TWI372220B - - Google Patents

Info

Publication number
TWI372220B
TWI372220B TW095143414A TW95143414A TWI372220B TW I372220 B TWI372220 B TW I372220B TW 095143414 A TW095143414 A TW 095143414A TW 95143414 A TW95143414 A TW 95143414A TW I372220 B TWI372220 B TW I372220B
Authority
TW
Taiwan
Application number
TW095143414A
Other versions
TW200728640A (en
Inventor
Atsushi Matsumoto
Kaoru Hirata
Ryousuke Dohi
Nobukazu Ikeda
Kouji Nishino
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of TW200728640A publication Critical patent/TW200728640A/zh
Application granted granted Critical
Publication of TWI372220B publication Critical patent/TWI372220B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K24/00—Devices, e.g. valves, for venting or aerating enclosures
    • F16K24/04—Devices, e.g. valves, for venting or aerating enclosures for venting only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
TW095143414A 2006-01-18 2006-11-23 Normal-open metal diaphragm control valve driven by piezoelectric element TW200728640A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006009625A JP4743763B2 (ja) 2006-01-18 2006-01-18 圧電素子駆動式金属ダイヤフラム型制御弁

Publications (2)

Publication Number Publication Date
TW200728640A TW200728640A (en) 2007-08-01
TWI372220B true TWI372220B (zh) 2012-09-11

Family

ID=38287398

Family Applications (2)

Application Number Title Priority Date Filing Date
TW099121057A TWI400402B (zh) 2006-01-18 2006-11-23 Normal open type piezoelectric element driven metal diaphragm type control valve
TW095143414A TW200728640A (en) 2006-01-18 2006-11-23 Normal-open metal diaphragm control valve driven by piezoelectric element

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW099121057A TWI400402B (zh) 2006-01-18 2006-11-23 Normal open type piezoelectric element driven metal diaphragm type control valve

Country Status (9)

Country Link
US (2) US8181932B2 (zh)
EP (1) EP1975485A1 (zh)
JP (1) JP4743763B2 (zh)
KR (2) KR101032034B1 (zh)
CN (2) CN101360941B (zh)
CA (1) CA2635507A1 (zh)
IL (1) IL192407A0 (zh)
TW (2) TWI400402B (zh)
WO (1) WO2007083439A1 (zh)

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JP5669384B2 (ja) * 2009-12-01 2015-02-12 株式会社フジキン 圧電駆動式バルブ及び圧電駆動式流量制御装置
DE102011084107A1 (de) * 2011-10-06 2013-04-11 Continental Automotive Gmbh Piezoelektrischer Aktuator
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US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5847106B2 (ja) * 2013-03-25 2016-01-20 株式会社フジキン 流量モニタ付圧力式流量制御装置。
JP5775110B2 (ja) * 2013-03-26 2015-09-09 株式会社フジキン 流量制御装置用の流量制御弁
EP3014154B1 (en) 2013-09-04 2021-02-17 Horiba Stec, Co., Ltd. Interlace lifting mechanism
US9903497B2 (en) * 2013-09-30 2018-02-27 Hitachi Metals, Ltd. Flow control valve and a mass flow controller using the same
US10114385B2 (en) 2013-10-21 2018-10-30 Horiba Stec, Co., Ltd. Fluid control valve
JP6372998B2 (ja) * 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
US10156295B2 (en) * 2014-02-24 2018-12-18 Fujikin Incorporated Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device
JP6475441B2 (ja) 2014-09-01 2019-02-27 株式会社フジキン 圧電素子駆動式バルブ及び圧電素子駆動式バルブを備えた流量制御装置
CN204607490U (zh) * 2015-03-04 2015-09-02 杭州盈江机械制造有限公司 负载快速起升的液压千斤顶
CN107532727B (zh) * 2015-04-09 2021-01-08 塔科诺瓦集团股份公司 在用于加热或冷却的水循环的入流管或回流管中使用的阀
CN107771258B (zh) * 2015-06-25 2019-11-12 伊利诺斯工具制品有限公司 压电致动器型阀
KR102009242B1 (ko) * 2015-08-21 2019-08-09 가부시키가이샤 후지킨 압전식 리니어 액츄에이터, 압전 구동 밸브 및 유량 제어 장치
DE102016112115A1 (de) * 2016-07-01 2018-01-04 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil
KR102312480B1 (ko) * 2016-11-08 2021-10-14 가부시키가이샤 후지킨 밸브 장치, 이 밸브 장치를 사용한 유량제어방법 및 반도체 제조 방법
US11054052B2 (en) 2016-12-26 2021-07-06 Fujikin Incorporated Piezoelectric-element-driven valve and flow rate control device
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
TWI803536B (zh) 2017-11-21 2023-06-01 美商威士塔戴爾泰克有限責任公司 用於一推進致動器之緊密圓形連動裝置
JP7475631B2 (ja) * 2017-11-24 2024-04-30 株式会社フジキン バルブ装置およびその制御装置を用いた制御方法、流体制御装置および半導体製造装置
CN111406243A (zh) 2017-11-30 2020-07-10 株式会社富士金 流量控制装置
KR102343611B1 (ko) 2017-11-30 2021-12-27 가부시키가이샤 후지킨 유량 제어 장치의 자기 진단 방법
CN111788534A (zh) 2018-02-26 2020-10-16 株式会社富士金 流量控制装置以及流量控制方法
CN111989635A (zh) 2018-04-27 2020-11-24 株式会社富士金 流量控制方法以及流量控制装置
CN112272809A (zh) 2018-06-26 2021-01-26 株式会社富士金 流量控制方法以及流量控制装置
JP7360719B2 (ja) * 2018-09-29 2023-10-13 株式会社フジキン ダイヤフラムバルブ及び流量制御装置
JP2020089037A (ja) * 2018-11-22 2020-06-04 株式会社堀場エステック ピエゾアクチュエータ、流体制御バルブ、及び、流体制御装置
JP7193804B2 (ja) * 2019-06-05 2022-12-21 株式会社サタケ 圧電アクチュエータ、圧電式バルブ、及び圧電アクチュエータの製造方法
JP7033563B2 (ja) * 2019-06-13 2022-03-10 Ckd株式会社 切換弁
JP7300117B2 (ja) * 2019-06-28 2023-06-29 株式会社サタケ 圧電式バルブ及び該圧電式バルブの製造方法
IL268254B2 (en) * 2019-07-24 2024-10-01 Ham Let Israel Canada Ltd Flow control accessory
JP7382054B2 (ja) * 2019-08-29 2023-11-16 株式会社フジキン バルブ装置および流量制御装置
KR20220047806A (ko) 2019-12-27 2022-04-19 가부시키가이샤 후지킨 유량 제어 장치 및 유량 제어 방법
JP7412747B2 (ja) * 2020-01-30 2024-01-15 株式会社フジキン 圧電素子駆動式バルブ、圧力式流量制御装置及び気化供給装置
DE102020115057A1 (de) * 2020-06-05 2021-12-09 Bürkert Werke GmbH & Co. KG Ventillinearantrieb sowie Ventil
JP7045738B1 (ja) * 2021-03-23 2022-04-01 株式会社リンテック 常時閉型流量制御バルブ
KR20220162572A (ko) 2021-06-01 2022-12-08 (주)레드 자전거 거치보관 운영관리 시스템 및 그 구동방법
CN113447176B (zh) * 2021-06-17 2022-04-01 人本股份有限公司 双半外圈轴承摩擦力矩检测装置
KR102597418B1 (ko) * 2022-03-31 2023-11-03 고후롯크 가부시키가이샤 유량 제어 밸브

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JP4933936B2 (ja) * 2007-03-30 2012-05-16 株式会社フジキン 圧電素子駆動式制御弁
CN110942032B (zh) * 2019-11-27 2022-07-15 深圳市商汤科技有限公司 活体检测方法及装置、存储介质

Also Published As

Publication number Publication date
US8191856B2 (en) 2012-06-05
WO2007083439A1 (ja) 2007-07-26
US20100294964A1 (en) 2010-11-25
CN101360941A (zh) 2009-02-04
TW201040425A (en) 2010-11-16
IL192407A0 (en) 2008-12-29
US8181932B2 (en) 2012-05-22
EP1975485A1 (en) 2008-10-01
TW200728640A (en) 2007-08-01
CN101994870A (zh) 2011-03-30
KR101032034B1 (ko) 2011-05-02
CN101360941B (zh) 2010-12-29
JP4743763B2 (ja) 2011-08-10
CN101994870B (zh) 2012-07-04
TWI400402B (zh) 2013-07-01
US20110042595A1 (en) 2011-02-24
KR20080077192A (ko) 2008-08-21
KR20100080943A (ko) 2010-07-13
CA2635507A1 (en) 2007-07-26
KR101001194B1 (ko) 2010-12-17
JP2007192269A (ja) 2007-08-02

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees