TW200417B - - Google Patents
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- Publication number
- TW200417B TW200417B TW081107808A TW81107808A TW200417B TW 200417 B TW200417 B TW 200417B TW 081107808 A TW081107808 A TW 081107808A TW 81107808 A TW81107808 A TW 81107808A TW 200417 B TW200417 B TW 200417B
- Authority
- TW
- Taiwan
- Prior art keywords
- solder
- layer
- pad
- block
- metallurgical
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/012—Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/019—Manufacture or treatment of bond pads
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3452—Solder masks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3465—Application of solder
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/012—Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
- H10W72/01251—Changing the shapes of bumps
- H10W72/01255—Changing the shapes of bumps by using masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/012—Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
- H10W72/01251—Changing the shapes of bumps
- H10W72/01257—Changing the shapes of bumps by reflowing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/012—Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
- H10W72/01261—Chemical or physical modification, e.g. by sintering or anodisation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/019—Manufacture or treatment of bond pads
- H10W72/01951—Changing the shapes of bond pads
- H10W72/01953—Changing the shapes of bond pads by etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/231—Shapes
- H10W72/234—Cross-sectional shape, i.e. in side view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/241—Dispositions, e.g. layouts
- H10W72/242—Dispositions, e.g. layouts relative to the surface, e.g. recessed, protruding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/251—Materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/29—Bond pads specially adapted therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
Landscapes
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Wire Bonding (AREA)
- Ceramic Products (AREA)
- Arc Welding In General (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/759,450 US5162257A (en) | 1991-09-13 | 1991-09-13 | Solder bump fabrication method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200417B true TW200417B (https=) | 1993-02-21 |
Family
ID=25055684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW081107808A TW200417B (https=) | 1991-09-13 | 1992-10-01 |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US5162257A (https=) |
| EP (1) | EP0603296B1 (https=) |
| JP (1) | JP2842692B2 (https=) |
| KR (1) | KR0186061B1 (https=) |
| AT (1) | ATE156935T1 (https=) |
| CA (1) | CA2116766C (https=) |
| DE (1) | DE69221627T2 (https=) |
| ES (1) | ES2106194T3 (https=) |
| TW (1) | TW200417B (https=) |
| WO (1) | WO1993006620A1 (https=) |
Families Citing this family (96)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR950001962A (ko) * | 1993-06-30 | 1995-01-04 | 김광호 | 반도체 칩 범프 |
| US5366140A (en) * | 1993-09-30 | 1994-11-22 | Minnesota Mining And Manufacturing Company | Patterned array of uniform metal microbeads |
| US5442852A (en) * | 1993-10-26 | 1995-08-22 | Pacific Microelectronics Corporation | Method of fabricating solder ball array |
| US5396702A (en) * | 1993-12-15 | 1995-03-14 | At&T Corp. | Method for forming solder bumps on a substrate using an electrodeposition technique |
| US5532550A (en) * | 1993-12-30 | 1996-07-02 | Adler; Robert | Organic based led display matrix |
| US5665639A (en) * | 1994-02-23 | 1997-09-09 | Cypress Semiconductor Corp. | Process for manufacturing a semiconductor device bump electrode using a rapid thermal anneal |
| US5470787A (en) * | 1994-05-02 | 1995-11-28 | Motorola, Inc. | Semiconductor device solder bump having intrinsic potential for forming an extended eutectic region and method for making and using the same |
| US5503286A (en) * | 1994-06-28 | 1996-04-02 | International Business Machines Corporation | Electroplated solder terminal |
| US5539153A (en) * | 1994-08-08 | 1996-07-23 | Hewlett-Packard Company | Method of bumping substrates by contained paste deposition |
| TW253856B (en) * | 1994-12-13 | 1995-08-11 | At & T Corp | Method of solder bonding, and article produced by the method |
| ATE210895T1 (de) * | 1995-03-20 | 2001-12-15 | Unitive Int Ltd | Löthöcker-herstellungsverfahren und strukturen mit einer titan-sperrschicht |
| US6388203B1 (en) | 1995-04-04 | 2002-05-14 | Unitive International Limited | Controlled-shaped solder reservoirs for increasing the volume of solder bumps, and structures formed thereby |
| EP0819318B1 (en) * | 1995-04-05 | 2003-05-14 | Unitive International Limited | A solder bump structure for a microelectronic substrate |
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| KR100438256B1 (ko) * | 1995-12-18 | 2004-08-25 | 마츠시타 덴끼 산교 가부시키가이샤 | 반도체장치 및 그 제조방법 |
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| US5793116A (en) * | 1996-05-29 | 1998-08-11 | Mcnc | Microelectronic packaging using arched solder columns |
| US5903058A (en) * | 1996-07-17 | 1999-05-11 | Micron Technology, Inc. | Conductive bumps on die for flip chip application |
| JP3413020B2 (ja) * | 1996-07-17 | 2003-06-03 | 株式会社東芝 | 半導体装置の製造方法 |
| US5902686A (en) * | 1996-11-21 | 1999-05-11 | Mcnc | Methods for forming an intermetallic region between a solder bump and an under bump metallurgy layer and related structures |
| JP3553300B2 (ja) * | 1996-12-02 | 2004-08-11 | 富士通株式会社 | 半導体装置の製造方法及び半導体装置の実装方法 |
| US6045030A (en) * | 1997-03-13 | 2000-04-04 | Raytheon Company | Sealing electronic packages containing bumped hybrids |
| US6117299A (en) * | 1997-05-09 | 2000-09-12 | Mcnc | Methods of electroplating solder bumps of uniform height on integrated circuit substrates |
| US5926731A (en) * | 1997-07-02 | 1999-07-20 | Delco Electronics Corp. | Method for controlling solder bump shape and stand-off height |
| US5990472A (en) * | 1997-09-29 | 1999-11-23 | Mcnc | Microelectronic radiation detectors for detecting and emitting radiation signals |
| US5962151A (en) * | 1997-12-05 | 1999-10-05 | Delco Electronics Corp. | Method for controlling solderability of a conductor and conductor formed thereby |
| US5937320A (en) * | 1998-04-08 | 1999-08-10 | International Business Machines Corporation | Barrier layers for electroplated SnPb eutectic solder joints |
| US6595408B1 (en) | 1998-10-07 | 2003-07-22 | Micron Technology, Inc. | Method of attaching solder balls to BGA package utilizing a tool to pick and dip the solder ball in flux prior to placement |
| US6268275B1 (en) * | 1998-10-08 | 2001-07-31 | Micron Technology, Inc. | Method of locating conductive spheres utilizing screen and hopper of solder balls |
| US6139972A (en) * | 1998-10-26 | 2000-10-31 | Agilent Technologies Inc. | Solder paste containment device |
| JP3667184B2 (ja) * | 1999-02-26 | 2005-07-06 | 住友ベークライト株式会社 | 半導体装置 |
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| KR100319813B1 (ko) | 2000-01-03 | 2002-01-09 | 윤종용 | 유비엠 언더컷을 개선한 솔더 범프의 형성 방법 |
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| US7260890B2 (en) * | 2002-06-26 | 2007-08-28 | Georgia Tech Research Corporation | Methods for fabricating three-dimensional all organic interconnect structures |
| US6780751B2 (en) | 2002-10-09 | 2004-08-24 | Freescale Semiconductor, Inc. | Method for eliminating voiding in plated solder |
| AU2003301632A1 (en) | 2002-10-22 | 2004-05-13 | Unitive International Limited | Stacked electronic structures including offset substrates |
| US6897141B2 (en) * | 2002-10-23 | 2005-05-24 | Ocube Digital Co., Ltd. | Solder terminal and fabricating method thereof |
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| DE10301934A1 (de) * | 2003-01-20 | 2004-07-29 | Epcos Ag | Elektrisches Bauelement mit verringerter Substratfläche |
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| US7489914B2 (en) * | 2003-03-28 | 2009-02-10 | Georgia Tech Research Corporation | Multi-band RF transceiver with passive reuse in organic substrates |
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| US7049216B2 (en) | 2003-10-14 | 2006-05-23 | Unitive International Limited | Methods of providing solder structures for out plane connections |
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| US8345433B2 (en) * | 2004-07-08 | 2013-01-01 | Avx Corporation | Heterogeneous organic laminate stack ups for high frequency applications |
| JP2006032851A (ja) * | 2004-07-21 | 2006-02-02 | Mitsui Mining & Smelting Co Ltd | 被覆銅、ホイスカの発生抑制方法、プリント配線基板および半導体装置 |
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| US20060205170A1 (en) * | 2005-03-09 | 2006-09-14 | Rinne Glenn A | Methods of forming self-healing metal-insulator-metal (MIM) structures and related devices |
| US7932615B2 (en) | 2006-02-08 | 2011-04-26 | Amkor Technology, Inc. | Electronic devices including solder bumps on compliant dielectric layers |
| US7674701B2 (en) | 2006-02-08 | 2010-03-09 | Amkor Technology, Inc. | Methods of forming metal layers using multi-layer lift-off patterns |
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| US7808434B2 (en) * | 2006-08-09 | 2010-10-05 | Avx Corporation | Systems and methods for integrated antennae structures in multilayer organic-based printed circuit devices |
| JP2010501116A (ja) * | 2006-08-17 | 2010-01-14 | エヌエックスピー ビー ヴィ | エッチングステップ中の電極の適正なアンダーカットの試験方法 |
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| US7569164B2 (en) * | 2007-01-29 | 2009-08-04 | Harima Chemicals, Inc. | Solder precoating method |
| CN101234455B (zh) * | 2007-01-30 | 2012-03-28 | 播磨化成株式会社 | 焊锡膏组合物及焊锡预涂法 |
| EP1952935B1 (en) * | 2007-02-01 | 2016-05-11 | Harima Chemicals, Inc. | Solder paste composition and solder precoating method |
| US7713860B2 (en) * | 2007-10-13 | 2010-05-11 | Wan-Ling Yu | Method of forming metallic bump on I/O pad |
| TWI446843B (zh) * | 2007-12-11 | 2014-07-21 | Unimicron Technology Corp | 線路板及其製程 |
| US7888259B2 (en) * | 2008-08-19 | 2011-02-15 | Ati Technologies Ulc | Integrated circuit package employing predetermined three-dimensional solder pad surface and method for making same |
| KR101022942B1 (ko) | 2008-11-12 | 2011-03-16 | 삼성전기주식회사 | 흐름 방지용 댐을 구비한 인쇄회로기판 및 그 제조방법 |
| US9142520B2 (en) * | 2011-08-30 | 2015-09-22 | Ati Technologies Ulc | Methods of fabricating semiconductor chip solder structures |
| KR101774938B1 (ko) | 2011-08-31 | 2017-09-06 | 삼성전자 주식회사 | 지지대를 갖는 반도체 패키지 및 그 형성 방법 |
| US8946891B1 (en) * | 2012-09-04 | 2015-02-03 | Amkor Technology, Inc. | Mushroom shaped bump on repassivation |
| US20150195912A1 (en) | 2014-01-08 | 2015-07-09 | Zhuhai Advanced Chip Carriers & Electronic Substrate Solutions Technologies Co. Ltd. | Substrates With Ultra Fine Pitch Flip Chip Bumps |
| US9949378B2 (en) | 2014-04-14 | 2018-04-17 | Presidio Components, Inc. | Electrical devices with solder dam |
| FR3050865B1 (fr) * | 2016-05-02 | 2018-10-12 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de realisation d'interconnexions conductrices sur un substrat et interconnexions ainsi obtenues |
| US11676932B2 (en) * | 2019-12-31 | 2023-06-13 | Micron Technology, Inc. | Semiconductor interconnect structures with narrowed portions, and associated systems and methods |
| KR20250061993A (ko) | 2023-10-30 | 2025-05-08 | 가톨릭대학교 산학협력단 | 재난 대응 하·폐수 처리시설의 자산관리방법 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| DE3685647T2 (de) * | 1985-07-16 | 1993-01-07 | Nippon Telegraph & Telephone | Verbindungskontakte zwischen substraten und verfahren zur herstellung derselben. |
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| US4763829A (en) * | 1986-06-04 | 1988-08-16 | American Telephone And Telegraph Company, At&T Bell Laboratories | Soldering of electronic components |
| EP0263222B1 (en) * | 1986-10-08 | 1992-03-25 | International Business Machines Corporation | Method of forming solder terminals for a pinless ceramic module |
| US4752027A (en) * | 1987-02-20 | 1988-06-21 | Hewlett-Packard Company | Method and apparatus for solder bumping of printed circuit boards |
| JP2544396B2 (ja) * | 1987-08-25 | 1996-10-16 | 株式会社日立製作所 | 半導体集積回路装置の製造方法 |
| JP2633586B2 (ja) * | 1987-10-21 | 1997-07-23 | 株式会社東芝 | バンプ構造を有する半導体装置 |
| US4817850A (en) * | 1988-03-28 | 1989-04-04 | Hughes Aircraft Company | Repairable flip-chip bumping |
| US4893403A (en) * | 1988-04-15 | 1990-01-16 | Hewlett-Packard Company | Chip alignment method |
| US4840302A (en) * | 1988-04-15 | 1989-06-20 | International Business Machines Corporation | Chromium-titanium alloy |
| US4950623A (en) * | 1988-08-02 | 1990-08-21 | Microelectronics Center Of North Carolina | Method of building solder bumps |
| US5024372A (en) * | 1989-01-03 | 1991-06-18 | Motorola, Inc. | Method of making high density solder bumps and a substrate socket for high density solder bumps |
| US4940181A (en) * | 1989-04-06 | 1990-07-10 | Motorola, Inc. | Pad grid array for receiving a solder bumped chip carrier |
| US5154341A (en) * | 1990-12-06 | 1992-10-13 | Motorola Inc. | Noncollapsing multisolder interconnection |
| US5152451A (en) * | 1991-04-01 | 1992-10-06 | Motorola, Inc. | Controlled solder oxidation process |
-
1991
- 1991-09-13 US US07/759,450 patent/US5162257A/en not_active Expired - Lifetime
-
1992
- 1992-08-07 US US07/927,069 patent/US5293006A/en not_active Expired - Lifetime
- 1992-09-11 CA CA002116766A patent/CA2116766C/en not_active Expired - Fee Related
- 1992-09-11 JP JP5506136A patent/JP2842692B2/ja not_active Expired - Fee Related
- 1992-09-11 WO PCT/US1992/007722 patent/WO1993006620A1/en not_active Ceased
- 1992-09-11 EP EP92919808A patent/EP0603296B1/en not_active Expired - Lifetime
- 1992-09-11 DE DE69221627T patent/DE69221627T2/de not_active Expired - Fee Related
- 1992-09-11 KR KR1019940700820A patent/KR0186061B1/ko not_active Expired - Fee Related
- 1992-09-11 AT AT92919808T patent/ATE156935T1/de not_active IP Right Cessation
- 1992-09-11 ES ES92919808T patent/ES2106194T3/es not_active Expired - Lifetime
- 1992-10-01 TW TW081107808A patent/TW200417B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| EP0603296B1 (en) | 1997-08-13 |
| DE69221627T2 (de) | 1998-01-08 |
| WO1993006620A1 (en) | 1993-04-01 |
| ES2106194T3 (es) | 1997-11-01 |
| JP2842692B2 (ja) | 1999-01-06 |
| EP0603296A1 (en) | 1994-06-29 |
| JPH07502147A (ja) | 1995-03-02 |
| US5162257A (en) | 1992-11-10 |
| DE69221627D1 (de) | 1997-09-18 |
| CA2116766A1 (en) | 1993-04-01 |
| ATE156935T1 (de) | 1997-08-15 |
| KR0186061B1 (ko) | 1999-04-15 |
| KR940702644A (ko) | 1994-08-20 |
| US5293006A (en) | 1994-03-08 |
| CA2116766C (en) | 1999-02-16 |
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