JP2018017952A - Light projection apparatus and light projection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light projection apparatus and a light projection method capable of forming a plurality of regions having different alignment directions on one workpiece by one pass of photoalignment treatment.SOLUTION: A light projection apparatus (polarized light projection apparatus) 300 comprises: a first light projection unit group including a plurality of light projection units which are installed on a conveyance path of workpieces W, polarize light from a light source by a first polarizer, and project first polarized light through a light emission opening; a second light projection unit group including a plurality of light projection units which are installed on the conveyance path in parallel with the first light projection unit group, polarize light from a light source by a second polarizer having a transmission axis in a direction different from the first polarizer, and project second polarized light through a light emission opening; and a projection blocking unit which defines a first region on a workpiece to be optically aligned by the first polarized light and a second region on the workpiece to be optically aligned by the second polarized light, by individually blocking the projection of the first and second polarized light onto the workpiece, the first and second polarized light being emitted through their respective emission openings of the plurality of light projection units.SELECTED DRAWING: Figure 7

Description

  The present invention relates to a light irradiation apparatus and a light irradiation method for irradiating a workpiece with polarized light.

In recent years, a technique called photo-alignment has been adopted in which alignment is performed by irradiating polarized light of a predetermined wavelength with respect to alignment processing of alignment films for liquid crystal display elements such as liquid crystal panels and alignment layers for viewing angle compensation films. Has been.
For example, Patent Document 1 discloses a light irradiation apparatus used for photo-alignment. This light irradiation apparatus includes a plurality of light sources arranged side by side in the width direction of the light irradiation region and a polarizing element that polarizes light from the light source, and is conveyed in a direction orthogonal to the direction in which the light sources are arranged. A photo-alignment process is performed by irradiating the workpiece with polarized light.

JP 2014-13277 A

By the way, the photo-alignment process has been developed not only for a large substrate such as a liquid crystal panel for a television screen but also for a small and medium liquid crystal display such as a smartphone. Therefore, there is a demand for efficiently producing displays of different sizes and different uses such as a large liquid crystal display and a small and medium liquid crystal display.
In order to meet such a demand, it is necessary to form a plurality of alignment regions having different alignment directions on a single substrate and to create a plurality of types of substrates using this substrate as a mother substrate. However, the conventional light irradiation apparatus can only irradiate the entire surface of one substrate with polarized light having a polarization axis in a certain direction. Therefore, a plurality of alignment regions having different alignment directions cannot be formed on one substrate.
Therefore, an object of the present invention is to provide a light irradiation apparatus and a light irradiation method capable of forming a plurality of regions having different alignment directions on a single workpiece by one photo-alignment treatment.

  In order to solve the above-described problems, one aspect of a light irradiation apparatus according to the present invention is a light irradiation apparatus that performs light alignment by irradiating polarized light onto a work on which a photo-alignment film is formed. A plurality of light irradiators that are installed on a transport path of the workpiece and the work path of the workpiece, and the light from the light source is polarized by the first polarizer and the first polarized light is irradiated from the light exit port. A first light irradiating unit group comprising a first part and a first light irradiating unit group arranged in parallel on the transport path and having a transmission axis in a direction different from that of the first polarizer. A second light irradiating unit group including a plurality of light irradiating units that are polarized by the two polarizers and irradiate the second polarized light from the light emitting port, and emitted from the light emitting ports of the plurality of light irradiating units, respectively. By individually blocking the irradiation of the polarized light to the workpiece, the first polarization Comprising a first region on the workpiece to be photo-alignment by light, and a radiation blocking portion defining a second region on the workpiece to be photo-alignment by the second polarized light.

  With the above configuration, the region on the workpiece irradiated with the first polarized light emitted from the first light irradiation unit group and the second light emitted from the second light irradiation unit group by the light blocking prevention unit. It is possible to define the region on the workpiece that is irradiated with the polarized light. Thereby, it is possible to irradiate a single work with a plurality of polarized lights having different polarization axes, and to irradiate a single work with a plurality of orientations having different orientation directions on a single work. Regions can be formed. Therefore, substrates of different sizes and different applications can be efficiently manufactured, and productivity can be improved.

In the light irradiation apparatus, the irradiation prevention unit may be configured by an irradiation control unit that can individually control lighting and extinction of the plurality of light irradiation units. In this way, by configuring each light irradiation unit to be individually controllable, the irradiation region is appropriately divided into a single workpiece with a plurality of polarized lights having different polarization axes without the need for additional members. Can be irradiated.
Furthermore, in the above-described light irradiation apparatus, the irradiation blocking portion is disposed between the light emission port and the workpiece, and thereby contributes to the light alignment of the light alignment film emitted from the light emission port. It may be configured by a plate member capable of blocking the polarized light. In this way, by using the plate member so that the polarized light emitted from each light irradiation unit can be individually shielded, for example, compared with the case of controlling the turning on and off of the light irradiation unit, It is possible to quickly switch between allowing and preventing irradiation.

  In the light irradiation apparatus, at least one of the first light irradiation unit group and the second light irradiation unit group is light that is allowed to be irradiated with the polarized light by the irradiation blocking unit. The polarized light is shielded at a boundary position between an irradiation allowable region where the irradiation unit is arranged and an irradiation prevention region where the light irradiation unit where irradiation of the polarized light is blocked by the irradiation blocking unit is arranged. A light shielding member may be provided. In this case, even when a plurality of alignment regions having different alignment directions to be formed on the workpiece are very close to each other, the polarized light emitted from the light irradiation part in the irradiation allowable region is directly below the irradiation blocking region. It is possible to prevent the workpiece from sneaking into the region, and to prevent the workpiece from being irradiated with undesired polarized light.

  Further, in the light irradiation device, the light shielding member is retracted from the boundary position in the irradiation possible region of the polarized light emitted from each light emission port of the plurality of light irradiation units and the irradiation possible region. You may be comprised so that movement between retreat positions is possible. Thereby, the light shielding member can be arranged at an appropriate position according to the positions (layouts) of the plurality of alignment regions to be formed on the workpiece. In addition, when the gap between the plurality of orientation regions on the workpiece is relatively large and it is not necessary to dispose the light shielding member at the boundary position, the light shielding member can be moved to the retracted position.

  Further, in the light irradiation apparatus, the irradiation blocking unit may pass the polarized light from the light irradiation unit located in a predetermined section in a direction perpendicular to the conveyance path in the direction along the conveyance path. May be prevented. In this case, it is possible to form an area where polarized light is not irradiated from any light irradiation unit on the work. That is, it is possible to irradiate the work on the workpiece with certain divisions without mixing a plurality of polarized lights having different directions of the polarization axes. Therefore, a plurality of alignment regions having different alignment directions can be appropriately formed on the workpiece.

Furthermore, in the above light irradiation apparatus, at least one of the first light irradiation unit group and the second light irradiation unit group includes a plurality of rows of the light irradiation units in a direction along the conveyance path. Also good. In this case, the integrated light quantity of the polarized light irradiated onto the workpiece can be ensured by a single photo-alignment process, and the time required for the photo-alignment process can be shortened.
In the light irradiation apparatus, a plurality of light irradiation units belonging to a predetermined row among the plurality of light irradiation units are orthogonal to the transport path with respect to the plurality of light irradiation units belonging to different rows, respectively. It may be arranged displaced in the direction. Thereby, the dispersion | variation in the integrated light quantity in the direction orthogonal to a conveyance path can be suppressed.

  Furthermore, in the above light irradiation apparatus, the plurality of light irradiation units belonging to a predetermined row among the plurality of rows of light irradiation units are illuminance in a direction orthogonal to the transport path of the polarized light irradiated from the light exit port. The distribution may be arranged so as to have a complementary relationship with the illuminance distribution in the direction orthogonal to the transport path of the polarized light irradiated from the light exits of the plurality of light irradiation units belonging to different columns. Thereby, the integrated light quantity in the direction orthogonal to the transport path can be made uniform.

Another aspect of the light irradiation method according to the present invention is a light irradiation method for performing light alignment by irradiating polarized light onto a work on which a photo-alignment film is formed, the light irradiation method being installed on the work transport path. In the first light irradiating device group including a plurality of light irradiating units that polarize light from the first light polarizer and irradiate the first polarized light from the light exit port, the light emitted from the plurality of light irradiating units Defining a first region on the workpiece to be photo-aligned by the first polarized light by individually blocking irradiation of the first polarized light respectively emitted from the mouth to the workpiece. And the first light irradiating unit group on the transport path, the light from the light source is polarized by a second polarizer having a transmission axis in a direction different from that of the first polarizer, and light is emitted. A first light source having a plurality of light irradiation units for irradiating the second polarized light from the mouth; In the light irradiation unit group of the plurality of light irradiation units, the second polarized light is individually prevented from being irradiated with the second polarized light respectively emitted from the light emission ports of the plurality of light irradiation units, so that light is emitted by the second polarized light. Defining a second region on the workpiece to be oriented, transporting the workpiece along the transport path by a stage, and irradiating the first polarized light on the first region on the workpiece And irradiating the second region on the workpiece with the second polarized light.
With the above configuration, a plurality of polarized light beams having different polarization axes can be irradiated onto a single work by dividing an irradiation region, and a plurality of different alignment directions can be formed on a single work by a single photo-alignment process. The alignment region can be formed. Therefore, substrates of different sizes and different applications can be efficiently manufactured, and productivity can be improved.

  According to the present invention, it is possible to irradiate a single workpiece with a plurality of polarized light beams having different polarization axes, so that the orientation direction can be adjusted on one workpiece by one photo-alignment treatment. A plurality of different alignment regions can be formed. Therefore, substrates of different sizes and different applications can be efficiently manufactured, and productivity can be improved.

It is a schematic block diagram which shows the polarized light irradiation apparatus of this embodiment. It is a structural example of a light irradiation apparatus group. It is a structural example of the light irradiation apparatus using a lamp | ramp. It is a structural example of the light irradiation apparatus using a lamp | ramp. It is a structural example of the light irradiation apparatus using LED. It is a structural example of the light irradiation apparatus using LED. It is an example of lighting control of the light irradiation apparatus in the first embodiment. It is a figure explaining operation | movement of 1st embodiment. It is a figure explaining a normal process. It is a structural example of the light irradiation apparatus group in 2nd embodiment. It is an example of composition of a shade part. It is an example of composition of a shade part. It is an example of lighting control of the light irradiation device in the third embodiment. It is a figure which shows another example of 3rd embodiment. It is a figure which shows the control block of a polarized light irradiation apparatus. It is another lighting control example of a light irradiation apparatus. It is another structural example of a light irradiation apparatus group. It is another structural example of a light irradiation apparatus group.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
FIG. 1 is a schematic configuration diagram showing a polarized light irradiation apparatus 300 of the present embodiment.
The polarized light irradiation device 300 conveys the workpiece W with a first light irradiation device group (first light irradiation unit group) 100A, a second light irradiation device group (second light irradiation unit group) 100B, and the like. A transport unit 200. Here, the workpiece W is, for example, a rectangular substrate on which a photo-alignment film is formed. The polarized light irradiation device 300 linearly moves the workpiece W by the transport unit 200 while irradiating polarized light (polarized light) from at least one of the first light irradiation device group 100A and the second light irradiation device group 100B. The photo-alignment treatment is performed by irradiating the photo-alignment film of the workpiece W with the polarized light.
In the present embodiment, the polarized light irradiation apparatus 300 includes a first optical alignment process that irradiates the entire surface of one workpiece W with polarized light having a polarization axis in the same direction and a plurality of workpieces on one workpiece W. It is possible to switch to a second optical alignment process that irradiates polarized light having a polarization axis in a different direction for each alignment region.

The transport unit 200 includes a stage 21 on which the workpiece W is placed. The stage 21 is a flat plate stage that can hold the work W by suction using a method such as vacuum suction. In the present embodiment, the stage 21 and the workpiece W are rectangular, but the present invention is not limited to this and may be any shape. Further, the configuration is not limited to the configuration in which the workpiece W is sucked and held by a flat plate stage, and may be a configuration in which the workpiece W is sucked and held by a plurality of pins.
The transport unit 200 includes an X-direction drive mechanism 22 for moving the stage 21 in the X direction. The X direction drive mechanism 22 is, for example, a linear motor drive mechanism, and includes two guides 22A extending along the X direction, a magnet plate 22B disposed between the two guides 22A, and a coil module 22C. . The two guides 22 </ b> A and the magnet plate 22 </ b> B are disposed on the upper surface of an installation base (not shown). The magnet plate 22B is composed of a plurality of magnets arranged at equal intervals in the X direction by alternately changing the polarities of adjacent magnetic poles. The coil module 22C is attached to the center of the back surface of the stage 21 so as to face the magnet plate 22B. As the X-direction drive mechanism 22, for example, a mechanism using a ball screw can be adopted.

As described above, the stage 21 is configured to be capable of reciprocating in the X direction along the guide 22 </ b> A that is a conveyance axis. The configuration of the X-direction drive mechanism 22 is not limited to the configuration shown in FIG. 1, and any configuration can be adopted as long as the stage 21 can be moved in the X direction.
Furthermore, the transport unit 200 may include a θ movement mechanism 24 that constitutes a rotation control unit that can rotate the stage 21 in the θ direction (around the Z axis). In this case, the stage 21 is mounted on the fixed base 25 so as to be rotatable in the θ direction, and the θ moving mechanism 24 adjusts the rotation angle of the stage 21 in the θ direction.

  The moving path of the stage 21 is designed to pass directly under the first light irradiation device group 100A and the second light irradiation device group 100B. The conveyance unit 200 irradiates polarized light by the first light irradiation device group 100 </ b> A and the second light irradiation device group 100 </ b> B from the workpiece mounting position set on one side of the irradiation region in the X direction. And pass through the irradiation region. Furthermore, after the workpiece W has completely passed through the irradiation area, the conveyance unit 200 may return the workpiece W and pass the irradiation area again. In this case, the photo-alignment process for the photo-alignment film of the workpiece W may be performed by both the forward movement and the backward movement.

As shown in FIG. 2, the first light irradiation device group 100 </ b> A and the second light irradiation device group 100 </ b> B each include a plurality of light irradiation devices (light irradiation units) 10. In the present embodiment, the plurality of light irradiation devices 10 respectively belonging to the first light irradiation device group 100A and the second light irradiation device group 100B are in a direction (Y direction) orthogonal to the workpiece W conveyance direction (X direction). Are arranged in a line.
As shown in FIGS. 3 and 4, each light irradiation device 10 includes a lamp 11 that is a linear light source and a mirror 12 that reflects light from the lamp 11. Moreover, the light irradiation apparatus 10 includes a wavelength selection filter 13 and a polarizer 14 disposed on the light emission side. Furthermore, the light irradiation device 10 includes a lamp house 15 that houses a lamp 11, a mirror 12, a wavelength selection filter 13, and a polarizer 14.

  Each light irradiation apparatus 10 is along a direction (Y direction) orthogonal to the conveyance direction (X direction) of the workpiece | work W, for example in the state which made the longitudinal direction of the lamp | ramp 11 correspond to the conveyance direction (X direction) of the workpiece | work W. Side by side. In addition, each light irradiation apparatus 10 may be arrange | positioned in the state which made the longitudinal direction of the lamp | ramp 11 correspond to a Y direction, and may arrange | position the longitudinal direction of the lamp | ramp 11 diagonally with respect to a X direction. Further, as will be described later, the light irradiation devices 10 are not limited to be arranged in a single row, and may be arranged in a plurality of rows in the X direction. In this case, the light irradiation devices 10 in different rows may be arranged in a state of being displaced in the Y direction so-called staggered arrangement.

Hereinafter, a specific configuration of the light irradiation apparatus 10 will be described.
The lamp 11 is a long so-called long arc discharge lamp. The length of the light emission length per one is about 20 cm to 50 cm. The lamp 11 is a discharge lamp such as a high-pressure mercury lamp, a metal halide lamp in which other metal and halogen are added to mercury, a metal halide lamp in which a metal other than mercury and halogen are enclosed, and the like, depending on the enclosed luminescent species. Then, ultraviolet light having a wavelength of 200 nm to 400 nm is emitted.
As materials for the photo-alignment film, those that are aligned by light having a wavelength of 254 nm, those that are aligned by light having a wavelength of 313 nm, and materials that are aligned by light having a wavelength of 365 nm are known. It selects suitably according to the wavelength to be performed.

The mirror 12 reflects the radiated light from the lamp 11 in a predetermined direction. For example, the mirror 12 is a bowl-shaped condensing mirror having an elliptical or parabolic cross section. The mirror 12 is arranged such that its longitudinal direction coincides with the longitudinal direction of the lamp 11.
The lamp house 15 has, on the bottom surface thereof, a light exit port through which radiated light from the lamp 11 and reflected light from the mirror 12 pass. The wavelength selection filter 13 and the polarizer 14 are attached to the light exit of the lamp house 15, and the polarizer 14 passes through the light exit and polarizes light having a wavelength selected by the wavelength selection filter 13.
As the wavelength selection filter 13, for example, a quartz plate on which an antireflection film (AR coating) is formed can be used. By appropriately selecting the material and thickness of the AR coat, the wavelength selection filter 13 can be a low-pass filter that transmits light having a wavelength shorter than the specific wavelength, a high-pass filter that transmits light having a wavelength longer than the specific wavelength, It can function as a band-pass filter that transmits light in a wavelength region having a specific upper and lower limit.

The polarizer 14 is disposed so as to cover an area corresponding to the irradiation area of the lamp 11. The polarizer 14 is supported by, for example, a frame. The polarizer 14 is, for example, a wire grid type polarizing element, and the number of the polarizers 14 arranged in each light irradiation device 10 is appropriately selected according to the size of the region where the polarized light is irradiated. For example, for each light irradiation device 10, one or two polarizers 14 are housed in a frame and arranged on the light emission side.
In addition, each polarizer 14 which comprises one light irradiation apparatus group is arrange | positioned so that a transmission axis may face the same direction, respectively. In the present embodiment, the direction of the transmission axis of each polarizer 14 of the light irradiation device 10 included in the first light irradiation device group 100A and each polarizer 14 of the light irradiation device 10 included in the second light irradiation device group 100B. The direction of the transmission axis is different. The angle of the polarizer 14 can be adjusted by an angle adjusting mechanism provided on the frame at a very small level. However, when the axis angles are largely different as in the first polarization axis and the second polarization axis of the present embodiment, different polarizing plates are used, or in the case of a square, the angle is changed manually.
Thus, the light irradiation device 10 belonging to the first light irradiation device group 100A polarizes the light from the light source by the first polarizer and irradiates the first polarized light from the light exit. In addition, the light irradiation device 10 belonging to the second light irradiation device group 100B is a second polarization that polarizes light from the light source by the second polarizer and has a transmission axis in a direction different from that of the first polarized light. The light is polarized by the optical element, and the second polarized light having a polarization axis direction different from that of the first polarized light is emitted from the light exit port.

In addition, although this embodiment demonstrates the case where the light source of each light irradiation apparatus 10 is a discharge lamp, LED and LD which radiate | emit an ultraviolet light can also be used as a light source. In that case, the direction in which the LEDs and LDs are arranged corresponds to the longitudinal direction of the lamp 11.
5 and 6 are configuration examples of the light irradiation device 10 'when an LED is used as the light source. The light irradiation device 10 ′ includes an LED 11a that is a light source, an LED substrate 11b on which the LED 11a is mounted, a heat sink 11c, a lens 11d, and a cooling mechanism 11e. In addition, the light irradiation device 10 ′ includes a wavelength selection filter 13 and a polarizer 14 arranged on the light emission side, like the light irradiation device 10 described above. Furthermore, the light irradiation device 10 ′ includes a lamp house 15 that accommodates them.
When the light source is an LED, the shape of the light irradiation device 10 on the XY plane can be determined according to the arrangement of the LEDs 11a. That is, the shape of the light irradiation device 10 on the XY plane can be an arbitrary shape such as a square. Therefore, the freedom degree of arrangement | positioning of the light irradiation apparatus 10 is large.

  The light irradiation devices 10 belonging to the first light irradiation device group 100A and the light irradiation devices 10 belonging to the second light irradiation device group 100B are configured to be individually controlled to be lit. In this specification, “lighting” refers to a work of light having a wavelength (wavelength contributing to photo-alignment) in which the photo-alignment film material has sensitivity, such as 254 nm or 313 nm, among polarized light emitted from the light irradiation device 10. It means a state where irradiation to W is allowed. Further, “extinguishment” means a state in which irradiation of the light having a wavelength contributing to the above-described photo-alignment to the work W among the polarized light irradiated from the light irradiation device 10 is blocked. In this embodiment, the irradiation control part 51 (FIG. 15) mentioned later controls the turning on / off of each light irradiation apparatus 10 by controlling the input electric power to each light irradiation apparatus 10.

  When the polarized light irradiation device 300 performs the second light alignment process, the light irradiation devices 10 of the first light irradiation device group 100A and the second light irradiation device group 100B are individually controlled to be turned on, as shown in FIG. As shown, the first alignment region A2 that is irradiated with only the first polarized light on the workpiece W and subjected to photo-alignment processing, and the second alignment that is irradiated with only the second polarized light and subjected to photo-alignment processing. Region B2 is formed. Here, the first alignment region A2 is a region including a region (first region) A1 on the workpiece W to be irradiated with only the first polarized light, and the second alignment region B2 is the second alignment region B2. This is a region including a region (second region) B1 on the workpiece W to be irradiated with only the polarized light.

  As shown in FIG. 2, a predetermined position in the Y direction of the workpiece W is defined as a boundary position Pa, and the first alignment region A2 is on one side (right side in FIG. 2), and the second is on the other side (left side in FIG. 2). When the alignment region B2 is formed, as shown in FIG. 7, the light irradiation device 10 constituting the first light irradiation device group 100A is located on one side (right side in FIG. 7) of the boundary position Pa. The light irradiation device 10 is controlled to be in a lighting state, and the light irradiation device 10 located on the other side (left side in FIG. 7) of the boundary position Pa is controlled to be in a light-off state. In addition, among the light irradiation devices 10 constituting the second light irradiation device group 100B, the light irradiation device 10 located on one side of the boundary position Pa (the right side in FIG. 7) is in the extinguished state and the other of the boundary positions Pa. The light irradiation device 10 located on the side (left side in FIG. 7) is controlled to be in a lighting state.

In this case, the first polarized light is irradiated to the workpiece W that passes directly under the light irradiation device 10 in the lighting state belonging to the first light irradiation device group 100A, and passes directly under the light irradiation device 10 in the off state. The work W is not irradiated with the first polarized light. Similarly, the second polarized light is irradiated to the workpiece W that passes directly under the light irradiation device 10 in the lighting state belonging to the second light irradiation device group 100B, and passes directly under the light irradiation device 10 in the off state. The work W is not irradiated with the second polarized light.
Therefore, as shown in FIG. 8, on the work W passing through the first light irradiation device group 100A and the second light irradiation device group 100B, the first side is located on one side of the boundary position Pa (the right side in FIG. 8). Only the second polarized light is irradiated on the other side (left side in FIG. 8). As a result, as shown in FIG. 2, the first alignment region A2 including the region A1 and the second alignment region B2 including the region B1 are separately formed in the Y direction.

  As described above, the first light irradiation device group 100A including the plurality of light irradiation devices 10 that emit the first polarized light, and the second light including the plurality of light irradiation devices 10 that emit the second polarized light. The irradiation device group 100B is juxtaposed in the X direction, and the light irradiation devices 10 constituting the first light irradiation device group 100A and the second light irradiation device group 100B are individually controlled to be turned on. Thereby, it is possible to irradiate only necessary areas on the workpiece W with necessary polarized light and not to irradiate unnecessary or prohibited areas with polarized light. As a result, a plurality of alignment regions having different alignment directions can be formed on one workpiece W in one manufacturing process.

In recent years, photo-alignment processing has been developed not only for large-sized liquid crystal displays for television screens but also for small- and medium-sized liquid crystal displays for smartphones, and production of liquid crystal displays of various types and dimensions is expected. In order to efficiently process such various types of substrates, it is necessary to cut out a plurality of different types of cell substrates from one multi-sided mother substrate.
As described above, the polarized light irradiation apparatus 300 according to the present embodiment can form a plurality of alignment regions having different alignment directions on a single workpiece W by a single optical alignment process. Therefore, it is possible to efficiently produce a plurality of types of substrates and to obtain cost merit. In addition, it is possible to respond flexibly to individual orders.

When the polarized light irradiation device 300 performs the first light alignment process, which is a normal process, as shown in FIG. 9, all the light irradiation devices 10 in the first light irradiation device group 100A are turned on, All the light irradiation devices 10 in the second light irradiation device group 100B are turned off. Thereby, the first polarized light can be applied to the entire surface of the workpiece W from the light irradiation device 10 belonging to the first light irradiation device group 100A, and the photo-alignment treatment can be performed. That is, only the first alignment region A2 including the region A1 is formed on the workpiece W.
As described above, the polarized light irradiation apparatus 300 can ensure flexibility corresponding to a wide variety of workpieces W while performing normal production by a normal process.

(Second embodiment)
Next, a second embodiment of the present invention will be described.
In the first embodiment described above, the case where the irradiation region of the polarized light is divided only by the lighting control of the light irradiation device 10 has been described. However, when a plurality of alignment regions having different alignment directions are very close to the Y direction on the workpiece W, polarized light to be irradiated only to adjacent alignment regions (polarized light having a polarization axis angle that should not be irradiated) ) May be irradiated.
Therefore, in the second embodiment, in order to form the alignment region on the workpiece W more appropriately, as shown in FIG. 10, the light shielding unit 16 is provided at the boundary position between the lighting region and the non-lighting region of the light irradiation device 10. Provide. Here, the lighting region is a region (irradiation allowable region) where the light irradiation device 10 controlled to be in a lighting state is arranged in one light irradiation device group, and the light-off region is controlled to be in a light-off state. This is a region (irradiation blocking region) where the light irradiation device 10 is disposed.

  As shown in FIG. 10, the light shielding unit 16 is provided in each of the first light irradiation device group 100A and the second light irradiation device group 100B. The light shielding unit 16 can be disposed at a boundary position between the lighting region and the non-lighting region of the light irradiation device 10 within the irradiation possible region of the light irradiation device group. More specifically, the light shielding unit 16 is disposed on the emission side of the light irradiation device 10 closest to the lighting region among the light irradiation devices 10 belonging to the light-off region at the boundary between the lighting region and the light-off region.

FIG. 11 is a diagram illustrating a configuration example of the light shielding unit 16 included in the first light irradiation device group 100A. In addition, since the light-shielding part 16 with which the 2nd light irradiation apparatus group 100B is provided has the structure similar to the light-shielding part 16 with which the 1st light irradiation apparatus group 100A is provided, the 1st light irradiation apparatus group 100A is provided here. The light shielding unit 16 will be described.
The light shielding unit 16 includes a light shielding plate 16a disposed at a boundary position Pa between the lighting region α and the light extinguishing region β, and a light shielding plate driving unit 16b capable of moving the light shielding plate 16a in the Y direction. The light shielding plate 16a is a light shielding member that is disposed below the polarizer 14 of the light irradiation device 10 belonging to the first light irradiation device group 100A and above the workpiece W. The light shielding plate 16a may be a metal plate or a wavelength selection filter that cuts a polarized light component. The light shielding plate 16a blocks light having a wavelength that contributes to the light orientation of the work W irradiated from the light irradiation device 10 in the lighting area α, and irradiates the light to the work W immediately below the light-off area β from the lighting area α. Any configuration can be used as long as it can prevent the above.

  The light shielding plate 16a has a predetermined length in the height direction (Z direction) in order to prevent the light emitted from the light exit of the light irradiation device 10 in the lighting region α from entering the light-off region β. It may be. The gap G between the upper surface of the workpiece W and the lower end surface of the light shielding plate 16a is determined in consideration of the allowable value of the amount of light sneaking into the extinguishing region β, the possibility of contact between the light shielding plate 16a and the workpiece W, and the like. can do. However, the shape of the light shielding plate 16a is not limited to the shape shown in FIG. 11, and the light shielding plate 16a may be a flat plate member arranged horizontally, for example, as shown in FIG. In this case, the light shielding plate 16a may be constituted by a set of a plurality of sub-plate members as shown in FIG.

The light shielding plate driving unit 16b is, for example, a motor driving mechanism, and is configured to be able to move the light shielding plate 16a in the Y direction. The position of the light shielding plate 16a in the Y direction is between the area A1 where only the first polarized light is irradiated on the workpiece W and the area B1 where only the second polarized light is irradiated on the workpiece W. It is determined based on the center position of the gap in the Y direction and the distance of the gap in the Y direction. The position of the light shielding plate 16a in the Y direction is determined by an irradiation control unit 51 (FIG. 15) described later, and the light shielding plate driving unit 16b drives the light shielding plate 16a based on the information determined by the irradiation control unit 51. To do.
With such a configuration, the polarized light irradiation device 300 can appropriately prevent irradiation of undesired polarized light. Therefore, even when a plurality of alignment regions having different alignment directions on the workpiece W are very close to the Y direction, the plurality of alignment regions can be appropriately formed on the workpiece.

(Third embodiment)
Next, a third embodiment of the present invention will be described.
In the second embodiment described above, the case where the light shielding unit 16 prevents undesired irradiation of polarized light has been described. In the third embodiment, in the first light irradiation device group 100A and the second light irradiation device group 100B, by providing a completely extinction zone in which neither light irradiation device 10 is lit in the X direction, A case of preventing irradiation of desired polarized light will be described.
FIG. 13 is an example in which in the first light irradiation device group 100A and the second light irradiation device group 100B, the two light irradiation devices 10 located in the center are turned off, and the complete light-off zone 17 is provided. In this case, the non-irradiated region C in which neither the first polarized light nor the second polarized light is irradiated on the workpiece W between the first alignment region A2 and the second alignment region B2 in the Y direction. Is formed.

Here, in the complete light extinction zone 17, for example, a predetermined number of light irradiation devices 10 on both sides in the Y direction are set in a light extinction state with the center position in the Y direction of the gap between the region A1 and the region B1 as the center. In the complete extinction zone 17, when the distance in the Y direction between the area A1 and the area B1 is known in advance by work information or the like, the number of the light irradiation devices 10 to be extinguished is determined based on the information. May be.
In this way, by providing the completely extinguished zone, it is possible to irradiate the work W by dividing the region without mixing a plurality of polarized lights having different directions of the polarization axes. Therefore, a plurality of alignment regions having different alignment directions can be appropriately formed on the workpiece W. Moreover, since the light irradiation apparatus 10 which is not required for the photo-alignment process can be turned off by providing the complete light extinction zone, it is possible to suppress the light irradiation apparatus 10 from being turned on unnecessarily.

As shown in FIG. 14, the first light irradiation device group 100A and the second light irradiation device group 100B may be physically separated from each other in the X direction. In this case, it is possible to more reliably prevent unwanted irradiation of polarized light.
Furthermore, as shown in FIG. 14, when the first light irradiation device group 100A and the second light irradiation device group 100B are arranged apart from each other in the X direction, the workpiece W is in the first light irradiation device group. After passing through 100A, the stage 21 may be moved in the Y direction before passing through the second light irradiation device group 100B.

(Control system)
The processing in each of the above embodiments can be performed by a control unit included in the polarized light irradiation apparatus 300 shown in FIG. A control part is PLC (programmable logic controller), for example, and is comprised so that control of each part of the polarized light irradiation apparatus 300 is possible. Specifically, as shown in FIG. 15, the control unit includes a lighting control unit 51 that performs lighting control of each light irradiation device 10, control of the light shielding unit 16 included in each light irradiation device group, and the stage 21. And a stage control unit 52 that performs conveyance control, rotation control of the stage 21, and the like.

The irradiation control unit 51 acquires work information from the host computer 60. Here, the work information includes information such as the type and model of the work W. The irradiation control unit 51 determines a work layout such as a production condition (conveying speed of the workpiece W, input power to the light irradiation device 10, etc.) and a boundary position of an orientation region on the workpiece W based on the acquired workpiece information. To do. The irradiation control unit 51 determines the production conditions and the work layout from the work information based on information indicating the correspondence relationship between the work information stored in advance and the production conditions and the work layout.
Then, the irradiation control unit 51 supplies power from the power supply 70 to each light irradiation device 10 by the lamp lighting control unit based on the determined information, and performs lighting control of the light irradiation device 10. In addition, based on the above information, the irradiation control unit 51 controls the light shielding plate driving unit 16b constituting the light shielding unit 16 by the light shielding unit control unit, and moves the light shielding plate 16a.

The stage control unit 52 acquires workpiece information from the host computer 60, drives and controls the X-direction drive mechanism 22 and the θ movement mechanism 24 based on the acquired workpiece information, and performs conveyance control, rotation control, and the like of the stage 21. At this time, the stage control unit 52 acquires position information (X direction position and θ rotation angle) of the stage 21 from the X direction driving mechanism 22 and the θ moving mechanism 24, and performs conveyance control, rotation control, and the like of the stage 21.
With the above configuration, the polarized light irradiation apparatus 300 according to the present embodiment can form a plurality of different alignment regions on a single workpiece W by one optical alignment process, as described above.

(Modification)
In each of the above embodiments, the case where the workpiece W is divided into two alignment regions in the Y direction has been described. However, the workpiece W may be divided into three or more alignment regions. For example, as shown in FIG. 16, by controlling lighting of each light irradiation device 10, the work W can be divided into three orientation regions in the Y direction. Further, the work W can be divided into a plurality of alignment regions in the X direction.
Moreover, in each said embodiment, although the polarized light irradiation apparatus 300 demonstrated the case where it provided with the light irradiation apparatus group which irradiates two types of polarized light of 1st polarized light and 2nd polarized light, polarized light was demonstrated. You may make it provide the light irradiation apparatus group which irradiates three or more types of polarized light from which the direction of an axis differs.

Further, in each of the above embodiments, the lighting control of the light irradiation device 10 is performed to control the allowance and prevention of irradiation of the polarized light emitted from the light emission port of the light irradiation device 10 to the workpiece W. explained. However, by disposing a plate member between the light exit port of the light irradiation device 10 and the workpiece W, the polarized light having a wavelength that contributes to the photo-alignment of the photo-alignment film emitted from the light exit port is shielded. May be.
In this case, the plate member may be installed on the light irradiation device 10 or on the stage 21. Further, the plate member may be installed on both the light irradiation device 10 and the stage 21. Moreover, a plate member may be installed for every light irradiation apparatus 10, for example, is comprised by the aggregate | assembly of several subplate members like the light-shielding part 16 shown in FIG. Also good. Furthermore, the lighting control of the light irradiation device 10 and the light shielding control by the plate member may be combined and executed.

Further, in each of the above embodiments, each light irradiation device group has been described as a light irradiation device array having only one column, but the number of columns of the light irradiation devices 10 in the X direction may be increased. For example, as shown in FIG. 17, the first light irradiation device group 100A and the second light irradiation device group 100B may each include the light irradiation devices 10 in three rows. Thereby, it is possible to appropriately secure the integrated light amount without slowing down the conveyance speed of the workpiece W.
Further, in this case, the light irradiation devices 10 in the different rows are displaced in the Y direction so that the illuminance distributions in the Y direction of the polarized light respectively irradiated from the light irradiation devices 10 in the different rows have a complementary relationship. (For example, staggered arrangement). Thereby, the integrated light quantity in the Y direction can be made uniform.

In each of the above embodiments, after the work W passes through the first light irradiation device group 100A and the second light irradiation device group 100B and the outward movement is finished, the stage 21 is moved in the Y direction and then the return path. You may start moving. In this case, the photo-alignment process for the photo-alignment film of the workpiece W is performed in both the forward movement and the backward movement. Thereby, as in the case where a plurality of rows of light irradiation devices 10 are arranged in a staggered manner in each light irradiation device group as described above, the integrated light amount in the Y direction can be made uniform.
Moreover, in each said embodiment, it is the structure which rock | fluctuates in the direction (Y direction) orthogonal to a conveyance direction, while the workpiece | work W passes the 1st light irradiation apparatus group 100A and the 2nd light irradiation apparatus group 100B. There may be. Also in this case, the integrated light quantity in the Y direction can be made uniform.

Furthermore, the number of columns of the light irradiation device 10 may be different between the first light irradiation device group 100A and the second light irradiation device group 100B. For example, as shown in FIG. 18, the first light irradiation device group 100A may be three rows, and the second light irradiation device group 100B may be two rows. Moreover, you may vary the arrangement direction of the light irradiation apparatus 10 for every light irradiation apparatus group. In FIG. 18, the longitudinal direction of the light irradiation device 10 belonging to the first light irradiation device group 100A is made to coincide with the X direction, and the longitudinal direction of the light irradiation device 10 belonging to the second light irradiation device group 100B is made to coincide with the Y direction. An example is shown. Thus, by arranging the longitudinal direction of the light irradiation device 10 to coincide with the Y direction, the increase in the footprint of the device due to the increase in the number of columns in the X direction of the light irradiation device 10 is suppressed. Can do.
In the case of the example shown in FIG. 18, the first light irradiation device group 100 </ b> A including the three rows of light irradiation devices 10 is used for the first light alignment processing that is a normal production, and the second light alignment processing is performed. This can be performed using the first light irradiation device group 100A and the second light irradiation device group 100B. In that case, when scanning under the second light irradiation device group 100B including the two rows of light irradiation devices 10 and irradiating the polarized light, the conveyance amount of the workpiece W is slowed to adjust the integrated light amount. It may be.

  In each of the above embodiments, the case where the present invention is applied to the single-stage polarized light irradiation apparatus 300 in which one stage 21 reciprocates directly under the lamp (light irradiation apparatus group 100A, 100B) has been described. The configuration of the polarized light irradiation apparatus 300 is not limited to the configuration shown in FIG. For example, the present invention can also be applied to a so-called twin stage type polarized light irradiation apparatus 300 in which two stages reciprocate under a lamp. Further, the present invention can also be applied to an apparatus in which a plurality of workpieces W are placed on one stage and a light alignment process is performed by irradiating polarized light having a different polarization axis for each workpiece W.

Furthermore, in the said embodiment, the carrying in position and the carrying out position of the workpiece | work W are not specifically limited. For example, the unprocessed work W may be carried in and the processed work W may be carried out at a work mounting position set on one side of the irradiation area in the X direction, or one of the irradiation areas in the X direction may be carried out. The workpiece W may be carried in from the other side, and the workpiece W may be carried out from the other side.
Moreover, in the said embodiment, although the case where this invention was applied to a polarized light irradiation apparatus was demonstrated, it is not limited to this. For example, the present invention can also be applied to a light irradiation apparatus such as a DI (direct image) exposure apparatus or an ultraviolet irradiation apparatus that performs thermosetting treatment from ultraviolet rays. In the case of these light irradiation apparatuses, it is possible to divide the work into a plurality of regions and perform different light irradiation processes for each of the divided regions.

  DESCRIPTION OF SYMBOLS 10 ... Light irradiation apparatus, 11 ... Lamp, 12 ... Mirror, 13 ... Wavelength selection filter, 14 ... Polarizer, 15 ... Lamp house, 16 ... Light-shielding part, 16a ... Light-shielding plate, 16b ... Light-shielding-plate drive part, 17 ... Complete Unlit zone, 21 ... stage, 100A ... first light irradiation device group, 100B ... second light irradiation device group, 200 ... conveying unit, 300 ... polarized light irradiation device

Claims (10)

A light irradiation device that performs light alignment by irradiating polarized light onto a work on which a photo-alignment film is formed,
A stage for conveying the workpiece along a predetermined conveyance path;
A first light irradiation unit group provided on the transport path of the workpiece, including a plurality of light irradiation units that polarize light from a light source by a first polarizer and irradiate the first polarized light from a light exit port; ,
The light from the light source is arranged in parallel with the first light irradiation unit group on the transport path, and is polarized by a second polarizer having a transmission axis in a direction different from that of the first polarizer. A second light irradiation unit group comprising a plurality of light irradiation units for irradiating the second polarized light;
The first light on the workpiece to be photo-aligned by the first polarized light is individually blocked by irradiating the workpiece with the polarized light respectively emitted from the light exit ports of the plurality of light irradiation sections. A light irradiation apparatus comprising: an irradiation blocking unit that defines a region and a second region on the workpiece to be photo-aligned by the second polarized light. The irradiation blocking unit is
The light irradiation apparatus according to claim 1, wherein the light irradiation apparatus includes an irradiation control unit capable of individually controlling turning on and off of the plurality of light irradiation units. The irradiation blocking unit is
It is comprised by the plate member which can shield the polarized light of the wavelength which contributes to the photo-alignment of the said photo-alignment film radiate | emitted from the said light exit port by arrange | positioning between the said light exit port and the said workpiece | work. The light irradiation apparatus according to claim 1 or 2. At least one of the first light irradiation unit group and the second light irradiation unit group is:
An irradiation allowable area in which a light irradiation unit allowed to irradiate the workpiece with the polarized light by the irradiation blocking unit is disposed, and light irradiation in which irradiation of the polarized light to the workpiece is blocked by the irradiation blocking unit. 4. The light irradiation apparatus according to claim 1, further comprising a light blocking member that blocks the polarized light at a boundary position with an irradiation blocking area in which the portion is disposed. 5.   The light shielding member is configured to be movable between the boundary position in the irradiable region of the polarized light emitted from the light exit ports of the plurality of light irradiating units and a retreat position retracted from the irradiable region. The light irradiation apparatus according to claim 4, wherein: The irradiation blocking unit is
6. The irradiation of the polarized light from the light irradiation unit located in a predetermined section in a direction orthogonal to the conveyance path in the direction along the conveyance path is prevented. The light irradiation apparatus of any one of these. At least one of the first light irradiation unit group and the second light irradiation unit group is:
The light irradiation apparatus according to claim 1, comprising a plurality of rows of the light irradiation units in a direction along the conveyance path.   Among the plurality of light irradiation units, the plurality of light irradiation units belonging to a predetermined column are respectively displaced with respect to the plurality of light irradiation units belonging to different columns in a direction orthogonal to the conveyance path. The light irradiation apparatus according to claim 7.   The plurality of light irradiating units belonging to a predetermined column among the plurality of light irradiating units have a plurality of illuminance distributions in a direction orthogonal to the conveyance path of the polarized light irradiated from the light exit port belonging to different columns. The arrangement according to claim 7 or 8, wherein the polarized light irradiated from the light exit of the light irradiation unit is disposed so as to have a complementary relationship with an illuminance distribution in a direction orthogonal to the transport path. Light irradiation device. A light irradiation method for performing photo-alignment by irradiating polarized light to a work on which a photo-alignment film is formed,
In the first light irradiation device group including a plurality of light irradiation units installed on the conveyance path of the workpiece, polarizing light from a light source with a first polarizer, and irradiating the first polarized light from a light exit port. The workpiece to be photo-oriented by the first polarized light by individually blocking the irradiation of the first polarized light respectively emitted from the light exit ports of the plurality of light irradiation sections. Defining the first region above;
The light from the light source is arranged in parallel with the first light irradiation unit group on the transport path, and is polarized by a second polarizer having a transmission axis in a direction different from that of the first polarizer. In the second light irradiation unit group including a plurality of light irradiation units that irradiate the second polarized light, the second polarized light respectively emitted from the light emission ports of the plurality of light irradiation units to the workpiece. Defining a second region on the workpiece to be photo-aligned by the second polarized light by individually blocking irradiation;
The work is transported along the transport path by a stage, the first polarized light is irradiated onto the first area on the work, and the second polarized light is applied to the second area on the work. And irradiating with a light irradiation method.

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