JP4694803B2 - Ultraviolet light irradiation apparatus and irradiation method, substrate manufacturing apparatus and substrate manufacturing method - Google Patents

Description

  The present invention relates to an ultraviolet light irradiation apparatus and an irradiation method, a substrate manufacturing apparatus, and a substrate manufacturing method for irradiating and curing a sealing agent obtained by bonding two substrates together with ultraviolet light.

  In a manufacturing process of a flat display panel or the like typified by a liquid crystal display panel, a bonding operation is performed in which two substrates are opposed to each other at a predetermined interval, liquid crystal is sealed between the substrates and bonded together with a sealant.

  In the bonding operation, the sealing agent is applied in a frame shape to one of the two substrates, and a predetermined amount of the liquid crystal is supplied dropwise to a portion corresponding to the inside of the sealing agent frame of the substrate or the other substrate. To do.

  Next, the two substrates are held on the upper holding table and the lower holding table, and are opposed to each other at a predetermined interval in the vertical direction. In this state, the horizontal directions X and Y of these substrates and the rotation direction are set. These substrates are bonded together after positioning in the θ direction. When the two substrates are bonded together, the sealing agent is cured and bonded to manufacture the substrates so that the positioning accuracy of these substrates is not impaired.

  There is an ultraviolet light curing type sealant. If two substrates are bonded together using such a sealant, the entire substrate is irradiated with ultraviolet light almost uniformly to cure the sealant. I am doing so.

  In other words, a plurality of ultraviolet lamps having a length approximately the same as the width of the substrate are stored in parallel in the lamp house, and a reflector, diffuser, and light of a specific wavelength are selected around these lamps. In order to irradiate the substrate with ultraviolet light with uniform illuminance, a filter or the like that transmits light is disposed.

  However, a sealing agent is usually applied to the substrate in a rectangular frame shape. Therefore, when ultraviolet light is irradiated over the entire surface of the substrate, most of the ultraviolet light irradiates portions other than the sealant.

  If the entire surface of the substrate is irradiated with ultraviolet light, the substrate will be irradiated even to the part that does not need to be irradiated with ultraviolet light. Therefore, the effective utilization efficiency of the ultraviolet light output from the ultraviolet light lamp is very low. There is. In other words, since the energy that is effectively used is smaller than the energy input to the ultraviolet lamp, energy is wasted and unnecessary running costs are incurred. Further, in the case where a liquid crystal is provided between two substrates, if the liquid crystal is irradiated with ultraviolet light, it may cause performance deterioration, which may be undesirable.

  This invention makes it possible to irradiate only the portion of the sealant that bonds two substrates together with ultraviolet light, prevents wasteful consumption of energy, and improves energy use efficiency. An object is to provide an irradiation apparatus, an irradiation method, a substrate manufacturing apparatus, and a substrate manufacturing method.

This invention is an ultraviolet light irradiation apparatus for irradiating and curing an ultraviolet light on a sealing agent between two bonded substrates.
Two irradiation means provided in a substantially orthogonal state and emitting ultraviolet light in a straight line of a predetermined length;
Guide means for movably supporting each irradiation means;
Driving means for relatively moving the irradiation means and the substrate along the guide member;
An ultraviolet light comprising: a control means for relatively adjusting the position of the irradiating means and the substrate so as to irradiate the ultraviolet light in accordance with the sealant portion by controlling the driving means. In the irradiation device.

  The control means irradiates the irradiation means and the substrate so as to irradiate the ultraviolet light in the order of the sealant portion located near the end from the sealant portion located near the center of the substrate. It is preferable to move it relatively.

  The irradiation means preferably includes a plurality of light emitting diodes arranged in a straight line.

  The irradiating means emits ultraviolet light by exciting a plurality of tubes in which a predetermined gas is sealed and linearly connected, and a gas provided corresponding to each tube and sealed in each tube. Preferably, a plurality of excitation means to be formed and a pattern forming means for linearly forming a pattern for irradiating the substrate of ultraviolet light excited and emitted by the excitation means.

This invention is an ultraviolet light irradiation method in which a sealing agent applied in a rectangular frame shape between two bonded substrates is irradiated with ultraviolet light to be cured,
Obtaining the positional deviation of the substrate;
On one and the ultraviolet light emitted in a straight line from each of the other two irradiation means provided in the state perpendicular one linear portion and other linear portion of the sealant on the basis of the positional deviation of the substrate obtained A step of aligning the substrate so as to be along;
A step of sequentially emitting ultraviolet light in a straight line of a predetermined length from one and the other of the two irradiation means ;
An ultraviolet light irradiation method comprising: sequentially irradiating one linear portion and the other linear portion of the sealing agent orthogonal to each other with linear ultraviolet light having a predetermined length.

In the present invention, at least one of two substrates having a sealing agent coated in a rectangular frame shape is bonded through the sealing agent, and then cured by irradiating the sealing agent with ultraviolet light. In the substrate manufacturing method for manufacturing
A mounting step of mounting two substrates bonded together via the sealant on a support;
A step of irradiating ultraviolet light emitted in a straight line of a predetermined length in accordance with a portion of the sealing agent sandwiched between the two substrates placed on the support table and curing the sealing agent Comprising
The step of curing the sealant comprises
Of one linear portion and other linear portions perpendicular of the applied sealant in a rectangular frame shape, linear emitted on one of the straight portions, from one of the two irradiation means provided in the orthogonal state A step of curing by irradiating with ultraviolet light;
In substrate manufacturing method characterized by comprising a step of curing by irradiation with linear ultraviolet light emitted to the other linear portion of the sealant from the other illumination means.

  According to this invention, the ultraviolet light is emitted linearly from the irradiation means for irradiating the substrate with ultraviolet light. Therefore, it becomes possible to irradiate only the part of the sealing agent which bonded two board | substrates with ultraviolet light. Therefore, wasteful consumption of energy can be prevented and energy use efficiency can be improved.

  Embodiments of the present invention will be described below with reference to the drawings.

  1 to 7 show a first embodiment of the present invention. The ultraviolet light irradiation apparatus of the present invention shown in FIG. On the base plate 1, a base 2 having a rectangular planar shape is installed. A θ table 3 is provided on the upper surface of the base 2. The θ table 3 is rotated in the horizontal direction around the center of the base 2 by a θ driving source 4 (shown in FIG. 6) provided on the base 2.

  On the upper surface of the θ table 3, a pair of X guide members 6 that are spaced apart from each other at a predetermined interval in the Y direction are provided along the X direction. An X table 7 is provided on the upper surface of the θ table 3. An X receiving member 8 slidably engaged with the X guide member 6 is provided on the lower surface of the X table 7.

  A first X drive source 9 is provided at an end portion of the upper surface of the θ table 3 in the X direction. The first X drive source 9 rotationally drives an X screw shaft (not shown). The X screw shaft is screwed into a nut body (not shown) provided on the lower surface of the X table 7. Therefore, when the first X drive source 9 operates to rotate the X screw shaft, the X table 7 is driven along the X direction.

  On the upper surface of the X table 7, a pair of Y guide members 11 are provided along the Y direction that are spaced apart at a predetermined interval in the X direction. On the upper surface of the X table 7, a Y table 12 used as a support base is provided. A Y receiving member 13 slidably engaged with the Y guide member 11 is provided on the lower surface of the Y table 12.

  A first Y drive source 14 is provided at an end portion in the Y direction on the upper surface of the X table 7. The first Y drive source 14 rotationally drives a Y screw shaft (not shown). The Y screw shaft is screwed into a nut body (not shown) provided on the lower surface of the Y table 7. Therefore, when the first Y drive source 14 is operated to rotate the Y screw shaft, the Y table 12 is driven along the Y direction. That is, the Y table 12 can be driven in the X and Y horizontal directions and the θ rotation direction.

  On the upper surface of the Y table 12, as shown in FIG. 5, two substrates 17 bonded to each other with a sealant 16 at a predetermined interval are supplied and mounted. For example, four liquid crystal display panels can be formed from the two substrates 17 bonded together, and the two substrates 17 are applied in the form of four rectangular frames according to the number. It is bonded together with a sealing agent 16. The space surrounded by the sealing agent 16 between the pair of substrates 17 is filled with liquid crystal 18.

  Here, such a board | substrate 17 is produced through the following manufacturing processes. That is, first, the sealant is applied in a rectangular frame shape to at least one of the substrates by a seal application device. Next, in the liquid crystal dropping device, a necessary amount of liquid crystal is dropped onto a portion corresponding to the inside of the frame of the sealing agent on the substrate on which the sealing agent is applied or the other substrate. Then, one substrate is held by the upper holding table in the substrate bonding apparatus, and the other substrate is held by the lower holding table, and the two substrates are aligned in a state of being opposed to each other at a predetermined interval. After being performed, it is bonded through a sealant.

  When the two substrates 17 bonded together by the sealant 16 are supplied and placed on the Y table 12, the sealant 16 is irradiated with ultraviolet light and cured as will be described later.

  The sealing agent 16 is irradiated with ultraviolet light emitted from the first irradiation unit 21 and the second irradiation unit 22. As shown in FIGS. 1 and 4, the first and second irradiation means 21 and 22 have first and second lamp houses 23a, which are equal to or slightly longer than the width of the substrate 17 along the Y direction. 23b. Each of the lamp houses 23a and 23b has a rectangular tube shape with an open bottom surface, and a reflector 24 having a circular cross section in a direction intersecting the longitudinal direction is provided over the entire length in the longitudinal direction. Yes.

  First and second ultraviolet lamps 25 a and 25 b are provided at the focal position of the reflector 24 along the longitudinal direction. In the ultraviolet lamps 25a and 25b, a plurality of tubes 26 having a predetermined length, in which a gas emitting light in the ultraviolet region is enclosed when excited, such as a metal halide, are joined together in a line by joining axial end faces. It is installed.

  A plurality of electromagnetic wave generators 27 (only one is shown in FIG. 4) are arranged in the upper portions of the lamp houses 23a and 23b so as to face the tubes 26. When electric power is supplied to each electromagnetic wave generator 27, an electromagnetic wave is generated, and the gas filled in each tube 26 is excited by the electromagnetic wave to generate ultraviolet light U. That is, the electromagnetic wave generator 27 functions as an excitation unit.

  As shown in FIG. 4, the ultraviolet light U generated from the tube 26 is reflected by the reflecting surface 24 a of the reflector 24 and becomes parallel light that goes straight downward. A slit plate 28 having a slit 28a formed along the longitudinal direction is provided on the open surface of the reflector 24. Thereby, the width dimension of the ultraviolet light U that passes through the slit 28 a substantially perpendicularly to the plate surface of the slit plate 28 among the ultraviolet light U reflected by the reflecting surface 24 a of the reflector 24 is limited. That is, the ultraviolet light U emitted from the slit 28a is formed into a linear shape having a predetermined width dimension.

In this embodiment, the reflector 24 and the slit plate 28 constitute pattern forming means for shaping the ultraviolet light U in a straight line.
As shown in FIG. 1, the first lamp house 23a of the first irradiation means 21 is connected at both ends to the upper ends of a pair of first support columns 31a and 31b provided on both sides of the base 2 in the Y direction. It is fixed and provided almost horizontally. A guide groove 32 is formed at the lower end of one of the first columns 31a, and this guide groove 32 is slidably engaged with an X column guide 33 provided along the X direction of the base plate 1.

  Support plates 34 are erected at portions corresponding to both ends of the X column guide 33. Both ends of the X drive screw 35 are rotatably supported by the pair of support plates 34. One support plate 34 is provided with a second X drive source 36 for rotating the X drive screw 35.

  The other first support column 31b can be moved along the X direction on the base plate 1 by being guided by a guide (not shown) or by providing a rolling bearing on the lower end surface.

  Therefore, when the second X drive source 36 is operated and the X drive screw 35 is rotationally driven, one first support 31a is driven in the X direction along the X support guide 33. The other first support column 31b is linked to the first support column 31a via the lamp house 23a of the first irradiation means 21.

  The lamp house 23 a of the first irradiation means 21 is located higher than the upper surface of the Y table 12. Therefore, when the second X drive source 36 is activated, the first lamp house 23a disposed along the Y direction of the substrate 17 is driven above the substrate 17 along the X direction.

  Accordingly, the ultraviolet light U emitted linearly from the first lamp house 23a along the Y direction (this direction is the width direction of the substrate 17) is a longitudinal direction that intersects the width direction of the substrate 17. It can be moved along the X direction.

  The second lamp house 23b of the second irradiation means 22 is provided substantially horizontally with both ends connected and fixed to the upper ends of a pair of second support columns 41a and 41b provided on both sides of the base 2 in the X direction. It has been. A guide groove 42 is formed at the lower end of one second column 41a, and this guide groove 42 is slidably engaged with a Y column guide 43 provided in the base plate 1 along the Y direction.

  Support plates 44 are erected at portions corresponding to both ends of the Y column guide 43. Both ends of the Y drive screw 45 are rotatably supported by the pair of support plates 44. One support plate 44 is provided with a second Y drive source 46 that rotationally drives the Y drive screw 45.

  The other second support post 41b can be moved along the Y direction on the base plate 1 by being guided by a guide (not shown) or by providing a rolling bearing on the lower end surface.

  Accordingly, when the second Y drive source 46 is operated and the Y drive screw 45 is driven to rotate, one of the second columns 41a is driven in the Y direction along the Y column guide 43, so The other second support column 41b is linked to the second support column 41a via the lamp house 23b of the second irradiation means 22.

  The second irradiating means 22 is at a position higher than the upper surface of the Y table 12 and is at substantially the same height as the first irradiating means 21. Therefore, when the second Y drive source 46 is operated, the second lamp house 23b of the second irradiation means 22 provided along the X direction of the substrate 17 is above the substrate 17 along the Y direction. Driven.

  Accordingly, the ultraviolet light U emitted linearly along the X direction along the longitudinal direction of the substrate 17 from the second lamp house 23b can be moved along the Y direction, which is the width direction of the substrate 17. it can.

  When the second irradiating means 22 is driven along the Y direction, the first irradiating means 21 is retracted to a position outside the range in the X direction of the second irradiating means 22 as indicated by a chain line in FIG. is doing. Thereby, the first irradiation means 21 does not get in the way of driving of the second irradiation means 22.

  Further, when the first irradiation means 21 is driven to travel along the X direction, the second irradiation means 22 does not interfere with the movement of the first irradiation means 21 as shown by the solid line in FIG. It is retracted in the Y direction.

  6 drives the θ drive source 4, the first X drive source 9, the first Y drive source 14, the second X drive source 36, and the second Y drive source 46 of the ultraviolet light irradiation apparatus. The first power source 47 and the second power source 48 for driving the electromagnetic wave generator 27 for exciting the first and second ultraviolet lamps 25a and 25b of the first and second irradiation means 21 and 22 are controlled. It is a control circuit diagram.

  The control circuit has a control device 51. The control device 51 includes a setting unit 52, a calculation unit 53, and an output unit 54. The setting unit 52 stores position information of the sealing agent 16 applied to the substrate 17. This position information is input to the calculation unit 53.

  Each drive source and power source is driven by a drive signal from the output unit 54. The drive amounts in the X and Y directions of the Y table 12 and the first and second irradiation means 21 and 22 by the respective drive sources are respectively the first X encoder 56X, the first Y encoder 56Y, the θ encoder 56θ, and the second. The X encoder 57X and the second Y encoder 57Y feed back to the calculation unit 53.

  The arithmetic unit 53 compares the position information from the setting unit 52 with the feedback signal from each encoder, and outputs the comparison value to the output unit 54. The output unit 54 outputs a drive signal corresponding to the comparison value from the calculation unit 53 to each drive source and power source.

  The first and second power sources 47 and 48 selectively drive the plurality of electromagnetic wave generation units 27 of the first and second irradiation units 21 and 22 based on signals from the calculation unit 53. Thereby, the ultraviolet light U is generated only from the lamps 25 a and 25 b excited by the electromagnetic wave generator 27 among the plurality of tubes 26 constituting the ultraviolet lamps 25 a and 25 b of the irradiation means 21 and 22. .

  Above the Y table 12, first and second cameras 58a and 58b (shown only in FIG. 6) for imaging the positioning marks of the substrate 17 are arranged. The imaging signals from these cameras 58a and 58b are processed by an image processing unit (not shown) and input to the arithmetic unit 53. Thereby, the relative positional deviation amount of the substrate 17 on the Y table 12 is calculated, and the positions in the X, Y, and θ directions by the respective driving sources are corrected according to the positional deviation amount.

  Next, an operation in the case where the sealing agent 16 having the two substrates 17 bonded together is irradiated with the ultraviolet light U by the ultraviolet light irradiation apparatus having the above configuration will be described.

  First, as shown by a chain line in FIG. 2, the first irradiation means 21 is retracted in the X direction, and as shown by a solid line in FIG. 3, the second irradiation means 22 is retracted in the Y direction. In this state, a substrate 17 bonded with four rectangular frame-shaped sealing agents 16 on the Y table 12 is supplied, and positioning marks (not shown) provided on the substrate 17 are used with a pair of cameras 58a and 58b. Take an image.

  The imaging signals of the pair of cameras 58 a and 58 b are subjected to image processing and input to the calculation unit 53. Thereby, the amount of deviation of the substrate 17 in the X, Y, and θ directions with respect to the Y table 12 is obtained, and the positions of the Y table 12 in the X direction, Y direction, and θ direction are corrected according to the amount of deviation. Alignment is performed.

  When the position of the Y table 12 is corrected, the side along the X direction and the side along the Y direction of the sealant 16 applied to the substrate 17 in a rectangular frame shape are the X direction and the Y direction of the Y table 12. It will be positioned parallel to the direction of movement.

Next, the first irradiation means 21 is driven along the X direction. Position information of the first lamp when the house 23a reaches the position indicated by X ₁ in FIG. 7 (a), the sealing agent 16 that it is pre-stored in the setting unit 52 of the control device 51 of the first irradiating means 21 Recognized by. As a result, a drive signal is output from the computing unit 53 to the first power supply 47, and the plurality of electromagnetic wave generation units 27 are energized by the first power supply 47.

When the electromagnetic wave generator 27 is energized, an electromagnetic wave is output, and the gas in the plurality of tubes 26 forming the first ultraviolet lamp 25a is excited by the electromagnetic wave. Thereby, since the ultraviolet light U from the first lamp house 23a of the first irradiation unit 21 is emitted by the linear irradiation pattern P _1, by the irradiation pattern P ₁ of the two coating patterns of the sealant 16 The two sides 16a along the Y direction are irradiated and cured.

When the irradiation pattern P ₁ of the ultraviolet light U emitted from the first irradiating means 21 is out of the irradiation range of X1, the driving signal to the first power supply 47 is cut off, ultraviolet light from the first illumination means 21 U emission stops.

Next, when the first lamp house 23a of the first irradiation means 21 reaches the position indicated by X2, the first power supply 47 is driven by a drive signal from the calculation unit 53. Thereby, the two sides 16b of two rectangular frame-like application pattern of the sealant 16 by the irradiation pattern P ₁ of the ultraviolet light U emitted from the first ultraviolet lamp 25a is cured by irradiation. Then, the irradiation pattern P ₁ of the ultraviolet light U is deviates from the irradiation range of X _2, is cut off the driving signal to the first power supply 47, also emission of ultraviolet light U is stopped.

Likewise, the first irradiation means 21 is driven in the X direction, the first lamp house 23a is shown by X _3, two sides along the Y-direction of the remaining two rectangular shaped coating pattern of the sealant 16 16c When the reaching upwards, that side 16c is cured by irradiation with the irradiation pattern P _1. Then, the output stop of the ultraviolet light U, the first lamp house 23a reaches the position indicated by X _4, 2 two sides 16d is ultraviolet light U along the Y direction of the application pattern of the sealant 16 located therein Is cured by irradiation.

  As a result, among the four rectangular frame-shaped coating patterns of the sealing agent 16 bonded to the two substrates 17, the sides 16 a to 16 d along the Y direction are irradiated with the ultraviolet light U and cured.

  If the sides 16a to 16d along the Y direction are cured by the first irradiation means 21, the first irradiation means 21 moves along the Y direction of the second irradiation means 2 as shown by a chain line in FIG. Retreat to the position in the X direction that does not get in the way.

Next, the second irradiation unit 22 is driven along the Y direction. The second lamp house 23b of the second irradiation unit 22 is indicated by Y ₁ in FIG. 7 (b), the two rectangular frame-like application pattern of the sealant 16, the two sides positioned at an end portion of the Y-direction When reaching above 16e, a drive signal is output to the second power supply 48 based on the position information from the setting unit 52. Thereby, since the plurality of electromagnetic wave generators 27 of the second irradiation means 22 are energized, the gas filled in the plurality of tubes 26 of the second ultraviolet lamp 25b by the electromagnetic waves generated from these electromagnetic wave generators 27 is generated. Excited and ultraviolet light U is output from each tube 26.

Ultraviolet light U output from the tube 26, the reflector 24 and by the slit plate 28 is formed on the irradiation pattern P ₂ straight as shown in FIG. 7 (b), the two sides 16e by the pattern P ₂ Is cured by irradiation.

When two sides 16e is irradiation pattern P ₂ of ultraviolet light U deviates, the drive signal to the second power supply 48 is cut off, the emission of the ultraviolet light U is stopped. The second lamp house 23b of the second irradiation unit 22 is indicated by Y _2, when reaching the two sides 16f, ultraviolet light U is energized to the second power supply 48 at a linear irradiation pattern P ₂ is is output, the edges 16f is cured by irradiation with ultraviolet light U of the irradiation pattern P _2.

When the irradiation of the two sides 16f of the rectangular coating pattern of the sealant 16 is completed, the emission of the ultraviolet light U is stopped. When the second lamp house 23b reaches the two sides 16g of two rectangular application pattern of the sealant 16 shown in Y _3, it is again emitted ultraviolet light U is a linear irradiation pattern P _2, The side 16g is irradiated and cured.

When the irradiation of the side 16g ends, the energization to the second power supply 48 is cut off, and the emission of the ultraviolet light U is stopped. When the second lamp house 23b reaches the next two sides 16h of application pattern of the sealant 16 shown in Y _4, emitted at the irradiation pattern P ₂ ultraviolet light U is straight from again lamp house 23b Then, the side 16h is irradiated and cured. Then, when the side 16h is irradiated, the emission of the ultraviolet light U is stopped.

As described above, the first irradiation means 21 is driven in the X direction, and the sides 16a to 16d along the Y direction in the rectangular frame-shaped coating pattern of the sealant 16 are applied to the ultraviolet light U linear irradiation pattern. After being cured by irradiation with P ₁ , the second irradiation means 22 is driven along the Y direction, and the sides 16 e to 16 h along the X direction in the rectangular frame-shaped coating pattern of the sealant 16 are moved. and to cure by irradiation with the irradiation pattern P _2.

Therefore, only the sides of the rectangular frame-shaped coating pattern of the sealing agent 16 can be cured by irradiating the ultraviolet light U with the irradiation patterns P ₁ and P ₂ , and the portion of the substrate 17 where the sealing agent 16 is not provided. Irradiation with ultraviolet light U can be prevented. Accordingly, it is possible to prevent the liquid crystal 18 provided between the pair of substrates 17 from being irradiated with the ultraviolet light U to be deteriorated.

  The ultraviolet lamps 25a and 25b of the irradiation means 21 and 22 connect a plurality of tubes 26 filled with gas in a row, and excite the gas in each tube 26 by the electromagnetic wave generator 27 to output ultraviolet light U. It consists of a so-called electrodeless discharge lamp. Such an electrodeless discharge type ultraviolet lamp has a characteristic that light emission responsiveness is better than that of an electrode type ultraviolet lamp.

  For this reason, it is possible to switch between the emission and stop of the ultraviolet light U in a short time, and as described above, the necessary portions while driving the first and second irradiation means 21 and 22 in the X direction and the Y direction. That is, only the portion where the sealant 16 is applied can be irradiated with ultraviolet light.

  The plurality of tubes 26 constituting the first and second ultraviolet lamps 25a and 25b are excited by the electromagnetic wave generator 27 and emit ultraviolet light U, respectively. Therefore, the size of the substrate 17 supplied on the Y table 12 is changed, and the range along the X direction and the Y direction of the sealing agent 16 applied to the substrate 17 is, for example, the length of each ultraviolet lamp 25a, 25b. When it becomes smaller than that, the electromagnetic wave generation unit 27 corresponding to the tube 26 that is removed from the sealing agent 16 is not energized based on the information input to the setting unit 52 when the ultraviolet light U is irradiated. .

  Thereby, even when the size of the substrate 17 is changed, it is possible not only to prevent the portion other than the portion to which the sealing agent 16 is applied from being irradiated with the ultraviolet light U, but also to generate unnecessary electromagnetic waves. Since power supply to the unit 27 can be prevented, the power used can be reduced. Therefore, the power usage efficiency can be improved.

Further, each side of the coating pattern of the rectangular frame shape of the sealant 16 is ultraviolet in units of sides that can be irradiated by the irradiation patterns P ₁ and P _{2 of the} ultraviolet light U emitted from the first and second irradiation means 21. The light U was irradiated.

  Therefore, since the sealant 16 on one side is cured almost at the same timing, the time for irradiating the sealant 16 on one side with the ultraviolet light U can be shortened. As a result, the heating of the substrate 17 due to the irradiation with the ultraviolet light U is reduced, so that the distortion that may occur due to the difference in thermal expansion between the two substrates 17 at the one side portion is generated. It can be prevented as much as possible.

  Further, when there is a positional deviation of the substrate 17 in the X, Y and θ directions with respect to the Y table 12, the positions of the Y table 12 in the X, Y and θ directions are corrected according to the amount of deviation. 17 alignment is performed.

Therefore, even when the substrate 17 is displaced in the θ direction with respect to the Y table 12, each side of the sealing agent 16 in the rectangular frame-shaped coating pattern is exposed to ultraviolet light from the first and second irradiation means 21 and 22. It is possible to follow the irradiation patterns P ₁ and P ₂ of U.

Thereby, the ultraviolet light U can be irradiated to the side of the sealing agent 16 with the narrower irradiation patterns P ₁ and P ₂ , and the portion of the substrate 17 where the sealing agent 16 is not provided is irradiated with the ultraviolet light U. This can be prevented more reliably.

  Further, the irradiation means 21 and 22 are supported by the X column guide 33 and the Y column guide 43 so that the first irradiation unit 21 can be moved along the X direction and the second irradiation unit 22 can be moved along the Y direction. Thereby, each irradiation means 21 and 22 can be position-adjusted on the board | substrate 17 to a X direction or a Y direction, and the irradiation means 21 and the some side (straight line part) of the sealing agent 16 provided in the board | substrate 17 are provided. The ultraviolet light U emitted linearly from 22 can be irradiated.

  Further, the X guide column 33 and the Y guide column 43 are provided with the second X drive source 36 and the second Y drive source 46, and these drive sources 36 and 46 are controlled by the control device 51. For this reason, the position adjustment in the X direction or Y direction of each irradiation means 21 and 22 is automated, and the irradiation of the ultraviolet light U to the sealing agent 16 provided on the substrate 17 can be performed easily and quickly.

  In the first embodiment, the first irradiating means 21 and the second irradiating means 22 are described as being provided at substantially the same height, but they may be provided at different heights. In this case, the ultraviolet light U emitted from the lamp houses 23a and 23b is preferably parallel light.

  FIG. 8 shows a modification of the ultraviolet light irradiation apparatus showing the second embodiment of the present invention. In this embodiment, the second irradiation means 22 shown in the first embodiment is removed, and only the first irradiation means 21 is provided. The length of the first lamp house 23 a of the first irradiation means 21, that is, the distance between the pair of first support columns 31 a and 31 b is set to be larger than the longitudinal dimension of the Y table 12. In other words, even if the Y table 12 is rotated 90 degrees, the interval is set such that the columns 31 a and 31 b do not collide with the Y table 12.

  In the first step, the first irradiation means 21 is driven in the X direction, and each side along the Y direction (shown by 16a to 16d in FIG. 7A) of the rectangular coating pattern of the sealing agent 16 is shown. ) With an irradiation pattern of ultraviolet light U to cure.

  In the second step, the θ table 3 is rotated by 90 degrees, and the remaining sides (indicated by 16e to 16h in FIG. 7B) that were located along the X direction in the first step are moved in the Y direction. Position along. And if the said 1st irradiation means 21 is driven along a X direction, each remaining edge | side 16e-16h which was not irradiated at the 1st process can be irradiated and hardened by the ultraviolet light U, respectively.

  That is, also in the second embodiment, only the portion of the sealing agent 16 applied to the substrate 17 is irradiated with the ultraviolet light U, and other portions are prevented from being irradiated with the ultraviolet light U. it can.

  Further, by using the single irradiation means 21 and rotating the θ table 3 by 90 degrees, the side along the X direction and the side along the Y direction in the sealing agent 16 provided on the substrate 17 are irradiated with the ultraviolet light U. Since it did in this way, in addition to the effect by 1st Embodiment which provided the irradiation means 21 and 22 along each of a X direction and a Y direction, it has the effect that an apparatus structure can be simplified.

  In the second embodiment, the substrate 17 (the θ table 3 that supports the Y table 12) is rotated by 90 ° so that the irradiation pattern of the ultraviolet light U follows the short side or the long side of the substrate 17. As described above, the lamp house 23a may be rotated by 90 °. In this case, what is necessary is just to comprise so that the lamp house 23a may be rotatably supported on a single support | pillar via a rotation mechanism.

  Moreover, although the example which irradiates each side in the rectangular frame-shaped pattern of the sealing agent 16 while irradiating means 21 and 22 is irradiated with ultraviolet light has been described, the θ table 3, without moving the irradiating means 21 and 22, The substrate 17 may be moved using the X table 7 and the Y table 12.

  FIG. 9 shows a third embodiment of the present invention. This embodiment is the same as the second embodiment shown in FIG. 8 in that the second irradiation means 22 is removed and only the first irradiation means is provided. The difference is that one irradiation means 21A, 21B is provided.

  In other words, one support column 31a of the two first irradiation means 21A and 21B is provided by slidably engaging the lower end guide groove 32 with the X support column guide 33, respectively. An X drive screw 35 is screwed into one of the columns 31a of each of the irradiation means 21A and 21B. Both end portions of each X drive screw 35 are rotatably supported by a support plate 34 erected on the middle portion and both end portions of the X column guide 33. A pair of support plates 34 erected at both ends of the X column guide 33 are provided with second X drive sources 36 that rotate the X drive screws 35, respectively.

  By operating each X drive source 36, the distance between the first lamp houses 23a of the pair of first irradiation means 21A and 21B, which is indicated by D in FIG. 9, can be set. The distance D between the pair of lamp houses 23 is set to be substantially the same as the distance between a pair of opposing sides of the rectangular frame pattern of the sealant 16 applied to the substrate 17 in a rectangular frame shape.

The distance between the pair of first lamp houses 23a is set to be substantially the same as the distance between the pair of sides 16a, 16b and 16c, 16d of the rectangular frame-shaped coating pattern of the sealant 16 shown in FIG. moving the table 12 in the X direction with a pair of sides 16a, when 16b is positioned below the pair of first lamp house 23a, and outputs the ultraviolet light U in the linear irradiation pattern P _1. Thereby, the pair of sides 16a and 16b can be irradiated and cured.

Next, when the pair of sides 16c and 16d are positioned below the pair of first lamp houses 23a, the ultraviolet rays U are output. Thereby, it can be cured by irradiation pair of sides 16c, and 16d in the irradiation pattern _{P 1.}

  Next, the Y table 12 is rotated 90 degrees, and the directions of the sides indicated by 16e to 16h in FIG. 7B that are not irradiated with the ultraviolet light U of the sealant 16 are changed from the X direction to the Y direction. At the same time, the distance D between the lamp houses 23 of the pair of first irradiation means 21A, 21B is adjusted to be substantially the same as the distance between the pair of opposing sides 16e, 16f and 16g, 16h.

  Then, if the Y table 12 is moved in the X direction and the pair of opposing sides 16e and 16f of the rectangular frame pattern of the sealant 16 are positioned below the pair of first lamp houses 23a, The ultraviolet light U is output in a linear pattern, and the pair of sides 16e and 16f are irradiated and cured.

  Next, when the Y table 12 is moved in the X direction and the remaining pair of sides 16g and 16h are positioned below the pair of first lamp houses 23a, the ultraviolet light U is irradiated in a linear pattern, The sides 16g and 16h are cured. Accordingly, the entire four rectangular frame patterns of the sealant 16 can be irradiated with the ultraviolet light U and cured.

  As described above, according to the third embodiment, the two first irradiation means 21A and 21B are individually provided to be movable in the X direction, and the two sides of the sealant 16 are irradiated with the ultraviolet light U at the same time. Therefore, in addition to the effect of the first embodiment, the sealing agent 16 can be efficiently cured.

  In each of the above embodiments, the sealing agent is irradiated with ultraviolet light formed in a predetermined pattern while moving the irradiation means or the substrate in a predetermined direction. However, when the sealing agent is positioned at the irradiation position of the irradiation means. In addition, the driving along the predetermined direction of the irradiation means or the substrate may be stopped for a predetermined time to irradiate the ultraviolet light.

  Although the case where the sealing agent is applied to the substrate in a pattern of four rectangular frames has been described, the number of application patterns formed on the substrate is not limited at all, and it is four or less or four or more. There is no problem.

  As an ultraviolet lamp, an electrodeless ultraviolet lamp in which gas is sealed in a tube is mentioned. Instead of an electrodeless lamp, electrodes are provided at both ends of the tube, and the gas in the tube is excited by discharge between these electrodes. A so-called electrode-type ultraviolet lamp that outputs ultraviolet light may be used. When using an electrode-type ultraviolet lamp, it takes more time to start up when the current to the lamp is cut off compared to an electrodeless ultraviolet lamp, so it is difficult to control the irradiation and cut-off of the ultraviolet light to the substrate. Become. Therefore, in such a case, the electrode-type ultraviolet lamp may be kept energized, a shutter may be provided in the ultraviolet light path, and the shutter may be opened and closed to control the irradiation and blocking of the ultraviolet light. Note that, even with an electrodeless ultraviolet light lamp, the blocking of ultraviolet light irradiation may be controlled by opening and closing the shutter.

  Reflectors and slit plates were used as pattern forming means for linearly shaping the ultraviolet light output from the ultraviolet light lamp, but instead, the ultraviolet light output from the ultraviolet light lamp converged linearly on the substrate. As such, the shape of the reflecting surface of the reflector may be set. The ultraviolet light may be formed into a linear parallel light by using a lens such as a cylindrical lens on the optical path of the ultraviolet light.

  In the third embodiment, the interval between the lamp houses 23a of the two irradiation means 21A and 21B is set to be substantially the same as the interval between the opposing sides in the rectangular frame pattern of the sealant 16, and the Y table 12 is set to X An example in which the irradiation means 21A and 21B are opposed to each other in the order of the sides 16a and 16b, sides 16c and 16d, sides 16e and 16f, sides 16g and 16h in the rectangular frame pattern of the sealant 16 by moving in the direction. However, the irradiation means 21A and 21B may be moved while moving in the X direction. In this case, the two X drive screws 35 shown in FIG. 9 may be arranged in parallel so that the length thereof is substantially the same as the X drive screw 35 shown in FIG.

  In the first to third embodiments, the irradiation units 21 and 22 have been described as being arranged on the upper side of the substrate 17 (Y table 12). However, the irradiation units 21 and 22 may be arranged on the lower side of the Y table 12 or the Y table. 12 may be arranged on both upper and lower sides. When the irradiation means 21 and 22 are arranged below the Y table 12, the Y table 12 is formed of a material that transmits ultraviolet rays, and the irradiation means 21 and 22 are moved below the Y table 12. It is necessary to secure enough space.

  The example in which the θ table 3, the X table 7, and the Y table 12 are mounted on the base 2 in this order and the substrate 17 is mounted on the Y table 12 has been described. It is not restricted to, and may be replaced.

  Although an example in which the ultraviolet lamp is caused to emit light at a position corresponding to the coating pattern of the sealant applied on the substrate 17 and the ultraviolet light U is directly irradiated onto the substrate 17 has been described, the ultraviolet light is irradiated to the position corresponding to the coating pattern. A mask having a translucent part that transmits U may be disposed on the substrate 17, and the substrate 17 may be irradiated with the ultraviolet light U through the mask.

  Although the example in which each side of the sealant is cured in order from one end to the other end of the substrate 17 has been described, the present invention is not limited to this and may be performed in another order. For example, after the sealant 16 on the sides 16b and 16c located near the center of the substrate 17 shown in FIG. 7A is cured, the sides 16f and 16g located near the center of the substrate 17 shown in FIG. 7B. The sealant 16 is cured, and the sealants 16 on the sides 16a, 16d, 16e and 16h located on the end side are cured.

  Thus, even if thermal expansion occurs in the substrate 17 due to the irradiation with the ultraviolet light U by first curing the sealing agents 16 on the sides 16b, 16c, 16f, and 16g located near the center, this thermal expansion is performed. The positional deviation between the two substrates due to the above can be suppressed as much as possible.

  That is, when the substrate 17 is irradiated with the ultraviolet light U, the tube 26 that is a light source generates heat, so that the substrate located on the side closer to the tube 26 (the substrate located on the upper side in the example of FIG. 1) is farther. There is a tendency that the thermal influence due to heat generation is larger and the amount of thermal expansion is larger than the substrate located at (in the example of FIG. 1, the substrate located on the lower side). Therefore, the difference in thermal expansion between the two substrates appears as a positional deviation between the two substrates.

  Here, consider a case where the side 16b, the side 16c, the side 16a, and the side 16d shown in FIG. In this case, after the sealant for the side 16b and side 16c portions is cured, the two substrates are fixed at the side 16b and side 16c, so that the subsequent side 16a and side 16d portions Even if thermal expansion occurs in the substrate when the sealant is cured, positional deviation between the two substrates due to the thermal expansion is suppressed.

  Moreover, you may make it harden | cure the sealing agent 16 2 side by side simultaneously using the ultraviolet irradiation apparatus which has two irradiation means 21A, 21B shown in FIG.

  That is, first, the two sides 16b and 16c (FIG. 7 (a)) located closer to the center are simultaneously cured, and then the Y table 12 is rotated by 90 degrees to obtain the sides 16f and 16g (FIG. 7 (b)). The sealant 16 is cured at the same time. Thereafter, the distance between the irradiation means 21A and 21B is widened to simultaneously cure the two sides 16e and 16h (FIG. 7B) located at both ends, and then the Y table 12 is rotated 90 degrees in the opposite direction to the above. The sealing agents 16 on the edges 16a and 16d (FIG. 7A) are simultaneously cured. Even in this case, the positional deviation between the two substrates due to thermal expansion can be suppressed as described above.

After irradiation pattern P ₁ of the ultraviolet light U emitted from the lamp house is removed from the irradiation range for the application pattern of the sealant 16, describes an stop the emission of the ultraviolet light U blocking the drive signals to the power supplies 47 and 48 However, the power supplied by the power supplies 47 and 48 may be reduced and the amount of ultraviolet light U may be reduced without stopping. In this case, the amount of the ultraviolet light U to be reduced is set to such a level that the liquid crystal does not deteriorate in performance (deterioration, etc.) even if the ultraviolet light U is irradiated on the display surface of the liquid crystal display panel. Good. Even in such a case, since the power supplied by the power supplies 47 and 48 is reduced compared with the irradiation range, the unnecessary power consumption can be reduced at a place outside the irradiation range for the coating pattern of the sealant 16. it can.

  Although an example in which an electromagnetic wave generating unit is used as the excitation unit has been described, a high frequency generator, a microwave generator, or the like can be used as the electromagnetic wave generating unit.

  Although the example of the dropping method in which liquid crystal is dropped on the substrate and the liquid crystal is sealed between the substrates simultaneously with the bonding of the two substrates has been described, the two substrates are bonded via the sealing agent applied by providing the injection port. The present invention can also be applied to an injection method in which liquid crystal is injected from the above-described injection port after bonding and a bonded substrate.

  FIG. 10 shows a fourth embodiment which is a modification of the first embodiment. In the first embodiment, an X column guide 33 and an X drive screw 35 for moving the first lamp house 23a, and a Y column guide 43 and a Y drive screw 45 for moving the second lamp house 23b. As shown in FIG. 10 (the same parts as those in FIG. 1 are denoted by the same reference numerals), the X column guide 33 for moving the first lamp house 23a and the like are described. While the X drive screw 35 is installed on the base plate 1, a Y column guide 43 and a Y drive screw 45 for moving the second lamp house 23b are arranged above the lamp houses 23a and 23b and are not shown. The second lamp house 23b may be provided so as to be suspended from the support plate.

  In this case, the X column guide 33 and the X drive screw 35 of the first lamp house 23a and the Y column guide 43 and the Y drive screw 45 of the second lamp house 23b are arranged on different plates. The arrangement of the column guide and the drive screw is not restricted by the arrangement of the other column guide and the drive screw.

  Therefore, as shown in FIG. 10, the X column guide 33 and the X drive screw 35, and the Y column guide 43 and the Y drive screw 45 can be arranged so as to cross each other with an interval in the vertical direction. The retreat positions for retreating so as not to obstruct the movement of the house are on both sides of the base 2, that is, on both sides in the X direction of the base 2 with respect to the first lamp house 23 a, and on the base with respect to the second lamp house 23 b. 2 can be provided on both sides in the Y direction. As a result, the lamp houses 23a and 23b that have passed over the substrate 17 in order to cure the sealing agent 16 do not have to move again on the substrate for retraction and return to the original position. The time required to cure the 17 sealant 16 can be shortened.

  FIG. 11 shows a fifth embodiment of the present invention. This embodiment is a modification of the third embodiment shown in FIG. 9, and a pair of X column guides 33 are provided at both ends in the Y direction of the base plate 1 along the X direction. . In this embodiment, the X column guide 33 is formed by a permanent magnet that constitutes a linear motor as a driving means.

  The first to fourth irradiation means 21A to 21D are slidably engaged with the pair of X column guides 33 at the lower end portions of the pair of column 31a provided at both ends of the lamp house 23a. Is provided.

  An electromagnetic coil (not shown) constituting a linear motor is provided at the lower end of each support 31a with the X support guide 33 formed of a permanent magnet. Accordingly, the four irradiation means 21A to 21D can be independently driven and positioned along the X column guide 33.

  A plurality of light emitting diodes 60 are housed and arranged in a line along the longitudinal direction of the lamp house 23a in the lamp houses 23a of the irradiation units 21A to 21D. Each light emitting diode 60 emits ultraviolet light, and is disposed at the focal position of the reflector 24 (not shown in FIG. 11), similarly to the ultraviolet lamp 25a of the fourth embodiment. Therefore, if the light emitting diodes 60 of the respective irradiation means 21A to 21D are energized, the ultraviolet light emitted from the respective lamp houses 23a is converged linearly to irradiate the substrate 17.

  FIG. 11 shows each side along the Y direction, in which the lamp house 23a of each irradiation means 21A to 21D is a predetermined direction of the four rectangular sealing agents 16 obtained by bonding the two substrates 17 on the Y table 12 together. It shows a state of being positioned at the upper part of.

  In this state, if the light emitting diode 60 provided in the lamp house 23a of each of the irradiation means 21A to 21D is energized, the sides along the Y direction of the four rectangular patterns of the sealing agent 16 are collectively irradiated with ultraviolet light. Can do.

  In the state of FIG. 11, if each side along the Y direction of the sealing agent 16 is irradiated with ultraviolet light, the first and second irradiation means 21A and 21B out of the four irradiation means 21A to 21D are replaced with the base plate 1. Are moved to one end in the X direction, and the third and fourth irradiation means 21C, 21D are moved to the other end. In this state, the θ table 3 is rotated by 90 degrees, and the side of each sealing agent 16 that is not irradiated with the ultraviolet light is aligned from the X direction to the Y direction.

  If the θ table 3 is rotated 90 degrees, the first and second irradiation means 21A and 21B located at one end of the base plate 1 and the third and fourth irradiation means 21C and 21D located at the other end. The lamp house 23a is positioned above each side along the Y direction of the sealing agent 16 that is not irradiated with ultraviolet light. And if it supplies with electricity to the light emitting diode 51 of each lamp house 23a, the remaining edge where the ultraviolet light of the rectangular frame-shaped sealing agent 16 is not irradiated can be irradiated simultaneously, ie, collectively.

  As described above, when the first to fourth four irradiation units 21A to 21D are provided, when the sealing agent 16 is provided on the substrate 17 in four rectangular patterns, the Y direction of each sealing agent 16 is set. After simultaneously irradiating the side along the line with ultraviolet light, the substrate 17 is rotated 90 degrees so that the remaining side can be simultaneously irradiated with ultraviolet light. That is, since the sides along the predetermined direction of the sealing agent 16 can be irradiated with ultraviolet light all at once, it is possible to efficiently irradiate the sealing agent 16 with ultraviolet light.

  In the fifth embodiment, four irradiation means are provided. However, the number of irradiation means is not limited to four. For example, six rectangular frame-shaped sealing agents in two columns and three rows are provided on the substrate. If provided, if six irradiation means are provided on the X column guide 33 shown in FIG. 11, the side along the predetermined direction of the sealant can be collectively irradiated with ultraviolet light.

  That is, when irradiating the side of the sealant along the row direction with ultraviolet light, all six irradiation means are used. On the other hand, when irradiating the side of the sealant along the row direction with ultraviolet light, of the six irradiation means, two irradiation means located at both ends are respectively positioned at the end positions of the X column guide 33 shown in FIG. This is performed using the other four irradiation means. In this way, when the number of sides of the sealing agent that collectively irradiate ultraviolet light is smaller than the number of irradiation means, the number of irradiation means corresponding to the number of sides of the sealing agent is used, and the extra irradiation means is put on standby. Just keep it.

  Similarly, when the rectangular frame-shaped sealing agent is provided in 2 columns and 4 rows, it is only necessary to provide 8 irradiation means. In short, N rows of the rectangular pattern of the sealing agent provided in 2 columns and N rows are provided. Irradiation means may be provided according to the number. The number of columns is not limited to two, and may be three or more. In short, it is only necessary that the number of columns be within the range of the length of the lamp house.

  In addition, a rectangular dummy sealing agent that surrounds the sealing agent applied in a rectangular frame shape may be provided on the periphery of the substrate. In that case, if the irradiation means is simultaneously positioned and irradiated with the ultraviolet light on the side along the predetermined direction of the dummy sealant simultaneously with the side along the predetermined direction of the rectangular frame-shaped sealant, the ultraviolet light of the dummy sealant Irradiation can be performed simultaneously.

  Further, the example in which the light emitting diodes are housed and arranged in one row with respect to one lamp house has been described, but a plurality of light emitting diodes may be arranged with respect to one lamp house. By setting it as such a structure, the luminous intensity of the ultraviolet light irradiated from one lamp house can be increased. Even if the width dimension of the ultraviolet light is increased by arranging and arranging the light emitting diodes in a plurality of rows, the width dimension of the ultraviolet light can be reduced by providing the slit plate 28 having the slits 28a as shown in FIG. Can be limited.

  Further, all the light emitting diodes housed and arranged in the lamp house may be energized at once, or only the light emitting diodes positioned opposite to the sealing agent may be selectively energized. Referring to the example of FIG. 11, the lamp house 23a is positioned at the upper part of one side of the sealant. Among the light emitting diodes 60 of the lamphouse 23a, the lamp house 23a is opposed to the sealant. If there are, there are things that do not face each other.

  Since the light-emitting diode 60 that does not face the sealant does not always effectively irradiate the sealant with ultraviolet light even if it is energized, such a light-emitting diode 60 that is not energized and faces the sealant. Only 60 is energized. In this way, power consumption can be reduced.

  Further, in the second, third and fifth embodiments, the side along the X direction and the Y direction in the sealant applied on the substrate by one ultraviolet light irradiation device by rotating the θ table by 90 degrees As described in the example of irradiating both sides along the side with ultraviolet light, the ultraviolet light irradiation device for irradiating the side along the X direction in the sealant applied on the substrate with ultraviolet light, and applied on the substrate In addition, an ultraviolet light irradiation device for irradiating ultraviolet light to the side along the Y direction in the sealing agent may be provided, and the substrate may be rotated 90 degrees during the transfer of the substrate between the ultraviolet light irradiation devices. .

  In the first to fourth embodiments, a plurality of ultraviolet light lamps may be arranged in the lamp house of the irradiation means.

  Further, in each embodiment, the description has been given of the example in which the driving means (second X driving source, second Y driving source, linear motor) is provided in the X column guide and Y column guide as the guide unit. The means is not necessarily required. In short, it is sufficient that the relative movement between the substrate and the irradiation means is allowed, and the position may be manually adjusted.

  Note that the ultraviolet lamps of the first to fourth embodiments described above may be replaced with the light emitting diodes used in the fifth embodiment.

BRIEF DESCRIPTION OF THE DRAWINGS The perspective view which shows schematic structure of the ultraviolet light irradiation apparatus which shows 1st Embodiment of this invention. The front view of the ultraviolet light irradiation apparatus shown in FIG. The side view of the ultraviolet light irradiation apparatus shown in FIG. Sectional drawing of a lamp house. The expanded sectional view which shows a part of two board | substrate bonded together with the sealing compound. The block diagram of control of an ultraviolet light irradiation apparatus. Explanatory drawing when irradiating a substrate with ultraviolet light. The perspective view which shows schematic structure of the ultraviolet light irradiation apparatus of 2nd Embodiment of this invention. The perspective view which shows schematic structure of the ultraviolet light irradiation apparatus of 3rd Embodiment of this invention. The perspective view of the schematic structure of the ultraviolet light irradiation apparatus which shows 4th Embodiment which is a modification of 1st Embodiment. The perspective view of the ultraviolet irradiation device which shows the 5th Embodiment of this invention.

Explanation of symbols

  3 ... θ table, 7 ... X table, 12 ... Y table, 16 ... sealing agent, 17 ... substrate, 21 ... first irradiation means, 22 ... second irradiation means, 23 ... lamp house, 24 ... reflector ( (Pattern forming means), 25 ... ultraviolet light lamp, 26 ... tube, 28 ... slit plate (pattern forming means), 33 ... X column guide (guide means), 36 ... second X drive source (drive means), 43 ... Y support guides (guide means) 46, second Y drive source (drive means).

Claims (7)

In an ultraviolet light irradiation apparatus for irradiating and curing an ultraviolet light on a sealing agent between two bonded substrates,
Two irradiation means provided in a substantially orthogonal state and emitting ultraviolet light in a straight line of a predetermined length;
Guide means for movably supporting each irradiation means;
Driving means for relatively moving the irradiation means and the substrate along the guide member;
An ultraviolet light comprising: a control means for relatively adjusting the position of the irradiating means and the substrate so as to irradiate the ultraviolet light in accordance with the sealant portion by controlling the driving means. Irradiation device.   The control means irradiates the irradiation means and the substrate so as to irradiate the ultraviolet light in the order of the sealant portion located near the end from the sealant portion located near the center of the substrate. The ultraviolet light irradiation apparatus according to claim 1, wherein the ultraviolet light irradiation apparatus is moved relatively. The irradiation means, the ultraviolet light irradiation device according to claim 1 or 2, characterized in that it comprises a plurality of light emitting diodes arranged in a straight line. The irradiating means emits ultraviolet light by exciting a plurality of tubes in which a predetermined gas is sealed and linearly connected, and a gas provided corresponding to each tube and sealed in each tube. a plurality of excitation means to claim 1 or 2, characterized in that it is constituted a pattern for irradiating the substrate of the ultraviolet light emitted by being excited to the excitation means by the pattern forming means for forming linearly ultraviolet light irradiation device according to. In the ultraviolet light irradiation method of irradiating an ultraviolet light to the sealing agent applied in a rectangular frame shape between two bonded substrates and curing it,
Obtaining the positional deviation of the substrate;
Is emitted orthogonal one linear portion and other linear portion of the sealing material, from one and the other of the two irradiation means provided in the orthogonal state to the respective straight line on the basis of the positional deviation of the substrate obtained Aligning the substrate with the ultraviolet light; and
A step of sequentially emitting ultraviolet light in a straight line of a predetermined length from one and the other of the two irradiation means;
A step of sequentially irradiating one linear portion and the other linear portion of the sealing agent orthogonal to each other by linear ultraviolet light having a predetermined length. A substrate for manufacturing a bonded substrate by bonding at least one substrate coated with a sealing agent in a rectangular frame shape through the sealing agent and then curing the sealing agent by irradiating with ultraviolet light. In manufacturing equipment,
Substrate manufacturing apparatus characterized by comprising an ultraviolet light irradiation device according to claim 1. A substrate for manufacturing a bonded substrate by bonding at least one substrate coated with a sealing agent in a rectangular frame shape through the sealing agent and then curing the sealing agent by irradiating with ultraviolet light. In the manufacturing method,
A mounting step of mounting two substrates bonded together via the sealant on a support;
A step of irradiating ultraviolet light emitted in a straight line of a predetermined length in accordance with a portion of the sealing agent sandwiched between the two substrates placed on the support table and curing the sealing agent Comprising
The step of curing the sealant comprises
Of one linear portion and other linear portions perpendicular of the applied sealant in a rectangular frame shape, linear emitted on one of the straight portions, from one of the two irradiation means provided in the orthogonal state A step of curing by irradiating with ultraviolet light;
Substrate manufacturing method characterized by comprising a step of curing by irradiation with linear ultraviolet light emitted to the other linear portion of the sealant from the other illumination means.

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