissipation. Examples of materials with high thermal conductivity include ceramics such as alumina or aluminum nitride, highly thermally conductive resins, and materials obtained by covering the surface of a metal plate with an insulating material.

In addition, the highly thermally conductive resin may be a material obtained by mixing fibers or particles containing alumina and the like with a resin such as polyethylene terephthalate (PET) or nylon (nylon).

Furthermore, the substrate 31 may be a single layer or multiple layers.

Furthermore, on the surface of the substrate 31, a wiring pattern (not shown) is provided. The wiring pattern can be formed of, for example, a metal such as silver alloy or copper alloy.

A plurality of light-emitting elements 32 are provided on the surface of the substrate 31 on the side of the opening 2 b of the frame 2 (side of the window 5 ).

The light emitting surface of the light emitting element 32 faces the opening 2b of the frame 2 so that ultraviolet rays can be irradiated from the opening 2b of the frame 2 to the outside.

The number or arrangement form of the light-emitting elements 32 are not limited to those illustrated, and can be appropriately changed according to the size, shape, and use of the ultraviolet irradiation module 1.

The light-emitting element 32 is not particularly limited as long as it can irradiate ultraviolet rays.

The light-emitting element 32 can be, for example, a light-emitting diode, a laser diode, or the like.

The light emitting element 32 is electrically connected to the wiring pattern.

The light-emitting element 32 may be electrically connected to the wiring pattern using, for example, a chip on board (COB) method.

At this time, the electrode (not shown) provided on the lower surface of the light-emitting element 32 can be electrically connected to the wiring pattern via a conductive thermosetting material such as silver paste. The electrode (not shown) provided on the upper surface of the light-emitting element 32 can be electrically connected to the wiring pattern via wiring.

In addition, a sealing portion covering the light-emitting element 32 and wiring may be provided. The sealing part may be formed of, for example, a resin that transmits ultraviolet rays. The sealing part can be formed using a dispenser etc., for example.

Furthermore, as the light-emitting element 32, for example, a surface-mounted light-emitting element can be used. In the case of the surface-mounted light-emitting element 32, it can be electrically connected to the wiring pattern through leads exposed outside the package.

Moreover, the packaging form of the light-emitting element 32 may be, for example, a chip size package (CSP). At this time, the light-emitting element 32 may be mounted on the wiring pattern in a flip chip manner.

The heat sink 4 is provided inside the frame 2. The heat sink 4 is provided on the side of the substrate 31 opposite to the opening 2b side.

The heat sink 4 has a base 41 and fins 42.

The base 41 has a plate shape. The base 41 is in contact with the surface of the substrate 31 on the opposite side to the light-emitting element 32 side.

In addition, a layer 8 containing silicone grease may be provided between the base 41 and the substrate 31 (refer to FIG. 2). If the layer 8 containing silicone grease is provided, the adhesion between the base portion 41 and the substrate 31 can be improved, and therefore the heat conduction between the light emitting portion 3 and the heat dissipation portion 4 can be improved. Therefore, the cooling effect of the heat sink 4 can be improved.

The planar shape of the base 41 can be the same as the planar shape of the substrate 31. The size of the base 41 in a plan view can be the same as or slightly larger than the size of the substrate 31.

The fins 42 are arranged side by side at the end 41a of the base 41 on the side opposite to the opening 2b side.

The fin 42 extends toward the top plate portion 2c inside the frame 2.

A plurality of fins 42 are provided along the side of the base 41. In the case where the planar shape of the base 41 is rectangular, a plurality of fins 42 may be arranged along the long side of the base 41.

At this time, if the gap between the fin 42 and the fin 42 is too narrow, the ventilation may be hindered and the cooling effect may decrease.

If the gap between the fin 42 and the fin 42 is too wide, the flow rate of the gas may slow down, resulting in reduced cooling effect. In addition, "gas" generally refers to air.

According to the findings obtained by the inventors, if the space between the fin 42 and the fin 42 is 3 mm or more and 10 mm or less, the cooling effect can be improved.

The plurality of fins 42 may be arranged at equal intervals, or may be arranged at different intervals according to the location.

For example, depending on the arrangement form of the light-emitting element 32, etc., the interval between the fins 42 provided in the area can be narrowed without generating a high temperature area.

As long as the necessary rigidity can be ensured, the thickness of the fin 42 is not particularly limited.

For example, when the material of the fin 42 is aluminum, the thickness of the fin 42 can be set to about 1 mm.

The height dimension of the fin 42 can be appropriately changed according to the calorific value of the light emitting element 32, the size or use of the ultraviolet radiation module 1, and the like.

The height dimension of the fin 42 can be set to about 30 mm, for example.

The base 41 and the fin 42 may be integrally formed, or independently formed ones may be joined.

The materials of the base 41 and the fins 42 are not particularly limited as long as the thermal conductivity is high.

The materials of the base 41 and the fins 42 can be, for example, metals such as aluminum, aluminum alloys, copper, and copper alloys, ceramics such as aluminum oxide or aluminum nitride, and high thermal conductivity resins.

In addition, when the base 41 and the fins 42 are formed independently, the base 41 and the fins 42 may be formed of the same material or different materials.

The window 5 closes the opening 2b of the frame 2. The window 5 can be screwed to the opening 2b of the frame 2, for example.

The window 5 has a plate shape.

The material of the window 5 is not particularly limited as long as it is transparent to ultraviolet rays irradiated from the light-emitting element 32.

The material of the window 5 can be, for example, ultraviolet transmitting glass (ultraviolet transmitting glass), acrylic resin, or the like.

In addition, the fixing method of the window part 5 is not limited to the above. For example, the window 5 may be fixed by providing a spacer (not shown) on the base 41 and sandwiching the window 5 between the spacer and the frame 2.

The ventilation device 6 is provided on the top plate portion 2c of the frame 2. The ventilation device 6 can be screwed to the top plate portion 2c. A hole is provided in the top plate portion 2c where the ventilation device 6 is installed, and ventilation can be performed through the hole.

The form of the ventilator 6 is not particularly limited. If an axial fan (fan) is used, the size of the ultraviolet irradiation module 1 can be reduced.

The axial flow fan sucks gas in the axial direction and discharges the gas in the axial direction.

The number of the ventilating device 6 is not particularly limited, and can be appropriately changed according to the capacity of the ventilating device 6 and the size or use of the ultraviolet irradiation module 1.

In other words, one or more ventilation devices 6 may be installed.

When a plurality of ventilating devices 6 are provided, the ventilating devices 6 may be installed at equal intervals, or may be installed at different intervals according to the location.

For example, depending on the arrangement form of the light-emitting elements 32, etc., the interval between the ventilation devices 6 provided in the area can be narrowed without generating a high temperature area.

Furthermore, in the ventilation device 6, a filter 6a may be provided.

At this time, the filter 6a can be provided at at least any of the air inlet and the air outlet of the ventilation device 6.

If the filter 6a is provided, it can be made into an ultraviolet radiation module 1 that can be used even in a contaminated environment.

Since the ventilation device 6 exhausts the inside of the frame 2, the filter 6a can prevent the dust located inside the frame 2 from spreading to the outside.

Therefore, it is possible to manufacture the ultraviolet irradiation module 1 that can be used even in a clean environment such as a clean room.

Moreover, if the ventilation device 6 is installed in the top plate part 2c, the some ultraviolet irradiation module 1 can be installed close.

Furthermore, although the case where the ventilation device 6 is directly provided in the top plate part 2c is exemplified, the ventilation device 6 and the frame 2 may be connected via a duct, a hose, or the like.

At this time, a common ventilation device 6 can also be provided for a plurality of ultraviolet irradiation modules 1.

The connector 7 is provided on the top plate portion 2c of the housing 2.

The light emitting element 32 and the ventilating device 6 are electrically connected to the connector 7 via wiring not shown. The wiring not shown in the figure is provided inside the frame 2.

Furthermore, a power supply or a control device (not shown) provided outside the ultraviolet irradiation module 1 is electrically connected to the connector 7.

In addition, although the case where the connector 7 is provided in the top plate part 2c is illustrated, the attachment position of the connector 7 can be changed suitably.

For example, the connector 7 may be provided on the side surface 2a of the frame 2 or the like.

However, if the connector 7 is provided in the top plate portion 2c, the plurality of ultraviolet irradiation modules 1 can be installed close to each other.

Next, the hole 21 provided in the frame 2 is further explained.

FIG. 2 is a schematic diagram for illustrating the hole 21.

In addition, FIG. 2 is a schematic enlarged view of part A in FIG. 1.

As shown in FIG. 2, the plurality of holes 21 are provided on the side surface 2a of the frame 2 in the direction orthogonal to the arrangement direction of the plurality of fins 42.

The plurality of holes 21 are arranged along the arrangement direction of the plurality of fins 42.

In addition, the hole 21 may be provided on the side surface 2a on both sides of the frame 2 or on the side surface 2a of one side of the frame 2.

The hole 21 extends toward the top plate portion 2c of the frame 2.

The shape of the hole 21 is not particularly limited. The shape of the hole 21 may be rectangular, for example.

The gas located outside the frame 2 is supplied to the inside of the frame 2 through the hole 21.

That is, the hole 21 is a vent hole.

At this time, the hole 21 is provided on the side surface 2a of the frame 2 in the direction orthogonal to the arrangement direction of the plurality of fins 42, so the flow of gas flowing between the fins 42 and the fins 42 becomes smooth . Therefore, the cooling performance can be improved.

Here, if the hole 21 is enlarged, the flow rate of the gas passing through the hole 21 will become slower. If the flow rate of the gas passing through the hole 21 becomes slower, the flow rate of the gas flowing between the fin 42 and the fin 42 will become slower, and the cooling effect may be reduced.

For example, if a large hole is provided along the arrangement direction of the plurality of fins 42, the flow rate of the gas flowing between the fins 42 and the fins 42 will be slower, and the cooling effect will be reduced.

Therefore, in the ultraviolet irradiation module 1 of this embodiment, by providing a plurality of holes 21, the area of the vent hole and the predetermined flow velocity are ensured.

Here, if the gas passing through the hole 21 collides with the end surface of the fin 42, the flow of the gas flowing between the fin 42 and the fin 42 will be turbulent, and even between the fin 42 and the fin 42 The flow rate of the gas will slow down. If the velocity of the gas flowing between the fin 42 and the fin 42 becomes slower, the cooling effect will be reduced.

Therefore, when the side surface 2a is viewed from a direction perpendicular to the side surface 2a provided with the hole 21, the hole 21 is located between the fins 42.

In this way, the gas passing through the hole 21 can be prevented from colliding with the end surface of the fin 42.

Therefore, the cooling efficiency can be improved.

Furthermore, when the width dimension of the hole 21 is W and the distance between the fin 42 and the fin 42 is L, it is preferable to become "width dimension W<distance L".

In this way, it is possible to further prevent the gas passing through the hole 21 from colliding with the end surface of the fin 42.

Moreover, the heat dissipation of the heat dissipation portion 4 is mainly performed in the fin 42.

The greater the difference between the temperature of the fin 42 and the temperature of the gas flowing between the fin 42 and the fin 42, the greater the heat dissipation.

However, the fin 42 has a temperature distribution.

That is, the temperature of the fin 42 becomes higher on the side closer to the base 41 of the light emitting part 3 which is the heating element, and gradually decreases toward the tip.

Therefore, the hole 21 is preferably provided at a position close to the base 41.

At this time, when viewing the side surface 2a from a direction perpendicular to the side surface 2a provided with the hole 21, the position of the end 21a on the side of the opening 2b of the hole 21 should be located at the end of the base 41 on the opposite side to the side of the opening 2b. The location of the portion 41a may be nearby.

For example, the position of the end 21a of the hole 21 only needs to be within ±3 mm between the position of the end 41a of the base 41.

On the other hand, the position of the end 21b of the hole 21 is not particularly limited.

However, if the distance between the end 21a and the end 21b becomes longer, the hole 21 will become larger. If the hole 21 becomes too large, the flow rate of the gas passing through the hole 21 may become slow.

Moreover, since the temperature of the front end side of the fin 42 is low, the significance of providing the hole 21 is low.

For example, the position of the end 21b of the hole 21 may be on the side of the end 21a relative to the center position of the fin 42 in the height direction.

Here, according to the findings obtained by the present inventors, if the flow rate of the gas passing through the hole 21 is 3 m/sec or more, the temperature rise of the light-emitting element 32 can be effectively suppressed.

At this time, the flow rate of the gas passing through the holes 21 is affected by the size of the holes 21, the number of the holes 21, the capacity of the ventilation device 6, the number of the ventilation device 6, and so on.

Therefore, the size of the holes 21 and the number of the holes 21 are preferably determined by experiments or simulations such that the flow rate of the gas passing through the holes 21 reaches 3 m/sec or more.

Next, the ultraviolet irradiation device 100 of this embodiment is illustrated.

3(a) and 3(b) are schematic diagrams for illustrating the ultraviolet irradiation device 100. FIG.

In addition, Fig. 3(a) is a front view, and Fig. 3(b) is a side view.

As shown in FIG. 3(a) and FIG. 3(b), a plurality of ultraviolet radiation modules 1 are provided in the ultraviolet radiation device 100.

The plurality of ultraviolet irradiation modules 1 are arranged along the arrangement direction of the plurality of holes 21.

In this way, it is possible to prevent adjacent ultraviolet irradiation modules from competing with each other for inhaled gas (the gas located between the ultraviolet irradiation modules). Furthermore, interference of exhaust gas can be suppressed. Therefore, the inside of the ultraviolet irradiation module can be cooled stably.

As a result, the decrease in cooling efficiency can be suppressed.

At this time, even if the distance between the ultraviolet irradiation modules 1 is shortened, the influence of the intake/exhaust of the adjacent ultraviolet irradiation modules 1 can be suppressed.

Therefore, the distance between the ultraviolet irradiation modules 1 can be shortened, and therefore, the uniformity of the illuminance distribution on the workpiece can be achieved.

In addition, the number of ultraviolet irradiation modules 1 is not limited to the exemplified ones.

4(a) and 4(b) are schematic diagrams for illustrating an ultraviolet irradiation device 200 according to another embodiment.

In addition, Fig. 4(a) is a front view, and Fig. 4(b) is a side view.

As shown in FIG. 4(a) and FIG. 4(b), in the ultraviolet irradiation device 200, a plurality of ultraviolet irradiation modules 1 are provided.

The plurality of ultraviolet irradiation modules 1 are arranged along a direction orthogonal to the arrangement direction of the plurality of holes 21.

In this embodiment, the hole 21 is provided only on the side surface 2a of one side of the frame 2.

Moreover, the side faces 2a provided with the holes 21 face the same direction.

That is, when the side surfaces 2a face each other, the hole 21 is provided on the side surface 2a of one of the ultraviolet irradiation modules 1 and the hole 21 is not provided on the side surface 2a of the other ultraviolet irradiation module 1.

In this way, the adjacent ultraviolet irradiation modules 1 will not compete with each other for the inhaled gas (the gas between the ultraviolet irradiation modules), and the exhaust will not interfere, so the inside of the ultraviolet irradiation module 1 can be stably performed cool down.

Therefore, the decrease in cooling efficiency can be suppressed.

At this time, even if the distance between the ultraviolet irradiation modules 1 is shortened, the influence of the intake/exhaust of the adjacent ultraviolet irradiation modules 1 can be suppressed.

Therefore, the distance between the ultraviolet irradiation modules 1 can be shortened, and thus the uniformity of the illuminance distribution on the workpiece can be achieved.

In addition, the number of ultraviolet irradiation modules 1 is not limited to the exemplified ones.

FIG. 5 is a schematic perspective view for illustrating an ultraviolet irradiation device 300 according to another embodiment.

As shown in FIG. 5, in the ultraviolet irradiation device 300, a plurality of ultraviolet irradiation modules 1 are provided.

The plurality of ultraviolet irradiation modules 1 are arranged along the arrangement direction of the plurality of holes 21 and a direction orthogonal to the arrangement direction of the plurality of holes 21.

That is, the plurality of ultraviolet irradiation modules 1 are arranged in a matrix.

In this embodiment, the hole 21 is provided only on the side surface 2a of one side of the frame 2.

Moreover, the side faces 2a provided with the holes 21 face the same direction.

That is, when the side surfaces 2a face each other, the hole 21 is provided on the side surface 2a of one of the ultraviolet irradiation modules 1 and the hole 21 is not provided on the side surface 2a of the other ultraviolet irradiation module 1.

In this way, the adjacent ultraviolet irradiation modules 1 will not compete with each other for the inhaled gas (the gas between the ultraviolet irradiation modules), and the exhaust will not interfere, so the inside of the ultraviolet irradiation module 1 can be stably performed cool down.

Therefore, the decrease in cooling efficiency can be suppressed.

Furthermore, according to the ultraviolet irradiation device 300, as in the case of the aforementioned ultraviolet irradiation devices 100 and 200, the illuminance distribution on the workpiece can be uniformized.

Furthermore, the distance between the ultraviolet irradiation modules 1 in the arrangement direction of the plurality of holes 21 is X, and the distance between the ultraviolet irradiation modules 1 in the direction orthogonal to the arrangement direction of the plurality of holes 21 When the distance is Y, it is preferably "Y>X".

In addition, the number of ultraviolet irradiation modules 1 is not limited to the exemplified ones.

100‧‧‧UV Irradiation Module 2‧‧‧Frame 2a‧‧‧ side 2b‧‧‧Open 2c‧‧‧Top plate 3‧‧‧Lighting part 4‧‧‧Radiator 5‧‧‧Window 6‧‧‧Ventilation device 6a‧‧‧Filter 7‧‧‧Connector 8‧‧‧ floor 21‧‧‧Hole 21a, 21b, 41a‧‧‧end 31‧‧‧Substrate 32‧‧‧Light-emitting element 41‧‧‧Base 42‧‧‧Fins 100, 200, 300‧‧‧UV irradiation device L, X, Y‧‧‧Distance W‧‧‧Width size

FIG. 1 is a schematic perspective view for illustrating an ultraviolet irradiation module 1 of this embodiment. FIG. 2 is a schematic diagram for illustrating the hole 21. 3(a) and 3(b) are schematic diagrams for illustrating the ultraviolet irradiation device 100. FIG. 4(a) and 4(b) are schematic diagrams for illustrating an ultraviolet irradiation device 200 according to another embodiment. FIG. 5 is a schematic perspective view for illustrating an ultraviolet irradiation device 300 according to another embodiment.

1‧‧‧Ultraviolet radiation module

2‧‧‧Frame

2a‧‧‧ side

2b‧‧‧Open

2c‧‧‧Top plate

3‧‧‧Lighting part

4‧‧‧Radiator

5‧‧‧Window

6‧‧‧Ventilation device

6a‧‧‧Filter

7‧‧‧Connector

21‧‧‧Hole

31‧‧‧Substrate

32‧‧‧Light-emitting element

41‧‧‧Base

42‧‧‧Fins

Claims (2)

An ultraviolet irradiation module includes: a frame body, one of which is open at one end; a light emitting part, which is arranged in the interior of the frame body close to the opening, and has a substrate and a light emitting element; The surface on one side of the opening is irradiated with ultraviolet rays; and a heat sink is provided inside the frame on the side of the substrate opposite to the side of the opening, and has a base and a plurality of fins The plurality of fins are arranged at the end of the base on the opposite side to the side of the opening, and the frame body is arranged in a direction orthogonal to the arrangement direction of the plurality of fins The surface has a plurality of holes arranged along the arrangement direction of the plurality of fins, and when the surface is viewed from a direction perpendicular to the surface on which the plurality of holes are provided, the plurality of holes Each is located between the plurality of fins, and the position of the end of the hole on the side of the opening is near the position of the end of the base on the side opposite to the side of the opening, When the surface is viewed from a direction perpendicular to the surface provided with the plurality of holes, the fins are not exposed inside each of the plurality of holes. An ultraviolet irradiation device includes a plurality of ultraviolet irradiation modules as described in item 1 of the scope of patent application, and the plurality of ultraviolet irradiation modules are arranged along the arrangement direction of the plurality of holes and are connected to the plurality of holes. The arrangement direction is perpendicular to the arrangement.

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