SG184014A1 - Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder - Google Patents
Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder Download PDFInfo
- Publication number
- SG184014A1 SG184014A1 SG2012067369A SG2012067369A SG184014A1 SG 184014 A1 SG184014 A1 SG 184014A1 SG 2012067369 A SG2012067369 A SG 2012067369A SG 2012067369 A SG2012067369 A SG 2012067369A SG 184014 A1 SG184014 A1 SG 184014A1
- Authority
- SG
- Singapore
- Prior art keywords
- wafer
- grinding
- hydrostatic
- grinder
- stage
- Prior art date
Links
- 230000002706 hydrostatic effect Effects 0.000 title claims abstract description 200
- 238000000227 grinding Methods 0.000 claims abstract description 267
- 238000000034 method Methods 0.000 claims abstract description 66
- 230000008859 change Effects 0.000 claims abstract description 7
- 230000008569 process Effects 0.000 claims description 28
- 239000004065 semiconductor Substances 0.000 claims description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 238000012545 processing Methods 0.000 claims description 12
- 230000004044 response Effects 0.000 claims description 8
- 230000003247 decreasing effect Effects 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 395
- 238000005259 measurement Methods 0.000 description 44
- 238000004458 analytical method Methods 0.000 description 23
- 230000007547 defect Effects 0.000 description 18
- 239000012530 fluid Substances 0.000 description 14
- 230000000875 corresponding effect Effects 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 238000005498 polishing Methods 0.000 description 13
- 230000015556 catabolic process Effects 0.000 description 10
- 238000006731 degradation reaction Methods 0.000 description 10
- 230000002093 peripheral effect Effects 0.000 description 10
- 238000012916 structural analysis Methods 0.000 description 10
- 230000000246 remedial effect Effects 0.000 description 8
- 230000005489 elastic deformation Effects 0.000 description 7
- 230000001276 controlling effect Effects 0.000 description 6
- 238000011143 downstream manufacturing Methods 0.000 description 6
- 238000005452 bending Methods 0.000 description 5
- 230000003993 interaction Effects 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 230000002301 combined effect Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007363 ring formation reaction Methods 0.000 description 2
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- 230000011664 signaling Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
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- 238000005266 casting Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
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- 238000001914 filtration Methods 0.000 description 1
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- 238000012806 monitoring device Methods 0.000 description 1
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- 238000013519 translation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/28—Work carriers for double side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
- B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/14—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms
- B24B9/148—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms electrically, e.g. numerically, controlled
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/18, H10D48/04 and H10D48/07, with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31791910P | 2010-03-26 | 2010-03-26 | |
| PCT/IB2011/051152 WO2011117792A1 (en) | 2010-03-26 | 2011-03-18 | Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG184014A1 true SG184014A1 (en) | 2012-10-30 |
Family
ID=44657008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG2012067369A SG184014A1 (en) | 2010-03-26 | 2011-03-18 | Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8712575B2 (enExample) |
| EP (1) | EP2552644A4 (enExample) |
| JP (1) | JP6013317B2 (enExample) |
| KR (1) | KR101694574B1 (enExample) |
| CN (1) | CN102844151A (enExample) |
| SG (1) | SG184014A1 (enExample) |
| TW (1) | TWI520202B (enExample) |
| WO (1) | WO2011117792A1 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9960088B2 (en) * | 2011-11-07 | 2018-05-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | End point detection in grinding |
| US9358660B2 (en) | 2011-11-07 | 2016-06-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Grinding wheel design with elongated teeth arrangement |
| JP6197580B2 (ja) * | 2013-10-29 | 2017-09-20 | 株式会社Sumco | キャリアプレート及びワークの両面研磨装置 |
| CN105881213A (zh) * | 2014-09-01 | 2016-08-24 | 曾庆明 | 一种精密双面研磨机的控制器 |
| JP6285375B2 (ja) * | 2015-02-17 | 2018-02-28 | 光洋機械工業株式会社 | 両頭平面研削装置 |
| JP6447472B2 (ja) * | 2015-11-26 | 2019-01-09 | 株式会社Sumco | ウェーハ研磨方法 |
| CN108127560A (zh) * | 2017-12-08 | 2018-06-08 | 中国兵器科学研究院宁波分院 | 用于方形光学元件双面快速抛光的控制系统 |
| JP6513174B2 (ja) * | 2017-12-25 | 2019-05-15 | 信越半導体株式会社 | ウェーハ保持用キャリアの設計方法 |
| JP7159861B2 (ja) * | 2018-12-27 | 2022-10-25 | 株式会社Sumco | 両頭研削方法 |
| JP7116371B2 (ja) * | 2019-04-01 | 2022-08-10 | 株式会社村田製作所 | 研磨剤供給装置、研磨装置及び研磨剤供給方法 |
| US11415971B2 (en) | 2020-02-10 | 2022-08-16 | Globalwafers Co., Ltd. | Systems and methods for enhanced wafer manufacturing |
| CN116601575A (zh) * | 2020-11-10 | 2023-08-15 | 环球晶圆股份有限公司 | 使用阶层式预测及复合阈值增强机器学习的系统及方法 |
| CN114227524A (zh) * | 2021-12-30 | 2022-03-25 | 西安奕斯伟材料科技有限公司 | 双面研磨装置和双面研磨方法 |
| US12386340B2 (en) | 2022-02-25 | 2025-08-12 | Globalwafers Co., Ltd. | Systems and methods for generating post-polishing topography for enhanced wafer manufacturing |
| CN115070604B (zh) * | 2022-06-09 | 2023-09-29 | 西安奕斯伟材料科技股份有限公司 | 双面研磨装置和双面研磨方法 |
| CN115723035B (zh) * | 2022-09-08 | 2024-05-28 | 西安奕斯伟材料科技股份有限公司 | 用于监控研磨装置的加工状态的系统、方法及双面研磨装置 |
| CN115383616B (zh) * | 2022-09-22 | 2024-05-31 | 西安奕斯伟材料科技股份有限公司 | 研磨装置、研磨方法及硅片 |
| CN116475934B (zh) * | 2023-03-31 | 2025-03-28 | 西安奕斯伟材料科技股份有限公司 | 静压垫、研磨设备及硅片 |
| CN120715743A (zh) * | 2025-04-18 | 2025-09-30 | 浙江求是半导体设备有限公司 | 一种晶圆双面减薄方法和系统 |
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| JPH1177497A (ja) * | 1997-09-01 | 1999-03-23 | Waida Seisakusho:Kk | 半導体ウエハの両面研削方法及び両面研削装置 |
| JPH11154655A (ja) * | 1997-11-21 | 1999-06-08 | Komatsu Electron Metals Co Ltd | 半導体ウェハの製造方法 |
| JP3328193B2 (ja) * | 1998-07-08 | 2002-09-24 | 信越半導体株式会社 | 半導体ウエーハの製造方法 |
| JP3664593B2 (ja) * | 1998-11-06 | 2005-06-29 | 信越半導体株式会社 | 半導体ウエーハおよびその製造方法 |
| JP3969956B2 (ja) * | 1999-05-07 | 2007-09-05 | 信越半導体株式会社 | 両面同時研削方法および両面同時研削盤並びに両面同時ラップ方法および両面同時ラップ盤 |
| US6294469B1 (en) * | 1999-05-21 | 2001-09-25 | Plasmasil, Llc | Silicon wafering process flow |
| JP2002307303A (ja) * | 2001-04-10 | 2002-10-23 | Koyo Mach Ind Co Ltd | 薄板円板状ワークの両面研削方法および装置 |
| JP2002307275A (ja) * | 2001-04-16 | 2002-10-23 | Sumitomo Heavy Ind Ltd | 加工システム及び面取り装置 |
| JP2002346924A (ja) * | 2001-05-29 | 2002-12-04 | Sumitomo Heavy Ind Ltd | ワークホルダ |
| JP3848120B2 (ja) * | 2001-10-12 | 2006-11-22 | 住友重機械工業株式会社 | ワーク研削装置 |
| JP2004072076A (ja) * | 2002-06-10 | 2004-03-04 | Nikon Corp | 露光装置及びステージ装置、並びにデバイス製造方法 |
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| DE102004005702A1 (de) * | 2004-02-05 | 2005-09-01 | Siltronic Ag | Halbleiterscheibe, Vorrichtung und Verfahren zur Herstellung der Halbleiterscheibe |
| WO2005095054A1 (en) * | 2004-03-19 | 2005-10-13 | Memc Electronic Materials, Inc. | Wafer clamping device for a double side grinder |
| US7040958B2 (en) * | 2004-05-21 | 2006-05-09 | Mosel Vitelic, Inc. | Torque-based end point detection methods for chemical mechanical polishing tool which uses ceria-based CMP slurry to polish to protective pad layer |
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| JP4670566B2 (ja) * | 2005-09-29 | 2011-04-13 | 信越半導体株式会社 | 半導体ウェーハの両頭研削装置、静圧パッドおよびこれを用いた両頭研削方法 |
| JP4752475B2 (ja) * | 2005-12-08 | 2011-08-17 | 信越半導体株式会社 | 半導体ウェーハの両頭研削装置、静圧パッドおよびこれを用いた両頭研削方法 |
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| WO2007130708A1 (en) * | 2006-01-30 | 2007-11-15 | Memc Electronic Materials, Inc. | Double side wafer grinder and methods for assessing workpiece nanotopology |
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| DE102007030958B4 (de) * | 2007-07-04 | 2014-09-11 | Siltronic Ag | Verfahren zum Schleifen von Halbleiterscheiben |
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| DE102007049811B4 (de) * | 2007-10-17 | 2016-07-28 | Peter Wolters Gmbh | Läuferscheibe, Verfahren zur Beschichtung einer Läuferscheibe sowie Verfahren zur gleichzeitigen beidseitigen Material abtragenden Bearbeitung von Halbleiterscheiben |
| JP4985451B2 (ja) * | 2008-02-14 | 2012-07-25 | 信越半導体株式会社 | ワークの両頭研削装置およびワークの両頭研削方法 |
| JP5390807B2 (ja) * | 2008-08-21 | 2014-01-15 | 株式会社荏原製作所 | 研磨方法および装置 |
| JP2010064214A (ja) * | 2008-09-12 | 2010-03-25 | Koyo Mach Ind Co Ltd | 両頭平面研削盤及びワークの両面研削方法 |
| JP4291405B1 (ja) * | 2008-11-14 | 2009-07-08 | 健治 吉田 | ドットパターン読み取り機能を備えたマウス |
| DE102009048436B4 (de) * | 2009-10-07 | 2012-12-20 | Siltronic Ag | Verfahren zum Schleifen einer Halbleiterscheibe |
-
2011
- 2011-03-16 US US13/049,536 patent/US8712575B2/en active Active
- 2011-03-18 SG SG2012067369A patent/SG184014A1/en unknown
- 2011-03-18 WO PCT/IB2011/051152 patent/WO2011117792A1/en not_active Ceased
- 2011-03-18 CN CN201180016139XA patent/CN102844151A/zh active Pending
- 2011-03-18 KR KR1020127025126A patent/KR101694574B1/ko active Active
- 2011-03-18 JP JP2013500633A patent/JP6013317B2/ja active Active
- 2011-03-18 EP EP11758894.7A patent/EP2552644A4/en not_active Withdrawn
- 2011-03-25 TW TW100110457A patent/TWI520202B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2552644A4 (en) | 2014-05-14 |
| KR101694574B1 (ko) | 2017-01-09 |
| US20110237160A1 (en) | 2011-09-29 |
| KR20130008572A (ko) | 2013-01-22 |
| US8712575B2 (en) | 2014-04-29 |
| CN102844151A (zh) | 2012-12-26 |
| JP6013317B2 (ja) | 2016-10-25 |
| EP2552644A1 (en) | 2013-02-06 |
| TWI520202B (zh) | 2016-02-01 |
| JP2013524484A (ja) | 2013-06-17 |
| WO2011117792A1 (en) | 2011-09-29 |
| TW201201264A (en) | 2012-01-01 |
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