TW200732521A - Position measuring method - Google Patents

Position measuring method

Info

Publication number
TW200732521A
TW200732521A TW095137537A TW95137537A TW200732521A TW 200732521 A TW200732521 A TW 200732521A TW 095137537 A TW095137537 A TW 095137537A TW 95137537 A TW95137537 A TW 95137537A TW 200732521 A TW200732521 A TW 200732521A
Authority
TW
Taiwan
Prior art keywords
melt
light
reflected
photodetector
measuring method
Prior art date
Application number
TW095137537A
Other languages
English (en)
Other versions
TWI337630B (zh
Inventor
Toshio Hayashida
Naoji Mitani
Ayumi Kihara
Original Assignee
Komatsu Denshi Kinzoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Denshi Kinzoku Kk filed Critical Komatsu Denshi Kinzoku Kk
Publication of TW200732521A publication Critical patent/TW200732521A/zh
Application granted granted Critical
Publication of TWI337630B publication Critical patent/TWI337630B/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/46Indirect determination of position data
    • G01S17/48Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20Controlling or regulating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/284Electromagnetic waves
    • G01F23/292Light, e.g. infrared or ultraviolet
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/284Electromagnetic waves
    • G01F23/292Light, e.g. infrared or ultraviolet
    • G01F23/2921Light, e.g. infrared or ultraviolet for discrete levels
    • G01F23/2928Light, e.g. infrared or ultraviolet for discrete levels using light reflected on the material surface

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Organic Chemistry (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
TW095137537A 2006-02-27 2006-10-12 Position measuring method TW200732521A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006050299A JP4734139B2 (ja) 2006-02-27 2006-02-27 位置測定方法

Publications (2)

Publication Number Publication Date
TW200732521A true TW200732521A (en) 2007-09-01
TWI337630B TWI337630B (zh) 2011-02-21

Family

ID=38437127

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095137537A TW200732521A (en) 2006-02-27 2006-10-12 Position measuring method

Country Status (5)

Country Link
US (1) US8130386B1 (zh)
JP (1) JP4734139B2 (zh)
DE (1) DE112006003772B4 (zh)
TW (1) TW200732521A (zh)
WO (1) WO2007097071A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI715122B (zh) * 2018-11-30 2021-01-01 日商Sumco股份有限公司 驅氣管、單晶提拉裝置、及矽單晶的製造方法
CN114993151A (zh) * 2022-05-18 2022-09-02 西安奕斯伟材料科技有限公司 测量装置和测量方法

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5194295B2 (ja) 2007-08-24 2013-05-08 Sumco Techxiv株式会社 Cz法による単結晶引き上げ装置内の液面レベル測定方法
JP5181178B2 (ja) * 2007-09-12 2013-04-10 Sumco Techxiv株式会社 半導体単結晶製造装置における位置計測装置および位置計測方法
JP5131285B2 (ja) * 2008-02-18 2013-01-30 株式会社Sumco シリコン単結晶成長装置および石英ルツボ
CN101988845B (zh) * 2010-07-30 2012-04-18 西安理工大学 采用激光曲面镜反射进行熔硅液位检测的装置及检测方法
GB2509716B (en) 2013-01-09 2018-07-04 International Moisture Analysers Ltd Spatial Interference Fourier Transform Raman chemical analyser
CN103464694B (zh) * 2013-08-29 2016-02-24 西安理工大学 一种用于镁合金铸造的液位检测装置及其检测方法
KR101516586B1 (ko) * 2013-09-16 2015-05-04 주식회사 엘지실트론 열차폐재 및 이를 포함하는 실리콘 단결정 잉곳 제조장치
CN103628131B (zh) * 2013-12-06 2016-05-04 西安德伍拓自动化传动系统有限公司 一种单晶硅拉晶炉的熔融硅液面检测方法及测量装置
CN104005083B (zh) * 2014-05-20 2016-06-29 北京工业大学 一种测量单晶炉熔硅液面高度的装置与方法
ES2692368T3 (es) * 2014-11-07 2018-12-03 Photrack Ag Método y sistema para determinar la velocidad y nivel de una superficie de fluido en movimiento
JP6930294B2 (ja) * 2017-08-30 2021-09-01 住友金属鉱山株式会社 結晶育成装置及び単結晶の製造方法
JP6812931B2 (ja) * 2017-09-06 2021-01-13 株式会社Sumco 液面レベル検出装置の調整用治具および調整方法
TWI645166B (zh) * 2018-01-19 2018-12-21 友達晶材股份有限公司 液面高度檢測系統及液面高度檢測方法
CN112522779A (zh) * 2020-11-18 2021-03-19 上海新昇半导体科技有限公司 液位测量方法及拉单晶方法
CN112813492A (zh) * 2020-12-23 2021-05-18 上海新昇半导体科技有限公司 一种用于晶体生长的液面检测装置及晶体生长装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63292015A (ja) * 1987-05-26 1988-11-29 Rikagaku Kenkyusho 光学的距離検出装置撮像光学系の構成
DE4123336A1 (de) 1991-07-15 1993-01-21 Leybold Ag Kristallziehverfahren und vorrichtung zu seiner durchfuehrung
US5286461A (en) 1991-09-20 1994-02-15 Ferrofluidics Corporation Method and apparatus for melt level detection in czochralski crystal growth systems
JP2627695B2 (ja) 1992-01-17 1997-07-09 コマツ電子金属株式会社 Cz法における融液レベル制御装置および制御方法
JP2627696B2 (ja) 1992-01-17 1997-07-09 コマツ電子金属株式会社 Cz法における融液レベル制御装置および制御方法
JP2816627B2 (ja) 1992-04-17 1998-10-27 コマツ電子金属株式会社 半導体単結晶製造装置の融液面位置測定・制御装置
JPH0642914A (ja) * 1992-07-24 1994-02-18 Canon Inc 変位測定装置
DE4231162C2 (de) 1992-09-17 1996-03-14 Wacker Siltronic Halbleitermat Verfahren zur Regelung der Schmelzenhöhe während des Ziehens von Einkristallen
JP2823035B2 (ja) 1993-02-10 1998-11-11 信越半導体株式会社 半導体単結晶の引上装置及び引上方法
JPH06281415A (ja) * 1993-03-29 1994-10-07 Anritsu Corp 変位測定装置
JP3129571B2 (ja) 1993-04-28 2001-01-31 コマツ電子金属株式会社 Cz法における融液レベル制御装置
JPH07243911A (ja) * 1994-03-04 1995-09-19 Sumitomo Metal Ind Ltd 融液表面の温度測定装置及びその測定方法
US6071340A (en) 1996-02-28 2000-06-06 General Signal Technology Corporation Apparatus for melt-level detection in Czochralski crystal growth systems
US5882402A (en) 1997-09-30 1999-03-16 Memc Electronic Materials, Inc. Method for controlling growth of a silicon crystal
JP2000258227A (ja) * 1999-03-12 2000-09-22 Shinkawa Denki Kk 鏡面、非鏡面物における表面の変位測定装置
JP4616949B2 (ja) 1999-03-17 2011-01-19 Sumco Techxiv株式会社 メルトレベル検出装置及び検出方法
TW546423B (en) * 2000-05-01 2003-08-11 Komatsu Denshi Kinzoku Kk Method and apparatus for measuring melt level
JP2002013966A (ja) * 2000-06-28 2002-01-18 Shin Etsu Handotai Co Ltd 融液面位置測定方法及び装置並びに単結晶製造方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI715122B (zh) * 2018-11-30 2021-01-01 日商Sumco股份有限公司 驅氣管、單晶提拉裝置、及矽單晶的製造方法
CN114993151A (zh) * 2022-05-18 2022-09-02 西安奕斯伟材料科技有限公司 测量装置和测量方法

Also Published As

Publication number Publication date
US8130386B1 (en) 2012-03-06
DE112006003772B4 (de) 2017-07-13
JP2007223879A (ja) 2007-09-06
JP4734139B2 (ja) 2011-07-27
WO2007097071A1 (ja) 2007-08-30
TWI337630B (zh) 2011-02-21
DE112006003772T5 (de) 2009-01-02

Similar Documents

Publication Publication Date Title
TW200732521A (en) Position measuring method
GB0418091D0 (en) Automatic bias controller for an optical modulator
IL197975A (en) Optical determination of cork placement in glass cartridges
TW200705240A (en) Display device and display method
EP1817538A4 (en) OPTICAL OPTICAL SYSTEM
GB2443661B (en) Detecting a disturbance in the phase of light propogating in an optical waveguide
WO2008086054A3 (en) Enzymatic assay for lspr
TWI366802B (en) Method and apparatus for determining the position of a moving object, by using visible light communication
WO2008054191A3 (en) Navigation device with automatic gps precision enhancement
GB0906717D0 (en) Backside reflection optical display
WO2005079480A3 (en) Multiple laser laser level
PL2084571T3 (pl) Regulator polaryzacji do modulatora optycznego
PL1966573T3 (pl) Konwertor ze zbiornikiem do umieszczania stopionego metalu i urządzeniem pomiarowym do optycznego określania temperatury stopionego metalu i sposób określania temperatury w tego rodzaju konwertorze
IL190309A (en) Optical pointer rotates on axes
IL188122A0 (en) Coherent optical range finder
GB2447596B (en) Gun sight with continuously measuring rangefinder
MX2010004328A (es) Dispensador de sustratos de limpieza.
EP2166374A3 (en) Reflective photoelectric sensor and object detecting method
MY152857A (en) Surface mount optoelectronic component with lens
PT1709432E (pt) Inspecção óptica de recipientes para detecção da inclinação dos recipientes
EP1856471A4 (en) A MEANS FOR AUTOMATICALLY CALIBRATING AN OPTICAL VISOR FOR FIREARMS THROUGH THE DELIVERY OF ONLY ONE CARRIER DEVICE
GB0521800D0 (en) Optical fluid level detector
WO2010109375A3 (en) Fluid level indicator
EP2041528A4 (en) Liquid level measurement device
WO2007005527A3 (en) Method and system for measuring the curvature of an optical surface