TR200200495T2 - Mikro köprü yapısı - Google Patents

Mikro köprü yapısı

Info

Publication number
TR200200495T2
TR200200495T2 TR2002/00495T TR200200495T TR200200495T2 TR 200200495 T2 TR200200495 T2 TR 200200495T2 TR 2002/00495 T TR2002/00495 T TR 2002/00495T TR 200200495 T TR200200495 T TR 200200495T TR 200200495 T2 TR200200495 T2 TR 200200495T2
Authority
TR
Turkey
Prior art keywords
removable
bridge structure
micro bridge
sensor
removable material
Prior art date
Application number
TR2002/00495T
Other languages
English (en)
Turkish (tr)
Inventor
John Gillham Peter
Watton Rex
John Alderman Charles
Original Assignee
Qinetiq Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qinetiq Limited filed Critical Qinetiq Limited
Publication of TR200200495T2 publication Critical patent/TR200200495T2/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0853—Optical arrangements having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J5/22—Electrical features thereof
    • G01J5/24—Use of specially adapted circuits, e.g. bridge circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N19/00—Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Inorganic Fibers (AREA)
  • Pressure Sensors (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Fire-Detection Mechanisms (AREA)
  • Thermistors And Varistors (AREA)
TR2002/00495T 1999-08-24 2000-08-23 Mikro köprü yapısı TR200200495T2 (tr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9919877.2A GB9919877D0 (en) 1999-08-24 1999-08-24 Micro-bridge structure

Publications (1)

Publication Number Publication Date
TR200200495T2 true TR200200495T2 (tr) 2002-06-21

Family

ID=10859608

Family Applications (1)

Application Number Title Priority Date Filing Date
TR2002/00495T TR200200495T2 (tr) 1999-08-24 2000-08-23 Mikro köprü yapısı

Country Status (14)

Country Link
US (1) US7002153B1 (https=)
EP (1) EP1206687B1 (https=)
JP (1) JP4284019B2 (https=)
KR (1) KR100704518B1 (https=)
CN (2) CN1168960C (https=)
AT (1) ATE232972T1 (https=)
AU (1) AU761197B2 (https=)
CA (1) CA2381311C (https=)
DE (1) DE60001462T2 (https=)
ES (1) ES2192539T3 (https=)
GB (2) GB9919877D0 (https=)
TR (1) TR200200495T2 (https=)
TW (1) TW514723B (https=)
WO (1) WO2001014838A1 (https=)

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GB9919877D0 (en) * 1999-08-24 1999-10-27 Secr Defence Micro-bridge structure
GB2359192B (en) * 1999-09-16 2004-03-31 Sharp Kk Thermal-type infrared radiation detector cell and image capture device incorporating the same
DE10144343A1 (de) * 2001-09-10 2003-03-27 Perkinelmer Optoelectronics Sensor zum berührugslosen Messen einer Temperatur
ATE352459T1 (de) 2002-02-02 2007-02-15 Qinetiq Ltd Kopfpositionssensor
GB0424934D0 (en) 2004-11-12 2004-12-15 Qinetiq Ltd Infrared detector
CN101249935B (zh) * 2007-03-31 2011-06-22 浙江大立科技股份有限公司 一种热绝缘微桥结构及其加工方法
US7746236B2 (en) * 2007-05-01 2010-06-29 Honeywell International Inc. Fire detection system and method
US20090014657A1 (en) * 2007-05-01 2009-01-15 Honeywell International Inc. Infrared fire detection system
KR101036329B1 (ko) * 2009-02-13 2011-05-23 조응래 건축용 비계의 보조결합구
CN101780944B (zh) * 2010-01-05 2015-04-29 上海集成电路研发中心有限公司 一种mems微桥结构的制备方法
JP5706174B2 (ja) * 2011-01-26 2015-04-22 三菱電機株式会社 赤外線センサおよび赤外線センサアレイ
JP5721597B2 (ja) * 2011-03-15 2015-05-20 三菱電機株式会社 半導体光素子および半導体光装置
TWI476969B (zh) * 2012-01-13 2015-03-11 Univ Nat Kaohsiung Applied Sci Metal silicide thermal sensor and its preparation method
US9698281B2 (en) * 2012-08-22 2017-07-04 Robert Bosch Gmbh CMOS bolometer
US9368658B2 (en) * 2012-08-31 2016-06-14 Robert Bosch Gmbh Serpentine IR sensor
CN102874735B (zh) * 2012-09-29 2015-01-07 姜利军 双材料微悬臂梁、电磁辐射探测器以及探测方法
US9093594B2 (en) 2012-10-17 2015-07-28 Robert Bosch Gmbh Multi-stack film bolometer
US9903763B2 (en) 2013-09-27 2018-02-27 Robert Bosch Gmbh Titanium nitride for MEMS bolometers
CN105093356A (zh) * 2015-07-31 2015-11-25 哈尔滨工业大学 一种高能量利用率的微桥结构电阻阵列
CN117377378A (zh) 2017-08-31 2024-01-09 谷歌有限责任公司 量子信息处理器件的形成方法
KR101842955B1 (ko) 2017-09-28 2018-03-29 ㈜시리우스 선택식각 공정을 이용한 마이크로 볼로미터 제조방법 및 이에 따라 제조된 마이크로 볼로미터
CN111960377B (zh) * 2020-07-29 2024-03-15 上海集成电路研发中心有限公司 Mems传感器微桥桥面的制作方法
JP7485581B2 (ja) * 2020-10-16 2024-05-16 セイコーＮｐｃ株式会社 赤外線センサ素子及び赤外線センサ
CN113720479B (zh) * 2021-03-26 2022-11-08 北京北方高业科技有限公司 基于cmos工艺的红外探测器像元和红外探测器
JP2023028860A (ja) 2021-08-20 2023-03-03 Tdk株式会社 電磁波センサ
JP2023028859A (ja) 2021-08-20 2023-03-03 Tdk株式会社 電磁波センサ
JP2023033861A (ja) 2021-08-30 2023-03-13 Tdk株式会社 構造体及び電磁波センサ
JP2023033862A (ja) 2021-08-30 2023-03-13 Tdk株式会社 構造体及び電磁波センサ
TWI887664B (zh) * 2023-05-31 2025-06-21 松翰科技股份有限公司 微輻射熱測量計及其製造方法

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Also Published As

Publication number Publication date
KR100704518B1 (ko) 2007-04-09
JP4284019B2 (ja) 2009-06-24
GB2370156A (en) 2002-06-19
WO2001014838A1 (en) 2001-03-01
CA2381311A1 (en) 2001-03-01
GB0201115D0 (en) 2002-03-06
AU6711000A (en) 2001-03-19
HK1070940A1 (zh) 2005-06-30
TW514723B (en) 2002-12-21
KR20020060692A (ko) 2002-07-18
CA2381311C (en) 2009-02-03
DE60001462T2 (de) 2003-12-04
DE60001462D1 (de) 2003-03-27
CN1168960C (zh) 2004-09-29
EP1206687B1 (en) 2003-02-19
CN1371474A (zh) 2002-09-25
CN100383504C (zh) 2008-04-23
ATE232972T1 (de) 2003-03-15
ES2192539T3 (es) 2003-10-16
JP2003507904A (ja) 2003-02-25
AU761197B2 (en) 2003-05-29
CN1558193A (zh) 2004-12-29
US7002153B1 (en) 2006-02-21
EP1206687A1 (en) 2002-05-22
GB9919877D0 (en) 1999-10-27

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