TW200644037A - Excimer lamp - Google Patents

Excimer lamp

Info

Publication number
TW200644037A
TW200644037A TW095111104A TW95111104A TW200644037A TW 200644037 A TW200644037 A TW 200644037A TW 095111104 A TW095111104 A TW 095111104A TW 95111104 A TW95111104 A TW 95111104A TW 200644037 A TW200644037 A TW 200644037A
Authority
TW
Taiwan
Prior art keywords
excimer
discharge
electrodes
light emitting
light
Prior art date
Application number
TW095111104A
Other languages
English (en)
Inventor
Hiroyoshi Ohshima
Norio Kobayashi
Original Assignee
Hoya Candeo Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005124367A external-priority patent/JP2006302720A/ja
Priority claimed from JP2006052812A external-priority patent/JP3968113B1/ja
Application filed by Hoya Candeo Optronics Corp filed Critical Hoya Candeo Optronics Corp
Publication of TW200644037A publication Critical patent/TW200644037A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/92—Lamps with more than one main discharge path
TW095111104A 2005-04-22 2006-03-30 Excimer lamp TW200644037A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005124367A JP2006302720A (ja) 2005-04-22 2005-04-22 エキシマランプ
JP2006052812A JP3968113B1 (ja) 2006-02-28 2006-02-28 エキシマランプ

Publications (1)

Publication Number Publication Date
TW200644037A true TW200644037A (en) 2006-12-16

Family

ID=37214616

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095111104A TW200644037A (en) 2005-04-22 2006-03-30 Excimer lamp

Country Status (5)

Country Link
US (1) US20090039757A1 (zh)
EP (1) EP1873810A1 (zh)
KR (1) KR20080002851A (zh)
TW (1) TW200644037A (zh)
WO (1) WO2006114988A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399786B (zh) * 2007-10-10 2013-06-21 Ushio Electric Inc Excimer lamp
TWI402884B (zh) * 2008-04-10 2013-07-21 Ushio Electric Inc An excimer lamp and a lamp unit with its lamp unit

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009028720A1 (ja) * 2007-08-28 2009-03-05 Hoya Candeo Optronics Corporation エキシマランプ
JP5379386B2 (ja) * 2008-02-21 2013-12-25 株式会社オーク製作所 紫外線照射装置
JP5074248B2 (ja) * 2008-03-14 2012-11-14 株式会社オーク製作所 エキシマランプ
US8022377B2 (en) * 2008-04-22 2011-09-20 Applied Materials, Inc. Method and apparatus for excimer curing
CN102160142A (zh) * 2008-09-22 2011-08-17 株式会社杰士汤浅国际 准分子灯及准分子灯单元及紫外线照射装置
DE102009025667A1 (de) * 2009-06-17 2010-12-23 Heraeus Noblelight Gmbh Lampeneinheit
JP6096118B2 (ja) * 2010-09-29 2017-03-15 ネオ・テック・アクア・ソリューションズ・インコーポレーテッド エキシマ光源
DE102010043208A1 (de) 2010-11-02 2012-05-03 Osram Ag Vorrichtung zum Bestrahlen von Oberflächen
DE102010043215A1 (de) * 2010-11-02 2012-05-03 Osram Ag Strahler mit Sockel für die Bestrahlung von Oberflächen
DE102012219064A1 (de) * 2012-10-19 2014-04-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. UV-Lichtquelle mit kombinierter Ionisation und Bildung von Excimern
WO2018083575A1 (en) * 2016-11-04 2018-05-11 Silanna UV Technologies Pte Ltd Multi-cell excimer lamp
WO2023239981A1 (en) * 2022-06-06 2023-12-14 Far Uv Technologies, Inc. Far ultraviolet lamp and system with optical diffuser

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59009300D1 (de) * 1990-10-22 1995-07-27 Heraeus Noblelight Gmbh Hochleistungsstrahler.
US5319282A (en) * 1991-12-30 1994-06-07 Winsor Mark D Planar fluorescent and electroluminescent lamp having one or more chambers
US5504391A (en) * 1992-01-29 1996-04-02 Fusion Systems Corporation Excimer lamp with high pressure fill
US6049086A (en) * 1998-02-12 2000-04-11 Quester Technology, Inc. Large area silent discharge excitation radiator
JP3346291B2 (ja) * 1998-07-31 2002-11-18 ウシオ電機株式会社 誘電体バリア放電ランプ、および照射装置
JP3591393B2 (ja) * 1999-11-02 2004-11-17 ウシオ電機株式会社 誘電体バリア放電ランプ装置
JP3418581B2 (ja) * 2000-02-07 2003-06-23 株式会社オーク製作所 誘電体バリア放電ランプ
JP2003007207A (ja) * 2001-06-19 2003-01-10 Matsushita Electric Ind Co Ltd 発光デバイスの製造方法および平面ディスプレイ用バックライトの製造方法、ならびに発光デバイス
JP2003317666A (ja) * 2002-04-18 2003-11-07 Sanshin Denki Kk 冷陰極放電管の組み合わせ構造
JP2005078958A (ja) * 2003-09-01 2005-03-24 Ushio Inc 光源装置
JP2005243482A (ja) * 2004-02-27 2005-09-08 Ushio Inc エキシマ光放射装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399786B (zh) * 2007-10-10 2013-06-21 Ushio Electric Inc Excimer lamp
TWI402884B (zh) * 2008-04-10 2013-07-21 Ushio Electric Inc An excimer lamp and a lamp unit with its lamp unit

Also Published As

Publication number Publication date
EP1873810A1 (en) 2008-01-02
US20090039757A1 (en) 2009-02-12
KR20080002851A (ko) 2008-01-04
WO2006114988A1 (ja) 2006-11-02

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