SG172428A1 - Method for making nanostructured surfaces - Google Patents
Method for making nanostructured surfaces Download PDFInfo
- Publication number
- SG172428A1 SG172428A1 SG2011047826A SG2011047826A SG172428A1 SG 172428 A1 SG172428 A1 SG 172428A1 SG 2011047826 A SG2011047826 A SG 2011047826A SG 2011047826 A SG2011047826 A SG 2011047826A SG 172428 A1 SG172428 A1 SG 172428A1
- Authority
- SG
- Singapore
- Prior art keywords
- substrate
- electrode
- nanoscale
- plasma
- cylindrical electrode
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/70—Surface textures, e.g. pyramid structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Cold Cathode And The Manufacture (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Surface Treatment Of Optical Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14153108P | 2008-12-30 | 2008-12-30 | |
| PCT/US2009/069662 WO2010078306A2 (en) | 2008-12-30 | 2009-12-29 | Method for making nanostructured surfaces |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG172428A1 true SG172428A1 (en) | 2011-07-28 |
Family
ID=42310578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG2011047826A SG172428A1 (en) | 2008-12-30 | 2009-12-29 | Method for making nanostructured surfaces |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8460568B2 (https=) |
| EP (2) | EP2379442A4 (https=) |
| JP (1) | JP5788807B2 (https=) |
| KR (1) | KR101615787B1 (https=) |
| CN (1) | CN102325718B (https=) |
| SG (1) | SG172428A1 (https=) |
| WO (1) | WO2010078306A2 (https=) |
Families Citing this family (75)
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|---|---|---|---|---|
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Family Cites Families (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2064987B (en) | 1979-11-14 | 1983-11-30 | Toray Industries | Process for producing transparent shaped article having enhanced anti-reflective effect |
| JPH0244855B2 (ja) * | 1985-05-27 | 1990-10-05 | Hiraoka Shokusen | Shiitojobutsunopurazumashorisochi |
| JPS62274080A (ja) * | 1986-05-21 | 1987-11-28 | Hitachi Ltd | プラズマ処理方法 |
| US5104929A (en) | 1988-04-11 | 1992-04-14 | Minnesota Mining And Manufacturing Company | Abrasion resistant coatings comprising silicon dioxide dispersions |
| JPH0352937A (ja) * | 1989-07-19 | 1991-03-07 | Nisshin Steel Co Ltd | 連続式プラズマ処理装置 |
| US5304279A (en) * | 1990-08-10 | 1994-04-19 | International Business Machines Corporation | Radio frequency induction/multipole plasma processing tool |
| JP3360898B2 (ja) * | 1993-10-05 | 2003-01-07 | 日東電工株式会社 | 反射防止部材の製造方法及び偏光板 |
| US5909314A (en) | 1994-02-15 | 1999-06-01 | Dai Nippon Printing Co., Ltd. | Optical functional materials and process for producing the same |
| JP3175894B2 (ja) * | 1994-03-25 | 2001-06-11 | 株式会社半導体エネルギー研究所 | プラズマ処理装置及びプラズマ処理方法 |
| US5888413A (en) * | 1995-06-06 | 1999-03-30 | Matsushita Electric Industrial Co., Ltd. | Plasma processing method and apparatus |
| US5948166A (en) * | 1996-11-05 | 1999-09-07 | 3M Innovative Properties Company | Process and apparatus for depositing a carbon-rich coating on a moving substrate |
| US5888594A (en) | 1996-11-05 | 1999-03-30 | Minnesota Mining And Manufacturing Company | Process for depositing a carbon-rich coating on a moving substrate |
| EP1548045B1 (en) | 1998-01-13 | 2009-06-03 | Minnesota Mining And Manufacturing Company | Modified copolyesters |
| US6238808B1 (en) * | 1998-01-23 | 2001-05-29 | Canon Kabushiki Kaisha | Substrate with zinc oxide layer, method for producing zinc oxide layer, photovoltaic device, and method for producing photovoltaic device |
| US6890448B2 (en) | 1999-06-11 | 2005-05-10 | Shipley Company, L.L.C. | Antireflective hard mask compositions |
| US6811867B1 (en) | 2000-02-10 | 2004-11-02 | 3M Innovative Properties Company | Color stable pigmented polymeric films |
| US6483635B1 (en) | 2000-06-07 | 2002-11-19 | Cirrex Corp. | Apparatus for light amplification |
| JP2002122702A (ja) * | 2000-10-17 | 2002-04-26 | Matsushita Electric Ind Co Ltd | 光学フィルム、及び表示素子 |
| DE10241708B4 (de) | 2002-09-09 | 2005-09-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Reduzierung der Grenzflächenreflexion von Kunststoffsubstraten sowie derart modifiziertes Substrat und dessen Verwendung |
| EP1416303B8 (en) | 2002-10-30 | 2010-10-13 | Hitachi, Ltd. | Method for manufacturing functional substrates comprising columnar micro-pillars |
| JP4104485B2 (ja) * | 2003-04-28 | 2008-06-18 | 積水化学工業株式会社 | プラズマ処理装置 |
| JP2005011021A (ja) | 2003-06-18 | 2005-01-13 | Alps Electric Co Ltd | タブレット及び液晶表示装置 |
| US7030008B2 (en) | 2003-09-12 | 2006-04-18 | International Business Machines Corporation | Techniques for patterning features in semiconductor devices |
| US7074463B2 (en) | 2003-09-12 | 2006-07-11 | 3M Innovative Properties Company | Durable optical element |
| JP2005247944A (ja) * | 2004-03-03 | 2005-09-15 | Matsushita Electric Ind Co Ltd | プラスチックフィルム製造装置及びその製造方法 |
| JP4425774B2 (ja) * | 2004-03-11 | 2010-03-03 | 三星モバイルディスプレイ株式會社 | 垂直電界効果トランジスタ、それによる垂直電界効果トランジスタの製造方法及びそれを備える平板ディスプレイ装置 |
| JP4068074B2 (ja) * | 2004-03-29 | 2008-03-26 | 株式会社東芝 | 凸凹パターンの形成方法および凸凹パターン形成用部材 |
| JP2005331868A (ja) * | 2004-05-21 | 2005-12-02 | Canon Inc | 反射防止構造を有する光学素子およびその製造方法 |
| US7170666B2 (en) | 2004-07-27 | 2007-01-30 | Hewlett-Packard Development Company, L.P. | Nanostructure antireflection surfaces |
| US7264872B2 (en) | 2004-12-30 | 2007-09-04 | 3M Innovative Properties Company | Durable high index nanocomposites for AR coatings |
| US20070118939A1 (en) | 2005-11-10 | 2007-05-24 | C.R.F. Societa Consortile Per Azioni | Anti-reflection nano-metric structure based on porous alumina and method for production thereof |
| JP2007178873A (ja) * | 2005-12-28 | 2007-07-12 | Nikon Corp | 光学素子 |
| US7848021B2 (en) | 2006-02-17 | 2010-12-07 | Fujifilm Corporation | Optical film, antireflection film, polarizing plate and image display device |
| JP4794351B2 (ja) * | 2006-05-15 | 2011-10-19 | パナソニック株式会社 | 反射防止構造体及びそれを備えた光学装置 |
| JP5252811B2 (ja) | 2006-05-16 | 2013-07-31 | 日東電工株式会社 | 防眩性ハードコートフィルム、偏光板および画像表示装置 |
| ATE426184T1 (de) * | 2006-05-31 | 2009-04-15 | Suisse Electronique Microtech | Nanostrukturierter diffraktionsfilter nullter ordnung |
| DE102006046131B4 (de) * | 2006-09-28 | 2020-06-25 | X-Fab Semiconductor Foundries Ag | Verfahren zur Herstellung einer optischen Schnittstelle für integrierte Optikanwendungen |
| DE102006056578A1 (de) * | 2006-11-30 | 2008-06-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung einer Nanostruktur an einer Kunststoffoberfläche |
| WO2008072498A1 (ja) * | 2006-12-13 | 2008-06-19 | National Institute Of Advanced Industrial Science And Technology | ナノ構造体を有する光学素子用成形型、ナノ構造体用成形型、その製造方法および光学素子 |
| US7839570B2 (en) | 2007-01-22 | 2010-11-23 | Dai Nippon Printing Co., Ltd. | Optical layered body, polarizer and image display device |
| JP4155337B1 (ja) | 2007-02-21 | 2008-09-24 | ソニー株式会社 | 防眩性フィルムおよびその製造方法、ならびに表示装置 |
| US7604381B2 (en) | 2007-04-16 | 2009-10-20 | 3M Innovative Properties Company | Optical article and method of making |
| DE102008018866A1 (de) | 2008-04-15 | 2009-10-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Reflexionsminderndes Interferenzschichtsystem und Verfahren zu dessen Herstellung |
| US20090316060A1 (en) | 2008-06-18 | 2009-12-24 | 3M Innovative Properties Company | Conducting film or electrode with improved optical and electrical performance |
| WO2010123528A2 (en) * | 2008-12-30 | 2010-10-28 | 3M Innovative Properties Company | Nanostructured articles and methods of making nanostructured articles |
| EP2379442A4 (en) | 2008-12-30 | 2014-02-26 | 3M Innovative Properties Co | METHOD FOR PRODUCING NANOSTRUCTURED SURFACES |
-
2009
- 2009-12-29 EP EP09837102.4A patent/EP2379442A4/en not_active Withdrawn
- 2009-12-29 WO PCT/US2009/069662 patent/WO2010078306A2/en not_active Ceased
- 2009-12-29 KR KR1020117017686A patent/KR101615787B1/ko active Active
- 2009-12-29 US US13/142,441 patent/US8460568B2/en active Active
- 2009-12-29 EP EP16176780.1A patent/EP3115334B1/en active Active
- 2009-12-29 JP JP2011544577A patent/JP5788807B2/ja active Active
- 2009-12-29 CN CN2009801573421A patent/CN102325718B/zh active Active
- 2009-12-29 SG SG2011047826A patent/SG172428A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN102325718A (zh) | 2012-01-18 |
| EP3115334B1 (en) | 2018-03-21 |
| JP5788807B2 (ja) | 2015-10-07 |
| KR101615787B1 (ko) | 2016-04-26 |
| EP2379442A2 (en) | 2011-10-26 |
| US20120012557A1 (en) | 2012-01-19 |
| US8460568B2 (en) | 2013-06-11 |
| CN102325718B (zh) | 2013-12-18 |
| EP2379442A4 (en) | 2014-02-26 |
| JP2012514242A (ja) | 2012-06-21 |
| EP3115334A1 (en) | 2017-01-11 |
| KR20110103448A (ko) | 2011-09-20 |
| WO2010078306A2 (en) | 2010-07-08 |
| WO2010078306A3 (en) | 2010-09-23 |
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