SG11201510417RA - Tixsi1-xn layers and the production thereof - Google Patents

Tixsi1-xn layers and the production thereof

Info

Publication number
SG11201510417RA
SG11201510417RA SG11201510417RA SG11201510417RA SG11201510417RA SG 11201510417R A SG11201510417R A SG 11201510417RA SG 11201510417R A SG11201510417R A SG 11201510417RA SG 11201510417R A SG11201510417R A SG 11201510417RA SG 11201510417R A SG11201510417R A SG 11201510417RA
Authority
SG
Singapore
Prior art keywords
tixsi1
layers
production
Prior art date
Application number
SG11201510417RA
Other languages
English (en)
Inventor
Denis Kurapov
Siegfried Krassnitzer
Original Assignee
Oerlikon Surface Solutions Ag Trubbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=51167846&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=SG11201510417R(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from DE102013011073.4A external-priority patent/DE102013011073A1/de
Priority claimed from DE201310011071 external-priority patent/DE102013011071A1/de
Application filed by Oerlikon Surface Solutions Ag Trubbach filed Critical Oerlikon Surface Solutions Ag Trubbach
Publication of SG11201510417RA publication Critical patent/SG11201510417RA/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/027Graded interfaces
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0682Silicides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3485Sputtering using pulsed power to the target
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Coating By Spraying Or Casting (AREA)
SG11201510417RA 2013-07-03 2014-07-01 Tixsi1-xn layers and the production thereof SG11201510417RA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013011073.4A DE102013011073A1 (de) 2013-07-03 2013-07-03 TlxSi1-xN Schichten und ihre Herstellung
DE201310011071 DE102013011071A1 (de) 2013-07-03 2013-07-03 TixSi1-xN Schichten mit CryAl1-yN Haftschicht und ihre Herstellung
PCT/EP2014/001792 WO2015000581A1 (de) 2013-07-03 2014-07-01 Tixsi1-xn schichten und ihre herstellung

Publications (1)

Publication Number Publication Date
SG11201510417RA true SG11201510417RA (en) 2016-01-28

Family

ID=51167846

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201510417RA SG11201510417RA (en) 2013-07-03 2014-07-01 Tixsi1-xn layers and the production thereof

Country Status (18)

Country Link
US (1) US9840768B2 (de)
EP (1) EP3017079B2 (de)
JP (1) JP6122975B2 (de)
KR (2) KR102178189B1 (de)
CN (1) CN105392911B (de)
BR (1) BR112015032169B1 (de)
CA (1) CA2916784C (de)
ES (1) ES2630316T5 (de)
HK (1) HK1219516A1 (de)
IL (1) IL243136A (de)
MX (1) MX361325B (de)
MY (1) MY187100A (de)
PH (1) PH12015502753B1 (de)
PL (1) PL3017079T5 (de)
PT (1) PT3017079T (de)
RU (1) RU2674179C2 (de)
SG (1) SG11201510417RA (de)
WO (1) WO2015000581A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108883481B (zh) * 2016-03-30 2020-01-14 三菱日立工具株式会社 包覆切削工具
CN110944776B (zh) * 2017-09-27 2021-09-14 株式会社Moldino 包覆切削工具
CN115125486B (zh) * 2022-07-27 2024-01-02 安徽工业大学 一种含有多层结构的高强韧纳米复合涂层及其制备方法

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07197246A (ja) * 1993-12-28 1995-08-01 Mitsubishi Materials Corp 成膜中にパーティクル発生の少ないスパッタリング用Tiシリサイド焼結ターゲット材
JPH0867971A (ja) * 1994-08-30 1996-03-12 Mitsubishi Materials Corp モザイク状Tiシリサイドターゲット材
DE19625577A1 (de) 1996-06-27 1998-01-02 Vaw Motor Gmbh Aluminium-Gußteil und Verfahren zu seiner Herstellung
JP3417907B2 (ja) * 2000-07-13 2003-06-16 日立ツール株式会社 多層皮膜被覆工具
JP3996809B2 (ja) 2002-07-11 2007-10-24 住友電工ハードメタル株式会社 被覆切削工具
US6906295B2 (en) * 2003-02-20 2005-06-14 National Material L.P. Foodware with multilayer stick resistant ceramic coating and method of making
AU2003903853A0 (en) 2003-07-25 2003-08-07 Antoine Bittar Barriers, materials and processes for solar selective surfaces
US7097922B2 (en) * 2004-05-03 2006-08-29 General Motors Corporation Multi-layered superhard nanocomposite coatings
JP2005344148A (ja) * 2004-06-01 2005-12-15 Sumitomo Electric Ind Ltd 耐摩耗性被膜およびこれを用いた表面被覆切削工具
US7790003B2 (en) * 2004-10-12 2010-09-07 Southwest Research Institute Method for magnetron sputter deposition
US7348074B2 (en) 2005-04-01 2008-03-25 Oc Oerlikon Balzers Ag Multilayer hard coating for tools
SE0500994L (sv) * 2005-04-29 2006-10-30 Seco Tools Ab Tunt slitstarkt skikt
CN101326303B (zh) * 2005-10-18 2012-07-18 西南研究院 抗侵蚀涂层
GB0608582D0 (en) 2006-05-02 2006-06-07 Univ Sheffield Hallam High power impulse magnetron sputtering vapour deposition
GB2452190B (en) * 2006-05-17 2011-12-28 G & H Technologies Llc Wear resistant depositied coating, method of coating deposition and applications therefor
RU2327811C1 (ru) * 2006-11-14 2008-06-27 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
SE0602814L (sv) * 2006-12-27 2008-06-28 Sandvik Intellectual Property Skärverktyg med multiskiktbeläggning
WO2008146727A1 (ja) 2007-05-30 2008-12-04 Sumitomo Electric Hardmetal Corp. 表面被覆切削工具
WO2009047867A1 (ja) * 2007-10-12 2009-04-16 Hitachi Tool Engineering, Ltd. 硬質皮膜被覆部材、及びその製造方法
EP2072637B1 (de) 2007-12-21 2018-08-15 Sandvik Intellectual Property AB Beschichtetes Schneidwerkzeug und Verfahren zum Herstellen
ES2658849T3 (es) 2008-07-09 2018-03-12 Oerlikon Surface Solutions Ltd., Pfäffikon Sistema de recubrimiento, pieza de trabajo recubierta y método de fabricación de la misma
ATE535629T1 (de) * 2008-07-29 2011-12-15 Sulzer Metaplas Gmbh Gepulstes hochleistungs-magnetronsputterverfahren sowie hochleistungs-elektroenergiequelle
JP5156971B2 (ja) 2009-03-17 2013-03-06 Smc株式会社 溶損防止用被覆部材
SE533883C2 (sv) 2009-06-01 2011-02-22 Seco Tools Ab Nanolaminerat belagt skärverktyg
US8784977B2 (en) * 2009-06-22 2014-07-22 Tungaloy Corporation Coated cubic boron nitride sintered body tool
EP2336383A1 (de) 2009-12-04 2011-06-22 Sandvik Intellectual Property AB Beschichtetes Schneidewerkzeug
JP5190971B2 (ja) * 2009-12-16 2013-04-24 住友電気工業株式会社 被膜、切削工具および被膜の製造方法
RU2542185C2 (ru) 2010-01-11 2015-02-20 Искар Лтд. Режущий инструмент с покрытием
JP2011167793A (ja) * 2010-02-18 2011-09-01 Mitsubishi Materials Corp 表面被覆切削工具
RU2428509C1 (ru) * 2010-04-13 2011-09-10 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2419680C1 (ru) * 2010-04-20 2011-05-27 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
KR101779236B1 (ko) * 2010-04-23 2017-09-18 쎄코 툴스 에이비 금속 기계가공용 pvd 코팅
US8409695B2 (en) 2010-05-28 2013-04-02 Kennametal Inc. Multilayer nitride hard coatings
US8673435B2 (en) * 2010-07-06 2014-03-18 Tungaloy Corporation Coated cBN sintered body tool
DE102010034321B4 (de) 2010-08-09 2017-04-06 Technische Universität Dresden Verfahren zur Herstellung einer Hartstoffbeschichtung auf metallischen, keramischen oder hartmetallischen Bauteilen sowie eine mit dem Verfahren hergestellte Hartstoffbeschichtung
CN103228383B (zh) 2010-11-26 2016-08-03 住友电工硬质合金株式会社 表面被覆烧结体
DE102011117177A1 (de) 2011-10-28 2013-05-02 Oerlikon Trading Ag, Trübbach Verfahren zur Bereitstellung sequenzieller Leistungspulse
DE102011018363A1 (de) 2011-04-20 2012-10-25 Oerlikon Trading Ag, Trübbach Hochleistungszerstäubungsquelle
MX2013012200A (es) 2011-04-20 2014-03-27 Oerlikon Trading Ag Trübbach Metodo de pulverizacion catódica por magnetron de impulso de alta potencia que proporciona la ionizacion mejorada de las particulas obtenidas por pulverización catódica y aparato para su implementacion.
DE102011053372A1 (de) 2011-09-07 2013-03-07 Walter Ag Werkzeug mit chromhaltiger Funktionsschicht
US10458015B2 (en) 2011-12-05 2019-10-29 Oerlikon Surface Solutions Ag, Pfäffikon Reactive sputtering process
DE102012209293B3 (de) 2012-06-01 2013-06-20 Helmholtz-Zentrum Dresden - Rossendorf E.V. Sputterverfahren

Also Published As

Publication number Publication date
JP2016534217A (ja) 2016-11-04
MX2015017033A (es) 2016-10-26
CA2916784C (en) 2018-07-31
PL3017079T5 (pl) 2020-12-28
CA2916784A1 (en) 2015-01-08
BR112015032169A2 (pt) 2017-07-25
KR102178189B1 (ko) 2020-11-13
BR112015032169B1 (pt) 2022-04-19
KR101891900B1 (ko) 2018-09-28
MY187100A (en) 2021-08-31
PL3017079T3 (pl) 2017-09-29
RU2674179C2 (ru) 2018-12-05
KR20170108177A (ko) 2017-09-26
PH12015502753A1 (en) 2016-03-21
MX361325B (es) 2018-11-20
ES2630316T5 (es) 2021-06-18
PH12015502753B1 (en) 2016-03-21
US9840768B2 (en) 2017-12-12
IL243136A (en) 2017-04-30
ES2630316T3 (es) 2017-08-21
BR112015032169A8 (pt) 2018-01-02
US20160177436A1 (en) 2016-06-23
EP3017079B2 (de) 2020-09-09
EP3017079B1 (de) 2017-04-12
EP3017079A1 (de) 2016-05-11
WO2015000581A1 (de) 2015-01-08
HK1219516A1 (zh) 2017-04-07
KR20160029091A (ko) 2016-03-14
CN105392911B (zh) 2018-12-21
PT3017079T (pt) 2017-07-19
JP6122975B2 (ja) 2017-04-26
RU2016102845A (ru) 2017-08-09
RU2016102845A3 (de) 2018-05-24
CN105392911A (zh) 2016-03-09

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