TW201032974A - Method for scribing bonded substrates - Google Patents
Method for scribing bonded substrates Download PDFInfo
- Publication number
- TW201032974A TW201032974A TW098133857A TW98133857A TW201032974A TW 201032974 A TW201032974 A TW 201032974A TW 098133857 A TW098133857 A TW 098133857A TW 98133857 A TW98133857 A TW 98133857A TW 201032974 A TW201032974 A TW 201032974A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- scribe
- product
- scribe line
- cutting
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 161
- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000005520 cutting process Methods 0.000 claims abstract description 26
- 239000000463 material Substances 0.000 claims abstract description 24
- 239000003566 sealing material Substances 0.000 claims abstract description 12
- 238000002788 crimping Methods 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 208000013201 Stress fracture Diseases 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/225—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/07—Cutting armoured, multi-layered, coated or laminated, glass products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mining & Mineral Resources (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008264523A JP5192977B2 (ja) | 2008-10-10 | 2008-10-10 | 貼り合せ基板のスクライブ方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201032974A true TW201032974A (en) | 2010-09-16 |
| TWI357851B TWI357851B (enExample) | 2012-02-11 |
Family
ID=41491691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098133857A TW201032974A (en) | 2008-10-10 | 2009-10-06 | Method for scribing bonded substrates |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP2174762B1 (enExample) |
| JP (1) | JP5192977B2 (enExample) |
| KR (1) | KR101054356B1 (enExample) |
| CN (1) | CN101722581B (enExample) |
| TW (1) | TW201032974A (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5156080B2 (ja) * | 2010-11-05 | 2013-03-06 | 三星ダイヤモンド工業株式会社 | 貼り合せ基板のスクライブ方法 |
| TWI462885B (zh) * | 2010-12-13 | 2014-12-01 | Mitsuboshi Diamond Ind Co Ltd | Method of breaking the substrate |
| JP5133436B2 (ja) * | 2011-03-08 | 2013-01-30 | シャープ株式会社 | 液晶パネルの製造方法 |
| JP2015034112A (ja) * | 2013-08-09 | 2015-02-19 | 三星ダイヤモンド工業株式会社 | 積層セラミックス基板の分断方法 |
| JP6243699B2 (ja) * | 2013-10-25 | 2017-12-06 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の分断装置 |
| JP6432245B2 (ja) * | 2014-09-26 | 2018-12-05 | 三星ダイヤモンド工業株式会社 | 基板分断方法 |
| CN104280922B (zh) * | 2014-10-27 | 2017-05-03 | 京东方科技集团股份有限公司 | 一种液晶屏玻璃切割方法和装置 |
| CN109079909A (zh) * | 2017-06-14 | 2018-12-25 | 张家港康得新光电材料有限公司 | 利用保护膜的产品加工方法 |
| CN117283622B (zh) * | 2023-09-28 | 2025-11-14 | 广州弘亚数控机械集团股份有限公司 | 一种释放板材应力的板材切割方法、装置及存储介质 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3042192B2 (ja) * | 1992-07-29 | 2000-05-15 | 三星ダイヤモンド工業株式会社 | 貼り合せガラス基板の裁断方法及びその装置 |
| JPH11305181A (ja) * | 1998-04-17 | 1999-11-05 | Mitsubishi Electric Corp | 液晶表示パネルの切断条件設定方法 |
| JP3965902B2 (ja) * | 2000-05-23 | 2007-08-29 | 株式会社日立製作所 | 液晶表示装置の製造方法 |
| WO2002074707A1 (en) * | 2001-03-16 | 2002-09-26 | Mitsuboshi Diamond Industrial Co., Ltd. | Scribing method, cutter wheel, scribing device using the cutter wheel, and cutter wheel manufacturing device for manufacturing the cutter wheel |
| JPWO2002081392A1 (ja) * | 2001-04-02 | 2004-07-29 | 三星ダイヤモンド工業株式会社 | カッターホイール及びそのカッターホイールを用いたスクライブ装置、スクライブ方法及び貼り合わせ基板の分断方法、並びにカッターホイールを製造するカッターホイール製造方法と製造装置 |
| JP4502964B2 (ja) * | 2001-04-02 | 2010-07-14 | 三星ダイヤモンド工業株式会社 | 貼り合わせ基板の分断方法 |
| TWI226877B (en) * | 2001-07-12 | 2005-01-21 | Mitsuboshi Diamond Ind Co Ltd | Method of manufacturing adhered brittle material substrates and method of separating adhered brittle material substrates |
| US20040123717A1 (en) * | 2002-04-02 | 2004-07-01 | Kazuya Maekawa | Cutter wheel, device and method using the cutter wheel, method of dividing laminated substrate, and method and device for manufacturing cutter wheel |
| US20080286943A1 (en) * | 2004-05-20 | 2008-11-20 | Mitsuboshi Diamond Industrial Co., Ltd. | Motherboard Cutting Method, Motherboard Scribing Apparatus, Program and Recording Medium |
| JP4885675B2 (ja) * | 2006-09-27 | 2012-02-29 | 株式会社Nsc | 貼合せガラス板の切断分離方法 |
-
2008
- 2008-10-10 JP JP2008264523A patent/JP5192977B2/ja not_active Expired - Fee Related
-
2009
- 2009-08-31 KR KR1020090081125A patent/KR101054356B1/ko not_active Expired - Fee Related
- 2009-09-25 CN CN2009101788069A patent/CN101722581B/zh not_active Expired - Fee Related
- 2009-09-30 EP EP09171792.6A patent/EP2174762B1/en not_active Not-in-force
- 2009-10-06 TW TW098133857A patent/TW201032974A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP5192977B2 (ja) | 2013-05-08 |
| CN101722581B (zh) | 2012-10-17 |
| CN101722581A (zh) | 2010-06-09 |
| KR20100040662A (ko) | 2010-04-20 |
| JP2010090022A (ja) | 2010-04-22 |
| KR101054356B1 (ko) | 2011-08-04 |
| TWI357851B (enExample) | 2012-02-11 |
| EP2174762B1 (en) | 2014-08-13 |
| EP2174762A1 (en) | 2010-04-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |