JP2005099783A5 - - Google Patents

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JP2005099783A5
JP2005099783A5 JP2004248795A JP2004248795A JP2005099783A5 JP 2005099783 A5 JP2005099783 A5 JP 2005099783A5 JP 2004248795 A JP2004248795 A JP 2004248795A JP 2004248795 A JP2004248795 A JP 2004248795A JP 2005099783 A5 JP2005099783 A5 JP 2005099783A5
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ultraviolet light
substrate
sealing agent
irradiating
irradiation
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JP2004248795A
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JP4694803B2 (en
JP2005099783A (en
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Priority claimed from JP2004248795A external-priority patent/JP4694803B2/en
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Claims (11)

貼り合わされた２枚の基板間のシール剤に紫外光を照射して硬化させる紫外光照射装置において、
紫外光を所定の長さの直線状で出射する照射手段と、
この照射手段と上記基板とを相対的に二次元方向に移動自在に支持するガイド手段と、
上記照射手段と上記基板とを上記ガイド手段に沿って相対的に移動させる駆動手段と、
この駆動手段を制御して上記シール剤の部分だけに上記紫外光を照射させるように上記照射手段と上記基板とを相対的に位置調整する制御手段と
を具備したことを特徴とする紫外光照射装置。 In an ultraviolet light irradiation apparatus for irradiating and curing an ultraviolet light on a sealing agent between two bonded substrates,
An irradiation means for emitting ultraviolet light in a straight line having a predetermined length;
Guide means for supporting the irradiation means and the substrate relatively movably in a two-dimensional direction;
Driving means for relatively moving the irradiation means and the substrate along the guide means;
Control means for controlling the drive means to relatively adjust the position of the irradiation means and the substrate so that only the portion of the sealing agent is irradiated with the ultraviolet light;
An ultraviolet light irradiation apparatus comprising: 上記制御手段は、上記基板における中央寄りに位置する上記シール剤の部分から端部寄りに位置する上記シール剤の部分の順で上記紫外光を照射させるように、上記照射手段と上記基板とを相対的に移動させることを特徴とする請求項１記載の紫外光照射装置。 The control means irradiates the irradiation means and the substrate so as to irradiate the ultraviolet light in the order of the sealant portion located near the end from the sealant portion located near the center of the substrate. The ultraviolet light irradiation apparatus according to claim 1 , wherein the ultraviolet light irradiation apparatus is moved relatively. ほぼ直交する状態で２つの照射手段が設けられていることを特徴とする請求項１記載の紫外光照射装置。 Ultraviolet light irradiation device according to claim 1, characterized in that two illumination means are provided in a state substantially orthogonal. ２つの照射手段が所定の間隔でほぼ平行に設けられていることを特徴とする請求項１記載の紫外光照射装置。 Ultraviolet light irradiation device according to claim 1, wherein the two illumination means are provided substantially in parallel at predetermined intervals. 上記基板に設けられたシール剤の直線部分を照射する直線状の紫外光をそれぞれ出射する複数の照射手段が平行に設けられていて、
各照射手段は、上記シール剤の同じ方向に沿う複数の直線部分をそれぞれが出射する紫外光によって同時に照射するよう上記制御手段によって位置決め制御されることを特徴とする請求項１記載の紫外光照射装置。 A plurality of irradiation means for emitting linear ultraviolet light for irradiating the linear portion of the sealing agent provided on the substrate are provided in parallel,
Each illumination means, ultraviolet irradiation according to claim 1, wherein the controlled positioned by said control means so as to simultaneously irradiated by ultraviolet light, each a plurality of straight portions along the same direction of the sealant is emitted apparatus. 上記照射手段と上記基板とは相対的に回転方向に移動可能に設けられていることを特徴とする請求項１〜５のいずれかに記載の紫外光照射装置。 Ultraviolet light irradiation device according to any one of claims 1-5, characterized in that it is movable relative direction of rotation between said irradiation means and said substrate. 上記照射手段は、直線状に配置された複数の発光ダイオードを備えていることを特徴とする請求項１〜６のいずれかに記載の紫外光照射装置。 The irradiation means, the ultraviolet light irradiation device according to any one of claims 1-6, characterized in that it comprises a plurality of light emitting diodes arranged in a straight line. 上記照射手段は、所定のガスが封入されているとともに直線状に連設された複数のチューブと、各チューブに対応して設けられそれぞれのチューブに封入されたガスを励起して紫外光を出射させる複数の励起手段と、この励起手段に励起されて出射する紫外光の上記基板を照射するパターンを直線状に形成するパターン形成手段とによって構成されていることを特徴とする請求項１〜６のいずれかに記載の紫外光照射装置。 The irradiating means emits ultraviolet light by exciting a plurality of tubes in which a predetermined gas is sealed and linearly connected, and a gas provided corresponding to each tube and sealed in each tube. a plurality of excitation means to claim 1-6, characterized in that it is constituted a pattern for irradiating the substrate of the ultraviolet light emitted by being excited to the excitation means by the pattern forming means for forming linearly The ultraviolet light irradiation apparatus in any one of. 貼り合わされた２枚の基板間のシール剤に紫外光を照射して硬化させる紫外光照射方法において、
上記基板の位置ずれを求める工程と、
求めた上記基板の位置ずれに基づいて上記シール剤の直線部分のうち所定の直線部分を直線状に出射される紫外光に沿わせるよう上記基板を位置合わせする工程と
紫外光を所定の長さの直線状に出射する工程と、
所定の長さの直線状の紫外光によって上記シール剤の部分だけを照射する工程と
を具備したことを特徴とする紫外光照射方法。 In the ultraviolet light irradiation method of irradiating and curing the sealing agent between two bonded substrates by irradiating ultraviolet light,
Obtaining the positional deviation of the substrate;
A step of aligning the substrate so that a predetermined linear portion of the linear portion of the sealing agent is aligned with the ultraviolet light emitted linearly based on the obtained positional deviation of the substrate;
Emitting ultraviolet light in a straight line of a predetermined length;
Irradiating only a portion of the sealant with linear ultraviolet light of a predetermined length;
An ultraviolet light irradiation method characterized by comprising : 少なくとも一方にシール剤が矩形枠状に塗布された２枚の基板を上記シール剤を介して貼り合わせた後、上記シール剤に紫外光を照射することにて硬化させ貼り合わせ基板を製造する基板製造装置において、
請求項１〜８のいずれかに記載の紫外光照射装置を具備したことを特徴とする基板製造装置。 A substrate for manufacturing a bonded substrate by bonding at least one substrate coated with a sealing agent in a rectangular frame shape through the sealing agent and then curing the sealing agent by irradiating with ultraviolet light. In manufacturing equipment,
Substrate manufacturing apparatus characterized by comprising an ultraviolet light irradiation device according to any one of claims 1-8. 少なくとも一方にシール剤が矩形枠状に塗布された２枚の基板を上記シール剤を介して貼り合わせた後、上記シール剤に紫外光を照射することにて硬化させ貼り合わせ基板を製造する基板製造方法において、
前記シール剤を介して貼り合わされた２枚の基板を支持台上に載置する載置工程と、
前記支持台上に載置された前記２枚の基板間に挟まれた前記シール剤の部分だけを所定の長さの直線状に出射された紫外光によって照射し前記シール剤を硬化させる工程と
を具備したことを特徴とする基板製造方法。 A substrate for manufacturing a bonded substrate by bonding at least one substrate coated with a sealing agent in a rectangular frame shape through the sealing agent and then curing the sealing agent by irradiating with ultraviolet light. In the manufacturing method,
A mounting step of mounting two substrates bonded together via the sealant on a support;
Irradiating only a portion of the sealant sandwiched between the two substrates placed on the support base with ultraviolet light emitted in a straight line of a predetermined length to cure the sealant; A substrate manufacturing method characterized by comprising:
JP2004248795A 2003-08-28 2004-08-27 Ultraviolet light irradiation apparatus and irradiation method, substrate manufacturing apparatus and substrate manufacturing method Expired - Fee Related JP4694803B2 (en)

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JP2003209280 2003-08-28
JP2003209280 2003-08-28
JP2004248795A JP4694803B2 (en) 2003-08-28 2004-08-27 Ultraviolet light irradiation apparatus and irradiation method, substrate manufacturing apparatus and substrate manufacturing method

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JP2005099783A JP2005099783A (en) 2005-04-14
JP2005099783A5 true JP2005099783A5 (en) 2007-10-04
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JP2006195128A (en) * 2005-01-13 2006-07-27 Ushio Inc Device for laminating panel
JP5180439B2 (en) * 2005-01-28 2013-04-10 芝浦メカトロニクス株式会社 Ultraviolet light irradiation apparatus and irradiation method, substrate manufacturing apparatus and substrate manufacturing method
JP4852907B2 (en) * 2005-06-29 2012-01-11 ウシオ電機株式会社 Display panel bonding equipment
JP2007334039A (en) * 2006-06-15 2007-12-27 Ulvac Japan Ltd Light source device and method of panel alignment using the same
JP5060748B2 (en) * 2006-07-28 2012-10-31 芝浦メカトロニクス株式会社 Sealant curing apparatus and substrate manufacturing apparatus
JP5137001B2 (en) * 2006-11-30 2013-02-06 国立大学法人名古屋大学 Processing apparatus and method using atmospheric pressure plasma irradiation
KR100780367B1 (en) 2006-12-22 2007-11-30 (주)리드 Apparatus for hardening sealant of substrate for liquid crystal display panel and method for hardening sealant using the same
JP2009169386A (en) * 2007-12-18 2009-07-30 Ulvac Japan Ltd Optical irradiation device
KR101097307B1 (en) * 2009-04-16 2011-12-21 삼성모바일디스플레이주식회사 Sealing apparatus
KR101240367B1 (en) * 2009-04-28 2013-03-11 가부시키가이샤 알박 Light irradiation method and apparatus
JP2010266616A (en) * 2009-05-13 2010-11-25 Ulvac Japan Ltd Light irradiation device
KR101663563B1 (en) * 2009-12-24 2016-10-07 엘지디스플레이 주식회사 Methode of fabricating liquid crystal display device
KR101196324B1 (en) * 2010-07-20 2012-11-01 가부시키가이샤 아루박 Light irradiation apparatus
JP2013025054A (en) * 2011-07-20 2013-02-04 V Technology Co Ltd Curing processing apparatus for sealant and curing processing method therefor
JP2012086576A (en) * 2012-01-04 2012-05-10 Ulvac Japan Ltd Light source apparatus and method for laminating substrate using this
JP5767666B2 (en) * 2013-03-31 2015-08-19 Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 Light irradiation device
KR102232034B1 (en) * 2019-06-11 2021-03-25 세메스 주식회사 Apparatus for curing droplet

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