SG70097A1 - Apparatus and method for machining workpieces by flushing working liquid to the tool-and-workpiece interface - Google Patents

Apparatus and method for machining workpieces by flushing working liquid to the tool-and-workpiece interface

Info

Publication number
SG70097A1
SG70097A1 SG1998001826A SG1998001826A SG70097A1 SG 70097 A1 SG70097 A1 SG 70097A1 SG 1998001826 A SG1998001826 A SG 1998001826A SG 1998001826 A SG1998001826 A SG 1998001826A SG 70097 A1 SG70097 A1 SG 70097A1
Authority
SG
Singapore
Prior art keywords
tool
working liquid
machining workpieces
workpiece interface
flushing working
Prior art date
Application number
SG1998001826A
Other languages
English (en)
Inventor
Elmar Wittenzellner
Sekiya Kenichi
Original Assignee
Disio Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP22040697A external-priority patent/JPH1158234A/ja
Priority claimed from JP5319398A external-priority patent/JP3845511B2/ja
Application filed by Disio Corp filed Critical Disio Corp
Publication of SG70097A1 publication Critical patent/SG70097A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a plurality of cutting blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/10—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with cooling provisions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a cutting blade mounted on a carriage

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
SG1998001826A 1997-08-15 1998-07-20 Apparatus and method for machining workpieces by flushing working liquid to the tool-and-workpiece interface SG70097A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP22040697A JPH1158234A (ja) 1997-08-15 1997-08-15 研磨方法及び研磨装置
JP5319398A JP3845511B2 (ja) 1998-03-05 1998-03-05 研削装置及び研削方法

Publications (1)

Publication Number Publication Date
SG70097A1 true SG70097A1 (en) 2000-01-25

Family

ID=26393908

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1998001826A SG70097A1 (en) 1997-08-15 1998-07-20 Apparatus and method for machining workpieces by flushing working liquid to the tool-and-workpiece interface

Country Status (7)

Country Link
US (1) US6095899A (de)
EP (2) EP0897778A1 (de)
KR (1) KR100486137B1 (de)
CN (1) CN1126639C (de)
MY (1) MY120753A (de)
SG (1) SG70097A1 (de)
TW (1) TW434098B (de)

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SG70097A1 (en) * 1997-08-15 2000-01-25 Disio Corp Apparatus and method for machining workpieces by flushing working liquid to the tool-and-workpiece interface
JP3894526B2 (ja) * 1998-07-06 2007-03-22 株式会社ディスコ 切削装置
JP3485816B2 (ja) * 1998-12-09 2004-01-13 太陽誘電株式会社 ダイシング装置
JP2000254857A (ja) * 1999-01-06 2000-09-19 Tokyo Seimitsu Co Ltd 平面加工装置及び平面加工方法
JP2002025961A (ja) * 2000-07-04 2002-01-25 Disco Abrasive Syst Ltd 半導体ウエーハの研削方法
JP2002028073A (ja) * 2000-07-13 2002-01-29 Disco Abrasive Syst Ltd 伸縮自在カーテン
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JP4455750B2 (ja) * 2000-12-27 2010-04-21 株式会社ディスコ 研削装置
JP2004050313A (ja) * 2002-07-17 2004-02-19 Memc Japan Ltd 研削用砥石および研削方法
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JP5164559B2 (ja) * 2007-12-27 2013-03-21 株式会社ディスコ 研削装置
EP2522459B1 (de) * 2010-01-13 2014-11-12 A.L.M.T. Corp. Superschleifkornrad, waferherstellungsverfahren und wafer
CN102294659A (zh) * 2010-06-25 2011-12-28 中国砂轮企业股份有限公司 可调动态平衡及排屑的研磨砂轮
CN102380822A (zh) * 2010-09-01 2012-03-21 沈阳理工大学 一种金刚石膜的超高速复合抛光盘
TWI517935B (zh) * 2013-04-16 2016-01-21 國立台灣科技大學 氣體添加硏磨液的供應系統及其方法
JP6255238B2 (ja) * 2013-12-27 2017-12-27 株式会社ディスコ 切削装置
JP6139420B2 (ja) * 2014-01-10 2017-05-31 株式会社東芝 研磨装置および研磨方法
KR101530269B1 (ko) * 2014-01-15 2015-06-23 주식회사 엘지실트론 웨이퍼 그라인딩 장치
CN104128888A (zh) * 2014-07-25 2014-11-05 浙江博海金属制品科技有限公司 一种平面抛光机
KR20160125585A (ko) * 2015-04-21 2016-11-01 삼성전자주식회사 기판 처리 장치 및 기판 처리 방법
CN104907896A (zh) * 2015-06-07 2015-09-16 安徽格楠机械有限公司 一种适用于深井采油钻头研磨抛光机
ITUB20154914A1 (it) * 2015-10-29 2017-04-29 Ancora Spa Dispositivo per la lavorazione di manufatti ceramici
JP6700800B2 (ja) * 2016-01-15 2020-05-27 株式会社ディスコ ブレードカバー
CN106158709B (zh) * 2016-07-22 2018-09-11 江苏鲁汶仪器有限公司 一种晶圆切割装置和方法
KR101835986B1 (ko) 2016-07-25 2018-03-07 시오 컴퍼니 리미티드 유체 공급관
JP6736404B2 (ja) * 2016-07-26 2020-08-05 株式会社ディスコ 研削装置
JP6844970B2 (ja) * 2016-08-18 2021-03-17 株式会社ディスコ 研磨装置
CN108068024A (zh) * 2016-11-17 2018-05-25 上海域申光电科技有限公司 抛光盘
KR101838429B1 (ko) 2017-01-09 2018-03-13 시오 컴퍼니 리미티드 유체 공급관
KR20190035412A (ko) 2017-09-26 2019-04-03 시오 컴퍼니 리미티드 유체 공급관
JP6433041B1 (ja) 2017-10-25 2018-12-05 株式会社塩 流体供給装置
US10460926B2 (en) 2017-11-17 2019-10-29 Taiwan Semiconductor Manufacturing Co., Ltd. Method and apparatus for chemical mechanical polishing process
JP7096674B2 (ja) * 2018-01-31 2022-07-06 株式会社ディスコ 研削研磨装置及び研削研磨方法
CN109304649B (zh) * 2018-10-13 2020-08-21 北京圣龙缘科技有限公司 一种无人机电子芯片制造装备
CN111070055A (zh) * 2019-12-27 2020-04-28 科达半导体有限公司 一种超薄晶圆加工装置
CN112223093B (zh) * 2020-06-19 2021-10-29 连云港华鼎车轮有限公司 一种汽车钢圈自动抛光设备
JP2022032667A (ja) * 2020-08-13 2022-02-25 株式会社ディスコ ウェーハの加工方法
EP4144480B1 (de) * 2021-09-01 2024-01-31 Siltronic AG Verfahren zum schleifen von halbleiterscheiben
CN114029851A (zh) * 2021-11-24 2022-02-11 济源石晶光电频率技术有限公司 一种高基频晶片研磨工艺

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SG70097A1 (en) * 1997-08-15 2000-01-25 Disio Corp Apparatus and method for machining workpieces by flushing working liquid to the tool-and-workpiece interface

Also Published As

Publication number Publication date
EP0897778A1 (de) 1999-02-24
KR19990023450A (ko) 1999-03-25
US6095899A (en) 2000-08-01
EP1110669A3 (de) 2001-12-05
EP1110669A2 (de) 2001-06-27
KR100486137B1 (ko) 2005-07-18
CN1126639C (zh) 2003-11-05
CN1208682A (zh) 1999-02-24
MY120753A (en) 2005-11-30
TW434098B (en) 2001-05-16

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