TW200644037A - Excimer lamp - Google Patents

Excimer lamp

Info

Publication number
TW200644037A
TW200644037A TW095111104A TW95111104A TW200644037A TW 200644037 A TW200644037 A TW 200644037A TW 095111104 A TW095111104 A TW 095111104A TW 95111104 A TW95111104 A TW 95111104A TW 200644037 A TW200644037 A TW 200644037A
Authority
TW
Taiwan
Prior art keywords
excimer
discharge
electrodes
light emitting
light
Prior art date
Application number
TW095111104A
Other languages
Chinese (zh)
Inventor
Hiroyoshi Ohshima
Norio Kobayashi
Original Assignee
Hoya Candeo Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005124367A external-priority patent/JP2006302720A/en
Priority claimed from JP2006052812A external-priority patent/JP3968113B1/en
Application filed by Hoya Candeo Optronics Corp filed Critical Hoya Candeo Optronics Corp
Publication of TW200644037A publication Critical patent/TW200644037A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/92—Lamps with more than one main discharge path

Abstract

This invention provides an excimer lamp which can increase the emission output of excimer light. The excimer lamp of the present invention, comprising at least a light emitting window provided in the light emitting direction, and a plurality of electrodes for excimer discharge arranged opposite to each other, the gas for excimer discharge existed in the discharge space formed between said oppositely arranged electrodes conducting discharging so as to emit excimer light, wherein said electrodes for excimer discharge are plate type electrodes, and said discharge space are provided plurally between said plate type electrodes, and said light emitting window is provided parallel to the discharge path of said discharge space.
TW095111104A 2005-04-22 2006-03-30 Excimer lamp TW200644037A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005124367A JP2006302720A (en) 2005-04-22 2005-04-22 Excimer lamp
JP2006052812A JP3968113B1 (en) 2006-02-28 2006-02-28 Excimer lamp

Publications (1)

Publication Number Publication Date
TW200644037A true TW200644037A (en) 2006-12-16

Family

ID=37214616

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095111104A TW200644037A (en) 2005-04-22 2006-03-30 Excimer lamp

Country Status (5)

Country Link
US (1) US20090039757A1 (en)
EP (1) EP1873810A1 (en)
KR (1) KR20080002851A (en)
TW (1) TW200644037A (en)
WO (1) WO2006114988A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399786B (en) * 2007-10-10 2013-06-21 Ushio Electric Inc Excimer lamp
TWI402884B (en) * 2008-04-10 2013-07-21 Ushio Electric Inc An excimer lamp and a lamp unit with its lamp unit

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009028720A1 (en) * 2007-08-28 2009-03-05 Hoya Candeo Optronics Corporation Excimer lamp
JP5379386B2 (en) * 2008-02-21 2013-12-25 株式会社オーク製作所 UV irradiation equipment
JP5074248B2 (en) * 2008-03-14 2012-11-14 株式会社オーク製作所 Excimer lamp
US8022377B2 (en) * 2008-04-22 2011-09-20 Applied Materials, Inc. Method and apparatus for excimer curing
KR101204729B1 (en) * 2008-09-22 2012-11-27 가부시키가이샤 지에스 유아사 Excimer lamp, excimer lamp unit, and ultraviolet irradiation device
DE102009025667A1 (en) * 2009-06-17 2010-12-23 Heraeus Noblelight Gmbh lamp unit
CN110459460B (en) * 2010-09-29 2023-03-21 新技术水液规划公司 Excimer light source
DE102010043215A1 (en) * 2010-11-02 2012-05-03 Osram Ag Spotlight with base for the irradiation of surfaces
DE102010043208A1 (en) * 2010-11-02 2012-05-03 Osram Ag Device for irradiating surfaces
DE102012219064A1 (en) * 2012-10-19 2014-04-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. UV light source with combined ionization and formation of excimers
US20190341244A1 (en) * 2016-11-04 2019-11-07 Silanna UV Technologies Pte Ltd Multi-cell excimer lamp
WO2023239981A1 (en) * 2022-06-06 2023-12-14 Far Uv Technologies, Inc. Far ultraviolet lamp and system with optical diffuser

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0482230B1 (en) * 1990-10-22 1995-06-21 Heraeus Noblelight GmbH High power radiation device
US5319282A (en) * 1991-12-30 1994-06-07 Winsor Mark D Planar fluorescent and electroluminescent lamp having one or more chambers
US5504391A (en) * 1992-01-29 1996-04-02 Fusion Systems Corporation Excimer lamp with high pressure fill
US6049086A (en) * 1998-02-12 2000-04-11 Quester Technology, Inc. Large area silent discharge excitation radiator
JP3346291B2 (en) * 1998-07-31 2002-11-18 ウシオ電機株式会社 Dielectric barrier discharge lamp and irradiation device
JP3591393B2 (en) * 1999-11-02 2004-11-17 ウシオ電機株式会社 Dielectric barrier discharge lamp device
JP3418581B2 (en) * 2000-02-07 2003-06-23 株式会社オーク製作所 Dielectric barrier discharge lamp
JP2003007207A (en) * 2001-06-19 2003-01-10 Matsushita Electric Ind Co Ltd Manufacturing method of luminescent device, manufacturing method of backlight for flat display and luminescent device
JP2003317666A (en) * 2002-04-18 2003-11-07 Sanshin Denki Kk Combination structure of cold-cathode discharge tubes
JP2005078958A (en) * 2003-09-01 2005-03-24 Ushio Inc Light source apparatus
JP2005243482A (en) * 2004-02-27 2005-09-08 Ushio Inc Excimer light irradiation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399786B (en) * 2007-10-10 2013-06-21 Ushio Electric Inc Excimer lamp
TWI402884B (en) * 2008-04-10 2013-07-21 Ushio Electric Inc An excimer lamp and a lamp unit with its lamp unit

Also Published As

Publication number Publication date
EP1873810A1 (en) 2008-01-02
KR20080002851A (en) 2008-01-04
WO2006114988A1 (en) 2006-11-02
US20090039757A1 (en) 2009-02-12

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