TW200728640A - Normal-open metal diaphragm control valve driven by piezoelectric element - Google Patents

Normal-open metal diaphragm control valve driven by piezoelectric element

Info

Publication number
TW200728640A
TW200728640A TW095143414A TW95143414A TW200728640A TW 200728640 A TW200728640 A TW 200728640A TW 095143414 A TW095143414 A TW 095143414A TW 95143414 A TW95143414 A TW 95143414A TW 200728640 A TW200728640 A TW 200728640A
Authority
TW
Taiwan
Prior art keywords
piezoelectric element
metal diaphragm
control valve
normal
valve seat
Prior art date
Application number
TW095143414A
Other languages
English (en)
Other versions
TWI372220B (zh
Inventor
Atsushi Matsumoto
Kaoru Hirata
Ryousuke Dohi
Nobukazu Ikeda
Kouji Nishino
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of TW200728640A publication Critical patent/TW200728640A/zh
Application granted granted Critical
Publication of TWI372220B publication Critical patent/TWI372220B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K24/00—Devices, e.g. valves, for venting or aerating enclosures
    • F16K24/04—Devices, e.g. valves, for venting or aerating enclosures for venting only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezo-electric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
TW095143414A 2006-01-18 2006-11-23 Normal-open metal diaphragm control valve driven by piezoelectric element TW200728640A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006009625A JP4743763B2 (ja) 2006-01-18 2006-01-18 圧電素子駆動式金属ダイヤフラム型制御弁

Publications (2)

Publication Number Publication Date
TW200728640A true TW200728640A (en) 2007-08-01
TWI372220B TWI372220B (zh) 2012-09-11

Family

ID=38287398

Family Applications (2)

Application Number Title Priority Date Filing Date
TW095143414A TW200728640A (en) 2006-01-18 2006-11-23 Normal-open metal diaphragm control valve driven by piezoelectric element
TW099121057A TWI400402B (zh) 2006-01-18 2006-11-23 Normal open type piezoelectric element driven metal diaphragm type control valve

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW099121057A TWI400402B (zh) 2006-01-18 2006-11-23 Normal open type piezoelectric element driven metal diaphragm type control valve

Country Status (9)

Country Link
US (2) US8181932B2 (zh)
EP (1) EP1975485A1 (zh)
JP (1) JP4743763B2 (zh)
KR (2) KR101001194B1 (zh)
CN (2) CN101994870B (zh)
CA (1) CA2635507A1 (zh)
IL (1) IL192407A0 (zh)
TW (2) TW200728640A (zh)
WO (1) WO2007083439A1 (zh)

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JP7475631B2 (ja) * 2017-11-24 2024-04-30 株式会社フジキン バルブ装置およびその制御装置を用いた制御方法、流体制御装置および半導体製造装置
KR102343611B1 (ko) 2017-11-30 2021-12-27 가부시키가이샤 후지킨 유량 제어 장치의 자기 진단 방법
WO2019107215A1 (ja) 2017-11-30 2019-06-06 株式会社フジキン 流量制御装置
JP7270988B2 (ja) 2018-02-26 2023-05-11 株式会社フジキン 流量制御装置および流量制御方法
JP7157476B2 (ja) 2018-04-27 2022-10-20 株式会社フジキン 流量制御方法および流量制御装置
KR102421587B1 (ko) 2018-06-26 2022-07-15 가부시키가이샤 후지킨 유량 제어 방법 및 유량 제어 장치
KR102563815B1 (ko) * 2018-09-29 2023-08-03 가부시키가이샤 후지킨 다이어프램 밸브 및 유량 제어 장치
JP2020089037A (ja) * 2018-11-22 2020-06-04 株式会社堀場エステック ピエゾアクチュエータ、流体制御バルブ、及び、流体制御装置
JP7193804B2 (ja) * 2019-06-05 2022-12-21 株式会社サタケ 圧電アクチュエータ、圧電式バルブ、及び圧電アクチュエータの製造方法
JP7033563B2 (ja) * 2019-06-13 2022-03-10 Ckd株式会社 切換弁
JP7300117B2 (ja) * 2019-06-28 2023-06-29 株式会社サタケ 圧電式バルブ及び該圧電式バルブの製造方法
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JP7382054B2 (ja) * 2019-08-29 2023-11-16 株式会社フジキン バルブ装置および流量制御装置
US20230021102A1 (en) * 2019-12-27 2023-01-19 Fujikin Incorporated Flow rate control device, and flow rate control method
JP7412747B2 (ja) * 2020-01-30 2024-01-15 株式会社フジキン 圧電素子駆動式バルブ、圧力式流量制御装置及び気化供給装置
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Also Published As

Publication number Publication date
US8191856B2 (en) 2012-06-05
WO2007083439A1 (ja) 2007-07-26
CN101360941A (zh) 2009-02-04
TWI400402B (zh) 2013-07-01
TWI372220B (zh) 2012-09-11
JP4743763B2 (ja) 2011-08-10
US20110042595A1 (en) 2011-02-24
US8181932B2 (en) 2012-05-22
US20100294964A1 (en) 2010-11-25
TW201040425A (en) 2010-11-16
CA2635507A1 (en) 2007-07-26
CN101360941B (zh) 2010-12-29
KR20100080943A (ko) 2010-07-13
KR101001194B1 (ko) 2010-12-17
EP1975485A1 (en) 2008-10-01
KR101032034B1 (ko) 2011-05-02
JP2007192269A (ja) 2007-08-02
CN101994870A (zh) 2011-03-30
CN101994870B (zh) 2012-07-04
IL192407A0 (en) 2008-12-29
KR20080077192A (ko) 2008-08-21

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