SG10201800620XA - Determining method, measuring apparatus and adhesive tape attaching apparatus - Google Patents

Determining method, measuring apparatus and adhesive tape attaching apparatus

Info

Publication number
SG10201800620XA
SG10201800620XA SG10201800620XA SG10201800620XA SG10201800620XA SG 10201800620X A SG10201800620X A SG 10201800620XA SG 10201800620X A SG10201800620X A SG 10201800620XA SG 10201800620X A SG10201800620X A SG 10201800620XA SG 10201800620X A SG10201800620X A SG 10201800620XA
Authority
SG
Singapore
Prior art keywords
adhesive tape
determining method
tape attaching
measuring apparatus
determining
Prior art date
Application number
SG10201800620XA
Other languages
English (en)
Inventor
Inoue Atsushi
Sakaguchi Hiroyuki
Onishi Kenta
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of SG10201800620XA publication Critical patent/SG10201800620XA/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/12Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/08Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
    • G01N3/14Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces generated by dead weight, e.g. pendulum; generated by springs tension
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/04Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands
    • G01L5/047Specific indicating or recording arrangements, e.g. for remote indication, for indicating overload or underload
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H35/00Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
    • B65H35/0006Article or web delivery apparatus incorporating cutting or line-perforating devices
    • B65H35/002Hand-held or table apparatus
    • B65H35/0026Hand-held or table apparatus for delivering pressure-sensitive adhesive tape
    • B65H35/0033Hand-held or table apparatus for delivering pressure-sensitive adhesive tape and affixing it to a surface
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/04Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/04Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands
    • G01L5/06Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands using mechanical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M99/00Subject matter not provided for in other groups of this subclass
    • G01M99/007Subject matter not provided for in other groups of this subclass by applying a load, e.g. for resistance or wear testing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836Wafer tapes, e.g. grinding or dicing support tapes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0014Type of force applied
    • G01N2203/0016Tensile or compressive
    • G01N2203/0017Tensile
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/003Generation of the force
    • G01N2203/0032Generation of the force using mechanical means
    • G01N2203/0033Weight
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/003Generation of the force
    • G01N2203/0032Generation of the force using mechanical means
    • G01N2203/0039Hammer or pendulum
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/026Specifications of the specimen
    • G01N2203/0262Shape of the specimen
    • G01N2203/0278Thin specimens
    • G01N2203/0282Two dimensional, e.g. tapes, webs, sheets, strips, disks or membranes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Adhesive Tapes (AREA)
  • Coating Apparatus (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
SG10201800620XA 2017-01-31 2018-01-24 Determining method, measuring apparatus and adhesive tape attaching apparatus SG10201800620XA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017015094A JP6779579B2 (ja) 2017-01-31 2017-01-31 判定方法、測定装置、及び粘着テープ貼着装置

Publications (1)

Publication Number Publication Date
SG10201800620XA true SG10201800620XA (en) 2018-08-30

Family

ID=62977156

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201800620XA SG10201800620XA (en) 2017-01-31 2018-01-24 Determining method, measuring apparatus and adhesive tape attaching apparatus

Country Status (7)

Country Link
US (1) US10294062B2 (ko)
JP (1) JP6779579B2 (ko)
KR (1) KR102309434B1 (ko)
CN (1) CN108376654B (ko)
MY (1) MY181955A (ko)
SG (1) SG10201800620XA (ko)
TW (1) TWI753998B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7281873B2 (ja) 2018-05-14 2023-05-26 株式会社ディスコ ウェーハの加工方法
JP7166718B2 (ja) * 2018-10-17 2022-11-08 株式会社ディスコ ウェーハの加工方法
EP3705862B1 (en) 2019-03-05 2023-07-05 Infineon Technologies AG Method and device for monitoring a dicing tape tension
CN112748070B (zh) * 2020-12-25 2022-06-17 福建友谊胶粘带集团有限公司 一种胶带生产用胶带粘度检测系统及其使用方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2752780A (en) * 1952-06-20 1956-07-03 Gershberg Solomon Apparatus for testing adhesive tape
JPH01219609A (ja) * 1988-02-29 1989-09-01 Oji Paper Co Ltd 巻取製品の伸び率測定方法およびその装置
JPH01158948U (ko) * 1988-04-22 1989-11-02
JPH04198381A (ja) * 1990-11-28 1992-07-17 Kanzaki Paper Mfg Co Ltd 粘着シート
JPH05126652A (ja) * 1991-10-31 1993-05-21 Kowa Co 非接触張力測定装置
JPH0712710A (ja) * 1993-06-28 1995-01-17 Resuka:Kk 粘着性試験装置
KR100302311B1 (ko) * 1994-01-03 2001-11-30 조민호 접착성측정용치구장치
KR970048398A (ko) * 1995-12-27 1997-07-29 김태구 양면테이프의 접착시간 측정장치
KR100278137B1 (ko) * 1997-09-04 2001-01-15 가나이 쓰도무 반도체소자의 탑재방법 및 그 시스템, 반도체소자 분리장치 및ic카드의 제조방법
JP4580610B2 (ja) * 2000-04-04 2010-11-17 リンテック株式会社 粘着力測定装置
JP4444619B2 (ja) * 2003-10-10 2010-03-31 リンテック株式会社 マウント装置及びマウント方法
JP4316392B2 (ja) * 2004-01-16 2009-08-19 株式会社リコー 剥離強度計測装置
JP4341431B2 (ja) * 2004-03-04 2009-10-07 凸版印刷株式会社 薄膜付着強度評価方法および装置
JP4880293B2 (ja) * 2005-11-24 2012-02-22 リンテック株式会社 シート貼付装置及び貼付方法
JP4360684B2 (ja) * 2006-02-22 2009-11-11 日東電工株式会社 半導体ウエハの粘着テープ貼付け方法およびこれを用いた装置
KR100795105B1 (ko) * 2006-03-08 2008-01-17 (주) 기배이앤티 점착 테이프 시험장치
JP2009076773A (ja) 2007-09-21 2009-04-09 Disco Abrasive Syst Ltd チャックテーブル機構
JP5203744B2 (ja) * 2008-02-21 2013-06-05 株式会社ディスコ ウエーハの裏面に装着された接着フィルムの破断方法
JP5113599B2 (ja) * 2008-04-08 2013-01-09 リンテック株式会社 シート貼付装置及び貼付方法
WO2009136635A1 (ja) * 2008-05-09 2009-11-12 日東電工株式会社 剥離試験装置、粘着テープの衝撃剥離特性の評価方法、粘着テープ及びモバイル機器
JP5324399B2 (ja) * 2009-11-10 2013-10-23 リンテック株式会社 シート貼付装置及び貼付方法
JP4568374B1 (ja) * 2010-03-15 2010-10-27 大宮工業株式会社 貼付装置及び貼付方法
TWM411562U (en) * 2010-09-16 2011-09-11 Tung-Yuan Tsaur System for measuring peeling force of adhesives
JP5261534B2 (ja) * 2011-05-18 2013-08-14 リンテック株式会社 検査装置
CN103245608A (zh) * 2012-02-14 2013-08-14 鸿富锦精密工业(深圳)有限公司 双面胶粘合力检测装置
US9016136B1 (en) * 2013-03-12 2015-04-28 Shurtape Technologies, Llc Apparatus for testing adhesion of an adhesive tape to a bonding surface under a load applied to the tape
JP6234161B2 (ja) * 2013-10-24 2017-11-22 株式会社ディスコ 粘着テープ貼着装置
JP6178724B2 (ja) * 2013-12-26 2017-08-09 株式会社ディスコ ウェーハの分割方法
KR102544982B1 (ko) * 2016-09-02 2023-06-20 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법

Also Published As

Publication number Publication date
MY181955A (en) 2021-01-15
JP6779579B2 (ja) 2020-11-04
TW201840959A (zh) 2018-11-16
KR102309434B1 (ko) 2021-10-05
CN108376654B (zh) 2023-04-11
CN108376654A (zh) 2018-08-07
US20180215571A1 (en) 2018-08-02
KR20200067239A (ko) 2020-06-12
US10294062B2 (en) 2019-05-21
TWI753998B (zh) 2022-02-01
JP2018123211A (ja) 2018-08-09

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