SG115500A1 - Method to produce a reliable piezoelectric thick film on a substrate - Google Patents
Method to produce a reliable piezoelectric thick film on a substrateInfo
- Publication number
- SG115500A1 SG115500A1 SG200206099A SG200206099A SG115500A1 SG 115500 A1 SG115500 A1 SG 115500A1 SG 200206099 A SG200206099 A SG 200206099A SG 200206099 A SG200206099 A SG 200206099A SG 115500 A1 SG115500 A1 SG 115500A1
- Authority
- SG
- Singapore
- Prior art keywords
- precipitate
- substrate
- thick film
- paste
- powdered
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 3
- 239000002244 precipitate Substances 0.000 abstract 5
- 238000000137 annealing Methods 0.000 abstract 2
- 239000007788 liquid Substances 0.000 abstract 2
- 229910044991 metal oxide Inorganic materials 0.000 abstract 2
- 150000004706 metal oxides Chemical class 0.000 abstract 2
- 238000003801 milling Methods 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 2
- 239000002243 precursor Substances 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 229910010293 ceramic material Inorganic materials 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 238000001035 drying Methods 0.000 abstract 1
- 239000007791 liquid phase Substances 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 238000002156 mixing Methods 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 239000012254 powdered material Substances 0.000 abstract 1
- 230000009466 transformation Effects 0.000 abstract 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
- C23C18/1208—Oxides, e.g. ceramics
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62802—Powder coating materials
- C04B35/62805—Oxide ceramics
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62886—Coating the powders or the macroscopic reinforcing agents by wet chemical techniques
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/6303—Inorganic additives
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
- C04B2235/3203—Lithium oxide or oxide-forming salts thereof
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3244—Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
- C04B2235/3248—Zirconates or hafnates, e.g. zircon
- C04B2235/3249—Zirconates or hafnates, e.g. zircon containing also titanium oxide or titanates, e.g. lead zirconate titanate (PZT)
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3296—Lead oxides, plumbates or oxide forming salts thereof, e.g. silver plumbate
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3298—Bismuth oxides, bismuthates or oxide forming salts thereof, e.g. zinc bismuthate
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
- C04B2235/449—Organic acids, e.g. EDTA, citrate, acetate, oxalate
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Composite Materials (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Producing Shaped Articles From Materials (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200206099A SG115500A1 (en) | 2002-10-09 | 2002-10-09 | Method to produce a reliable piezoelectric thick film on a substrate |
US10/680,229 US7713576B2 (en) | 2002-10-09 | 2003-10-08 | Method to produce a reliable piezoelectric thick film on a substrate |
JP2003351028A JP4795633B2 (ja) | 2002-10-09 | 2003-10-09 | 基材上に圧電性厚膜を製造する方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200206099A SG115500A1 (en) | 2002-10-09 | 2002-10-09 | Method to produce a reliable piezoelectric thick film on a substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
SG115500A1 true SG115500A1 (en) | 2005-10-28 |
Family
ID=32067562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200206099A SG115500A1 (en) | 2002-10-09 | 2002-10-09 | Method to produce a reliable piezoelectric thick film on a substrate |
Country Status (3)
Country | Link |
---|---|
US (1) | US7713576B2 (ja) |
JP (1) | JP4795633B2 (ja) |
SG (1) | SG115500A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7279131B2 (en) * | 2004-07-01 | 2007-10-09 | Uop Llc | Method and apparatus for mass analysis of samples |
CN100344966C (zh) * | 2004-11-10 | 2007-10-24 | 浣石 | 一种氮氧化物传感器的制作工艺 |
KR100759366B1 (ko) | 2006-04-24 | 2007-09-19 | 한국기계연구원 | 질산 용액에 처리된 피지티 분말을 첨가한 솔-젤 후막 용액및 상기 용액을 이용한 솔-젤 후막 제조 방법 |
US8736151B2 (en) * | 2006-09-26 | 2014-05-27 | Velos Industries, LLC | Electric generator |
SI2207758T1 (en) * | 2007-10-18 | 2018-01-31 | Ceramtec Gmbh | Piezoceramic multilayer element |
JP5690207B2 (ja) * | 2011-05-11 | 2015-03-25 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP6081449B2 (ja) | 2012-03-30 | 2017-02-15 | 日本碍子株式会社 | 圧電/電歪膜型素子及び圧電/電歪膜型素子を製造する方法 |
JPWO2013146975A1 (ja) * | 2012-03-30 | 2015-12-14 | 日本碍子株式会社 | 圧電/電歪膜型素子及び圧電/電歪膜型素子を製造する方法 |
CN105355777A (zh) * | 2015-10-21 | 2016-02-24 | 天津大学 | 氧化铝基板上pnn-pzn-pzt多层并联压电厚膜的制备方法 |
KR20170136875A (ko) * | 2016-06-02 | 2017-12-12 | 주식회사 모다이노칩 | 압전 소자 및 이의 제조 방법 |
Citations (8)
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JPS5630780A (en) * | 1979-08-20 | 1981-03-27 | Matsushita Electric Ind Co Ltd | Manufacture of piezoelectric porcelain |
JPS60144984A (ja) * | 1984-01-07 | 1985-07-31 | Fuji Elelctrochem Co Ltd | 圧電磁器組成物 |
US4946710A (en) * | 1987-06-02 | 1990-08-07 | National Semiconductor Corporation | Method for preparing PLZT, PZT and PLT sol-gels and fabricating ferroelectric thin films |
US4963390A (en) * | 1988-10-05 | 1990-10-16 | The Aerospace Corporation | Metallo-organic solution deposition (MOSD) of transparent, crystalline ferroelectric films |
EP0564866A2 (en) * | 1992-04-06 | 1993-10-13 | Motorola, Inc. | Method for making a semiconductor device having an anhydrous ferroelectric thin film |
US5308807A (en) * | 1992-07-15 | 1994-05-03 | Nalco Chemical Company | Production of lead zirconate titanates using zirconia sol as a reactant |
WO2000065643A1 (en) * | 1999-04-24 | 2000-11-02 | The Secretary Of State For Defence | Improvements in or relating to sol gel processing of lead zirconate titanate thin films |
US20020171182A1 (en) * | 2000-05-13 | 2002-11-21 | Tae-Song Kim | High density ceramic thick film fabrication method by screen printing |
Family Cites Families (21)
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US4283228A (en) * | 1979-12-05 | 1981-08-11 | University Of Illinois Foundation | Low temperature densification of PZT ceramics |
GB2161647A (en) | 1984-07-10 | 1986-01-15 | Gen Electric Co Plc | Piezoelectric devices |
JPS62105949A (ja) * | 1985-10-31 | 1987-05-16 | 東芝セラミツクス株式会社 | 難焼結性セラミツク用焼結助剤の添加方法 |
JPS62162670A (ja) * | 1986-01-09 | 1987-07-18 | 住友金属鉱山株式会社 | チタン酸ジルコン酸鉛焼結体の製法 |
DK163944C (da) * | 1990-02-07 | 1992-09-21 | Radiometer As | Glaselektrode og anvendelse af denne |
JPH03283583A (ja) | 1990-03-30 | 1991-12-13 | Mazda Motor Corp | 圧電体厚膜の製造方法 |
JPH0674173B2 (ja) * | 1990-09-27 | 1994-09-21 | 岩崎通信機株式会社 | チタン酸ジルコン酸鉛の製造方法 |
WO1992017420A1 (en) * | 1991-04-03 | 1992-10-15 | American Superconductor Corporation | Electroceramics and process for making the same |
JPH04318985A (ja) * | 1991-04-17 | 1992-11-10 | Murata Mfg Co Ltd | 高温超伝導体高温相厚膜の形成方法 |
JPH0529771A (ja) * | 1991-07-23 | 1993-02-05 | Fujitsu Ltd | セラミツク回路基板およびその製造方法 |
US5433917A (en) * | 1993-09-16 | 1995-07-18 | The Penn State Research Foundation | PZT ceramic compositions having reduced sintering temperatures and process for producing same |
JPH07315928A (ja) * | 1994-05-23 | 1995-12-05 | Murata Mfg Co Ltd | 鉛含有セラミックス粉体の製造方法 |
SG88736A1 (en) | 1997-11-07 | 2002-05-21 | Inst Data Storage | Laminated multilayer thick-film actuator |
JPH11348277A (ja) * | 1998-06-04 | 1999-12-21 | Ricoh Co Ltd | インクジェットプリンタヘッド |
JP2000162434A (ja) * | 1998-11-27 | 2000-06-16 | Kyocera Corp | 偏光子及びその製造方法 |
JP3508682B2 (ja) | 1999-03-02 | 2004-03-22 | セイコーエプソン株式会社 | 圧電アクチュエータ、インクジェット式記録ヘッド、これらの製造方法及びインクジェットプリンタ |
JP2001002469A (ja) * | 1999-04-22 | 2001-01-09 | Murata Mfg Co Ltd | 圧電体ペーストならびにこれを用いた圧電体膜および圧電体部品 |
JP2000328223A (ja) * | 1999-05-25 | 2000-11-28 | Agency Of Ind Science & Technol | 積層構造体及びその原料粉、及び、圧電アクチュエータ |
US6194124B1 (en) * | 1999-08-12 | 2001-02-27 | E. I. Du Pont De Nemours And Company | Photosensitive ceramic compositions containing polycarbonate polymers |
JP4873206B2 (ja) * | 2001-02-15 | 2012-02-08 | 曽田香料株式会社 | 6−メチル−4,6−ヘプタジエン−2−オンの製造方法 |
KR100420929B1 (ko) * | 2001-05-26 | 2004-03-02 | 한국과학기술연구원 | 고밀도 압전 후막 및 그 제조방법 |
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2002
- 2002-10-09 SG SG200206099A patent/SG115500A1/en unknown
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2003
- 2003-10-08 US US10/680,229 patent/US7713576B2/en not_active Expired - Fee Related
- 2003-10-09 JP JP2003351028A patent/JP4795633B2/ja not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5630780A (en) * | 1979-08-20 | 1981-03-27 | Matsushita Electric Ind Co Ltd | Manufacture of piezoelectric porcelain |
JPS60144984A (ja) * | 1984-01-07 | 1985-07-31 | Fuji Elelctrochem Co Ltd | 圧電磁器組成物 |
US4946710A (en) * | 1987-06-02 | 1990-08-07 | National Semiconductor Corporation | Method for preparing PLZT, PZT and PLT sol-gels and fabricating ferroelectric thin films |
US4963390A (en) * | 1988-10-05 | 1990-10-16 | The Aerospace Corporation | Metallo-organic solution deposition (MOSD) of transparent, crystalline ferroelectric films |
EP0564866A2 (en) * | 1992-04-06 | 1993-10-13 | Motorola, Inc. | Method for making a semiconductor device having an anhydrous ferroelectric thin film |
US5308807A (en) * | 1992-07-15 | 1994-05-03 | Nalco Chemical Company | Production of lead zirconate titanates using zirconia sol as a reactant |
WO2000065643A1 (en) * | 1999-04-24 | 2000-11-02 | The Secretary Of State For Defence | Improvements in or relating to sol gel processing of lead zirconate titanate thin films |
US20020171182A1 (en) * | 2000-05-13 | 2002-11-21 | Tae-Song Kim | High density ceramic thick film fabrication method by screen printing |
Also Published As
Publication number | Publication date |
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US20040071864A1 (en) | 2004-04-15 |
JP2004168637A (ja) | 2004-06-17 |
US7713576B2 (en) | 2010-05-11 |
JP4795633B2 (ja) | 2011-10-19 |
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