TW200420431A - Heat resistant coated member, making method, and treatment using the same - Google Patents

Heat resistant coated member, making method, and treatment using the same

Info

Publication number
TW200420431A
TW200420431A TW092132450A TW92132450A TW200420431A TW 200420431 A TW200420431 A TW 200420431A TW 092132450 A TW092132450 A TW 092132450A TW 92132450 A TW92132450 A TW 92132450A TW 200420431 A TW200420431 A TW 200420431A
Authority
TW
Taiwan
Prior art keywords
heat resistant
treatment
coated member
same
resistant coated
Prior art date
Application number
TW092132450A
Other languages
English (en)
Chinese (zh)
Other versions
TWI329681B (enExample
Inventor
Noriaki Hamaya
Masaru Konya
Noboru Yamamoto
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002336769A external-priority patent/JP4081574B2/ja
Priority claimed from JP2002356171A external-priority patent/JP2004190056A/ja
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of TW200420431A publication Critical patent/TW200420431A/zh
Application granted granted Critical
Publication of TWI329681B publication Critical patent/TWI329681B/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/18After-treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11Oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
TW092132450A 2002-11-20 2003-11-19 Heat resistant coated member, making method, and treatment using the same TW200420431A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002336769A JP4081574B2 (ja) 2002-11-20 2002-11-20 耐熱性被覆部材の製造方法
JP2002356171A JP2004190056A (ja) 2002-12-09 2002-12-09 耐熱性被覆部材
JP2003089797 2003-03-28

Publications (2)

Publication Number Publication Date
TW200420431A true TW200420431A (en) 2004-10-16
TWI329681B TWI329681B (enExample) 2010-09-01

Family

ID=32329646

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092132450A TW200420431A (en) 2002-11-20 2003-11-19 Heat resistant coated member, making method, and treatment using the same

Country Status (5)

Country Link
US (1) US7507481B2 (enExample)
EP (1) EP1428904A3 (enExample)
KR (7) KR101168422B1 (enExample)
CN (1) CN100497718C (enExample)
TW (1) TW200420431A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI510666B (zh) * 2012-12-17 2015-12-01 Shinetsu Chemical Co 熱解氮化硼被覆碳基材的製造方法
TWI853755B (zh) * 2023-11-29 2024-08-21 財團法人金屬工業研究發展中心 醫療植入物的表面處理方法及所處理獲得的醫療植入物

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US9932852B2 (en) * 2011-08-08 2018-04-03 General Electric Company Sensor assembly for rotating devices and methods for fabricating
KR20140084275A (ko) * 2011-10-27 2014-07-04 인터메탈릭스 가부시키가이샤 NdFeB계 소결 자석의 제조 방법
US9034199B2 (en) * 2012-02-21 2015-05-19 Applied Materials, Inc. Ceramic article with reduced surface defect density and process for producing a ceramic article
US9212099B2 (en) 2012-02-22 2015-12-15 Applied Materials, Inc. Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
US9090046B2 (en) 2012-04-16 2015-07-28 Applied Materials, Inc. Ceramic coated article and process for applying ceramic coating
TW201418190A (zh) * 2012-07-06 2014-05-16 Tocalo Co Ltd 具有溶射被覆層之碳材料
US9604249B2 (en) 2012-07-26 2017-03-28 Applied Materials, Inc. Innovative top-coat approach for advanced device on-wafer particle performance
US9343289B2 (en) 2012-07-27 2016-05-17 Applied Materials, Inc. Chemistry compatible coating material for advanced device on-wafer particle performance
WO2014085276A1 (en) * 2012-11-30 2014-06-05 Ceralink Inc. Method of sintering ceramic articles by exothermic heating
CN103266294A (zh) * 2013-03-07 2013-08-28 贵阳嘉瑜光电科技咨询中心 一种在hem晶体生长中重复使用钼坩埚的方法
US9865434B2 (en) 2013-06-05 2018-01-09 Applied Materials, Inc. Rare-earth oxide based erosion resistant coatings for semiconductor application
US9850568B2 (en) 2013-06-20 2017-12-26 Applied Materials, Inc. Plasma erosion resistant rare-earth oxide based thin film coatings
KR101585446B1 (ko) * 2013-12-31 2016-01-15 현대자동차주식회사 슬러리 조성물 및 이를 이용한 용사코팅용 분말제조방법
US9869013B2 (en) 2014-04-25 2018-01-16 Applied Materials, Inc. Ion assisted deposition top coat of rare-earth oxide
US20220013335A1 (en) * 2015-11-16 2022-01-13 Coorstek, Inc. Corrosion-resistant components
CN108463345B (zh) * 2015-11-16 2021-04-09 阔斯泰公司 耐腐蚀组件和制造方法
JP6908973B2 (ja) * 2016-06-08 2021-07-28 三菱重工業株式会社 遮熱コーティング、タービン部材、ガスタービン、ならびに遮熱コーティングの製造方法
CN107904559B (zh) * 2017-12-21 2019-11-12 福州大学 一种具有复合陶瓷涂层的内加热蒸发舟及其制备方法
US11047035B2 (en) 2018-02-23 2021-06-29 Applied Materials, Inc. Protective yttria coating for semiconductor equipment parts
JP7169077B2 (ja) 2018-03-26 2022-11-10 三菱重工業株式会社 遮熱コーティング、タービン部材、ガスタービン及び遮熱コーティングの製造方法
JP6939853B2 (ja) * 2018-08-15 2021-09-22 信越化学工業株式会社 溶射皮膜、溶射皮膜の製造方法、及び溶射部材
CN109898055A (zh) * 2019-03-27 2019-06-18 中国航发北京航空材料研究院 一种用于纤维增强镍基复合材料界面纳米多层扩散障涂层的制备方法
KR102416899B1 (ko) * 2020-05-15 2022-07-05 피에스테크놀러지(주) 소결용 지그 및 소결용 지그의 제조 방법
CN111889684B (zh) * 2020-07-17 2022-04-08 洛阳科威钨钼有限公司 一种煤粉直接点火燃烧器的制备方法
CN112159946B (zh) * 2020-09-04 2022-11-29 崇义章源钨业股份有限公司 防粘涂层和碳基舟皿及其制备方法
RU2766627C1 (ru) * 2021-06-07 2022-03-15 Федеральное государственное казенное военное образовательное учреждение высшего образования "Краснодарское высшее военное авиационное училище летчиков имени Героя Советского Союза А.К. Серова" Способ нанесения теплозащитного износостойкого покрытия на детали из чугуна и стали
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI510666B (zh) * 2012-12-17 2015-12-01 Shinetsu Chemical Co 熱解氮化硼被覆碳基材的製造方法
TWI853755B (zh) * 2023-11-29 2024-08-21 財團法人金屬工業研究發展中心 醫療植入物的表面處理方法及所處理獲得的醫療植入物

Also Published As

Publication number Publication date
KR20120090883A (ko) 2012-08-17
US7507481B2 (en) 2009-03-24
CN1502718A (zh) 2004-06-09
KR20130048750A (ko) 2013-05-10
KR101313470B1 (ko) 2013-10-01
KR20040044167A (ko) 2004-05-27
KR20110003458A (ko) 2011-01-12
EP1428904A3 (en) 2004-08-18
US20040110016A1 (en) 2004-06-10
KR101168422B1 (ko) 2012-07-25
KR20110003457A (ko) 2011-01-12
TWI329681B (enExample) 2010-09-01
KR20130046411A (ko) 2013-05-07
KR20110003456A (ko) 2011-01-12
EP1428904A2 (en) 2004-06-16
KR101313417B1 (ko) 2013-10-01
CN100497718C (zh) 2009-06-10

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