SG10201604294XA - Table for holding workpiece and processing apparatus with the table - Google Patents

Table for holding workpiece and processing apparatus with the table

Info

Publication number
SG10201604294XA
SG10201604294XA SG10201604294XA SG10201604294XA SG10201604294XA SG 10201604294X A SG10201604294X A SG 10201604294XA SG 10201604294X A SG10201604294X A SG 10201604294XA SG 10201604294X A SG10201604294X A SG 10201604294XA SG 10201604294X A SG10201604294X A SG 10201604294XA
Authority
SG
Singapore
Prior art keywords
processing apparatus
holding workpiece
workpiece
holding
processing
Prior art date
Application number
SG10201604294XA
Other languages
English (en)
Inventor
Naoki Toyomura
Mitsuru Miyazaki
Junji Kunisawa
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10201604294XA publication Critical patent/SG10201604294XA/en

Links

SG10201604294XA 2015-06-01 2016-05-27 Table for holding workpiece and processing apparatus with the table SG10201604294XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015111686 2015-06-01
JP2016096276A JP6719271B2 (ja) 2015-06-01 2016-05-12 処理対象物を保持するためのテーブルおよび該テーブルを有する処理装置

Publications (1)

Publication Number Publication Date
SG10201604294XA true SG10201604294XA (en) 2017-01-27

Family

ID=57746391

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201604294XA SG10201604294XA (en) 2015-06-01 2016-05-27 Table for holding workpiece and processing apparatus with the table

Country Status (3)

Country Link
JP (1) JP6719271B2 (ja)
SG (1) SG10201604294XA (ja)
TW (1) TWI732759B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI634613B (zh) * 2017-12-27 2018-09-01 億力鑫系統科技股份有限公司 Carrier disk
JP7144218B2 (ja) * 2018-07-05 2022-09-29 株式会社荏原製作所 治具、及び治具を用いた設置方法
JP2021016913A (ja) * 2019-07-19 2021-02-15 株式会社ディスコ 加工装置
CN113910072B (zh) * 2021-10-28 2022-11-22 华海清科股份有限公司 吸盘转台和晶圆加工系统
WO2024009775A1 (ja) * 2022-07-04 2024-01-11 東京エレクトロン株式会社 基板処理装置および基板処理方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5399001B2 (ja) * 2008-04-18 2014-01-29 株式会社ディスコ 研磨装置の保持テーブル機構
JP5701551B2 (ja) * 2010-09-22 2015-04-15 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置

Also Published As

Publication number Publication date
TW201714703A (zh) 2017-05-01
JP6719271B2 (ja) 2020-07-08
TWI732759B (zh) 2021-07-11
JP2016221668A (ja) 2016-12-28

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