SG11202108087XA - Storage system - Google Patents

Storage system

Info

Publication number
SG11202108087XA
SG11202108087XA SG11202108087XA SG11202108087XA SG11202108087XA SG 11202108087X A SG11202108087X A SG 11202108087XA SG 11202108087X A SG11202108087X A SG 11202108087XA SG 11202108087X A SG11202108087X A SG 11202108087XA SG 11202108087X A SG11202108087X A SG 11202108087XA
Authority
SG
Singapore
Prior art keywords
storage system
storage
Prior art date
Application number
SG11202108087XA
Other languages
English (en)
Inventor
Eiji Wada
Kosuke Irino
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11202108087XA publication Critical patent/SG11202108087XA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0428—Transfer means for the stacker crane between the alleys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
    • B66C17/06—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports specially adapted for particular purposes, e.g. in foundries, forges; combined with auxiliary apparatus serving particular purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C19/00—Cranes comprising trolleys or crabs running on fixed or movable bridges or gantries
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C7/00—Runways, tracks or trackways for trolleys or cranes
    • B66C7/02—Runways, tracks or trackways for trolleys or cranes for underhung trolleys or cranes
    • B66C7/04—Trackway suspension
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
SG11202108087XA 2019-01-25 2019-12-13 Storage system SG11202108087XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019011280 2019-01-25
PCT/JP2019/048870 WO2020153039A1 (fr) 2019-01-25 2019-12-13 Système de stockage

Publications (1)

Publication Number Publication Date
SG11202108087XA true SG11202108087XA (en) 2021-08-30

Family

ID=71736727

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202108087XA SG11202108087XA (en) 2019-01-25 2019-12-13 Storage system

Country Status (8)

Country Link
US (1) US11615975B2 (fr)
EP (1) EP3915903A4 (fr)
JP (1) JP7136236B2 (fr)
KR (1) KR102531954B1 (fr)
CN (1) CN113348140B (fr)
SG (1) SG11202108087XA (fr)
TW (1) TWI828841B (fr)
WO (1) WO2020153039A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114649250B (zh) * 2022-05-20 2022-08-05 弥费实业(上海)有限公司 供存储库与oht交换晶圆盒的运输装置、天车窗口及存储库
WO2024070624A1 (fr) * 2022-09-27 2024-04-04 村田機械株式会社 Système de stockage

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000124284A (ja) 1998-10-13 2000-04-28 Hitachi Kiden Kogyo Ltd 搬送装置
JP5028871B2 (ja) 2006-06-09 2012-09-19 村田機械株式会社 メンテナンスステーション
JP2007331906A (ja) 2006-06-16 2007-12-27 Murata Mach Ltd 天井走行車システム
CN102470985B (zh) * 2009-11-27 2015-07-22 株式会社大福 顶棚输送车
JP5168321B2 (ja) 2010-06-21 2013-03-21 村田機械株式会社 搬送体昇降装置
KR101533366B1 (ko) 2010-11-04 2015-07-02 무라다기카이가부시끼가이샤 반송 시스템 및 반송 방법
JP5229363B2 (ja) * 2010-11-04 2013-07-03 村田機械株式会社 搬送システム及び搬送方法
JP5316907B2 (ja) 2011-03-17 2013-10-16 株式会社ダイフク 物品搬送設備
JP2013001533A (ja) 2011-06-20 2013-01-07 Murata Machinery Ltd 天井走行車システム
JP5674041B2 (ja) * 2011-08-11 2015-02-18 株式会社ダイフク 物品搬送設備
EP2860136B1 (fr) * 2012-06-08 2020-08-05 Murata Machinery, Ltd. Système de transport et procédé de stockage temporaire d'articles dans un système de transport
US9415934B2 (en) * 2014-05-14 2016-08-16 Murata Machinery, Ltd. Transport system and transport method
WO2015194264A1 (fr) * 2014-06-19 2015-12-23 村田機械株式会社 Dispositif de mise en réserve de chariot et procédé de mise en réserve
JP6048686B2 (ja) * 2014-09-25 2016-12-21 村田機械株式会社 一時保管装置と搬送システム及び一時保管方法
JP6256420B2 (ja) * 2015-06-30 2018-01-10 村田機械株式会社 スタッカクレーン
JP2017030944A (ja) 2015-08-04 2017-02-09 村田機械株式会社 搬送システム
EP3336018B1 (fr) 2015-08-14 2021-12-15 Murata Machinery, Ltd. Système de transport
JP2018177376A (ja) * 2015-09-09 2018-11-15 村田機械株式会社 搬送システム及び搬送方法
JP6531626B2 (ja) * 2015-11-10 2019-06-19 村田機械株式会社 自動倉庫システム
US10043699B2 (en) 2015-11-13 2018-08-07 Taiwan Semiconductor Manufacturing Co., Ltd. High capacity overhead transport (OHT) rail system with multiple levels
CN109791906B (zh) 2016-09-26 2023-11-24 村田机械株式会社 顶棚搬运系统以及顶棚搬运车
US10988359B2 (en) 2016-10-18 2021-04-27 Murata Machinery, Ltd. Overhead transport vehicle and transport system
KR102283382B1 (ko) * 2017-06-26 2021-07-29 세메스 주식회사 비히클 유지 보수용 승강 장치
JP6849065B2 (ja) * 2017-06-30 2021-03-24 村田機械株式会社 搬送システム及び搬送方法
JP7029235B2 (ja) 2017-06-30 2022-03-03 ポーラ化成工業株式会社 油性化粧料
SG11201912673UA (en) * 2017-06-30 2020-01-30 Murata Machinery Ltd Conveying system and conveying method

Also Published As

Publication number Publication date
US20220189807A1 (en) 2022-06-16
EP3915903A1 (fr) 2021-12-01
KR102531954B1 (ko) 2023-05-12
JP7136236B2 (ja) 2022-09-13
CN113348140A (zh) 2021-09-03
TWI828841B (zh) 2024-01-11
CN113348140B (zh) 2023-08-29
KR20210106549A (ko) 2021-08-30
US11615975B2 (en) 2023-03-28
JPWO2020153039A1 (ja) 2021-11-25
TW202031572A (zh) 2020-09-01
EP3915903A4 (fr) 2022-10-05
WO2020153039A1 (fr) 2020-07-30

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