TW201021234A - Method for the treatment of substrates, substrate and treatment device for carrying out the method - Google Patents

Method for the treatment of substrates, substrate and treatment device for carrying out the method Download PDF

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TW201021234A
TW201021234A TW098131060A TW98131060A TW201021234A TW 201021234 A TW201021234 A TW 201021234A TW 098131060 A TW098131060 A TW 098131060A TW 98131060 A TW98131060 A TW 98131060A TW 201021234 A TW201021234 A TW 201021234A
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substrate
solar cell
water
drying
substrates
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TW098131060A
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Dirk Habermann
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Schmid Gmbh & Co Geb
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
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  • Formation Of Insulating Films (AREA)
  • Drying Of Solid Materials (AREA)

Description

201021234 六、發明說明： 【發明所屬之技術領域】 根據技術方案1之導言，本發明係g於處理基材、具體 而言太陽能電池晶圓之方法。此外，本發明係關於已藉由 該類型之方法處理之基材、且轳 n 具體而s太陽能電池晶圓，且 係關於實施該方法之處理裝置。 【先前技術】
舉例而。，在製造具有單晶或多晶p_Si晶圓之習用太陽 能電池期間’通常藉助蝕刻製程使表面紋理化以改良其吸 收胜質I例而§，在單晶石夕之情形中，使用氯氧化納溶 液或虱氧化鉀溶液與異丙醇之混合物來實施該蝕刻製程。 使用由氫氟酸與硝酸組成之溶液來#刻多晶⑦。隨後實施 其他的㈣-清潔步驟。—㈣於在㈣基材後實施钱刻 以消除鑛切損傷及用於清潔之標準方法提供如下：首先用 DI水實施潔且隨後使用上述溶液實施紋理化及鋸切損傷 餘刻二後，再次用DI水實施清潔，之後實施κ〇Η蝕刻或 NaOH蝕刻以移除可能存在的多孔矽與siN之複合物的薄 層。然後，再次用DI水實施清潔，之後實施HC1#刻用於 中和及用於移除殘餘的微量金屬。此後實施HF蝕刻，再次 用DI水實施清潔且隨後乾燥之。然後製備用於隨後的擴散 製程之梦晶圓表面。 在該擴散製程期間，在矽中藉由磷擴散至約〇5 μπι之深 度產生ρη接面。然後’ ρη接面隔離在太陽能電池作業期間 由光所形成之電荷載流子。為產生該ρη接面，將晶圓在存 143156.doc 201021234 在磷源之爐中加熱至約8〇〇。(：至95〇〇c。在此情形中，磷滲 入矽表面’導致形成經磷摻雜之層。與正嚮導電的經硼摻 雜之基極相反，該層負嚮導電。在該製程期間，磷玻璃出 現於表面，且在隨後的步驟中藉助使用HF酸實施蝕刻來移 除。此後’施加厚度為約80 nm且通常*siI^H組成之層用 以降低矽表面之反射並鈍化矽表面。最後，藉由絲網印刷 方法或諸如此類在前側及後側施加金屬觸點。然而，此處 之缺點在於將H2〇分子納入Si〇2結構中且由此形成品質為 非最佳的氧化物，以該方式鈍化之表面的電荷載流子之壽 叩量測展現較（例如）以熱方式產生的氧化物明顯更差的 值。 【發明内容】 本發明之目的係提供引言中所提及之方法以及該方法之 用途及藉由該方法處理之太陽能電池晶圓及相應的處理裝 置，藉助該處理裝置可避免先前技術中之問題且，具體而 言，可提供較佳品質之基材、具體而言在太陽能電池晶圓 之情形中。 該目的係藉助下述來達成：包含技術方案1之特徵的方 法、包含技術方案8之特徵的用途、包含技術方案9之特徵 的太陽能電池晶圓及包含技術方案12之特徵的處理裝置。 本發明之有利及較佳的構造係其他技術方案之標的且更詳 細地闡述於下文中。該等技術方案之用語以明確引用的方 式併入本說明書内容中。 在該方法之情形中，實施基材之蝕刻，在其間增加複數 143156.doc 201021234 個清潔步驟達成’在清潔步驟期間使用水或〇1水。根據本 發明’最後，乾燥並加熱基材以便盡可能地移除表面之水 以乾燥基材。隨後藉助含有至少較小比例臭氧之氣體現人 物達成基材或其表面之氧化1此，與初㈣式氧化正二 相反，在所謂的幹式氧化之情形t可避免將邮分子納入 矽層中。在此情形中，可藉助加熱氣體混合物來達 及加熱。 μ
有利地，氧化杨t胃的幹式氧化可使用含有〜、〇2或〇3 之氣體混合物以及（例如）複數個該等化合物之混合物作為3 載氣。 … 但原則上加 。尤其有利 儘管在室溫下亦可達成基材之乾燥及加熱， 熱至更咼溫度較為有利，例如加熱至至少5〇它 地’達成加熱至至少1 〇〇°C至150»c。 隹枣發明之 _ 隹乾燥及加熱基材之步驟 月J亦即（例如）在最後的HF姓刻後再用01水達成又 步驟。 原 有利地，在線内方法中或者在分批製程中實施該方法。 因此，可利用有效實施來達成高通量。 儘管上述方法可用於諸多目的，但尤其有利地用於處理 陽此電池或太陽迠電池晶圓之基材。確切地說，在此情 况:，上述線内方法或分批方法亦適於大量處理。 猎由本發明方法處理之太陽能電池晶圓亦可包含以該方 "處理之⑦層。或者，其可完全切材料組成。 用於本發明基材之處理裝置具有至少—個基材之钮刻裝 143156.doc 201021234 置及至少一個具有水或DI水之清潔裝置。此外，提供至少 一個具有加熱構件之乾燥站以盡可能實質上乾燥基材表面 且移除水’其中用於基材或基材表面之氧化站位於該乾燥 站之下游，同時引入含有至少較小比例之臭氧的氣體混合 物。在細節上具有各種裝置及工作站之處理裝置之精確實 施例可自上述方法步驟推斷出且適於該等方法步驟。 該等及其他特徵不僅出現於申請專利範圍中，亦出現於 說明書及附圖中，其中在本發明一個實施例中及在其他領 域中個別特徵在每一情形中皆可單獨實現或作為呈子組合 形式之複數個特徵實現且可構成本文所主張保護之有利及 固有可保護的實施例。將本申請案細分成個別部分及子標 題並不限定其下所做陳述之有效性。 【實施方式】 圖1示意性繪示處理裝置u，意欲解釋其本身且基於該 裝置亦解釋本發明方法。 提供用於基材之處理裝置u，繪示該等基材中之一種基 材13。其沿傳送方向τ移動且來自蝕刻裝置i 5，該蝕刻裝 置可以^用方式構建。基材13或一系列的連續基材之傳送 發生於報16上，此處為清晰起見未緣示該等連續基材，其 中親16形成一類輥式輸送機。 在蝕刻裝置15之下游，基材13通過沖洗站18。藉助沖洗 喷嘴19，自頂部及自底部將以水汕施於基材13以沖洗或清 潔該基材之表面。亦可在㈣裝置15之上游提供該類型之 沖洗站。 143156.doc 201021234 在沖洗站18之下游，基材13沿傳送方向τ通過第一乾燥 站22。該乾燥站具有風扇23以及加熱構件24。舉例而言， 為此目的，可使用常規電加熱器或輻射加熱元件以及習用 風扇。藉助風扇作用，首先移除或驅散位於基材13表面邊 緣上的水。此外’部分水因加熱構件24之作用而蒸發。此 外’加熱可用作基材隨後氧化的有利準備。 第一乾燥站22之下游為第二乾燥站25,其亦具有風扇％ 及加熱構件27。此處提供兩個乾燥站以使裝置丨丨可在連續 ® 作業中運作並確保基材13亦已經真正乾燥及（若需要）加 熱。該兩個乾燥站亦可相同。 在第一乾燥站25之下游，基材η通過鎖28進入氧化站 3〇。後者具有室31，其中在基材13或用於傳送之輥16之上 方提供喷嘴33。藉助喷嘴33,將氧化氣體34引入室Η用以 氧化基材13或其表面。藉助鎖35，隨後自氧化站3〇排出基 材13 〇 • 如上所解釋，在乾燥站22及25處，可將基材13加熱至至 )50 C ’有利地甚至更高，例如1〇〇。〇至15〇。〇。舉例而 言，該加熱不僅使基材更充分的乾燥（亦即移除水），亦可 為氧化作準備，以使得用於磷擴散之表面的最優化鈍化及 準備隨後變得可能。此外，由於在乾燥站處之加熱，故隨 後可在無專用加熱器或加熱構件之裝置中進行氧化，在此 情形中，亦可因加熱而使氧化進行得更好。因氧化站3〇中 之幹式氧化之故，亦可避免將He分子重新納入矽結構或 所產生的Si〇2結構中。具體而言，在電荷載流子之壽命量 143156.doc 201021234 測之情形中’該HzO分子之納入導致較以乾燥及加熱方式 氧化的本發明基材更差的值。 如引言中所述’在氧化站30中，氧化氣體34可為氮、氧 或臭氧。然而，在任何情況下，應含有至少極小比例之臭、 氧，此乃因後者因其尤其高的反應性而尤其適於氧化。 【圖式簡單說明】 圖1示意性繪示處理裝置11，意欲解釋其本身且基於該 裝置亦解釋本發明方法。 【主要元件符號說明】 11 處理裝置 13 基材 15 蝕刻裝置 16 輥 18 沖洗站 19 沖洗喷嘴 20 DI水 22 乾燥站 23 風扇 24 加熱構件 25 乾燥站 26 風扇 27 加熱構件 28 鎖 30 氧化站 143156.doc 201021234 31 室 33 喷嘴 34 氧化氣體 35 鎖
143156.doc

Claims (1)

  1. 201021234 泰 七、申請專利範圍： 1. 一種處理諸如太陽能電池等基材（13)之方法，其中該等 基材（13)含有矽或至少在其外侧包含矽材料，其中，在 該處理期間，實施該等基材之多重蝕刻並在其間用水或 DI水（20)實施複數個清潔步驟，該方法之特徵在於最後 乾燥並加熱該基材（13)以盡可能實質上乾燥表面並移除 水’其中隨後藉助含有至少較小比例之臭氧的氣體混合 物（34)來實施該基材（13)或該基材表面之氧化。 ❹2.如請求項1之方法，其特徵在於該基材（13)係藉助加熱氣 體來乾燥及加熱。 3. 如請求項1之方法，其特徵在於用於該氧化之該氣體混 合物（34)包含以下群組之成份：n2、〇2、〇3。 4. 如請求項1之方法，其特徵在於使該基材（13)在該乾燥及 加熱步驟期間達到至少50°c之溫度。 5_如請求項4之方法，其特徵在於使該基材（13)在該乾燥及 加熱步驟期間達到至少l〇(^C至l5〇t之溫度。 參6_如請求項1之方法，其特徵在於在該乾燥及加熱步驟之 月’J立即用DI水（20)再次清潔該基材（丨3)。 7.如請求項1之方法，其特徵在於其係以線内方法來實 施。 8' 一種如請求項1之方法用於處理太陽能電池或太陽能電 池晶圓之基材（13)之用途。 9· 種太陽能電池晶圓（13)，其特徵在於其已經如請求項i 之方法處理。 143156.doc 201021234 ίο.如請求項9之太陽能電池晶圓，其特徵在於其用矽塗 佈。 11.如請求項9之太陽能電池晶圓，其特徵在於其由矽組 成。 12_ —種用於太陽能電池之基材（13)之處理裝置，其中該等 基材含有矽或至少在其外側包含矽材料，其中該處理裝 置（11)具有至少一個用於該等基材（13)之姓刻裝置（15)及 至少一個具有水或01水（34)之清潔裝置（18)，其特徵在 於it供至少一個具有加熱構件（24、27)之乾燥站（22、 25)以盡可能實質上乾燥該等基材（13)之表面並移除水， 其中在該乾燥站（22、25)之下游佈置有用於該基材3) 或該基材表面之氧化站（30)，同時引入含有至少較小比 例之臭氧的氣體混合物（34)。 13.如請求項丨2之處理裝置，其特徵在於提供兩個乾燥站 (22 、 25)〇 143156.doc
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