CN100497718C - 耐热涂覆部件，制备方法以及采用该部件进行的处理 - Google Patents

耐热涂覆部件，制备方法以及采用该部件进行的处理 Download PDF

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Publication number
CN100497718C
CN100497718C CNB2003101180111A CN200310118011A CN100497718C CN 100497718 C CN100497718 C CN 100497718C CN B2003101180111 A CNB2003101180111 A CN B2003101180111A CN 200310118011 A CN200310118011 A CN 200310118011A CN 100497718 C CN100497718 C CN 100497718C
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CN
China
Prior art keywords
coating
oxide
matrix
application member
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2003101180111A
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English (en)
Chinese (zh)
Other versions
CN1502718A (zh
Inventor
浜谷典明
绀谷胜
山本昇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
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Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002336769A external-priority patent/JP4081574B2/ja
Priority claimed from JP2002356171A external-priority patent/JP2004190056A/ja
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of CN1502718A publication Critical patent/CN1502718A/zh
Application granted granted Critical
Publication of CN100497718C publication Critical patent/CN100497718C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/18—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
CNB2003101180111A 2002-11-20 2003-11-20 耐热涂覆部件，制备方法以及采用该部件进行的处理 Expired - Fee Related CN100497718C (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP336769/2002 2002-11-20
JP2002336769A JP4081574B2 (ja) 2002-11-20 2002-11-20 耐熱性被覆部材の製造方法
JP356171/2002 2002-12-09
JP2002356171A JP2004190056A (ja) 2002-12-09 2002-12-09 耐熱性被覆部材
JP089797/2003 2003-03-28
JP2003089797 2003-03-28

Publications (2)

Publication Number Publication Date
CN1502718A CN1502718A (zh) 2004-06-09
CN100497718C true CN100497718C (zh) 2009-06-10

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2003101180111A Expired - Fee Related CN100497718C (zh) 2002-11-20 2003-11-20 耐热涂覆部件，制备方法以及采用该部件进行的处理

Country Status (5)

Country Link
US (1) US7507481B2 (enExample)
EP (1) EP1428904A3 (enExample)
KR (7) KR101168422B1 (enExample)
CN (1) CN100497718C (enExample)
TW (1) TW200420431A (enExample)

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JP2006199515A (ja) * 2005-01-18 2006-08-03 Hitachi Tool Engineering Ltd 耐熱性被覆部材
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JP5154141B2 (ja) * 2007-05-21 2013-02-27 信越化学工業株式会社 希土類酸化物含有溶射基板及び積層板
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US9932852B2 (en) * 2011-08-08 2018-04-03 General Electric Company Sensor assembly for rotating devices and methods for fabricating
CN103890880B (zh) * 2011-10-27 2016-08-24 因太金属株式会社 NdFeB系烧结磁体的制造方法
US9034199B2 (en) 2012-02-21 2015-05-19 Applied Materials, Inc. Ceramic article with reduced surface defect density and process for producing a ceramic article
US9212099B2 (en) 2012-02-22 2015-12-15 Applied Materials, Inc. Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
US9090046B2 (en) 2012-04-16 2015-07-28 Applied Materials, Inc. Ceramic coated article and process for applying ceramic coating
TW201418190A (zh) * 2012-07-06 2014-05-16 Tocalo Co Ltd 具有溶射被覆層之碳材料
US9604249B2 (en) 2012-07-26 2017-03-28 Applied Materials, Inc. Innovative top-coat approach for advanced device on-wafer particle performance
US9343289B2 (en) 2012-07-27 2016-05-17 Applied Materials, Inc. Chemistry compatible coating material for advanced device on-wafer particle performance
WO2014085276A1 (en) * 2012-11-30 2014-06-05 Ceralink Inc. Method of sintering ceramic articles by exothermic heating
JP5854512B2 (ja) * 2012-12-17 2016-02-09 信越化学工業株式会社 熱分解窒化ホウ素被覆炭素質基材の製造方法
CN103266294A (zh) * 2013-03-07 2013-08-28 贵阳嘉瑜光电科技咨询中心 一种在hem晶体生长中重复使用钼坩埚的方法
US9865434B2 (en) 2013-06-05 2018-01-09 Applied Materials, Inc. Rare-earth oxide based erosion resistant coatings for semiconductor application
US9850568B2 (en) 2013-06-20 2017-12-26 Applied Materials, Inc. Plasma erosion resistant rare-earth oxide based thin film coatings
KR101585446B1 (ko) * 2013-12-31 2016-01-15 현대자동차주식회사 슬러리 조성물 및 이를 이용한 용사코팅용 분말제조방법
US9869013B2 (en) * 2014-04-25 2018-01-16 Applied Materials, Inc. Ion assisted deposition top coat of rare-earth oxide
EP3377318A1 (en) * 2015-11-16 2018-09-26 Coorstek Inc. Corrosion-resistant components and methods of making
US20220013335A1 (en) * 2015-11-16 2022-01-13 Coorstek, Inc. Corrosion-resistant components
JP6908973B2 (ja) * 2016-06-08 2021-07-28 三菱重工業株式会社 遮熱コーティング、タービン部材、ガスタービン、ならびに遮熱コーティングの製造方法
CN107904559B (zh) * 2017-12-21 2019-11-12 福州大学 一种具有复合陶瓷涂层的内加热蒸发舟及其制备方法
US11047035B2 (en) 2018-02-23 2021-06-29 Applied Materials, Inc. Protective yttria coating for semiconductor equipment parts
JP7169077B2 (ja) 2018-03-26 2022-11-10 三菱重工業株式会社 遮熱コーティング、タービン部材、ガスタービン及び遮熱コーティングの製造方法
JP6939853B2 (ja) * 2018-08-15 2021-09-22 信越化学工業株式会社 溶射皮膜、溶射皮膜の製造方法、及び溶射部材
CN109898055A (zh) * 2019-03-27 2019-06-18 中国航发北京航空材料研究院 一种用于纤维增强镍基复合材料界面纳米多层扩散障涂层的制备方法
KR102416899B1 (ko) * 2020-05-15 2022-07-05 피에스테크놀러지(주) 소결용 지그 및 소결용 지그의 제조 방법
CN111889684B (zh) * 2020-07-17 2022-04-08 洛阳科威钨钼有限公司 一种煤粉直接点火燃烧器的制备方法
CN112159946B (zh) * 2020-09-04 2022-11-29 崇义章源钨业股份有限公司 防粘涂层和碳基舟皿及其制备方法
RU2766627C1 (ru) * 2021-06-07 2022-03-15 Федеральное государственное казенное военное образовательное учреждение высшего образования "Краснодарское высшее военное авиационное училище летчиков имени Героя Советского Союза А.К. Серова" Способ нанесения теплозащитного износостойкого покрытия на детали из чугуна и стали
FR3134824B1 (fr) * 2022-04-25 2024-07-26 Safran Landing Systems Procédé de fabrication d'une pièce comportant un substrat métallique recouvert d'une couche de protection et une pièce fabriquée selon ce procédé
CN115287574B (zh) * 2022-08-25 2023-06-16 航天特种材料及工艺技术研究所 一种高韧性抗烧蚀涂层及其制备方法
CN116334522B (zh) * 2023-01-17 2025-11-21 江西省科学院应用物理研究所 纳米稀土氧化物及其掺杂WC-CoCr喷涂粉末、涂层、制备方法
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Also Published As

Publication number Publication date
KR20110003458A (ko) 2011-01-12
KR101168422B1 (ko) 2012-07-25
KR20040044167A (ko) 2004-05-27
US20040110016A1 (en) 2004-06-10
TW200420431A (en) 2004-10-16
KR20130048750A (ko) 2013-05-10
TWI329681B (enExample) 2010-09-01
KR20120090883A (ko) 2012-08-17
US7507481B2 (en) 2009-03-24
KR20130046411A (ko) 2013-05-07
KR101313470B1 (ko) 2013-10-01
CN1502718A (zh) 2004-06-09
EP1428904A2 (en) 2004-06-16
KR20110003456A (ko) 2011-01-12
EP1428904A3 (en) 2004-08-18
KR20110003457A (ko) 2011-01-12
KR101313417B1 (ko) 2013-10-01

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