ATE232972T1 - Bolometer mit mikrobrückenstruktur - Google Patents

Bolometer mit mikrobrückenstruktur

Info

Publication number
ATE232972T1
ATE232972T1 AT00954753T AT00954753T ATE232972T1 AT E232972 T1 ATE232972 T1 AT E232972T1 AT 00954753 T AT00954753 T AT 00954753T AT 00954753 T AT00954753 T AT 00954753T AT E232972 T1 ATE232972 T1 AT E232972T1
Authority
AT
Austria
Prior art keywords
micro
bolometer
substrate
providing
bridge structure
Prior art date
Application number
AT00954753T
Other languages
English (en)
Inventor
John Peter Gillham
Rex Watton
John Charles Alderman
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Application granted granted Critical
Publication of ATE232972T1 publication Critical patent/ATE232972T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0853—Optical arrangements having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J5/22—Electrical features thereof
    • G01J5/24—Use of specially adapted circuits, e.g. bridge circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N19/00—Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00
AT00954753T 1999-08-24 2000-08-23 Bolometer mit mikrobrückenstruktur ATE232972T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9919877.2A GB9919877D0 (en) 1999-08-24 1999-08-24 Micro-bridge structure
PCT/GB2000/003243 WO2001014838A1 (en) 1999-08-24 2000-08-23 Micro-bridge structure

Publications (1)

Publication Number Publication Date
ATE232972T1 true ATE232972T1 (de) 2003-03-15

Family

ID=10859608

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00954753T ATE232972T1 (de) 1999-08-24 2000-08-23 Bolometer mit mikrobrückenstruktur

Country Status (15)

Country Link
US (1) US7002153B1 (de)
EP (1) EP1206687B1 (de)
JP (1) JP4284019B2 (de)
KR (1) KR100704518B1 (de)
CN (2) CN100383504C (de)
AT (1) ATE232972T1 (de)
AU (1) AU761197B2 (de)
CA (1) CA2381311C (de)
DE (1) DE60001462T2 (de)
ES (1) ES2192539T3 (de)
GB (2) GB9919877D0 (de)
HK (1) HK1070940A1 (de)
TR (1) TR200200495T2 (de)
TW (1) TW514723B (de)
WO (1) WO2001014838A1 (de)

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DE10144343A1 (de) * 2001-09-10 2003-03-27 Perkinelmer Optoelectronics Sensor zum berührugslosen Messen einer Temperatur
ATE352459T1 (de) 2002-02-02 2007-02-15 Qinetiq Ltd Kopfpositionssensor
GB0424934D0 (en) 2004-11-12 2004-12-15 Qinetiq Ltd Infrared detector
CN101249935B (zh) * 2007-03-31 2011-06-22 浙江大立科技股份有限公司 一种热绝缘微桥结构及其加工方法
US20090014657A1 (en) * 2007-05-01 2009-01-15 Honeywell International Inc. Infrared fire detection system
US7746236B2 (en) * 2007-05-01 2010-06-29 Honeywell International Inc. Fire detection system and method
KR101036329B1 (ko) * 2009-02-13 2011-05-23 조응래 건축용 비계의 보조결합구
CN101780944B (zh) * 2010-01-05 2015-04-29 上海集成电路研发中心有限公司 一种mems微桥结构的制备方法
JP5706174B2 (ja) * 2011-01-26 2015-04-22 三菱電機株式会社 赤外線センサおよび赤外線センサアレイ
JP5721597B2 (ja) * 2011-03-15 2015-05-20 三菱電機株式会社 半導体光素子および半導体光装置
TWI476969B (zh) * 2012-01-13 2015-03-11 Univ Nat Kaohsiung Applied Sci Metal silicide thermal sensor and its preparation method
US9698281B2 (en) * 2012-08-22 2017-07-04 Robert Bosch Gmbh CMOS bolometer
US9368658B2 (en) * 2012-08-31 2016-06-14 Robert Bosch Gmbh Serpentine IR sensor
CN102874735B (zh) * 2012-09-29 2015-01-07 姜利军 双材料微悬臂梁、电磁辐射探测器以及探测方法
EP2909591B1 (de) * 2012-10-17 2023-06-21 Robert Bosch GmbH Bolometer mit mehrlagiger folie
WO2015048424A1 (en) * 2013-09-27 2015-04-02 Robert Bosch Gmbh Titanium nitride for mems bolometers
CN105093356A (zh) * 2015-07-31 2015-11-25 哈尔滨工业大学 一种高能量利用率的微桥结构电阻阵列
WO2019045762A1 (en) * 2017-08-31 2019-03-07 Google Llc TRAINING DEVICE FOR PROCESSING QUANTUM INFORMATION
KR101842955B1 (ko) 2017-09-28 2018-03-29 ㈜시리우스 선택식각 공정을 이용한 마이크로 볼로미터 제조방법 및 이에 따라 제조된 마이크로 볼로미터
CN111960377B (zh) * 2020-07-29 2024-03-15 上海集成电路研发中心有限公司 Mems传感器微桥桥面的制作方法
CN113720479B (zh) * 2021-03-26 2022-11-08 北京北方高业科技有限公司 基于cmos工艺的红外探测器像元和红外探测器
JP2023028860A (ja) 2021-08-20 2023-03-03 Tdk株式会社 電磁波センサ

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Also Published As

Publication number Publication date
EP1206687B1 (de) 2003-02-19
ES2192539T3 (es) 2003-10-16
EP1206687A1 (de) 2002-05-22
CN1558193A (zh) 2004-12-29
WO2001014838A1 (en) 2001-03-01
AU761197B2 (en) 2003-05-29
DE60001462D1 (de) 2003-03-27
JP4284019B2 (ja) 2009-06-24
CN1371474A (zh) 2002-09-25
US7002153B1 (en) 2006-02-21
KR100704518B1 (ko) 2007-04-09
CN100383504C (zh) 2008-04-23
GB9919877D0 (en) 1999-10-27
TW514723B (en) 2002-12-21
GB2370156A (en) 2002-06-19
KR20020060692A (ko) 2002-07-18
HK1070940A1 (en) 2005-06-30
AU6711000A (en) 2001-03-19
DE60001462T2 (de) 2003-12-04
GB0201115D0 (en) 2002-03-06
CA2381311C (en) 2009-02-03
TR200200495T2 (tr) 2002-06-21
CA2381311A1 (en) 2001-03-01
JP2003507904A (ja) 2003-02-25
CN1168960C (zh) 2004-09-29

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